TW594823B - Exhausting method and apparatus for flat display panel - Google Patents

Exhausting method and apparatus for flat display panel Download PDF

Info

Publication number
TW594823B
TW594823B TW090102681A TW90102681A TW594823B TW 594823 B TW594823 B TW 594823B TW 090102681 A TW090102681 A TW 090102681A TW 90102681 A TW90102681 A TW 90102681A TW 594823 B TW594823 B TW 594823B
Authority
TW
Taiwan
Prior art keywords
display panel
pressure
exhaust
flat display
gas
Prior art date
Application number
TW090102681A
Other languages
English (en)
Chinese (zh)
Inventor
Sun-Woo Park
Young-Kuk Kwon
Original Assignee
Upd Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Upd Corp filed Critical Upd Corp
Application granted granted Critical
Publication of TW594823B publication Critical patent/TW594823B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • H01J9/385Exhausting vessels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26Sealing together parts of vessels
    • H01J9/261Sealing together parts of vessels the vessel being for a flat panel display
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00Apparatus and processes for manufacture of discharge tubes
    • H01J2209/26Sealing parts of the vessel to provide a vacuum enclosure
    • H01J2209/264Materials for sealing vessels, e.g. frit glass compounds, resins or structures
TW090102681A 2001-01-12 2001-02-07 Exhausting method and apparatus for flat display panel TW594823B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2001-0001800A KR100394060B1 (ko) 2001-01-12 2001-01-12 평판 디스플레이 패널용 가스배기장치 및 그 방법

Publications (1)

Publication Number Publication Date
TW594823B true TW594823B (en) 2004-06-21

Family

ID=19704557

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090102681A TW594823B (en) 2001-01-12 2001-02-07 Exhausting method and apparatus for flat display panel

Country Status (4)

Country Link
JP (1) JP2002229468A (ko)
KR (1) KR100394060B1 (ko)
CN (1) CN1363945A (ko)
TW (1) TW594823B (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100433992B1 (ko) * 2002-04-25 2004-06-04 엘지.필립스 엘시디 주식회사 듀얼패널타입 유기전계발광 소자 및 그의 제조방법
KR100482820B1 (ko) * 2002-10-29 2005-04-14 엘지전자 주식회사 Pdp 모듈의 가스압력 조절장치 및 방법
KR100599412B1 (ko) * 2004-12-09 2006-07-10 두산메카텍 주식회사 플라즈마 디스플레이 패널의 제조 방법
KR100784012B1 (ko) * 2006-02-20 2007-12-07 삼성에스디아이 주식회사 유기 전계 발광표시장치 및 그의 제조방법
JP4837471B2 (ja) 2006-02-20 2011-12-14 三星モバイルディスプレイ株式會社 有機電界発光表示装置及びその製造方法
JP5090401B2 (ja) * 2009-05-13 2012-12-05 パナソニック株式会社 プラズマディスプレイパネルの製造方法
KR101372691B1 (ko) * 2013-01-17 2014-03-11 주식회사 야스 진공유리 또는 그를 이용하는 반도체 소자의 진공 봉지 장치 및 진공 봉지 방법
CN108803753B (zh) * 2018-07-26 2021-03-02 合肥云联电子科技有限公司 一种工控设备内部环境的智能化调控系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325826A (ja) * 1989-06-23 1991-02-04 Nec Corp プラズマディスプレイパネルの製造方法
JP2832510B2 (ja) * 1994-05-10 1998-12-09 双葉電子工業株式会社 表示装置の製造方法
KR19980043947A (ko) * 1996-12-05 1998-09-05 손욱 형광표시관 배기방법
JP3394173B2 (ja) * 1997-12-26 2003-04-07 富士通株式会社 ガス放電パネル及びその排気方法
KR100309275B1 (ko) * 1998-09-15 2001-12-17 구자홍 Pdp제조방법과pdp의가스주입및배기계
JP2000294135A (ja) * 1999-04-05 2000-10-20 Hitachi Ltd プラズマディスプレイとその製造方法

Also Published As

Publication number Publication date
CN1363945A (zh) 2002-08-14
JP2002229468A (ja) 2002-08-14
KR20020060808A (ko) 2002-07-19
KR100394060B1 (ko) 2003-08-06

Similar Documents

Publication Publication Date Title
TW594823B (en) Exhausting method and apparatus for flat display panel
JP4023501B2 (ja) プラズマディスプレイパネルの製造方法
TW580716B (en) Method for manufacturing a plasma display panel
CN104051311B (zh) 基板传送装置及适用于湿制程的强酸或强碱刻蚀工艺
TW201525396A (zh) 批量式基板處理裝置
JP2013539600A (ja) バッチ式基板処理装置
KR20150122887A (ko) 기판의 열처리 장치
CN101373692B (zh) 一种荫罩式等离子体显示屏的封接方法及其装置
US20130038810A1 (en) Backlight unit and liquid crystal display device
CN105714251B (zh) 一种新型纳米防指纹薄膜的镀膜方法
TWI344997B (en) Chemical vapor deposition apparatus for flat display
CN101349504B (zh) 密封热处理装置
CN101499394A (zh) 真空气密容器的制造方法
CN107043916A (zh) 便于维护保养的磁控溅射制备ito薄膜的系统
KR20030064052A (ko) 플라즈마 디스플레이 패널의 불순물 제거방법
KR101642991B1 (ko) 열전사 공정에 이용되는 전사장치
JP2004006175A (ja) プラズマディスプレイパネルの製造方法および焼成装置
TW201001600A (en) Boat
KR20080023992A (ko) 이온빔을 이용한 PDP용 MgO 박막 증착 장치 및 증착방법
KR102193456B1 (ko) 기판 열 경화 장치
JPH03184216A (ja) 透明導電膜の形成方法
KR20080062847A (ko) 열처리 장치와 방법 및, 표시 패널의 열처리 방법
KR20120005313U (ko) 대형 기판용 배치식 열처리 장치
JP2004349009A (ja) 画像表示装置の製造方法、製造装置、およびこの製造方法により製造された画像表示装置
CN102268644A (zh) 一种MgO介质保护膜制备方法、显示屏及等离子电视机