JP2019102509A - Transport tool, transport method, and transport tool unit - Google Patents

Transport tool, transport method, and transport tool unit Download PDF

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Publication number
JP2019102509A
JP2019102509A JP2017228627A JP2017228627A JP2019102509A JP 2019102509 A JP2019102509 A JP 2019102509A JP 2017228627 A JP2017228627 A JP 2017228627A JP 2017228627 A JP2017228627 A JP 2017228627A JP 2019102509 A JP2019102509 A JP 2019102509A
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Japan
Prior art keywords
protrusion
transfer tool
conveyance
transport
tool
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JP2017228627A
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Japanese (ja)
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JP6353969B1 (en
Inventor
豪彦 植村
Takehiko Uemura
豪彦 植村
有治 小野寺
Yuji Onodera
有治 小野寺
崇之 宮原
Takayuki Miyahara
崇之 宮原
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UMI CO Ltd
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UMI CO Ltd
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Priority to JP2017228627A priority Critical patent/JP6353969B1/en
Application granted granted Critical
Publication of JP6353969B1 publication Critical patent/JP6353969B1/en
Priority to TW107127964A priority patent/TWI666722B/en
Priority to KR1020180097831A priority patent/KR102170518B1/en
Priority to CN201811098681.4A priority patent/CN109835714B/en
Publication of JP2019102509A publication Critical patent/JP2019102509A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Packaging Frangible Articles (AREA)
  • Belt Conveyors (AREA)

Abstract

To provide a highly adhesive transport tool and a transport method.SOLUTION: A transport tool is used that includes a pedestal and a plurality of columnar protrusions disposed on the surface of the pedestal, and in which each of the plurality of columnar protrusions has one recess at the top. A large-sized plurality of transfer tools is used without being stacked on a plate, in which the protrusions are disposed on the surface. A transport method of transporting a target object to be manufactured is used by using a large-sized plurality of transport tools without stacking the transfer tools on the plate, in which the protrusions are disposed on the surface.SELECTED DRAWING: Figure 1

Description

本発明は、搬送具と搬送方法と搬送ユニットに関する。特に、製造ライン等で一時的に対象物を搬送するための搬送具と搬送方法と搬送ユニットに関する。   The present invention relates to a transport tool, a transport method, and a transport unit. In particular, the present invention relates to a transfer tool, a transfer method, and a transfer unit for temporarily transferring an object on a manufacturing line or the like.

製造ラインでは、基板やガラスなどが搬送する搬送具が、従来から使用されている(特許文献1)。この搬送具では、金属板上にゴムが設けられている。ゴムに、対象物が一時的に粘着され搬送され、目的地で対象物が搬送具から外される。 In the manufacturing line, a transfer tool for transferring a substrate, glass or the like is conventionally used (Patent Document 1). In this transport tool, rubber is provided on the metal plate. The object is temporarily adhered to the rubber and conveyed, and the object is removed from the carrier at the destination.

特開2006−186398号公報JP 2006-186398 A

しかし、この搬送具では、吸着力が弱く適切に対象物を保持できない。よって、本願課題は、粘着力の強い搬送具と搬送方法を提供することである。 However, with this transport tool, the suction force is weak and the object can not be properly held. Therefore, an object of the present invention is to provide a highly adhesive carrier and a carrier method.

前記従来の課題を解決するために、台座と、前記台座の表面に配置された複数の柱状の突起と、を含み、前記複数の柱状の突起は、それぞれ頂部に1つの凹部を有する搬送具を用いる。
また、上記搬送具を、複数個、プレート上に重ねずに、前記突起を表面として配置した大型搬送具を用いる。
さらに、上記搬送具を、複数個、プレート上に重ねずに、前記突起を表面として配置した大型搬送具を用いて、製造の対象物を搬送する搬送方法を用いる。
上記搬送具の複数個を、上記台座を1つとして、1つの搬送具とした搬送具ユニットを用いる。
In order to solve the above-described conventional problems, a carrier includes a pedestal and a plurality of columnar protrusions disposed on the surface of the pedestal, and the plurality of columnar protrusions each have a recess at the top. Use.
Moreover, the large sized conveyance tool which has arrange | positioned the said protrusion as the surface is used, without superimposing a plurality of said conveyance tools on a plate.
Furthermore, the conveyance method which conveys the target object of manufacture is used using the large sized conveyance tool which arrange | positions the said protrusion as the surface, without superimposing a plurality of said conveyance tools on a plate.
A transport tool unit is used, in which a plurality of the transport tools are one pedestal and one pedestal.

