KR20020060808A - Exhausting method and apparatus for flat display pannel - Google Patents

Abstract

PURPOSE: A gas exhaust apparatus and method is provided to reduce gas exhaust time by easily exhausting gas from the panel through the use of pressure difference between inside and outside of the panel, while improving optical and electrical characteristic of panel. CONSTITUTION: A gas exhaust apparatus comprises a chamber(100) having a support(101) for supporting a flat display panel(50), a heater(102) for generating heat required for emission of impurity from the material constituting the interior of the panel, and a first through hole(103) and a second through hole(104); a first pressure adjusting unit(110) coupled to the first through hole of the chamber, and which adjusts pressure of the chamber; a second pressure adjusting unit(120) coupled to the second through hole of the chamber, and which adjusts pressure in the flat display panel; and a control unit for controlling gas exhaust and injection operation through the first and second pressure adjusting units, at the state where the pressure in the flat display panel is set higher than the pressure in the chamber.

Description

Gas exhaust device for flat panel display panel and method thereof {Exhausting method and apparatus for flat display pannel}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display device, and in particular, in exhausting impurity gas existing between a panel consisting of a top plate and a bottom plate, the outside pressure of the panel and the inside pressure of the panel are set differently so that the gap between the panels is widened. The present invention relates to a gas exhaust device for a flat panel display panel and a method thereof capable of easily exhausting impurity gas inside a panel by securing a large conductance.

In general, the display device is an important interface for exchanging information between humans and electronic devices, and as the amount of information accessible to humans increases due to the development of the information society, it is required to diversify information devices using the information. The characteristics of the display device of the device have become important.

Therefore, research on environment-friendly flat panel displays such as PDP, LCD, FED, organic EL, etc., which are thinner, lighter in image quality, and have various additional functions than existing CRT (Cathode-Ray Tube), is being actively conducted. This is in the spotlight as the next generation display to replace the CRT which has been the mainstream of the display device.

In the flat panel display, the upper and lower plates on which the functional films are stacked are bonded to face each other, and have a predetermined gap therebetween, and thus the impurity gas present in the manufacturing process is necessarily removed.

For example, the manufacturing process of the plasma display panel (hereinafter referred to as PDP) is largely a pre-process of performing a process of providing a predetermined electrode, a dielectric film, a partition, etc. in the upper glass and the lower glass, and the upper glass and the lower glass in which the pre-process is completed. It is divided into a post-process of sealing and forming a panel by evacuating and injecting a predetermined gas.

1 is a view for explaining the pre-process of the upper glass and the lower glass of the general PDP.

In FIG. 1, the upper glass 10 has a transparent electrode 11 and a BUS electrode 12 formed on one surface, and on the transparent electrode 11 and the BUS electrode 12, the discharge current is limited during discharge and the wall charge A dielectric layer 13 that facilitates generation is formed to have a uniform thickness, and the transparent electrode 11, the BUS electrode 12, and the dielectric layer 13 are formed on the dielectric layer 13 by sputtering generated during discharge. A magnesium oxide (MgO) protective film 14 is deposited and formed to protect.

In addition, in FIG. 1, the lower glass 20 forms the address electrode 21 to be orthogonal to the transparent electrode 11 and the BUS electrode 12 formed on the upper glass 10 at a predetermined distance, and the upper glass ( A partition wall 22 is formed between 10 and the lower glass 20 so as to separate the address electrodes 21 into a plurality of discharge cells to prevent color mixing between cells and to secure a discharge space. ) Is formed by coating the phosphor 23.

That is, by forming the upper glass 10 and the lower glass 20 as shown in FIG. 1, the entire process of the plasma display panel is completed.

Next, the post-process of the PDP will be described with reference to FIG.

First, in a later step, a predetermined glass glass 30 is applied to the upper edge portion of the lower glass 20 as shown in FIG. 1 to seal the upper glass 10 as shown in FIG.

At this time, a predetermined cell (aka discharge cell) is formed by the partition wall 22 formed in the lower glass 20. The distance H1 between the lower glass 20 and the upper glass 10 is about 120 to 140 μm, and the distance H2 between the phosphor 23 of the lower glass 20 and the upper glass 10 is about 100 μm.

