TW594823B - Exhausting method and apparatus for flat display panel - Google Patents

Abstract

Disclosed is an exhausting apparatus and method for a flat display panel with high exhausting efficiency assisted by the pressure difference between the interior and the exterior of the panel. Spacing between upper and lower panels will be widened to facilitate the exhausting procedure once the pressure of the interior panel is higher than the pressure setting of the container to a specific value. The method is capable of shortening exhaust time and decreasing the possibility of exhaust residues within the flat display panel to improve the optical and electrical characteristics of the flat display panel.

Description

594823 V. Description of the invention (l) Summary of the invention The exhaust device of the flat display panel of the present invention is particularly that there is an exhaust gas of impure gas between the discs (plates) formed by the upper and lower plates; the interval between the discs is enlarged, and the discs are set The external pressure of the plate is different from the internal pressure of the plate, which greatly ensures the conductance of the gas. The impure gas inside the plate can be easily exhausted. The gas exhaust equipment and methods for flat display panels are as follows: Generally, The display device is an important interface for the exchange of information between humans and electronic devices. With the development of an information society, the amount of information that can be accessed by humans is constantly expanding. It is required to use it to diversify information machines. The display of such information machines The characteristics of the device are particularly important. Compared with the conventional CRT (Cathode-Ray-Tube), "---- / dusting is possible, and it is light, excellent in day and time, a variety of additional functions, and feasible ring-i type PDP-, LCD, FED, organic EL As for the research on flat-panel displays / continuously entering, it is the mainstream display of display devices that can be used for energy-efficient display devices so far. The display devices of the next century are on the stage. As mentioned earlier, flat-panel displays are composed of laminated boards and lower panels. Both sides of the board 'm are joined to each other in front of each other, and in the manufacturing step, they must pass through the stage of removal. 1 1 impure rolling body such as: manufacturing steps of plasma display panel (hereinafter referred to as PDP) =:;: after: Wall gas etc.

594823 V. Description of the invention (2) --- Fig. 1 illustrates the steps of the upper and lower glass of the PDP. As shown in FIG. 1, the upper glass 10 is fully encased into a transparent electrode 11 and a bus bar electrode 12. On the transparent electrode n and the bus bar electrode 12, the discharge current during discharge is limited, and wall charges are easily formed with an equal thickness. The dielectric layer 13 is formed on the rhenium dielectric layer 13 by vacuum sputtering of a cathode generated during power generation to form the transparent electrode that protects the aforementioned transparent electrode and the busbar electrode 2 and the oxidation layer (MG 0) like the dielectric layer. Protective film 1 4. In addition, as shown in FIG. 1, the lower glass 20 is formed as described above with the transparent electrode 11 and the bus bar electrode 2 on the upper glass 10, and the ground electrode 21 is formed orthogonally at a certain distance from each other. 〖〇 Before the lower glass, as described in the above-mentioned two or more discharge grids, separate the ground electrodes 2 丨 to prevent color mixing between the grids and ensure the discharge space. Align and form the partition wall 22, and spray paint on the ground electrodes 21 to form fluorescent screens.光 体 23。 Light body 23. That is, as shown in the figure, 'the upper glass 10 and the lower glass 20 are each formed, so the previous step of electrically destroying the display panel is completed. Next, the subsequent steps of the PDP will be described with reference to FIG. 2. First, first, in a later step, a predetermined frit 30 is sprayed on the upper edge portion of the lower glass 20 shown in FIG. 1 and adhered to the upper glass 10 shown in FIG. 1. At 14 o'clock, a predetermined wall is formed from the partition wall formed on the lower broken glass 20. Grid (also known as a discharge grid), the distance I between the lower glass 20 and the upper glass I is about 120-140 / zm, and the distance between the phosphor 23 of the lower slope 20 and the upper glass 10 is about 1 0 0 // m or so.