本発明の搬送具では、対象物を十分に保持し、目的の場所まで確実に搬送できる。   In the transfer tool of the present invention, the object can be sufficiently held and can be reliably transferred to the target location.

(a)実施の形態1の搬送具の平面図、(b)対象物を保持した実施の形態1の搬送具の側面図、(c)実施の形態1の搬送具の拡大平面図、(d)実施の形態1の搬送具に対象物を保持させた状態での実施の形態1の搬送具の拡大平面図(A) a plan view of the transport tool of the first embodiment, (b) a side view of the transport tool of the first embodiment holding an object, (c) an enlarged plan view of the transport tool of the first embodiment, (d) ) An enlarged plan view of the transfer tool according to the first embodiment in a state in which the transfer tool according to the first embodiment holds an object 実施の形態2の搬送具の平面図、(b)実施の形態2の搬送具の側面図、(c)実施の形態2の搬送具に対象物を保持させた側面図The top view of the conveyance tool of Embodiment 2, (b) the side view of the conveyance tool of Embodiment 2, (c) the side view which made the conveyance tool of Embodiment 2 hold an object (a)対象物を保持する前の実施の形態2の搬送具の拡大平面図、(b)対象物を保持中の実施の形態2の搬送具の拡大平面図(A) An enlarged plan view of the transfer tool according to the second embodiment before holding an object, (b) an enlarged plan view of the transfer tool according to the second embodiment while holding an object (a)実施の形態3の突起の拡大側面図、(b)実施の形態3の突起上に対象物が保持された場合の拡大側面図、(c)実施の形態3の突起の拡大平面図(A) An enlarged side view of the protrusion of the third embodiment, (b) an enlarged side view when the object is held on the protrusion of the third embodiment, (c) an enlarged plan view of the protrusion of the third embodiment (a)実施の形態4の大型搬送具の対象物を保持しているところの側面図、(b)実施の形態4の大型搬送具の平面図、(c)実施の形態4の搬送具ユニットの平面図、(d)実施の形態4の搬送具ユニットの側面図(A) Side view of holding the object of the large-sized transfer tool according to the fourth embodiment, (b) a plan view of the large-size transfer tool according to the fourth embodiment, (c) Transfer tool unit according to the fourth embodiment (D) side view of the carrier unit of the fourth embodiment

以下本発明の実施の形態について、図面を参照しながら説明する。なお、この実施の形態によって本発明が限定されるものではない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited by the embodiment.

(実施の形態1)
図1(a)〜図1(d)を用いて、実施の形態1の搬送具10を説明する。図1(a)は、搬送具10の平面図である。図1(b)は、対象物16を保持した搬送具10の側面図である。図1(c)は、搬送具10の拡大平面図である。図1(d)は、搬送具10に対象物16を保持させた状態での搬送具10の拡大平面図である。対象物16を除いて表示されている。
Embodiment 1
The conveyance tool 10 of Embodiment 1 is demonstrated using Fig.1 (a)-FIG.1 (d). FIG. 1A is a plan view of the carrier 10. FIG. 1 (b) is a side view of the carrier 10 holding the object 16. FIG. 1 (c) is an enlarged plan view of the carrier 10. FIG. 1D is an enlarged plan view of the transport tool 10 in a state in which the transport tool 10 holds an object 16. It is displayed except for the object 16.

<構造>
搬送具10は、台座15と突起11と凹部13と隙間14とを含む。
台座15は、平板状で、一方の面に突起11を有する。台座15は、約30mm角の正方形形状である。1cm〜100cmまで作製できる。
突起11は、円柱状の突起である。円の直径は、約0.5mm〜2mmである。高さも、約0.5mm〜2mmである。円の直径に対する高さの比(アスペクト比)は、0.5から1.5が好ましい。円柱に限られず柱状ならよい。
<Structure>
The carrier 10 includes a pedestal 15, a protrusion 11, a recess 13 and a gap 14.
The pedestal 15 is flat and has a protrusion 11 on one side. The pedestal 15 has a square shape of about 30 mm square. It can be made up to 1 cm to 100 cm.
The protrusion 11 is a cylindrical protrusion. The diameter of the circle is about 0.5 mm to 2 mm. The height is also about 0.5 mm to 2 mm. The ratio of height to diameter of the circle (aspect ratio) is preferably 0.5 to 1.5. It is not limited to a cylinder, but may be a column.