On the other hand, when the sealing process of the upper glass 10 and the lower glass 20 is finished, the impurity gas component present in the discharge cell 33 formed between the partition wall 22 through the tip pipe 32 coupled to the exhaust hole 31 After that, a predetermined discharge gas is injected into the discharge cell 33 in a vacuum state through the exhaust hole 31. Subsequently, the exhaust process 31 is sealed to exhaust and inject gas, thereby completing the post process.

Here, in the gas exhaust process, the impurity components present in the discharge cells 33 formed between the partition walls 22 are exhausted and set in a vacuum state, and the exhaust path S through the discharge cells 33 is shown in FIG. 3. It will be formed as shown.

However, as shown in FIG. 2, since the distance H2 between the upper glass 10 and the lower glass 20 is about 100 μm and is a very fine space, exhaust of the impure gas through the exhaust path formed as shown in FIG. 3. The treatment causes a problem that the processing time becomes longer.

In addition, since this process is performed in a furnace of an atmospheric pressure hot air circulation type, for example, a furnace, it takes a long time to raise and cool the temperature, and in particular, it takes a long time to exhaust the impurity gas due to the very low exhaust conductance inherent in the panel. There is a problem that productivity is lowered and energy consumption is increased.

Here, the above problem is not limited to the PDP, but is a common problem of a flat panel display panel that processes impurity gas inside a panel composed of an upper plate and a lower plate.

The above problem causes a problem that the production competitiveness of the flat panel display panel including the PDP is delayed, thereby lowering the production competitiveness.

In addition, in the exhaust process, the exhaust gas may not be properly exhausted by performing the exhaust gas treatment of the impurity gas through a minute space, which may cause a decrease in the image quality of the flat panel display panel. There is a problem.

Accordingly, the present invention has been made in view of the above circumstances, and the exhaust pressure of the flat panel display panel is set differently so that the exhaust space of the panel, i.e., the exhaust conductance is secured by a pressure difference. It is a technical object of the present invention to provide a gas exhaust device for a flat panel display panel and a method for reducing the exhaust time of impurity gas and improving the exhaust efficiency of the impurity gas.

1 is a view for explaining a pre-processing process of the plasma display panel.

2 is a view for explaining a post-processing process of the plasma display panel.

3 is a view showing a gas exhaust path in a gas exhaust process of a plasma display panel.

4 is a diagram showing the configuration of a gas exhaust device for a flat panel display panel according to a first embodiment of the present invention;

Figure 5 is a functional block diagram showing the functional separation of the internal configuration of the first and second pressure regulating means (110,120) shown in FIG.

6 and 7 are views for explaining a gas exhaust method using a gas exhaust device according to the present invention.

8 and 9 schematically show an example in which the gas exhaust device for a flat panel display panel according to the first embodiment of the present invention is applied to a mass production system.

10 is a view schematically showing the configuration of a gas exhaust device for a flat panel display panel according to a second embodiment of the present invention.

FIG. 11 is a functional block diagram functionally showing the internal configuration of the first to third pressure regulating means (110, 120, 520) shown in FIG.

12 is a view for explaining a gas exhaust method using the apparatus shown in FIG.

***** Brief description of the main parts of the drawings *****

50: plasma display panel, 51: upper glass,

52: lower glass, 53: glass,

100: chamber, 101: support,

102: heater, 103, 104: through hole,

105: first pipe, 110: first pressure control means,

120: second pressure regulating means, 130: control device.

According to a first aspect of the present invention, there is provided a gas exhaust method for a flat panel display panel, the exhaust method using an exhaust device for a flat panel display panel performing an exhaust process for removing impurity gas inside the flat panel display panel. In this case, a process of exhausting the impurity gas in the flat panel display panel is performed in a state in which the pressure in the flat panel display panel located inside the chamber is set higher than the pressure in the chamber.

In this case, the gas exhaust method for the flat panel display panel is to repeat the process of exhausting the impure gas by injecting a predetermined gas into the flat panel display panel located in the chamber to set a high pressure in the flat panel display panel. It is done.

