經濟部智慧財產局員工消費合作社印製 。同時，主電腦50可進行提高優先順序的搬蓮控制Μ便將 使用儲料器間搬運裝置42之儲料器間之搬運作業暨使用自 動搬運車38之儲料器36及處理裝置32、34間之搬運作業與 其他的製造製程比較而可快速進行。因此，就可將具高價 的遮蔽門之儲料器36之使用抑制在最小限，且一面使用與 其他製程相同的儲料器間搬運裝置42和自動搬運車38而一 面滿足嚴格的搬運作業時間和醑於其作業環境的要求。 〔元件編號之說明] 30 搬 運 裝 置 32 處 理 裝 置 34 處 理 裝 置 36 儲 料 器 38 白 動 搬 運 車 40 匣 子 42 搬 運 裝 置 50 主 電 腦 52 主 機 54 輸 入 機 構 56 終 端 機 58 通 信 電 纜 60 白 動 搬 蓮 車 控 制器 62 通 信 單 元 64 儲 料 器 控 制 器 66 搬 運 裝 置 控 制 器 本紙張尺度適用中國國家標準（CNS)A4规格（ 210X297公釐） —92 _修正頁 ----------梵-------ΐτ------终 (請先閲讀背面之注_項再填寫本頁) A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（ 1) 1 C 發 明 之 背 景〕 1 1 I C 發 明 之 領 域] 1 I 本 發 明 係 闞於 種 半 導體 晶 圓 匣 搬 運 裝 置 中 之 白 動 搬 蓮 請 先 1 I 閲 J 車 控 制 方 法 ，尤 其 是 闞 於使 半 導 體 晶 画 匣 之 搬 運 能 力 提 高 讀 背 X» 1 的 半 導 體 晶 圓匣 搬 蓮 裝 置中 之 白 動 搬 運 車 控 制 方 法 〇 之 注 J I 意 1 I C 背 景 技 術 之說 明 ] 事 項 1 I 真 1 1 參 昭 圏 15 至圖 16 習 知之 半 導 體 晶 圓 匣 搬 運 裝 置 230 » 填 體 本 係 包 含 有 : 處理 裝 置 32及 34 * Μ 匣 子 232 單 位 收 納 半 導 頁 1 I 晶 圓 並 施 行半 導 體 稹 體電 路 之 製 造 處 理 者 儲 料 器 234 1 1 用 Μ 收 納 複數 個 匣 子 232 者 白 動 搬 運 車 38 用 Μ 在 處 1 1 理 装 置 32 '34和 儲 料 器 234 之 間 進 行 匣 子 232 之 搬 運 作 業 1 訂 者 Μ 及 儲 料器 間 搬 蓮 裝置 42 用 Μ 在 配 置 於 製 造 線 內 之 1 I 複 數 個 儲 料 器234 之 間 進行 匣 子 232 之 搬 運 者 〇 1 | 處 理 裝 置 32 ^ 34係 提 供儲 料 器 234 用 Μ 作 為 處 理 前 匣 子 1 1 I 232和處理後匣子232 的收納場所< ' 2台 自 動 搬 運 車 3 8係 用 1 從 事 於 該 等之 間 的 搬 蓮作 業 〇 又 儲 料 器 間 搬 運 裝 置 42 J 1 在 此 ISI 中 雖 係在 中 途 切 斷顯 示 但 是 其 係 進 行 週 期 蓮 轉 而 1 Ί 多 個 儲 料 器 234 則 被 設 置在 其 周 圍 0 即 使 有 闞 其 他 的 儲 料 1 1 I 器 234 亦 存 在有 各 白 成 組的 處 理 裝 置 32 Λ 34和 g 動 搬 運 車 1 1 38 ° 1 1 尤 其 是 參 照圖 16 半 導體 晶 圓 匣 搬 蓮 裝 置 230 更 包 含 1 1 有 主 電 腦 50， 用 Μ 控 制處 理 裝 置 32 34 儲 料 器 234 1 1 白 動 搬 運 車 38及 儲 料 器 間搬 運 裝 置 42者 Μ 及 通 信 電 纜 58 1 | 9 用 Μ 連 接 各種 裝 置 和 主電 腦 50者 0 1 1 t紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） k A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（9〇 ) 1 1 70 半 導 體 晶 圓 1 1 72 ID卡 1 74 顯 示 部 請 ! 先 1 76 通 信 部 閲 讀 1 背 I 80 儲 料 器 起 重 機 之 1 注 1 82 移 載 機 意 事 1 項 I 84 移 動 裝 置 再 填 1 86 白 動 搬 蓮 車 用 出 □ 埠 寫 本 (;- 頁 1 88 白 動 搬 運 車 用 入 P 埠 1 1 90 白 動 搬 運 車 用 埠 外 遮 蔽 門 1 1 92 白 動 搬 運 車 用 埠 内 遮 蔽 門 1 1 94 儲 料 器 面 板 訂 1 96 儲 料 器 架 1 I 98 搬 運 裝 置 用 埠 1 1 1 100 白 動 搬 運 車 用 出 〇 交 接 埠 1 1 線 * 102 通 信 單 元 104 g 動 搬 蓮 車 用 入 〇 交 接 埠 1 | 110 搬 運 裝 置 用 埠 内 遮 蔽 門 1 I 112 手 動 用 埠 内 遮 蔽 門 1 1 I 114 手 動 用 埠 外 遮 蔽 門 1 1 116 手 s&l. 動 用 入 口 埠 1 1 118 手 動 用 出 D 埠 1 I 120 ID卡 讀 寫 裝 置 1 1 I 121 操 作 面 板 1 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公嫠） -93 -修正頁 經濟部中央標隼局員工消費合作社印製 A7 B7 五、發明説明（；·：） 主電臞50包含有··主櫬52，用K進行計算處理者；輸入 櫬構54，用K提供製品之製造基準資料者；Μ及作業者终 端皤56，在媒内配置有多俚者。 作為鏞科器234之一部分的儲料器控制器64係按照來自 通信霣期58之主霣臞50的作業指示，而驅使儲料器234之 其他的構成要素以完成預定的作業。作為自動搬蓮車38之 一部分的自動搬蓮車控制器60，係按照來自通信電孀58之 主電臛50的作業指示，而驅使自動搬運車38之其他的構成 要素以完成預定的作業。自動搬蓮車控制器60和自動搬運 車38之通信係透通控制局側通信單元62而利用無線電通信 來進行。作為儲料器間搬運裝置42之一部分的齡料器間搬 蓮裝置控制器66，係按照來自通信電孀58之主電腦50的作 業指示，而透過儲料器間搬運裝置42之構成要素、進而透 過通信電期[58而驅使儲料器234之構成要素以完成預定的 作業。 參照圔17，就半導體晶圓匣搬蓮裝置230所搬蓮的半導 體晶圓70及其半導體晶圓匣232暨被装接於半導體晶圔匣 232上之習知的ID卡240加W說明。半導體晶圓（Μ下， 稱為「晶固j 。）70內装入有多個半導體積體電路（未圖 示）。半導體晶圔匣（Κ下，稱為「匣子」。）232,收納 有複數片晶圓70而成為搬浬之最小單位。ID卡240係裝接 在匣子232 上。ID卡240 上，餘存有藺於被收納在匣子 2 32内的晶圓70及匣子232的資訊，且可利用顯示部7 4將 其資訊之一部分予Μ顬示。又，ID卡240 ，在與後述之外 本k張尺度適财@@家標準（CNS ) Α4· ( 2丨Gx297公楚) — '~Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. At the same time, the host computer 50 can perform the priority-moving control. Then, the storage operation between the stockers using the stocker handling device 42 and the stocker 36 and the processing devices 32 and 34 using the automatic carrier 38 will be performed. Compared with other manufacturing processes, the transfer operation can be performed quickly. Therefore, it is possible to suppress the use of the stocker 36 with a high-priced shielding door to a minimum, and to meet the strict handling operation time while using the same inter-stocker conveyance device 42 and the automatic conveyor 38 as other processes. Respond to the requirements of their operating environment. [Description of component numbers] 30 Carrying device 32 Processing device 34 Processing device 36 Stocker 38 White moving van 40 Box 42 Moving device 50 Host computer 52 Host 54 Input mechanism 56 Terminal 58 Communication cable 60 White moving lotus car control 62 Communication unit 64 Stocker controller 66 Handling device controller This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) —92 _correction page ------------ Van-- ----- ΐτ ------ Final (please read the note _ item on the back before filling this page) A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (1) 1 C of the invention Background] 1 1 Field of IC invention] 1 I The present invention is a kind of white wafer moving device in a semiconductor wafer box conveying device. Please read the J-car control method, especially for conveying semiconductor crystal boxes. ability High-reading back X »1 control method of the white moving truck in the semiconductor wafer cassette moving device. 0 Note JI 1 IC Description of the background technology] Matter 1 I True 1 1 See Zhao 15 to Figure 16 Wafer Carrying Device 230 »Filler This series contains: Processing devices 32 and 34 * Μ Box 232 Units contain semi-leader pages 1 I Manufacturing of wafers and semiconductor semiconductor circuits Handler stocker 234 1 1 Use Μ A plurality of boxes 232 are accommodated by a white moving truck 38. The box 232 is moved between the processing unit 32 '34 and the stocker 234 by using Μ. 1 The orderer M and the container moving device 42 are used by Μ. Carrier for box 232 between 1 I plural stockers 234 arranged in the manufacturing line 〇1 | Processing device 32 ^ 34 provides stocker 234 to use M as pre-processing Sub 1 1 I 232 and the storage place of the processed box 232 < '2 automatic trucks 3 8 series 1 to perform the lotus transfer operation between them 0 and the storage room transfer device 42 J 1 here ISI Although the display is cut off in the middle, it is cycled and switched. 1 多个 Multiple storage 234 are set around it. 0 Even if there are other storages 1 1 I 234 also exists in groups The processing device 32 Λ 34 and g moving truck 1 1 38 ° 1 1 Especially referring to FIG. 16 The semiconductor wafer box moving device 230 further includes 1 1 has a host computer 50, and the processing device 32 34 is controlled by Μ. 1 1 White moving truck 38 and conveyer between storers 42 and M and communication cables 58 1 | 9 Connect various devices and host computer 50 with M 0 1 1 t Paper size applies to Chinese National Standard (CNS) A4 specifications ( 210X297 mm) k A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (90) 1 1 70 Semiconductor wafer 1 1 72 ID card 1 74 Display section please! First 1 76 Communication section read 1 Back I 80 Stocker crane 1 Note 1 82 Transfer machine intention 1 Item I 84 Refill for mobile device 1 86 Port copy for Baidong moving lotus car (;-Page 1 88 Port for white moving van for P port 1 1 90 Door outside the port for white moving van 1 1 92 Baidong Concealed door in the port for the van 1 1 94 Stocker panel order 1 96 Stocker rack 1 I 98 Port for the handling device 1 1 1 100 For white moving vans 0 Crossing port 1 1 line * 102 Communication unit 104 g Port for moving lotus 〇Transfer port 1 | 110 In-port port door 1 I 112 Manual port port door 1 1 I 114 Manual port port door 1 1 116 Hands & l. Mobile entrance Port 1 1 118 Manually used D Port 1 I 120 ID card reader device 1 1 I 121 Operation panel 1 1 1 This paper size is applicable to China National Standard (CNS) A4 specification (210X297 cm) -93-Correction page Ministry of Economy Printed by the Consumer Standards of the Central Bureau of Standards A7 B7 V. Description of the invention (; · :) The main power supply 50 includes the main power supply 52, which is calculated by K; enter the structure 54 and use K to provide the manufacture of products Reference profiler; M and operator terminal 皤 56, who have multiple users in the media. The stocker controller 64, which is a part of the processor 234, drives the other constituent elements of the stocker 234 to complete a predetermined operation in accordance with the operation instructions from the master 50 of the communication period 58. The automatic lotus car controller 60, which is a part of the automatic lotus car 38, drives the other components of the automatic van 38 to complete predetermined operations in accordance with the operation instructions from the main battery 50 of the communication battery 58. The communication between the automatic car controller 60 and the automatic car 38 is performed by radio communication through the communication unit 62 on the control side. The aging hopper transfer device controller 66 as a part of the hopper transfer device 42 passes through the constituent elements of the hopper transfer device 42 in accordance with the operation instructions from the host computer 50 of the communication unit 58. Furthermore, the constituent elements of the stocker 234 are driven by the communication period [58] to complete a predetermined operation. Referring to 圔 17, the semiconductor wafer 70 transferred by the semiconductor wafer cassette transfer device 230, the semiconductor wafer cassette 232 thereof, and the conventional ID card 240 mounted on the semiconductor wafer cassette 232 will be described. A semiconductor wafer (hereinafter referred to as "Jingu j.") Contains a plurality of semiconductor integrated circuits (not shown). A semiconductor wafer cassette (hereinafter, referred to as a "casket") 232, storage There are a plurality of wafers 70 and it becomes the smallest unit for carrying. The ID card 240 is attached to the case 232. On the ID card 240, the remaining information stored on the wafer 70 and the box 232 stored in the box 2 32 is stored, and a part of the information can be displayed to the display unit 74 by the display unit 74. In addition, the ID card 240 is in addition to the below-mentioned. This k scales are suitable for financial @@ 家 标准 （CNS） Α4 · (2 丨 Gx297 公 楚) — '~
In I m 1 m 1^1 ^^1 IK (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 _ A 7 rP^c ^ B7 五、發明説明（91) 122 搬運裝置用埠外遮蔽門 124 升降機 130 匣子承接器具 132 通信窗口 140 台車 142 通信單元 144 機器臂 146 機器手 148 機器手爪 150 移載台 152 操作面板 154 緩衡板 156 感應帶 160 行走軌道 162 台車 164 懸吊金屬器具 170 主機 172 匣子台階 174 自動搬運車通信單元 180 主機 182 匣子台階 190 儲料器 192 自動搬運車用出口交接埠 194 自動搬運車用入口交接埠 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -94~- 修正頁 ----------gt--------IT------^ . /11 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（：i) 部控制系之間，可透過通信部76改寫被儲存的資訊之一部 分。又，可非接觸地報告被儲存的資訊。另外，通信部76 被安裝在ID卡240的正面上。圖17(a)及圖17(b)係各別 顯示装接有ID卡2 40之匣子232的晶圓70呈垂直的横放姿 勢和圼水平的縱放姿勢*鬮17(c)係顯示ID卡240的詳细 者。 Μ下，Μ圖說明作為半導體晶画匣搬蓮裝置之構成要素 的處理裝置32、34、儲料器234、自動搬蓮車38及儲料器 間搬運裝置42的詳细。 參照圖10，處理裝置32包含有：主機170 ，Μ每次一 Η 或複數片地將晶圓70施行半導體積體電路之製造處理者； 二個厘子台階（cassette stage)172 ，Ml匣子單位收納 應處理的匣子2 32者；自動搬運車通信單元174 ，對自動 搬運車38輸出匣子台階172之狀態Μ確認自動搬蓮車38在 朝匣子台階172置放處理前匣子232之前是否有弄錯之其 他的匣子232或在取出處理後匣子232之前該匣子232是 否已正確搭載在匣子台階172上。 參照圖11，處理裝置34包含有：主機180 ，Μ每次一片 或複数片地將晶圓70施行半導體積體電路之製造處理者； 二個匣子台階182 ，以1匣子單位收納應處理的匣子232者 ;自動搬運車通信單元174 ，對自動搬運車38输出Ε子台 階182之吠態Μ確認自動搬運車38在朝匣子台階182置放處 理前匣子232之前是否有弄錯之其他的匣子2 32或在取出處 理後匣子2 32之前該匣子232是否已正確搭載在匣子台階 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） β _ I nn HI l^n - I - I m - I , n^i I —^n ,--^-6 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 _B7 五、發明説明（92) 196 白 動 搬 運 車 用 出 □ 埠 198 g 動 搬 運 車 用 入 P 埠 200 移 動 裝 置 202 移 動 裝 置 210 手 動 用 出 P 埠 220 匣 子 承 接 器 具 230 半 導 體 晶 圓 匣 搬 運 裝置 232 匣 子 234 儲 料 器 240 ID卡 250 移 動 裝 置 252 白 動 搬 運 車 用 出 □ 埠 254 白 動 搬 運 車 用 入 P 埠 260 手 動 用 入 P 埠 262 手 動 用 出 □ 埠 270 ID卡 讀 寫 裝 置 (請先閲讀背面之注意事項再填寫本頁) -線！ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 修正頁 經濟部中央標準局員工消費合作社印製 A7 __B7五、發明説明（‘1) 182 上。 參照_18至圔20，說明儲料器234 。圖18及圖19，係各 別從自動搛蓮車作業面和位於其相反側的作業者作業面可 看到之情況下描鑰儲料器234者。圖20係從箭視a詳细描 繪手動用入口埠260者。又，該等圏面係在可看到内部構 造之情況下將作為外裝面板之儲料器面板9 4的一部分予以 切除而描鑰者。儲料器234 ’係包含横放搭載複数個匣子 232的儲料器架96，且藉由將複數個匣子232堆於垂直方 向K確保多個匣子232的收納埸所。儲料器234更進一步 包含有：儲料器間搬運裝置用埠98，為儲料器架96之一部 分用Μ收納或送出由儲科器間搬運裝置42所運來的匣子 2 32者；手動用入口埠260 ，為餘料器架96之一部分且為 作業者（未圖示）為了將匣子232入庫而使用者；手動用 出口埠262 ，為儲料器架96之一部分且為作業者為了將匣 子232出庫而使用者•·自動搬運車用出口埠252 ，為自動 搬運車38用Μ接收匣子232者；自動搬理車用出口交接埠 100·為儲料器架96之一部分用以送出匣子232給自動搬運 車用出口埠252者··自動搬運車用入口埠254,用Μ從自動 搬蓮車38接收匣子232者；自動搬蓮車用人口交接埠1〇4, 為儲料器架96之一部分用以從自動搬蓮車用人口埠254接 收匣子2 32者；儲料器起重機80，將被堆起之儲料器架96 配置於其兩側用Κ進行該儲料器架96所形成的匣子收納場 所和做為該儲料器架96之一部分的各種埠間之匣子232的 搬運作業者·•移載櫬82，用以接收後述之儲料器間搬運裝 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） -7 - I I I - — m - -I— I— m 1.. - - - I -- ^^1 ^^1 -- \ (請先閲讀背面之注意事項再填寫本頁) A7 B7 經濟部中央樣準局貝工消費合作社印製 五、發明説明（，）） 置42之台車上的匣子232且置放於儲料器間搬運裝置用埠 9 8上、或相反地從該處送出匣子23 2至空台車上者；Μ及 前進移動裝置250,用以使匣子232從自動拥1蓮車用出口交 接埠100移動至自動搬運車用出口埠252上，或從自動搬 蓮車用人口燁254移動至自動搬蓮車用入口交接埠104上 者° 儲料器起重機80、移載機82、及前進移動裝置250係分 別進行1匣子、2匣子、1匣子單位的搬蓮作業。可載置於 儲料器間搬蓮裝置用埠98、手動用入口埠260 、手動用出 口埠262、自動搬運車用出口交接埠100、自動搬蓮車用入 口交接埠104、自動搬蓮車用出口埠252及自動搬蓮車用入 口埠25 4上的匣子個數係分別為2匣子、1匣子、1匣子、1 匣子、1匣子、1匣子、1匣子。又，前進移動裝置250有準 備2台。随之自動搬蓮車用出口埠25 2、自動搬運車用入口 埠254、自動搬運車用出口交接埠100、及自動搬運車用入 口交接埠104*係分別每次備有2個。又，手動用入口埠 260和手動用出口埠262 ，亦分別每次備有2個。 如園20所示在手動用人口埠260上，安裝有ID卡讀寫裝 置270 。其安裝方向由於通信部76係位於ID卡240之正面 所K必需將ID卡讀寫裝置270安裝在ID卡240的正面上。ID 卡2 40的正面若朝向作業者作業面而配置ID卡讀寫裝置2 70 時’ ID卡讀寫裝置270因會受到阻礙而很難取出匣子232。 因此，手動用人口埠260上的匣子232之方向，畲被決定成 使被安裝在匣子232上的ID卡240之正面對作業者作業面往 1^1 In nn i m I ia^i 11^1 in ^ J. --"、vs (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 8 經濟部中央標準局員工消費合作社印装 A7 B7__ 五、發明説明（6) 右轉90度的方向。儲科器起重櫬80由於無法變更匣子232 之方向，所W在儲料器架96的K子232之方向會變成與前 述手動用入口埠260上的匣子232之方向相同。被置於自動 搬運車用出口埠252和自動搬蓮車用人口埠254内的K子 232之方向，係成為自動搬蓮車38所容易移載裝接的ID卡 240會成為將自動搬蓮車38之作業面設為正面者。因而前 進移動裝置250亦必需在匣子232之移動作業中進行方向 之變更。 儲料器234更進一步包含有搡作面板121 ’用W在作桊 者將匣子232通過手動用入口埠260予入庫之際或通過 手動用出口埠262予K出庫之際進行操作者° 參照圔8，自動搬缠車38，包含有：台車140，被貼附在 地板上的感懕帶156所導引而行走者；搬運車側通信單元 142 ，在與自動搬浬車控制器60之控制局側通信單元62之 間用Μ進行資訊之交換者；機器臂144、機器手146、櫬器 手爪148，分別用Μ進行匣子232之移載作業者；4個移載 台150 ，於行走作業中係預先將由處理裝置32及3 4或儲料 器234取入之匣子40Κ縱放姿勢保持者；操作面板152’在 與作業者之間用Μ進行資訊之交換者；Μ及媛衡板154， 用Μ檢知障礙物俾使執行中之作業停止者。 參照圖9，儲科器間搬運裝置42包含有：行走軌道160, 成為環形狀；台車162，Μ —定方向移動於行走軌道160上 ，用Μ搬運最大2個匣子232者；Μ及懸吊金牖器具164， 用Κ將行走軌道160安裝在天花板上者。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210'〆297公釐） " II I— H - -« ^^1 u ml m i n n m ^19 (請先閲讀背面之注意事項再填寫本頁) 9 - Μ Β7 經濟部中央標準局員工消費合作社印製 五、發明説明 ( ·.* i ) 1 1 1 其 次 就 習 知 之 半 導 體晶 圓 匣搬運 裝置 230 之 控 制 方 法 1 1 1 加Μ 說 明 〇 首 先 發 生 於 處理 裝 置32、 34之 處理 後 匣 子 232 ^^ 1 I 會依 白 動 搬 運 車 38而 被 運送 入 庫於儲 料器 234 内 其 次 就 請 1 1 利用 儲 料 器 間 搬 蓮 裝 置 42朝 儲 料器234蓮 出之 際 的 控 制 方 Pv] 讀 背 1 1 法（1) 加 Μ 敘 述 接 著 就新 的 處理前 匣子 232 白 前 段 之 儲 之 注 \1 I 意 1 [ 料器 234 運 送 而 入 庫 於 儲料 器 234内 且按 照處 理 裝 置 32 事 項 1 I 再 1 1 34之 要 求 將 匣 子 232予Μ出庫而利用自動搬運車38朝處理 填 本 裝置 32 '34 運 送 之 際 的 控制 方 法（2) 加Μ 敘述 最 後 就 來 頁 1 I 自手 動 用 入 □ 埠 260之人庫和來自手動用出口埠262之 出 庫 1 1 I 的控 制 方 法 (3) 加 Μ 敘 述。 1 1 就 發 生 於 處 理 裝 置 32 、34之 處理後 匣子 232 會 依 白 動 搬 1 訂 蓮車 38而 被 蓮 送 入 庫 於 儲料 器 234内 *其 次利 用 儲 料 器 間 1 | 搬運 裝 置 42朝 儲 料 器 234運 出 之際的 控制 方法 (1) 加 Μ 敘 1 I 述。 1 1 I 儲 料 器 234 之 白 動 搬 蓮車 用 入口埠 254 及儲 料 器 間 搬 運 1 裝置 用 璋 98係 在 開 始 著 手時 之 初期化 結束 時空 著 〇 因 此 對 1 主電 腦 50 透 過 通 信 電 纜 58報 告 各埠的 匣子 232 之 可 收 納 情 1 1 況。 接 收 該 等 埠 之 空 位 資訊 的 主電腦 5 0， 不會 感 知 儲 料 器 1 | 234 之 匣 子 232 的 充 足 狀況 而 只會Μ 該資 訊對 使 用 白 動 搬 1 1 I 運車 38及 儲 料 器 間 搬 運 裝置 42的Ε子 232 之儲 料 器 234 進 1 1 行搬 運 作 業 之 可 能 或 不 可能 的 判斷。 1 1 在 如 上 逑 之 狀 況 中 處理 裝 置32、 34 * 會透 遇 通 信 電 嫌 1 I 58將 已 結 束 半 導 體 積 體 電路 之 製造處 理的 處理 後 匣 子 232 1 I 之退 出 要 求 發 送 至 主 電腦 5 0上。處 理裝 置32 % 34有 時 會 1 1 本紙張尺度適用侧家標準（CNS)M規格（讓腾楚） 經濟部中央標隼局員工消費合作社印裂 A7 B7五、發明説明（b) Ml匣子單位要求其退出要求而有時會Μ複數個匣子單位 要求其退出要求。已接受該退出要求之主電腦50，由於事 先會由儲料器234報告自動搬運車用入口埠254之空位資 訊所Κ會立即透過通信電钃58對自動搬蓮車38進行搬運作 業指示。但是可使用之自動搬運車用入口埠254 ，每次會 在處理装置32、34中決定* Μ將其資料預先透過輸人機構 54提供給主電臞50。又，來自處理裝置32、34之退出要求 即使是Μ 2匣子單位來進行，由於來自自動搬運車用入口 埠254之入庫亦可Ml匣子單位進行所Μ主電腦50就必需將 1匣子單位之搬運作業指示送至自動搬運車38上。 由主電腦50接收1Μ子之搬運作業指示的自動搬運車控 制器60，會從有複數個的自動搬蓮車38之中將作業分派至 最適於其搬蓮作業的部分上，且利用控制局側通信單元62 和搬運車側通信單元142與主機進行無線通信俾使搬蓮作 業之進行。該作業之內容，首先台車140會自待機地按照 被貼附在地板上的感應帶156 ，朝向作為搬運處的處理裝 置32、34行進。當自動搬理車38到達該處時首先會透遴自 動搬運車通信單元174進行在該匣子台階172、182上是否 存在有匣子232的確認。之後，會驅使機器臂144、機器手 146及機器手爪148，取入位於匣子台階172、182上的適當 匣子232，並置放在本身的移載台150上。當該載置作業完 成時，台車140會再次從搬運處的處理裝置32、34朝搬運 目的地之儲料器234所指示的自動搬運車用入口埠254移 動。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） .1 —.1 In 1^1 n I. n I ml m l^i— ——n ^{y -- -- yt 、-t (請先閲讀背面之注意事項再填寫本頁) A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 ( !) ) 1 1 當 g 動 搬 運 車 38到 達 該 處 時 會 Μ 與 之 前 相 反 的 顒 序 將 移 1 1 載 台 150 上 的 逋 當 匣 子 232 置 放 在 被 指 示 的 白 動 搬 蓮 車 用 1 1 入 P 埠 254 上 〇 白 動 搬 運 車 38在 將 適 當 匣 子 232 置 放 在 被 /S 請 1 1 先 1 指 示 的 白 動 搬 運 車 用 入 P 埠 254 上 之 刖 會 透 過 對 白 動 搬 閲 讀 背 ,| I 運 車 通 信 單 元 102 在 白 動 搬 運 車 用 入 P 埠 254 上 確 認 是 否 面 1 .1 I 存 在 有 弄 錯 的 匣 子 232 若 存 在 時 就 立 即 發 報 錯 誤 〇 此 乃 _ 1 1 I 根 據 因 匣 子 232 基 於 來 白 儲 料 器 234 之 適 當 白 動 搬 運 車 用 再 填 1 入 P 埠 254 的 空 位 資 訊 而 被 運 來 所 Μ 其 他 的 匣 子 232 位 寫 本 頁 农 1 於 同 一 埠 上 時 為 異 常 狀 態 的 判 斷 者 0 當 被 指 示 之 所 有 的 作 1 | 業 皆 完 成 時 白 動 搬 運 車 控 制 器 60 會 透 過 通 信 電 嫌 58對 主 電 1 I 腦 50進 行 作 業 完 成 報 告 〇 1 1 訂 接 受 來 自 白 動 搬 運 車 38之 作 業 兀 成 報 告 的 主 電 腦 50 會 1 對 儲 料 器 234 進 行 來 白 適 當 匣 子 232 之 動 搬 運 車 用 入 □ 1 1 埠 254 的 入 庫 作 業 指 示 0 在 儲 科 器 控 制 器 64按 照 透 過 通 信 1 | 電 纜 58所 送 來 的 該 入 庫 作 業 指 示 確 保 儲 料 器 架 96上 的 收 1 納 場 所 之 後 就 會 著 手 進 行 作 業 0 在 無 法 確 保 收 納 場 所 時 1 9 儲 料 器 控 制 器 64就 不 會 著 手 作 業 而 會 原 狀 在 收 納 場 所 1 1 上 等 待 發 生 空 位 者 〇 已 著 手 入 庫 作 業 之 儲 料 器 234 首 先 1 1 會 驅 使 前 進 移 動 装 置 250 將 該 匣 子 232 旋 轉 90度 方 向 之 後 1 I 從 自 動 搬 運 車 用 入 P 埠 254 移 動 至 白 動 搬 運 車 用 入 Ρ 交 接 1 I 埠 104 上 〇 當 移 動 作 業 完 成 時 儲 料 器 起 重 機 80 會 開 始 移 動 1 1 而 § 動 搬 蓮 車 用 入 P 交 接 埠 104 上 的 匣 子 232 會 被 運 送 至 1 1 已 更 受 儲 料 器 控 制 器 64確 認 之 儲 料 器 架 96上 的 收 納 場 所 中 1 1 9 完 成 % 列 的 入 庫 作 業 〇 當 作 業 完 成 時 儲 料 器 控 制 器 64 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） - 1 2 — A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (in ) 1 1 I 會 透 過 通 信 電 纜 58對 主 電 腦 50進 行 作 業 完 成 報 告 。在從 白 1 1 | 動 搬 運 車 用 入 P 埠 254 至自動搬蓮車用入口交接埠104的 1 I 移 動 作 業 中 當 動 搬 運 車 用 入 P 璋 254空著時 ，儲料器234 請 先 1 1 會 與 開 始 著 手 時 的 初 期 化 完 成 時 同 樣 地 對 主 電 腦 50送出 該 閱 讀 背 -1 1 埠 之 空 位 資 訊 且 備 具 於 使 用 下 個 白 動 搬 運 車 38的搬 運 J i 作 業 〇 悬 事 項 1 I 再 1 1 已 接 收 來 白 儲 料 器 234 之 入 庫 作 業 完 成 報 告 的 主電腦 50 為 本 表 9 會 決 定 其 匣 子 232 的 搬 運 百 的 地 儲 料 器 234 〇 又，進 行 頁 1 I 該 搬 運 0 的 地 儲 料 器 234 之 儲 料 器 間 搬 運 裝 置 用 埠98是 否 1 1 空 著 的 確 認 〇 埠 之 空 位 資 訊 係 從 儲 料 器 234 開 始 著手時 的 1 1 初 期 化 完 成 時 或 在 該 埠 空 著 的 時 點 上 會 向 主 電 腦50報 告 1 訂 〇 當 搬 運 巨 的 地 儲 料 器 234 之 儲 料 器 間 搬 運 裝 置 用埠98空 1 I 著 時 主 電 腦 50 會 對 儲 料 器 間 搬 蓮 裝 置 42 透 過 通 信電纜 58 1 I 向 匣 子 232 之 儲 料 器 234 送 出 搛 蓮 作 業 指 示 〇 已 接收此 的 1 1 儲 料 器 間 搬 蓮 裝 置 控 制 器 66 首 先 會 透 過 通 信 電 鱺58對 搬 1 運 處 儲 料 器 234 委 託 從 該 匣 子 232 之 收 納 場 所 至 儲料器 間 1 丨 搬 蓮 裝 置 用 埠 98的 移 動 作 業 〇 被 委 託 作 業 的 儲 料 器234 係 1 1 使 用 儲 料 器 起 重 機 80而 取 入 該 匣 子 232 0 接 著 對儲料 器 1 1 I 間 搬 運 裝 置 控 制 器 66進 行 作 業 完 成 報 告 0 已 接 收 該作業 完 1 1 成 報 告 的 儲 料 器 間 搬 運 裝 置 控 制 器 66 9 係 使 空 台 車162 移 1 1 動 至 與 搬 蓮 處 匣 子 232 對 應 的 站 台 上 0 若 完 成 移 動時， 黼 1 1 料 器 間 搬 運 裝 置 控 制 器 66 會 再 次 對 搬 運 處 儲 料 器234 委 1 I 託 對 該 空 台 車 162 移 載 儲 料 器 間 搬 蓮 裝 置 用 埠 98上的該 匣 1 1 1 子 232 〇 被 委 託 的 儲 料 器 234 係 使 用 移 載 櫬 82移 載適當 匣 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 13 經濟部中央標準局負工消費合作社印裝 A7 B7 五、發明説明（Π.) ~ 子232 。接著，對儲科器間搬運裝置控制器66進行作n胃 成報告。已接收該作業完成報告的儲料器間搬運裝置控_ 器66，使滿台車162移動至與搬運目的地儲料器234 的站台。儲料器間之搬運作業雖仍在繼續進行中，但 處理裝置32、34中所發生的處理後匣子232會依自動 車38而被浬送人庫於儲料器234内，進而结束利用儲料器 間搬蓮裝置42對下一裝置之儲料器234出庫理送之一糸％ 的搬蓮作業控制方法的說明。 纽而就新的處理前匣子2 32會被前段之儲料器234運送 而入庫於儲料器234内且按照處理裝置32、34之要求將匣 子232予W出庫再利用自動搬運車38對處理裝置32、34蓮 送的方法（2)加Μ說明。 藉由搬運目的地儲料器234之儲科器間搬蓮装置用埠98 的空位資訊畲從儲料器控制器64透通通信電纜58而傳至主 電腦50上，新的處理前匣子232會載置於台車162上且對 搬蓮目的地儲料器234開始蓮送。當台車162到達時齡料 器間搬運裝置控制器66，會透過通信電纜58向儲料器控制 器64委託將台車162上之匣子232載置於儲料器間搬運裝 置用埠98上。被委託的儲料器234會將該匣子232使用移 載機82進行上述之作業，並對儲料器間搬浬裝置控制器66 進行作業完成報告。 已接受該作業完成報告的儲料器間搬運裝置控制器66, 會對主電腰50報告作業完成的情況。已接受該報告的主電 _H 50 ^對儲料器234指示將儲料器間搬運裝置用埠98上 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） ~ "14- (請先閱讀背面之注意事項再填寫本頁} 丨束， ，π 經濟部中央標準局員工消費合作社印製 A7 B7In I m 1 m 1 ^ 1 ^^ 1 IK (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs _ A 7 rP ^ c ^ B7 V. Description of Invention (91) 122 Concealed door outside the port for handling equipment 124 Elevator 130 Box receiving device 132 Communication window 140 Trolley 142 Communication unit 144 Robot arm 146 Robot 148 Robot claw 150 Transfer platform 152 Operation panel 154 Balance plate 156 Induction belt 160 Traveling track 162 Trolley 164 Suspension metal appliances 170 Main unit 172 Box step 174 Automatic transporter communication unit 180 Main unit 182 Box step 190 Stocker 192 Exit transfer port for automatic transport vehicle 194 Entrance transfer port for automatic transport vehicle The paper dimensions are applicable to Chinese national standards ( CNS) A4 specification (210X297 mm) -94 ~-Correction page ---------- gt -------- IT ------ ^. / 11 (Please read the back first Note: Please fill out this page again.) Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs, A7, B7. 5. Description of the Invention (: i) One of the stored information can be rewritten by the communication department 76. In addition, the stored information can be reported without contact. The communication unit 76 is mounted on the front surface of the ID card 240. Figures 17 (a) and 17 (b) show the wafers 70 in the cassette 232 to which the ID card 2 40 is attached, respectively, in a vertical horizontal position and a horizontal vertical position. * 17 (c) shows The details of ID card 240. Below M, the details of the processing apparatuses 32 and 34, the stocker 234, the automatic stocker cart 38, and the stocker-to-stocker conveying device 42 which are components of the semiconductor crystal picture box lotus transfer device will be described below. Referring to FIG. 10, the processing device 32 includes: a host 170, a manufacturing processor that executes a semiconductor integrated circuit on a wafer 70 or a plurality of wafers at a time; two cassette stages 172, and a M1 box unit The box 2 to be handled is stored in 32 people; the automatic truck communication unit 174 outputs the state of the box step 172 to the automatic truck 38 and confirms whether the automatic box 38 has made a mistake before placing the front box 232 for processing on the box step 172 Whether the other cassette 232 or the cassette 232 is correctly mounted on the cassette step 172 before the processed cassette 232 is taken out. Referring to FIG. 11, the processing device 34 includes: a host 180, a processor that applies a semiconductor integrated circuit to a wafer 70 one or more times at a time; two cassette steps 182, which store cassettes to be processed in one cassette unit 232; the automatic truck communication unit 174 outputs the bark state of the sub-step 182 to the automatic truck 38 and confirms whether the automatic box 38 has any other boxes mistaken before the front box 232 is processed toward the box step 182 2 32 or if the processed box 2 is removed before 32, whether the box 232 is correctly mounted on the box step. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). Β _ I nn HI l ^ n-I-I m -I, n ^ i I — ^ n,-^-6 (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs_B7 V. Description of Invention (92) 196 White □ Port 198 g for moving vans Port P for moving vans 200 Moving device 202 Moving device 210 Manually removing P port 220 Casing receiving device 230 Semiconductor wafer cassette handling device 23 2 Box 234 Stocker 240 ID card 250 Mobile device 252 For white moving van □ Port 254 For white moving van P 260 Manual for P 262 Manual for □ Manual port 270 ID card reader device (please Read the notes on the back before filling out this page)-line! This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm). Revised page Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A7 __B7 V. Description of the Invention (‘1) 182. Referring to _18 to 圔 20, the stocker 234 will be described. 18 and 19 show the key stocker 234 when seen from the operation surface of the automatic lotus lotus car and the operation surface of the operator on the opposite side. FIG. 20 is a detailed drawing of the manual inlet port 260 from the arrow a. In addition, when these internal surfaces can be seen, the part of the stocker panel 94 which is an exterior panel is cut away and the key is described. The stocker 234 'includes a stocker rack 96 for horizontally carrying a plurality of magazines 232, and a plurality of magazines 232 are stacked in a vertical direction K to secure a storage space for the plurality of magazines 232. The stocker 234 further includes: a port 98 for the transfer device between the stockers, which is a part of the stocker rack 96 for storing or sending out the boxes 2 32 transported by the stocker transfer device 42; manual The inlet port 260 is a part of the remnant rack 96 and is used by the operator (not shown) to store the box 232. The manual outlet port 262 is a part of the stocker rack 96 and is intended for the operator. Take the box 232 out of the warehouse and the user • · Export port 252 for the automatic transporter, who is receiving the box 232 for the automatic transport vehicle 38; Exit port 100 for the automatic transport vehicle · It is part of the stocker rack 96 for sending out Box 232 is for port 252 for automatic trucks ... Port 254 for automatic trucks, who received box 232 from automatic truck 38 using M; population transfer port 104 for automatic trucks, which is a stocker A part of the rack 96 is used to receive the boxes 2 32 from the population port 254 for the automatic lotus car; the stocker crane 80 arranges the stacked stocker racks 96 on both sides of the stocker rack. Box storage place formed by 96 and as one of the stocker racks 96 Operators of the various boxes 232 in various ports. • Transfer 榇 82 to receive the storage between the storage containers described below. The paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210X297 mm) -7- III-— m--I— I— m 1 ..---I-^^ 1 ^^ 1-\ (Please read the notes on the back before filling this page) A7 B7 Central Bureau of Standards, Ministry of Economic Affairs Printed by Shelley Consumer Cooperative, V. Description of the invention (,) Box 232 placed on the trolley of 42 and placed on the port 9 8 of the handling device for the stocker, or on the contrary, the box 23 2 is empty On the trolley; M and forward moving device 250 for moving the box 232 from the automatic transfer port 1 for the lotus car to the transfer port 100 to the automatic transfer car for the port 252, or from the automatic transfer van 烨 254 to The upper part of the inlet transfer port 104 for the automatic lotus transfer vehicle. The stocker crane 80, the transfer machine 82, and the forward moving device 250 series perform the lotus transfer operation of 1 box, 2 boxes, and 1 box unit, respectively. Can be placed in the storage compartment port 98, manual inlet port 260, manual outlet port 262, automatic transfer port 100, automatic transfer port 104, and automatic transfer port The number of boxes on the exit port 252 and the entrance port 25 4 for the automatic lotus car are 2 boxes, 1 box, 1 box, 1 box, 1 box, 1 box, and 1 box, respectively. In addition, two forward moving devices 250 are prepared. In response to this, there are two automatic exit ports 25 for lotus cars, two inlet ports for automatic vans 254, one exit port 100 for automatic vans, and one oral port 104 * for automatic vans. In addition, two manual entry ports 260 and two manual exit ports are provided. As shown in the garden 20, an ID card read-write device 270 is installed on the manual population port 260. The installation direction of the communication unit 76 is on the front side of the ID card 240. Therefore, the ID card reading / writing device 270 must be installed on the front side of the ID card 240. If the front side of the ID card 2 40 faces the operator's work surface and the ID card reader / writer 2 70 is disposed, the ID card reader / writer 270 will be obstructed and it will be difficult to remove the cassette 232. Therefore, the direction of the box 232 on the manual port 260 is determined so that the front side of the ID card 240 installed on the box 232 faces the operator's work surface toward 1 ^ 1 In nn im I ia ^ i 11 ^ 1 in ^ J.-", vs (please read the notes on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210X297 mm) 8 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Install A7 B7__ 5. Description of the invention (6) Turn right 90 degrees. Since the direction of the magazine 232 of the stocker lifting 榇 80 cannot be changed, the direction of the K 232 on the stocker rack 96 will be the same as the direction of the box 232 on the manual inlet port 260 described above. The ID card 240, which is placed in the port 252 for the automatic transport vehicle and the population port 254 for the automatic transport vehicle, will become the ID card 240 that is easy to transfer and mount in the automatic transport vehicle 38. The working surface of the vehicle 38 is set to the front. Therefore, the forward moving device 250 must also change the direction during the moving operation of the box 232. The stocker 234 further includes a work panel 121 'used by the operator when the operator puts the cassette 232 into the warehouse through the manual inlet port 260 or the manual exit port 262 to the warehouse K. Reference 圔8. The automatic transport vehicle 38 includes: a trolley 140, which is guided by a sensor belt 156 attached to the floor and walks; a transporter-side communication unit 142, which is controlled by the automatic transport vehicle controller 60 The exchange of information between the local communication units 62 using M; the robot arm 144, the robot hand 146, and the claw 148, respectively, use M to carry out the transfer operation of the box 232; 4 transfer platforms 150 are used for walking During the operation, the holder 40K, which is taken in by the processing devices 32 and 34 or the stocker 234, is placed in a vertical position; the operation panel 152 'is an information exchanger between the operator and the operator; 154. Use M to detect obstacles and stop the ongoing operation. Referring to FIG. 9, the inter-reservoir conveying device 42 includes: a walking rail 160, which has a ring shape; a trolley 162, which moves in a fixed direction on the walking rail 160, and conveys a maximum of two boxes 232 by M; M and a suspension The golden cymbal 164 is used to mount the walking rail 160 on the ceiling. This paper size applies Chinese National Standard (CNS) Α4 size (210'〆297 mm) " II I— H--«^^ 1 u ml minnm ^ 19 (Please read the precautions on the back before filling this page) 9-Μ Β7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (·. * I) 1 1 1 Secondly, the control method of the conventional semiconductor wafer cassette handling device 230 1 1 1 Add Μ Description 〇 First occurs After the processing of the processing devices 32 and 34, the box 232 ^^ 1 I will be transported into the stocker 234 according to the white moving truck 38. Next, please 1 1 use the storage device to move the lotus device 42 toward the stocker. 