TWI666722B - Conveyor and large conveyer, conveying method and conveyer unit - Google Patents

Abstract

The invention provides a conveyer with strong adhesion and a conveying method. The following conveyer is used, which includes a stand and a plurality of columnar protrusions arranged on the surface of the stand, and each of the plurality of columnar protrusions has a recess on the top. A large-scale conveyance device is used in which a plurality of the conveyance devices are not superimposed on a flat plate, and the protrusions are arranged on the surface. In addition, a conveying method is used, which uses a large conveyer that does not overlap a plurality of the conveyers on a flat plate, and uses the protrusions as surfaces to arrange the objects to be manufactured.

Description

Conveyor and large conveyer, conveying method and conveyer unit

The present invention relates to a conveyer, a conveying method and a conveying unit. In particular, it relates to a conveyer, a conveying method, and a conveying unit for temporarily conveying an object in a production line or the like.

In a production line, it is known to use a conveyer which conveys a board | substrate, glass, etc. (patent document 1). In this conveyer, rubber is provided on a metal plate. On the other hand, the object is temporarily adhered to the rubber and is transported, and the object is removed from the conveyer at the destination. [Prior Art Literature]

[Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2006-186398

[Problems to be solved by the invention]

However, in this conveyer, the object cannot be held properly due to the weak adsorption force. Therefore, the object of the present application is to provide a conveying device and a conveying method with strong adhesion. [Means for solving problems]

In order to solve the above-mentioned conventional problems, a conveyer is used which includes a stand and a plurality of columnar protrusions arranged on the surface of the stand, and each of the plurality of columnar protrusions has a recess on the top. In addition, a large-sized conveyer is used in which a plurality of the conveyers are not superimposed on a flat plate, and the protrusions are arranged as a surface. Furthermore, a conveyance method is used which uses a large conveyance device in which a plurality of the conveyance devices are not superimposed on a flat plate and the protrusions are arranged on the surface to convey the manufactured object. A transporter unit is used in which a plurality of the aforementioned transporters and one of the aforementioned stands are set as one transporter. [Effect of the invention]

In the transfer tool of the present invention, the object is sufficiently held and can be reliably transferred to the target place.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited by the embodiments.

(Embodiment 1) The conveyance tool 10 of Embodiment 1 is demonstrated using FIG.1 (a)-FIG.1 (d). FIG. 1 (a) is a plan view of the conveyer 10. FIG. 1 (b) is a side view of the conveyer 10 holding the object 16. FIG. 1 (c) is an enlarged plan view of the conveyer 10. FIG. 1 (d) is an enlarged plan view of a portion of the conveyer 10 holding the object 16 in a state where the object 16 is held on the conveyer 10. In addition, in FIG. 1 (d), the object 16 is excluded.

<Structure> The carrier 10 includes a stand 15, a protrusion 11, a recessed portion 13, and a gap 14. The pedestal 15 has a flat plate shape and has a protrusion 11 on one side thereof. The pedestal 15 has a square shape with one side approximately 30 mm square. As one side, a length ranging from 1 cm to 100 cm can be produced. The protrusion 11 is a cylindrical protrusion 11. The diameter of the circle of the protrusion 11 is about 0.5 mm to 2 mm. The height of the protrusion 11 is also about 0.5 mm to 2 mm. The ratio (aspect ratio) of the height of the protrusion 11 to the diameter of the circle is preferably 0.5 to 1.5. It is not limited to a column, and may be a column.

The ratio of the area of the top of the protrusion 11 (occupied area, area density occupied by the portion of the protrusion 11 per unit area in the entire area where the protrusion 11 exists) is preferably 50% or more. It is preferably 60% or more. In order to hold the object 16, as many as possible are better. However, since the protrusions 11 need to be deformed, a plurality of protrusions 11 are provided separately. In order to increase the ratio of the area of the tops of the protrusions 11, the protrusions 11 are arranged in a staggered arrangement. In addition, the protrusion 11 preferably has a cylindrical shape in order to spread uniformly in at least four directions when deformed. Therefore, the ratio of the area of the top of the protrusion 11 should be 95% or less. It is preferably 90% or less. The recessed portion 13 is a space surrounded by the protrusion 11 and the pedestal 15.