In addition, the gas exhaust method for the flat panel display panel, a predetermined gas is injected into the flat panel display panel located inside the chamber to set the pressure inside the panel to a predetermined level higher than the pressure inside the chamber. While exhausting the impurity gas inside the panel at a constant speed while injecting a predetermined gas at a constant speed, it is characterized in that the exhaust process is carried out so that the pressure difference in the chamber and the pressure inside the panel is maintained at a constant level for a predetermined time. .

In addition, the gas exhaust device for a flat panel display panel according to the second aspect of the present invention for achieving the above object, and having a support for mounting a flat panel display panel for performing the exhaust process, the first through A chamber comprising a ball and a second through hole coupled with a tip tube of the flat panel display panel, and a first through hole coupled to the first through hole of the chamber to adjust pressure inside the chamber through gas injection and gas exhaust. Pressure regulating means, the second pressure adjusting means coupled to the second through-hole of the chamber for adjusting the pressure inside the flat panel display panel through gas injection and gas exhaust, and the chamber through the first and second pressure adjusting means Impurity gas discharge inside the flat panel with the pressure set inside the flat panel higher than the internal pressure. Is small is characterized in that comprises a control unit that controls to perform.

At this time, the gas exhaust device for a flat panel display panel is characterized by comprising an infrared halogen heater for setting a predetermined exhaust temperature inside the chamber.

In addition, a gas exhaust device for a flat panel display panel according to a third aspect of the present invention, the flat panel display panel having the first and second exhaust holes in the lower glass, and a support for mounting the flat panel display panel for performing the exhaust process In addition to the chamber, the chamber comprising a first through hole and the second and third through holes coupled to the first and second tip pipes of the first and second exhaust holes of the flat panel display panel. Coupled to the first through-hole of the first pressure control means for adjusting the pressure in the chamber through the gas exhaust operation, coupled to the second through-hole of the chamber to adjust the pressure inside the flat panel display panel through the gas exhaust operation A second pressure adjusting means for adjusting a pressure inside the flat panel display panel through a gas injection operation, the third pressure adjusting means being coupled to the third through hole of the chamber; And a control means for controlling impurity gas exhaust operation in the flat panel display panel in a state where the pressure inside the flat panel display panel is set higher than the pressure in the chamber through the force adjusting means and the first to third pressure adjusting means. Characterized in that the configuration.

That is, according to the present invention, by setting the pressure inside the flat panel display panel higher than the pressure inside the chamber to perform the step of discharging the impurity gas in a state in which the exhaust conductance of the flat panel panel is secured, the exhaust time is reduced to the conventional exhaust time. Compared with the above, the flat panel display panel having good optical and electrical characteristics can be obtained by reducing the probability of impurity gas remaining inside the exhausting process.

Hereinafter, embodiments according to the present invention will be described.

Hereinafter, the case of PDP among the flat panel display panels according to the present invention has been described, and the gas exhaust apparatus and method for the flat panel display panel according to the present invention are not described, but the flat panel including a top panel and a bottom panel, for example, LCD It can be applied to FED, organic EL, etc.

4 is a diagram showing the configuration of a flat panel display panel, in particular, a gas exhaust device for a PDP according to a first embodiment of the present invention.

As shown in FIG. 4, the gas exhaust apparatus according to the present invention has a support 101 for seating the PDP 50 in the gas exhaust process step, and there is no emission of impurity gas during exotherm in a vacuum atmosphere, and an internal structure of the panel. A chamber configured with an infrared (IR) halogen heater 102 for dissipating predetermined heat required for release of impurities from a material, and having first and second through holes 103 and 104 formed on one surface thereof. The first pressure regulating means 110 is coupled to the first pipe 105 integrally coupled to the first through hole 103 of the chamber 100 to control the pressure inside the chamber 100. ), The second pressure control for adjusting the pressure inside the plasma display panel 50 by being coupled with the tip tube (33 of FIG. 2) of the plasma display panel 50 through the second through hole 104 of the chamber 100. It comprises a means 120.