234 The controller Pv when the lotus is out] Read back 1 1 Method (1) Add M and then describe the new processing of the front box 232 White front section of the storage note \ 1 I means 1 [The feeder 234 is transported and stored in the storage In the container 234 and in accordance with the requirements of the processing device 32 item 1 I then 1 1 34, the box 232 is to be removed from the warehouse, and the automatic truck 38 is used to Control method for handling the filling device 32 '34 during transportation (2) Add M. At the end of the description, come to page 1 I. Manually enter the warehouse of port 260 and manual 1 1 I exit from the manual exit port 262. (3) Add M description. 1 1 The processing occurred in the processing devices 32 and 34. The box 232 will be moved in accordance with the order 1 and the lotus cart 38 will be placed in the storage 234 by the lotus. * The storage device 1 will be used next. The control method when the feeder 234 is shipped out (1) is added as described above. 1 1 I stocker 234, white moving lotus car inlet port 254, and storage between the stockers. 1 Device 璋 98 series was empty at the end of the initialization at the beginning of work. Therefore, 1 host computer 50 passed the communication cable 58. Report the storage status of the box 232 in each port. The host computer 50, which receives the vacant information of these ports, will not perceive the adequacy of the box 232 of the stocker 1 | 234 and will only use this information. For the use of white moving 1 1 I between the cart 38 and the stocker It is possible or impossible to judge whether the storage device 234 of the E 232 of the conveying device 42 performs a conveying operation. 1 1 In the situation as above, the processing devices 32, 34 * will meet the communication electric suspect 1 I 58 will send the withdrawal request of the processed box 232 1 I that has finished the manufacturing process of the semiconductor integrated circuit to the host computer 5 0 . Handling device 32% 34 Sometimes 1 1 This paper size is applicable to the side standard (CNS) M specification (Lang Tengchu) Employees' Cooperatives of the Central Bureau of Standards of the Ministry of Economy printed A7 B7 V. Description of the invention (b) Ml box unit They are required to withdraw and sometimes they are required by multiple boxes. The host computer 50 that has accepted the withdrawal request will report the vacant information portal 254 of the entrance port 254 for the automatic truck by the stocker 234 in advance, and will immediately carry out the operation instructions for the automatic truck 38 through the communication telephone 58. However, the usable entrance port 254 of the automatic transport vehicle is determined in the processing devices 32 and 34 each time * M to provide its data to the main power unit 50 through the input mechanism 54 in advance. In addition, even if the withdrawal request from the processing devices 32 and 34 is performed by the M 2 box unit, the M 1 box unit can be used for the M 1 box unit to carry out the storage from the entrance port 254 for the automatic truck. Therefore, it is necessary to transport the 1 box unit. The work instruction is sent to the automatic truck 38. The automatic truck controller 60 that receives the 1M child's moving operation instruction from the host computer 50 will assign the operation from the plurality of automatic moving vehicles 38 to the portion most suitable for the moving operation of the lotus, and use the control bureau The side communication unit 62 and the van side communication unit 142 perform wireless communication with the host computer to perform the lotus transfer operation. As for the content of this operation, first, the carriage 140 will travel from stand-by to the processing devices 32 and 34 as the transfer place according to the induction belt 156 attached to the floor. When the automatic handling vehicle 38 arrives there, the automatic handling vehicle communication unit 174 will first confirm whether there is a box 232 on the box steps 172, 182. After that, the robot arm 144, the robot hand 146, and the robot claw 148 are driven to take appropriate boxes 232 on the box steps 172, 182, and place them on the own transfer platform 150. When the placement operation is completed, the carriage 140 moves again from the processing devices 32 and 34 at the transfer place to the entrance port 254 for the automatic transfer truck indicated by the stocker 234 at the transfer destination. This paper size applies to China National Standard (CNS) A4 specification (210 × 297 mm) .1 —.1 In 1 ^ 1 n I. n I ml ml ^ i— ——n ^ {y--yt, -t (Please read the precautions on the back before filling out this page) A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Invention Description (!) 1 1 When the moving van 38 arrives there, it will be the opposite of the previous one The procedure is to move the 1 1 on the stage 150 when the box 232 is placed on the instructed Bai Donglian car 1 1 into the P port 254. The Bai Dong van 38 is placing the appropriate box 232 on the / S Please 1 1 The white moving van indicated on the first 1 will be used on P port 254, and the back will be read through the white moving, | I Car communication unit 102 Check if the white moving van is used on P port 254. 1 .1 I There is a wrong box 232 If there is an error, an error will be reported immediately. This is _ 1 1 I According to the box 232 Based on the hopper 234 Appropriate white-moving vans were refilled with 1 vacant information in port 254 and shipped to all other boxes. 232 bits were written on this page. Farmer 1 is an abnormal state judge when it is on the same port. 0 When instructed to all Operation 1 | When the job is completed, the controller of the white moving truck 60 will report the operation completion of the main power 1 I brain 50 through the communication power 58. Order the host computer that accepts the operation report from the white moving truck 38. 50 Meeting 1 Carry out the storage box 234 to move the appropriate box 232 to the moving truck. □ 1 1 Warehousing instructions for port 254. 0 In the storage controller 64, follow the communication 1 | cable 58 to the storage. The work instructions ensure that the storage space on the stocker rack 96 will be started after receiving the space. 0 When the storage space cannot be ensured 1 9 The stocker controller 64 will not start work and will In the original state, waiting for a vacant place on the storage site 1 0. The stocker 234 that has begun the storage operation. First 1 1 will drive the forward moving device 250 and rotate the box 232 90 degrees. 1 I will be used from the automatic truck to P port 254 Move to the white moving truck for the transfer of P on port 1 I on port 104. When the moving operation is completed, the stocker crane 80 will start to move 1 1 and § the box 232 on the port of transfer P on the transfer port 104 will be transported. To 1 1 In the storage place on the stocker rack 96 that has been confirmed by the stocker controller 64 1 1 9 Completed the storage operation of the column of 0. The stocker controller 64 1 1 when the job is completed This paper size applies China National Standard (CNS) A4 specification (210X297 mm)-1 2 — A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (in) 1 1 I will work on the host computer 50 through the communication cable 58 Complete the report. During the 1 I moving operation from white 1 1 | moving truck to P port 254 to automatic transfer car inlet transfer port 104, when moving truck P 璋 254 is empty, the stocker 234 first 1 1 The same as when the initialisation is started, the reading back -1 will be sent to the host computer 50, and the free space information of port 1 will be provided. It will be used for the transportation of the next white moving van 38. J i Operation ○ Suspended matter 1 I Then 1 1 The host computer 50 that has received the completion report of the storage operation of the white stocker 234 is the table 9 that will determine the storage area of the box 232. The stocker 234 will be moved to page 1. Checking whether port 98 for the transporter between the stockers 234 of the stocker 234 is vacant. 0 The vacancy information of the port is 1 1 when the stocker 234 is started, or when the port is empty. Up to the host computer 5 0 report 1 order 0 when the port 98 of the storage room conveying device for the giant storage 234 is empty 1 I is in contact with the host computer 50 to move the device between the storage containers 42 through the communication cable 58 1 I to the box The storage device 234 of 232 sends out the lotus root operation instruction. 1 1 has been received. 1 The controller of the moving device of the storage room 66 will first send the storage device 234 of the storage place 234 through the communication power 58. Storage place to storage room 1 丨 Movement of port 98 of the lotus moving device 〇 Stocker 234 to be commissioned 1 1 Use the stocker crane 80 to take the box 232 0 Next to the stocker 1 1 The conveying device controller 66 of the I room performs a work completion report. 0 The operation has been completed. 1 1 The storage room conveying device controller 66 of the report is completed. 9 The empty trolley 162 is moved 1 to the position corresponding to the moving box 232. When the platform 0 is moved, 黼 1 1 The transfer device controller 66 will once again assign 1 to the empty stocker 234 at the transfer place. The empty trolley 162 will transfer the box 1 1 1 on the stock transfer device port 98 to the storage box. The feeder 234 is used for transferring 移 82 to transfer appropriate boxes. 1 1 This paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm). 13 Printed by the Consumers ’Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. (Π.) ~ Child 232. Next, the inter-reservoir transfer device controller 66 is reported. The inter-stocker conveyance device controller 66 that has received the job completion report moves the full cart 162 to the platform with the stocker 234 of the conveyance destination. Although the transportation operation between the stockers is still in progress, the processed boxes 232 that occur in the processing devices 32 and 34 will be transported to the stocker 234 in the stocker 234 according to the automatic car 38, and the use of the stock materials will be ended The description of the inter-device lotus transfer device 42 describes a method for controlling the lotus transfer operation of one percent of the stocker 234 of the next device. The new processing front box 2 32 will be transported by the former stocker 234 and stored in the stocker 234. According to the requirements of the processing devices 32 and 34, the box 232 will be delivered to the warehouse and reused by the automatic truck 38 for processing. The method (2) sent by the devices 32 and 34 is described with M. The vacant information of port 98 for the lotus plant transfer device between the reservoirs of the storage destination stocker 234 is transmitted from the stocker controller 64 through the communication cable 58 to the host computer 50. The new pre-processing box 232 It will be placed on the trolley 162 and the lotus delivery to the stocker 234 will be started. When the trolley 162 arrives, the controller 66 for the transporter between the hoppers requests the stocker controller 64 via the communication cable 58 to place the box 232 on the trolley 162 on the port 98 for the transporter between the stockers. The entrusted stocker 234 performs the above-mentioned operation using the cassette 232 using the transfer machine 82, and reports the operation completion to the controller 66 of the inter-stock transfer device. The inter-stocker handling device controller 66 that has accepted the job completion report will report the completion of the job to the main power waist 50. The main electricity that has accepted the report _H 50 ^ indicates to the stocker 234 that the port 98 between the stocker handling device is used on the paper. The paper size applies the Chinese National Standard (CNS) Α4 specification (210X297 mm) ~ " 14- (Please read the precautions on the back before filling out this page} 丨 beam, π Printed by A7 B7, Consumers Cooperative of Central Standards Bureau, Ministry of Economic Affairs
五 ' 發明説明（UM 的匣子232予Μ入庫。按照透過通信電孀58所送來的該入 庫作菜指示，儲科器控制器64在確保儲料器架96上的收納 埸所之後就著手作業。在無法確保收納場所時•會等待黼 料器控制器64著手作業而原狀在收納埸所中發生空位者。 已著手於入庫作業的儲料器234 ，會利用儲料器起重機80 將餘料器間搬蓮裝置用埠98上的逋當匣子232運送至被確 保之餹料器架96上的收納場所中。被指示之作業完成的儲 料器234 ，會對主霄腦50進行作業完成報告。例如被收納 在餘料器234內的處理前匣子232 *會在該處等待下一個 麾理裝置32' 34之匣子台階172、182為空位者。 處理前匣子232在被收納在儲料器234内的狀態下，會 從處理裝置32、34透過通信電纜58而發送匣子投人要求至 主電臞50上。主電皤50係搜尋在齡科器234中有無可處理 的匣子232 ，在有的情況時會移至出庫作業上。在沒有的 情況時主電臞50會等待遘當的處理前匣子232被入庫於儲 料器234内。鼷於該投入要求處理裝置32、34會依其形式 有時一次要求複數個匣子2 32。在自動搬運車用出口埠252 上由於只設置一個匣子232 ，所以在複數個要求被進行的 情況時只會Μ其匣子個數份反覆進行來自後述之儲料器 234 的出庫作業及從儲料器234至處理裝置32、34的搬 運作業。 已移至出庫作業之主電腦50，係按照有投入要求之處理 裝置32、34*選擇有複數個自動搬運車用出口埠252之中 的一届。又，將朝該處之出庫作業指示對儲料器234透過 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X 297公釐） (請先閱讀背面之注意事項再填寫本頁)5. Description of the invention (box 232 of UM is stored in the warehouse. According to the storage and cooking instructions sent by the communication cable 58, the stocker controller 64 starts after ensuring the storage room on the stocker rack 96. Operation. When storage space cannot be secured • Waiting for the feeder controller 64 to start working and leaving a vacancy in the storage place as it is. The stocker 234 that has started the storage operation will use the stocker crane 80 to save the rest The container 232 on the port 98 for the lotus transfer device is transported to the storage place on the container rack 96 which is secured. The container 234 instructed to complete the operation will perform the operation of the main seahorse 50 The report is completed. For example, the pre-processing box 232 stored in the remnant 234 * will wait there for the next processing device 32 '34. The box steps 172, 182 are empty. The pre-processing box 232 is stored in the storage. In the state of the feeder 234, the processing device 32, 34 sends a box input request to the main battery 50 through the communication cable 58. The main battery 50 searches for the box 232 that can be processed in the aging device 234 , In some cases will be moved to the warehouse In operation, the main battery 50 will wait for the proper pre-processing box 232 to be stored in the stocker 234 when it is not available. Due to this input, the processing devices 32 and 34 may sometimes require multiple at a time according to their form. Box 2 32. Since only one box 232 is provided on the exit port 252 for the automatic truck, only a plurality of boxes will be repeatedly used for the outbound operation from the stocker 234 described later when a plurality of requests are performed. And the transfer operation from the stocker 234 to the processing devices 32 and 34. The host computer 50 that has been moved to the warehouse operation is selected in accordance with the processing devices 32 and 34 required for the input and has a plurality of automatic truck exit ports 252. In addition, the instructions for the warehouse operation towards that place will apply the Chinese National Standard (CNS) A4 specification (2 丨 0X 297 mm) to the stocker 234 through this paper size (please read the precautions on the back first) (Fill in this page)
T ~ 經濟部中央標準局員工消費合作社印裝 A7 B7 _五、發明説明（ί Ί ) 通信電纜58送出。在此可使用的自動搬蓮車用出口埠252 ，與自動搬蓮車用入口埠25 4同樣，可每次在處理裝置32 、34上決定。該資料，可透過_入機構54提供至主電臞5〇 内。已接受出庫作業指示之儲料器234 ，係使用魅料器起 重機80*將適當的匣子232朗自動搬運車用出口交接埠100 蓮送。之後，儲料器234會驅使前進移動裝置250將自動搬 浬車用出口交接埠100上的匣子232注前送至自動搬運車用 出口埠252上。更進一步，使匣子232旋轉90度Μ便容易移 載自動搬蓮車38。Μ此完成對自動搬運車用出口堆2 52之 出庫作業，且儲料器234會對主電腦50進行作業完成報告。 已接受來自儲料器234之出庫作業之完成報告的主電皤 50，接著會將自動搬蓮車用出口埠252上的匣子232運送 至處理裝置32、34的匣子台階172、182上且透過通信轚鱅 58對自動搬蓮車38下達命令。已接受該命令的自動搬運車 控制器60，會從複數個自動搬浬車38之中分派作業至最適 於其搬蓮作業的部分，且利用控制局側通信單元62和搬蓮 車側通信單元142與主櫬進行無線通信俾使在自動搬運車 38上進行匣子232之搬運作業。 以下說明其作業之內容。首先台車140會自待櫬位置按 照被貼附在地板上的感應帶156，朝向作為搬運處的儲料 器234之自動搬運車用出口璋252行進。當自動搬運車38 到達時首先會透過對自動搬運車通信單元102 ，進行在該 自動搬蓮車用出口埠252上是否存在有匣子232的確認。 之後，自動搬運車38會驅使機器臂144 、機器手146及機 --^---Γ----^------1Τ (請先聞讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 16 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（ί ‘1 ) 器手爪148 ，取入位於自動搬運車用出口埠252上的缠當 匣子232 ，並置放在本身的移載台150上。自動搬運車38 ，在透過對自動搬運車通信單元102而在自動搬運車用出 口埠252進行是否有逋當匣子232的確認之際，在沒有匣 子2 32時會立即發報錯誤。當該載置作業完成時，台車140 會再次從儲料器23 4朝搬運目的地之處理裝置32、3 4所指 示的匣子台階172、182之前移動。當自動搬運車38到達時 會K與之前相反的顒序將移載台150 上的適當匣子232置 放在被指示的匣子台階172、182上。自動搬運車38在將缠 當的匣子232 置放在被指示的自匣子台階172、1 82上之 前，會透過對自動搬蓮車通信單元174 在匣子台階172、 182上確認是否存在有弄錯的匣子232 。接著在存在有弄 錯的匣子232 時就立即發報錯誤。此乃根據因匣子232基 於來自處理裝置32、34之匣子台階172、182的空資訊而被 運來，所K其他的匣子232位於同一台階上為異常狀態的 判斷者。當被指示之所有的作業皆完成時自動搬運車控制 器60會透過通信電纜58對主電腦50進行作業完成報告。 利用自動搬運車38對適當匣子232之處理裝置32、34完 成投入作業之後，主電腦50，會透過通信電纜58對處理裝 置32、34指示預定處理之開始。 最後就來自手動用入口埠260之入庫和來自手動用出口 埠262之出庫的方法（3)加Μ敘述。 作業者在將匣子232入庫於儲料器234内時，首先會將Κ 子232置於手動用人.口埠260内且操作作為儲料器234之一 --^-----I----' ^------訂------\ (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 17 經濟部中央標準局員工消費合作社印製 A7 B7 _五、發明説明（i:)) 部分的操作面板121 。利用該操作可知匣子232被置放在 手動用入口埠260内的餡料器234 ，係利用ID卡讀寫裝置 270讀取遘當匣子232之ID卡240的資訊。接著，將該資 科透通通信電纜58向主電腦50報告。主電腦50係依此而得 知作業者運來匣子232之情況。主電腦50不會感知儲料器 234內的匣子232之充足狀況而會對儲料器234送出該匣子 232之入庫的作業指示。但是，可使用的手動用入口璋260 係每次在處理裝置32、34上決定。該資料可預先透過輪入 櫬構54而提供給主電臞50。按照透過通信霣孀58所送來的 該入庫作業指示，儲科器控制器64係在確保儲料器架96上 之收納場所之後開始著手作業。在無法確保收纳場所時， 馘料器控制器64，就不會著手作業而原狀等待在收納場所 發生空位者。已著手於入庫作業指示的儲料器234 ，係使 用儲料器起重機80將手動用入口埠260 上之逋當匣子232 朝被確保之儲料器架96上的收納場所運送。已完成被指示 之作業的儲料器234 ，會對主電腦50進行作業完成報告。 Μ此就可依作業者完成入庳作業。 繼而就將被收納在儲料器2 34的匣子23 2經由手動用出 口埠262向作業者之手邊交出的方法加Μ說明。例如就從 自動搬蓮車38所未具備的槠料器234至處理裝置32、34之 匣子投入加Μ考慮。處理裝置32、34會透_通信電嫌58向 主電臞50進行匣子投入要求。主笛臞50會搜專在儲料器 234上是否有可處理的匣子232 ，若有時就移至出庫作業 上。若沒有時適當的處理前匣子會被人庫於齡料器234内 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） ，。 m u - I -I -- m 1 -. ( -- . - - - - . m ^1« .-"、τ (請先閱讀背面之注意事項再填寫本頁) A7 ____B7 五、發明説明（丨t:;) 。麾理裝置32、3 4會依其形式一次要求複數個匣子232。 在複數個要求被進行時來自下述所示的儲料器234之出庫 作業可只以其匣子之個數反覆進行。 已移至出庫作業之主電腦50，係按照已進行投入要求的 處理裝置32、34選擇有複數個之手動用出口埠262中之一 個，且將至該處之出庫作業指示透過通信電孀58對儲料器 234送出。在此可使用的手動用出口埠262 ，係與自動搬 理車用出口埠252同樣’每次在處理裝置32、34中決定。 該資料係預先透過輪入機構5 4提供給主電臞50。已接受此 之儲料器234，係使用儲料器起重機80將缠當的匣子232運 送至手動用出口埠262。又，在儲料器234之操作面板121 上進行許可手動用出口埠262上的缠當匣子232之取出的顯 示。看到此的作業者，會從手動用出口埠262取出適當匣 子232 ，且操作操作面板121對儲料器234通知取出作業 經濟部中央標準局員工消費合作社印衆 --Ί---Γ----' ^------ΐτ (請先閱讀背面之注意事項再填寫本頁) 完成之情況。接受此以判新儲料器234已完成出庫作業， 並透過通信電纜58對主電臞50進行該完成報告。已取出匣 子232之作業者，由於不知道是為已提出投入要求的處理 裝置32、34或是哪一僵所以會朝向主電臛50之作業者终皤 機56調査其資訊。之後，將匣子232朝該處理裝置32、34 之遘當匣子台階172、182運送。 但是*在習知之半導體晶圓匣搬蓮裝置230中，有如Μ 下的問題點。 主電腦50，在在對自動搬蓮車用出口堉252進行出庫作 業完成之後，會從同埠中將處理裝置32、34之搬蓮作業指 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X 297公釐） -19 - ΑΊ Β7 經濟部中央標準局員工消費合作社印製 五、發明説明 ((V ) 1 1 示 送 至 白 動 搬 蓮 車 38上 〇 因 此 白 動 搬 運 車 38 會 從 待 櫬 場 1 1 所 來 到 白 動 搬 運 車 用 出 口 埠 252之前在同埠中等待匣子232。 1 1 C 發 明 之 摘 述 ] 請 先 1 1 本 發 明 為 了 解 決 該 種 問 題 點 而 成 者 本 發 明 之 目 的 係 在 閲 讀 背 | 1 於 提 高 白 動 搬 蓮 車 之 搬 運 能 力 者 0 面 A I 依 本 發 明 之 某 -* 局 面 的 白 動 搬 蓮 車 控 制 方 法 f 則 其 為 半 意 事 1 1 項 1 導 體 晶 圓 匣 搬 運 裝 置 中 所 使 用 之 白 動 搬 蓮 車 控 制 方 法 包 再 1 含 有 ： 儲 料 器 9 用 Μ 收 納 複 數 個 半 導 體 晶 圓 匣 者 處 理 裝 % 本 頁 東 1 置 用 Η 向 半 導 體 晶 圓 匣 施 行 處 理 者 白 動 搬 運 車 用 Μ 1 1 進 行 儲 料 器 和 處 理 裝 置 間 之 半 導 體 晶 圓 匣 的 搬 蓮 作 業 者 • 1 I 儲 料 器 間 搬 蓮 裝 置 在 搬 蓮 處 之 儲 料 器 和 搬 運 百 的 地 之 儲 1 訂 料 器 之 間 用 Μ 進 行 半 導 體 晶 圓 匣 之 搬 運 作 業 者 Μ 及 主 電 1 腦 用 Μ 進 行 儲 料 器 Λ 儲 料 器 間 搬 蓮 裝 置 、 自 動 搬 蓮 車 及 1 1 處 理 装 置 之 控 制 者 其 中 儲 料 器 包 含 有 依 白 動 搬 運 車 用 Μ 1 1 進 行 之 半 導 體 晶 圓 匣 之 入 庫 的 白 動 搬 運 車 用 入 P 埠 該 方 1 法 包 含 有 將 半 導 體 晶 圓 匣 在 主 電 腦 之 控 制 下 利 用 § 動 搬 蓮 車 從 處 理 裝 置 搬 運 至 白 動 搬 運 車 用 入 P 埠 上 的 步 驟 用 1 1 '1 以 判 斷 半 導 體 晶 圓 匣 是 否 存 在 於 g 動 搬 運 車 用 入 Ρ 埠 上 的 1 1 步 驟 在 白 動 搬 運 車 用 入 Ρ 埠 上 存 在 有 半 導 體 晶 圓 匣 時 1 1 等 一 定 時 間 入 庫 的 步 驟 Μ 及 經 過 一 定 時 間 後 在 白 動 搬 運 1 I 車 用 入 Ρ 埠 上 存 在 有 半 導 體 晶 圆 匣 時 發 報 錯 誤 訊 息 的 步 驟 1 I 0 本 發 明 之 白 動 搬 運 車 控 制 方 法 係 在 將 半 導 體 晶 圓 匣 入 1 1 1 庫 於 儲 料 器 内 之 際 若 存 在 有 先 行 之 半 導 體 晶 圓 匣 則 會 1 1 等 待 預 定 時 間 即 使 如 此 若 先 行 之 半 導 體 晶 圓 匣 變 無 的 1 1 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐〉 —20 - A7 B7 經濟部中央標準局貝工消費合作社印製 五、發明説明 ( 1:;： ) 1 1 話 就 會 發 報 錯 誤 訊 息 〇 藉 此 雖 Μ 存 在 有 先 行 之 半 導 體 晶 1 1 圓 匣 為 刖 提 但 是 若 為 必 要 則 不 會 等 待 白 動 搬 運 車 就 可 1 1 提 高 g 動 搬 運 車 之 作 業 效 率 〇 請 先 1 1 依 本 發 明 之 另 — 局 面 的 白 動 搬 運 車 控 制 方 法 則 其 為 半 閱 讀 背 :| I 導 體 晶 圈 匣 搬 運 裝 置 中 所 使 用 之 白 動 搬 蓮 車 控 制 方 法 包 面 J I 含 有 儲 料 器 用 Μ 收 納 複 數 個 半 導 體 晶 圓 匣 者 處 理 裝 '兔 事 1 1 項 1 置 用 >λ 向 半 導 體 晶 圓 匣 施 行 處 理 者 ; 白 動 搬 運 車 用 再 1 進 行 儲 料 器 和 處 理 裝 置 間 之 半 導 體 晶 圓 匣 的 搬 運 作 業 者 > % 本 頁 束 1 儲 料 器 間 搬 運 裝 置 在 搬 運 處 之 儲 料 器 和 搬 運 百 的 地 之 儲 1 1 料 器 之 間 用 Μ 進 行 半 導 體 晶 圓 匣 之 搬 蓮 作 業 者 Μ 及 主 電 1 1 腦 用 Μ 進 行 儲 料 器 儲 料 器 間 搬 蓮 装 置 、 S 動 搬 運 車 及 1 1 訂 處 理 裝 置 之 控 制 者 其 中 儲 料 器 包 含 有 依 白 動 搬 運 車 用 Μ 1 進 行 之 半 導 體 晶 圓 匣 之 出 庫 的 白 動 搬 蓮 車 用 出 P 埠 而 主 1 1 電 腦 係 記 憶 著 自 動 搬 運 車 之 作 業 中 的 搬 運 作 業 數 和 其 上 1 1 限 值 上 述 白 動 搬 運 車 控 制 方 法 更 進 一 步 包 含 有 更 新 該 1 作 業 中 之 搬 運 作 業 之 数 的 步 驟 Λ 和 在 未 超 m 被 記 憶 之 上 限 J 值 的 範 圍 内 將 搬 運 作 業 指 示 發 送 至 白 動 搬 運 車 上 的 步 驟。 1 I 本 發 明 之 白 動 搬 運 車 控 制 方 法 係 在 未 超 過 被 記 憶 之 上 1 1 限 值 的 範 圍 内 會 發 送 搬 運 作 業 指 示 〇 因 此 就 不 會 有 搬 1 1 蓮 作 業 指 示 滯 留 的 現 象 且 可 提 高 白 動 搬 運 車 之 作 業 效 率 1 1 I 較 佳 者 為 上 述 白 動 搬 蓮 車 控 制 方 法 更 進 一 步 包 含 有 1 1 1 ， 預 測 來 白 白 動 搬 蓮 車 用 出 D 埠 之 半 導 體 晶 圓 匣 之 出 庫 的 1 1 步 驟 和 基 於 預 測 而 將 搬 運 作 業 指 示 發 送 至 自 動 搬 蓮 車 上 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -2 1 - A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 ( • Ϊ， )) 1 1 的 步 驟 0 1 1 本 發 明 之 § 動 搬 浬 車 控 制 方 法 係 在 進 行 從 儲 料 器 至 處 1 1 理 裝 置 之 半 等 體 晶 圓 匣 的 搬 蓮 作 業 中 f 預 先 預 測 來 白 白 動 /·-V 請 1 I 先 1 搬 運 車 用 出 P 埠 之 半 導 體 晶 圓 匣 的 出 庫 Μ 將 搬 運 作 業 指 閲 ik 1 背 1 示 發 送 至 白 動 搬 運 車 上 0 因 此 可 提 高 白 動 搬 運 車 之 作 業 面 之 \ 1 效 率 0 意 畢 1 項 | 依 本 發 明 之 更 另 局 面 的 自 動 搬 運 車 控 制 方 法 則 其 為 再 填 半 導 艚 晶 圓 匣 搬 運 裝 置 中 所 使 用 之 白 動 搬 運 車 控 制 方 法 * 頁 裝 1 包 含 有 儲 料 器 用 Κ 收 納 複 數 個 半 導 體 晶 圆 匣 者 處 理 1 I 裝 置 用 Μ 向 半 導 體 晶 圓 匣 施 行 處 理 者 白 動 搬 蓮 車 用 1 I K 進 行 儲 料 器 和 處 理 装 置 間 之 半 導 體 晶 画 匣 的 搬 運 作 業 者 1 I 訂 ; 儲 料 器 間 搬 運 裝 置 f 在 搬 運 處 之 儲 料 器 和 搬 運 百 的 地 之 1 儲 料 器 之 間 用 Μ 進 行 半 導 體 晶 圓 匣 之 搬 蓮 作 業 者 Μ 及 主 1 1 電 腦 用 Κ 進 行 儲 料 器 Λ 儲 料 器 間 搬 運 裝 置 白 動 搬 運 車 1 I 及 處 理 裝 置 之 控 制 者 其 中 儲 料 器 包 含 有 依 白 動 搬 運 車 用 1 以 進 行 之 半 導 體 晶 圓 匣 之 出 庫 的 白 動 搬 蓮 車 用 出 Ρ 埠 該 、- 方 法 包 含 有 接 受 來 處 理 裝 置 之 處 理 完 成 報 告 的 步 驟 > 1 1 接 受 處 理 完 成 報 告 Μ 進 行 白 動 搬 運 車 用 出 Ρ 埠 之 付 出 作 I 1 業 的 步 驟 接 受 由 白 動 搬 蓮 車 用 出 □ 埠 所 付 出 之 完 成 向 1 I 白 動 搬 運 車 發 送 可 在 處 理 裝 置 中 進 行 處 理 之 半 導 髏 晶 圓 1 I 匣 和 由 白 動 搬 運 車 用 出 Ρ 埠 所 付 出 之 半 導 體 晶 圓 匣 之 搬 運 1 1 作 業 指 示 的 步 驟 〇 1 1 本 發 明 之 白 動 搬 蓮 車 控 制 方 法 係 在 白 動 搬 運 車 用 出 □ 1 1 埠 上 接 受 半 導 體 晶 圓 匣 之 付 出 完 成 之 後 會 將 該 半 導 體 晶 1 1 本紙張尺度適用中國國家標準（CNS)A4規格（210X297公釐） -22 - 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（^h) 圓匣和從處理裝置回到儲料器之半導體晶圓匣成對的搬運 作業指示發送至自動搬運車上。因此，自動搬蓮車就沒有 半導體晶圓匣等待付出之現象，而可提高自動搬運車之作 業效率。 〔圖式之簡單說明〕 圖1為半導體晶圓匣搬運装置30之鳥瞰圖。 圖2為半導體晶圓匣搬浬裝置3 0之鳥瞰圖。 圖3 A〜3C為說明半導體晶圓匣40和ID卡72的圖。 圖4為從自動搬蓮車側面觀看儲料器36的圖。 圖5為從作業者側面觀看儲料器36的圖。 圖6為說明儲料器36之手動用出口埠的圖。 圖7 A為說明從自動搬運車側面所觀看的儲料器內之匣子 收納場所的圖。 圖7B為說明從作業者側面所觀看的儲料器内之匣子收納 埸所的圖。 圖8為自動搬運車38之外觀圖。 圖9為儲料器間搬運裝置42之外觀圖。 圖10為處理裝置32之外觀圖。 圖11為處理裝置34之外觀圖。 圖12為從自動搬運車側面觀看儲料器190的圖。 圖13為從作業者側面觀看儲料器190的圖。 圖14為說明儲料器190之手動用出口埠的圖。 圖15為習知之半導體晶圓匣搬運裝置230的鳥瞰圖。 圖16為習知之半導體晶圓匿搬運裝置230的鳥瞰圖。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 〇 〇 ---：-------衮-- (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印裝 A7 _ B7五、發明説明（2!) 画17A〜17C為說明半導體晶圓匣2 30和11}卡24〇的圖。 薩18為從自動搬蓮車側面觀看儲料器234的|1。 匾19為從作業者側面觀看儲料器234的圃。 園20為說明儲料器234之手動用出口埠的圖。 〔較佳實施例之說明] 參照_1至_2作為本發明之實施例之—的半導埋晶圓g 搬運裝置30，包含有：與習知相同的處埋裝置32及34、新 的儲料器36、與習知相同的自動搬運車38、以及與習知相 同的髂料器間搬運裝置42。在與習知相同的處理裝置32及 34上有提供某儲料器36以作為該等之處前和處理後之匣子 40的收納場所。2台自動搬運車38係從事於該等之間的搬 運作業。又，儲料器間搬運装置42在該_中雖係w中途切 斷來表示但是卻係以周圃旋轉運行著，且有複數科器 36設置在其周圍上。即使對於其他的儲料器36而言亦存在 著各自成組的處理裝置32、34和自動搬捶車38。 半導賭晶圓匣搬運裝置30，更進一步包含有：與習知相 同的主電腦50;其主櫬52;其輪入機構54;其作業者終端 機56;各自連结主電睡50和處理裝置32、34、儲料器36及 自動搬運車38，且連結儲料器36和自動搬運車38的通信電 纜58;與習知相同的儲料器控制器64;與習知相同的自動 搬運車控制器60 ;K及與習知相同的儲料器間搬運裝置控 制器66。在該圜中自動搬蓮車控制器60和自動搬運車38之 通信雖係經由控制局供通信單元62Μ無線進行*但是亦可 以有線來進行。 I -1..... I 1^1 m I I— I. I I - - - -ϋ τ» • ; - 3 、νβ (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 24 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（:」2 ) 參照圖3，就由半導體晶圓匣搬蓮裝置30所搬蓮的半導 體晶画和其匣子、及ID卡加Μ說明。晶圓70和匣子40係與 習知相同的晶圓及匣子。ID卡72雖包含有與習知相同的顯 示部74和通信部76，但是通信部76並非備附在ID卡72之正 面上而是備附在其底面。 以下*以圖進行有關本實豳形態之半導體晶圓匣搬運裝 置30之構成要素的詳细說明。 參照圖4至圖6，就儲料器36加Μ說明。匾4至圖5，係如 可看到儲料器36之内部構造般，將儲料器面板94之一部分 予Μ切除而描繪者。 儲料器36包含有：儲料器架96、儲料器間搬運裝置用埠 98、手動用入口埠116、手動用出口璋118、自動搬運車用 出口埠86、自動搬運車用出口交接埠100、自動搬蓮車用 入口埠88、自動搬運車用入口交接埠104、儲料器起重機 80、移載機82、前進移動裝置84及對自動搬蓮車通信單元 102 〇 儲料器起重機80、移載機82、及前進移動裝置8 4係各自 進行1Ε子、2匣子、1匣子單位之搬運作業。可載置於儲 料器間搬運裝置用埠98、手動用入口埠116 、手動用出口 埠118、自動搬蓮車用出口交接埠100、自動搬蓮車用入口 交接埠104 、自動搬蓮車用出口埠86及自動搬運車用入口 埠88上的匣子個數係各自為2匣子、2S子、1匣子、1匣子 、1匣子、1匣子、1匣子。 前進移動裝置84，與習知相同準備有2台。伴随著自動 I I- I - I - - - — I - -ί - 1. ^ϋ. - - - - 1------ (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 25 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（2.0 搬運車用出口埠86、自動搬運車用入口埠88、自動搬蓮車 用出口交接埠100 、及自動搬運車用入口交接埠104 ，各 備附有2個。又，手動用入口埠116雖為1個，但是手動用 出口埠H8備附有2個。 如圖6所示，在手動用出口埠118上安裝有ID卡謓寫裝置 120。在手動用入口埠116上當然與習知相同備附有ID卡謓 寫裝置120。在該儲料器36的情況，使用4個ID卡讀寫裝置 120。但是其安裝方向與習知不同。由於ID卡通信部76位 於ID卡72的底面所Μ可將ID卡讓寫裝置120安裝在匣子承 接器具130下。因此，ID卡72的正面可朝向作業者之作業 面。儲料器起重機80，與習知相同無法變更匣子40的方向 。因此，在儲料器架96的匣子40之方向係成為與在手動用 入口埠116的方向相同。被置於自動搬運車用出口埠86及 自動搬運車用入口埠88上的匣子40之方向，係與習知相同 為自動搬蓮車38所易於移載的方向。因而，被裝接的ID卡 7 2係為朝向自動搬蓮車之作業面的方向。因而成為與被置 於作為儲料器架96之一郜分的自動搬運車用出口交接璋 100及自動搬蓮車用人口交接埠104上的匣子40之方向相 同。因此，儲料器36在前進移動裝置84之匣子40的移動作 業中就不雷要如習知般地將匣子40的方向變更90度。 參照圖4及圖5*儲料器36更進一步包含有：自動搬運車 用埠外遮蔽門90，可上下動且用Μ保持位於自動搬運車用 出口交接埠100和自動搬運車用人口交接埠104之外側的 氣密性；以及自動搬蓮車用埠内遮蔽門92，可上下動且用 本紙張尺度適用中國國家標準（CNS ) Α4規格（2丨0X297公釐） -2 6 - m I - - - -·-1--..... V 士民 - I - -ill II V—► -- ,- ^ 、\=° (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印袋 A7 B7五、發明説明（,.j/j) K保持位於自動搬運車用出口交接埠100和自動搬蓮車用 入口交接埠104之內側的氣密性。 在該圔中，雖係僅就被安装在一方之自動搬蓮車用出口 交接埠100及自動搬運車用入口交接埠104之內外的自動 搬運車用埠內遮蔽門92及自動搬蓮車用埠外遮蔽門90加Μ 顯示，但是亦可在另一方的自動搬運車用出口交接埠100 及自動搬運車用入口交接埠104之内外備附有同樣的自動 搬運車用埠内遮蔽門92及自動搬蓮車用漳外遮蔽門90。儲 料器36更進一步包含有手動用埠外遮蔽門114 、及手動用 埠内遮蔽門112 。手動用埠外遮蔽門114及手動用埠內遮 蔽門112為同樣用Μ保持儲料器36之氣密性且可上下動的 門。手動用埠外遮蔽門114，係位於手動用入口埠116 或 手動用出口埠118之外側。手動用埠内遮蔽門112為位於手 動用入口埠116或手動用出口埠118之內側的手動用埠内 遮蔽門。 在該圖中雖係僅就手動用入口埤116加Κ顯示，但是即 使有關具有2個手動用出口埠118亦各自同樣備附有該等的 遮蔽門。 儲料器36更進一步包含有：位於儲料器間搬埋裝置用堉 98之外側的儲料器間搬蓮裝置用埠外遮蔽門122 ;Κ及儲 料器間搬運裝置用埠内遮蔽門110 。儲料器間搬運裝置用 埠外遮蔽門122及儲料器間搬運装置用埠内遮蔽門110 ， 亦為用Μ保持儲料器36之氣密性的門。儲料器間搬蓮裝置 用埠外遮蔽門122係位於儲料器間搬運装置用埠98之外側 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） n mi1 - I—I -I- ........ l\ - nn I --if i m (請先閲讀背面之注意事項再填寫本頁) -27 - A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (： 25 ) 1 1 | 〇 儲 料器 間 搬運 裝置 用埠内遮 蔽 門11 0係 位於儲料 器間 搬 1 1 1 運 裝 置用 埠 98之 内側 〇 '—·. 1 I 儲 料器 間 搬運 裝置 用埠98係 可 打開儲料 器間搬蓮 裝置 用 請 閲 1 1 埠 外 遮蔽 門 122 且利 用儲料器 間 搬運裝置 用升降機 124 予 讀 背 1 上 升下 降 者0 儲料 器間搬運 裝 置用埠外 遮蔽門1 2 2係 移 冬 1 I 意 1 1 動 於 水平 方 向， 而櫧 料器間搬 運 装置用埠 内遮蔽門 110 係 事 項 1 I 再 1 t 移 動 於上 下 方向 。移 載機82可 利 用儲料器 間搬運裝 置用 升 填 馬 本 装 降 機 124 對 位於 上升 位置的儲 料 器間搬運 裝置用埠 9δ進 行 頁 S_^ 1 I 作 業 ，反 之 儲料 器起 重機80可 對 位於下降 位置的同 璋進 行 1 1 | 作 業 〇 1 1 圆 7A、 7 Β係顯 示圖 4至圖6中 所 示之儲料 器36的收 納場 所 1 訂 者 圖7 A為 看到 自動 搬蓮車作 業 面的儲料 器36之收 納場 所 1 I 9 圖 7B為 從 作業 者作 業面觀看 的 儲料器36之收納場 所。 又 1 I 圖 中從 STR01 至STK04為儲 料 器單元Ν 〇 .且分割 成容 易 1 1 1 處 理 儲料 器 36之 收納 埸所的管 理 單位者。 從T01至T07為 儲 1 、'Ά 料 器 架96的 架子 Ν 〇 . 係顯示横列的位置 ，從P01至 Ρ04 為 位 置 Η 〇 , 係顯示每- -儲料器單元的縱列位置。 1 ] 參 照圃 8 自動搬蓮車38包含有：台車140，受貼 附在 地 1 I 板 上 的感 臑 帶156導引而行走者 搬運車側通信單元142 t 1 1 在 與 自動 搬 運車 控制 器60之控 制 局側通信 單元62之 間進 行 1 1 資 訊 之交 換 者； BS. 憐益 臂144、機器手146及 機器手爪 148 1 1 各 白 用Μ 進 行匣 子40之移載作 業 者；4個移載台150 ，在 行 1 | 走 作 業中 預 先Μ 縱放 姿勢保持 從 處理裝置 32及34或 儲料 器 1 I 36中 取入 的 匣子 40者 ;操作面 板 152 ，在 與作業者 之間 進 I 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 28 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (: 1G) 1 1 | 行 資 訊 之 交 換者；Μ 及 緩衝板 154 ，用 Μ檢 知障礙 物 Μ 使 1 1 1 執 行 中 之 作 業停止者 〇 'V 1 1 白 動 搬 運 車3 8雖係 作 為由感 應 帶156 所導 引的無 軌 道 式 請 先 閱 1 1 機 器 人 但 是 亦可為軌 道 式機器 人 。又， 亦可 為未持 有 移 載 讀 背 1 台 150 而 在 機器手爪 148 上 * Κ 抓住匣 子40之狀態 從 搬 運 m3 :丨 I t I 處 搬 蓮 至 搬 運目的地 之 形式的 機 器人。 再者 亦可為 具 備 如 事 項 1 I 再 1 \ 可 一 次 移 載 複数個匣 子 40的機 器 手146 者。 4 本 装 參 照 圈 9 儲料器間搬運裝置42包含有：行走軌道160 頁 1 I 成 為 環 形 狀者；台 車 162 ， Μ 單方向 (匾 中箭號 方 向 ) 1 1 移 動 於 行 走 軌道160 上 ，且最 大 搬運2個之匣子2者 Μ 及 1 1 懸 吊 金 鼷 器 具 164 ， 將 行走軌 道 160安 裝在 天花板 上 者 0 1 訂 參 照 圖 10 ，處理裝 置 32包含 有 :主機 170 Κ每1片 或 複 1 I 數 片 對 晶 圓 70施行半 導 體積體 電 路之製 造處 理者； 2個匣 1 1 子 台 階 172 Μ每1匣 子 單位收 納 應處理 之匣 子40者 白 動 1 i | 搬 運 車 通 信 單元174 自動搬蓮車38在對匣子台階172 置 1 放 處 理 前 匣 子40之前 確 認有無 弄 錯的其 他匣 子40或 在 取 出 1 處 理 後 匣 子 40之前確 認 該匣子 40 是否已 正確 載於匣 子 台 階 1 1 172 上 俾 使 對自動搬 連 車38輪 出 匣子台 階172的狀 態 者 0 1 I 參 照 圖 11 ，處理裝 置 34包含 有 :主機 180 Μ每1 片 或 複 1 1 數 Η 對 晶 圓 70施行半 導 體積體 電 路之製 造處 理者； 2個匣 1 1 子 台 階 182 Μ每1匣 子 單位收 納 應處理 之匣 子40者 動 1 1 搬 蓮 車 通 信 單元174 >自動搬蓮車38在對匣子台階182 置 1 I 放 處 理 1 刖 匣 子40之前 確 認有無 弄 錯的其 他匣 子40或 在 取 出 1 I 處 理 後 匣 子 40之前確 認 該匣子 40是否已 正確 載於匣 子 台 階 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -29 - Α7 Β7 經濟部中央標準局員工消費合作社印製 五、發明説明（27 ) 182上俾使對自動搬運車38輸出匣子台階182的狀態者。 Μ下，就對半導體晶固匣搬運装置30中之匣子40的儲料 器36之入庫控制方法大致區分如下三種加以說明，（1)從 處理裝置32、34將處理後匣子40收納於儲料器36内的作業 ;(2)從搬運處儲料器36將匣子40運至搬運目的地儲料器 36内的作業；Κ及（3)從手動用人口埠116對醏料器36入 庫的作業。 首先就從處理裝置32、34將處理後匣子40收納於赭料器 36內的作業（1)加以敘述。主電腦50預先將可收納於由輪 入櫬構54所输人之各髂料器36的儲料器架96内的匣子40之 最大數當作儲料器容量而予Μ記憶。當將匣子40收納於儲 料器36内時，主電腦50藉由從該數減去要收納的匣子40之 數以進行有無儲料器36之空位的判斷。如此由於主電臞50 進行儲料器36之空位管理，所Μ儲料器36會如習知所示不 需要將自動搬連車用入口埠88或儲料器間搬浬裝置用埠98 之空位向主電腦50報告。 