JP6353969B1 - Transport tool, transport method and transport tool unit - Google Patents
Transport tool, transport method and transport tool unit Download PDFInfo
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- JP6353969B1 JP6353969B1 JP2017228627A JP2017228627A JP6353969B1 JP 6353969 B1 JP6353969 B1 JP 6353969B1 JP 2017228627 A JP2017228627 A JP 2017228627A JP 2017228627 A JP2017228627 A JP 2017228627A JP 6353969 B1 JP6353969 B1 JP 6353969B1
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- protrusions
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- protrusion
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- columnar
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Links
- 238000000034 method Methods 0.000 title claims abstract description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 241000135309 Processus Species 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 230000000630 rising effect Effects 0.000 claims 1
- 230000032258 transport Effects 0.000 abstract description 73
- 239000000853 adhesive Substances 0.000 abstract description 7
- 230000001070 adhesive effect Effects 0.000 abstract description 7
- 229920001971 elastomer Polymers 0.000 description 12
- 239000005060 rubber Substances 0.000 description 12
- 229920001973 fluoroelastomer Polymers 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- -1 perfluoro Chemical group 0.000 description 4
- 238000000465 moulding Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229920006169 Perfluoroelastomer Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000010068 moulding (rubber) Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Packaging Frangible Articles (AREA)
- Belt Conveyors (AREA)
Abstract
【課題】粘着力の強い搬送具と搬送方法を提供すること。【解決手段】台座と、前記台座の表面に配置された複数の柱状の突起と、を含み、前記複数の柱状の突起は、それぞれ頂部に１つの凹部を有する搬送具を用いる。上記搬送具を、複数個、プレート上に重ねずに、前記突起を表面として配置した大型搬送具を用いる。上記搬送具を、複数個、プレート上に重ねずに、前記突起を表面として配置した大型搬送具を用いて、製造の対象物を搬送する搬送方法を用いる。【選択図】図１A transport tool and a transport method having strong adhesive strength are provided. A carrier including a pedestal and a plurality of columnar protrusions arranged on a surface of the pedestal, wherein each of the plurality of columnar protrusions has a concave portion at the top. A large-sized transport tool in which the plurality of transport tools are arranged on the surface without overlapping a plurality of the transport tools is used. A transport method is used that transports an object to be manufactured using a large transport tool in which a plurality of the transport tools are not stacked on a plate and the protrusions are arranged on the surface. [Selection] Figure 1
Description
本発明は、搬送具と搬送方法と搬送ユニットに関する。特に、製造ライン等で一時的に対象物を搬送するための搬送具と搬送方法と搬送ユニットに関する。 The present invention relates to a transport tool, a transport method, and a transport unit. In particular, the present invention relates to a transport tool, a transport method, and a transport unit for temporarily transporting an object on a production line or the like.
製造ラインでは、基板やガラスなどが搬送する搬送具が、従来から使用されている（特許文献１）。この搬送具では、金属板上にゴムが設けられている。ゴムに、対象物が一時的に粘着され搬送され、目的地で対象物が搬送具から外される。 In a production line, a transport tool that transports a substrate, glass, or the like has been used conventionally (Patent Document 1). In this carrier, rubber is provided on the metal plate. The object is temporarily adhered to the rubber and conveyed, and the object is removed from the conveying tool at the destination.
しかし、この搬送具では、吸着力が弱く適切に対象物を保持できない。よって、本願課題は、粘着力の強い搬送具と搬送方法を提供することである。 However, with this transporting tool, the attracting force is weak and the object cannot be appropriately held. Therefore, the subject of this application is providing the conveyance tool and conveyance method with strong adhesive force.
前記従来の課題を解決するために、台座と、前記台座の表面に配置された複数の柱状の突起と、を含み、前記複数の柱状の突起は、それぞれ頂部に１つの凹部を有する搬送具を用いる。
また、上記搬送具を、複数個、プレート上に重ねずに、前記突起を表面として配置した大型搬送具を用いる。
さらに、上記搬送具を、複数個、プレート上に重ねずに、前記突起を表面として配置した大型搬送具を用いて、製造の対象物を搬送する搬送方法を用いる。
上記搬送具の複数個を、上記台座を１つとして、１つの搬送具とした搬送具ユニットを用いる。
In order to solve the above-described conventional problems, the carriage includes a pedestal and a plurality of columnar protrusions disposed on the surface of the pedestal, and each of the plurality of columnar protrusions has a concave portion at the top. Use.