594823 V. Description of the invention (3) " On the other hand, the step of attaching the upper glass 10 and the lower glass 20, if the original 4 'is between the end pipe 32 connected to the exhaust hole 31, is stored in the next wall The impure gas components of the discharge grids 33 between 22 are to be exhausted, and are then interposed between the exhaust holes 31, and a predetermined discharge gas is injected into the discharge grid 3 丨 in a vacuum state. Then, the exhaust gas 31 and the injected exhaust hole 31 are sealed by the sealing process, and the subsequent steps are completed. Here, the aforementioned gas exhaust method must set a vacuum state, and the impure gas that becomes the discharge grid 33 between the partition walls 22 must be discharged: the exhaust line through the discharge grid 33, as shown in Figure 3 It is formed as shown in Figure 2. The distance between the upper glass 10 and the lower glass 20 is as shown in FIG. 3 as 100, because it is a very fine space, so it is extended by the shape of a cow belt. The impure gas in the exhaust line of the ± gas, its exhaust treatment causes the problem of the long step time. In a hot water circulation type furnace that requires a process 'λ pressure, if the temperature of the 5' Non-^^ Α fixed on the inside of the plate (plate) for ascending and cooling, especially the low-conductivity exhaust of the door crane when the long time is required, the exhaust of the impure gas requires: :: Low productivity, more energy consumption This is a question. The internal question of the disk; not limited to pdp, it is a common problem to deal with flat display panels composed of upper and lower panels of pure gas. It is extended and the production of flat display panels including pdp is extended. The problem of low production capacity at the same time. The method of gas' fine space between, for impure case, will produce an exhaust gas is not properly handle impure ^ reasons as flat panel display image quality deterioration, Q

Page 6 594823

The point is. Said f ί 'The present invention was created after taking into account the above situation, A' is "quoting the difference between the external pressure and the internal pressure of the display panel, obstructing the binocular space, 'that is, conductance exhaust, through pressure Poor, to greatly ensure: the state = = to carry out the exhaust method, shorten the fouling time of the impure gas, the same time when anger 'improves the exhaust efficiency of the impure gas, the following provides a flat display panel gas exhaust equipment and its method. In order to achieve the foregoing object, the first aspect of the present invention is a gas exhaust method for a flat display panel. The exhaust device for a flat display panel that performs an exhaust method to remove the impure gas inside the flat display panel uses The exhaust method of the device is to reduce the internal pressure of the flat display panel inside the container (cavity), which is higher than the pressure inside the container. In this state, the impure gas inside the flat display panel is exhausted. Method is its characteristic. At this time, the aforementioned gas exhaust method for the flat display panel is to inject a predetermined gas into the flat display panel inside the container. It is necessary to set a high pressure inside the flat display panel and repeatedly perform the impure gas exhaust method. . In addition, as mentioned above, the method of exhausting the flat display panel is to charge a predetermined gas into the flat display panel located inside the container, and set the pressure in the plate to a certain level higher than the pressure inside the container. In this state, the given gas is continuously injected into the flat display panel at a certain speed, and the impure gas inside the plate is exhausted at a certain speed. The pressure inside the container and the pressure inside the plate must be maintained. In fact, within a certain level of time, the exhaust method is a characteristic. In addition, based on the second view of the present invention for the purpose of completion, the flat display IS 1 1 1 1 1 1 1 I 1 8 m page 7 594823 V. Description of the invention (5) The support frame for the gas discharge of the plate cymbals, The flat skin display panel device; as described in the above-mentioned one-piece exhaust, the connection container gas is adjusted, and the adjustment and display of the first setting is more specific than the impure interior of the volume plate. At this time, the built-in component of the front device is prepared separately. In addition to the large one, the base part is also equipped with a gas-actuating actuator that is first through the hole and enters into the side; for example, Adjust the first pressure hole connected to the container, and three through-gas devices inside the plate. At the same time, the end of the container is connected to the second through the display plate inside the container and the exhaust gas inside the second compressor is displayed. Temperature characteristics. In the glass of the present invention, a row exhaust square through hole and a front second end are formed as described above, and the two through holes in the container are the second pressurized gas and are provided with a first through pressure through hole for connection to one side. The first force through the pressure adjusts the hand pressure: the force is high, and the row of pneumatic action is provided with a second hole, which is the second pass through the second pressure section. Here, the gas control method and the first through hole are adjusted by the injection force of the gas-pressure body. In the flat display state, the flat display panel is equipped with through holes and the above-mentioned container injection and gas adjustment means; the front entry and gas exhaust means; and the pressure inside the through plate, which is controlled by the flat display, and is a display panel. Weekly, the pressure of the junction container of the flat display tube with the red third view first and the third flat display is red, and the action gas injection device is injected through the pneumatic adjustment hand to set the external halogen heating device. The two-row display board of the construction point is the first and second and third first through holes of the display board, a pressure adjustment of the exhaust action of the hand body, and the segment; Flat panel display with an exhaust hole provided in the flat display panel with the support frame, a second through-hole configuration of the exhaust gas through the gas discharge section; preceding level display adjusting pressure inside of the container junction plate