突起11の頂部の面積の割合(占有面積、突起11が存在する領域での単位面積あたりの面積密度)は50%以上がよい。60%以上が好ましい。対象物16を保持するため、多いほどよい。ただし、突起11は変形する必要があるので、それぞれ独立した複数の突起11としている。頂部の面積の割合を増やすため、突起11は、千鳥配列としている。また、突起11は、変形した時に均等に広がるように円柱形状が好ましい。そのため、頂部の面積の割合は、95%以下がよい。90%以下が好ましい。
凹部13は、突起11と台座15とで囲まれた空間である。
The percentage of the area of the top of the protrusion 11 (occupied area, area density per unit area in the region where the protrusion 11 is present) is preferably 50% or more. 60% or more is preferable. In order to hold the object 16, the more the better. However, since the projections 11 need to be deformed, they are provided as a plurality of independent projections 11 respectively. In order to increase the proportion of the top area, the protrusions 11 are arranged in a staggered arrangement. The projections 11 preferably have a cylindrical shape so as to spread evenly when deformed. Therefore, the percentage of the area of the top is preferably 95% or less. 90% or less is preferable.
The recess 13 is a space surrounded by the protrusion 11 and the pedestal 15.

隙間14は、突起11間の隙間である。突起11が、対象物16を保持した時、変形できるように、隙間14が必要である。隙間14は、0.1mm以下である。
搬送具10は、材質が、化学的に安定なフッ素ゴムが好ましく、プレス成型もしくは注型成型で作製される。
The gap 14 is a gap between the protrusions 11. A gap 14 is necessary so that the projection 11 can deform when holding the object 16. The clearance 14 is 0.1 mm or less.
The carrier tool 10 is preferably made of a chemically stable fluororubber, and is manufactured by press molding or cast molding.

フッ素ゴムとしては、フッ化ビニリデン由来の構成単位、ヘキサフルオロプロピレンの構成単位、および、テトラフルオロエチレン由来の構成単位を主とした構成をもつフッ素ゴム組成物も利用できる。なお、フッ素ゴム全般に適応できる。テトラフルオロエチレン由来の構成単位、パーフルオロ(アルキルビニルエーテル)又は、パーフルオロ(アルコキシアルキルビニルエーテル)由来の構成単位を主とした構成を含有するパーフルオロエラストマーも利用できる。
また、ゴムとして、上記以外のフッ素ゴムも使用できる。シリコンゴム、エラストマーも使用できる。室温で、加圧で変形できるものなら使用できる。
As the fluororubber, a fluororubber composition having a constitution mainly composed of a constitutional unit derived from vinylidene fluoride, a constitutional unit of hexafluoropropylene, and a constitutional unit derived from tetrafluoroethylene can also be used. In addition, it can apply to fluororubber in general. It is also possible to use a perfluoroelastomer containing a constitution mainly composed of a constituent unit derived from tetrafluoroethylene, a constituent unit derived from perfluoro (alkyl vinyl ether) or perfluoro (alkoxy alkyl vinyl ether).
Moreover, fluororubber other than the above can also be used as rubber. Silicone rubber and elastomers can also be used. Any material that can deform under pressure at room temperature can be used.

<製造方法>
搬送具10の形状に対応する凹部を施した金型を作成し、プレス機に金型を設置する。金型を180℃まで熱しておき、ゴム成型後にゴムが剥がれやすくするよう離型剤(フッ素系、シリコン系など)を塗布する。
ゴムシートを適切なサイズにカットし下型に置きプレスを行う。プレスは180℃、240秒で設定する。ゴムの材質により温度・時間は設定を変える。適切なサイズより少ないようであれば未加硫状態となりゴムが成型できない。
<Manufacturing method>
A mold provided with a recess corresponding to the shape of the transfer tool 10 is created, and the mold is installed in a press. The mold is heated to 180 ° C., and a release agent (fluorine-based, silicon-based, etc.) is applied to facilitate peeling of the rubber after rubber molding.
Cut the rubber sheet to an appropriate size, place it in the lower mold and press it. The press is set at 180 ° C. for 240 seconds. The temperature and time changes depending on the rubber material. If the size is smaller than the appropriate size, it becomes unvulcanized and the rubber can not be molded.