Moreover, a large-sized transporting device in which the protrusions are arranged on the surface without using a plurality of the transporting devices on the plate is used.
Furthermore, the conveyance method which conveys the target object of manufacture using the large sized conveyance tool which has arrange | positioned the said processus | protrusion on the surface, without superimposing the said conveyance tool on several plates.
A transport tool unit is used in which a plurality of the transport tools are used as one pedestal.
本発明の搬送具では、対象物を十分に保持し、目的の場所まで確実に搬送できる。 In the carrier of the present invention, the object can be sufficiently held and reliably conveyed to the target location.
以下本発明の実施の形態について、図面を参照しながら説明する。なお、この実施の形態によって本発明が限定されるものではない。 Embodiments of the present invention will be described below with reference to the drawings. Note that the present invention is not limited to the embodiments.
（実施の形態１）
図１（ａ）〜図１（ｄ）を用いて、実施の形態１の搬送具１０を説明する。図１（ａ）は、搬送具１０の平面図である。図１（ｂ）は、対象物１６を保持した搬送具１０の側面図である。図１（ｃ）は、搬送具１０の拡大平面図である。図１（ｄ）は、搬送具１０に対象物１６を保持させた状態での搬送具１０の拡大平面図である。対象物１６を除いて表示されている。
(Embodiment 1)
A transport tool 10 according to the first embodiment will be described with reference to FIGS. FIG. 1A is a plan view of the transport tool 10. FIG. 1B is a side view of the carrier 10 that holds the object 16. FIG. 1C is an enlarged plan view of the transport tool 10. FIG. 1D is an enlarged plan view of the transport tool 10 in a state where the transport tool 10 holds the object 16. It is displayed excluding the object 16.
＜構造＞
搬送具１０は、台座１５と突起１１と凹部１３と隙間１４とを含む。
台座１５は、平板状で、一方の面に突起１１を有する。台座１５は、約３０ｍｍ角の正方形形状である。１ｃｍ〜１００ｃｍまで作製できる。
突起１１は、円柱状の突起である。円の直径は、約０．５ｍｍ〜２ｍｍである。高さも、約０．５ｍｍ〜２ｍｍである。円の直径に対する高さの比（アスペクト比）は、０．５から１．５が好ましい。円柱に限られず柱状ならよい。
<Structure>
The carrier 10 includes a base 15, a protrusion 11, a recess 13, and a gap 14.
The pedestal 15 is flat and has a protrusion 11 on one surface. The pedestal 15 has a square shape of about 30 mm square. 1 cm to 100 cm can be produced.
The protrusion 11 is a columnar protrusion. The diameter of the circle is about 0.5 mm to 2 mm. The height is also about 0.5 mm to 2 mm. The ratio of the height to the diameter of the circle (aspect ratio) is preferably 0.5 to 1.5. It is not limited to a cylinder, it may be a column.
突起１１の頂部の面積の割合（占有面積、突起１１が存在する領域での単位面積あたりの面積密度）は５０％以上がよい。６０％以上が好ましい。対象物１６を保持するため、多いほどよい。ただし、突起１１は変形する必要があるので、それぞれ独立した複数の突起１１としている。頂部の面積の割合を増やすため、突起１１は、千鳥配列としている。また、突起１１は、変形した時に均等に広がるように円柱形状が好ましい。そのため、頂部の面積の割合は、９５％以下がよい。９０％以下が好ましい。
凹部１３は、突起１１と台座１５とで囲まれた空間である。
The ratio of the area of the top of the protrusion 11 (occupied area, area density per unit area in the region where the protrusion 11 exists) is preferably 50% or more. 60% or more is preferable. In order to hold the object 16, the more it is better. However, since the protrusions 11 need to be deformed, a plurality of independent protrusions 11 are provided. In order to increase the area ratio of the top, the protrusions 11 are staggered. Further, the protrusion 11 preferably has a cylindrical shape so as to spread evenly when deformed. Therefore, the area ratio of the top is preferably 95% or less. 90% or less is preferable.
The recess 13 is a space surrounded by the protrusion 11 and the pedestal 15.