Page 8 594823 V. Description of the invention (6) Force two acts, three pressure adjustment means; and the aforementioned first and third pressure adjustment hands & 'set the internal pressure of the flat display panel higher than the two forces inside the container, In this state, the exhaust operation of the impure gas inside the flat display panel is controlled, and the exhaust device including this control means is that according to the present invention, the pressure setting inside the flat display panel is higher than the container The internal pressure 'ensures the conductance exhaustion of the flat display panel, so that it can exhaust the impure gas. The exhaustion time of this method is shorter than the original exhaustion time. It goes without saying that the exhaustion method After that, the amount of impure gas remaining in the interior will be reduced, and we will get a flat display panel with good optical and electrical characteristics. ^ Hereinafter, embodiments of the present invention will be described based on the attached drawings. In the following flat display panel, the case of PDP is described. The gas exhaust device and method for flat display panel of the present invention are not described. However, the flat display panel is composed of an upper panel and a lower panel. For example, LCD, FED, organic EL, etc. are applicable and can be implemented. Fig. 4 is a schematic diagram showing a flat display panel according to a first embodiment of the present invention, particularly a gas exhaust device for a PDP. As shown in FIG. 4, the gas exhaust device of the present invention is provided with a support frame 101 for mounting the PDP50 at the gas exhaust method stage. When heating with vacuum gas, the impure gas is not released, and the structural material from the inside of the disk To distribute the heat required by the impure substances, an infrared (IR) halogen heater 102 is provided in the interior, and a container 1 including first and second through holes 104 formed on one side is also included. 〇; The first through hole IQ of the Rong Gong 100] and

Page 9 594823 V. Description of the invention (7) The whole, the connected first tube 105 is connected, the first adjustment means 11 for adjusting the internal force of the container 100; the second between the container 100 A through-hole 'is connected to the terminal tube 50 of the Denso display board (33 in FIG. 2), and is a second pressure adjusting means 12 for adjusting the pressure inside the second plate 50 of the electro-hydraulic display board. & In the 'infrared halogen heater 1 〇2 as shown in Figure 4, the $ An arrived at the upper' lined up to form a plurality of 10 2 _ι〇 2 κ and the structure, 'outer red halogen heater 1 0 2 According to the additional setting of the lightning pressure level of the power supply unit, the heating temperature is adjusted. According to the Zou sample shown in Figure 4, the present invention is a gas exhaust device, ΪΪ1Λ—pressure adjustment means 110 and second pressure adjustment means, so that it is 10 0 and plate 5 (1 meat all t β η η In the action of the driver, M rolls, guards, and controls the predetermined gas injection-between the valley state of 100 and the plate. The inner row of the plate is guaranteed to be as strong as possible It is constituted by the Umeida device 130. ~ a% ¥ Exhaust 'control with this control At this time, the aforementioned control device 13 is constituted by information, for example, according to the user ’s _ formation and lactation The daylight force ratio information is stored in a certain way, and the first one is the display means determined by the pressure inside the m-force disk. S is the internal pressure of the device, and the first and second works are based on the reference pressure and pressure adjustment means 110 and 12 set by the user. Controlled by the first and industrial milk exhaust and gas injection. Figure 5 is a functional component diagram showing the pressure regulator shown in Figure 4 separately. The internal structure of 0 is as shown in Figure 5. 'First and second pressure regulating means 110,