與習知相同，處理裝置32、34透通通信S鼸58對主電臞 5 0完成處理之後舍要求匣子40之交換。在此•即使如_ 1〇 和圖11所示，處理裝置32、34依其形式有時要求退出成1 匣子單位或要求退出複數個單位。已接受該退出要求的主 電腦50，會從前述儲料器容量中減去被要求的Ε子数且移 至使用自動搬運車38的搬蓮作業。當已減去之结果變成負 數時，主電臞50會判斷無法收納匣子40而不移至使用自動 搬運車38的搬蓮作業。與習知相同，畲對複數個處理裝置 --:-1--Τ：-----裝-- (請先閱讀背面之注意事項再填寫本頁)T ~ printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 _V. Description of invention (ί Ί) Communication cable 58 is sent out. The outlet port 252 for the automatic lotus car that can be used here is the same as the inlet port 25 4 for the automatic lotus car, and can be determined on the processing devices 32 and 34 each time. This information can be provided to the main power source 50 through the access mechanism 54. The stocker 234, which has received the instructions for the warehouse operation, is delivered to the appropriate box 232 long automatic truck by using the charmer crane 80 *. After that, the stocker 234 will drive the forward moving device 250 to advance the cassette 232 on the automatic transfer vehicle outlet transfer port 100 to the automatic transfer vehicle outlet port 252. Furthermore, the cassette 232 can be rotated 90 degrees to easily transfer the automatic lotus car 38. This completes the out-of-warehouse operation of the exit stack 2 52 for the automatic truck, and the stocker 234 reports the operation completion of the host computer 50. The main battery 50 that has received the completion report from the stocker 234 for the outbound operation, and then transports the box 232 on the automatic transport car outlet port 252 to the box steps 172 and 182 of the processing devices 32 and 34 and passes through Communication 轚 鱅 58 issues an order to the automatic lotus car 38. The automatic truck controller 60 that has accepted the order will dispatch the operation from the plurality of automatic trucks 38 to the part that is most suitable for the lotus transfer operation, and uses the control bureau-side communication unit 62 and the lotus transfer-side communication unit. 142 performs wireless communication with the main unit to carry out the transportation operation of the cassette 232 on the automatic truck 38. The contents of the operation are described below. First, the carriage 140 moves toward the exit 璋 252 for the automatic truck according to the induction belt 156 attached to the floor from the waiting position according to the storage belt 234 serving as a transfer place. When the automatic truck 38 arrives, it is first checked whether there is a box 232 on the automatic truck delivery port 252 through the automatic truck communication unit 102. After that, the automatic truck 38 will drive the robot arm 144, the robot hand 146 and the machine-^ --- Γ ---- ^ ------ 1T (please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 specification (210X297 mm). 16 Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. A7 B7. 5. Description of the invention (ί '1). The gripper 148 is taken in the automatic truck. Use the wrapping box 232 on the outlet port 252 and place it on its own transfer platform 150. When the automatic transport vehicle 38 checks the automatic transport vehicle communication unit 102 for the presence or absence of the automatic transport vehicle outlet 252, if the box 232 is confirmed, an error will be reported immediately if there is no box 2 32. When the placement operation is completed, the carriage 140 moves again from the stocker 234 to the front of the cassette steps 172 and 182 indicated by the processing devices 32 and 34 at the transfer destination. When the automatic truck 38 arrives, it will place the appropriate cassette 232 on the transfer table 150 on the indicated cassette steps 172, 182 in the reverse order as before. The automatic truck 38 will confirm whether there is a mistake on the box steps 172 and 182 by placing the automatic box communication unit 174 on the box steps 172 and 182 before placing the erroneous box 232 on the indicated self-box steps 172 and 182. Box 232. An error is then reported immediately if there is an incorrect box 232. This is based on the judge that the cassette 232 is based on the empty information from the cassette steps 172, 182 of the processing devices 32, 34, so that the other cassettes 232 on the same stage are abnormal. When all the instructed operations are completed, the automatic truck controller 60 reports the operation completion to the host computer 50 through the communication cable 58. After the processing equipment 32, 34 of the appropriate cassette 232 is completed by the automatic truck 38, the host computer 50 instructs the processing equipment 32, 34 via the communication cable 58 to start the scheduled processing. Finally, the method (3) plus M from the manual entry port 260 and the manual exit port 262 from the warehouse are described. When the operator puts the cassette 232 into the stocker 234, the operator first puts the K 232 in a manual user. The port 260 is operated as one of the stockers 234-^ ----- I-- -'^ ------ Order ------ \ (Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) Α4 size (210 × 297 mm) 17 Economy A7 B7 printed by the Consumer Standards Cooperative of the Ministry of Standards of the People's Republic of China _V. Operation panel 121 of the description of the invention (i :)). It can be known from this operation that the box 232 is placed in the stuffer 234 in the manual inlet port 260, and the information of the ID card 240 of the box 232 is read by the ID card reading and writing device 270. Next, the asset transparent communication cable 58 is reported to the host computer 50. The host computer 50 thus knows the situation in which the operator brought the cassette 232. The host computer 50 does not sense the sufficient condition of the box 232 in the stocker 234 and sends out the storage operation instruction of the box 232 to the stocker 234. However, the usable manual inlet 璋 260 is determined by the processing devices 32 and 34 each time. This information can be provided to the main power supply 50 through the turn-in mechanism 54 in advance. According to the storage operation instruction sent via communication 霣 孀 58, the stocker controller 64 starts work after securing a storage place on the stocker rack 96. When the storage space cannot be secured, the feeder controller 64 does not start work and waits for a vacant place in the storage space as it is. The stocker 234 which has started the storage operation instruction is to use the stocker crane 80 to transport the box 232 on the manual inlet port 260 toward the storage place on the stocker rack 96 secured. The stocker 234 that has completed the indicated operation will report the operation completion to the host computer 50. Μ can complete the entry operation according to the operator. Next, a description will be given of a method of handing over the box 23 2 stored in the stocker 2 34 to the operator's hand via the manual outlet port 262. For example, consider adding the feeder 234, which is not provided in the automatic lotus car 38, to the boxes of the processing devices 32 and 34, and adding M. The processing devices 32 and 34 will communicate the communication request 58 to the main power unit 50 for a box input request. The main flute 50 will search whether there is a disposable box 232 on the stocker 234, and if necessary, move it to the warehouse operation. If not properly handled before, the box will be stored in the aging container 234. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm). mu-I -I-m 1-. (-.----. m ^ 1 «.- ", τ (Please read the notes on the back before filling this page) A7 ____B7 V. Description of the invention (丨 t :;). The management device 32, 34 will request a plurality of boxes 232 at a time according to its form. When the multiple requests are performed, the outbound operation from the stocker 234 shown below may be based on only the boxes. The number of the main computer 50 that has been moved to the warehouse operation is to select one of the plurality of manual outlet ports 262 according to the processing devices 32 and 34 that have been put into the request, and the warehouse operation instructions will be taken there. It is sent to the stocker 234 via the communication cable 58. The manual outlet port 262 which can be used here is the same as the automatic port port 252 of the automatic handling vehicle, and is determined in the processing devices 32 and 34 each time. It is provided to the main battery 50 through the turn-in mechanism 54. The stocker 234 that has accepted this is used to transport the wrapped box 232 to the manual outlet port 262 using the stocker crane 80. Also, the stocker 234 The operation panel 121 displays a display for permitting removal of the winding box 232 on the manual outlet port 262. At this point, the operator will take out the appropriate box 232 from the manual outlet port 262, and the operation panel 121 notifies the stocker 234 to take out the work. The Central Standards Bureau Staff Consumer Cooperative, Ministry of Economic Affairs, Yinzhong-众 --- Γ-- -'^ ------ ΐτ (Please read the precautions on the back before filling out this page) The situation of completion. Accept this to judge that the new stocker 234 has completed the warehouse operation, and the main power supply is communicated through the communication cable 58 The completion report is performed at 50. The operator who has taken out the box 232 does not know whether it is the processing device 32, 34, or which one has requested the input, so he will investigate the operator's terminal 56 of the main electric 50 After that, the box 232 is transported toward the steps of the processing devices 32 and 34 as the box steps 172 and 182. However, in the conventional semiconductor wafer box moving device 230, there are problems as described below. Host computer 50 After the completion of the warehouse operation of the automatic lotus car exit 堉 252, the lotus plant will be moved from the same port to the processing device 32 and 34. The paper size applies the Chinese National Standard (CNS) Α4 specification (210 X 297). Mm) -19-ΑΊ Β7 Ministry of Economic Affairs Printed by the Central Standards Bureau ’s Consumer Cooperatives. V. Invention Description ((V) 1 1 is shown on Baidong moving lotus car 38. Therefore, Baidong moving van 38 will come to Baidong moving van from the waiting area 1 1 Before exit port 252, wait for box 232 in the same port. 1 1 C Summary of the invention] Please first 1 1 The present invention was created to solve this problem. The purpose of the present invention is to read the back | 1 The lotus car's carrying capacity is 0. According to one of the inventions-*, the white moving lotus car control method f is a semi-intended matter. 1 1 item 1 The white moving lotus used in the conductor wafer box handling device. The vehicle control method package 1 contains: stocker 9 stores a plurality of semiconductor wafer cassettes for processing by ％% east of this page 置 applies to the semiconductor wafer cassette handlers MV 1 1 for storage Feeder and Operators of semiconductor wafer transfer between processing equipment • 1 I Container transfer device The device transfers semiconductor wafers between the stocker at the transfer location and the storage unit that transports hundreds of places. The operator M of the box and the main battery 1 use the M to perform the stocker Λ controller of the lotus device, automatic lotus car, and 1 1 processing device in the stocker. The white moving truck for storage of semiconductor wafer cassettes carried out by M 1 1 is used in the P port. The method 1 includes moving the semiconductor wafer cassettes from the processing device to the white crane using a moving lotus cart under the control of the host computer. The steps of using the van to the P port use 1 1 '1 to determine whether the semiconductor wafer cassette is present on the port P of the moving van. 1 1 The semiconductor is present on the port P of the white moving van. In the case of a round box, 1 1 waits for a certain period of time to enter the warehouse M, and after a certain period of time, it moves to the white moving 1 I. When a semiconductor wafer cassette exists on the port P of the car, an error message is sent. 1 I 0 The white moving of the present invention The vehicle control method is when the semiconductor wafer cassette is stored in the stocker 1 1 1 if there is a previous semiconductor wafer cassette, then 1 1 waits for a predetermined time even if the previous semiconductor wafer cassette becomes empty. 1 1 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm> — 20-A7 B7 Printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (1:;:) 1 1 An error message is reported. Therefore, although there is an advanced semiconductor wafer 1 1 in the M, it will be lifted, but if it is necessary, it will not wait for the white moving truck 1 1 to improve the working efficiency of the g moving truck 0 please first 1 1 According to another aspect of the present invention-the control method of the white moving van in the situation is a half-reading back: | I The control method of the white moving lotus car used in the conductor wafer box handling device. The surface JI contains the storage for the M storage. A plurality of semiconductor wafer cassette processing equipment 'rabbit 1 1 item 1 application > lambda processing equipment for semiconductor wafer processing; for white moving vans, the semiconductor wafer cassette between the stocker and the processing device is further processed. %> This page bundle 1 The inter-stocker handling device is used to move the semiconductor wafer box between the stocker at the handling place and the storage area 1 1 at the feeder. M And the main power 1 1 brain for the controller of the storage device, the moving device between the storage device, the S moving truck and the 1 1 order processing device, where the storage device includes a white moving truck The white moving car used for the storage of semiconductor wafer cassettes carried out by M 1 uses the P port and the main computer 1 1 stores the number of moving operations in the operation of the automatic moving truck and the 1 1 limit on the white moving moving vehicle. The control method further includes a step Λ of updating the number of carrying operations in the 1 operation, and a step of sending the carrying operation instruction to the white moving truck within a range of the upper limit J value not being memorized. 1 I The control method of the white moving van according to the present invention is to send a moving operation instruction within a range of 1 1 above the memorized limit value. Therefore, there will be no moving 1 1 lotus operation instruction and the whitening operation can be improved. The operating efficiency of the moving van 1 1 I is preferably the above-mentioned control method of the white moving lotus car further including 1 1 1. It is predicted that the semiconductor wafer box out of the D port used by the white moving lotus car 1 1 Procedures and instructions for sending handling work to the automatic lotus car based on predictions 1 1 This paper size applies to China National Standard (CNS) A4 (210X 297 mm) -2 1-A7 B7 Employee Consumer Cooperatives, Central Standards Bureau, Ministry of Economic Affairs Printed 5. Description of the invention (• Ϊ,)) 1 1 Step 0 1 1 The § moving car control method of the present invention is performed in the semi-equal wafer box from the stocker to the 1 1 processing device.During the lotus operation, f is predicted to move in vain / · -V Please 1 I first 1 The warehouse will send out the semiconductor wafer box of port P from the port M. Send the transportation operation to ik 1 and send it back to the white moving vehicle. 0 Therefore, it is possible to improve the \ 1 efficiency of the working surface of the white moving truck. 0 meaning 1 item | According to another aspect of the present invention, the automatic truck control method is used in the refilling semi-conducting wafer box handling device. Control method of white moving truck * Page 1 Includes KU for stocker Storing a plurality of semiconductor wafer cassettes Handling 1 I Device M Processing semiconductor wafer cassette handler 1 White IK carrying stocker The operator of the semiconductor crystal box between the processing device and the processing device 1 I order; the storage room Carrying device f Between the stocker at the handling place and the first stocker at 100 places, the operator M who carries out the semiconductor wafer cassette and the main 1 1 computer uses the K to make the stocker Λ stocker Between the white moving truck 1 I and the controller of the processing device, among which the stocker contains a port P for the white moving truck of the semiconductor wafer cassette according to the 1 for the white moving truck. The method includes the steps of accepting the processing completion report of the processing device> 1 1 Accepting the processing completion report Μ Performing the payment of the P port from the white moving van for the I 1 industry Step of accepting the output from the white moving lotus car The completed work is sent to the 1 I white moving truck. The 1 I box of the semi-conducting wafers that can be processed in the processing device and the semiconductor wafer box paid by the white port of the P moving port are processed.Steps according to industry instructions 〇 1 1 The control method of the white moving lotus car according to the present invention is that the semiconductor wafer is accepted at the port 1 1 of the white moving van, and the semiconductor wafer 1 1 will be used after the completion of the payment. China National Standard (CNS) A4 Specification (210X297 mm) -22-Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (^ h) The round box and the semiconductor crystal returned from the processing device to the stocker A pair of carton instructions is sent to the automated truck. Therefore, there is no phenomenon that the semiconductor wafer box is waiting to be paid for the automatic moving lotus car, and the operating efficiency of the automatic moving car can be improved. [Brief Description of the Drawings] FIG. 1 is a bird's-eye view of the semiconductor wafer cassette handling device 30. FIG. 2 is a bird's-eye view of the semiconductor wafer cassette carrying device 30. FIG. 3A to 3C are diagrams illustrating the semiconductor wafer cassette 40 and the ID card 72. FIG. 4 is a view of the stocker 36 as viewed from the side of the automatic lotus car. FIG. 5 is a view of the stocker 36 as viewed from the side of the operator. FIG. 6 is a diagram illustrating a manual outlet port of the stocker 36. Fig. 7A is a diagram illustrating a storage location of a cassette in a stocker as viewed from the side of the automatic truck. Fig. 7B is a diagram illustrating a magazine storage chamber in the stocker as viewed from the side of the operator. FIG. 8 is an external view of the automatic truck 38. FIG. 9 is an external view of the conveyer 42 between stockers. FIG. 10 is an external view of the processing device 32. FIG. 11 is an external view of the processing device 34. FIG. 12 is a view of the stocker 190 as viewed from the side of the automatic truck. FIG. 13 is a view of the stocker 190 viewed from the side of the operator. FIG. 14 is a diagram illustrating a manual outlet port of the stocker 190. FIG. 15 is a bird's-eye view of a conventional semiconductor wafer cassette handling apparatus 230. FIG. 16 is a bird's-eye view of a conventional semiconductor wafer hiding and transferring device 230. This paper size applies to China National Standard (CNS) A4 specification (210X 297 mm) 〇〇 ---: ------- 衮-(Please read the notes on the back before filling this page) Central Ministry of Economic Affairs Standard Bureau employee consumer cooperative printed A7 _ B7 V. Description of the invention (2!) Drawings 17A to 17C are diagrams illustrating the semiconductor wafer cassettes 2 30 and 11} cards 24o. Sa 18 is | 1 when the stocker 234 is viewed from the side of the automatic car. The plaque 19 is a garden in which the stocker 234 is viewed from the side of the operator. The circle 20 is a diagram illustrating a manual outlet port of the stocker 234. [Explanation of the preferred embodiment] Referring to _1 to _2, which is an embodiment of the present invention—the semi-conducting buried wafer g handling device 30 includes: the same buried devices 32 and 34 as the conventional ones, and a new The stocker 36, the automatic conveyor 38 which is the same as the conventional one, and the inter-feeder conveying device 42 which is the same as the conventional one. On the same processing devices 32 and 34 as the conventional ones, there is provided a certain stocker 36 as a storage place for the boxes 40 before and after such processing. Two automatic trucks 38 are engaged in the transportation operations between them. In addition, although the inter-stocker conveying device 42 is shown as being cut off in the middle, it is rotated around the garden, and a plurality of branches 36 are provided around it. Even for the other stockers 36, there are processing units 32, 34 and an automatic handling vehicle 38, which are each grouped. The semi-conducting wafer cassette carrying device 30 further includes: a host computer 50 which is the same as the conventional one; its main frame 52; its turn-in mechanism 54; its operator terminal 56; Processing device 32, 34, stocker 36, and automatic truck 38, and a communication cable 58 connecting the stocker 36 and the automatic truck 38; a stocker controller 64 same as the conventional one; The transporter controller 60; K and the conventional inter-stocker conveyance device controller 66. Although the communication between the automatic vehicle controller 60 and the automatic truck 38 in this case is performed wirelessly via the control station for the communication unit 62M *, it can also be performed by wire. I -1 ..... I 1 ^ 1 m II— I. II----ϋ τ »•;-3, νβ (Please read the notes on the back before filling this page) This paper size is applicable to China Standard (CNS) A4 specification (210 × 297 mm) 24 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (: "2") Referring to FIG. Description of the semiconductor crystal picture and its box, and ID card plus M. The wafers 70 and the cassettes 40 are the same wafers and cassettes as conventionally known. Although the ID card 72 includes a display portion 74 and a communication portion 76 which are the same as the conventional ones, the communication portion 76 is not provided on the front surface of the ID card 72 but on the bottom surface thereof. The detailed description of the constituent elements of the semiconductor wafer cassette conveying device 30 according to the present embodiment is as follows. A description will be given of the hopper 36 plus M with reference to FIGS. 4 to 6. Plaques 4 to 5 are drawn by cutting out a part of the container panel 94 as shown in FIG. 5 as the internal structure of the container 36 can be seen. The stocker 36 includes: a stocker rack 96, a port 98 for the transfer device between the stockers, a manual inlet port 116, a manual outlet port 118, an automatic porter port 86, and an automatic porter port. 100. Inlet port 88 for automatic lotus car, inlet transfer port 104 for automatic van, stocker crane 80, transfer machine 82, forward moving device 84, and communication unit for automatic lotus car 102. stocker crane 80 , The transfer machine 82, and the forward moving device 8 and 4 respectively carry out the transportation operations of 1E, 2 boxes, and 1 box unit. Can be placed in port 98 for handling equipment, manual inlet port 116, manual outlet port 118, automatic lotus transfer port 100, automatic lotus transfer port 104, automatic lotus port The number of boxes on the exit port 86 and the entrance port 88 for the automatic guided vehicle is respectively 2 boxes, 2S boxes, 1 box, 1 box, 1 box, 1 box, 1 box. Two forward moving devices 84 are prepared in the same manner as in the prior art. With automatic I I- I-I---— I--ί-1. ^ ϋ.----1 ------ (Please read the precautions on the back before filling this page) This paper size Applicable to China National Standard (CNS) A4 specification (210X 297 mm) 25 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (2.0 Exit port 86 for trucks, Entrance port 88 for automatic trucks, Automatic There are two outlet ports 100 for the lotus transfer vehicle and two inlet ports 104 for the automatic transfer vehicle. Although there is one manual inlet port 116, two manual outlet ports H8 are provided. As shown in Fig. 6, an ID card transcribing device 120 is installed on the manual exit port 118. Of course, an ID card transcribing device 120 is also attached to the manual entry port 116 as in the conventional case. This stocker 36 In the case, four ID card reading and writing devices 120 are used. However, the installation direction is different from the conventional one. Since the ID card communication section 76 is located on the bottom surface of the ID card 72, the ID card writing device 120 can be installed in the box receiving device 130. Therefore, the front side of the ID card 72 can face the working surface of the operator. The stocker crane 80 is the same as the conventional one The orientation of the magazine 40 cannot be changed. Therefore, the orientation of the magazine 40 in the stocker rack 96 is the same as that of the manual inlet port 116. It is placed in the exit port 86 for the automatic transfer truck and the inlet port for the automatic transfer truck. The direction of the box 40 on the 88 is the same as the conventional direction which is easy to transfer by the automatic lotus car 38. Therefore, the attached ID card 72 is oriented toward the working surface of the automatic lotus car. Therefore The direction is the same as that of the box 40 placed on the automatic transfer vehicle exit transfer unit 100 and the automatic transfer vehicle population transfer port 104 as one of the stocker racks 96. Therefore, the stocker 36 is moving forward During the moving operation of the box 40 of the mobile device 84, it is not necessary to change the direction of the box 40 by 90 degrees as usual. Referring to FIG. 4 and FIG. 5 * The stocker 36 further includes: outside the port of the automatic truck Covering door 90 can move up and down and maintain airtightness on the outside of exit transfer port 100 and transfer port 104 for self-propelled vehicles with M; and cover door 92 in port for self-propelled vehicles can be moved up and down Use this paper standard for China Home Standard (CNS) Α4 Specification (2 丨 0X297 mm) -2 6-m I----· -1 --..... V Shimin-I--ill II V—►-,-^ , \ = ° (Please read the notes on the back before filling this page) Printed bags A7 B7 of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (, .j / j) K is kept at the exit transfer port for automatic transport vehicles The airtightness of the inside of the 100 and the automatic transfer car inlet port 104. In this case, although it is only installed in one side of the automatic transfer vehicle outlet transfer port 100 and the automatic transfer vehicle inlet transfer port 104, the automatic transfer vehicle port shielding door 92 and the automatic transfer vehicle are installed inside and outside. The port outside shielding door 90 plus M is displayed, but the same port inside shielding door 92 and the inside of the other side of the automatic transfer vehicle exit transfer port 100 and the automatic transfer vehicle entrance transfer port 104 are also provided. Zhang outside shielding door 90 for automatic lotus car. The stocker 36 further includes a manual port-inside port door 114 and a manual port-inside port door 112. The manual outside port shielding door 114 and the manual inside port shielding door 112 are doors that can maintain the airtightness of the stocker 36 and can be moved up and down. The door 114 for manual override is located outside the manual entrance port 116 or manual exit port 118. The manual port shielding door 112 is a manual port shielding door located inside the manual entry port 116 or the manual exit port 118. Although only the manual inlet 埤 116 plus K are shown in the figure, even if the manual outlet port 118 is provided with two such manual shutter ports, they are also provided with such shielding doors. The stocker 36 further includes: an external port shielding door 122 for the lotus container moving device located outside the storage container for the storage device 装置 98; K and an internal port shielding door for the container moving device. 110. The port outside shielding door 122 for the storage device handling device and the port inside shielding door 110 for the storage device handling device are also doors that maintain the airtightness of the stocker 36 by M. The port outside shielding door 122 for the container transfer device between the stockers is located outside the port 98 for the container transfer device. The paper size applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) n mi1-I—I- I- ........ l \-nn I --if im (Please read the notes on the back before filling this page) -27-A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Explanation (： 25) 1 1 | 〇 Inside the port of the storage device for the transport device, the cover door 11 0 is located inside the storage device to move the 1 1 1 inside the port 98 of the transportation device. 0'— ·. 