隙間１４は、突起１１間の隙間である。突起１１が、対象物１６を保持した時、変形できるように、隙間１４が必要である。隙間１４は、０．１ｍｍ以下である。
搬送具１０は、材質が、化学的に安定なフッ素ゴムが好ましく、プレス成型もしくは注型成型で作製される。
The gap 14 is a gap between the protrusions 11. A gap 14 is necessary so that the protrusion 11 can be deformed when holding the object 16. The gap 14 is 0.1 mm or less.
The carrier 10 is preferably made of chemically stable fluoro rubber, and is produced by press molding or cast molding.
フッ素ゴムとしては、フッ化ビニリデン由来の構成単位、ヘキサフルオロプロピレンの構成単位、および、テトラフルオロエチレン由来の構成単位を主とした構成をもつフッ素ゴム組成物も利用できる。なお、フッ素ゴム全般に適応できる。テトラフルオロエチレン由来の構成単位、パーフルオロ（アルキルビニルエーテル）又は、パーフルオロ（アルコキシアルキルビニルエーテル）由来の構成単位を主とした構成を含有するパーフルオロエラストマーも利用できる。
また、ゴムとして、上記以外のフッ素ゴムも使用できる。シリコンゴム、エラストマーも使用できる。室温で、加圧で変形できるものなら使用できる。
As the fluororubber, a fluororubber composition having a constitution mainly composed of a constitutional unit derived from vinylidene fluoride, a constitutional unit of hexafluoropropylene, and a constitutional unit derived from tetrafluoroethylene can also be used. It can be applied to all fluoro rubbers. A perfluoroelastomer containing a constitutional unit mainly derived from a constitutional unit derived from tetrafluoroethylene, perfluoro (alkyl vinyl ether) or perfluoro (alkoxyalkyl vinyl ether) can also be used.
Further, as the rubber, other fluororubbers can be used. Silicon rubber and elastomer can also be used. Any material that can be deformed under pressure at room temperature can be used.
＜製造方法＞
搬送具１０の形状に対応する凹部を施した金型を作成し、プレス機に金型を設置する。金型を１８０℃まで熱しておき、ゴム成型後にゴムが剥がれやすくするよう離型剤（フッ素系、シリコン系など）を塗布する。
ゴムシートを適切なサイズにカットし下型に置きプレスを行う。プレスは１８０℃、２４０秒で設定する。ゴムの材質により温度・時間は設定を変える。適切なサイズより少ないようであれば未加硫状態となりゴムが成型できない。
<Manufacturing method>
A die having a recess corresponding to the shape of the carrier 10 is created, and the die is placed in a press machine. The mold is heated to 180 ° C., and a release agent (fluorine type, silicon type, etc.) is applied so that the rubber can be easily peeled off after the rubber molding.
Cut the rubber sheet to an appropriate size, place it in the lower mold and press. The press is set at 180 ° C. for 240 seconds. The temperature and time settings vary depending on the rubber material. If it is smaller than the appropriate size, it will be unvulcanized and rubber cannot be molded.
プレス後、ゴムがちぎれないよう丁寧に金型からゴムを剥がす。剥がし終わった後、外観確認をして問題なければそのゴム製品をオーブンにいれ２３２℃、１０時間熱を加える。温度・時間が少ないとゴムの物性が出ない恐れがある。ゴムの材質により温度・時間は設定を変える。オーブンでの作業後、外観確認をして問題なければ製品の完成である。 After pressing, carefully remove the rubber from the mold so that it does not tear off. After peeling off, confirm the appearance and if there is no problem, put the rubber product in an oven and apply heat at 232 ° C. for 10 hours. If the temperature and time are low, the rubber properties may not be obtained. The temperature and time settings vary depending on the rubber material. After working in the oven, if the appearance is confirmed and there is no problem, the product is complete.
なお、ゴムシートの成形でなくともよい。通常の成形加工でもよい。台座１５と突起１１は一体で作製した方が好ましい。なぜなら、突起１１は、対象物１６により圧を受け、変形するので、破損しやすい。そのため、台座１５と突起１１とは、１つの材料で形成される方が、強度的によい。 The rubber sheet may not be molded. Ordinary molding may be used. It is preferable that the pedestal 15 and the protrusions 11 are manufactured integrally. This is because the protrusion 11 is subject to pressure by the object 16 and is deformed, and thus is easily damaged. Therefore, it is better in terms of strength that the base 15 and the protrusion 11 are formed of one material.