Here, the infrared halogen heater 102 is configured such that a plurality of (102 ₁ ~ 102k) is arranged on the top of the panel 50 is seated, as shown in Figure 4, the infrared halogen heater 102 is a predetermined The heating temperature is adjusted according to the voltage level applied to the power supply.

In addition, as shown in Figure 4, the gas exhaust device according to the present invention controls the first pressure control means 110 and the second pressure control means to exhaust the interior of the chamber 100 and the panel 50 and In addition, the control device 130 is configured to control to perform a predetermined gas injection operation so as to secure a large exhaust space, i.e., exhaust conductance, inside the panel due to the pressure difference between the chamber 100 and the inside of the panel 50. do.

At this time, the control device 130 is a predetermined memory for storing predetermined information, for example, the chamber and the reference pressure and exhaust pressure ratio information inside the panel set by the operator, and a predetermined pressure for displaying the pressure inside the chamber and the panel. It is configured to include a display means, to control the gas exhaust and gas injection operation through the first and second pressure adjusting means (110, 120) based on the reference pressure information set by the operator.

Figure 5 is a functional block diagram showing the functional separation of the internal configuration of the pressure regulating means (110,120) shown in FIG.

As shown in FIG. 5, the first and second pressure regulating means 110 and 120 may include a first valve 111 that is opened / closed based on a predetermined control signal according to a gas exhaust operation, and the first valve 111 and the first valve 111. Coupled to the exhaust pump 112 for performing the gas exhaust operation through the first or second through holes (103, 104), the second valve 113 is opened / closed based on a predetermined control signal according to the gas injection operation, A gas cylinder coupled to the second valve 113 to perform a gas injection operation through the first or second through holes 103 and 104, and a corresponding device through the first or second through holes 103 and 104, that is, a chamber ( 100) or a pressure gauge 115 for measuring the pressure inside the panel 50.

At this time, the gas cylinder 14 stores inert gases such as He, Ar, Ne, Xe, and N ₂ .

Next, the operation of the device having the above configuration will be described.

First, in the state where the pre-processing is completed and the panel 50 having the predetermined glass glass 53 formed between the upper glass 51 and the lower glass 52 is positioned on the support 101 inside the chamber 100. In addition, the infrared halogen heater 102 provided in the chamber 100 is controlled so that the temperature inside the chamber 100 becomes a temperature required for sealing the panel 50, for example, about 300 to 400 ° C. That is, the inside of the chamber 100 is made into a vacuum state, and the upper glass 51 and the lower glass 52 are sealed in a short time by setting the temperature required for the sealing.

Then, the infrared halogen heater 102 is controlled to cool the temperature inside the chamber 100 to a predetermined exhaust temperature.

Subsequently, in the state where the chamber 100 is cooled to the exhaust temperature, the controller 130 controls the first and second pressure regulating means 110 and 120 to perform a predetermined exhaust operation.

That is, the control means 130 maintains the pressure inside the chamber 100 through the first pressure adjusting means 110 at the initial pressure of the vacuum, and the panel through the second pressure adjusting means 120. The clean cleaning gas, for example, inert gas such as He, Ar, Ne, Xe, N2 is injected into the inside.

At this time, the control means 130 controls the gas cylinder 114 and the second valve 113 of the second pressure regulating means 120 to inject gas, when the gas is injected into the panel chamber 100 It is controlled to inject a predetermined cleaning gas at a pressure higher than the internal pressure.

Accordingly, since the pressure inside the panel is set higher than the pressure of the chamber 100 when the cleaning gas is injected, the panel 50-1 itself expands to a predetermined level, as indicated by a dotted line in FIG. 4. That is, the exhaust space (μm unit) of the panel 50 itself forms a larger exhaust space (mm unit).

As indicated by the dotted line in FIG. 4, in a state where the exhaust space of the panel 50-1 is largely secured, the controller 130 controls the first pressure adjusting means 110 based on the pressure change ratio information preset by the operator. Gas exhaust operation through the second pressure regulating means 120 is performed.