The gap 14 is a gap between the protrusions 11. In order to deform the protrusion 11 while holding the object 16, a gap 14 is required. The gap 14 is 0.1 mm or less. The material of the conveyer 10 is preferably a chemically stable fluororubber, which is produced by extrusion molding or casting mold molding.

The fluororubber may also be a fluororubber composition having a structure mainly composed of a structural unit derived from vinylidene fluoride, a structural unit derived from hexafluoropropylene, and a structural unit derived from tetrafluoroethylene. In addition, it can be applied to all fluorine rubbers. It is also possible to use a perfluoroelastomer having a structure mainly composed of a structural unit derived from tetrafluoroethylene or a structural unit derived from perfluoro (alkyl vinyl ester) or perfluoro (alkoxyalkyl vinyl ester). In addition, as the rubber, a fluorine rubber other than the above may be used. Silicone rubber and elastomer can also be used. As long as it can be deformed by pressure at room temperature, it can be used.

<Manufacturing Method> An upper mold having a concave portion corresponding to the shape of the conveyer 10 is produced, and a mold is set on a press. The mold is heated to 180 ° C, and a release agent (fluorine-based, silicon-based, etc.) is applied in order to easily peel the rubber after the rubber is molded. The rubber sheet is cut into an appropriate size, placed on a lower mold, and extruded with an upper mold. The extrusion was set at 180 ° C for 240 seconds. Change the temperature and time settings according to the rubber material. If it is smaller than an appropriate size, it will be in an unvulcanized state, and rubber cannot be molded.

After extrusion, the rubber is carefully peeled from the mold (upper and lower molds) so that the rubber does not break. After peeling, the appearance was confirmed. If there was no problem, the rubber product was placed in an oven and heated at 232 ° C for 10 hours. If the temperature and time are insufficient, there is a concern that the physical properties of the rubber will not appear. Change the temperature and time settings according to the rubber material. After the operation in the oven, the appearance is confirmed. If there are no problems, the product is completed.

In addition, the rubber sheet may not be formed. It can also be a normal forming process. The pedestal 15 and the protrusion 11 are preferably made integrally. This is because the protrusion 11 is deformed by being pressed by the object 16, and is therefore easily broken. Therefore, if the pedestal 15 and the protrusion 11 are integrally formed of one material, good strength can be maintained.

<Holding State> FIG. 1 (b) shows a state where the object 16 is held by the carrier 10. In the conveyer 10, the top of the protrusion 11 is in contact with the target 16 to hold the target 16. The top of the protrusion 11 is adhesive, and the object 16 is adhered and held.

FIG. 1 (c) is an enlarged plan view of the conveyer 10 when the object 16 is not held, and FIG. 1 (d) is an enlarged plan view of the conveyer 10 when the object 16 is held. The top of the protrusion 11 is deformed and diffused by the weight of the object 16 to hold the object 16. Therefore, a gap 14 is provided between the protrusions 11. By further increasing the area of the top of the protrusion 11, it is easier to hold the object 16. Therefore, the protrusions 11 are densely arranged in a plane. In addition, since the protrusion 11 is compressed, deformed, and diffused by the object 16, it is preferable to provide a plurality of non-contact protrusions 11.

The hardness of the conveyer 10 is preferably 20 to 90. It is preferably 60 to 80. Here, the hardness is a value of the type A hardness tester. The hardness of the carrier 10 falls within the above range depending on the ease of deformation of the protrusions 11 and the retention. In the conveyer 10 of Embodiment 1, although the protrusions 11 are densely arranged, they can be deformed. The object 16 can be firmly held in a wide area on the top of the protrusion 11.