The tenth stomach 594823 V. Description of the invention (8) 120 / According to the control signal set by the adaptive gas exhaust action, the first valve 111 is connected to this first valve ii J and passes through the first sweat hole 2 3. 104 performs the gas exhaust action, and according to the control signal set for the gas pump 11 2. The gas injection action, the two valves U3 that are opened are connected to this second valve 113, and m passes through the first or the first hole 1 ^ 3, 1 04, perform gas injection operation, for this purpose, I and the first or second through holes 103, 104 are the device, that is, the pressure measurement that must be-= 100 or the internal pressure of the disc 50 Device 115, and the structure: for example, at this time, the predetermined cleaning gas is stored in the aforementioned cylinder 丨 4

He 'Ar, Ne, Xe, N2 and other inert gases. The following describes the operation of the aforementioned constituent device. The first step is finished. After that, the glass 50 and the lower glass 52 are formed between the upper glass 51 and the lower glass 52, and the plate 50 is formed into the predetermined glass glass 50, which is located in the container 1. 〇〇 interior a / stand 1 101, the infrared heat inside the container 丨 〇〇 〇 〇 00 to make the temperature inside the container 100 to reach the temperature of the tray 50, the production of the second, second, left, and left will be the container 100 The inside of the glass is true; ㈣; the glass = the required attached temperature, short time to make the upper glass and the bottom of the container 100, and then 'manipulate the infrared red halogen heater. 〇2 The temperature is cooled to a predetermined exhaust temperature . In a state where the internal temperature of the lower container 100 is cooled to the exhaust temperature, the fork shaver 130 performs first and second pressure adjustments to perform a predetermined exhaust operation. ... and 110 120 again

Page 11 594823

Neiqiu U 30 uses the first pressure adjustment method to keep the container 110 at the initial set vacuum productivity of 1. When the room pressure is 12 ?, the cleaning gas is injected into the disc 50, such as eΓN e, X. e, N2 is an inert gas. 114 and this time the door = means 130 controls the cylinder ^ of the second pressure regulating means i2〇 and the valve 113, which can inject gas, but when the gas is injected into the disk, the pressure must be higher than the pressure inside the container 100 Of washing gas. n meaning. . Next, the purge gas is injected into the poem 'by setting the pressure inside the disc to be higher than the pressure of the container 100, and the disc itself expands to a predetermined level as shown by the dotted line in Fig. 4. That is, a larger exhaust space (mm unit) is formed than the exhaust space (_unit) of the disc 50 itself. As shown by the dotted line in FIG. 4, under the condition that the exhaust space of the disk 50-1 is greatly ensured, the film is controlled by the first pressure adjustment means according to the pressure change ratio information set by the operator in advance. The second pressure adjustment means 120 performs a gas exhaust operation. At this time, the gas exhaust operation by the first and second pressure adjusting means 11 and 12 is shown in FIG. 6, and the first valve 111 and the exhaust of the first and second adjusting means 1 1 and 12 are operated. The pump 112, the container 100, and the gas inside the disc 50 are exhausted; the second valve 113 and the cylinder 114 of the second pressure regulating means 120 are periodically controlled, and a predetermined cleaning gas is mainly fed into the container with a pressure of > to make the container After the pressure difference (ΔP) at a predetermined level is set between the inside of the plate and the plate 50, the second pressure adjusting means 120 is operated to perform an exhaust operation. That is, the exhaust operation is performed with the disk exhaust space being ensured to the maximum.

594823 V. Description of the invention (10) In addition, as shown in FIG. 7, as described above, the pressure between the container 100 and the inside of the pan 50 is adjusted by the first and second pressure adjusting means 110 and 120 as described above. After the difference is set to a certain level, after maintaining its state for a predetermined period of time, the second gas pressure adjusting means 120 can perform exhaust of the impure gas. =: As shown by the dotted line in FIG. 4, in a state where the exhaust gas guided by the plate 50-1 is large, the pressure difference between the container 100 and the inside of the plate 50 is maintained for a certain period of time. After the impure gas between the adjacent walls is induced into the 50-inch wide-exhaust area of the disc, the second pressure adjustment means 20 can be used to exhaust the impure gas. On the other hand, the control device 130 performs the above-mentioned exhaust operation, and "the pressure of the second pressure adjustment means 丨 20 pressure measuring device" is periodically determined. If it is 10 5-10 Torr, the process ends. The exhaust action by the first I force adjustment means, the second valve 11 3 and the cylinder 1 16 that control the first pressure adjustment means ^ 〇, inject a predetermined gas into the container 1 〇, and set the trough device 100 Atmospheric pressure. Next, under the condition of the internal pressure of the container 100 at atmospheric pressure, control = set 1 3 0 — ^ side> and continue the exhaust operation by the second pressure adjustment means 丨 2 〇, while adjusting the design in the container 丨 〇〇 The infrared halogen heating inside sets the inside of the container 100 to normal temperature. & 罝 衣 罝 1gawa controls the second of the second pressure adjustment means 120: the body and the cylinder 114, the predetermined method required for the internal discharge of the injection tray 50