1 I storage room Port 98 of the handling device can open the storage room for the storage device. Please refer to 1 1 for the shelter door outside the port 122, and use the elevator 124 for the storage room transportation device to read the back 1 ascending and descending 0 storage device for the storage room Cover the door with the port 1 2 2 to move the winter 1 I intention 1 1 to move in the horizontal direction, and cover the door with the port between the feeders 110. Items 1 I and 1 t move up and down. The transfer machine 82 can use the loading and unloading maben loading and unloading machine 124 for the handling device between the stockers. The port 9δ of the handling device for the handling device between the stockers in the ascending position can be operated by page S_ ^ 1 I. Otherwise, the storage crane 80 Perform the 1 1 | operation on the peer in the lowered position. 〇1 1 The circles 7A and 7B show the storage place of the stocker 36 shown in FIGS. 4 to 6. Storage place 1 I 9 of the stocker 36 on the working surface of the vehicle. FIG. 7B is a storage place of the stocker 36 viewed from the work surface of the operator. In the figure 1 from STR01 to STK04, the storage unit N 0 is divided into the storage units of the storage unit 36 of the storage unit 36. From T01 to T07, the shelves Ν 〇 of the stocker rack 96 are shown in the horizontal position. From P01 to P04, the position Η 〇 is shown in the vertical position of each--stocker unit. 1] Refer to the garden 8. The automatic lotus car 38 includes: a trolley 140 guided by a sensor band 156 attached to the ground 1 I board, and the walker van communication unit 142 t 1 1 is controlled by the automatic van. 1 1 information exchanger between the control-side communication unit 62 of the control device 60; BS. Reciprocating arm 144, robot hand 146, and robot claw 148 1 1 each use M to carry out the transfer operation of the box 40; 4 Transfer stage 150, in line 1 | walk in advance, keep the position 40 taken from the processing devices 32 and 34 or the stocker 1 I 36 in the vertical position; the operation panel 152, between the operator Into I 1 This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) 28 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (: 1G) 1 1 | M and the buffer plate 154, use M to detect obstacles M to stop the 1 1 1 execution of the operation. 0'V 1 1 white moving van 3 8 as a non-guided by the induction belt 156 Rail type Please read 11 Robots first, but they can also be Rail type robots. In addition, it is also possible to move the robot from the transport m3: 丨 I t I to the transport destination in the state of holding the box 40 on the robot claw 148 without holding a transfer reading back 150. Furthermore, it is also possible to have a machine hand 146 having the same item 1 I then 1 \ which can transfer the plurality of boxes 40 at a time. 4 The reference circle of this installation 9 The storage device conveying device 42 includes: walking track 160 Page 1 I who is in the shape of a ring; trolley 162, M in one direction (the direction of the arrow in the plaque) 1 1 moves on the walking track 160, and Carry up to two boxes: 2 persons M and 1 1 suspending golden urns 164, and those who install the walking rail 160 on the ceiling. 0 Order as shown in FIG. 10. The processing device 32 includes: the main unit 170 KK each 1 piece or multiple 1 I Number of processors who manufacture semiconductor integrated circuits on wafer 70; 2 boxes 1 1 sub-steps 172 Μ per box unit containing boxes to be processed 40 white moving 1 i | van communication unit 174 automatic moving lotus The car 38 confirms whether there is another box 40 that is wrong before putting the front box 40 on the processing box 172 or confirms whether the box 40 is correctly loaded on the box step 1 1 172 before removing the processed box 40 Those who are in the state of the step 172 of the box 172 of the automatic transfer car 0 1 I refer to FIG. 11 and process Device 34 includes: a host of 180 megas per chip or 1 1 digits; a processor that applies a semiconductor integrated circuit to wafer 70; 2 boxes 1 1 sub-steps 182 mega per box to store boxes to be processed 40 Move the 1 1 lotus car communication unit 174 > The automatic lotus car 38 sets 1 I on the box step 182 I puts the handle 1 on the box 40 and confirms whether there are other boxes 40 that are mistaken or before taking out the box 40 after 1 I processing Confirm whether the box 40 has been correctly loaded on the box step 1 1 This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) -29-Α7 Β7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 27) 182 is a person who outputs the state of the cassette step 182 to the automatic truck 38. In the following, the storage control method of the stocker 36 of the box 40 in the semiconductor crystal solid box carrying device 30 is roughly divided into the following three descriptions. (1) The processed box 40 is stored in the storage material from the processing devices 32 and 34. Operation in the container 36; (2) the operation of transporting the box 40 from the storage container 36 to the storage container 36 in the transportation destination; and (3) the manual storage of the container 36 to the container 36 from the population port 116 operation. First, the operation (1) of storing the processed cassette 40 in the dispenser 36 from the processing devices 32 and 34 will be described. The host computer 50 preliminarily stores the maximum number of the boxes 40 that can be stored in the stocker rack 96 of each stocker 36 input by the wheel structure 54 as the stocker capacity. When the magazines 40 are stored in the stocker 36, the host computer 50 determines the presence or absence of the stocker 36 by subtracting the number of the magazines 40 to be stored from the number. In this way, because the main battery 50 manages the vacant position of the stocker 36, the stocker 36 will not need to automatically connect the entrance port 88 for the car or the port 98 for the device between the stockers as shown in the conventional example. The vacancy is reported to the host computer 50. As in the conventional case, the processing devices 32 and 34 pass through the communication S 鼸 58 to the main power unit 50 to complete the processing and request the exchange of the box 40. Here, even as shown in _ 10 and FIG. 11, depending on the form, the processing devices 32 and 34 sometimes require withdrawal from one box unit or multiple units. The host computer 50 that has accepted the withdrawal request subtracts the required number of E from the above-mentioned stocker capacity and moves to the lotus moving operation using the automatic truck 38. When the subtracted result becomes a negative number, the main battery 50 judges that the cassette 40 cannot be stored without being moved to the lotus moving operation using the automatic truck 38. Same as the conventional one, I would like to deal with a plurality of processing devices-:-1--T: ----- install-- (Please read the precautions on the back before filling this page)
、-IT 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公楚） 30 經濟部中央標準局員工消費合作社印製 五、發明説明（Ui 32、34之各個 分派資訊，被 裝置32 、 34之 搬蓮車用入口 主電腦50必需 車38上。 接收來自主 車控制器60， 172、182 上的 口埠88上。當 器60就會將作 行0 A7 B7 被分別分派一個自動搬運車用入口璋88，該 預先提供給主電腦50。此時，例如來自處理 退出要求即使是M2匣子單位進行，在自動 埠88上亦只有一個匣子40之載置場所。因此 將1匣子單位之搬運作業指示送至自動搬運 電腦50之1匣子之搬蓮作業指示的自動搬運 與習知相同將處理裝置32、34之匣子台階 適當匣子40蓮至儲料器36的自動搬運車用入 被指示之所有的作業完成時自動搬運車控制 業完成報告對主電腦50透過通信電纜58來進 接受來自自動搬運車38之作業完成報告的主 對儲料器控制器64進行來自儲料器36之適當匣 搬運車用入口埠88的入庫作業指示。按照透過 而送來的該入庫作業指示，儲料器控制器64在 架96上的收納場所之後雖會著手於作業但是只 才無法確保收納場所之情況。為何如此，是因 在著手於使用自動搬運車38的搬運作業之前會 36之空位所致。無問題地著手於入庫作業的儲 習知相同會將自動搬埋車用入口埠88上的逋當 儲料器架96所確保的收納場所上。另外，與習 於在自動搬運車用入口埠88的匣子40之方向和 車用人口交接埠104的匣子40之方向相同，所 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 電腦50，係 子40之自動 通信電纜58 確保儲料器 有在異常時 為主電臞50 確認儲料器 料器36，與 匣子40蓮至 知不同，由 在自動搬蓮 Μ前進移動 n I I I HI 1 n^— V 士 ..-- s - 、1 (請先閲讀背面之注意事項再填寫本頁) 31 經濟部中央標準局員工消費合作社印製 ΑΊ Β7五、發明説明（2]) 裝置84沒有必要在移動作業中途使匣子40旋轉90度方向。 當作業完成時儲料器控制器64會透過通信電瀵58對主電腦 50進行作業完成報告。Μ上在處理裝置32、34所發生的處 理後Ε子40會被收納在儲料器36内。 接著就從儲料器36將匣子40蓮至搬運目的地儲料器36内 的方法（2)加Κ敘述。當在處理裝置32、34之處理完成的 匣子40收納在儲料器36内時，主電腦50會將該儲料器36當 作搬運處儲料器36而從該匣子40之次處理裝置32、34中決 定適當搬蓮目的地儲料器36。主電腦50接著會從該搬蓮目 的地儲料器36之匣子容量減去匣子數並使用儲料器間搬運 裝置42而移至搬運作業上。主電腦50，在已減去的結果變 成負數時會判斷為無法收納且不移至使用自動搬運車38的 搬運作業上。 移至搬運作業的主電腦50*與習知相同透過通信電嫌58 對儲料器間搬蓮裝置42送出搬運作業指示。依該指示而被 設定的搬運目的地非為習知之儲料器間搬運裝置用埠98而 是搬蓮目的地儲料器36之儲料器架96的收納場所。接收該 搬運作業指示的儲料器間搬運裝置控制器66，會透遇通信 電纜58對搬運處儲料器36，並委託從遘當匣子40之收納場 所至儲料器間搬運裝置用埠98的移動作業。被委託的儲料 器36會對遘當匣子40使用儲料器起重機80Μ進行預定的作 業，且對儲料器間搬運裝置控制器66進行作業完成報告。 接受該作業完成報告的儲料器間搬運裝置控制器66，會使 空台車70移動至與搬蓮處儲料器36對應的站台上。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） ^ ^ 裝------訂------\ (請先閱讀背面之注意事項再填寫本頁) -32 - 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（:川） 當移動完成時儲料器間搬運裝置控制器66，會再次對搬 蓮處儲料器36委託將儲料器間搬運裝置用埠98上的適當匣 子40對適當空台車162予Μ移載。被委託的儲料器36會使 用移載機82移載適當匣子40，且對儲料器間搬運裝置控制 器66進行作業完成報告。接受該作業完成報告的儲料器間 搬運裝置控制器66，會使滿台車移動至輿搬運目的地儲料 器36對應的站台上。 移動完成的儲料器間搬運裝置控制器66會透過通信電纜 58向儲料器控制器64，委託將台車162上的匣子40經由儲 料器間搬運裝置用埠9δ而收納在儲料器架96內。被委託的 儲料器控制器64，會在儲料器架96上確保匣子40的收納場 所。儲料器控制器64會驅使移載機82將匣子40移動至儲料 器間搬運裝置用埠98上*接著使用儲料器起重機80從同埠 中將匣子40朝儲料器架96所確保的收納場所予Μ收納。儲 料器控制器64只有在異常時才會在收納匣子40時無法確保 收納場所。為何如此，是因為主電腦50在著手於該搬蓮作 業之前會確認搬運目的地儲料器36之空位所致。 作業完成的儲料器控制器64，會向儲料器間搬運裝置控 制器66報告該要旨。接受此的儲料器間搬捶裝置控制器66 會向主電腦50報告作業完成報告。Μ上就可完成從搬運處 儲料器36至搬蓮目的地儲料器36之匣子40的搬運作業。其 次，就從手動用入口埠116至儲科器36入庫的作業（3)加 Μ敘述。作業者（未圈示）在將匣子40入庫於儲料器36内 時，首先會將匣子40置於手動用入口埠116上再操作作為 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 一 3 3 - --^--ττ----'装------訂------\ (請先閲讀背面之注意事項再填寫本頁) A7 Β7 經濟部中央標隼局員工消費合作社印製 五、發明説明（:U ) 儲料器36之一部分的搡作面板121 。依該操作得知匣子40 被置於手動用入口埠116上的儲料器36，會利用ID卡績寫 装置120 _取記錄在逋當匣子40的ID卡72上的資訊’且會 將該資料透過通信電纜58向主電腦50報告。 主電腦50會依此而得知作業者蓮來匣子40的情形’且從 該儲料器36之匣子容量中減去其應人庫的匣子個數&移至 使用儲料器36的搬連作業上。但是，在減去之结果變成負 數且無法將匯子40朝儲料器36收納時就不移至人庫作業上 。移至入庫作業的主電腦50與習知相同會透通通信電嫌58 將入庫作業指示送至儲料器控制器64上。按照被送來的該 入庫作業指示*儲料器控制器64在儲料器架96上確保E子 40之收納場所之後就著手作業。儲料器控制器64只有在異 常時才會在收納匣子40時無法確保收納場所。為何如*b ’ 是因為主電腦50在著手於該搬運作業之前會確認搬運目的 地儲料器36之空位所致。 著手於入庫作業指示的儲料器36，與習知相同使用儲料 器起重機80將手動用入口埠116上的匣子40朝被確保的儲 科器架96上之收納場所蓮送使被指示的作業完成之儲料器 36，係對主電腦50進行作業完成報告。以此作業者之入庫 作業就算完成。 如此在半導體晶画匣搬蓮裝置30中之儲料器入庫作業控 制方法，會在主電腦50上，預先使可收納各雠料器36之匿 子40的最大個數當作儲科器容量而從输入機構54中被提供 ，在收纳匣子之際藉由從儲料器容量中減去其®子個數Μ --r.--^------- (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS〉A4規格（210X297公釐） 34 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (： ► ) 1 1 1 進行 收 納 場 所 之 確 保 〇 因 此， 無 須 儲 料 器 36之 a 動 搬 運 1 1 1 車用 入 P 埠 88和 儲 料 器 間 搬運 裝 置 用 埠 98的 空 位 當 作 條 件 1 1 就可 進 行 從 處 理 裝 置 32 Λ 34至 儲 料 器 36的 收 納 作 業 及 儲 料 請 先 m 1 1 Ί 器間 的 搬 運 作 業 0 背 1 因 而 在 白 動 搬 運 車 用 入口 埠 88上 所 先 行 的 匣 子 40變 無 之 注 : 1 之前 白 動 搬 運 車 38就 會 著 手於 在 處 理 裝 置 32 、 34中 所 發 生 事 項 1 I 再 1 V 的匣 子 40之 搬 運 作 業 上 0 因此 可 解 消 在 處 理 後 匣 子 40之 $ 裝 處理 本 裝 置 32 34的 搬 運 作 業等 待 時 間 變 長 而 白 動 搬 蓮 車 頁 1 1 38之 工 作 效 率 無 論 是 否 低 仍無 法 發 揮 預 定 的 搬 蓮 能 力 的 問 1 1 I 題° 1 1 又 從 處 理 裝 置 32 34 至儲 料 器 36的 匣 子 40之 搬 蓮 作 業 1 訂 僅是 儲 料 器 36之 白 動 搬 運車 用 入 Ρ 埠 88的 空 位 作 為 條 件 1 | ，而 進 行 儲 料 器 36之 收 納 場所 的 充 足 狀 況 之 確 認 〇 因 此 * 1 I 在對 白 動 搬 運 車 用 人 口 埠 8 8完 成 搬 蓮 作 業 之 後 即 使 至 儲 1 1 I 料器 36的 入 庫 作 業 指 示 可 從主 電 腦 50中 出 來 由 於 沒 有 空 1 的收 納 場 所 所 可 解 消 在 同埠 上 等 待 長 時 間 的 問 題 0 再 者 9 在 儲 料 器 間 搬 運 装置 用 埠 98上 所 先 行 的 匣 子 40變 無之 前 儲 料 器 間 搬 蓮 裝 置 42就 會 著 手 於 位 於 搬 m 處 儲 料 器 I I 36内 的 後 m 匣 子 40之 搬 運 作業 上 〇 因 此 » 可 解 消 在 後 鑛 匣 1 1 子40之 搬 運 處 儲 料 器 36的 搬蓮 作 業 等 待 時 間 變 長 而 儲 料 1 1 器間 搬 蓮 裝 置 42之 工 作 效 率無 論 是 否 低 仍 無 法 發 揮 預 定 的 1 1 搬蓮 能 力 的 問 題 〇 1 I 再 者 從 搬 運 處 儲 料 器 36至 搬 運 的 地 儲 料 器 36的 匣 子 1 | 40之 搬 蓮 作 業 僅 是 以 搬 蓮 目的 地 儲 料 器 36之 儲 料 器 間 搬 蓮 1 1 本紙浪尺度適用中國國家標準（CNS ) A4規格（210X297公釐） a r -35 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (‘ ) 1 1 裝 置 用埠 98的 空位 作 為 條 件 而 進 行儲 料 器 36之 收 納 場 所 1 1 1 的 充 足狀 況 之 確認 0 因 此 在 對 儲 料器 間 搬 運 裝 置 用 埠 98 1 I 完 成 搬運 作 業 之後 即 使 至 儲 料 器 36的 入 庫 作 業 指 示 可 從 請 先 閱 1 1 主 電 腦50中 出 來， 由 於 沒 有 空 的 收 納場 所 所 Μ 亦 可 解 消 在 讀 背 1 同 埠 上等 待 長 時間 的 間 題 〇 向 之 注 :| I 意 1 I 再 者， 被 置 於手 動 用 入 Π 埠 116 上的 匣 子 40 即 使 至 儲 事 項 1 I 4 1 » 料 器 36的 入 庫 作業 指 示 從 主 電 腦 50中出 來 由 於 沒 有 空 的 4 装 本 收 納 場所 所 Μ 亦可 解 消 在 同 埠 上 等 待長 時 間 的 問 題 0 頁 Ν^ 1 I 藉 此， 在 白 動搬 蓮 車 用 入 □ 埠 88或儲 料 器 間 搬 運 裝 置 用 1 1 I 堉 98上即 使 有 先行 的 匣 子 40只 要 在 儲料 器 36内 確 保 有 後 續 1 1 之 匣 子40的 收 納場 所 就 可 著 手 從 處 理裝 置 32 34 至 白 動 搬 1 訂 蓮 車 用入 口 埠 88的 搬 蓮 作 業 或 從 搬 運處 儲 料 器 36 至 搬 運 百 1 | 的 地 儲料 器 36的搬 蓮 作 業 而 匣 子 40就不 需 要 在 處 理 裝 置 32 1 I 、 34或儲 料 器 36中 等 待 0 又 到 達 自動 搬 蓮 車 用 入 □ 埠 88 1 1 I 儲 料器 間 搬 蓮裝 置 用 埠 98或 手 動 用入 口 埠 116 上 的 匣 子 [ 40由 於可 在 儲 料器 36内 之 儲 料 器 架 96上 確 保 收 納 場 所 所 Μ 1 沒 有 等待 長 時 間的 效 果 〇 I 1 其 次， 就 來 自半 導 體 晶 圓 匣 搬 運 裝置 30中 之 半 導 體 晶 圓 1 I 匣 40之儲 料 器 36的 出 庫 控 制 方 法 大 致區 分 如 下 三 種 加 >λ 說 1 1 明 (4) 經 由 自動 搬 運 車 用 出 Ρ 埠 86朝 白 動 搬 運 車 38付 出 1 1 的 作 業； (5) 在搬 蓮 處 儲 料 器 36中 經由 儲 料 器 間 搬 運 裝 置 1 1 用 埠 98朝 儲 料 器間 搬 運 裝 置 42付 出 的作 業 Μ 及 (6) 經 由 1 | 手 動 用出 0 埠 118 向 作 業 者 付 出 的 作業 〇 1 I 首 先就 經 由 自動 搬 蓮 車 用 出 Ρ 埠 86朗 動 搬 運 車 38付 出 1 1 本紙張又度適用中國國家標準（CNS ) Ad規格（210X 297公釐） -36 - 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（:U ) 匣子40的作業（4)加Μ敘述。與習知相同當從處理裝置32 、34透過通信電纜58發送匣子投人要求給主電腦50時，主 電腦50在儲料器36上搜尋有無可處理的匣子40時會移至出 庫作業上。已移至出庫作業的主電腦50*會對儲料器36透 過通信電纜58送出在每一處理裝置32、3 4上預先決定一個 之位於自動搬運車用出口埠86之儲料器架96上的匣子40之 出庫作業指示。接受此的儲料器36，會使用儲料器起重機 80將適當的匣子40運至自動搬運車用出口交接埠100上， 之後驅使前進移動裝置84將自動搬運車用出口交接埠100 上的匣子40往前朝自動搬運車用出口埠86送出。與在自動 搬運車用入口埠88及自動搬運車用入口交接埠104的擠前 作業中已述者相同，在該作業中途*前進移動装置84沒必 要如習知般地使匣子40之方向旋轉90度。 依此朝自動搬運車用出口漳86之出庫作業就會完成，儲 料器36會對主電腦50進行作業完成報告。在該一系列之儲 料器36的作業中，儲料器控制器64，係在儲料器起重機80 從儲料器架96之收納場所中取出適當匣子40之際，會將該 資訊透過通信電嫌58向主電腦50報告。接受此的主電腦50 會在進行入庫作業時於下次加在滅去匣子數而得的儲料器 36之儲料器容量（匣子收納數）。被付出至自動搬運車用 出口埠δ6的匣子40與習知相同被運至依自動搬蓮車38而提 出投入要求的處理裝置32、34上。 接著就在發送處儲料器36中經由儲料器間搬運裝置用埠 9δ朝儲料器間搬運裝置42付出匣子40的作業（5)加Μ敘述 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X297公釐） -37 - (請先閲讀背面之注意事項再填寫本頁) 裝- 、\-β 經濟部中央標準局員工消費合作社印製 A7 五、發明説明（3Γ;) 。接受來自儲料器36之入庫作業完成報告的主電臞5〇，會 從其匣子40之次處理裝置32、34中決定適當搬運處儲料器 36，而對儲料器間搬運裝置42透過通信電纜58送出儲料器 間之搬蓮作業指示。已梭收該搬運作業指示的儲料器間搬 蓮裝置控制器66,首先會透通通信電纜58對搬運處儲料器 36從遘當E子40之收納塲所中委託至儲料器間搬運裝置用 増98的移動作業。被委託作業的儲料器36使用儲料器起重 機80M使缠當E子40移動’且對儲料器間搬運裝置控制器 66進行作業完成報告。 在該一糸列之儲料器36的作業中儲料器控制器64係在儲 料器起重機80從儲料器架96之收納場所中取出遒當匣子4〇 之際’會將該資訊經由髂料器間搬運裝置控制器66_主電 腦50報告。或直接透過通信電纜58向主電臞5〇報告。接受 此的主電腦50會在進行入庫作業時於下次加在減去匣子數 而得的儲料器36之g子收納數。被付出至儲料器間搬蓮装 置用埠98的匣子40，係按照從上述之搬運窳齙料器“蓮送 匣子40至搬運目的地儲料器36的作業（2)，蓮送至搬蓮目 的地儲料器36上。 最後就經由手動用出口埠118向作業者付出度子4〇的作 業（6)加Μ敘述。就自動搬運車38所未具備的餘料器36和 其處理裝置32、34加Μ考慮。當處理裝置32、34透過通信 電鼸58向主電臞5 0進行匣子投入要求時，主電藤5〇會在儲 料器36上搜尋有無可處理的匣子40。 在有匣子40時，主電臞50會移至出庫作業。已移至出庫 本k張尺度適用f國國家標準（CNS ) Α4規格（2丨0X297公釐） ' ' 38 ^ ----Γ-----參------1T------^ ί靖先閲讀背面之注意事項再填寫本頁；一 A7 經濟部中央標準局員工消費合作社印製 B7__五、發明説明（:U:) 作業的主轚睡50,與自動搬運車用出口漳86同樣會對儲料 器36透過通信電鑭58送出在每一處理裝置32、34上預先決 定一個之位於手動用出口埠118之儲料器架96上的匣子40 之出庫作業指示。接受此的儲科器36，會使用儲料器起重 機80將逋當的匣子40蓮至手動用出口埠118上，且在儲料 器36之操作面板121上進行允許手動用出口埠118上之缠 當匣子40之取出的顧示。 看到此的作業者，從手動用出口埠118取出瑭當匣子40 ，操作操作面板121向儲料器36通知完成取出作業之情況 。接受此的髂料器36會判斷出庫作業完成之情況，對主電 腦50透過通信電纜58進行其完成報告。在該等儲料器36的 作業中，對於儲料器控制器64而言在儲科器起重機80從儲 料器架96之收納場所中取出適當匣子40時，會透過通信電 孀58向主電腦50報告該資訊。已接受此的主電腦50會在進 行入庫作業時於下次加在減去匣子數而得的儲科器36之匣 子收納數。由於取出匣子40的作業者不知道提出投入要求 的處理裝置32、34所Μ會朝向主電臁50的作業者終端播56 ，調査該資訊，而朝其處理裝置32、34之缠當匣子台階 172、182運送。 在該種的儲料器出庫作業控制方法中，主電腦50就將匣 子40入庫於館料器36內之際減去匣子數而得的匣子收納數 ，於儲料器起重機80從儲科器架96中取出適當匣子40時會 根據由髂科器控制器64所報告的資訊將其g子個數加在匣 子收納數上。藉此，主電腦50會使空位在收納場所上發生 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ~ 一 3 9 一 Μ V 裝------訂------^ (請先閎讀背面之注意事項再填寫本頁) A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (， 1 ； ) 1 1 1 〇 因 此 主 電 腦 50 會 比 將 儲料 器 36之 商 動 搬 運 車 用 入 口 埠 1 1 | 88和 儲 料 器 間 搬 運 裝 置 用 埠98的 空 位 資 訊 當 作 觸 發 還 更 快 1 I 速 地 可 著 手 於 從 處 理 裝 置 VI、 34 至 儲 料 器 36的 搬 運 作 業 或 請 先 閲 1 1 I 儲 料 器 36間 的 搬 運 作 業 上 〇 讀 背 1 因 而 在 白 動 搬 蓮 車 用 入口 埠 88上 所 先 行 的 匣 子 40變 無 : 1 之 前 白 動 搬 蓮 車 38就 會 依 在處 理 裝 置 32 > 34中 所 發 生 的 處 意 事 項 1 1 再 1 * 理 後 匣 子 40之 白 動 搬 運 車 38而 著 手 搬 運 作 業 〇 因 此 可 解 埠 寫 本 裝 消 在 處 理 後 匣 子 40之 處 理 裝置 32 34的 搬 運 作 業 等 待 時 間 頁 I I 變 長 * 而 白 動 搬 蓮 車 38之 工作 效 率 無 論 是 否 低 仍 無 法 發 揮 1 1 預 定 的 搬 運 能 力 的 問 題 〇 1 1 又 儲 料 器 間 搬 蓮 裝 置 42在 儲 料 器 間 搬 運 裝 置 用 埠 98上 I 訂 所 先 行 的 匣 子 40變 無 之 前 會著 手 於 搬 蓮 處 儲 料 器 36的 後 鑛 1 I 匣 子 40之 搬 運 作 業 上 〇 因 此， 可 解 消 在 後 鑛 E 子 40之 搬 運 1 I 處 儲 料 器 36的 搬 蓮 作 業 等 待時 間 變 長 而 儲 料 器 間 搬 運 裝 1 1 1 置 42之 工 作 效 率 無 論 是 否 低仍 無 法 發 揮 預 定 的 搬 運 能 力 的 1 問 題 〇 藉 此 在 儲 料 器 36之 儲 料器 架 96上 發 生 物 理 上 的 空 位 時 就 會 立 即 著 手 從 處 理 裝 置 32 ' 34 至 動 搬 運 車 用 入 P 埠 88 1 1 I 的 搬 運 作 業 且 著 手 從 搬 運處 儲 料 器 36 至 搬 運 百 的 地 儲 料 1 1 器 36的 搬 運 作 業 〇 因 此 有可 縮 短 在 處 理 裝 置 32 34或 搬 1 1 運 處 儲 料 器 36的 匣 子 40 之 等待 時 間 等 的 效 果 0 1 1 上 述 之 主 電 腦 50 未 持 有醆 於 儲 料 器 36內 之 各 個 匣 子 40 1 I 之 收 納 場 所 的 資 訊 而 在 儲料 器 控 制 器 64上 負 責 該 管 理 0 1 | 因 而 預 先 將 由 輸 入 機 構 54所 提 供 的 髂 料 器 36之 最 大 收 納 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -40 A7 經濟部中央標隼局員工消費合作社印製 B7五、發明説明US ) 匣子数當作儲料器容量且藉由減去從該處使用的數Μ作為 數量而管理收納場所。以下說明管理其他收納場所的方法。 主電腦50，係如圖7Α、7Β所示從輸人機構54提供闥於預 先取名的儲料器36之收納場所的資訊，同時從儲料器36完 成匣子40之收納作業時依其名稱接受收納場所的報告。藉 此主電腦50，就可知道在收納場所中沒有匣子40而在儲料 器36之收納場所中有空位的情況。 又，主電腦50，係在進行入庫作業之際不向儲料器3 6指 示匣子40的收納場所，因而收納場所最後會由儲料器控制 器64來決定。因此，主電腦50會在進行入庫作業前自行決 定儲料器36的收納場所，向儲料器控制器64指示的態樣亦 會被考慮。此時，儲料器控制器64*會在未自行決定收納 場所而由主電腦50所指示的收納場所中收納適當的匣子40 。藉此*主電腦50，可知道在收納場所中沒有匣子40而在 儲料器36之收納場所中有空位的情況。 主電腦50，係可對一個處理裝置32、34從輸人機構54中 指定複數個可使用的自動搬運車用入口埠88。又，此時亦 可配合設定使用順序。例如圖1所示的情況，將與某一個 . 處理裝置32、34對應的自動搬運車用入口璋88之數設定為 2個*並設定其使用顒序。當從處理裝置32中透過通信電 纜58向主電腦50報告匣子40之退出要求時，主電腦50雖然 從具有複數個的自動搬運車用入口埠88中即使在前次已使 用過但是在下一個使用顒序的自動搬運車用入口埠88或沒 有下一個使用顒序時就會將位於第一使用顒序的自動搬運 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） _ χ 1 _ I— - - ·.-1「 .·-1 I!— HI ml 1. I nn * - - I -I .^1^1 (請先閱讀背面之注意事項再填寫本頁) A7 經濟部中央標準局員工消費合作社印製 B7五、發明説明ϋ :.1) 車用入口埠88當作其匣子40之搬運作業所使用者來決定。 在該種儲料器入庫作業控制方法中，可將複數個自動搬浬 車用入口璋88分派於1台處理裝置32、34中，且藉由已預 先被決定的顒序予以分派，就可大致均等地使用自動搬蓮 車用入口埠88。 因而*在每一處理裝置32、34可使用的自動搬運車用入 口埠88由於係預先被決定為1個，所Μ自動搬運車用入口 埠88在有複數個的情況，就可依處理裝置32、34之處理能 力及工作狀況解消在自動搬運車用入口埠88之使用混合狀 況中發生不均等的問題。 藉此，即使處理裝置32、3 4之各自的處理能力及工作狀 況不同，仍可對各自的處理裝置32、3 4大致均等使用複數 個自動搬運車用入口埠88，且無在自動搛運車用入口埠88 之使用混合狀況中發生不均等的間題。 更佳者為，主電腦50，可對一個處理裝置32、34從輸入 機構54中指定複數個可使用的自動搬運車用入口埠88，同 時在其每一埠88上向自動搬蓮車38發出的搬蓮作業指示之 中，亦可具有預先記憶未完成搬運作業的作業指示之數的 資料區域。該主電腦50在接受來自處理裝置32、34之半導 體晶圓匣40的退出要求時，會搜尋可使用該處理裝置32、 34的自動搬蓮車用入口埠88。結果，在存有複數個可使用 的自動搬運車用入口埠88時，主電腦50會比較被記憶於各 自的埠自動搬運車用入口埠88之資料區域内的作業指示之 數，而選擇數量小的一方的自動搬運車用入口埠88。主電 本紙張尺度適用中國國家標準（CNS ) Α4規格（2!0Χ297公釐） _ - n ^^1 Inf ^^^^1 i ^^^^1 n^n n^f an V. < (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（4 Π) 腦50，會將闞於該埠自動搬運車用入口埠88之資料區域的 值加1，且將搬運作業指示向自動搬運車38發送。又，當 作業完成時會將資料區域之值減1。另外，在該作業完成 前的搬運作業之數為相同的埠8 8有複數個時，主電腦50可 任意從該等中選擇一個埠88。 在該種儲料器入庫作業控制方法中，可複數個自動搬運 車用入口埠88分派於1台處理裝置32、34中。又，可進行 至新的自動搬運車38之搬運作業指示以便使該等各自的作 業完成前之作業數可為均等。因此就可大致均等地使用埠 88的使用頻率。 因而，由於在每一處理裝置32、34上可使用的自動搬蓮 車用入口埠88預先被決定為1個，所Μ在自動搬運車用入 口埠88有複數個時，就可依處理裝置32、34之各自的處理 能力及工作狀況解消在自動搬運車用入口埠88之使用混合 狀況中發生不均等的問題。 藉此，即使處理裝置32、34之各自的處理能力及工作狀 況不同，仍可對各自的處理裝置32、3 4大致均等使用複數 個自動搬蓮車用人口埠88。因此在自動搬運車用入口埠88 之使用混合狀況中不會發生不均等的問題。 上述之主電腦50，只要有來自處理裝置32、34的匣子40 之退出要求且在適當儲料器36上有收納場所的話則會從具 有複数個的自動搬運車用入口埠88中選擇一個自動搬蓮車 用入口埠88 Μ使作業均等且將搬蓮作業指示送至自動搬運 車38上。因此，即使將自動搬運車用入口埠88之匣子40送 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） _ /ι 9 _ m n un - m t^i I (請先閱讀背面之注意事項再填寫本頁) ΑΊ 經濟部中央標準局員工消費合作社印製 Β7五、發明説明（·11) 出至自動搬運車用入口交接埠104上的前進移動裝置84例 如發生故障等問題時，主電腦50亦不會感知故障而與其他 的每88同樣地將至適合的自動搬運車用入口埠88之匣子40 之搬運作業指示送至自動搬運車38上。 因此主電腦50，亦可具有由輸入機構5 4所輪入的自動搬 運車用入口埠88之每一埠的自動搬運車38記憶作業完成前 的作業數之資料區域，同時設定其值的上限值。主電腦50 在將至自動搬運車用入口埠88的搬蓮作業指示送至自動搬 運車38之際，該埠的上述資料區域之值在到達其上限值時 就會闞閉使用該埠，而考慮使用成為次候補的自動搬運車 用入口埠88。结果在沒有適合的埠時就會等待自動搬蓮車 用人口埠88之搬運作業完成。 在該棰主電腦50中，可在每一自動搬運車用入口埠88上 設定上限值。因此，主電腦50在對自動搬蓮車用入口埠88 發送搬運作業指示之際作業完成前的作業數不會超過其上 限值而發送。因而，因前進移動裝置84之故障等原因多數 的搬蓮作業指示滯留在自動搬運車38上的狀況就不會發生。 更佳者為，主電腦50在每一自動搬運車用入口埠88之各 埠上具有顯示可使用*不可使用的裝置狀況資料，該資料 亦可依作業者终端機56而變更。主電腦50在將自動搬運車 用入口埠88的搬運作業指示送至自動搬運車38之際，會核 對該裝置狀況資料而在該資料為不可使用時就關閉使用該 掸，而考盧使用成為次候補的自動搬運車用入口埠88。結 果在沒有適合的埠時就會等待不可使用的自動搬蓮車用入 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） .. (請先閱讀背面之注意事項再填寫本頁) 裝· 、-=s 經濟部中央標準局員工消費合作社印製 A7五、發明説明（1:?) 口埠88之裝置狀況資料變更成可使用。 該種主電腦50，在每一自動搬運車用入口埠88上具備有 顯示可使用·不可使用的裝置狀況資料，在自動搬運車用 入口埠88變成故障之情況等時作業者可從作業者终端機56 中將該裝置狀況資料變更成不可使用。藉此主電腦50可檢 知發生故障的自動搬運車用入口埠88，且可停止將已故障 的埠88之搬運作業指示發送至自動搬運車38上。因而，因 前進移動裝置84之故障等原因多數的搬蓮作業指示滯留在 自動搬蓮車38上的狀況就不會發生。 上述的自動搬運車38，係當從主電腦5 0接受由處理裝置 32、34至自動搬蓮車用人口埠88的搬運作業指示時會著手 於作業。更進一步*自動搬運車38會從處理裝置32、34中 取入匣子40，並朝自動搬蓮車用人口埠88置放。自動搬運 車38，係在置放匣子40之前進行確認自動搬蓮車用入口埠 88中是否有留下其先行的匣子40。若有留下匣子40時就判 斷異常事態，且立即向主電腦50發報錯誤訊息。另一方面 *先行之匣子40可發生留在自動搬運車用入口埠88上。因 此，此情況可考盧自動搬蓮車38會Μ異常事態而發報錯誤 訊息並會屢次中斷搬運作業。 因此，自動搬蓮車38，在將匣子40置放在自動搬運車用 入口埠88上的作業中，即使先行之匣子40位於該處亦不會 發報錯誤訊息而在一定時間内會等待其先行之匣子40變無 。自動搬蓮車38亦可在先行之匣子40變無時立即對位於自 動搬運車38之移載台150之搬運作業中對匣子40之自動搬 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） _ Λ κ _ (請先閱讀背面之注意事項再填寫本頁) 裝- 、1Τ A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 Μ ) 1 1 I 運 車 用 入 α 埠 88 著 手 裝 卸 作 業 0 另 外 » 白 動 搬 運 車 38即 使 1 1 | 經 m — 定 時 間 先 行 之 匣 子 40亦 不 舍 變 Arr 9 亦 即 匣 子 40亦 可 1 1 在 利 用 前 進 移 動 裝 置 84未 被 送 至 白 動 搬 運 車 用 入 口 交接 埠 請 1 1 4 104 時 判 斷 異 常 事 態 並 對 主 電 臞 50發 報 錯 誤 訊 息 〇 TO 背 ϊέ 1 1 4 該 種 白 動 搛 運 車 38 係 在 將 匣 子 40 置 放 在 齡 料 器 36之 白 之 注 T 1 1 動 搬 運 車 用 人 P 埠 88上 之 際 即 使 有 先 行 之 匣 子 40亦不 會 事 項 1 | 再 t 發 報 錯 誤 訊 息 而 在 —. 定 時 間 內 會 等 待 該 匣 子 40變 無 ，且 會 % % 本 袈 在 先 行 之 匣 子 40變 無 時 著 手 作 業 0 因 肚 9 主 電 腦 50不用 確 % 1 1 認 自 動 搬 運 車 用 入 P 埠 88之 空 位 就 可 減 少 在 處 理 装 置32 1 1 34中 發 出 退 出 要 求 的 匣 子 40之 搬 運 作 業 的 等 待 時 間 〇 1 I 習 知 之 主 電 腦 50 係 在 確 認 儲 料 器 36之 白 動 搬 蓮 車用 入 1 訂 | 0 埠 88的 空 位 之 後 將 從 處 理 裝 置 32 Λ 34 至 同 埠 的 搬 蓮作 業 1 1 指 示 送 至 白 動 搬 運 車 38上 〇 因 而 主 霣 腦 50之 可 發 送 至自 動 1 1 搬 運 車 38的 搬 運 作 業 係 被 限 制 於 該 埠 88的 數 量 〇 另 一方 面 1 1 上 述 的 主 電 臞 50 只 要 在 儲 料 器 36内 確 保 匣 子 40的收 納 V·广 I 場 所 就 會 向 白 動 搬 浬 車 38發 送 搬 運 作 業 指 示 〇 因 此 ，结 果 1 | 與 處 理 裝 置 32 Λ 34的 匣 子 台 階 172 > 182 之 數 相 當 的 多數 播 1 蓮 作 業 指 示 有 被 送 至 動 搬 蓮 車 38的 可 能 性 0 即 使 從主 電 1 1 臞 50將 多 數 的 搬 運 作 業 指 示 送 至 白 動 搬 運 車 38上 實 質上 可 1 1 作 業 者 會 受 到 g 動 搬 運 車 38之 搬 運 能 力 限 制 0 因 此 ，多 數 1 1 的 匣 子 40會 等 待 白 動 搬 蓮 車 38之 處 理 順 序 0 因 而 即使 將 1 1 | 超 過 限 度 的 多 數 作 業 指 示 送 至 g 動 搬 運 車 38上 亦 無 意義 0 1 1 另 一 方 面 g 動 搬 蓮 車 38之 可 靠 度 比 主 IS 臞 50低 * 旦在 抱 1 1 著 多 數 作 業 指 示 而 故 陣 時 會 有 要 復 舊 須 花 費 相 當 時 間的 問 __^ 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -46 - A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (4 t ) 1 1 I 題 〇 1 1 I 因 此 主 電 腦 50可 利 用 其 輸 入 櫬 構 5 4指 定 白 動 搬 運 車 38 1 1 | 之 作 業 中 的 搬 運 作 業 數 之 限 制 值 同 時 亦 可 具 有 記 憶 作 業 請 £ 1 1 閱 | 裝 置 數 的 資 料 區 域 〇 該 主 電 腦 50 係 在 向 i 動 搬 運 車 38 發 讀 背 | 面 \ 送 搬 運 作 業 指 示 之 際 在 確 認 被 記 憶 於 該 資 料 區 域 内 的 作 之 注 i I 意 1 | 業 裝 置 數 未 到 達 被 設 定 的 限 制 值 之 後 會 發 送 作 業 指 示 〇 在 事 項 1 I 作 業 装 置 數 未 到 達 限 制 值 時 t 主 電 腦 50 會 將 該 資 料 區 域 的 再 填 寫 袈 值 加 1 >之後， 當作業完成時會將該資料區域的值減1 0 又 頁 1 I ， 資 料 區 域 的 值 在 未 到 達 限 制 值 時 會 等 待 資 料 區 域 的 1 值 下 降 在 被 指 定 的 限 制 值 Μ 下 之 後 才 發送 搬 運 作 業 指 示。 1 1 該 種 主 電 腦 50 不 會 將 不 需 要 多 數 的 搬 蓮 作 業 指 示 發 送 1 訂 1 I 至 位 於 下 位 的 動 搬 運 車 38上 0 因 此 因 § 動 搬 運 車 3δ之 故 障 等 原 因 多 數 的 搬 蓮 作 業 指 示 滯 留 在 自 動 搬 運 車 控 制 器 1 1 60上 的 狀 況 就 不 會 發 生 〇 1 1 至 上 述 之 匣 子 40之 儲 料 器 36的 人 庫 控 制 方 法 中 在 作 業 1 者 將 匣 子 40入 庫 於 儲 料 器 36内 之 際 會 將 匣 子 40 置 放 在 手 1 I 動 用 入 □ 埠 116 上 並 操 作 作 為 儲 料 器 36之 一 部 分 的 操 作 面 1 | 板 121 ^ >依該操作而知道匣子40被置放在手動用入口埠1 16 1 1 I 上 的 儲 料 器 36 9 會 利 用 ID卡 讓 寫 裝 置 120 而 讓 取 被 記 憶 於 1 1 適 當 匣 子 40之 ID卡 72的 資 訊 * 並 將 該 資 料 透 過 通 信 電 嫌 58 1 1 向 主 電 腦 50報 告 〇 主 電 腦 50在 判 斷 為 無 法 收 納 匣 子 40時 f 1 | 亦 不 會 對 儲 料 器 36 發 送 任 何 的 作 業 指 示 而 會 等 待 儲 料 器 36 1 I 內 的 收 納 場 所 為 空 位 時 〇 亦 即 被 置 放 在 手 動 用 入 □ 埠 116 1 1 I 上 的 匣 子 40 會 一 直 在 該 埠 116上等待在儲料器36之收納場 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） kl 經濟部中央標隼局員工消費合作社印製 B7五、發明説明（4:,) 所中發生空位時。若作業者知道沒有收納場所不用進行該 匣子40之入庫作業就可结束。又，在手動用入口埠116和 手動用出口埠118係Μ —個埠來兼用時，由於有等待入庫 於該埠上的匣子40所Μ會發生無法進行出庫作業的狀況。 因此，主電腦50，會接受由儲料器36所報告的匣子40之 手動用入口埠116的到達報告*而搜尋在儲料器36内的匣 子40之收納場所。在無法確保收納場所時主電腦50亦可向 儲料器36聪絡其要旨*而沒有該匣子40的到達報告。另一 方面，已接受此的儲料器36，亦可透過本身的操作面板 121而將無法收納匣子40的情況向作業者提示，Μ等待作 業者之操作。看到操作面板121之顧示的作業者，會從手 動用入口埠116中取出匣子40，並操作操作面板121將取出 之情況傳至儲料器36上。已接受此的儲料器36*會判斷匣 子40已被取出，且會回到匣子40被置於手動用入口埠116 之前的狀態。 在該種主電腦50中，在無法確保被置入於手動用入口埠 116内的匣子40之收納場所時*可經由儲料器36而向作業 者傳達該項要旨。因而，就可會到將成為問題之匣子40置 入於手動用入口埠116之前的狀態，作業者可對該匣子40 進行不同的處理。又，即使在手動用入口漳116和手動用 出口埠118係以一個埠兼用時，相同的狀況，匣子40會塞 住該埠，而沒有無法進行出庫作業的情況。 上述的主電腦50，係接受來自處理裝置32、34之匣子40 的退出要求，而只要在儲料器36中有收納場所，則會對自 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公f ) - 48 ~ (請先閲讀背面之注意事項再填寫本頁) 裝' '-ο. A7 __B7__ 五、發明説明（.in) 1811瓌運車38，發送從匣子40之處理裝置32、34至88的搬運 #衆指示。又，只要在搬運目的地儲料器36之收納場所上 胃空位，則會對儲科器間搬運裝置42，發送從被收納在搬 壤邂儲料器36内的匣子40之搬運處儲料器36至搬運目的地 餘科器36的搬蓮作業指示。再者，當匣子40從儲料器36到 達手動用入口埠116的情況被報告時，只要在其儲料器36 ^收納埸所為空位則會將入庫的作業指示送至儲料器36上 °又，主電腦50，只要接受來自處理裝置32、34之匣子40 的投入要求且可收納儲料器36中可處理的匣子40則會向儲 料器36發出出庫的作業指示。在該種儲料器人庫作業控制 方法和儲料器出庫作業控制方法中，在儲料器36、自動搬 _車38或儲料器間搬蓮裝置42故障時，無顒該等装置實質 上是否無法作業主電臞50仍會將多數的搬運作業指示送至 該等裝置上。因此，並非只有故障之復舊的問題而已，尚 會有在從主電腦50發送至該等裝置的搬運作業指示之復舊 上須花費時間的問題。 經濟部中央標準局員工消費合作社印製 (讀先閲讀背面之注意事項再填寫本頁) I ί 又，在著手於從處理裝置32、34至儲料器36的匣子40之 收纳作業之際，主電腦50不持有顳示相闞之處理裝置32、 34、自動搬運車38、及儲科器36之可使用、不可使用的裝 置狀態資訊或發送前未確認。因此，由於作業開始後相闞 機器會因故陣而停止所以會造成適當匣子40之作業在中途 停止的問題原因。 又，在著手於從儲料器36至處理装置32、34的匣子40之 收纳作業之際，主電臞50不持有顧示相藺之處理裝置32、 本紙張尺度適用中國國家榡準（CNS ) A4規格（210X297公釐） -- A7 經濟部中央標準局員工消費合作社印製 B7五、發明説明（.17) 34、自動搬蓮車38、及儲料器36之可使用、不可使用的裝 置狀態資訊或發送前未確認。因此，由於作業開始後相關 機器會因故障而停止所K會造成適當匣子40之作業在中途 停止的問題原因。 再者，在進行儲料器36間之半導體晶圓匣40的搬運作業 之際，主電腦50不持有顯示相關之搬運目的地儲料器36、 搬運處儲料器36、及儲料器間搬蓮裝置42之可使用、不可 使用的裝置狀態資訊或發送前未確認。因此，由於作業開 始後相闞機器會因故障而停止所Μ會造成適當匣子40之作 業在中途停止的問題原因。 再者，在著手於來自手動用入口璋116之入庫作業和來 自手動用出口埠118之出庫作業之際，主電腦50不持有顯 示儲料器36之可使用、不可使用的裝置狀態資訊或作業指 示發送前未確認。因此，由於作業開始後儲料器36會因故 障而停止所Μ會造成逋當匣子40之作業在中途停止的問題 原因。 因此，在儲料器入庫作業控制方法及儲料器出庫作業控 制方法中，主電腦50*亦可具有從作業者終端機56中顯示 可變更的儲料器36、自動搬運車38及儲料器間搬蓮裝置42 之各自的可使用、不可使用的裝置狀況資料。該主電腦50 ，在自動將從處理裝置32、3 4至自動搬運車用入口埠88的 匣子40之搬運作業指示送至自動搬運車38之際，會確認自 動搬運車38和儲料器36之各自的裝置狀況資料為可使用之 情況並發送入庫作業指示。又，在將從搬蓮處儲料器36至 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） _ κλ _ (請先閱讀背面之注意事項再填寫本頁) 袈· 訂 A7 經濟部中央標準局員工消費合作社印製 B7五、發明説明（4H) 搬蓮目的地儲料器36的匣子40之搬運作業指示送至儲料器 間搬運裝置42之際，會確認搬連處儲料器36、儲料器間搬 運裝置42及搬運目的地儲料器36之各自的裝置狀況資料為 可使用之情況並發送入庫作業指示。在從手動用人口埠 116中將入庫之作業指示送至儲料器36之際，會確認只有 儲料器36之裝置狀況資料為可使用之情況並發送入庫作業 指示。在該等裝置裝狀況資料之確認中若連一個都不可使 用，則該主電腦50會等待其變成可使用時。又，即使與出 庫作業相關但是與入庫作業相同，主電腦50，在從儲料器 36至處理裝置32、34的搬蓮作業之際*在確認儲料器36和 自動搬運車38之各自的装置狀況資料為可使用之後，就會 對儲料器36發送至手動用出口埠118的出庫作業指示。又 ，在將手動用出口埠118之出庫作業指示送至儲料器36之 際會確認只有儲料器36之裝置狀況資料為可使用之情況並 發送出庫作業指示。 該種主電腦50，在將搬運作業指示送至儲料器36、自動 搬運車38及髂料器間搬運裝置42之際，在確認與其最终先 行之儲料器36的收納場所或收納裝置為止的搬運作業相闞 之所有的搬運裝置之裝置狀況資料為可使用之後，就將搬 運作業指示發送給該等的裝置。因此，不會發生多數搬蓮 作業指示滯留在因故障而無法使用的搬運裝置上的狀況。 又，亦不會發生在中途停止作業的情況。 在確認上述之與搬運作業相醑之所有的裝置為可使用之 後發送搬運作業指示的儲料器入庫作業控制方法，係在從 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） C1 (請先閱讀背面之注意事項再填寫本頁) 袈· A7 經濟部中央標準局負工消費合作社印製 B7五、發明説明（·1:ί) 手動用入口埠116將匣子40予Μ出庫之際，當儲料器36之 裝置狀況資料為不可使用時就會變成作業等待狀態，而有 作業者無法中止該匣子40之入庫作業的問題。 因此，主電腦50在接受由儲料器36所報告之匣子40之手 動用入口埠116的到達報告且確認儲料器36之裝置狀況資 料之際，儲料器36之裝置狀況資料為不可使用時亦可考盧 將該要旨聯絡儲料器36Μ不進行該匣子40之到達報告。另 一方面，已接受此的儲料器36，亦可透過本身的操作面板 121以顯示作業者無法收納的情況而等待作業者的操作。 看到操作面板121之顯示的作業者，會從手動用入口埠116 取出匣子40，且會操作操作面板121而將取出之情況傳至 儲料器36上。已接受此的儲料器36 *會判斷匣子40已被取 出，而回到匣子40被置入於手動用入口埠116之前的狀態。 如此在本實施形態中的主電腦50，由於儲料器36之裝置 狀況資料為不可使用所以在無法收納手動用入口埠116的 匣子40時，就可經由儲料器36而將該要旨傳至作業者。又 ，可回到將該匣子40置入於手動用入口埠116之前的狀態 。因此，作業者可對該匣子40進行不同的處理。 儲料器36之手動用入口埤116 ，係如習知所示沒必要預 先從输入機構54中將可使用的處理裝置32、34當作資料來 提供，亦可在處理裝置32、34上無翮地使用。又，該埠由 於作業者之作業性佳所Μ亦可一次置放被決定的2個匣子 40 〇 作業者在使匣子40收納在儲料器36内時，首先將匣子40 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公f ) _ ς 〇 _ (請先閱讀背面之注意事項再填寫本頁) 裝 A7 經濟部中央標準局員工消費合作社印製 B7五、發明説明（〔川） 在手動用入口埠116上置放最大2個匣子40。接著*操作作 為儲料器36之一部分的操作面板121。此時作業者無須注 意完成該等半導體晶圓匣40之處理的處理裝置32、34或進 行下一個處理的處理裝置32、3 4就可將昆子40置入於同埠 内。藉由該操作知道匣子40被置放在手動用入口埠116上 的儲料器36，會利用ID卡謓寫裝置120謓取記錄在適當匣 子40之ID卡72上的資訊，並將該資訊透過通信電鏞58向主 電腦50報告。 主電腦50如習知所示不進行該等匣子40是否可從該埠入 庫之確認，而會在確保收納場所之後就對儲料器36發送該 匣子40之入庫的作業指示。按照透過通信電纜58而送來的 該入庫作業指示，儲料器控制器64會在確保儲料器架96上 的收納場所之後著手作業。 著手於入庫作業的儲料器36，會利用儲料器起重機80而 依序將被載置於手動用入口埠116上的第一匣子40及第二 匣子40運至已被確保的儲料器架96上之收納場所中。使被 指示的作業完成之儲料器36，會對主電腦50進行作業完成 報告。依此就可完成作業者之人庫作業。 如此將可載置於儲料器36之手動用入口埠116上的匣子 40之個數設為作業者之作業性佳的2個，同時在主電腦50 中不需要在每一該埠116中設定可使用的處理裝置32、34 。藉此*至作業者之儲料器36的匣子40之入庫作業的作業 性會變佳。 因而，在每一處理裝置32、34上可使用的手動用入口璋 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝. --° ΑΊ 經濟部中央標準局員工消費合作社印製 Β7五、發明説明（:U) 116就可被決定，而在手動用入口埠116有複數個時，就 可解消因處理裝置32、34之各自的裝置能力及工作狀況而 在手動用入口埠116之使用混合狀況中發生不均等的問題。 藉此*就可Μ作業者之自由選擇來使用空的手動用入口 璋116 。上述之主電腦50，未持有關於儲料器36内之各個 匣子40之收納場所的資訊。因此使儲科器控制器64負責該 管理。進而基於預先從輸入機構5 4所提供的儲料器36之最 大收納匣子數，將已出庫的匣子40之數加在儲科器容量上 ，及將已入庫的匣子40之數從儲料器容量中減去，藉Μ管 理收納場所。Μ下係說明管理其他的收納場所之方法。主 電腦50，係如圖7Α、7Β所示從輪入機構54提供關於預先取 名的儲料器36之收納場所的資訊。同時主電腦50從儲料器 36完成匣子40之收納作業時接受收納場所的報告。藉此主 電腦50，在儲料器起重機80從儲料器架96取出適當匣子40 時基於由儲料器控制器64所報告的資訊，就可使收納有該 匣子40之收納場所中發生空位的情況。 主電腦50，亦可更進一步使一個處理裝置32、3 4從輪入 機構54中指定複數個可使用的自動搬運車用出口埠86。又 ，此時亦可配合設定使用順序。例如圖1所示的情況，處 理裝置32、34可使用2個自動搬運車用出口埠86。處理裝 置32、34係透過通信電嫌58將匣子40之投人要求發送給主 電腦50。主電腦50雖從有複數個自動搬蓮車用出口埠86中 已於前次使用但是在沒有位於下次使用顒序的自動搬蓮車 用出口埠86或在沒有位於下次使用順序的自動搬運車用出 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） c Λ HI -- - 4 - I- JJ— —II· In (請先閱讀背面之注意事項再填寫本頁) A7 A7 經濟部中央標準局員工消費合作社印製 B7 五、發明説明（U) 口埠86時，會決定將第一個自動搬運車用出口埠86當作使 用於該匣子40之搬蓮作業者。 在該種的儲料器出庫作業控制方法中，可對1台處理裝 置32、34，分派複數個自動搬運車用出口埠86。按照預先 被決定的順序就可大致均等地使用該等埠86。藉此就可解 消習知K來的下述問題。 亦即，在每一處理裝置32、34中可使用的自動搬運車用 出口埠86被預先決定為一個，而自動搬蓮車用出口埠86有 複數個的情況，雖然因處理裝置32、34之各自的處理能力 及工作狀況而在自動搬運車用出口埠86之使用混合狀況中 有發生不均等的問題，但是該問題可被解消，即使處理裝 置32、34之各自的處理能力及工作狀況有所不同，亦可對 各自的處理裝置32、34大致均等地使用複數個自動搬運車 用出口埠86且在自動搬浬車用出口埠86之使用混合狀況中 發生不均等的問題亦會變無。 較佳者為，主電腦50，可更進一步對一個處理裝置32、 34從輸入機構54中指定複數個可使用的自動搬蓮車用出口 埠86，同時主電腦50在其每一各埠86上向儲料器36發出的 出庫作業指示之中，亦可具有預先記憶未完成之作業指示 之數的資料區域。該主電腦50在接受來自處理裝置32、34 之E子的投入要求時*該處理裝置32、34會搜尋可使用的 自動搬運車用出口埠86。結果在存有複數個可使用的自動 搬運車用出口埠86時，主電腦50會比較前述之各自的埠之 資料區域的值，而選擇該值為較小之一方的自動搬運車用 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29"/公釐） c c (請先閲讀背面之注意事項再填寫本f ) 裝 、-° A7 A7 經濟部中央標準局員工消費合作社印製 B7 五、發明説明（ϋ) 出口埠86。將關於被選擇之自動搬運車用出口埠86的資料 區域之值加1且將搬運作業指示發送給自動搬運車38。又 ，當作業完成時就將該值減1。另外，在該作業完成前的 出庫作業之數有複數個相同者時，主電腦50就會任意從埠 86之中選擇一個埠86，並將搬蓮作業指示發送給自動搬運 車38。 在該種的儲料器出庫作業控制方法中，可將複數個自動 搬運車用出口埵86分派在一個處理裝置32、34中。又，將 出庫作業指示發送給新的儲料器36Μ便可使埠86之作業完 成前的作業數變成均等。因此，就可大致均等地使用埠86。 因而，在每一處理裝置32、34中可使用的自動搬蓮車用 出口埠86被預先決定為一個，而自動搬運車用出口埠86有 複數個的情況，就可解消因處理裝置32、34之各自的處理 能力及工作狀況而在自動搬運車用出口埠86之使用混合狀 況中發生不均等的問題。 藉此，即使處理裝置32、34之各自的處理能力及工作狀 況有所不同，亦可對各自的處理裝置32、34大致均等地使 用複數個自動搬運車用出口埠86，因而，在自動搬運車用 出口埠86之使用混合狀況中發生不均等的問題會變無。在 上述之儲料器出庫作業控制方法中，在有來自處理裝置32 、34之匣子40的投入要求時，在儲料器36上只要有一個可 處理的匣子40，主電腦50，就可從具有複數個的自動搬運 車用出口埠86中均等地決定一個璋86，且將出庫作業指示 送至儲料器36上。因此，即使發生從自動搬運車用出口交 本紙張尺度適用中國國家標準（CNS ) Α4規格（2丨0X297公釐） _ r β (請先閱讀背面之注意事項再填寫本頁)、 -IT This paper size applies to Chinese National Standard (CNS) A4 (210x 297). 