プレス後、ゴムがちぎれないよう丁寧に金型からゴムを剥がす。剥がし終わった後、外観確認をして問題なければそのゴム製品をオーブンにいれ232℃、10時間熱を加える。温度・時間が少ないとゴムの物性が出ない恐れがある。ゴムの材質により温度・時間は設定を変える。オーブンでの作業後、外観確認をして問題なければ製品の完成である。   After pressing, carefully remove the rubber from the mold so that it does not break. After peeling off, the appearance of the product is checked, and if no problem is encountered, the rubber product is put in an oven and heated at 232 ° C. for 10 hours. If the temperature and time are short, the physical properties of the rubber may not be obtained. The temperature and time changes depending on the rubber material. After working in the oven, if there is no problem with the appearance check, the product is finished.

なお、ゴムシートの成形でなくともよい。通常の成形加工でもよい。台座15と突起11は一体で作製した方が好ましい。なぜなら、突起11は、対象物16により圧を受け、変形するので、破損しやすい。そのため、台座15と突起11とは、1つの材料で形成される方が、強度的によい。   In addition, it is not necessary to form the rubber sheet. It may be a normal molding process. It is preferable that the pedestal 15 and the projection 11 be integrally manufactured. The reason is that the projection 11 is susceptible to breakage because it is deformed by pressure from the object 16. Therefore, the pedestal 15 and the projection 11 are preferably made of one material in terms of strength.

<保持状態>
図1(b)は、搬送具10で対象物16を保持している状態を示す。搬送具10では、突起11の頂部で対象物16と接し、対象物16を保持する。突起11の頂部には粘着性があり、対象物16を粘着保持する。
<Retention state>
FIG. 1B shows a state in which the object 16 is held by the transfer tool 10. In the transport tool 10, the top of the projection 11 contacts the object 16 and holds the object 16. The top of the projection 11 is sticky and holds the object 16 sticky.

図1(c)は、対象物16を保持していない時の搬送具10の拡大平面であり、図1(d)は、対象物16を保持している時の搬送具10の拡大平面である。
突起11の頂部は、対象物16の重さで変形し、広がり、対象物16を保持する。このため、突起11間には隙間14が設けられている。より突起11の頂部の面積を増やすことで対象物16をより保持しやすい。そのため、突起11を平面内で密に配置している。
なお、突起11は、対象物16により、圧縮変形し広がるので、複数の非接触の突起11が好ましい。
FIG. 1 (c) is an enlarged plane of the carrier 10 when the object 16 is not held, and FIG. 1 (d) is an enlarged plane of the carrier 10 when the object 16 is held. is there.
The top of the projection 11 deforms and spreads with the weight of the object 16 and holds the object 16. For this reason, a gap 14 is provided between the protrusions 11. It is easier to hold the object 16 by increasing the area of the top of the projection 11. Therefore, the protrusions 11 are densely arranged in a plane.
In addition, since the projections 11 are compressed and deformed by the object 16, the plurality of non-contact projections 11 are preferable.

搬送具10の硬さは、20〜90がよい。好ましくは、60〜80が好ましい。ここで、硬さは、デユロメータータイプAでの値である。搬送具10の硬さは、突起11の変形のしやすさ、保持性から上記範囲となる。   The hardness of the transfer tool 10 is preferably 20-90. Preferably, 60 to 80 is preferred. Here, the hardness is the value of the dullometer type A. The hardness of the transfer tool 10 is in the above range from the ease of deformation of the protrusion 11 and the holding property.