Including gas, for example: X P A ^ M XT ^ A ^ Ae, Ar, Ne, He Temple mixed gas, by sealing the g ^ 丄 element into a gas exhaust and injection method. On the other hand, the aforementioned gas exhaust device for a flat display panel and its method

Page 13 594823 V. Description of the invention (11) The method shown in Figure 8 and Figure 9 can be applied to mass production and can be implemented. . . That is, as shown in FIG. 8, a first pressure adjustment in which a plurality of Rong Yi 2 10 (21 0/2 10) as shown in FIG. 4 are placed, and a through hole is connected to each section of most containers 21 Means 220; the second pressure adjusting means section 23 connected to each of the second through holes of the multiple containers 21o; and the first and second repeated force Vn23 °, the control is performed as shown in Figs. 6 and 7 The aerodynamic ding & 2000 are each composed of the above. #: With the flat panel ===, impure gas can be easily produced in batches on the flat panel. In addition, as shown in FIG. 9, the flat panel 50 is displayed in a container 31; Sun, f1 angle is another force, the second pressure adjustment means 3 =: plate? The first pressure connected from the first through hole of the car / is a second pressure adjusting the internal pressure of the flat display panel 50. = No.-through hole and the aforementioned additional gas n, n A No .: control of the pressure regulating means 330 knot means 330, through the multi-plate 'two' according to the pressure regulating pipe by the second brother: uo, ^ μ # number of the disc inside Figure 6 of the impure gas exhaustion. Figure 7 Λ Di second pressure adjustment means 320, 33 0, the same as 4b control system 3 00 can be used to control the inlet and exhaust operation, which can: = 二: in a container Most flat display panels can be set on it, and it is also easy to order the method of exhausting the impure gas of the flat display panels. Display process: It is a schematic diagram of the layout of the flat panel accompanying the second embodiment of the present invention. 1 ′ The same reference numbers are attached to the same 4 knives as shown in FIG. 4, and detailed descriptions thereof are omitted.

Page 14 594823 V. Description of the invention (12) Body row = Ming system, air plate _ for display panel of the plate, and the second exhaust hole 610 ′ located on the branch to form a knot, in order to make its household wooden plate 60 (The second exhaust hole 61 of 3 is connected ^ Β Rong cry 500 composed of the first through hole 5 1 0 penetrating from the outside, through the aforementioned ^ 5 ^ ηηΑΑ ～ — | Try again 乂 谷 谷 杰, _, the third The Beton hole is connected to the first exhaust hole hole ⑽ of the disc, and is used; ΠΓ 522 and the first penetration 52 of the container 5 ° 〇, through it and; = action 'ί the third Lili adjustment means 1? N, 9fl The first and even third pressure adjusting means 110 and the control device 53 are not provided here, and the 5 structure constitutes the pressure of the container 50 ° and the plate, including the control for the adjustment of the aforementioned first and third pressure adjusting means. The internal structures of 110, 120, and 5 20 are shown in Figure 丨 丨. Two or two pressure regulating means 110 and 120 are connected to the first and the seventh valves, and are the first valve 1 for performing a predetermined gas exhaust operation. 1 1 and exhaust pump 1], Liu Nukou ΛΛ > Α Kong Chenggu pressure is 50 or the pressure of the plate 600, including a pressure measuring device 115 for measuring these pressures, by After that, the third pressure adjusting means 52 0 is connected to the third through hole 51 0 of the container 523 = container 5 0 0, and is controlled according to the control of the gas injection operation to 600. The second valve t of the signal execution switch is connected to the first through hole 103 of the container 500, and the third valve 525 of the signal execution switch is controlled by a control signal determined by the gas injection operation inside the adaptor 500. On the other hand, the control device 53 shown in FIG. 15 is like FIG. 6 and FIG. 7.