＜保持状態＞
図１（ｂ）は、搬送具１０で対象物１６を保持している状態を示す。搬送具１０では、突起１１の頂部で対象物１６と接し、対象物１６を保持する。突起１１の頂部には粘着性があり、対象物１６を粘着保持する。
<Holding state>
FIG. 1B shows a state in which the object 16 is held by the transport tool 10. In the transport tool 10, the top of the protrusion 11 is in contact with the object 16 and holds the object 16. The top of the protrusion 11 is sticky and holds the object 16 in an adhesive state.
図１（ｃ）は、対象物１６を保持していない時の搬送具１０の拡大平面であり、図１（ｄ）は、対象物１６を保持している時の搬送具１０の拡大平面である。
突起１１の頂部は、対象物１６の重さで変形し、広がり、対象物１６を保持する。このため、突起１１間には隙間１４が設けられている。より突起１１の頂部の面積を増やすことで対象物１６をより保持しやすい。そのため、突起１１を平面内で密に配置している。
なお、突起１１は、対象物１６により、圧縮変形し広がるので、複数の非接触の突起１１が好ましい。
1C is an enlarged plane of the transport tool 10 when the object 16 is not held, and FIG. 1D is an enlarged plane of the transport tool 10 when the object 16 is held. is there.
The top of the protrusion 11 is deformed and spreads by the weight of the object 16 and holds the object 16. For this reason, a gap 14 is provided between the protrusions 11. It is easier to hold the object 16 by increasing the area of the top of the protrusion 11. Therefore, the protrusions 11 are densely arranged in the plane.
In addition, since the protrusion 11 is compressed and deformed by the object 16, the plurality of non-contact protrusions 11 are preferable.
搬送具１０の硬さは、２０〜９０がよい。好ましくは、６０〜８０が好ましい。ここで、硬さは、デユロメータータイプＡでの値である。搬送具１０の硬さは、突起１１の変形のしやすさ、保持性から上記範囲となる。 The hardness of the transport tool 10 is preferably 20 to 90. Preferably, 60-80 are preferable. Here, the hardness is a value in the durometer type A. The hardness of the carrier 10 is in the above range from the ease of deformation of the protrusions 11 and the retention.
（実施の形態２）
図２（ａ）〜図２（ｃ）を用いて、実施の形態２の搬送具２０を説明する。図２（ａ）は、搬送具２０の平面図である。図２（ｂ）は、搬送具２０の側面図である。図２（ｃ）は、搬送具２０に対象物１６を保持させた側面図である。記載しない事項は実施の形態１と同様である。
(Embodiment 2)
The conveyance tool 20 of Embodiment 2 is demonstrated using Fig.2 (a)-FIG.2 (c). FIG. 2A is a plan view of the transport tool 20. FIG. 2B is a side view of the transport tool 20. FIG. 2C is a side view in which the object 16 is held on the carrier 20. Matters not described are the same as those in the first embodiment.
＜構造＞
搬送具２０は、台座１５と第１突起１１ａと第２突起１１ｂと凹部１３と隙間１４とを含む。
台座１５は、平板状で、一方の面に第１突起１１ａと第２突起１１ｂとを有する。
第１突起１１ａは、円柱状の突起である。実施の形態１の突起１１と同様である。
第２突起１１ｂは、円柱状の突起である。第１突起１１ａより、断面積が小さく、第１突起１１ａと同じ高さである。第１突起１１ａがメインの突起である。
<Structure>
The carrier 20 includes a base 15, a first protrusion 11 a, a second protrusion 11 b, a recess 13, and a gap 14.
The pedestal 15 has a flat plate shape, and has a first protrusion 11a and a second protrusion 11b on one surface.
The first protrusion 11a is a columnar protrusion. This is the same as the protrusion 11 of the first embodiment.
The second protrusion 11b is a columnar protrusion. The cross-sectional area is smaller than that of the first protrusion 11a and is the same height as the first protrusion 11a. The first protrusion 11a is the main protrusion.