30 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the invention (information on the distribution of each of Ui 32 and 34. Device 32, The host computer 50 for the entrance of the lotus car for the 34th car must be on the car 38. Received from port 88 on the controller 60, 172, 182 of the host car. When the device 60 will be assigned a line 0 A7 B7 is assigned an automatic handling The entrance 璋 88 for vehicles should be provided to the host computer 50 in advance. At this time, for example, even if it is an M2 box unit to process the exit request, there is only one place for the box 40 on the automatic port 88. Therefore, one box unit Carrying instructions are automatically sent to the automatic carrying computer 50 in one box. The automatic carrying instructions are the same as in the prior art. The automatic handling vehicle with the steps of the boxes of the processing devices 32 and 34 and the appropriate boxes 40 to the stocker 36 is instructed. When all the operations are completed, the automatic truck control industry completion report is sent to the host computer 50 through the communication cable 58 to receive the operation completion report from the automatic truck 38 to the main stocker controller 6 4 Carry out the storage operation instruction from the appropriate port 88 for the cassette carrier of the stocker 36. According to the storage work instruction transmitted through the storage device controller 64, the storage device controller 64 will start after the storage place on the rack 96. However, it is impossible to ensure the storage location. Why this is caused by the fact that there will be a vacant space of 36 before the transportation operation using the automatic transport vehicle 38 is started. The same storage habits as the storage operation that started without any problems will automatically be buried. The storage area secured by the stocker rack 96 on the entrance port 88 for the vehicle is the same as the direction of the box 40 used in the entrance port 88 for the automatic transport vehicle and the box 40 on the passenger transfer port 104 The direction is the same, so the paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm). The computer 50 and the automatic communication cable of the system 40. 58 Make sure that the stocker is the main battery when it is abnormal. 50 Confirm the stocker material The device 36 is different from the box 40, and it moves n III HI 1 n ^ V V .. s-, 1 (Please read the precautions on the back before filling this page) 31 Ministry of Economic Affairs Printed by the Consumer Standards Cooperative of the Central Bureau of Standards Ί B7 V. Description of Invention (2) The device 84 does not need to rotate the box 40 90 degrees in the middle of a moving operation. When the operation is completed, the stocker controller 64 will communicate with the communication device 58 Report the operation completion to the host computer 50. After processing by the processing devices 32 and 34 on the M, the E 40 will be stored in the stocker 36. Then, the box 40 will be transferred from the stocker 36 to the transport destination. The method (2) in the stocker 36 is described by adding K. When the processed boxes 40 in the processing devices 32 and 34 are stored in the stocker 36, the host computer 50 will use the stocker 36 as a handling place The stocker 36 determines from the secondary processing devices 32 and 34 of the box 40 that the destination stocker 36 is appropriately moved. The host computer 50 then subtracts the number of boxes from the box capacity of the ground stocker 36 and uses the inter-stocker conveying device 42 to move it to the carrying operation. When the subtracted result becomes a negative number, the host computer 50 determines that it cannot be stored and does not move it to the transportation operation using the automatic truck 38. The host computer 50 * moved to the transportation operation sends the transportation operation instruction to the inter-stocker moving device 42 through the communication antenna 58 as in the conventional case. The transport destination set in accordance with this instruction is not the storage port 98 for the conventional transporter between the stockers, but the storage place of the stocker rack 96 of the stocker 36 in the destination. Upon receiving the instruction for the transportation operation, the controller 66 for the transfer device between the stockers will pass through the communication cable 58 to the stocker 36 at the transfer place, and will entrust the storage device port 98 from the storage place of the bin box 40 to the transfer device port between the stockers. Mobile job. The entrusted stocker 36 performs a predetermined operation on the bin 40 using the stocker crane 80M, and reports a work completion report to the stocker-to-stock container handling device controller 66. Upon receiving the completion report of the operation, the inter-stocker conveying device controller 66 moves the empty cart 70 to the platform corresponding to the stocker 36 at the moving position. This paper size applies to China National Standard (CNS) Α4 specification (210X297 mm) ^ ^ Packing -------- Order ------ \ (Please read the precautions on the back before filling this page) -32- Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (: Sichuan) When the movement is completed, the controller 66 of the storage room conveyer will again entrust the storage room 36 of the moving area to the storage room The appropriate box 40 on the port 98 of the transfer device transfers the appropriate empty trolley 162 to the appropriate empty trolley 162. The entrusted stocker 36 uses the transfer machine 82 to transfer the appropriate cassette 40, and reports the completion of the operation to the inter-stocker conveyer controller 66. The inter-stocker conveyance device controller 66 that has received the report of completion of the operation moves the full cart to the platform corresponding to the stocker 36 at the destination. The moved inter-stocker conveyer controller 66 will communicate to the stocker controller 64 through the communication cable 58 and request the box 40 on the cart 162 to be stored in the stocker rack through the inter-stocker conveyer port 9δ. Within 96. The entrusted stocker controller 64 secures the storage space of the magazine 40 on the stocker rack 96. The stocker controller 64 will drive the transfer machine 82 to move the box 40 to the port 98 for the handling device between the stockers * and then use the stocker crane 80 to move the box 40 from the same port toward the stocker rack 96 to ensure The storage place is M storage. The stocker controller 64 cannot secure the storage place when the magazine 40 is stored only in the abnormal state. The reason for this is because the host computer 50 confirms the vacant position of the storage destination stocker 36 before starting the lotus transfer operation. The stocker controller 64 that has completed the work reports the summary to the stocker controller 66. The inter-stocker transfer device controller 66 that has received this report the job completion report to the host computer 50. The moving operation of the cassette 40 from the stocker 36 at the moving place to the stocker 36 at the moving destination can be completed on M. Next, the operation (3) from the manual inlet port 116 to the storage of the reservoir 36 will be described with M. When the operator (not shown) puts the box 40 into the stocker 36, the box 40 is first placed on the manual inlet port 116 and then operated as the paper standard. The Chinese national standard (CNS) Α4 specification (210X 297 mm) 1 3 3--^-ττ ---- 'Installation ------ Order ------ \ (Please read the notes on the back before filling this page) A7 Β7 Economy Printed by the Consumer Standards Cooperative of the Ministry of Standards and Technology Bureau of the People's Republic of China 5. The invention panel (: U) part of the stocker 36 is a production panel 121. According to this operation, it is learned that the box 40 is placed on the stocker 36 on the manual inlet port 116, and will use the ID card writing device 120 _ to take the information recorded on the ID card 72 of the Dang box 40 'and will The data is reported to the host computer 50 through the communication cable 58. Based on this, the host computer 50 will learn about the situation of the operator's box 40, and subtract the number of boxes in the human storage from the box capacity of the stocker 36 & Connected. However, when the result of the subtraction becomes negative and the sink 40 cannot be stored in the stocker 36, it will not be moved to the human library operation. The host computer 50 moved to the warehouse operation will communicate with the telecommunication manager 58 as usual, and send the warehouse operation instruction to the stocker controller 64. According to the sent-in operation instruction * stocker controller 64, the stocker rack 96 secures the storage space of the E-subsidiary 40 on the stocker rack 96, and then starts work. The stocker controller 64 cannot secure a storage place when the magazine 40 is stored only when it is abnormal. The reason why * b 'is because the host computer 50 confirms the vacant position of the stocker 36 at the destination before starting the carrying operation. Start with the stocker 36 instructed to enter the warehouse, and use the stocker crane 80 to send the box 40 on the manual inlet port 116 to the storage place on the secured stocker rack 96 in the same way as the conventional one. The job completion stocker 36 reports a job completion to the host computer 50. In this way, the operator's warehousing operation is completed. In this way, the storage container storage operation control method in the semiconductor crystal box moving device 30 will make the maximum number of the storage containers 40 that can hold each of the storage devices 36 on the host computer 50 in advance as the storage device capacity. It is provided from the input mechanism 54. When storing the box, it is subtracted from the capacity of the stocker by the number of ®M -r .-- ^ ------- (Please read the note on the back first Please fill in this page again for this matter) This paper size applies to Chinese national standards (CNS> A4 size (210X297mm) 34 A7 B7 Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (: ►) 1 1 1 Place for storage Therefore, it is not necessary to move the stocker 36 a to move the 1 1 1 car into the P port 88 and the vacant position of the port 98 for the handling device between the stockers as the condition 1 1 to perform the processing from the processing device 32 Λ 34 to The storage operation and storage of the stocker 36 must be m 1 1 的 Carrying work between the machines 0 Back 1 Therefore, the box 40 that precedes the entrance port 88 for the white moving van becomes empty Note: 1 Before the white moving truck 38 will start to handle the incidents in the processing devices 32, 34 1 I and 1 V of the box 40, so it can be eliminated in the box 40 after processing. The waiting time of the moving operation of the device 32 34 becomes longer and the working efficiency of the white moving lotus car 1 1 38 does not show the expected capacity for moving the lotus no matter whether it is low or not 1 1 I question ° 1 1 From the processing device 32 34 to The first moving operation of the box 40 of the stocker 36 is reserved for the white moving van of the stocker 36, and the empty space of the port P 88 is used as the condition 1 | to confirm the adequacy of the storage place of the stocker 36 〇Therefore * 1 I After the completion of the lotus transfer operation for the population port 8 of the dialogue van, the storage operation instructions of the feeder 36 can be taken out from the host computer 50 because there is no empty 1 storage. The place can solve the problem of waiting for a long time on the same port. 0 Further 9 The box 40 that was previously moved on the port 98 for the transporter between the stockers has disappeared. The moving operation of the rear m box 40 in the stocker II 36 at the m position is therefore possible. Therefore »the waiting time for the moving operation of the stocker 36 at the moving position of the rear mine box 1 1 can be eliminated and the storage of the material 1 1 No matter whether the working efficiency of the lotus transfer device 42 is low or not, the scheduled capacity cannot be achieved. 1 1 The problem of the ability to transfer lotus. 1 I Furthermore, the container 1 from the storage place 36 to the ground storage case 36 | The lotus removal operation is only to move the lotus between the storage containers of the destination storage container 36 of the lotus 1 1 This paper scale is applicable to China National Standard (CNS) A4 specifications (210X297 mm) ar -35 A7 B7 Central Bureau of Standards, Ministry of Economic Affairs Printed by Employee Consumer Cooperatives V. Invention Description (') 1 1 The vacant position of the port 98 for the device is used as a condition to confirm the storage position of the stocker 36 1 1 1 The adequacy of the storage position 0 1 Therefore, the port 98 1 for the transport device between the stockers is completed even after the transfer operation is completed. The storage operation instructions of the device 36 can be read from the host computer 50 first. Since there is no empty storage place, the problem of waiting for a long time on the same port of reading back 1 can also be resolved. Note to Direction: | I intended 1 I In addition, the box 40 placed on the manual access port 116 is stored even if it is stored 1 I 4 1 »The storage operation instruction of the feeder 36 comes out of the host computer 50 because there is no available 4 storage space for this book. Μ can also solve the problem of waiting for a long time on the same port. 0 page N ^ 1 I This way, it can be used in Bai Donglian lotus car □ port 88 or storage device 1 1 I 堉 98. As long as the box 40 in the row has a storage place for the subsequent 1 1 box 40 in the stocker 36, it is possible to move from the processing device 32 34 to the white moving 1 and move the lotus to the inlet port 88 of the order car or from the transfer place. The transfer operation of the stocker 36 to the ground stocker 36 of the 100 | | box 40 does not need to wait for 0 in the processing device 32 1 I, 34 or the stocker 36 and arrive at the automatic lotus car. □ Port 88 1 1 I The box on the port for moving the lotus device between the storage tanks or the manual access port 116 [40 As it can be stored on the storage rack 96 in the storage tank 36, there is no waiting time for the storage space M 1 The effect of time. I 1 Secondly, the method of controlling the unloading from the semiconductor wafer 1 in the semiconductor wafer cassette handling device 30 and the stocker 36 of the cassette 40 can be roughly divided into the following three types. Pays 38 to the white moving van through the port 86 for the automatic van 1 1 work; (5) the operation M and (6) paid by port 98 to the stocker conveyance device 42 in the stocker 36 at the moving place via port 98 and (6) by 1 | manual Exit 0 Port 118 to the operator ’s work 〇1 I First, I will use the automatic port car 86 to move the port 86 Long moving van 38 to pay 1 1 This paper is again applicable to China National Standard (CNS) Ad specifications (210X 297) -36-Printed A7 B7 by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (: U) The operation of the box 40 (4) plus M description. It is the same as the conventional method. When the slave processing devices 32 and 34 send the cassette input request to the host computer 50 through the communication cable 58, the host computer 50 searches the stocker 36 for the unprocessable cassette 40 and moves to the warehouse operation. The host computer 50 * that has been moved to the warehouse operation is sent to the stocker 36 through the communication cable 58. Each of the processing devices 32, 34 is pre-determined on a stocker rack 96 located at the exit port 86 of the automatic truck. Out of storage instructions for the box 40. After receiving the stocker 36, the stocker crane 80 will be used to transport the appropriate box 40 to the automatic transfer vehicle outlet transfer port 100, and then the forward moving device 84 is driven to transfer the box on the automatic transfer vehicle outlet transfer port 100. 40 is forwarded to the exit port 86 for the automatic guided vehicle. It is the same as that described in the pre-crushing operation of the entrance port 88 for the automatic transport vehicle and the entrance transfer port 104 for the automatic transport vehicle. In the middle of the operation, it is not necessary for the forward movement device 84 to rotate the box 40 in the conventional manner. 90 degrees. According to this, the warehouse operation of the exit 86 for the automatic truck will be completed, and the stocker 36 will report the completion of the operation to the host computer 50. In the series of operations of the stocker 36, the stocker controller 64 is used when the stocker crane 80 removes the appropriate box 40 from the storage place of the stocker rack 96, and communicates this information through communication. Electric suspect 58 reported to host computer 50. The host computer 50 that accepts this will add the stocker capacity (box storage number) of the stocker 36 obtained next time when carrying out the storage operation. The box 40 delivered to the exit port δ6 for the automatic transport vehicle is transported to the processing devices 32 and 34 for which the input request is requested by the automatic transport vehicle 38 as in the conventional case. Next, the operation of delivering the box 40 to the inter-stock transfer device 42 through the port 9δ of the inter-stock transfer device in the stocker 36 at the sender (5) plus M is described. This paper applies the Chinese National Standard (CNS) Α4. Specifications (210 X297 mm) -37-(Please read the notes on the back before filling out this page) Installation-、 \-β Printed A7 by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (3Γ;). The main battery 50, which receives the completion report of the storage operation from the stocker 36, will determine the appropriate storage place of the stocker 36 from the secondary processing devices 32 and 34 of the box 40, and pass through the stocker conveying device 42. The communication cable 58 sends instructions for moving the lotus between the stockers. The controller 66 for the transfer device between the stockers that has received the instructions for the transfer operation will first pass through the communication cable 58 to the stocker 36 at the transfer place and entrust it to the stocker room from the storage room of the Dang E sub 40. The transport device is used for moving the cymbal 98. The stocker 36 requested to operate uses the stocker crane 80M to move the winding E 40, and reports the work completion to the controller 66 of the stocker transfer device. During the operation of the tier of stockers 36, the stocker controller 64 is taken out by the stocker crane 80 from the storage place of the stocker rack 96. When the box 40 is used, the information will be passed through. Inter-loader controller 66_ report from host computer 50. Or report directly to the main power unit 50 through the communication cable 58. The host computer 50 that accepts this will add the g storage number of the stocker 36 obtained by subtracting the number of boxes next time when the storage operation is performed. The box 40 that has been delivered to the port 98 of the lotus transfer device between the hoppers is transported from the lotus container 40 to the transfer destination hopper 36 as described above (2). The lotus destination stocker 36. Finally, the operation (6) plus M, which is to pay the operator 40 through the manual outlet port 118, is described. The remaining material 36 and the processing which are not provided in the automatic truck 38 are described. The device 32, 34 plus M is considered. When the processing devices 32, 34 make a box input request to the main battery 50 through the communication battery 58, the main battery 50 searches the stocker 36 for a box 40 that can be processed. When there is a box 40, the main battery 50 will be moved to the warehouse. The k-sheet scale has been moved to the warehouse. The national standard (CNS) Α4 specification (2 丨 0X297 mm) is used. '' 38 ^ ---- Γ ----- Refer to ----- 1T ------ ^ ί Jing first read the notes on the back before filling out this page; 1 A7 printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs B7__5, Description of the invention (: U :) The main sleeper 50 of the operation is sent to the stocker 36 through the communication lanthanum 58 in the same way as the exit 86 of the automatic truck for each processing device 32, 34. The storage operation instruction of the box 40 on the stocker rack 96 of the manual outlet port 118 is determined in advance. When accepting the storage container 36, the stocker crane 80 will use the stocker crane 80 to transfer the box 40 to the manual. Use the outlet port 118 and the operation panel 121 of the stocker 36 to allow manual removal of the winding box 40 on the outlet port 118. The operator who sees this, takes it out from the manual outlet port 118 When the box 40 is operated, the operation panel 121 notifies the stocker 36 of the completion of the removal operation. The stocker 36 accepting this will judge the completion of the storage operation and report its completion to the host computer 50 through the communication cable 58. In In the operation of these stockers 36, for the stocker controller 64, when the stocker crane 80 takes out the appropriate box 40 from the storage place of the stocker rack 96, it will communicate to the host computer through the communication power 58. This information is reported by 50. The host computer 50 that has accepted this will add the box storage number of the reservoir 36 obtained by subtracting the number of boxes next time when carrying out the warehousing operation. Because the operator who took out the box 40 did not know to ask for input Required place The devices 32 and 34 will broadcast 56 toward the operator terminal of the main power unit 50, investigate the information, and transport them toward the processing box steps 172 and 182 of the processing devices 32 and 34. The storage operation of this type of stocker In the control method, the host computer 50 subtracts the number of boxes when the box 40 is stored in the library 36, and the stocker crane 80 removes the appropriate box 40 from the stocker rack 96 when the box 40 is removed. According to the information reported by the medical controller 64, the number of g children is added to the number of storage in the cassette. By this, the host computer 50 will cause vacancies to occur in the storage place. The paper size applies the Chinese National Standard (CNS) A4 Specifications (210X297 mm) ~ 3 9 1 MV V -------- Order ------ ^ (Please read the notes on the back before filling this page) A7 B7 Employees of the Central Standards Bureau of the Ministry of Economic Affairs Printed by the consumer cooperative V. Description of the invention (, 1;) 1 1 1 〇 Therefore, the host computer 50 will be more than the inlet port 1 1 | 88 of the commercial truck for the stocker 36 and the port 98 for the handling device between the stocker Of vacancies as triggers faster1 I can quickly start the transfer operation from the processing device VI, 34 to the stocker 36 or please read 1 1 I The transfer work between the stocker 36 〇 read back 1 so at the entrance port of Baidong lotus car The box 40 that precedes 88 is gone: 1 Before the white moving lotus truck 38 will depend on the processing items 32 > 34 that occurred in the processing device 1 1 and 1 * After the white box moving 38 of the box 40 is untreated However, the handling operation is started. Therefore, it is possible to remove the hard copy and install it in the processing device 32 of the processing box 40. 34 The waiting time for the handling operation of page 34 becomes longer *, and the working efficiency of Baidong lotus car 38 cannot be displayed whether it is low or not 1 1 Questions about the planned carrying capacity 〇 1 1 In addition, the inter-stocker transfer device 42 is placed on the port 98 of the inter-stocker transfer device. The box 40 that has been ordered in advance will be moved to the stocker 36 at the transfer location. The post-mine 1 I box 40 is moved. Therefore, the waiting time for the transfer operation of the stocker 36 at the post 1 I of the post-mine E 40 can be eliminated, and the storage time between the stockers 36 can be increased. No matter whether the working efficiency of 42 is still low or not, the scheduled conveying capacity cannot be exerted. 1 By this, when a physical vacancy occurs on the stocker rack 96 of the stocker 36, the processing device 32'34 to the movement will be immediately started. The truck is used to move the P port 88 1 1 I, and the moving operation is started from the storage place storage 36 to the hundreds of ground storage 1 1. The 36 operation can be shortened in the processing device 32 34 or the moving 1 1 The effect of the waiting time of the box 40 of the stocker 36 is transported. 0 1 1 The above-mentioned host computer 50 does not hold the information of the storage location of each box 40 1 I stored in the stocker 36 and is controlled by the stocker. On 64 Management 0 1 | So the maximum storage of the feeder 36 provided by the input mechanism 54 1 1 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -40 A7 Staff consumption of the Central Bureau of Standards, Ministry of Economic Affairs Cooperative prints B7 5. Invention Description US) The number of boxes is used as the capacity of the stocker and the storage place is managed by subtracting the number M used therefrom as the number. The following describes how to manage other storage locations. As shown in FIGS. 7A and 7B, the host computer 50 provides information on the storage place of the pre-named stocker 36 from the input mechanism 54, and according to its name, when the storage operation of the box 40 is completed from the stocker 36 Receive reports from storage locations. With the host computer 50, it is possible to know that there is no cassette 40 in the storage place and there is a space in the storage place of the stocker 36. The host computer 50 does not indicate the storage location of the magazine 40 to the stocker 36 during the storage operation. Therefore, the storage location is finally determined by the stocker controller 64. Therefore, the host computer 50 will determine the storage location of the stocker 36 by itself before entering the storage operation, and the state indicated to the stocker controller 64 will also be considered. At this time, the stocker controller 64 * stores an appropriate cassette 40 in a storage place indicated by the host computer 50 without determining a storage place by itself. In this way, the host computer 50 knows that there is no cassette 40 in the storage place and there is a space in the storage place of the stocker 36. The host computer 50 is capable of designating a plurality of usable automatic transport vehicle inlet ports 88 from the input mechanism 54 for one processing device 32, 34. At this time, you can also set the order of use. For example, in the case shown in FIG. 1, the number of automatic truck inlets 璋 88 corresponding to one of the processing units 32 and 34 is set to two * and the use sequence is set. When the withdrawal request of the cartridge 40 is reported from the processing device 32 to the host computer 50 through the communication cable 58, the host computer 50 uses the entrance port 88 for the automatic transport vehicle even though it has been used the previous time but is used next. Sequential entrance port for automatic trucks 88 or the next use sequence will automatically move the first use sequence. The paper size applies the Chinese National Standard (CNS) Α4 size (210X297 mm) _ χ 1 _ I—--· .-1 「. · -1 I! — HI ml 1. I nn *--I -I. ^ 1 ^ 1 (Please read the notes on the back before filling this page) A7 Ministry of Economy Printed by Central Standards Bureau Consumer Co-operative Cooperative B7 V. Invention Description ϋ: .1) The vehicle inlet port 88 is determined as the user of the handling operation of its box 40. In this kind of storage container storage operation control method, By arranging the plurality of automatic transport vehicle inlets 88 in one processing device 32 and 34 and assigning them in a predetermined sequence, the automatic transport vehicle inlet ports 88 can be used approximately equally. Therefore * automatic handling available in each processing device 32, 34 Since the entrance port 88 is determined to be one in advance, if there are a plurality of entrance ports 88 for the automatic guided vehicle, the entrance port 88 for the automatic guided vehicle can be eliminated according to the processing capacity and working conditions of the processing devices 32 and 34. An uneven problem occurs in the mixed use condition of port 88. By this means, even if the respective processing capabilities and working conditions of the processing devices 32 and 34 are different, it is possible to use a plurality of automatics for the respective processing devices 32 and 34, approximately equally. The entrance port 88 for the van has no problem that inequality occurs in the mixed condition of the use of the entrance port 88 for the automatic truck. More preferably, the host computer 50 can input a processing device 32, 34 from an input mechanism A plurality of usable entrance ports 88 for automatic transfer vehicles are designated in 54. At the same time, among each of the port 88, the lotus transfer operation instructions issued to the automatic transfer vehicle 38 may also have pre-memory operations for unfinished transfer operations. The data area of the indicated number. When the host computer 50 accepts the withdrawal request from the semiconductor wafer cassette 40 of the processing devices 32 and 34, it searches for an automatic lotus car that can use the processing devices 32 and 34. Port 88. As a result, when there are a plurality of usable entrance ports 88 for the automatic truck, the host computer 50 compares the number of operation instructions stored in the data area of the respective entrance port 88 for the automatic truck. , And choose the smaller number of automatic port entrance port 88. The main paper size is applicable to the Chinese National Standard (CNS) A4 specification (2! 