594823 Fifth, the curve shown in the description of the invention (13) performs the exhaust operation of the impure gas of the disk 600. That is, the control unit 1 is set to 530 like the one shown in FIG. 6. It controls the valve 1U of the unit U0 while maintaining the internal pressure of the container 500 at a certain β level and inverting it. Inside the disc 3:: ^: non-two-action-for. The Asian side is repeatedly controlled, and the gas is injected into the plate 600 through the third pressure »= that is, the first valve 524 of the hand rice 30. At this time, as described above, the control device 53 controls the gas injection into the disk 600 through the third pressure adjusting means 13, and the internal pressure of the disk 600 is controlled to a certain level (Δρ) of the internal pressure of Gao 500. gas. In addition, as shown in FIG. 7, the control device 530 reads, "The first valve of the first section means?-While holding the container 5. The internal pressure is maintained at two, and the set pressure is to be set, while the third pressure is manipulated. Adjusting means 52 ': For the predetermined cleaning gas in ί /' / Λ ^ 6 00, the pressure in the disk _ must be controlled, which is higher than the internal pressure of the container 50 0 by a certain level. No .: = adjusting means 520 The second valve 524 is to maintain the inside of the pan; the injection of the rolling body at a certain pressure level, but at the same time, 邛 = pressure level, the exhaust operation is performed, so that the container 5 and the pan are within a certain level Difference CP), maintained for a certain period of time, after: After a certain period of time, control the third pressure adjustment means 5 2 0, 2; stop the injection of the washed rolling body, and operate the second pressure adjustment means 2 2 0, -Exhaust gas from the inside of the plate. From the beginning-that is, the gas injection into the inside of the plate 600 and the pressure difference between the inside of the exhaust trough 500 and the inside of the plate 600 are repeated at the same time. The process of exhausting the impure gas inside the disc 6GG can be entered-594823 Explain the gas exhaust operation inside (14). On the other hand, the “gas exhaust device for display panel shown in FIG. 10” described above can be exhausted from the method shown in FIG. 12. That is: As shown by the dashed line in FIG. 10, the internal pressure setting of the disk 600 is higher than the internal pressure of the Valley 500. In this state, the control device 53 (by the second pressure adjustment means 12) To control the impure body inside the disk 600 ～ 1, while continuously exhausting at a predetermined pressure level, through the third pressure adjustment = means 5 2 0, control the predetermined purge gas at the predetermined pressure level, and perform successively The pressure level of the impure gas and the pressure of the purge gas injected into the disk 6〇ο!

The initial pressure between the 6 0 0-1 discs, bUU 4 when the apricots are combined, the continuous impure gas exhaust action. In addition, it is known that the exhaust gas for the flat display panel of the second embodiment described above is adapted to a large plasticizing method as shown in FIG. 8 and FIG. -According to the present invention, an infrared heater is used for the heat source, and the pressure inside the trough is in a vacuum state, which is maintained below the level of the internal force of the flat display panel, the conductance and exhaust of the disk are large, and the impure gas inside the disk is Exhaust. [Effects of the invention] ^ Known, as mentioned above, relying on the present invention, the internal pressure of the flat display panel is set lower than the internal pressure of the container + r. ,,. ^ ^ UL 1 ° 卩 & force, greatly To ensure the flatness of the conductive exhaust of the flat display panel, and make it & & especially 4 ^ 2 L ^ < the exhaust method of ordering impure lice body, than the original exhaust

594823 V. Description of the invention (15) The gas time shortens the exhaust time. It goes without saying that after the exhaust method, the probability of remaining impure gas inside is reduced, and a flat display panel with good optical and electrical characteristics can be obtained. On the other hand, the present invention is not limited to the foregoing embodiments, and can be variously modified and implemented without departing from the technical idea of the present invention.