凹部１３は、第１突起１１ａと第２突起１１ｂと台座１５とで囲まれた空間である。
隙間１４は、第１突起１１ａと第２突起１１ｂとの間の隙間である。
第１突起１１ａの直径は、第２突起１１ｂより大きい。突起の占有面積を増やすため、密に並べると、第１突起１１ａの直径は、第２突起１１ｂの２．３倍までである。
なお、第１突起１１ａのアスペクト比は、実施の形態１の突起１１と同様で１前後である。そのため、第２突起１１ｂは、細長い突起となる。第１突起１１ａが対象物１６を受け止め、第２突起１１ｂは補助的に受け止める。第２突起１１ｂは、粘着性のアップ、真空吸着性のために存在する。
The recess 13 is a space surrounded by the first protrusion 11 a, the second protrusion 11 b, and the base 15.
The gap 14 is a gap between the first protrusion 11a and the second protrusion 11b.
The diameter of the first protrusion 11a is larger than the second protrusion 11b. When closely arranged to increase the occupation area of the protrusion, the diameter of the first protrusion 11a is up to 2.3 times that of the second protrusion 11b.
The aspect ratio of the first protrusion 11a is about 1 as in the case of the protrusion 11 of the first embodiment. Therefore, the second protrusion 11b is an elongated protrusion. The 1st protrusion 11a receives the target object 16, and the 2nd protrusion 11b receives auxiliary. The 2nd protrusion 11b exists for the adhesive improvement and vacuum adsorption property.
＜保持状態＞
図３（ａ）は、対象物１６を保持する前の搬送具２０の拡大平面図である。
図３（ｂ）は、対象物１６を保持中の搬送具２０の拡大平面図である。対象物１６を省略してあらわされている。
<Holding state>
FIG. 3A is an enlarged plan view of the carrier 20 before holding the object 16.
FIG. 3B is an enlarged plan view of the carrier 20 that is holding the object 16. The object 16 is omitted.
対象物１６が、第１突起１１ａと第２突起１１ｂ上に乗せられた時、第１突起１１ａと第２突起１１ｂとは、圧縮され、隙間１４は無くなり、第１突起１１ａと第２突起１１ｂとが接触する。この状態で、凹部１３は、第１突起１１ａと第２突起１１ｂと台座１５と対象物１６とで密閉された空間となる。この時、この空間は、少し真空状態となり、対象物１６を搬送具１０により吸着、保持する。
つまり、第１突起１１ａと第２突起１１ｂの頂部の粘性と凹部１３の真空とで、対象物１６を保持できる。
When the object 16 is placed on the first protrusion 11a and the second protrusion 11b, the first protrusion 11a and the second protrusion 11b are compressed, the gap 14 is eliminated, and the first protrusion 11a and the second protrusion 11b. And contact. In this state, the recess 13 is a space sealed by the first protrusion 11 a, the second protrusion 11 b, the base 15, and the object 16. At this time, this space is slightly in a vacuum state, and the object 16 is attracted and held by the transport tool 10.
That is, the object 16 can be held by the viscosity of the tops of the first protrusion 11 a and the second protrusion 11 b and the vacuum of the recess 13.
対象物１６を取り外す時に、少し端部を持ち上げると、すき間１４ができ、真空状態が解除され、取り出しやすい。つまり、複数の凹部１３が、端部から徐々に、その真空が解除され、対象物１６を取り出しやすい。 When the object 16 is removed, if the end is slightly lifted, a gap 14 is formed, the vacuum state is released, and it is easy to take out. That is, the plurality of recesses 13 are gradually released from the end portions, and the object 16 can be easily taken out.
（実施の形態３）
図４（ａ）〜図４（ｃ）を用いて、実施の形態３を説明する。説明しない事項は、実施の形態１，２と同様である。
図４（ａ）は、実施の形態３の突起１１ｃの拡大側面図である。図４（ｃ）は、突起１１ｃの拡大平面図である。図４（ｂ）は、突起１１ｃ上に対象物１６が保持された場合の拡大側面図である。突起１１ｃは、実施の形態１または２の搬送具の突起である。
(Embodiment 3)
The third embodiment will be described with reference to FIGS. 4 (a) to 4 (c). Matters not described are the same as in the first and second embodiments.