0 × 297 mm) _-n ^^ 1 Inf ^^^^ 1 i ^^^^ 1 n ^ nn ^ f an V. < (Please read the notes on the back before filling out this page) A7 B7 printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (4 Π) Brain 50, will be stored in the port for the automatic port of the port The value of the data area of 88 is increased by 1, and the transportation operation instruction is sent to the automatic transportation vehicle 38. When the operation is completed, the value of the data area is decreased by 1. In addition, when there are a plurality of the same number of port operations before the completion of the operation, the host computer 50 may arbitrarily select one of the ports 88 from among them. In this method for controlling the storage operation of the stocker, a plurality of inlet ports 88 for automatic transfer vehicles can be assigned to one processing device 32, 34. In addition, it is possible to carry out the transportation operation instruction to the new automatic truck 38 so that the number of operations before the completion of the respective operations can be equalized. Therefore, the use frequency of the port 88 can be used approximately equally. Therefore, since the number of inlet ports 88 for automatic transfer vehicles that can be used in each of the processing devices 32 and 34 is determined in advance, when there are a plurality of inlet ports 88 for automatic transfer vehicles, the processing device can be used according to the processing device. The respective processing capabilities and working conditions of 32 and 34 eliminate the problem of inequality in the mixed use of the inlet port 88 for the automatic guided vehicle. Thereby, even if the processing capabilities and working conditions of the processing apparatuses 32 and 34 are different, it is possible to use the plurality of population ports 88 for the automatic transfer of lotuses approximately equally for the respective processing apparatuses 32 and 34. Therefore, unequal problems do not occur in the mixed use situation of the inlet port 88 for the automatic guided vehicle. As long as the host computer 50 mentioned above has a withdrawal request from the cassette 40 of the processing devices 32 and 34 and there is a storage place on the appropriate stocker 36, one of the plurality of automatic truck inlet ports 88 will be selected automatically. The entrance port 88M for the lotus transfer car equalizes the work and sends the lotus transfer operation instruction to the automatic transfer truck 38. Therefore, even if the box 40 of the entrance port 88 for the automatic transport vehicle is sent to this paper, the Chinese standard (CNS) Α4 specification (210X 297 mm) is applicable. _ / Ι 9 _ mn un-mt ^ i I (Please read the back first Note: Please fill in this page again.) ΑΊ Printed by the Consumers ’Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. B7. V. Description of the invention (· 11) When the forward moving device 84 exits to the entrance transfer port 104 for automatic trucks. Also, the host computer 50 does not perceive the failure, and sends the transportation operation instruction to the automatic transport vehicle 38 to the appropriate automatic transport vehicle inlet port 88 of the box 40 like every other 88. Therefore, the host computer 50 may also have a data area for storing the number of operations before the completion of the operation of the automatic transport vehicle 38 of each of the automatic transport vehicle inlet ports 88 rotated by the input mechanism 54, and set the value of the same. Limit. When the host computer 50 sends the instructions for moving the lotus to the automatic truck entrance port 88 to the automatic truck 38, when the value of the above-mentioned data area of the port reaches its upper limit value, the port will be closed and used. It is considered to use an inlet port 88 for a self-propelled vehicle as a secondary candidate. As a result, when there is no suitable port, it will wait for the completion of the moving operation of the port 88 for the automatic lotus car. In the main computer 50, an upper limit value can be set for each of the automatic truck inlet ports 88. Therefore, when the host computer 50 transmits the transportation operation instruction to the automatic port vehicle port 88, the number of operations before the operation is completed does not exceed the upper limit value and is transmitted. Therefore, the situation where most of the moving operation instructions are left on the automatic transport vehicle 38 due to the failure of the forward moving device 84 and the like does not occur. More preferably, the host computer 50 has data indicating the status of the devices that can be used * not available on each port of the entrance port 88 for an automatic truck, and this data can also be changed according to the operator terminal 56. When the host computer 50 sends the transportation operation instruction of the automatic truck entrance port 88 to the automatic truck 38, the host computer 50 checks the status information of the device, and when the data is unavailable, it shuts down and uses the card. Inlet port 88 for the secondary standby automatic truck. As a result, when there is no suitable port, it will wait for the unusable automatic lotus car to be used. The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) .. (Please read the precautions on the back before filling in this Page), · =,-= s Printed by the Consumer Standards Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs, A7. V. Invention Description (1 :?) The device status data of port 88 has been changed to use. This type of host computer 50 is provided with information on the status of the available and unavailable devices at each of the entrance ports 88 for automatic trucks. When the entrance port 88 for automatic trucks becomes faulty, etc. The terminal status data is changed to unusable in the terminal 56. In this way, the host computer 50 can detect the failure of the entrance port 88 for the automatic truck, and can stop sending the transportation operation instruction of the failed port 88 to the automatic truck 38. Therefore, the situation where most of the instructions for moving the lotus are left on the automatic lotus car 38 due to the failure of the forward moving device 84 or the like will not occur. The above-mentioned automatic transport vehicle 38 is started when receiving a transportation operation instruction from the processing device 32, 34 to the population port 88 for the automatic transport vehicle from the host computer 50. Furthermore * the automatic truck 38 takes the cassette 40 from the processing devices 32 and 34 and places it in the population port 88 for the automatic truck. The automatic transport vehicle 38 is checked before the cassette 40 is placed, and it is checked whether there is any previous cassette 40 left in the entrance port 88 for the automatic transport vehicle. If the box 40 is left, an abnormal situation is judged, and an error message is immediately sent to the host computer 50. On the other hand * The leading box 40 may be left on the entrance port 88 for the automatic truck. Therefore, in this case, the Kaolu automatic moving lotus car 38 will report an error message and will interrupt the transportation operation repeatedly. Therefore, in the process of placing the box 40 on the entrance port 88 for the automatic truck in the automatic transfer of the lotus car 38, even if the preceding box 40 is located there, it will not report an error message and will wait for its advance in a certain period of time. The box 40 becomes empty. The automatic lotus car 38 can also be used to automatically move the box 40 to the paper box 40 during the handling operation of the transfer table 150 located on the automatic truck 38 when the preceding box 40 is gone. The Chinese national standard (CNS) Α4 specification ( 210 × 297 mm) _ Λ κ _ (Please read the precautions on the back before filling this page) Pack-， 1T A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention) 1 1 I Used for transportation α bu 88 Loading and unloading operation 0 In addition »White moving van 38 even if 1 1 | Through m — box 40 that advances at a fixed time will not change Arr 9 That box 40 can also be used 1 1 To the entrance transfer port for white moving vans, please judge the abnormal situation at 1 1 4 104 and send an error message to the main battery 50. TO 1 1 4 This white moving van 38 is in the box 40 The white note T 1 1 of the aging machine 36 When the moving van is used on the port P 88, even if there is a leading box 40, Event 1 | Then t send an error message and wait for —. Within a certain period of time, it will wait for the box 40 to become empty, and will%% Ben started work when the previous box 40 becomes empty 0 because of the belly 9 host computer 50 not sure% 1 1 Confirming that the automatic truck is used in the empty space of P port 88, the waiting time for the handling operation of the box 40 that issued the withdrawal request in the processing device 32 1 1 34 can be reduced. 0 I The known master computer 50 is used to confirm the stocker. 36 of the white moving lotus car 1 order | 0 The empty seat of port 88 will be sent from the processing device 32 Λ 34 to the same port to move the lotus 1 1 instructions to the white moving van 38. Therefore, the main brain 50 The number of transport operations that can be sent to the automatic 1 1 truck 38 is limited to the number of the port 88. On the other hand, 1 1 the above-mentioned main power supply 50, as long as the storage of the box 40 in the stocker 36 is ensured. It will send a move to the Baidong moving car 38 Operation instruction 0 Therefore, the result 1 | Most of the number of box steps 172 > 182 corresponding to the processing device 32 Λ 34 broadcast 1 The operation instruction may be sent to the moving lotus car 38 0 Even from the main electricity 1 1 臞 50 It is possible to send most of the moving work instructions to the white moving truck 38. 1 1 The operator will be limited by the moving capacity of the moving moving truck 38. Therefore, most of the 1 1 boxes 40 will wait for the white moving truck. The processing sequence of the car 38 is 0, so even if 1 1 | most of the operation instructions exceeding the limit are sent to the g moving truck 38, it is meaningless 0 1 1 On the other hand, the reliability of the g moving lotus car 38 is lower than the main IS 臞 50 * Once I hold the 1 1st job instructions, I will have to ask for a lot of time to restore it when I die. __ 1 1 This paper size applies to China National Standard (CNS) A4 (210X297 mm) -46-A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 4 t) 1 1 I Question 〇 1 1 I Therefore, the host computer 50 can use its input structure 5 4 Specify the limit value of the number of moving operations in the operation of the white moving truck 38 1 1 | can also have memory operations please. 1 1 Read | Data area of the number of devices. 0 This host computer 50 reads back to the moving vehicle 38 | 1 | Job instructions will be sent after the number of operating devices does not reach the set limit value. In the event 1 I When the number of operating devices does not reach the limit value, the host computer 50 will add 1 to the re-filled value of the data area > When the operation is completed, the value of the data area will be reduced by 1 0 and page 1 I. When the value of the data area does not reach the limit value, Be owned area material 1 after the value of the decrease is Μ specified limit value before sending the job transfer operation indication. 1 1 This type of host computer 50 will not send a large number of instructions for moving lotus. 1 Order 1 I to the lower moving truck 38. 0 Therefore, most of the instructions for moving lotus are due to § 3δ failure of the moving truck. The situation of staying on the automatic truck controller 1 1 60 will not occur. 01 1 to the above-mentioned method for controlling the stocker 36 of the box 40 is stored in the stocker 36 by the operator 1 At this time, the box 40 will be placed on the hand 1 I will be used on the port 116 and operate the operation surface 1 which is a part of the stocker 36 | plate 121 ^ > According to this operation, I know that the box 40 is placed on the manual entrance The stocker 36 9 on the port 1 16 1 1 will use the ID card to write the device 120 and let the information stored in the ID card 72 stored in the 1 1 proper box 40 * and pass the data through the communication call 58 1 1 Report to host computer 50. Host computer 50 determines that When the box 40 cannot be stored, f 1 | It will not send any operation instructions to the stocker 36 and will wait for the storage place in the stocker 36 1 I. When it is empty, it will be placed manually. □ Port 116 1 1 I box 40 will always be waiting on the port 116 in the storage area of the stocker 36 1 1 This paper size applies to China National Standard (CNS) A4 size (210X297 mm) kl Staff of the Central Bureau of Standards, Ministry of Economic Affairs Printed by Consumer Cooperative B7 V. Invention Description (4 :,) When a vacancy occurs in the office. If the operator knows that there is no storage place, the storage operation of the cassette 40 can be terminated. In addition, when the manual inlet port 116 and the manual outlet port 118 are used as a single port, it may be impossible to perform a warehouse operation because there is a box 40 in the box 40 waiting to be stored in the port. Therefore, the host computer 50 receives the arrival report * of the manual inlet port 116 of the box 40 reported by the stocker 36 and searches for the storage place of the box 40 in the stocker 36. When the storage space cannot be secured, the host computer 50 can also inform the stocker 36 of its essence * without the arrival report of the box 40. On the other hand, the stocker 36 that has accepted this can also inform the operator of the situation that the cassette 40 cannot be stored through its own operation panel 121, and M is waiting for the operator's operation. The operator who sees the indication of the operation panel 121 removes the cassette 40 from the manual inlet port 116, and operates the operation panel 121 to transfer the removed condition to the stocker 36. The stocker 36 * that has accepted this will judge that the box 40 has been taken out, and will return to the state before the box 40 was placed in the manual inlet port 116. In this kind of host computer 50, when it is not possible to secure the storage place of the cassette 40 placed in the manual inlet port 116, the gist can be communicated to the operator via the stocker 36. Therefore, the state in which the box 40 in question is placed before the manual inlet port 116 can be obtained, and the operator can perform different processing on the box 40. In addition, even when the manual inlet port 116 and the manual outlet port 118 are used as one port, the box 40 will block the port in the same situation, and the warehouse operation cannot be performed. The above-mentioned host computer 50 accepts the withdrawal request from the box 40 of the processing devices 32 and 34. As long as there is a storage place in the stocker 36, the Chinese national standard (CNS) Α4 specification will be applied to the paper size ( 210X 297 male f)-48 ~ (Please read the precautions on the back before filling this page) Install '' -ο. A7 __B7__ V. Description of the invention (.in) 1811 truck 38, send the processing device from the box 40 32, 34 to 88's handling #public instructions. In addition, as long as the stomach is vacant at the storage place of the storage destination stocker 36, the inter-storage conveying device 42 will be sent to the storage place of the box 40 stored in the transporting stocker 36 and stored. Instructions for moving the lotus from the device 36 to the transfer destination device 36. Furthermore, when the case 40 is reported from the stocker 36 to the manual inlet port 116, as long as the stocker 36 ^ storage space is empty, the storage operation instruction will be sent to the stocker 36 ° In addition, as long as the host computer 50 accepts the input request of the cassettes 40 from the processing devices 32 and 34 and can process the cassettes 40 that can be stored in the stocker 36, it issues a storage operation instruction to the stocker 36. In this kind of stocker man-machine operation control method and stocker out-work operation control method, when the stocker 36, the automatic moving car 38, or the lotus-removing device 42 between the stockers fails, there is no such thing as these devices. The main battery 50 will still send most of the handling instructions to these devices. Therefore, it is not only the restoration of the failure, but also the problem that it takes time to restore the transportation operation instructions sent from the host computer 50 to these devices. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (read the precautions on the back before filling out this page) I ί Also, when we started the storage operation of the box 40 from the processing device 32, 34 to the stocker 36, The host computer 50 does not hold the available and unavailable device status information of the processing devices 32, 34, the automatic transport vehicle 38, and the reservoir 36 of the temporal display, or has not confirmed before sending. Therefore, since the relative machine is stopped for some reason after the operation is started, the problem that the operation of the appropriate box 40 is stopped halfway may be caused. In addition, when the storage operation of the box 40 from the stocker 36 to the processing devices 32 and 34 is started, the main battery 50 does not hold the processing device 32 of Gu Shixiang, and this paper standard applies to the Chinese national standard ( CNS) A4 specification (210X297 mm)-A7 Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs B7 V. Invention description (.17) 34, Automatic lotus car 38, and stocker 36 can be used or not used Device status information for or was not confirmed before sending. Therefore, due to the failure of the related machine after the start of the operation, the problem that the operation of the appropriate cassette 40 is stopped halfway may be caused. Moreover, when the semiconductor wafer cassette 40 between the stockers 36 is being transferred, the host computer 50 does not hold the relevant destination stocker 36, the transfer place stocker 36, and the stocker. The usable and unavailable device status information of the Jianlianlian device 42 was not confirmed before sending. Therefore, since the related machine may stop due to a failure after the operation is started, the problem that the operation of the proper box 40 is stopped halfway may be caused. Furthermore, the host computer 50 does not hold the status information of the usable and unusable devices of the stocker 36 when the warehouse entry operation from the manual inlet 璋 116 and the warehouse exit operation from the manual exit port 118 are started. Job instructions were not confirmed before sending. Therefore, since the stocker 36 may be stopped due to a failure after the operation is started, it may cause a problem that the operation of the box 40 is stopped halfway. Therefore, in the method of controlling the storage operation of the stocker and the method of controlling the storage work of the stocker, the host computer 50 * may also have a stocker 36, an automatic truck 38, and a stocker that can be displayed from the operator terminal 56 and can be changed. Status data of the usable and unusable devices of the inter-plant transfer device 42. This host computer 50 automatically confirms the automatic transport vehicle 38 and the stocker 36 when the transportation operation instructions of the cassettes 40 from the processing devices 32 and 34 to the inlet port 88 for the automatic transport vehicle are automatically transferred to the automatic transport vehicle 38. Respective device status data are available and sent in storage instructions. In addition, the Chinese National Standard (CNS) Α4 specification (210X 297 mm) is applied from the stocker 36 at the moving lotus position to this paper size. _ Κλ _ (Please read the precautions on the back before filling this page) 袈 · Order A7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs B7 V. Description of the Invention (4H) When the moving instructions for the box 40 of the container 36 for the lotus destination are sent to the container 42 between the containers, the moving company will be confirmed. The respective device status data of the stocker 36, the stocker-to-stocker conveyance device 42, and the stocker-destination stocker 36 are usable, and a storage operation instruction is sent. When the warehouse-instruction operation instruction is sent from the manual population port 116 to the stocker 36, it is confirmed that only the device status data of the stocker 36 is available and the warehouse-instruction operation instruction is sent. If none of the device status confirmations are available, the host computer 50 waits for them to become available. In addition, even if it is related to the outbound operation, it is the same as the inbound operation. When the host computer 50 moves from the stocker 36 to the processing devices 32 and 34, it is necessary to check each of the stocker 36 and the automatic truck 38. After the device status data is available, an outbound operation instruction is sent to the stocker 36 to the manual outlet port 118. In addition, when the manual warehouse outlet instruction of the manual outlet port 118 is sent to the stocker 36, it is confirmed that only the device status data of the stocker 36 is available, and the warehouse work instruction is sent. When this kind of host computer 50 sends a conveying operation instruction to the stocker 36, the automatic truck 38, and the feeder-to-receiver conveying device 42, the storage place or the storage device of the stocker 36 which precedes it finally is confirmed. After the equipment status data of all the handling devices related to the handling operations are available, the handling operation instructions are sent to such devices. Therefore, most of the instructions for moving the lotus are not stuck on the conveying device which is unusable due to the failure. In addition, it does not happen that the operation is stopped halfway. After confirming that all the above-mentioned devices related to the handling operation are usable, the method of controlling the storage operation of the stocker that sends the handling operation instruction is to apply the Chinese National Standard (CNS) A4 specification (210X 297 mm) from this paper size ) C1 (Please read the notes on the back before filling out this page) 袈 · A7 Printed by B7 of the Central Standards Bureau, Ministry of Economic Affairs, Consumer Cooperatives V. Description of the Invention (· 1: ί) Manually use the inlet port 116 to send the box 40 to Μ At the time of storage, when the device status data of the stocker 36 is unusable, it will become a work waiting state, and there is a problem that the operator cannot stop the storage operation of the box 40. Therefore, when the host computer 50 receives the arrival report of the manual inlet port 116 of the box 40 reported by the stocker 36 and confirms the device status data of the stocker 36, the device status data of the stocker 36 is unusable At this time, Kao Lu may contact the stocker 36M with the key to not perform the arrival report of the box 40. On the other hand, the stocker 36 that has already accepted this can also wait for the operator's operation through the operation panel 121 itself to display the situation that the operator cannot store. The operator who sees the display on the operation panel 121 will take out the cassette 40 from the manual inlet port 116, and will operate the operation panel 121 to transfer the removed condition to the stocker 36. The stocker 36 that has accepted this * judges that the box 40 has been removed, and returns to the state before the box 40 was placed in the manual inlet port 116. As described above, since the host computer 50 in this embodiment has the device status data of the stocker 36 unusable, when the box 40 of the manual inlet port 116 cannot be stored, the main point can be transmitted to the main body via the stocker 36. Operators. It is possible to return to the state before the cassette 40 was placed in the manual inlet port 116. Therefore, the operator can perform different processing on the cassette 40. The manual inlet 埤 116 of the stocker 36 does not need to provide usable processing devices 32 and 34 as input data from the input mechanism 54 in advance as shown in the prior art. Use stingily. In addition, due to the good workability of the operator, the determined two boxes 40 can be placed at one time. When the operator stores the box 40 in the stocker 36, the box 40 of the paper size is applicable to China. National Standard (CNS) Α4 Specification (210X297 male f) _ ς 〇_ (Please read the notes on the back before filling this page) Install A7 Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. A maximum of two cassettes 40 are placed on the manual inlet port 116. Next, the operation panel 121 which is a part of the stocker 36 is operated. At this time, the operator does not need to pay attention to the processing devices 32 and 34 that complete the processing of the semiconductor wafer cassettes 40 or the processing devices 32 and 34 that perform the next processing, and the Kunzi 40 can be placed in the same port. By this operation, it is known that the magazine 40 is placed on the stocker 36 on the manual inlet port 116, and the ID card writing device 120 is used to retrieve the information recorded on the ID card 72 of the appropriate magazine 40, and the information is recorded. It is reported to the host computer 50 via the communication cable 58. The host computer 50 does not confirm whether the boxes 40 can be stored in the port as shown in the conventional example, but sends a storage operation instruction of the boxes 40 to the stocker 36 after securing the storage place. According to the storage operation instruction sent through the communication cable 58, the stocker controller 64 starts work after securing a storage place on the stocker rack 96. The stocker 36 which starts the storage operation will use the stocker crane 80 to sequentially transport the first box 40 and the second box 40 placed on the manual inlet port 116 to the secured stocker. In the storage place on the rack 96. The stocker 36 that completes the instructed operation reports the operation completion to the host computer 50. In this way, the operator's bank operation can be completed. In this way, the number of the boxes 40 that can be placed on the manual inlet port 116 of the stocker 36 is set to two with good operability for the operator, and the host computer 50 does not need to be in each of the ports 116 The usable processing devices 32 and 34 are set. Thereby, the workability of the storage operation to the magazine 40 of the stocker 36 of the operator becomes better. Therefore, the manual inlets that can be used on each processing unit 32, 34 are in accordance with the Chinese National Standard (CNS) A4 specification (210X 297 mm) (please read the precautions on the back before filling this page). -° ΑΊ Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs B7 V. Invention description (: U) 116 can be determined, and when there are a plurality of manual inlet ports 116, the cause processing device 32, The respective device capabilities and operating conditions of 34 cause unequal problems in the mixed use condition of the manual inlet port 116. In this way, the operator can freely choose to use the empty manual inlet 璋 116. The above-mentioned host computer 50 does not hold information on the storage locations of each of the cassettes 40 in the stocker 36. The reservoir controller 64 is therefore responsible for this management. Furthermore, based on the maximum number of storage boxes of the stocker 36 provided in advance from the input mechanism 54, the number of the boxes 40 that have been out of storage is added to the capacity of the reservoir, and the number of the boxes 40 that have already been stored is The capacity is subtracted, and the storage place is managed by M. The following describes how to manage other storage places. As shown in Figs. 7A and 7B, the host computer 50 provides information on the storage location of the pre-named stocker 36 from the turn-in mechanism 54. At the same time, the host computer 50 receives a report of the storage location when the storage operation of the cassette 40 is completed from the stocker 36. With this, the host computer 50 can cause a vacancy in the storage place in which the box 40 is stored when the stocker crane 80 takes out the appropriate box 40 from the stocker rack 96 based on the information reported by the stocker