Page 18 594823 Brief description of the drawings Figure 1 is a process diagram illustrating the previous steps of the plasma display panel. Fig. 2 is an explanatory diagram of the subsequent steps of the plasma display panel. FIG. 3 is a gas exhaust circuit diagram during the exhaust step of the plasma display panel. Fig. 4 is a configuration diagram of a gas exhaust apparatus for a flat display panel according to a first embodiment of the present invention. Fig. 5 is a functional component diagram of the internal structure of the first and second pressure adjusting means 110 and 120 shown in Fig. 4. 6 and 7 are explanatory diagrams of a gas exhaust method using a gas exhaust device of the present invention.

Figs. 8 and 9 are schematic diagrams showing examples of applying a mass production method to a flat exhaust panel gas exhaust device according to the first embodiment of the present invention. Fig. 10 is a schematic diagram showing the configuration of a gas exhaust device for a flat display panel according to a second embodiment of the present invention. FIG. 11 is a functional component diagram of the internal structure and functions of the first to third pressure adjustment means 110, 120, and 50 shown in FIG. 10. FIG. 12 is an explanatory diagram of a gas exhaust method for the apparatus shown in FIG. 10. Explanation of symbols:

5 0 Plasma display board 5 1 Upper glass 5 2 Lower glass 5 3 Frosted glass 1 0 0 Container 101 Support

Page 19 594823 Brief description of the drawings 1 0 2 Heater 1 0 3, 1 0 4 Through hole 105 First pipe 1 1 0 First pressure regulating means 1 2 0 Second pressure regulating means 1 3 0 Control device

Page 20

Claims (1)

