TW201612083A - Substrate housing container and retainer - Google Patents

Substrate housing container and retainer

Info

Publication number
TW201612083A
TW201612083A TW104122137A TW104122137A TW201612083A TW 201612083 A TW201612083 A TW 201612083A TW 104122137 A TW104122137 A TW 104122137A TW 104122137 A TW104122137 A TW 104122137A TW 201612083 A TW201612083 A TW 201612083A
Authority
TW
Taiwan
Prior art keywords
substrate
container
housing container
retainer
supporting
Prior art date
Application number
TW104122137A
Other languages
Chinese (zh)
Other versions
TWI652211B (en
Inventor
Tadatoshi Inoue
Kazuya Inoue
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Publication of TW201612083A publication Critical patent/TW201612083A/en
Application granted granted Critical
Publication of TWI652211B publication Critical patent/TWI652211B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

Provided is a substrate housing container that improves the supporting force of a substrate in a substrate housing container for housing and supporting a substrate such as a bonded wafer, that safely supports a substrate even when the container is subjected to an impact or vibration, and that is for use within a semiconductor factory or the like. The semiconductor housing container comprises a container main body and a lid that are capable of supporting a substrate. The lid comprises a retainer for supporting the edge section of a substrate. The semiconductor housing container is configured so that when the lid blocks a container main body opening of the container main body and supports a substrate, the normal direction of a flat surface (306) of the retainer that is in contact with the substrate is inclined downward at a predetermined angle when a substrate horizontal/rear direction that passes through the center of the substrate in the thickness direction thereof, that is perpendicular to the thickness direction of the substrate, and that is toward the rear of the substrate housing container is used as a reference.
TW104122137A 2014-07-10 2015-07-08 Substrate storage container and holding member TWI652211B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-142520 2014-07-10
JP2014142520A JP6391333B2 (en) 2014-07-10 2014-07-10 Substrate storage container and retainer

Publications (2)

Publication Number Publication Date
TW201612083A true TW201612083A (en) 2016-04-01
TWI652211B TWI652211B (en) 2019-03-01

Family

ID=55064052

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104122137A TWI652211B (en) 2014-07-10 2015-07-08 Substrate storage container and holding member

Country Status (3)

Country Link
JP (1) JP6391333B2 (en)
TW (1) TWI652211B (en)
WO (1) WO2016006412A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023233554A1 (en) * 2022-05-31 2023-12-07 ミライアル株式会社 Substrate storage container and lid-body-side substrate support part

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5555981A (en) * 1992-05-26 1996-09-17 Empak, Inc. Wafer suspension box
JP4372313B2 (en) * 2000-06-20 2009-11-25 信越ポリマー株式会社 Substrate storage container
JP3938293B2 (en) * 2001-05-30 2007-06-27 信越ポリマー株式会社 Precision substrate storage container and its holding member
JP4728840B2 (en) * 2006-03-02 2011-07-20 ミライアル株式会社 Thin plate container
JP2010199354A (en) * 2009-02-26 2010-09-09 Shin Etsu Polymer Co Ltd Substrate storing container
JP5078042B2 (en) * 2009-06-08 2012-11-21 ゴールド工業株式会社 Precision substrate storage container and manufacturing method thereof
KR20130126620A (en) * 2010-10-19 2013-11-20 엔테그리스, 아이엔씨. Front opening wafer container with wafer cushion

Also Published As

Publication number Publication date
WO2016006412A1 (en) 2016-01-14
TWI652211B (en) 2019-03-01
JP6391333B2 (en) 2018-09-19
JP2016018961A (en) 2016-02-01

Similar Documents

Publication Publication Date Title
USD805856S1 (en) Cup holder
USD745014S1 (en) Electronic device holder and glove
USD778703S1 (en) Tool handle
SG10201810390TA (en) Thermal processing susceptor
PH12018500670A1 (en) Sheet for semiconductor processing
BR112016023838A2 (en) abrasive article including molded abrasive particles
BR112016023880A2 (en) abrasive article including molded abrasive particles
MY181844A (en) Vaporizer assembly
PH12015502227B1 (en) Storage device having three-dimensional elevations
PH12016502138A1 (en) Belt stripper having module inclination
TWD179672S (en) Part of the substrate retaining ring
PH12017550123A1 (en) Film
WO2016116636A8 (en) Support body for a blank
MX2016005062A (en) Headrest electronic device holder.
WO2015116470A3 (en) Paint fixture for shoe portions
EP3488465A4 (en) Processed wafer as top plate of a workpiece carrier in semiconductor and mechanical processing
GB2507900A (en) Portable computing device dock
TW201612083A (en) Substrate housing container and retainer
WO2016187503A8 (en) Method and system for securing a tracking device to a component
MX2017002116A (en) Fiber storage device.
WO2018126098A3 (en) Sample processing systems and methods
WO2018132253A3 (en) Systems and methods for wetting substrates
TW201613020A (en) Semiconductor process carrier
TWD188263S (en) Part of the wafer boat for semiconductor manufacturing equipment
JP2015065010A5 (en)