(実施の形態2)
図2(a)〜図2(c)を用いて、実施の形態2の搬送具20を説明する。図2(a)は、搬送具20の平面図である。図2(b)は、搬送具20の側面図である。図2(c)は、搬送具20に対象物16を保持させた側面図である。記載しない事項は実施の形態1と同様である。
Second Embodiment
The conveyance tool 20 of Embodiment 2 is demonstrated using Fig.2 (a)-FIG.2 (c). FIG. 2A is a plan view of the carrier 20. FIG. FIG. 2 (b) is a side view of the carrier 20. FIG. 2C is a side view in which the transport tool 20 holds the object 16. Items not described are the same as in the first embodiment.

<構造>
搬送具20は、台座15と第1突起11aと第2突起11bと凹部13と隙間14とを含む。
台座15は、平板状で、一方の面に第1突起11aと第2突起11bとを有する。
第1突起11aは、円柱状の突起である。実施の形態1の突起11と同様である。
第2突起11bは、円柱状の突起である。第1突起11aより、断面積が小さく、第1突起11aと同じ高さである。第1突起11aがメインの突起である。
<Structure>
The transfer tool 20 includes a pedestal 15, a first protrusion 11 a, a second protrusion 11 b, a recess 13, and a gap 14.
The pedestal 15 is flat and has a first protrusion 11 a and a second protrusion 11 b on one surface.
The first protrusion 11 a is a cylindrical protrusion. This is the same as the protrusion 11 of the first embodiment.
The second protrusion 11 b is a cylindrical protrusion. The cross-sectional area is smaller than that of the first projection 11a, and is the same height as the first projection 11a. The first protrusion 11 a is a main protrusion.

凹部13は、第1突起11aと第2突起11bと台座15とで囲まれた空間である。
隙間14は、第1突起11aと第2突起11bとの間の隙間である。
第1突起11aの直径は、第2突起11bより大きい。突起の占有面積を増やすため、密に並べると、第1突起11aの直径は、第2突起11bの2.3倍までである。
なお、第1突起11aのアスペクト比は、実施の形態1の突起11と同様で1前後である。そのため、第2突起11bは、細長い突起となる。第1突起11aが対象物16を受け止め、第2突起11bは補助的に受け止める。第2突起11bは、粘着性のアップ、真空吸着性のために存在する。
The recess 13 is a space surrounded by the first protrusion 11 a, the second protrusion 11 b, and the pedestal 15.
The gap 14 is a gap between the first protrusion 11 a and the second protrusion 11 b.
The diameter of the first protrusion 11a is larger than that of the second protrusion 11b. In order to increase the occupied area of the projections, the diameter of the first projections 11a is up to 2.3 times that of the second projections 11b when closely arranged.
The aspect ratio of the first protrusion 11 a is approximately 1 as in the case of the protrusion 11 of the first embodiment. Therefore, the second protrusion 11 b is an elongated protrusion. The first protrusion 11 a receives the object 16, and the second protrusion 11 b additionally receives it. The second protrusions 11 b are present for increasing the tackiness and vacuum adsorption.

<保持状態>
図3(a)は、対象物16を保持する前の搬送具20の拡大平面図である。
図3(b)は、対象物16を保持中の搬送具20の拡大平面図である。対象物16を省略してあらわされている。
<Retention state>
FIG. 3A is an enlarged plan view of the transfer tool 20 before holding the object 16.
FIG. 3 (b) is an enlarged plan view of the carrier 20 while holding the object 16. The object 16 is omitted.

対象物16が、第1突起11aと第2突起11b上に乗せられた時、第1突起11aと第2突起11bとは、圧縮され、隙間14は無くなり、第1突起11aと第2突起11bとが接触する。この状態で、凹部13は、第1突起11aと第2突起11bと台座15と対象物16とで密閉された空間となる。この時、この空間は、少し真空状態となり、対象物16を搬送具10により吸着、保持する。
つまり、第1突起11aと第2突起11bの頂部の粘性と凹部13の真空とで、対象物16を保持できる。
When the object 16 is placed on the first protrusion 11a and the second protrusion 11b, the first protrusion 11a and the second protrusion 11b are compressed, the gap 14 disappears, and the first protrusion 11a and the second protrusion 11b And contact. In this state, the recess 13 is a space sealed by the first protrusion 11 a, the second protrusion 11 b, the pedestal 15, and the object 16. At this time, this space is slightly evacuated, and the object 16 is adsorbed and held by the carrier 10.
That is, the object 16 can be held by the viscosity of the top of the first protrusion 11 a and the second protrusion 11 b and the vacuum of the recess 13.