594823 _Case No. 90102681_ Year Month Amendment_ 6. Scope of Patent Application 6. The exhaust method as described in item 1 of the scope of patent application, wherein the flat display panel is a plasma display panel. 7. The exhaust method according to item 1 of the scope of patent application, wherein the flat display panel adopts a liquid crystal display device. 8. The exhaust method described in item 1 of the scope of patent application, wherein the flat display panel uses FED. 9. The exhaust method according to item 1 of the scope of patent application, wherein the flat display panel uses an organic electric field light emitting device (organic EL). 1 0. An exhaust device for exhausting the impure gas in the flat display panel, which is in a normal state from the fluorescent layer of the lower glass to the flat surface of the upper glass, the impure gas in the flat display panel is high Excluding, it is characterized by a flat display panel and a support frame for exhausting, and a second through hole connected to the first through hole and the end tube of the flat display panel on one side. The container constituted; the first through-hole connected to the container adjusts the internal pressure of the container through the injection of gas and gas as the first pressure adjustment means; the second through-hole of the connected container is injected with gas And the gas exhaust, adjusting the internal pressure of the flat display panel is the second pressure adjustment means; the first pressure adjustment means, while maintaining the pressure in the container constant, the fluorescent layer of the lower glass to the inner surface of the upper glass The height is larger than Η within the flat display panel JSK11177Amend01.ptc Page 22, 2002.11.08.022 594823 _Case No. 90102681_Year Month Day Amendment_ Sixth, the scope of the patent application will inject cleaning gas into the cleaning gas at a pressure higher than the pressure in the container to control the internal impureness of the flat display panel It is composed of control means for gas exhaust operation. 1 1. The exhaust device according to item 10 of the scope of patent application, wherein the control means is to perform an exhaust action as described above, control the second pressure adjustment means, and inject the cleaning gas inside the flat display panel and the process The process of exhausting the impure gas inside the display panel is repeatedly controlled. 1 2. The exhaust device according to item 10 of the scope of patent application, wherein the cleaning gas is an inert gas. 1 3. The exhaust device according to item 10 of the scope of patent application, wherein an infrared heating element is provided as an exhaust heat source inside the container. 14. The exhaust device according to item 10 of the scope of patent application, wherein the first and second pressure regulating means are adapted to a control signal determined by the aforementioned additional control means, and an exhaust pump for gas exhaust; and The exhaust pump is connected to the first valve that can be opened / closed in response to the control signal of the aforementioned additional control means; a cylinder that injects gas to the control signal determined by the aforementioned additional control means; and is connected to the cylinder to adapt to the aforementioned additional control A control signal of the means, a second valve that can be opened / closed; and a pressure measuring device for measuring a predetermined pressure, the first valve, the second valve, and the pressure measuring device are connected to the first or the first of the container The holes are connected. JSK11177Amend01.ptc Page 23 2002.11.08. 023 594823 _Case No. 90102681_ Year Month Amendment _ 6. Scope of patent application 1 5. Exhaust equipment as described in item 10 of the scope of patent application, many of which are provided with For a container in which a flat display panel can be mounted, a first pressure adjusting means is connected to each of the first through holes of most containers, and a first pressure adjusting means is interposed between each of the second through holes of most containers, and is connected to the flat display panel. Make up. 16. The exhaust device according to item 10 of the scope of patent application, wherein a plurality of flat display panels are provided inside the container, the first pressure adjusting means is connected to the first through hole of the container, and the second pressure adjusting means The second through-holes interposed between the containers and the plurality of flat display panels are connected in a one-to-one correspondence. 1 7. The exhaust device according to item 10 of the patent application scope, wherein the flat display panel is a plasma display (PDP). 1 8. The exhaust device according to item 10 of the scope of patent application, wherein the flat display panel is a liquid crystal display (LCD) device. 19. The exhaust device according to item 10 of the scope of patent application, wherein the flat display panel is an electric field emission element (FED). 20. The exhaust device according to item 10 of the scope of patent application, wherein the flat display panel is an organic electric field light emitting device (organic EL). 2 1. — A kind of gas exhaust equipment for flat display panels, which is in a normal state from the fluorescent layer of the lower glass to the inner surface of the upper glass. JSK11177Amend01.ptc Page 24 2002.11.08. 024 594823 _Case No. 90102681_ Year Month Day Amendment_ Sixth, the scope of patent application for the removal of impure gases in flat display panels is characterized by the composition of the first and Second exhaust hole; a support frame for flat display panel for exhaust method, and first and second exhaust of flat display panel with first through hole and support frame arranged on one side A container formed by a hole and a second and third through hole connected to each other; the first through hole connecting the container is adjusted by the gas exhaust operation inside the flat display panel arranged in the container to adjust the pressure inside the container as the first Pressure regulating means; the second through hole connected to the container, through the cleaning gas injection operation inside the flat display panel arranged in the container, to adjust the internal pressure of the flat display panel as the third pressure regulating means; through the first pressure regulating means, While keeping the pressure in the container constant, the height of the fluorescent layer of the lower glass to the inner surface of the upper glass is larger than the amount of Η within a flat display panel. The net gas is higher than the predetermined pressure of the pressure vessel within the cleaning gas is injected into the injection step, by means of the second pressure regulator, the discharge of pneumatic control level display impure gas inside the boards, as the control means is configured. 2 2. The exhaust device according to item 21 of the scope of patent application, wherein the gas injected into the flat display panel through the third pressure adjusting means is an inert gas. 2 3. The exhaust device according to item 21 of the scope of patent application, wherein the control means is to inject the cleaning gas into the flat display panel at a pressure higher than the pressure of the container through the third pressure adjustment means, and adjust the pressure through the second pressure The means is to exhaust the impure gas inside the flat display panel, and the operation is repeated. JSK11177Amend01.ptc Page 25 2002.11.08.025 594823 Case No. 90102681_Year Month Day Amendment_ VI. Application for Patent Scope 2 4. Exhaust equipment as described in Item 21 of Patent Application Scope, where the control means is set by the first The gas injection control of the three pressure adjustment means to the flat display panel is performed, and after the pressure level of the flat display panel is controlled to be maintained for a certain time, the impure gas exhaust treatment by the second pressure adjustment means is performed. Special application for display display is 25 panels display display υ Ρ Circumference D ρ model equipped with gas Lbv as described in the item, its special request for installation display display crystal liquid is 26 panel display display CL The gas exhaust device is provided with 2 of the above items. 7. The exhaust device according to item 21 of the scope of patent application, wherein the flat display panel is an electric field emission element (FED). 2 8. The exhaust device according to item 21 of the scope of patent application, wherein the flat display panel is an organic electric field light emitting device (organic EL). JSK11177Amend01.ptc Page 26 2002.11.08.026