controller 64. Case. The host computer 50 may further designate one of the processing devices 32 and 34 from the wheel-in mechanism 54 to use a plurality of usable exit ports 86 for the automatic transport vehicle. At this time, you can also set the order of use. For example, in the case shown in Fig. 1, the processing devices 32 and 34 can use two exit ports 86 for the automatic transport vehicle. The processing devices 32 and 34 send the investment request of the box 40 to the host computer 50 through the communication antenna 58. Although the host computer 50 has been previously used from the plurality of automatic lotus flower outlet ports 86, the automatic computer lotus flower outlet port 86 is not located in the next use sequence or the automatic computer is not located in the next use sequence. The size of the paper used for the truck is applicable to the Chinese National Standard (CNS) Α4 specification (210X297 mm) c Λ HI--4-I- JJ — — II · In (Please read the precautions on the back before filling this page) A7 A7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs B7 V. Description of the Invention (U) When port 86 is decided, the first port 86 for automatic transfer trucks will be used as the porter in the box 40 . In this method of controlling the stocker's outbound operation, a plurality of exit ports 86 for an automatic truck can be assigned to one processing device 32 and 34. The ports 86 can be used approximately equally in a predetermined order. This can solve the following problems. In other words, the number of exit ports 86 for automatic transfer vehicles that can be used in each of the processing devices 32 and 34 is determined in advance, and there may be a plurality of exit ports 86 for automatic transfer vehicles. There is a problem of inequality in the mixed use conditions of the exit port 86 for the automatic transport vehicle due to their respective processing capabilities and working conditions, but this problem can be eliminated, even if the respective processing capabilities and working conditions of the processing devices 32, 34 It is different, and it is also possible to use the plurality of automatic truck exit ports 86 approximately equally for the respective processing devices 32 and 34, and the problem of unevenness in the mixed use of the automatic truck exit ports 86 may also change. no. Preferably, the host computer 50 can further designate a plurality of usable automatic lotus car outlet ports 86 from the input mechanism 54 to one processing device 32, 34, and the host computer 50 is in each of its ports 86 Among the warehouse operation instructions issued to the stocker 36, there may be a data area in which the number of uncompleted operation instructions is stored in advance. When the host computer 50 receives an input request from the sons of the processing devices 32 and 34, the processing devices 32 and 34 search for a usable exit port 86 for an automatic truck. As a result, when there are a plurality of usable exit ports for automatic trucks 86, the host computer 50 compares the value of the data area of each of the aforementioned ports, and selects the smaller one of the paper for the automatic trucks. Standards are applicable to China National Standard (CNS) A4 specifications (210X29 " / mm) cc (Please read the precautions on the back before filling in this f) Installation,-° A7 A7 Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs DESCRIPTION OF THE INVENTION (i) Exit port 86. The value of the data area of the selected auto-porter exit port 86 is incremented by 1 and a transport operation instruction is sent to the auto-porter 38. When the job is completed, the value is decremented by one. In addition, when there are a plurality of the same outbound operations before the completion of the operation, the host computer 50 arbitrarily selects one of the ports 86 from the port 86, and sends a lotus removal operation instruction to the automatic truck 38. In this method for controlling the stocker's outbound operation, a plurality of automatic truck exits 86 can be assigned to one processing device 32, 34. In addition, sending an out-of-stock operation instruction to the new stocker 36M can make the number of operations before completion of the operation of port 86 equal. Therefore, port 86 can be used approximately equally. Therefore, if the number of exit ports 86 for the automatic transfer vehicle that can be used in each of the processing devices 32 and 34 is predetermined and there are a plurality of the exit ports 86 for the automatic transfer vehicle, it is possible to eliminate the processing device 32, The respective processing capabilities and working conditions of 34 cause unequal problems in the mixed use of the exit port 86 for the automatic guided vehicle. Accordingly, even if the processing capabilities and working conditions of the processing apparatuses 32 and 34 are different, the plurality of automatic truck exit ports 86 can be used approximately equally for the respective processing apparatuses 32 and 34. The problem of inequality in the mixed use of the vehicle exit port 86 will disappear. In the above-mentioned stocker out-of-stock operation control method, when there is a request for the input of the box 40 from the processing devices 32 and 34, as long as there is a processable box 40 on the stocker 36 and the host computer 50, Each of the plurality of exit ports 86 for an automatic transport vehicle determines one 璋 86 equally, and sends an outbound operation instruction to the stocker 36. Therefore, even if the delivery of paper from an automatic truck occurs, the Chinese paper standard (CNS) Α4 specification (2 丨 0X297 mm) _ r β (please read the precautions on the back before filling this page)
• n n HI 裝· 、-5° -1.^ If' A7 A7 經濟部中央標準局員工消費合作社印製 B7 五、發明説明（：Λ) 接埠100將匣子40送出至自動搬運車用出口埠86上的前進 移動裝置8 4發生故障等的問題時*主電腦50，亦無法感知 故障，而會將來自適當的自動搬運車用出口埠86之匣子40 的出庫作業指示送至自動搬運車38上。 因此，主電腦50具有依自動搬蓮車用出口埠86之各坶的 儲料器36而記憶出庫作業之作業完成前的作業數之資料區 域，同時亦可利用輸入機構5 4來設定其作業數的上限值。 主電腦50在將至自動搬蓮車用出口埠86的出庫作業指示發 送給儲料器36之際，在該資料區域之值到達其上限值時會 關閉使用該埠，且考盧使用成為次候補的自動搬運車用出 口埠86。结果在沒有適當的埠時就會等待完成至可使用的 自動搬運車用出口埠86之搬運作業。 該種主電腦50，係可在各自動搬蓮車用出口埠86上設定 作業完成前之作業數的上限值。因此，在發送自動搬蓮車 用出口埠86之出庫作業指示之際，作業完成前的作業數不 會超過其上限值。又，不會發生因前進移動裝置84之故障 等的原因使多數的出庫作業指示滯留在儲料器36上的狀況。 較佳者為，主電腦50，亦可在自動搬運車用出口燁86之 各埠上具有顯示可使用*不可使用的裝置狀況資料，抑且 可利用作業者終端機56變更該資料。主電腦50在將自動搬 運車用出口埠86之搬運作業指示發送給儲料器36之際，會 核對該装置狀況資料，在該資料為不可使用時，就會關閉 使用該埠，而考慮使用成為次候補的自動搬蓮車用出口埠 86。结果在沒有可使用的埠時就會等待不可能使用的自動 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐) _ r 7 _ (請先閱讀背面之注意事項再填寫本頁) 裝 、-° A7 A7 經濟部中央標準局員工消費合作社印製 B7 五、發明説明（: ,:)） 搬浬車用出口埠86之裝置狀況資料變更成可使用。 該種的主電腦50，係具備有在各自動搬蓮車用出口埠86 上顯示可使用•不可使用的裝置狀況資料*且在自動搬運 車用出口埠86故障時作業者可從作業者終端機56中將該資 料變更成不可使用。藉此主電腦50可檢知故障的自動搬運 車用出口埠86且可中止將該埠的出庫作業指示發送給儲料 器36。又，不會發生因前進移動裝置8 4之故障等的原因使 多數的出庫作業指示滯留在儲料器36上的狀況。 主電腦50，會接受來自處理装置32、34的匣子40之投入 要求而移至使用儲料器36的出庫作業上*基於利用該儲料 器36顯示從作業開始至完成為止所報告之作業進展的資訊 ，無論是否為出庫作業完成前亦可將從適當的自動搬運車 用出口埠86至處理裝置32、34的匣子40之搬運作業指示送 至自動搬運車38上。 該種的主電腦50，會接受來自處理裝置32、34的匣子 40之投入要求而將自動搬運車用出口埠86之出庫作業指示 送至儲料器36上。同時在完成出庫作業之前，可將從自動 搬運車用出口埠86至處理裝置32、34的搬運作業指示送 至自動搬運車38上。因而，可使之與在儲料器36的出庫作 業平行進行自動搬運車38的回送作業，亦即從自動搬運車 38之待機場所至搬運處的移動作業。 因而，在完成自動搬運車用出口埠36之出庫作業之後* 將從同埠86至處理裝置32、34的搬蓮作業指示送至自動搬 運車38上。因此，就可解消在自動搬運車38從待機場所來 本紙張尺度適用中國國家標準（CNS ) A4規栳（210X297公釐） _ rs _• nn HI equipment, -5 ° -1. ^ If 'A7 A7 Printed by the Consumers' Cooperative of the Central Standards Bureau, Ministry of Economic Affairs, printed B7 V. Description of the invention (: Λ) The port 100 sends the box 40 to the exit port for the automatic transport vehicle When there is a problem such as a failure of the forward moving device 84 on the 86 * the host computer 50 cannot detect the failure, and will send an outbound operation instruction from the appropriate automatic truck exit box 86 box 40 to the automatic truck 38 on. Therefore, the host computer 50 has a data area for storing the number of operations before the completion of the warehouse operation according to the stocker 36 of each port of the automatic port 86 of the lotus car. At the same time, the input mechanism 54 can be used to set the operation. The upper limit of the number. When the host computer 50 sends the warehouse operation instruction to the storage port 36 for the port 86 for the automatic transfer of lotus flowers, when the value of the data area reaches its upper limit, the port will be closed and the port will be used. Exit port 86 for the secondary standby automatic truck. As a result, when there is no proper port, it will wait for the completion of the transportation operation to the usable exit port 86 of the automatic truck. This host computer 50 is capable of setting an upper limit value of the number of operations before the completion of the operation on each of the automatic port 86 for the lotus car. Therefore, the number of jobs before the completion of the job will not exceed the upper limit when sending out the warehouse operation instructions for the port 86 for the automatic lotus car. In addition, a situation in which most of the outbound work instructions are left on the stocker 36 due to a failure or the like of the forward moving device 84 does not occur. Preferably, the host computer 50 may have data indicating the status of the device that is usable * not available on each port of the exit 烨 86 for the automatic truck, or the operator terminal 56 may be used to change the data. When the host computer 50 sends the transportation operation instruction of the automatic truck exit port 86 to the stocker 36, it checks the device status data. When the data is unavailable, it will close the port and consider using it. Become a secondary candidate for port 86 for automatic lotus cars. As a result, when there is no usable port, we will wait for the impossible automatic paper size. This paper applies the Chinese National Standard (CNS) Α4 size (210X297 mm) _ r 7 _ (Please read the precautions on the back before filling this page) Installation,-° A7 A7 Printed by the Consumer Cooperatives of the Central Standards Bureau, Ministry of Economic Affairs, B7 V. Description of the Invention (:, :)) The device status data of the export port 86 for moving vehicles has been changed to use. This type of host computer 50 is provided with device status data of available and unavailable devices on the port 86 of each automatic transfer vehicle *, and the operator can use the operator terminal when the port 86 of the automatic transfer vehicle fails. This data is changed to unavailable in the machine 56. In this way, the host computer 50 can detect the faulty exit port 86 for the automatic transfer vehicle and can stop sending out warehouse operation instructions from the port to the stocker 36. In addition, a situation in which most of the outbound work instructions are left on the stocker 36 due to a failure of the forward moving device 84 or the like does not occur. The host computer 50 accepts the input request of the box 40 from the processing devices 32 and 34 and moves to the warehouse operation using the stocker 36. Based on the use of the stocker 36, the progress of the work reported from the start to completion of the work is displayed. Regardless of whether or not the storage operation is completed, the transportation operation instruction from the appropriate automatic transport vehicle exit port 86 to the box 40 of the processing devices 32 and 34 can be sent to the automatic transport vehicle 38. The host computer 50 of this kind receives the input request of the cassettes 40 from the processing devices 32 and 34 and sends the storage operation instruction to the stocker 36 from the exit port 86 of the automatic truck. At the same time, the transportation operation instructions from the automatic port vehicle exit port 86 to the processing devices 32 and 34 can be sent to the automatic port vehicle 38 before the warehouse operation is completed. Therefore, it is possible to perform the return operation of the automatic truck 38 in parallel with the unloading operation in the stocker 36, that is, the moving operation from the standby place of the automatic truck 38 to the transfer place. Therefore, after the warehouse operation of the exit port 36 for the automatic transport vehicle is completed *, the instructions for moving the lotus from the same port 86 to the processing devices 32 and 34 are sent to the automatic transport vehicle 38. Therefore, it can be eliminated from the standby place on the automatic truck 38. The paper size applies the Chinese National Standard (CNS) A4 Regulation (210X297 mm) _ rs _
In 1 -- 111 J.JI In ί I ·-1^n^i - I- —m - ^^1 XV. 、-° (請先閱讀背面之注意事項再填寫本頁) A7 A7 經濟部中央標準局員工消費合作社印製 B7 五、發明説明（Μ:) 到自動搬運車用出口埠86之間，匣子40在同埠86中等待的 問題。 藉此，就可縮短從匣子40之自動搬運車用出口埠86至處 理装置32、34的搬運作業時間。 習知之自動搬蓮車38，在由主電腦50接受從匣子40之自 動搬運車用出口埠86至處理裝置32、34的搬運作業指示時 ，就會著手作業而進行從待機場所至指定的儲料器36之自 動搬運車用出口埠86前的移動作業。接著，取入自動搬蓮 車用出口埠86上的匣子40。在取入E子40之前，自動搬運 車38會進行在自動搬運車用出口埠86上是否載有匣子40之 確認。在未載有匣子40時會判斷為異常事態，且立即將錯 誤發報送進主電腦50內。 另一方面*考盧在完成上述之匣子40的自動搬浬車用出 口埠86之出庫作業之前主電腦50將作業指示發送給自動搬 運車38的情況。此情況，在自動搬運車38到達自動搬運車 用出口埠86時，就會發生匣子40載置於自動搬運車用出口 埠86上的情況。因此，自動搬運車38會K異常事態發報錯 誤訊息，且屢次使搬運作業中斷而成為很大的問題。 因此，自動搬運車38，會接收從由主電腦50所送來的儲 料器36之自動搬運車用出口埠86至處理裝置32、34的匣 子40之搬運作業指示而著手作業。與習知同樣從待機場所 移動至作為搬運處的自動搬運車用出口埠86上且在取入同 埠上的匣子40之際，自動搬蓮車38即使在該處沒有適當的 匣子40亦不會發報錯誤訊息而可在一定時間內等待半導體 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29·/公f ) I- -1 - - - J-J- --- - - — 1^1 -- I - -- I— — - - I In (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（:vr) 晶圓匣40出琨在該處者。在一定時間内，當匣子40出現時 ，會立即在自動搬連車38之移載台150上，著手裝載自動 搬運車用出口埠86上的匣子40之作業。另外，即時經過一 定時間而未出現適當匣子40時，亦即從自動搬運車用出口 交接埠100中匣子40未依前進移動裝置84送來時，就會判 斷異常事態而向主電腦50發報錯誤訊息。 該種的自動搬運車38在從儲料器36之自動搬運車用出口 埠86中取人匣子40之際，即使沒有適當的匣子40亦不會發 報錯誤訊息，而在一定時間等待該匣子40出現。在一定時 間内出現匣子40時，會著手於匣子40之搬運作業。因此， 主電腦50在完成自動搬運車用出口埠86之匣子40的出庫作 業之前，可將從同埠86至處理裝置32、34的匣子40之搬運 作業指示發送至自動搬運車38上，且可減少發出投入要求 之處理裝置32、34的等待時間。 上逑之主電腦50，係對自動搬運車38，發送從處理裝置 32、34至自動搬運車用入口埠88的匣子40之搬運作業指示 。已接受該作業指示的自動搬運車38會著手於搬蓮作業， 且從處理裝置32、34之匣子台階172、182中取人匣子40, 並將匣子40運至目的地之自動搬運車用入口埠δ8上。處理 裝置32、34係利用自動搬運車38在匣子40從本身的匣子台 階172、182中被取出時，會將匣子40之投入要求送至主電 腦50上。 已接受此的主電腦50，係從儲料器36中搜尋出可處理的 半導體晶圓匣40，且使自動搬蓮車用出口埠86之匣子40的 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐) _ _ (讀先閱讀背面之注意事項再填寫本頁) J— I In . 裝. --° — 小 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（58) 出庫作業在儲料器36中進行。接著對自動搬運車38，送出 從自動搬蓮車用出口埠86至處理裝置32、34的匣子40之搬 運作業指示，俾使搬運作業進行。如參照圖8加Μ說明所 示，在自動搬運車38上有2個Μ上的匣子移載台150。自動 搬運車38，使供至處理裝置32、34的匣子40載於匣子移載 台150上*且注處理裝置32、34移動，並將位於匣子台階 172、182上有退出要求的匣子40載於空的匣子移載台150 上。自動搬運車38，亦可將載於g子移載台150上之應供 給的匣子40，置放在現在空的匣子台階172、182上。無論 是否與此有闞，主電腦50會將從處理裝置32、34至自動搬 運車用入口埠88的匿子40之搬蓮作業指示和從自動搬蓮車 用出0埠86至處理裝置32、34的匣子40之搬運作業指示各 自分別送至自動搬蓮車38上，俾使之蓮送匣子40。為了改 善此點*亦可使主電腦50進行如下之處理。主電腦50，在 接受來自處理裝置32、3 4的匣子40之退出要求時，會在儲 料器36上搜尋出可處理的匣子40。主電腦50*不會將從處 理裝置32、34至自動搬浬車用入口埠88的單獨之搬運作業 指示送至自動搬運車38上。首先，主電腦50，會對儲料器 36，發送可處理之匣子40之自動搬運車用出口埠86的出庫 作業指示。主電腦50，會等待出庫作業完成報告，且將從 處理裝置32、34至自動搬蓮車用人口埠88的匣子40之搬運 作業指示和從自動搬運車用出口埠86至處理裝置32、34的 匣子40之搬運作業指示作為一個搬蓮作業指示送至自動搬 蓮車38上。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝· ,νβ A7 --------_____ 五、發明説明（,ν,υ ' 如此接受2倕搬運作業被組編成的一個搬蓮作業指示的 自動搬運車控制器60’首先使自動搬運車38朝向儲料器36 之自動搬蓮車用出口埠86，再驅使其機器臂144 、機器手 146、機器手爪148以將該埠上的匣子40置放在移載台150 上。之後’自動搬運車38，會朝向處理装置32、34 ，當到 達處理裝置32、34時，移載台150上的匣子40會先保持原 狀’苜先會與撕才相同地鼷使櫬器臂144、櫬器手Μ6、機 器手爪148’再將匣子台階172、182上的匣子4〇置放在空 的移載台150上。當該作業完成時，會先從自動搬運車用 出口増86取人’再將載置於移載台150上的匣子40，置放 在相同的昆子台階172、182上。當完成此時，自動搬運車 控制器60 ’會使台車ι4〇移動至儲料器36的自動搬運車用 入口堆88上’當台車u〇到達時位於移載台ι5()的匣子4〇會 朝自動搬蓮車用入口埠88予以裝載，而完成一系列的作業。 自動搬運車控制器60，在將匣子40置放在處理裝置32、 經濟部中央標準局員工消費合作社印製In 1-111 J.JI In ί I · -1 ^ n ^ i-I- —m-^^ 1 XV.,-° (Please read the precautions on the back before filling this page) A7 A7 Central Ministry of Economic Affairs Printed by the Bureau of Consumers of the Bureau of Standards Bureau B7 V. Description of the invention (M :) to the exit port 86 for automatic trucks, the problem that the box 40 is waiting in the same port 86. As a result, it is possible to shorten the transportation time from the exit port 86 for the automatic truck of the cassette 40 to the processing devices 32 and 34. When the conventional automatic lotus transfer vehicle 38 receives a transfer operation instruction from the automatic transfer vehicle exit port 86 of the box 40 to the processing devices 32 and 34 by the host computer 50, it will start the operation and proceed from the standby place to the designated storage. The moving operation in front of the exit port 86 for the automatic conveyer of the feeder 36. Next, the box 40 on the port 86 for the automatic transfer vehicle is taken in. Before taking in the sub 40, the automatic truck 38 checks whether the cassette 40 is loaded on the automatic truck exit port 86. When the box 40 is not loaded, an abnormal situation is judged, and an error is immediately reported to the host computer 50. On the other hand, the case where the host computer 50 sends a job instruction to the automatic transport vehicle 38 before completion of the warehouse operation of the automatic transport vehicle outlet port 86 of the box 40 described above. In this case, when the automatic transport vehicle 38 reaches the automatic transport vehicle exit port 86, the case 40 may be placed on the automatic transport vehicle exit port 86. Therefore, the automatic truck 38 may report an error message in the abnormal state of K, and repeatedly interrupt the transportation operation, which becomes a great problem. Therefore, the automatic truck 38 starts the operation by receiving the transportation operation instruction from the automatic truck exit port 86 of the stocker 36 sent from the host computer 50 to the cassette 40 of the processing devices 32 and 34. When moving from the waiting place to the exit port 86 of the automatic transport vehicle as a transfer place as in the conventional case, and when taking in the box 40 on the same port, the automatic transfer vehicle 38 does not need to have the appropriate box 40 there. An error message will be issued and you can wait for a certain period of time. The paper size of the semiconductor applies to the Chinese National Standard (CNS) A4 specification (210X29 · / F). I- -1---JJ- ------1 ^ 1- -I--I— —--I In (Please read the notes on the back before filling this page) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (: vr) 40 cassettes I'm here. In a certain period of time, when the box 40 appears, it will immediately start loading the box 40 on the port 86 of the automatic truck on the transfer platform 150 of the automatic truck 38. In addition, if a proper box 40 does not appear immediately after a certain period of time, that is, when the box 40 is not sent by the forward moving device 84 from the exit transfer port 100 of the automatic truck, it will determine an abnormal situation and report an error to the host computer 50 message. When this type of automatic truck 38 takes a person's box 40 from the automatic truck exit port 86 of the stocker 36, it will not report an error message even if there is no appropriate box 40, and wait for the box 40 at a certain time. appear. When the box 40 appears within a certain period of time, handling of the box 40 is started. Therefore, before the host computer 50 completes the unloading operation of the box 40 of the port 86 for the automatic transport vehicle, the host computer 50 can send the instructions for the operation of the box 40 from the same port 86 to the processing devices 32 and 34 to the automatic transport vehicle 38, and It is possible to reduce the waiting time of the processing devices 32 and 34 which issue an input request. The host computer 50 on the upper side sends an operation instruction to the automatic transport vehicle 38 from the processing devices 32 and 34 to the box 40 of the automatic transport vehicle inlet port 88. The automatic truck 38 that has accepted the operation instruction will start the lotus transfer operation, and take the box 40 from the box steps 172 and 182 of the processing devices 32 and 34, and transport the box 40 to the entrance of the automatic truck for the destination. On port δ8. When the processing devices 32 and 34 are taken out of the box stage 172 and 182 of the box 40 by the automatic truck 38, the input request of the box 40 is sent to the main computer 50. The host computer 50 that has accepted this is searching for a semiconductor wafer box 40 that can be processed from the stocker 36, and the paper size of the box 40 of the automatic port 86 of the lotus car is adapted to the Chinese National Standard (CNS) Α4 Specifications (210X 297mm) _ _ (Read the precautions on the back before filling out this page) J—I In. Equipment.-° — Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Small Economy A7 B7 V. Invention Explanation (58) The warehouse operation is performed in the stocker 36. Next, the automatic transfer vehicle 38 sends out a transfer operation instruction from the automatic transfer vehicle exit port 86 to the cassette 40 of the processing devices 32 and 34, and the transfer operation is performed. As shown with reference to Fig. 8 plus M, there are two cassette transfer stations 150 on the automatic truck 38. The automatic truck 38 loads the boxes 40 supplied to the processing devices 32 and 34 on the box transfer table 150 and moves the processing devices 32 and 34 and loads the boxes 40 on the box steps 172 and 182 with an exit request On the empty cassette transfer stage 150. The automatic truck 38 may also place the boxes 40 to be supplied on the g carrier transfer table 150 on the now empty box steps 172, 182. Regardless of whether or not this is the case, the host computer 50 will send the instructions for moving the lotus from the processing device 32, 34 to the entrance port 88 of the automatic transport vehicle, and from port 86 to the processing device 32, The carrying operation instructions of the box 40 of 34 are respectively sent to the automatic lotus-carrying vehicle 38, and the box 40 is sent to the lotus 40. To improve this, the host computer 50 may also perform the following processing. When the host computer 50 accepts the withdrawal request of the cassettes 40 from the processing devices 32, 34, the stocker 36 searches for a processable cassette 40. The host computer 50 * does not send a separate conveyance operation instruction from the processing devices 32, 34 to the entrance port 88 for the automatic transfer vehicle to the automatic transfer vehicle 38. First, the host computer 50 sends a storage operation instruction to the stocker 36 to the processing port 40 of the automatic truck exit port 86. The host computer 50 waits for the completion report of the warehouse operation, and instructs the handling operations from the processing device 32, 34 to the box 40 of the automatic porter population port 88, and from the automatic porter port 86 to the processing devices 32, 34. The transporting operation instruction of the box 40 is sent to the automatic lotus transporting vehicle 38 as a lotus transporting operation instruction. This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) (Please read the precautions on the back before filling out this page) Installation, νβ A7 --------_____ 5. Description of the invention ( , ν, υ 'In this way, an automatic truck controller 60' that accepts an instruction for a moving operation organized by a 2 倕 moving operation is first set 'the automatic moving vehicle 38 toward the storage port 36 of the automatic moving vehicle exit port 86, and then Drive its robot arm 144, robot hand 146, and robot claw 148 to place the box 40 on the port on the transfer platform 150. After that, the 'automated truck 38 will face the processing devices 32, 34, and when it reaches the processing device At 32 and 34, the box 40 on the transfer platform 150 will be kept in the same state as before. "The alfalfa will be the same as the tear. Then, the arm 144, the arm M6, and the machine claw 148 will be used." The upper box 40 is placed on the empty transfer platform 150. When the operation is completed, people will be taken from the automatic truck exit 増 86 ', and then the box 40 placed on the transfer platform 150 will be placed. Placed on the same Kunzi steps 172, 182. When this is done, the automatic truck controller 60 'will make The trolley ι40 moves to the entrance stack 88 for the automatic transporter of the stocker 36. When the trolley u0 arrives, the box 40 located on the transfer stage ι5 () is loaded toward the entrance port 88 for the automatic transport lotus, and Complete a series of operations. The automatic truck controller 60 is printed on the box 40 in the processing device 32 and printed by the staff consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs.
34上之際’並將該要旨向主電腦5〇報告。接受此主電腦5〇 就會知道匣子40已到達處理裝置32、34之情況，並將處理 開始之作業指示透過通信電鑭58向處理裝置32、3 4指示。 如此主電腦50*會依來自處理裝置32、34之匣子40的退出 要求，而搜尋出被收納再儲料器36內之可處理的匣子40， 而發送將之成對之一個自動搬運車38的搬運作業指示。又 *接受此的自動搬運車38係Μ自動搬蓮車用出口埠的 匣子40之取人作業、處理裝置32、34上的匣子40之取入作 業、從移載台150至處理前匣子4 0之處理裝置32、34的E 62 ------------ 裝------訂 (請先閲讀背面之注意事項再填寫本頁) 本纸張尺度適用中國國家標準（CNS ) A4規格（210乂297公釐） A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (f Μ ) 1 I 子 40之 裝 卸 作 業 從 移 載 台 150 至 動 搬 運 車 用 入 Ρ 埠 88 1 1 I 的 處 理 後 匣 子 40之 裝 卸 作 業 的 順 序 進 行 —· 系 列 的 作 業 〇 藉 1 1 1 此 動 搬 運 車 38 就 會 比 較 分 別 各 白 進 行 從 處 理 裝 置 32 - 請 1 1 34 至 白 動 搬 運 車 用 入 α 璋 88的 匣 子 40 之 搬 運 作 業 和 從 白 動 1¾] 讀 背 \ I 面 搬 運 車 用 出 Ρ 埠 86 至 處 理 裝 置 32 34的 匣 子 40 之 搬 蓮 作 業 之 I 意 1 | 的 情 況 而 可 縮 短 搬 運 作 業 時 間 0 藉 此 就 可 降 低 白 動 搬 運 事 項 1 I 車 38的 工 作 效 率 同 時 可 縮 短 匣 子 40供 給 至 處 理 裝 置 32 再 填 寫 裝 34的 時 間 0 頁 -—^ 1 I 主 電 腦 50 可 更 進 一 步 對 處 理 裝 置 32 34從 輸 入 機 構 54 1 1 中 指 定 複 數 個 可 使 用 的 手 動 用 出 Ρ 埠 118 9 又 9 此 時 亦 可 1 1 配 合 設 定 使 用 順 序 〇 處 理 裝 置 32 34 亦 可 使 用 2個手動 1 訂 I I 用 出 口 埠 118 〇 當 匣 子 40的 投 入 要 求 從 處 理 裝 置 32 Τ» 34中 透 過 通 信 電 纜 58向 主 電 腦 50 發 送 時 主 電 腦 50雖 從 有 複 數 1 1 I 個 手 動 用 出 □ 埠 118 中 已 於 前 次 使 用 但 是 卻 選 擇 位 於 下 次 1 1 使 用 順 序 的 手 動 用 出 Ρ 埠 118 9 或 在 沒 有 下 次 使 用 顒 序 時 1 會 選 擇 最 初 的 手 動 用 出 口 埠 11 8 且 決 定 將 之 當 作 於 該 匣 ] 子 40的 搬 運 作 業 中 使 用 者 0 1 i 在 該 種 的 儲 料 器 出 庫 作 業 控 制 方 法 中 可 將 複 數 個 手 動 用 1 1 I 出 0 埠 118分派在1 台 處 理 裝 置 32 34上 〇 手 動 用 出 Ρ 堉 1 1 118 可 按 昭 預 先 被 決 定 的 順 序 大 致 均 等 地 被 使 用 〇 1 1 因 而 可 在 每 一 處 理 裝 置 32 34中 決 定 可 使 用 的 手 動 用 1 | 出 P 埠 118 而 在 手 動 用 出 Ρ 埠 118 有 複 數 個 時 就 可 解 1 I 消 因 處 理 裝 置 32 34之 各 白 的 裝 置 能 力 及 工 作 條 件 而 在 手 1 1 1 動 用 出 P 埠 118 之 使 用 混 合 狀 況 中 發 生 不 均 等 的 問 題 0 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（U ) 藉此，即使處理裝置32、34之各自的處理能力及工作狀 況有所不同，處理裝置32、34之各個亦可大致均等地使用 複數個手動用出口埠118，因而，在手動用出口埠118之使 用混合狀況中發生不均等的問題會變無。 較佳者為，主電腦50，可更進一步對一個處理裝置32、 34從輸入機構54中指定複數個可使用的手動用出口埠118 ，同時在每一埠118上向儲料器36發出的出庫作業指示之 中，亦可具有預先記憶未完成的作業指示之數的資料區域。 該主電腦50，在接受來自處理裝置32、3 4的匣子之投入 要求時，該處理裝置32、34會搜尋出可使用的手動用出口 埠118 。结果，可使用的手動用出口埠118在存有複數個 時，主電腦50，會比較被儲存在各自的埠118之資料區域 内的值*而選擇與最小值對應的手動用出口埠118 。主電 腦50，會將該埠資料區域之值加1，且將搬運作業指示發 送至36上，又，主電腦50，在完成作業時會將該值減1。 另外，在璋資料區域之值之中》當最小值有複數個時，主 電腦50，會任意選擇與該等值對應的埠118 。 在該種的儲料器出庫作業控制方法中，主電腦50，可將 複數個手動用出口埠118分派在1台處理裝置32、34上。又 ，主電腦50，對新的儲料器36發送出庫作業指示俾使該等 各自的作業完成前的作業數成為均等。 因而，可在每一處理裝置32、34中決定可使用的手動用 出口埠118，而在手動用出口埠118有複數個時，就可解 消因處理裝置32、34之各自的裝置能力及工作條件而在 (請先閱讀背面之注意事項再填寫本頁)34 上 时 'and report the gist to the host computer 50. Upon accepting this, the host computer 50 will know that the box 40 has arrived at the processing devices 32, 34, and instruct the processing devices 32, 34 through the communication instruction 58 to start the processing. In this way, the host computer 50 * will search for the processable box 40 stored in the restocker 36 according to the withdrawal request from the box 40 of the processing devices 32 and 34, and send it to an automatic truck 38 in pairs. Instructions for handling operations. Also * accepting this is the automatic handling vehicle 38 series M automatic transfer car's exit box for the pick-up operation of the box 40, the processing device 32, 34, the removal of the box 40, from the transfer station 150 to the pre-processing box 4 0 of the processing device 32, 34 E 62 ------------ installed -------- order (please read the precautions on the back before filling this page) This paper size applies to China Standard (CNS) A4 specification (210 乂 297 mm) A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (f Μ) 1 I The loading and unloading operation of the child 40 is from the transfer stage 150 to the moving van The loading and unloading operation of the processed box 40 after entering the P port 88 1 1 I— · series of operations. By borrowing 1 1 1 the moving truck 38 will compare each one separately from the processing device 32-please 1 1 34 to The moving operation of the box 40 of the α 璋 88 used by the white moving van and the reading from the white moving 1¾] readout \ port I of the port 40 to the box 40 of the processing device 32 34 In the case of lotus operation I | 1 can shorten the transportation time 0, which can reduce the white-moving items 1 I The working efficiency of the cart 38 can also reduce the time for the box 40 to be supplied to the processing device 32 and then filled 34. Page 0 -— ^ 1 I The host computer 50 can further process the processing device 32 34 from the input mechanism 54 1 1 to specify a plurality of usable manual output ports 118 9 and 9 At this time, 1 1 can also be set to set the order of use. 0 Processing Devices 32 34 can also use 2 manual 1 order II outlet ports 118 〇 When the input request of the box 40 is sent from the processing device 32 T »34 to the host computer 50 through the communication cable 58 although the host computer 50 has a plurality of 1 1 I manual output port □ Port 118 has been used in the previous time but was selected to be in the next manual output port 1 in the order of use. Port 118 9 or no In the next use sequence, 1 will choose the first manual outlet port 11 8 and decided to use it as the box] user 40 in the transport operation 0 1 i can be used in this kind of stocker outbound operation control method Multiple manual 1 1 I out 0 ports 118 are assigned to one processing device 32 34 0 manual out P 堉 1 1 118 can be used approximately evenly in the order determined in advance. 1 1 A processing device 32 34 decides the available manual use 1 | P port 118, and when there are a plurality of manual use P port 118, 1 can be solved. I I Elimination processing device 32 34's various device capabilities and working conditions In the hand 1 1 1 Unequal problems occurred in the mixed use of P port 118 0 1 1 This paper size applies to China National Standard (CNS) A4 (210X297 mm) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs System A7 B7 V. Invention (U) In this way, even if the respective processing capabilities and working conditions of the processing devices 32, 34 are different, each of the processing devices 32, 34 can use the plurality of manual outlet ports 118 on an equal basis. The problem of inequality in the mixed use of the outlet port 118 will disappear. Preferably, the host computer 50 can further designate a plurality of usable manual outlet ports 118 from the input mechanism 54 to one processing device 32, 34, and at the same time, each port 118 sends to the stocker 36 There may also be a data area in which the number of unfinished work instructions is stored in the out-of-work operation instructions. When the host computer 50 receives an input request for a cassette from the processing devices 32, 34, the processing device 32, 34 searches for an available manual outlet port 118. As a result, when there are a plurality of available manual outlet ports 118, the host computer 50 compares the value * stored in the data area of the respective port 118 and selects the manual outlet port 118 corresponding to the minimum value. The host computer 50 will increase the value of the data area of the port by 1 and send the moving operation instruction to 36. In addition, the host computer 50 will decrease the value by 1 when the operation is completed. In addition, among the values in the "data area", when there are multiple minimum values, the host computer 50 will arbitrarily select the port 118 corresponding to these values. In this method of controlling the stocker's outbound operation, the host computer 50 can assign a plurality of manual outlet ports 118 to one processing device 32, 34. In addition, the host computer 50 sends an out-of-stock operation instruction to the new stocker 36 so that the number of operations before completion of each of these operations becomes equal. Therefore, the manual outlet ports 118 that can be used can be determined for each processing device 32, 34. When there are a plurality of manual outlet ports 118, the respective device capabilities and operations of the processing devices 32, 34 can be eliminated Conditions (Please read the notes on the back before filling this page)