対象物16を取り外す時に、少し端部を持ち上げると、すき間14ができ、真空状態が解除され、取り出しやすい。つまり、複数の凹部13が、端部から徐々に、その真空が解除され、対象物16を取り出しやすい。   When the object 16 is removed, raising the end a little will create a gap 14 which will release the vacuum and facilitate removal. That is, the vacuum is gradually released from the end of the plurality of recesses 13, and the object 16 can be easily removed.

(実施の形態3)
図4(a)〜図4(c)を用いて、実施の形態3を説明する。説明しない事項は、実施の形態1,2と同様である。
図4(a)は、実施の形態3の突起11cの拡大側面図である。図4(c)は、突起11cの拡大平面図である。図4(b)は、突起11c上に対象物16が保持された場合の拡大側面図である。突起11cは、実施の形態1または2の搬送具の突起である。
Third Embodiment
The third embodiment will be described with reference to FIGS. 4 (a) to 4 (c). Matters not described are the same as in the first and second embodiments.
FIG. 4A is an enlarged side view of the protrusion 11c of the third embodiment. FIG. 4C is an enlarged plan view of the protrusion 11c. FIG. 4B is an enlarged side view of the case where the object 16 is held on the protrusion 11c. The protrusion 11 c is a protrusion of the carrier according to the first or second embodiment.

突起11cは、円柱形状で頂部に1つの凹部41を有する。凹部41の周囲は、突起凸部11dで囲まれる。円柱形状でなくとも柱状であればよい。凹部41の深さは、数ミクロン、1〜5μである。突起11dの直径は、約0.5mm〜1.5mmである。凹部41の深さが、深いと、空気が、凹部41と対象物16間に残り、吸着性がよくない。
突起11c上に対象物16が保持されると、突起11cは、頂部の突起凸部11dが変形し、突起11cの側面が膨らみ、突起側部11eができる。この時、突起11cの頂部は、より広い面として、対象物16を保持できる。円柱でなく角柱でもよい。
突起11cは、実施の形態1,2の突起として使用できる。さらに、実施の形態1,2とは無関係に単独で使用してもよい。
The protrusion 11c has a cylindrical shape and has one recess 41 at the top. The periphery of the recess 41 is surrounded by the protrusion 11 d. Even if it is not cylindrical, it may be columnar. The depth of the recess 41 is several microns, 1 to 5 μ. The diameter of the protrusion 11 d is about 0.5 mm to 1.5 mm. When the depth of the recess 41 is deep, air remains between the recess 41 and the object 16 and the adsorptivity is not good.
When the object 16 is held on the protrusion 11c, the protrusion 11d on the top of the protrusion 11c is deformed, and the side surface of the protrusion 11c is expanded to form a protrusion side 11e. At this time, the top of the projection 11 c can hold the object 16 as a wider surface. It may be a prism instead of a cylinder.
The protrusion 11c can be used as the protrusion of the first and second embodiments. Furthermore, they may be used independently of the first and second embodiments.

(実施の形態4)
実施の形態4を図5(a)と図5(b)で説明する。記載しない事項は、上記の実施の形態と同様である。
図5(a)は、大型搬送具50の対象物16を保持しているところの側面図である。
図5(b)は、大型搬送具50の平面図である。
対象物16が大きくなると、上記実施の形態の搬送具10,20を大きくしてもよいが、作製上の問題、コスト面から好ましくない。
Embodiment 4
The fourth embodiment will be described with reference to FIGS. 5 (a) and 5 (b). Matters that are not described are the same as in the above embodiment.
FIG. 5A is a side view of the large-sized transfer tool 50 where the object 16 is held.
FIG. 5 (b) is a plan view of the large-sized transfer tool 50.
When the object 16 becomes large, the transport tools 10 and 20 of the above-described embodiment may be enlarged, but this is not preferable in terms of problems in production and cost.