At this time, the gas exhaust operation through the first and second pressure regulating means (110, 120) is, as shown in Figure 6, the first valve 111 and the exhaust pump 112 of the first and second pressure regulating means (110,120) Exhaust gas inside the chamber 100 and the panel 50, and periodically controls the second valve 113 and the gas cylinder 114 of the second pressure regulating means 120 to supply a predetermined cleaning gas. By injecting at a high pressure, the pressure difference ΔP of a predetermined level is set between the chamber 100 and the inside of the panel 50, and then the second pressure adjusting means 120 is controlled to perform the exhaust operation. That is, the exhaust operation is performed while the exhaust space of the panel is largely secured.

In addition, as shown in Figure 7, the gas exhaust operation through the first and second pressure adjusting means (110, 120) the pressure difference (ΔP) between the chamber 100 and the inside of the panel 50 has a constant level After setting to maintain the state for a predetermined time, it can be carried out to exhaust the impure gas through the second pressure control means (120). That is, as indicated by a dotted line in FIG. 4, the pressure difference ΔP between the chamber 100 and the inside of the panel 50 is maintained for a predetermined time while the panel 50-1 has a large exhaust conductance. After introducing the impurity gas existing between the partition walls of the panel 50 to the widened exhaust region, it can be carried out to perform the impurity gas exhaust operation through the second pressure adjusting means 120.

On the other hand, the control device 130 performs the above-described exhaust operation, and periodically checks the pressure gauge 115 of the second pressure adjusting means 120 to be a predetermined level, for example, 10 ^-6 to 10 ^-7 Torr. In this case, the exhaust operation through the first pressure regulating means 110 is terminated and the second valve 113 and the gas cylinder 113 of the first pressure regulating means 110 are controlled to supply a predetermined gas to the chamber 100. By injecting, the chamber 100 is set to atmospheric pressure.

Subsequently, while the internal pressure of the chamber 100 is at atmospheric pressure, the control device 130 continuously performs the exhaust operation through the second pressure regulating means 120, and the infrared halogen heater 102 installed inside the chamber 100. By adjusting the chamber 100 is set to room temperature.

Subsequently, the control device 130 controls the second valve 113 and the gas cylinder 114 of the second pressure regulating means 120 to discharge a predetermined discharge gas, for example, Xe, By injecting a mixed gas such as Ne, He, Ar, and encapsulating the tip tube 33, the gas exhaust and injection process is completed.

On the other hand, the flat panel display gas exhaust device and the method described above can be applied to a mass production system, as shown in Figs.

That is, as shown in Figure 8, the first pressure control means is provided with a plurality of chambers (210: 2101 ~ 210n) as shown in Figure 4, combined with each of the first through holes of the plurality of chambers 210 6 and 7 through the second pressure regulating means 230 and the first and second pressure regulating means 220 and 230 coupled to the respective second through holes of the plurality of chambers 210 and 220. It may be configured with a control means 200 to control to perform. That is, through the plurality of chambers provided with the flat panel display panel, an impurity gas exhausting process of a large amount of flat panel display panels can be easily performed.

In addition, as shown in FIG. 9, a plurality of flat panel display panels 50: 50 _{1 to} 50n are provided in one chamber 310, and a first pressure control coupled to the first through hole of the chamber 310 is provided. Second pressure regulating means 330 for adjusting the pressure inside the means 320 and the flat panel display panel 50, each second through hole of the multiple flat panel display panel 50 and the second pressure regulating means 330 Coupled to the same, and injects the gas applied from the second pressure regulating means 330 into the plurality of panels 50 equally, and based on the control from the second pressure regulating means 330, Manifold (340: Manifold) for exhausting the impurity gas of the control device 300 for controlling to perform the exhaust operation as shown in Figures 6 and 7 through the first and second pressure regulating means (320,330) Can be configured. That is, by installing a plurality of flat panel display panels in one chamber, it is possible to easily perform the impurity gas exhausting process of a large number of flat panel display panels.

10 is a diagram showing the configuration of the gas exhaust device of the flat panel display panel according to the second embodiment of the present invention. The same reference numerals are assigned to the same parts as those shown in FIG. Omit.