(Embodiment 2) The conveyor 20 of Embodiment 2 is demonstrated using FIGS. 2 (a)-2 (c). FIG. 2 (a) is a plan view of the conveyer 20. FIG. 2 (b) is a side view of the conveyer 20. FIG. 2 (c) is a side view of the object 16 held on the carrier 20. Matters not described are the same as those in the first embodiment.

<Structure> The conveyance tool 20 includes a stand 15, a first protrusion 11 a, a second protrusion 11 b, a recessed portion 13, and a gap 14. The pedestal 15 has a flat plate shape, and has a first protrusion 11a and a second protrusion 11b on one surface. The first protrusion 11a is a cylindrical protrusion. It is the same as the protrusion 11 of Embodiment 1. The second protrusion 11b is a cylindrical protrusion. The second protrusion 11b has a smaller cross-sectional area than the first protrusion 11a and has the same height as the first protrusion 11a. The first protrusion 11a is a main protrusion.

The recessed portion 13 is a space surrounded by the first protrusion 11 a, the second protrusion 11 b, and the pedestal 15. The gap 14 is a gap between the first protrusion 11a and the second protrusion 11b. The diameter of the first protrusion 11a is larger than that of the second protrusion 11b. If the protrusions are densely arranged to increase the area occupied by the protrusions, the diameter of the first protrusion 11a is 2.3 times the diameter of the second protrusion 11b. The appearance ratio of the first protrusion 11a is the same as that of the protrusion 11 of the first embodiment, and is about one. Therefore, the second protrusion 11b becomes an elongated protrusion. The first protrusion 11a receives the object 16, and the second protrusion 11b receives it auxiliary. The second protrusion 11b exists for the purpose of improving adhesion and vacuum adsorption.

<Holding State> FIG. 3 (a) is an enlarged plan view of the carrier 20 before the object 16 is held. FIG. 3 (b) is an enlarged plan view of the carrier 20 when the object 16 is held. The object 16 is omitted and shown.

When the object 16 is placed on the first protrusion 11a and the second protrusion 11b, the first protrusion 11a and the second protrusion 11b are compressed, the gap 14 disappears, and the first protrusion 11a and the second protrusion 11b come into contact. In this state, the recessed portion 13 is a space enclosed by the first protrusion 11a, the second protrusion 11b, the pedestal 15 and the object 16. At this time, the space is slightly in a vacuum state, and the object 16 is sucked and held by the transporter 10. That is, the object 16 can be held by the viscosity of the tops of the first protrusions 11 a and the second protrusions 11 b and the vacuum of the recesses 13.

When the object 16 is removed, when the end portion is lifted slightly, a gap 14 is formed, the vacuum state is released, and it is easy to take out. That is, the plurality of recessed portions 13 gradually release the vacuum from the end portion, and the object 16 is easily taken out. The carrier 20 of the second embodiment can hold the object 16 more firmly than the carrier 10 of the first embodiment.

(Embodiment 3) Embodiment 3 is demonstrated using FIG.4 (a)-FIG.4 (c). Matters that are not described are the same as those of the first and second embodiments. Fig. 4 (a) is an enlarged side view of the protrusion 11c of the third embodiment. FIG. 4 (c) is an enlarged plan view of the protrusion 11c. FIG. 4 (b) is an enlarged side view showing a state where the object 16 is held on the protrusion 11c. The protrusion 11c is a protrusion of the conveyance tool of Embodiment 1 or 2.