そこで、この実施の形態では、複数の搬送具30を用いる。搬送具30は、上記実施の形態の搬送具のいずれかである。複数種類の搬送具を用いてもよい。搬送具30の大きさは、10mm角〜50mm角の面積で正方形、長方形、ひし形、台形でもよい。
大型搬送具50は、搬送台17と搬送具30とを含む。
搬送台17は、金属板などで運搬用の台座である。
搬送具30は、上記実施の形態の搬送具のいずれか1つまたは複数である。
大型搬送具50は、その表面に、複数の搬送具30を配置されている。複数の搬送具30上に対象物16が乗り、対象物16が保持されている。
Therefore, in this embodiment, a plurality of transport tools 30 are used. The transfer tool 30 is any of the transfer tools of the above embodiments. A plurality of types of transport tools may be used. The size of the transfer tool 30 may be a square, a rectangle, a rhombus, or a trapezoid in an area of 10 mm square to 50 mm square.
The large-sized transfer tool 50 includes the transfer stand 17 and the transfer tool 30.
The transport stand 17 is a pedestal for transport with a metal plate or the like.
The transfer tool 30 is any one or more of the transfer tools of the above embodiments.
The large-sized transfer tool 50 has a plurality of transfer tools 30 arranged on its surface. The object 16 rides on a plurality of transport tools 30 and the object 16 is held.

搬送具30は、対象物16に対して、均等に配置されるのが好ましい。ただし、搬送具30を、周辺部のみ、端部部のみに配置してもよい。全体として対象物16とを保持する。搬送具30は、搬送台17に接着固定されている。   It is preferable that the transfer tool 30 be evenly disposed with respect to the object 16. However, the transfer tool 30 may be disposed only at the peripheral portion and only at the end portion. It holds the object 16 as a whole. The carrier 30 is adhesively fixed to the carrier 17.

結果、搬送具30を大きくしなくとも、大型搬送具50が実現できる。
また、図5(c)の平面図、図5(d)の側面図で示す搬送具ユニット51を用いることができる。搬送具ユニット51は、搬送具30を複数有する。これは、搬送具30を作製する時に、台座15を共通にして複数の搬送具30を作製したものである。搬送具ユニット51で供給し、マーク52に沿ってカットして、複数の搬送具30として利用するものである。マーク52は、搬送具ユニット51の製造時に金型により設けることができる。マーク52は無くともよい。搬送具ユニット51において、搬送具30間は、突起のない台座15のみの平面である。
As a result, the large-sized transfer tool 50 can be realized without increasing the size of the transfer tool 30.
Moreover, the transfer tool unit 51 shown by the top view of FIG.5 (c) and the side view of FIG.5 (d) can be used. The carrier unit 51 has a plurality of carriers 30. In this case, when the carrier 30 is manufactured, the plurality of carriers 30 are manufactured with the pedestal 15 in common. The material is supplied by the carrier unit 51 and cut along the marks 52 to be used as the plurality of carriers 30. The mark 52 can be provided by a mold when the carrier unit 51 is manufactured. The mark 52 may not be present. In the transfer tool unit 51, the space between the transfer tools 30 is a flat surface of only the pedestal 15 without a protrusion.

搬送具30は、直接、搬送台17に接着材などで固定することができる。しかし、搬送具30を一端、中間体に接着材で貼り付け、その中間体をネジなど物理的に搬送台17に固定するのが好ましい。搬送具30は定期的に、消耗し交換されるが、搬送台17は、長期間使用されるので、長期間使用できるように、搬送台17に接着材などを直接使用しないのが好ましい。   The transfer tool 30 can be directly fixed to the transfer stand 17 with an adhesive or the like. However, it is preferable that one end of the carrier tool 30 be attached to the intermediate body with an adhesive and that the intermediate body be physically fixed to the carrier table 17 such as a screw. Although the transfer tool 30 is consumed and replaced regularly, since the transfer table 17 is used for a long time, it is preferable not to use an adhesive or the like directly on the transfer table 17 so that it can be used for a long time.

(全体として)
上記実施の形態1〜4は組み合わせできる。
対象物16は、ガラスパネル、半導体チップ、レンズ、ウエハーなどであり、限定されない。
(as a whole)
The first to fourth embodiments can be combined.
The object 16 is a glass panel, a semiconductor chip, a lens, a wafer, etc., and is not limited.

本発明の搬送具と大型搬送具は、半導体、デイスプレイなどをデバイスの製造において、対象物を搬送する時に利用できる。その他の製品の製造でも利用できる。 The transfer tool and the large-size transfer tool of the present invention can be used to transfer semiconductors, displays and the like in the manufacture of devices. It can also be used to manufacture other products.