That is, as shown in Figure 11, the gas exhaust device for a flat panel display panel according to the present invention, the panel 600 and the support base 101 is formed by further forming a second exhaust hole 610 in the lower glass The chamber 500 and the chamber 500 are formed by forming a third through hole 510 for penetrating the predetermined pipe 521 coupled to the second exhaust hole 610 of the panel 600 to the outside. The second through hole 610 of the panel through the third through hole 510 of the combination, and the first through hole 103 of the chamber 500 through the predetermined pipe 522 is coupled to the chamber 500 And the chamber 500 and the panel through the third pressure regulating means 520 and the first to third pressure regulating means 110, 120, and 520 which perform a gas injection operation at a predetermined pressure level into the panel 600. It is configured to include a control device 530 for adjusting the pressure of 600.

Here, the internal configuration of the first to third pressure regulating means (110, 120, 520) is as shown in FIG.

That is, the first and second pressure regulating means (110, 120) is coupled to the first and second through holes (103, 104) to perform a predetermined gas exhaust operation, the first valve 111, the exhaust pump 112, the chamber ( 500 or a pressure gauge 115 for measuring the pressure of the panel 600.

In addition, the third pressure adjusting means 520 is coupled to the gas cylinder 523 in which the predetermined cleaning gas is stored and the third through hole 510 of the chamber 500 according to the gas injection operation into the panel 600. The second valve 524 that is opened / closed based on the control signal and the first through hole 103 of the chamber 500 are combined to open based on a predetermined control signal according to the gas injection operation inside the chamber 500. And a third valve 525 that is closed.

Meanwhile, in FIG. 10, the control device 530 performs an impurity gas exhaust operation of the panel 600 according to the profile shown in FIGS. 6 and 7.

That is, as shown in FIG. 6, the control device 530 controls the first valve 111 of the first pressure regulating means 110 to maintain the pressure inside the chamber 500 at a predetermined level. It is controlled to repeat the operation of discharging the impurity gas inside the panel through the pressure regulating means 120 and the gas injection into the panel 600 through the second valve 524 of the third pressure regulating means 130. . At this time, the control device 530 controls the gas injection into the panel 600 through the third pressure regulating means 130, the pressure inside the panel 600 is higher than the pressure inside the chamber 500. Gas injection is controlled to be high (ΔP).

In addition, as shown in FIG. 7, the control device 530 controls the first valve 111 of the first pressure regulating means 110 to maintain the pressure inside the chamber 500 at an initial set pressure. The second valve 524 of the pressure regulating means 520 is injected to inject a predetermined cleaning gas into the panel 600 so that the pressure inside the panel 600 is higher than the pressure inside the chamber 500 by a predetermined level (ΔP). Control to be high. Thereafter, the second valve 524 of the third pressure regulating means 520 is controlled to inject the cleaning gas into the panel 600 to maintain a constant pressure level, and at the same time, perform an exhaust operation to maintain a constant pressure level. To maintain a constant pressure difference ΔP in the chamber 500 and the inside of the panel 600 for a predetermined time, perform an exhaust operation, and control the third pressure adjusting means 520 to stop the cleaning gas injection after a predetermined time. And it can be carried out to control the second pressure adjusting means 120 to perform the gas exhaust operation inside the panel.

That is, the gas injection into the panel 600 and the exhaust gas are simultaneously performed to maintain the pressure difference ΔP in the chamber 500 and the inside of the panel 600, and then the impurity gas in the panel 600 for a predetermined time. By repeatedly performing the process of evacuating, it is possible to perform the gas exhaust operation inside the panel.

On the other hand, the gas exhaust device for a flat panel display panel shown in FIG. 10 can perform the exhaust process in the manner as shown in FIG.

That is, as indicated by the dotted line in FIG. 10, in the state where the exhaust conductance of the flat panel display panel 600-1 is set higher by setting the pressure inside the panel 600 higher than the pressure inside the chamber 500, the controller 530. ) Controls the exhaust gas inside the panel 600-1 to be continuously exhausted to a predetermined pressure level through the second pressure regulating means 120, and the panel 600-1 through the third pressure regulating means 520. The chamber 500 and the panel 600- are controlled by continuously injecting a predetermined cleaning gas at a predetermined pressure level, and setting the same impurity gas exhaust pressure level and the cleaning gas injection pressure level of the panel 600-1. It is possible to carry out continuous exhaust gas exhaust operation while maintaining the initial pressure difference ΔP between 1).

