TWD155119S - 電漿處理裝置用電極板 - Google Patents

電漿處理裝置用電極板

Info

Publication number
TWD155119S
TWD155119S TW101301746F TW101301746F TWD155119S TW D155119 S TWD155119 S TW D155119S TW 101301746 F TW101301746 F TW 101301746F TW 101301746 F TW101301746 F TW 101301746F TW D155119 S TWD155119 S TW D155119S
Authority
TW
Taiwan
Prior art keywords
main body
cavity
item
creation
electrode plate
Prior art date
Application number
TW101301746F
Other languages
English (en)
Inventor
Yusei Kuwabara
Keiichi Nagakubo
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD155119S publication Critical patent/TWD155119S/zh

Links

Abstract

【物品用途】;本創作的物品是電漿處理裝置用電極板，主要由單晶矽圓板形件所組成，設置於電漿處理裝置之腔體中，具有許多氣體穿透孔以引導氣體進入腔體內。;【創作特點】;由各視圖觀之，本創作本體呈薄圓板形體，本體前方近外圓周處設有一圈不同大小之非貫通圓孔排列，本體上設有同心圓狀排列之氣體穿透孔，本體外輪廓由頂面向下垂直內收形成一段差部；由使用狀態參考圖觀之，本物品設置於腔體內之電漿淋浴頭底部，並面對承座台上之半導體晶圓。
TW101301746F 2011-09-30 2012-03-30 電漿處理裝置用電極板 TWD155119S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011022448 2011-09-30

Publications (1)

Publication Number Publication Date
TWD155119S true TWD155119S (zh) 2013-08-01

Family

ID=50033090

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101301746F TWD155119S (zh) 2011-09-30 2012-03-30 電漿處理裝置用電極板

Country Status (2)

Country Link
US (1) USD699199S1 (zh)
TW (1) TWD155119S (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD169790S (zh) * 2013-07-10 2015-08-11 日立國際電氣股份有限公司 基板處理裝置用氣化器之部分
USD795315S1 (en) * 2014-12-12 2017-08-22 Ebara Corporation Dresser disk
USD793971S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD793972S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD778247S1 (en) * 2015-04-16 2017-02-07 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
JP1545222S (zh) * 2015-06-10 2016-03-07
TWD178425S (zh) * 2016-01-08 2016-09-21 Asm Ip Holding Bv 用於半導體製造設備的電極板
JP1584241S (zh) * 2017-01-31 2017-08-21
JP1584906S (zh) * 2017-01-31 2017-08-28
JP1584784S (zh) * 2017-01-31 2017-08-28
USD870719S1 (en) * 2018-05-23 2019-12-24 Annex Products Pty. Ltd. Adhesive base
JP1643123S (zh) 2018-07-25 2019-10-07
JP1642983S (zh) 2018-07-25 2019-10-07
JP1643124S (zh) 2018-07-25 2019-10-07
JP1643125S (zh) 2018-07-25 2019-10-07
JP1642984S (zh) 2018-07-25 2019-10-07
USD904305S1 (en) * 2019-02-25 2020-12-08 Petram Technologies, Inc. Electrode cage for a plasma blasting probe

Also Published As

Publication number Publication date
USD699199S1 (en) 2014-02-11

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