The protrusion 11c has a cylindrical shape and has a concave portion 41 on the top. The periphery of the concave portion 41 is surrounded by the projecting convex portion 11d. It is not necessary to have a cylindrical shape, as long as it is a columnar shape. The depth of the concave portion 41 is several micrometers, and is 1 to 5 μm. The diameter of the protrusion 11d is about 0.5 mm to 1.5 mm. If the depth of the recessed portion 41 is deep, air will remain between the recessed portion 41 and the object 16, resulting in poor adsorption properties. When the object 16 is held on the protrusion 11c, the protrusion convex portion 11d on the top of the protrusion 11c is deformed, and the side surface of the protrusion 11c is expanded to form a protrusion side portion 11e. At this time, the top of the protrusion 11c serves as a wider surface, and the object 16 can be held. It may not be a cylinder but a prism. The protrusion 11c can be used as a protrusion of the first and second embodiments. Furthermore, it may be used independently regardless of Embodiments 1 and 2. If the protrusions of the third embodiment are used for the protrusions of the first and second embodiments, the object 16 can be held more, which is preferable.

(Embodiment 4) Embodiment 4 is demonstrated using FIG.5 (a) and FIG.5 (b). Matters not described are the same as those in the above-mentioned embodiment. FIG. 5 (a) is a side view showing a state of the holding object 16 of the large-scale conveyance device 50. FIG. 5 (b) is a plan view of the large-scale conveyer 50. If the object 16 becomes larger, the conveyance tools 10 and 20 of the above embodiment can be increased, but it is not good in terms of production problems and costs.

Therefore, in this embodiment, a plurality of conveyers 30 are used. The conveyance tool 30 is any of the conveyance tools of the said embodiment. It is also possible to use a plurality of conveyers. The size of the conveyor 30 is from 10 mm square to 50 mm square, and it can be square, rectangular, diamond, trapezoidal. The large transfer tool 50 includes a transfer table 17 and a transfer tool 30. The transfer stand 17 is a stand for carrying, such as a metal plate. The conveyance tool 30 is any one or a plurality of types of conveyance tools of the above-mentioned embodiment. The large transfer tool 50 has a plurality of transfer tools 30 arranged on its surface. The object 16 is placed on the plurality of transfer devices 30, and the object 16 is held.

The conveyance tool 30 is preferably arranged uniformly with respect to the object 16. However, the conveyance tool 30 may be arrange | positioned only in the peripheral part, or may be arrange | positioned only in the edge part. The object 16 is held as a whole. The transfer tool 30 is adhered and fixed to the transfer table 17.

As a result, a large-sized conveyance tool 50 can be realized without increasing the conveyance tool 30. In addition, the carrier unit 51 shown in the top view of FIG. 5 (c) and the side view of FIG. 5 (d) can be used. The transporter unit 51 includes a plurality of transporters 30. This is when the conveyance tool 30 is produced, and the pedestal 15 is shared, and a plurality of conveyance tools 30 are produced. It is supplied from the transporter unit 51, cut along the mark 52, and used as a plurality of transporters 30. The mark 52 may be set using a mold when the conveyer unit 51 is manufactured. The mark 52 may not be present. Among the transporter units 51, the transporter 30 is a flat surface having only the pedestal 15 without protrusions.

The transfer tool 30 may be directly fixed to the transfer table 17 by an adhesive material or the like. However, it is preferable that one end of the transfer tool 30 is adhered to the intermediate body with an adhesive material, and the intermediate body is physically fixed to the transfer table 17 with a screw or the like. The conveyance tool 30 is periodically consumed and replaced. However, since the conveyance table 17 is used for a long period of time, in order to enable long-term use, it is preferable not to directly use an adhesive material or the like for the conveyance table 17.

(As a whole) Embodiments 1 to 4 described above can be combined. The object 16 is not limited to a glass panel, a semiconductor wafer, a lens, a wafer, and the like. [Industrial availability]

The transfer tool and the large transfer tool of the present invention can be used in the manufacture of devices such as semiconductors, displays, and the like when transferring objects. It can also be used in the manufacture of other products.