FIG. 4A is an enlarged side view of the protrusion 11c of the third embodiment. FIG. 4C is an enlarged plan view of the protrusion 11c. FIG. 4B is an enlarged side view when the object 16 is held on the protrusion 11c. The protrusion 11c is a protrusion of the transport tool of the first or second embodiment.
突起１１ｃは、円柱形状で頂部に１つの凹部４１を有する。凹部４１の周囲は、突起凸部１１ｄで囲まれる。円柱形状でなくとも柱状であればよい。凹部４１の深さは、数ミクロン、１〜５μである。突起１１ｄの直径は、約０．５ｍｍ〜１．５ｍｍである。凹部４１の深さが、深いと、空気が、凹部４１と対象物１６間に残り、吸着性がよくない。
突起１１ｃ上に対象物１６が保持されると、突起１１ｃは、頂部の突起凸部１１ｄが変形し、突起１１ｃの側面が膨らみ、突起側部１１ｅができる。この時、突起１１ｃの頂部は、より広い面として、対象物１６を保持できる。円柱でなく角柱でもよい。
突起１１ｃは、実施の形態１，２の突起として使用できる。さらに、実施の形態１，２とは無関係に単独で使用してもよい。
The protrusion 11c has a cylindrical shape and has one recess 41 at the top. The periphery of the recess 41 is surrounded by the protruding protrusion 11d. What is necessary is just a column shape even if it is not a column shape. The depth of the recess 41 is several microns and 1 to 5 μm. The diameter of the protrusion 11d is about 0.5 mm to 1.5 mm. When the depth of the concave portion 41 is deep, air remains between the concave portion 41 and the object 16 and the adsorptivity is not good.
When the object 16 is held on the protrusion 11c, the protrusion 11c on the top of the protrusion 11c is deformed, and the side surface of the protrusion 11c swells to form a protrusion side part 11e. At this time, the top of the protrusion 11c can hold the object 16 as a wider surface. It may be a prism instead of a cylinder.
The protrusion 11c can be used as the protrusion in the first and second embodiments. Furthermore, it may be used independently regardless of the first and second embodiments.
（実施の形態４）
実施の形態４を図５（ａ）と図５（ｂ）で説明する。記載しない事項は、上記の実施の形態と同様である。
図５（ａ）は、大型搬送具５０の対象物１６を保持しているところの側面図である。
図５（ｂ）は、大型搬送具５０の平面図である。
対象物１６が大きくなると、上記実施の形態の搬送具１０，２０を大きくしてもよいが、作製上の問題、コスト面から好ましくない。
(Embodiment 4)
The fourth embodiment will be described with reference to FIGS. 5 (a) and 5 (b). Matters not described are the same as in the above embodiment.
FIG. 5A is a side view showing the object 16 of the large transport tool 50 being held.
FIG. 5B is a plan view of the large transport tool 50.
When the object 16 becomes large, the transporting tools 10 and 20 of the above embodiment may be enlarged, but this is not preferable from the viewpoint of production and cost.
そこで、この実施の形態では、複数の搬送具３０を用いる。搬送具３０は、上記実施の形態の搬送具のいずれかである。複数種類の搬送具を用いてもよい。搬送具３０の大きさは、１０ｍｍ角〜５０ｍｍ角の面積で正方形、長方形、ひし形、台形でもよい。
大型搬送具５０は、搬送台１７と搬送具３０とを含む。
搬送台１７は、金属板などで運搬用の台座である。
搬送具３０は、上記実施の形態の搬送具のいずれか１つまたは複数である。
大型搬送具５０は、その表面に、複数の搬送具３０を配置されている。複数の搬送具３０上に対象物１６が乗り、対象物１６が保持されている。
Therefore, in this embodiment, a plurality of transfer tools 30 are used. The transport tool 30 is one of the transport tools of the above embodiment. You may use several types of conveying tools. The size of the carrier 30 may be a square, a rectangle, a rhombus, or a trapezoid with an area of 10 mm square to 50 mm square.
The large transport tool 50 includes a transport base 17 and a transport tool 30.
The transport table 17 is a pedestal for transport using a metal plate or the like.
The conveyance tool 30 is any one or more of the conveyance tools of the above embodiment.
The large transport tool 50 has a plurality of transport tools 30 arranged on the surface thereof. The object 16 is placed on the plurality of conveying tools 30 and the object 16 is held.