10,20,30 搬送具
11,11c 突起
11a 第1突起
11b 第2突起
11d 突起凸部
11e 突起側部
13,41 凹部
14 隙間
15 台座
16 対象物
17 搬送台
30 搬送具
50 大型搬送具
51 搬送具ユニット
52 マーク

DESCRIPTION OF SYMBOLS 10, 20, 30 Conveying tools 11 and 11c Protrusion 11a 1st projection 11b 2nd projection 11d Protrusion convex part 11e Protrusion side part 13 and 41 Recess 14 Clearance 15 Base 16 Object 17 Conveyance table 30 Conveyance tool 30 Large conveyance tool 51 Conveyance Unit 52 mark

Claims (12)

台座と、
前記台座の表面に配置された複数の柱状の突起と、を含み、
前記複数の柱状の突起は、それぞれ頂部に1つの凹部を有する搬送具。
The pedestal,
And a plurality of columnar protrusions disposed on the surface of the pedestal,
Each of the plurality of columnar projections has a recess at its top.
前記複数の柱状の突起の頂部の総面積は、50%以上の占有割合である請求項1記載の搬送具。 2. The transfer tool according to claim 1, wherein a total area of tops of the plurality of columnar protrusions is an occupancy ratio of 50% or more. 前記複数の柱状体は、その頂部からの加圧で変形し、前記複数の柱状体間で接触する請求項1または2記載の搬送具。 The transfer tool according to claim 1 or 2, wherein the plurality of columns are deformed by pressure from the top thereof, and contact between the plurality of columns. 前記加圧により、前記複数の柱状体で周囲が囲まれた凹部が形成される請求項3に記載の搬送具。 The transfer tool according to claim 3, wherein a recess in which the periphery is surrounded by the plurality of columns is formed by the pressurization. 前記複数の柱状の突起は、断面積が異なる2種類の突起を含む請求項1〜4のいずれか1項に記載の搬送具。 The transfer tool according to any one of claims 1 to 4, wherein the plurality of columnar protrusions include two types of protrusions having different cross-sectional areas. 前記複数の柱状の突起は、千鳥配列である請求項1〜5のいずれか1項に記載の搬送具。 The transfer tool according to any one of claims 1 to 5, wherein the plurality of columnar protrusions are arranged in a staggered arrangement. 前記複数の柱状の突起は、円柱形状である請求項1〜6のいずれか1項に記載の搬送具。 The transfer tool according to any one of claims 1 to 6, wherein the plurality of columnar protrusions have a cylindrical shape. 前記請求項1〜7のいずれか1項に記載の搬送具の上に対象物を保持させ、前記対象物を搬送する前記対象物の搬送方法。 The conveyance method of the said target object which hold | maintains a target object on the conveyance tool of any one of the said Claims 1-7, and conveys the said target object. 前記請求項1〜7のいずれか1項に記載の搬送具を、複数個、搬送台上に重ねずに、前記突起を表面として配置した大型搬送具。 The large sized conveyance tool which has arrange | positioned the said protrusion as a surface, without superimposing a plurality of conveyance tools of any one of the said Claims 1-7 on a conveyance stand. 前記請求項1〜7のいずれか1項に記載の搬送具を、中間体に接着し、前記中間体に物理的に保持する請求項9記載の大型搬送具。 The large-sized transfer tool according to claim 9, which adheres the transfer tool according to any one of claims 1 to 7 to an intermediate, and physically holds the transfer tool to the intermediate. 前記請求項1〜7のいずれか1項に記載の搬送具を、複数個、搬送台上に重ねずに、前記突起を表面として配置した大型搬送具を用いて、製造の対象物を搬送する搬送方法。 The object of manufacture is conveyed using the large-sized conveyance tool which arranged the above-mentioned projection as the surface, without superposing a plurality of conveyance tools according to any one of the above-mentioned 1-7 on a conveyance stand. Transport method. 前記請求項1〜7のいずれか1項に記載の搬送具の複数個を、前記台座を1つとして、1つの搬送具とした搬送具ユニット。
A carrier unit comprising a plurality of the carrier according to any one of claims 1 to 7 as one carrier with one pedestal.
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