10, 20, 30: Conveyor 11, 11c: protrusion 11a: first protrusion 11b: second protrusion 11d: protrusion convex portion 11e: protrusion side portion 13, 41: recessed portion 14: gap 15: pedestal 16: object 17: Transfer table 30: Transfer tool 50: Large transfer tool 51: Transfer device unit 52: Marker

Fig. 1 (a) is a plan view of the conveyer of Embodiment 1, (b) is a side view of the conveyer of Embodiment 1 holding an object, (c) is an enlarged plan view of the conveyer of Embodiment 1, (d) The enlarged top view of the conveyance tool of Embodiment 1 in the state which held the object on the conveyance tool of Embodiment 1. FIG. 2 is a plan view of the conveyer of the second embodiment, (b) is a side view of the conveyer of the second embodiment, and (c) is a side view of the object held on the conveyer of the second embodiment. FIG. 3 (a) is an enlarged plan view of the conveyer of Embodiment 2 before holding the object, and (b) is an enlarged plan view of the conveyer of Embodiment 2 when the object is held. Fig. 4 (a) is an enlarged side view of a protrusion of the conveyer of Embodiment 3, (b) is an enlarged side view of a case where an object is held on the protrusion of the conveyer of Embodiment 3, and (c) is an embodiment An enlarged plan view of the protrusions of the 3 conveyer. Fig. 5 (a) is a side view of a state where the large-scale conveyer of the fourth embodiment holds an object, (b) is a plan view of the large-scale conveyer of the fourth embodiment, and (c) is a plan view of the conveyer unit of the fourth embodiment (D) is a side view of the conveyer unit of Embodiment 4.

Claims (10)

A conveyer comprising: a pedestal and a plurality of columnar protrusions arranged on the surface of the pedestal, the plurality of columnar protrusions are solid and each has a recess at the top, and are deformed by pressure from the respective top It spreads evenly in the lateral direction. The recessed portion is used for adsorption, and the plurality of columnar protrusions are deformed by pressure from the top, and are in contact with the columnar protrusions in different directions. A conveyer includes: a pedestal and a plurality of columnar protrusions arranged on the surface of the pedestal, the plurality of columnar protrusions are solid and each has a recess on the top, and the plurality of columnar protrusions come from the top of the pedestal. It deforms under pressure, contacts between the plurality of columnar protrusions, and forms a concave portion surrounded by the plurality of columnar protrusions for adsorption by the pressure. A conveyer comprising: a pedestal and a plurality of columnar protrusions arranged on the surface of the pedestal, each of the plurality of columnar protrusions has a recess on the top, and the plurality of columnar protrusions include the same height and a cross-sectional area. The plurality of first protrusions and second protrusions are different, and the plurality of first protrusions and second protrusions are respectively deformed by pressure from the top thereof. The first protrusions are in contact with the four second protrusions, and the second protrusions are in contact with each other. The protrusions are in contact with the four first protrusions. For example, the conveying device of the third scope of the patent application includes the rows of the first protrusions and the rows of the second protrusions, and the plurality of columnar protrusions are staggered. For example, the conveying device of the first patent application range, wherein the plurality of columnar protrusions are cylindrical. A method for transporting an object, which holds the object on a transport tool as described in any one of items 1 to 5 of the above-mentioned patent application scope, and transports the object. A large-scale conveying device comprising a plurality of conveying devices as described in any one of items 1 to 5 of the above-mentioned patent application range, which are not superimposed on a conveying table and are arranged with the protrusions as a surface. For example, in the case of a large-scale conveying device in the scope of patent application No. 7, the above-mentioned conveying device is adhered to the intermediate body and physically maintained on the intermediate body. A conveying method using a large conveying device configured to convey a plurality of conveying devices as described in any one of items 1 to 5 of the above-mentioned patent application scope, without overlapping them on a conveying table, and using the protrusions as surfaces. Object of manufacture. A conveyer unit is a conveyer unit that uses a plurality of conveyers as described in any one of items 1 to 5 of the above-mentioned patent application scope to share one of the above-mentioned pedestals.