In addition, the gas exhaust device for a flat panel display panel according to the second embodiment can be applied to the large-sized system as shown in Figs.

That is, according to the present invention, by using an infrared halogen heater as a heat source, the pressure inside the chamber is set to a vacuum state, and the exhaust conductance of the panel is increased by maintaining a certain level lower than the pressure inside the flat panel display panel. The operation of exhausting the impure gas existing in the panel is performed.

Therefore, according to the present invention, the impurity gas exhaust time of the flat panel display panel is shortened as compared with the conventional exhaust time, and the probability of the impurity gas remaining in the interior after the exhaust process is reduced to obtain a flat display panel having good optical and electrical characteristics. It becomes possible.

In addition, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the technical spirit of the present invention.

As described above, the present invention sets the pressure inside the flat panel display panel higher than the pressure inside the chamber so that the exhaust gas exhaust step is performed while the exhaust conductance of the flat panel display panel is secured. Compared with the above method, a flat panel display panel having good optical and electrical characteristics can be obtained by reducing the probability of impurity gas remaining inside the exhaust process.

Claims (30)

An exhaust method using an exhaust device for a flat panel display panel which performs an exhaust process for removing impurity gas inside the flat panel display panel, A method of evacuating an impurity gas in a flat panel display panel in a state in which a pressure inside the flat panel display panel located inside the chamber is set higher than a pressure in the chamber. The method of claim 1, The pressure in the chamber is set to the initial pressure level, a predetermined inert gas is injected into the inside of the flat panel display panel at a high pressure to set the internal pressure of the flat panel display panel higher than the pressure inside the chamber. Gas exhaust method for panel. The method of claim 1, The gas exhaust method for a flat panel display panel, characterized in that to repeat the process of increasing the pressure inside the panel by injecting a predetermined gas into the panel during the gas exhaust process and the step of exhausting the impure gas in the panel. The method of claim 3, wherein And increasing the internal pressure of the panel and maintaining a predetermined level higher than the internal pressure of the chamber for a predetermined time, and performing the impure gas exhaust operation. The method of claim 1, The gas exhaust process is a gas exhaust method for a flat panel display panel characterized in that to continuously discharge the impurity gas while maintaining a constant pressure difference between the chamber and the inside of the flat panel display panel. The method of claim 5, In the gas exhaust process, a predetermined pressure is injected into the panel at a first pressure ratio while the pressure inside the panel is set higher than that of the chamber, and the gas inside the panel is exhausted at the first pressure ratio. A gas exhaust method for a flat panel display panel. The method of claim 1, And the flat panel display panel is a plasma display panel (PDP). The method of claim 1, And said flat panel display panel is a liquid crystal display device (LCD). The method of claim 1, And said flat panel display panel is a field emission device (FED). The method of claim 1, And said flat display panel is an organic electroluminescent device (organic EL). A chamber comprising a support for mounting a flat panel display panel for performing the exhaust process, and having a first through hole and a second through hole coupled to a tip tube of the flat panel display panel on one side; A first pressure adjusting means coupled to the first through hole of the chamber to adjust pressure inside the chamber through gas injection and gas exhaust; A second pressure adjusting means coupled to the second through hole of the chamber to adjust the pressure inside the flat panel display panel through gas injection and gas exhaust; And control means for controlling to perform an impurity gas exhaust operation in the flat panel display panel in a state where the pressure in the flat panel display panel is set to be higher than the pressure in the chamber through the first and second pressure regulating means. A gas exhaust device for a flat panel display panel, characterized in that. The method of claim 11, The control means controls the second pressure adjusting means to repeatedly inject a predetermined gas into the flat panel display panel and exhaust the impurity gas inside the flat panel display panel by performing the exhaust operation. A gas exhaust device for a flat panel display panel, characterized in that. The method of claim 12, A gas exhaust device for a flat panel display panel, characterized in that the gas injected into the flat panel display panel is an inert gas. The method of claim 11, And an infrared halogen heater as an exhaust heat