搬送具３０は、対象物１６に対して、均等に配置されるのが好ましい。ただし、搬送具３０を、周辺部のみ、端部部のみに配置してもよい。全体として対象物１６とを保持する。搬送具３０は、搬送台１７に接着固定されている。 It is preferable that the transport tool 30 is arranged evenly with respect to the object 16. However, you may arrange | position the conveyance tool 30 only to a peripheral part, and only an edge part. The object 16 is held as a whole. The transport tool 30 is bonded and fixed to the transport base 17.
結果、搬送具３０を大きくしなくとも、大型搬送具５０が実現できる。
また、図５（ｃ）の平面図、図５（ｄ）の側面図で示す搬送具ユニット５１を用いることができる。搬送具ユニット５１は、搬送具３０を複数有する。これは、搬送具３０を作製する時に、台座１５を共通にして複数の搬送具３０を作製したものである。搬送具ユニット５１で供給し、マーク５２に沿ってカットして、複数の搬送具３０として利用するものである。マーク５２は、搬送具ユニット５１の製造時に金型により設けることができる。マーク５２は無くともよい。搬送具ユニット５１において、搬送具３０間は、突起のない台座１５のみの平面である。
As a result, the large transport tool 50 can be realized without increasing the transport tool 30.
Moreover, the conveyance tool unit 51 shown by the top view of FIG.5 (c) and the side view of FIG.5 (d) can be used. The transport tool unit 51 includes a plurality of transport tools 30. In this case, when the carrier 30 is manufactured, a plurality of carriers 30 are manufactured using the base 15 in common. It is supplied by the transport tool unit 51, cut along the mark 52, and used as a plurality of transport tools 30. The mark 52 can be provided by a mold when the transport tool unit 51 is manufactured. The mark 52 may be omitted. In the transport tool unit 51, the space between the transport tools 30 is a flat surface of only the base 15 having no protrusion.
搬送具３０は、直接、搬送台１７に接着材などで固定することができる。しかし、搬送具３０を一端、中間体に接着材で貼り付け、その中間体をネジなど物理的に搬送台１７に固定するのが好ましい。搬送具３０は定期的に、消耗し交換されるが、搬送台１７は、長期間使用されるので、長期間使用できるように、搬送台１７に接着材などを直接使用しないのが好ましい。 The transport tool 30 can be directly fixed to the transport base 17 with an adhesive or the like. However, it is preferable that the transfer tool 30 is attached to one end, an intermediate body with an adhesive, and the intermediate body is physically fixed to the transfer table 17 such as a screw. Although the transport tool 30 is periodically consumed and replaced, since the transport base 17 is used for a long period of time, it is preferable not to directly use an adhesive or the like on the transport base 17 so that it can be used for a long period of time.
（全体として）
上記実施の形態１〜４は組み合わせできる。
対象物１６は、ガラスパネル、半導体チップ、レンズ、ウエハーなどであり、限定されない。
(as a whole)
Embodiments 1 to 4 above can be combined.
The object 16 is a glass panel, a semiconductor chip, a lens, a wafer, or the like, and is not limited.
本発明の搬送具と大型搬送具は、半導体、デイスプレイなどをデバイスの製造において、対象物を搬送する時に利用できる。その他の製品の製造でも利用できる。 The transfer tool and the large-size transfer tool of the present invention can be used when a semiconductor, a display, or the like is transferred for an object in manufacturing a device. It can also be used to manufacture other products.
１０，２０，３０ 搬送具
１１，１１ｃ 突起
１１ａ 第１突起
１１ｂ 第２突起
１１ｄ 突起凸部
１１ｅ 突起側部
１３，４１ 凹部
１４ 隙間
１５ 台座
１６ 対象物
１７ 搬送台
３０ 搬送具
５０ 大型搬送具
５１ 搬送具ユニット
５２ マーク
10, 20, 30 Transport tool 11, 11c Projection 11a First projection 11b Second projection 11d Projection convex part 11e Projection side part 13, 41 Concave 14 Clearance 15 Base 16 Object 17 Transport base 30 Transport tool 50 Large transport tool 51 Transport Equipment unit 52 mark
Claims (10)
前記台座の表面に配置された複数の柱状の突起と、を含み、
前記複数の柱状の突起は、それぞれ頂部に１つの凹部を有し、それぞれその頂部からの加圧で変形し、側面方向へ均等に広がり、
前記凹部は、吸着用であり、
前記複数の柱状の突起は、その頂部からの加圧で変形し、異なる４方向の前記柱状の突起とそれぞれ接触する搬送具。 A pedestal,
A plurality of columnar protrusions disposed on the surface of the pedestal,
Wherein the plurality of columnar projections each have one recess on top, respectively deformed by pressure from the top, evenly rising wide to lateral,
The recess is for adsorption;
The plurality of columnar protrusions are deformed by pressurization from the top, and respectively contact the columnar protrusions in four different directions .