source in the chamber. The method of claim 11, The first and second pressure regulating means comprises an exhaust pump for gas exhaust based on a predetermined control signal applied from the control means; A first valve coupled to the exhaust pump and opened / closed according to a control signal applied from the control means, A gas cylinder for gas injection on the basis of a predetermined control signal applied from the control means, A second valve coupled to the gas cylinder and opened / closed according to a control signal applied from the control means; It is configured with a pressure gauge for measuring the predetermined pressure, And the first valve, the second valve, and the pressure gauge are coupled to the first or second through hole of the chamber. The method of claim 11, A plurality of chambers in which the flat panel display panel is provided The first pressure adjusting means is coupled with each of the first through holes of the plurality of chambers, The second pressure adjusting means is a gas exhaust device for a flat panel display panel, characterized in that configured to be coupled to the flat panel display panel through each second through hole of the plurality of chambers. The method of claim 11, A plurality of flat panel display panels are provided inside the chamber, The first pressure regulating means is coupled to the first through hole of the chamber, The second pressure control means is a gas exhaust device for a flat panel display panel, characterized in that coupled to the one-to-one correspondence with a plurality of flat panel display panel through the second through hole of the chamber. The method of claim 11, And the flat panel display panel is a plasma display panel (PDP). The method of claim 11, And the flat panel display panel is a liquid crystal display device (LCD). The method of claim 11, And the flat panel display panel is a field emission device (FED). The method of claim 11, And said flat display panel is an organic electric field light emitting device (organic EL). A flat panel display panel having first and second vent holes formed in a lower glass; In addition to having a support for mounting a flat panel display panel for performing the exhaust process, and coupled to the first and second tip tube of the first through hole and the first and second exhaust holes of the flat panel display panel on one side A chamber comprising second and third through holes, A first pressure adjusting means coupled to the first through hole of the chamber to adjust a pressure inside the chamber through a gas exhaust operation; A second pressure adjusting means coupled to the second through hole of the chamber to adjust a pressure inside the flat panel display panel through a gas exhaust operation; A third pressure adjusting means coupled to the third through hole of the chamber to adjust a pressure inside the flat panel display panel through a gas injection operation; And controlling means for performing the impurity gas exhaust operation in the flat panel display panel in a state in which the pressure inside the flat panel display panel is set higher than the pressure in the chamber through the first to third pressure adjusting means. A gas exhaust device for a flat panel display panel. The method of claim 22, A gas exhaust device for a flat panel display panel, characterized in that the gas injected into the flat panel display panel through the third pressure control means is an inert gas. The method of claim 22, The control means controls to generate a pressure level difference between the chamber and the inside of the panel, and then controls the second pressure adjusting means while controlling the gas injection of the first pressure ratio to the inside of the panel through the third pressure adjusting means for a predetermined time. And controlling the gas inside the panel to be exhausted at a first pressure ratio, and then controlling to stop the gas injection into the panel through the third pressure regulating means for a predetermined time. Panel gas exhaust device. The method of claim 24, And the control means controls to maintain the pressure level of the flat panel display panel set for a predetermined time by controlling the gas injection into the flat panel display panel of the third pressure regulating means. The method of claim 22, The control means sets the pressure inside the flat panel display panel to a predetermined level higher than the pressure inside the chamber through the first to third pressure adjusting means, and then, at the first pressure level through the second pressure adjusting means, A gas exhaust device for a flat panel display panel, wherein the gas is controlled to inject a predetermined gas into the flat panel display panel at a first pressure level through the third pressure regulating means while exhausting the impurity gas. The method of claim 22, And the flat panel display panel is a plasma display panel (PDP). The method of claim 22, And the flat panel display panel is a liquid crystal display device (LCD). The method of claim 22, And the flat panel display panel is a field emission device (FED). The method of claim 22, And said flat display panel is an organic electric field light emitting device (organic EL).