前記台座の表面に配置された複数の柱状の突起と、を含み、
前記複数の柱状の突起は、それぞれ頂部に１つの凹部を有し、
前記複数の柱状の突起は、その頂部からの加圧で変形し、前記複数の柱状の突起間で接触し、
前記加圧により、前記複数の柱状の突起で周囲が囲まれた吸着するための凹部が形成される搬送具。 A pedestal,
A plurality of columnar protrusions disposed on the surface of the pedestal,
Each of the plurality of columnar protrusions has one recess at the top,
The plurality of columnar protrusions are deformed by pressurization from the top , and are in contact between the plurality of columnar protrusions ,
The transport tool in which a concave portion for adsorbing is formed by the pressurization, the periphery being surrounded by the plurality of columnar protrusions .
前記台座の表面に配置された複数の柱状の突起と、を含み、
前記複数の柱状の突起は、それぞれ頂部に１つの凹部を有し、
前記複数の柱状の突起は、高さが同じで、断面積が異なる複数の第１突起と第２突起を含み、
前記複数の第１突起と第２突起は、それぞれ、その頂部からの加圧で変形し、前記第１突起は、４つの前記第２突起と接触し、前記第２突起は、４つの前記第１突起と接触する搬送具。 A pedestal,
A plurality of columnar protrusions disposed on the surface of the pedestal,
Each of the plurality of columnar protrusions has one recess at the top,
The plurality of columnar protrusions include a plurality of first protrusions and second protrusions having the same height and different cross-sectional areas,
The plurality of first protrusions and the second protrusions are each deformed by pressure from the top thereof, the first protrusions are in contact with the four second protrusions, and the second protrusions are the four first protrusions. A carrier that contacts one protrusion.
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| JP2017228627A JP6353969B1 (en) | 2017-11-29 | 2017-11-29 | Transport tool, transport method and transport tool unit |
| TW107127964A TWI666722B (en) | 2017-11-29 | 2018-08-10 | Conveyor and large conveyer, conveying method and conveyer unit |
| KR1020180097831A KR102170518B1 (en) | 2017-11-29 | 2018-08-22 | Transport tool, transport method and transport unit |
| CN201811098681.4A CN109835714B (en) | 2017-11-29 | 2018-09-19 | Conveyance tool, conveyance method, and conveyance tool unit |
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| JP2007281254A (en) * | 2006-04-07 | 2007-10-25 | Tokyo Electron Ltd | Substrate support and substrate transfer mechanism |
| WO2011096208A1 (en) * | 2010-02-05 | 2011-08-11 | 東京エレクトロン株式会社 | Substrate holder, substrate transfer apparatus, and substrate processing apparatus |
| JP2014101192A (en) * | 2012-11-20 | 2014-06-05 | Alpha- Design Kk | Suction holding device, and suction holding method and program for transported body by suction holding device |
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| JP2008103493A (en) * | 2006-10-18 | 2008-05-01 | Lintec Corp | Method and apparatus for picking up chip |
| WO2011155443A1 (en) * | 2010-06-07 | 2011-12-15 | 日本電気硝子株式会社 | Transfer device for plate-like member, and suction pad |
| JP5343954B2 (en) * | 2010-11-01 | 2013-11-13 | 株式会社安川電機 | Substrate transfer hand, substrate transfer apparatus and substrate transfer method including the same |
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| WO2011096208A1 (en) * | 2010-02-05 | 2011-08-11 | 東京エレクトロン株式会社 | Substrate holder, substrate transfer apparatus, and substrate processing apparatus |
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