.-I I II 裝· 、\=° 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 64 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明 手動用出口埠118之使用混合狀況中發生不均等的問題。 藉此，即使處理裝置32、34之各自的裝置能力及工作狀 況有所不同，亦可對各自的處理裝置32、3 4大致均等地使 用複数個手動用出口埠118 ，因而，在手動用出口埠118 之使用混合狀況中發生不均等的間題會變無。 儲料器36，在透過通信電嫌58而接受來自主電腦50之自 動搬運車用出口埠86或至手動用出口璋118的匣子40之出 庫命令時，會著手於該搬運作業，同時亦可就作業開始時 、儲料器起重機80從儲料器架96取出適當的匣子40時及作 業完成時之各個將作業狀況透過通信電纜58向主電腦50報 告。又，該儲料器36，即使對從儲料器間搬運裝置控制器 66透過通信電纜58所送來的儲料器間搬運裝置用埠98的匣 子40之移動作業指示，就作業開始時、儲料器起重機80從 儲料器架96取出適當的匣子40時及作業完成時之各個將作 業狀況透過通信電纜58向儲料器間搬運裝置控制器66報告。 接受此的儲料器間搬運裝置控制器66，係透過通信電鏞 58向主電腦50進行對儲料器間搬運作業指示的作業狀況報 告。主電腦50，係接受作業狀況報告，且在顯示儲料器起 重機80從儲料器架96中取出的情況之作業狀況報告到來之 前，不向儲料器36及儲料器間搬運裝置42送出經由同埠的 匣子40之出庫作業指示及儲料器間搬運作業指示。 如此關於從主電腦50提供至儲料器36和儲料器間搬運裝 置42的作業指示，儲料器36，會報告顯示儲料器起重機80 從儲料器架96中取出適當的匣子40之狀況。此外，主電腦 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） „ c (讀先閱讀背面之注意事項再填寫本頁) 裝_ 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（CJ) 50，在顯示儲料器起重機80從儲料器架96中取出適當的匣 子40的情況之狀況報告到來之前，不向儲料器36及儲料器 間搬運裝置42送出經由同埠的匣子40之出庫作業指示及儲 料器間搬運作業指示。藉此，俾使主電腦50送至儲料器36 及儲料器間搬運裝置42的作業指示之數不變多之情況、和 儲料器36及儲料器間搬蓮裝置42在等待作業中不空閭之情 況得Μ兩立。 藉此，無論儲料器36及儲料器間搬運裝置42是否有足夠 的搬運能力，由於從主電腦50中作業指示沒有來所以可解 消無法掌握作為目標的作業次數的問題。又，主電腦50係 無闞於儲料器36及儲料器間搬運裝置42之作業狀況而送出 多數的作業指示，且在儲料器36及儲料器間搬運裝置42發 生故障時可解消其復舊所需花費時間的問題。 上述之主電腦50，由於知道儲料器36之收納場所為空的 所Μ具有顯示儲料器36之匣子40之裝置狀況的資料。但是 ，該資料，與儲料器控制器64所具有之實際的匣子40之裝 置資料不同者，可考慮係因主電腦50和儲料器控制器64之 間的通信線路不良、或主電腦50之系統當機造成資料喪失 等所發生者。該種情況，主電腦50考慮在儲料器36上有收 納匣子40之空位的場所。因此，主電腦50，從處理裝置32 、34接受匣子40之退出要求，且在自動搬運車38上使適當 匣子40從處理裝置32、34運至自動搬運車用人口埠88上。 接著當完成該作業時，主電腦50，會將該匣子40之入庫作 業指示送至儲料器36上。但是，就儲料器控制器64所管理 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） β e ^^1 n^i· n^n J J-l nn —I— . ^^^1 ^^^1 ^^^1 m^i ^^^1、一^. n^i 1^11 j «-- n ^ (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 _ 五、發明説明（d ) 之實際的儲料器36之收納場所而言由於沒有空位所以無法 進行自動搬運車用人口埠88上的匣子40之收納，且會發生 作業中止的狀況。同樣的狀況可考慮即使在匣子40之儲料 器間搬運作業中亦會發生。 此情況，雖然E子40到達儲料器間搬運裝置用璋98，但 是由於沒有匣子40之收納場所所Μ會Μ原狀中止作業。又 ，在手動用入口埠116上有匣子40時，主電腦50，可考慮 在36内有空位的場所，且雖將入庫的作業指示送至儲料器 36上*但是由於實際上沒有空位的場所所Μ會發生作業中 止的狀況。反之實際上無論是否在儲料器36上有空位的場 所，主電腦50會判斷儲料器36所收納的匣子40已滿載，而 會發生無法著手於與入庫相關的作業。 在發生該種問題時，為了可縮短因該問題而造成之儲料 器36相翮的作業之停止時間*而在迅速發現主電腦50所管 理的儲料器36内之匣子40的裝置資料和儲料器控制器64所 管理的裝置資料之不一致的方面就為必要而不可缺乏。因 此主電腦50，會依作業者而接受來自作業者終端機56的指 示，且對被指示的儲料器控制器64，報告被收納在儲料器 36内之所有的匣子40之ID資料。將該命令透過通信電纜58 向儲料器控制器6 4發送。接受此的儲料器控制器6 4，係將 本身所持有的匣子40之裝置資料全部透過通信電纜58向主 電腦50報告。接受回信的主電腦50，會進行被收納在本身 所持有的適當儲料器36的匣子40之ID資料和由儲料器控制 器6 4所報告的裝置資料之比較校對，且對於不同者顯示在 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ c 7 - (請先閱讀背面之注意事項再填寫本頁) 裝_ i tj A7 A7 經濟部中央標準局員工消費合作社印製 B7 五、發明説明（f。） 作業者終端機56上，並通知作業者。 如此在本實施形態中的主電腦50，在自動搬運車用入口 埠88、儲料器間搬運裝置用埠98、或手動用入口埠116上 發生匣子40停止而入庫作業不被執行的問題、及無論是否 在儲料器36上有收納場所仍無法著手與入庫作業相關的作 業等的問題時，會按照來自作業者終端機56之作業者的指 示進行被收納在主電腦50所持有之儲料器36内的匣子40之 ID資料和儲料器控制器64所具有之實際被收納的匣子40之 ID資料的比較校對。又，將其差異點顳示在作業者終端機 56上，且可向作業者通知在何處有問題。結果，作業者會 採取適當的處置，且合併混合被收納在主電腦50和儲料器 控制器64之儲料器36内的匣子40之ID資料，就可恢復停止 前述之作業的狀況。 又，主電腦50在向儲料器控制器64發送詢問之際，雖可 一次詢問一個儲料器，但是在資料量多的情況等例如圖7A 、7B 所示之STK01至04般可K儲料器單元單位進行詢問· 上述之主電腦50係按照由作業者終端機56所輸入的作業 者之指示*對儲料器控制器64詢問被收納在儲料器36內的 匣子40之ID資料。進行該ID f料和被收納在本身所持有的 儲料器36内的匣子40之ID資料的比較校對。ID資料有所差 異之原因，有Μ下二種情況，考慮主電腦50有匣子40而考 慮儲科器控制器64沒有的情況、和與此相反考慮主電腦50 沒有匣子40而考慮儲料器控制器64有的情況。無論是否與 此有關，主電腦50不做兩者之區別而將ID資料之差異顯示 本紙張尺度適用中國國家標準（CNS ) A4規祐（210X297公釐） β 〇 (請先閱讀背面之注意事項再填寫本頁) 裝· --° mi - - _ 1 · 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（CΠ) 在作業者終端機56上。 作業者，就儲料器控制器64之資料為正確的情況時考慮 主電腦50沒有的匣子40，會利用作業者終端機56將該資料 追加在主電腦50之資料上。反之就考慮主電腦50為有的匣 子40而言，會利用作業者终端機56從主電腦50之資料中刪 除該資料。如此對於2個原因之各個的處理會不同《但是 ，在上述之主電腦50中，由於對應2個原因所區別的校對 结果未被顯示在終端機56上，所以有因作業者而在主電腦 50之ID資料的復舊上須花費時間的問題。 因此主電腦50，在校對由儲料器36所報告得來的資科和 被收納在其本身所有的儲料器36內的匣子40之ID資料之際 ，亦可區別考盧主電腦50有而考盧儲料器控制器64沒有的 匣子40之ID資料、和與此相反考慮主電腦50沒有而考慮儲 料器控制器64有的匣子40之ID資料而輸出至作業者終端機 56上。 如上所述，主電腦50的校對結果，由於可區別考慮主電 腦50有匣子40而考慮儲料器控制器64沒有的情況、和與此 相反考慮主電腦50沒有匣子40而考應儲料器控制器64有的 情況且顯示在作業者終端機56上，所Μ看到此的作業者就 可明確復舊作業的内容，且可縮短復舊所需的時間。 上述之主電腦50*係按照來自作業者之作業者終端機56 的指示，對儲料器控制器64詢問被收納在儲料器36内的匣 子40之ID資料，且進行該資料和被收納在主電腦50所持有 之儲料器36內的匣子40之ID資料之比較校對，並僅將不同 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） _ η _ (讀先閱讀背面之注意事項再填寫本頁) 裝. 訂 丨^ml -.....I mj ΐ: I . A7.-II II Packing ·, \ = ° This paper size is applicable to Chinese National Standard (CNS) A4 (210X 297 mm) 64 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention Manual export port 118 Uneven problems occur in mixed use situations. Thereby, even if the respective device capabilities and working conditions of the processing devices 32 and 34 are different, the plurality of manual outlet ports 118 can be used approximately equally for the respective processing devices 32 and 34, and therefore, the manual outlets 118 are used. The problem of inequality in the mixed use of port 118 will disappear. When the stocker 36 accepts a storage order from the port 86 for automatic trucks of the main computer 50 or the box 40 to the manual outlet 璋 118 through the communication terminal 58, it can also start the transportation operation, and it can also At the beginning of the operation, when the stocker crane 80 takes out the appropriate cassette 40 from the stocker rack 96 and when the work is completed, the work status is reported to the host computer 50 through the communication cable 58. In addition, even if the stocker 36 instructs to move the box 40 of the inter-stocker conveying device port 98 sent from the inter-stocker conveying device controller 66 through the communication cable 58, when the work is started, When the stocker crane 80 takes out the appropriate cassette 40 from the stocker rack 96 and when the work is completed, each of the work statuses reports the operation status to the stocker transfer device controller 66 through the communication cable 58. The inter-stocker transfer device controller 66 receives the operation status report of the inter-stocker transfer operation instruction to the host computer 50 through the communication unit 58. The host computer 50 receives the operation status report, and does not send it to the stocker 36 and the inter-stocker conveying device 42 until the operation status report showing that the stocker crane 80 is taken out from the stocker rack 96 arrives. Through the out-of-warehouse operation instruction and the storage operation instruction of the container 40 in the same port. In this way, regarding the work instructions provided from the host computer 50 to the stocker 36 and the inter-stocker carrying device 42, the stocker 36 will report that the stocker crane 80 removes the appropriate box 40 from the stocker rack 96. situation. In addition, the paper size of the main computer applies the Chinese National Standard (CNS) A4 specification (210X297 mm) „c (Read the precautions on the back before filling this page) Packing _ Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 V. Description of the invention (CJ) 50: Do not report to the stocker 36 and the inter-stocker conveying device 42 until the status report indicating that the stocker crane 80 has taken out the appropriate box 40 from the stocker rack 96 has arrived. Send out the storage operation instructions and the storage operation instructions between the storage boxes 40 through the same port. As a result, the number of operation instructions sent from the main computer 50 to the storage materials 36 and the storage device 42 between the storage materials remains unchanged. The situation is different from the situation where the storage device 36 and the storage device 42 between the storage devices are not empty during the waiting operation. Therefore, whether the storage device 36 and the storage device 42 are sufficient Since the operation instruction is not provided from the host computer 50, the problem of being unable to grasp the number of times of the target operation can be eliminated. The host computer 50 is not limited to the operation of the stocker 36 and the storage device 42 between the stockers. Send out more If the storage device 36 and the storage device handling device 42 are out of order, the problem of the time it takes to restore the storage device can be eliminated. The above-mentioned host computer 50 knows that the storage place of the storage device 36 is empty. Has data showing the device status of the box 40 of the stocker 36. However, if this data is different from the actual device 40 device data of the stocker controller 64, it may be considered to be due to the host computer 50 Occurs if the communication line between the controller and the stocker controller 64 is poor, or the system of the host computer 50 is down due to data loss, etc. In this case, the host computer 50 considers that there is a space for the storage box 40 on the stocker 36 Therefore, the host computer 50 accepts the withdrawal request of the cassette 40 from the processing apparatuses 32 and 34 and transports the appropriate cassette 40 from the processing apparatuses 32 and 34 to the population port 88 for the automated transport vehicle on the automatic transport vehicle 38. Then when the operation is completed, the host computer 50 sends the storage operation instruction of the box 40 to the stocker 36. However, the Chinese paper standard (CNS) Α4 is applied to the paper size managed by the stocker controller 64 Specifications (2 10X 297 mm) β e ^^ 1 n ^ i · n ^ n J Jl nn —I—. ^^^ 1 ^^^ 1 ^^^ 1 m ^ i ^^^ 1, one ^. N ^ i 1 ^ 11 j «-n ^ (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 _ V. Description of the invention (d) The actual stocker 36 As there is no space in the storage place, it is impossible to store the cassette 40 on the population port 88 of the automatic transporter, and the operation may be suspended. The same situation can be considered even during the transportation operation between the bins of the cassette 40 will happen. In this case, although the E-subsidiary 40 reaches the 璋 98 for the transport device between the stockers, the operation is suspended as it is because the storage place without the cassette 40 will be left untouched. When there is a box 40 on the manual inlet port 116, the host computer 50 may consider a place where there is an empty space in 36, and although the storage operation instruction is sent to the stocker 36 *, there is actually no empty space. There will be a situation where work is suspended at the site. Conversely, whether or not there is a vacant place on the stocker 36, the host computer 50 will judge that the magazine 40 stored in the stocker 36 is fully loaded, and it may happen that operations related to storage cannot be started. When such a problem occurs, in order to reduce the stopping time of the operation of the stocker 36 caused by the problem *, the device data and the device data of the box 40 in the stocker 36 managed by the host computer 50 are quickly found. Inconsistent aspects of the device data managed by the stocker controller 64 are necessary and not indispensable. Therefore, the host computer 50 accepts instructions from the operator terminal 56 according to the operator, and reports the ID data of all the boxes 40 stored in the stocker 36 to the designated stocker controller 64. This command is transmitted to the stocker controller 64 through the communication cable 58. The stocker controller 64 receiving this report all the device data of the cassette 40 held by itself to the host computer 50 through the communication cable 58. The host computer 50 receiving the reply will compare and verify the ID data of the box 40 stored in the proper stocker 36 held by itself and the device data reported by the stocker controller 64. Shown on this paper scale are Chinese National Standard (CNS) A4 specifications (210X297 mm) _ c 7-(Please read the precautions on the back before filling out this page) Packing _ i tj A7 A7 Staff Consumer Cooperatives, Central Standards Bureau, Ministry of Economic Affairs Print B7 V. Description of the invention (f.) The operator terminal 56 and notify the operator. As described above, in the host computer 50 in this embodiment, the problem arises that the storage box 40 is stopped and the storage operation is not performed at the entrance port 88 for the automatic transfer truck, the port 98 for the transfer device between the stockers, or the entry port 116 for the manual operation. And if there is a problem such as the work related to the storage operation even if there is a storage place on the stocker 36, it will be stored in the host computer 50 according to the instructions from the operator of the operator terminal 56. The ID data of the box 40 in the stocker 36 and the ID data of the box 40 actually stored in the stocker controller 64 are compared and compared. In addition, the difference point is displayed on the operator terminal 56 in a short time, and the operator can be notified of the problem. As a result, the operator will take appropriate measures and merge and mix the ID data of the cassette 40 stored in the main computer 50 and the stocker 36 of the stocker controller 64 to restore the state of stopping the aforementioned operation. When the host computer 50 sends an inquiry to the stocker controller 64, it can inquire about one stocker at a time, but when there is a large amount of data, for example, STK01 to 04 shown in Figs. 7A and 7B can be stored. Inquiry by the feeder unit. The above-mentioned host computer 50 is in accordance with the operator's instructions inputted from the operator terminal 56 * to the stocker controller 64 to inquire the ID data of the box 40 stored in the stocker 36. . This ID f is compared with the ID data of the cassette 40 stored in the stocker 36 held by the ID f. The reason for the difference in the ID data is the following two cases. Consider the case where the host computer 50 has a box 40 and the reservoir controller 64 does not, and the contrary consider the host computer 50 without a box 40 and consider the stocker. The controller 64 may have it. Regardless of whether it is related to this, the host computer 50 does not make the difference between the two and displays the difference in ID data. This paper size applies the Chinese National Standard (CNS) A4 regulations (210X297 mm) β 〇 (Please read the precautions on the back first (Fill in this page again) Install ·-° mi--_ 1 · Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (CΠ) on operator terminal 56. When the operator considers that the data of the stocker controller 64 is correct, the operator considers the box 40 which is not in the host computer 50, and uses the operator terminal 56 to add the data to the data of the host computer 50. Conversely, considering that the host computer 50 has a box 40, the operator terminal 56 is used to delete the data from the data of the host computer 50. In this way, the processing for each of the two reasons will be different. "However, in the above-mentioned host computer 50, because the proofreading result that is different for the two reasons is not displayed on the terminal 56, there are It takes time to restore the ID data of 50. Therefore, when the master computer 50 collates the ID data reported by the stocker 36 and the ID data of the box 40 stored in all of the stocker 36 itself, it can also distinguish whether the Kaul master computer 50 has On the other hand, the ID data of the cassette 40 not included in the Kauru stocker controller 64 and the ID data of the cassette 40 included in the stocker controller 64 considering the absence of the host computer 50 are output to the operator terminal 56. . As described above, the results of the proofreading of the host computer 50 can be considered separately because the host computer 50 has a cassette 40 and the stocker controller 64 is not. On the contrary, the host computer 50 does not have a cassette 40 and the stocker is considered. In some cases, the controller 64 is displayed on the operator's terminal 56. The operator who sees this can clearly determine the content of the restoration operation, and can shorten the time required for restoration. The above-mentioned host computer 50 * asks the stocker controller 64 for the ID data of the box 40 stored in the stocker 36 according to the instructions from the operator's operator terminal 56 and performs the data and storage. Compare and collate the ID data of the box 40 in the stocker 36 held by the host computer 50, and apply only the different paper sizes to the Chinese National Standard (CNS) A4 specification (210X 297 mm) _ η _ (read (Please read the precautions on the back before filling in this page.)
五、發明説明（丨:7) 經濟部中央標準局員工消費合作社印製 向因上被改36發56匣本。，器匣，顯 收資位 納 朝。56從部 器短 櫬的在對50料納異被 之ID及㈣收 會料機許全 料嫌 端內納校腦儲收差不50之0._ 示 者資端允料 儲幅 终36收較電與賴有亦 腦40FNM顯 業的終之資 之大 者器被比主使信沒然 電子子 Θ 與 作有者者ID50可 業料和之而即50上當 主匣架 ， 具 業業之 腦且 作儲料 料因，腦料， 自答、.做料 此所作作40電， 之在資資。時電資致 來回NO_ 資 因50在得子 主業 者納該置料理主ID一 對50元UID 。 腦示獲匣 在作 業收行裝資管和之不 僑腦單 0之 6±電顯56的。納除 作被進之ID所況40會 ，電器 U40 56主果機内者收fil自問係40之場情子不36主料 J 子 機更結端36告被或 來詢，子40納之匣果 器向儲係匣 端變之终器報行加 照6450匣子收40在結 料，之0·的 終需對者料所進追 按器腦的匣的子於的。儲問料i5料 者必校業儲64次之。係制電内的内匣由對上此詢資tig資 業且將作之器 一 料間，控主36納36納同校56在料所£||置 作，會從有制可資時50器。器收器收不之機，資埸 Μ 裝 該56，由持控，ID舊腦料料料被料際所50端7Β置納tfcw之 在機50藉所器者之復電儲資儲較儲實場腦終、裝收gjft36 示端腦可身料業40的主對置之比之在納電者7A的其is器 顧终電亦本儲作子時之，裝有只4064收主業圖40為 4 料 料者主時在由此匣題述示之持，子器之 Μ 作照子做。.儲 資莱，同納成藉的間上指40所時匣制40Μ於參匣和No之 的作此，收寫 内生 的子身此在控子所示 納料置有 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 70 裝------訂 (請先閱讀背面之注意事項再填寫本頁) A7 A7 經濟部中央標準局員工消費合作社印製 五、發明説明（丨;8 ) 埸所的儲料器單元No.、架子No.及位置No.做比較校對， 並非僅針對ID資料之差異進行確認就關於收納場所資料之 差異亦進行確認。主電腦50，係對與該等資料不同者顯示 在作業者終端機56上。 如上所述，儲料器控制器64對被收納在來自主電腦50之 儲料器36内的匣子40之裝置資料詢問，報告被收納之匣子 40的ID資科和其收納場所資料。又，接受此的主電腦50自 進行與本身所持有之裝置資料的比較校對之際不僅將ID資 料當作比較校對的對象就關於收納場所資料亦當作比較校 對的對象。因此，可K收納場所單位把握對於具有主電腦 50和儲料器控制器64之被收納在儲料器36内得匣子40之裝 置資料的不一致。又，即使在收納容量較大的儲料器36中 亦可容易發現造成問題的匣子40。 參照圖12至圖14，說明儲料器之其他的構成例。 儲料器190包含有與儲料器36之自動搬運車用出口埠86 相同的自動搬運車用出口埠196。但是，可載置於該埠196 上的匣子40之個數，係被決定成在處理裝置32、34之投入 要求，即與自動搬運車用出口埠196所應付出之最大的匣 子數為相同者。此情況有2個匣子40可載置於該埠196上。 處理裝置32、34係對主電腦50透過通信電黷58而進行匣 子40之投入要求。此時處理裝置32、34會進行作為該裝置 之處理單位的2個匣子40之投入要求。接受此的主電腦50 係判斷在適當儲料器190上是否有可Μ該處理裝置32、34 處理的匣子40。在可處理的匣子40有2個以上時，在將出 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） m ^^^1 —^ϋ . - ii ^^^1、一eJ_ ι — ^^^1 In -^i— n. ^ 11 < (讀先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印^ A7 B7 五、發明説明（ί;Π) 庫的匣子數特定為2個之後，會對儲料器控制器64，送出2 個匣子40之自動搬運車用出口埠196的出庫作業指示。接 受此的儲料器控制器64，係利用儲料器起重機80將第一個 匣子40運至自動搬運車用出口交接埠192上。儲料器控制 器64，係驅使前進移動裝置200而將自動搬蓮車用出口交 接埠192上的匣子40往前送至自動搬運車用出口璋196上 。與第一個II子40之出庫作業平行，而第二個匣子40之出 庫作業係對Κ同樣的顒序不同的裝置進行。當2個匣子對 自動搬運車用出口埠196出庫時，儲料器控制器64會對主 電腦50進行作業完成報告。 接受來自儲料器控制器64之出庫作業之完成報告的主電 腦50，接著會對自動搬運車38透過通信電嫌58下達將被載 置於自動搬運車用出口埠196上的2個匣子40運至處理裝置 32、34之匣子台階172、182上的命令。接受該命令的自動 搬運車控制器60，會從具有複數個的自動搬運車38之中， 分派作業至最適於該搬運作業者上，且驅使控制局側通信 單元62和搬運車側通信單元142 ，一面進行無線通信而一 面進行匣子40之搬運作業。 就自動搬運車38之匣子40的搬運作業加Μ說明。首先台 車140從待機位置按照被貼附在地板上的感應帶156朝向 作為搬運處的儲料器190之自動搬運車用出口埠196 。當 台車140到達自動搬蓮車用出口埠196時，自動搬浬車38 首先會透過對自動搬運車通信單元102，進行第一個匣子 40是否有存在於自動搬運車用出口埠196上。若有第一個 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） J i 裝 訂------外—1----— (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印裂 A7 B7 五、發明説明（7丨丨） 匣子40，則自動搬運車38，會驅使機器臂144、機器手146 及機器手爪148 ，在自動搬運車用出口埠196上取入第一 個匣子40，並置放在本身的移載台150上。關於第二個匣 子40亦按照同樣的_序，置放在與本身不同的移載台150 上。當該載置作業完成時，台車140，會再次從儲料器190 朝作為搬運處之處理裝置32、34所指示的匣子台階172、 182移動。當台車140 到達匣子台階172、182時，自動搬 蓮車38，會Μ與剛才相反的順序將移載台150上的適當匣 子40依序置放在被指示的匣子台階172、182上。當被指示 之所有的作業完成時自動搬運車控制器60會對主電腦50透 過通信電纜58進行作業完成報告。 接受利用自動搬運車38Μ完成2個匣子40之處理裝置32 、34的供給作業的報告之主電腦50，係透過通信電鑭58對 處理裝置32、34指示處理之開始。 如此藉由將可載置於儲料器190之自動搬運車用出口埠 196的匣子40之個數設成與應朝該塢付出的處理裝置32、 3 4所投人要求的匣子40之數相同，就可在來自處理裝置32 、34之投人要求的匣子40之個數單位中進行從儲料器190 中之收納場所至自動搬運車用出口璋196的出庫作業、及 從自動搬蓮車用出口埠196至處理裝置32、34之匣子台階 172、182的搬運作業之一系列的作業。 因而，來自處理裝置32、34之投入要求的匣子單位在多 於可載置於自動搬蓮車用出口埠196上的匣子個數時，超 過該匣子個數的匣子40不會變成後續之搬運作業。因此， 本紙張尺度適用中國國家標準（CNS ) Α4規桔（210X297公釐） η 。 (請先閱讀背面之注意事項再填寫本頁) 裝 、1Τ .I -~----. 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（71) 可解消位於處理裝置32、34之匣子台階172、182首先到達 的匣子40，在後鑛之匣子40到來之前不能開始進行處理裝 置32、3 4之處理而須等待的問題。 藉此，先行之匣子40在到達處理装置32、34之匣子台階 172、182之後，不會使處理開始的時刻依後鱅之匣子40而 延遅。 儲料器190 ，更包含有與黼料器36之自動搬運車用入口 璋88同樣的自動搬蓮車用入口璋198 。但是，可載置於該 埠198上的匣子40之個數，被決定成與處理裝置32、34要 求退出之最大的匣子數為相同者。此情況2個匣子40可載 置於該璋198上。 處理装置32、34係M2匣子單位進行匣子40之退出要求 。接受此的主電腦50係在確保該等匣子40之儲料器190的 收納場所之後，將搬運作業指示一次送至自動搬蓮車38上 。由主電臞50接收最大2個匣子40之搬運作業指示的自動 搬運車控制器60，係從具有複數個的自動搬運車38中將作 業分派在最適於該搬運作業者上，且使之進行不利用控制 局側通信單元62和搬運車側通信單元142進行無線通信的 搬運作業。 就自動搬運車38之匣子40的搬運作業加Μ說明。首先台 車140從待機位置按照被貼附在地板上的感應帶156 ，朝 向作為搬運處的處理裝置32、34。當台車140到達處理裝 置32、34時，自動搬運車38首先會透過對自動搬運車通信 單元174進行匣子40是否有存在於匣子台階172、182上。 本紙張尺度適用中國國家標準（CNS ) Α4規梏（210Χ 297公釐） - 3-- —^-»-_ I - -- I · n —II ! 11 X» 為^-β (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局貝工消費合作社印製 A7 B7 五、發明説明（7:2) 若在匣子台階172、182上有第一涸匣子40，則自動搬運車 38，會驅使機器臂144、機器手146及機器手爪148，取入 位於匣子台階172、182上的第一個匣子40，並置放在本身 的移載台150上。關於第二個匣子40亦按照同樣的順序， 從匣子台階172、182取人於不同的移載台150上。當2個匣 子40之載置作業完成時，台車140會再次從搬蓮處處理裝 置32、34朝作為搬蓮處之儲料器190所指示的自動搬運車 用人口埠198 移動。當到達自動搬運車用入口埠198時， 會Μ與剛才相反的顒序將2個匣子40依序從移載台150置放 在自動搬運車用入口埠198上。當被指示之所有的作業完 成時自動搬蓮車控制器60會對主電腦50透過通信電纜58進 行作業完成報告。 接受來自自動搬蓮車38之作業完成報告的主電腦50，會 對儲料器190，進行來自2個匣子40之自動搬運車用入口埠 198的入庫作業指示。按照透過通信電嫌58而送來的該入 庫作業指示，儲料器控制器64在儲料器架96上確保匣子40 之收納場所之後，就會著手於入庫作業。已著手於入庫作 業的儲料器190，首先會驅使前進移動裝置202而使第一個 匣子40從自動搬運車用入口埠198移動至自動搬蓮車用入 口交接埠194上。當移動作業完成時，儲料器起重機80會 開始移動，而自動搬運車用入口交接埠194上的匣子40就 會朝已更加受到儲料器控制器64確保的儲料器架96上之收 納場所運送。更且與第一個匣子40之作業平行而第二個匣 子40之出庫作業Μ同樣的順序對不同的載置點進行。當2 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） _ 7 r: _ --J-------裝------訂------冰—----- (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印聚 Μ Β7 五、發明説明Π'Ί ) 個匣子被收納在儲料器架96上的收納場所內時就完成一糸 列的作業，而儲料器控制器64會透過通信電纜58對主電腦 50進行作業完成報告。 如上所述，將可載置於儲料器190之自動搬運車用入口 埠198的匣子40之個數，設成與可使用該埠198之處理裝置 32、34所要求的匣子40之退出要求數相同。藉此，就可在 處理裝置32、34之退出要求個數單位中進行從處理裝置32 、34至自動搬蓮車用人口璋19δ的匣子40之搬運作業及從 自動搬運車用入口璋198至儲料器190之收納場所的匣子 40之入庫作業之一系列的作業。 因而，來自處理裝置32、34之退出要求的匣子單位在多 於可載置於自動搬運車用入口埠198上的匣子個數時，超 過該匣子個數的匣子40不會被留在處理裝置32、34之匣子 台階172、182上。因而，可解消由於在該匣子40之搬運作 業等待時間變長的同時匣子台階172、182之空位延遲而須 花時間在對處理前匣子40之處理裝置32、34的供給的問題。 藉此，在處理後匣子40之處理裝置32、34的匣子台階 172、182之殘留會變無，且匣子台階172、182在處理後， 短時間内為空，而新的處理前匣子40不延遲且可從儲料器 1 9 0出庫及供給。 參照圖13，儲料器190 ，更包含有與儲料器36之手動用 出口埠118同樣的手動用出口埠210。但是，可載置於該埠 210上的匣子40之個數，被決定成與處理裝置32、34要求 投入的最大之匣子數為相同者。此情況2個匣子40就可載 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） _ „ (請先閲讀背面之注意事項再填寫本頁) .J----- - 1 4ΙΊ · 裝 .—IJ -- · 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明Γ7 1 ) 置於該埠上。 例如就未具備有自動搬運車38之儲料器190和處理由該 儲料器190所出庫的匣子40之處理裝置32、34加Μ考慮。 處理裝置32、34係透過通信電纜58向主電腦50進行匣子投 入要求。此時處理裝置32、34，係M2匣子單位進行匣子 40之投人要求。接受此的主電腦50係向儲料器36詢問有無 可Μ處理裝置32、3 4處理的匣子40。在可處理的匣子40有 2個Μ上時，在將匣子40特定為2個之後，會對儲料器控制 器64送出匣子40之手動用出口璋210的出庫作業指示。接 受此的儲料器控制器64係使用儲料器起重機80將2個匣子 40依序朝持有2個匣子40之載置點的手動用出口埠2 10蓮送 。儲料器控制器64，係進行在儲料器190之操作面板121 允許手動用出口璋210上的匣子40之取出的顯示。看到此 的作業者，會從手動用出口璋210中取出2個匣子40，且操 作操作面板121將完成取出作業的情況通知儲料器190 。 接受此的儲料器190會判斷出庫作業已完成，且對主電腦 50透過通信電纜58進行該完成報告。取出匣子40的作業者 ，由於不知道發出投入要求的處理裝置32、3 4是為哪一個 所Μ會向主電腦50之作業者終端機56調査發出投入要求的 處理裝置32、34。作業者會將匣子40蓮至發出投人要求之 處理裝置32、34的適當匣子台階172、182上。 如此地將可載置於手動用出口埠210上的匣子40之個數 設定成與處理裝置32、34要求投入的匣子40之數為相同。 藉此，就可在處理裝置32、34所投人要求的匣子40之個數 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 77 (請先閱讀背面之注意事項再填寫本頁) 裝· --1H · A7 A7 經濟部中央標準局員工消費合作社印製 五、發明説明（7二） 單位中進行從儲料器190之收納場所至手動用出口埠210的 出庫作業、及從手動用出口埠210至處理裝置32、34之匣 子台階172、182之作業者的搬運作業之一系列的作業。因 而，來自處理裝置32、34之投入要求的匣子單位在多於可 載置於手動用出口埠210上的匣子個數時，超過該匣子個 數的匣子40會變成後鑛的出庫作業且可解消作業者之作業 效率降低的問題。 藉此，就可減少作業者之等待時間，同時可縮短至處理 装置32、34之匣子40的供給時間。 參照匾4及圖5，儲料器36，係如上所述在儲料器間搬運 裝置用埠98上之儲料器間搬運裝置42具備有儲料器間搬運 裝置用埠外遮蔽門122和使該埠升降的儲料器間搬運裝置 用升降機124，而在自動搬運車用出口交接埠192和自動搬 運車用入口交接璋194之自動搬蓮車38側安裝自動搬運車 用埠外遮蔽門90，進而在手動用入口埠116和手動用出口 埠2 1 0之作業者側備附有手動用埠外遮蔽門11 4。K下係就 該等遮蔽門之動作做簡單說明。另外，在沒有儲料器36之 作業時該等的遮蔽門會處於全部被關閉的狀態。 首先就自動搬運車用埠外遮蔽門90加以敘述。當有來自 處理裝置32、34之匣子40的投入要求時主電腦50會從被收 納在適當儲料器36内的匣子40中搜尋出可處理的匣子40, 且對髂料器36送出該匣子40的出庫之作業指示。接受此的 儲料器控制器64係利用儲料器起重機80將位於儲料器架96 上的適當匣子40運至自動搬運車用出口交接埠100上。接 本紙張尺度適用中國國家標準（CNS ) A4規桔（210X297公釐） ^。 (請先閱讀背面之注意事項再填寫本頁) 裝. 經濟部中央標準局員工消費合作社印製 A 7 B7 五、發明説明（7Ί;) 著儲料器控制器64，會從自動搬運車用出口交接埠100驅 使前進移動裝置84使該匣子40移動至自動搬蓮車用出口埠 86上。此時，由於自動搬運車用埠外遮蔽門90被闞閉所Μ 首先會在使該遮蔽門90下降且打開之後，使匣子40朝自動 搬運車用出口埠86移動。當該移動作業完成時儲料器控制 器6 4會使處於開狀態的自動搬運車用埠外遮蔽門9 0上升且 闥閉。Μ此完成一系列的出庫作業，而儲料器控制器6 4會 對主電腦50進行作業完成報告。 又，在將自動搬運車用入口埠88上的匣子40予以入庫時 ，儲料器控制器64會基於來自主電腦50的入庫作業指示使 用前進移動裝置84使自動搬運車用入口埠88上的匣子40首 先移動至自動搬運車用入口交接埠104上。此時，由於自 動搬運車用埠外遮蔽門90被翮閉所Μ首先在使該遮蔽門90 下降且打開之後，會使匣子40朝自動搬運車用入口交接埠 104移動。當該移動作業完成時，儲料器控制器64，使處 於打開狀態之自動搬運車用埠外遮蔽門90上升且關閉。而 當該作業完成時，儲料器控制器64會驅使儲料器起重機80 而將該匣子40收納在儲料器架96上，Κ完成作業，並將該 要旨向主電腦50報告。 其次就手動用埠外遮蔽門114加以敘述。當有來自處理 裝置32、34的投入要求時，主電腦50會從被收納在適當儲 料器36内的匣子40中搜尋出可處理的匣子40，且對儲料器 36發送出庫的作業指示。接受此的儲料器控制器64，係利 用儲料器起重機80將位於儲料器架96上的適當匣子40運至 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 79 - -- ·- - - 1 : ..... 批衣 n I (請先閱讀背面之注意事項再填寫本頁) '-=0 丨 外 --I— I -J - 經濟部中央標準局員工消費合作社印聚 ΑΊ Β7 五、發明説明（Τ’/ ) 手動用出口埠118上。接著，在儲料器36之操作面板121上 進行允許手動用出口埠118上的適當匣子40之取出的顯示。 看到此的作業者為了要打開手動用埠外遮蔽門114而操 作操作面板121 。接受該操作儲料器控制器64會使該遮蔽 門114下降且打開。之後，作業者會從同埠中取出該匣子 40。作業者藉由再次操作操作面板121 Μ使打開狀態的遮 蔽門114上升闞閉，一系列的出庫作業就完成。儲料器控 制器64，會對主電腦50透過通信電钃58進行作業完成報告。 又，透過手動用入口埠116將位於作業者手邊的匣子40 入庫於儲料器36内時，作業者藉由操作操作面板121 ，儲 料器控制器64就會使被闞閉的手動用埠外遮蔽門114下降 且打開。儲料器控制器64，係將亦可將匣子40置放在手動 用入口璋116上的情況顯示在操作面板121上。看到此的 作業者就會將匣子40置放在同埠116上，且再次操作操作 面板121 。藉由該操作而知道匣子40被置放在手動用入口 埠116上的儲料器36，會使手動用埠外遮蔽門114上升且 闞閉，再利用ID卡讀寫裝置120讀取被記錄在適當匣子40 之ID卡72上的資訊，且將該資訊透過通信電纖58向主電腦 50報告。主電腦50藉此就可知道作業者運來匣子40之情況 ，而對儲料器36發送該匣子40之人庫的作業指示。儲料器 36會驅使自動搬運車用出口埠86而將位於手動用人口埠 116的匣子40收納在儲料器架96上以完成人庫作業。 最後*就儲料器間搬運裝置用埠外遮蔽門122加Μ敘述 。匣子40係從搬運處儲料器36載置於儲料器間搬運裝置42 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） _ _ (請先聞讀背面之注意事項再填寫本頁) ,3 «— Μ · 裝. 、1Τ -— 吟 :1 - - - a-··- 1 A7 A7 經濟部中央標準局員工消費合作社印製 ——_-_____ 五·、發明説明（7¾ ) 之台車162上再被蓮至儲料器間搬蓮裝置用埠98上。當台 車162到達時儲料器間搬蓮裝置控制器66，會透過通信電 鳙58向儲料器控制器64委託將台車162上的匣子40載置於 儲料器間搬運裝置用埠98上。 接受委託的36，首先使儲料器間搬運裝置用埠外遮蔽門 122往横移動並打開，再驅使儲料器間搬運裝置用升降機 124 Μ使儲料器間搬蓮裝置用埠98上升。當該上升作業完 成時儲料器控制器64利用移載機82將台車162上的匣子40 往儲料器間搬運裝置用埠98蓮送。接著儲料器控制器64會 利用儲料器間搬運裝置用升降機124 Μ載置匣子40之狀態 使儲料器間搬運裝置用埠98朝下方之位置移動。儲料器控 制器64，在移動完成後，會鼷閉儲料器間搬運裝置用埠外 遮蔽門122 ，且利用儲料器起重機80將匣子40收納在儲料 器架96上。以此完成一系列的作業，且儲料器控制器64會 將該要旨透過通信電纜58向儲料器間搬蓮裝置控制器66報 告。又，在將被收納在儲料器36内的匣子40送出至台車 162上之際，儲料器36會按照儲料器間搬蓮裝置控制器66 之指示，使用與現在所逑之顒序相反的顒序利用儲料器起 重機80、儲料器間搬運裝置用埠外遮蔽門122 、儲料器間 搬蓮裝置用升降機124及移載機δ2進行作業。 如此藉由在成為儲料器36和外雰圍氣之接點的自動搬蓮 車用入口交接埠104、自動搬蓮車用出口交接埠1〇〇、餘料 器間搬運裝置用埠98、手動用入口埠116 、及手動用出口 埠118的儲料器36之外周上設置用Μ遮蔽外雰圍氣的鬥， 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 〇 (請先閱讀背面之注意事項再填寫本頁) 裝 、π -I ^ J-! 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（了d)就可從外部隔離儲料器36之内部。 習知Μ來，儲料器36由於係透過自動搬運車用入口交接 埠104、自動搬運車用出口交接埠100、儲料器間搬運裝置 用埠98、手動用入口璋116、及手動用出口埠118而在周圍 的環境中開放，所Μ灰塵或霧氣會進入儲料器36内*且附 著在被保管的匣子40之晶圓70上而有帶來不良影響的可能 性之問題。但是藉由上述之構成，就可獲得不會使灰塵或霧氣混入 儲料器36内部，且不會帶給被收納在被管理的匣子40內的 部 外 從 。 係 果於 效由 的， 響36 影器 良料 不儲 70述 圓上 晶 間12 器門 料蔽 儲遮 之外 8 I 9 埠 埠用 用置 置裝 裝運 tMU ηκ 遵拥 搬間 間器 器料 i 機 降 升 用 置 裝 遘 搬 間 在 又 離運和動 隔搬 2 自 料 儲 在Μ 所 部 内 其 儲器 有料 備 儲 具的 上降 側升 2 i 4掉 置該 裝使 埠 接 交 Ρ 出 用 一 W 連 搬 動手 自在 之 而 4 進 illos 接門 交蔽 口遮 入外 用埠 車用 運車 nx E 掷遵 動搬 自動 和自 ο 裝 10安 埠□ 出 用 動 τηπ 手 和 個 者 業 作 之 上 側 8 3 1ml ρη* 搬 埠□ 入 用 0J Ρ 蔽 開 打 HJ 0— 蔽 遮 等 該 在 是 但 打 被 會 態 狀 的 蔽 遮 通 相 部 外 和 係埠機 36用降 器置升 料裝用 儲運置 ， 搬裝 ί間運 器搬 料間 圖儲器 照加料 參增儲 上的 遮部 外內 埠之 Ϊ 6 用 3 動器 手料 有儲 附， 備時 ----------裝------訂-------^J---— (請先閱讀背面之注意事項再填寫本頁) 圖 至 。 儲遮 4 破在外12 料蔽 2 2 11 蓉 WMJ 索 ΗΓ 98降重 埠升起 用埠器 置該料 裝使儲 運和之 搬 2 埠 間12該 在 在埠 又接 , 交 0Ρ 11人 ffj 目 P 月 蔽車 teB SBC 遒 遵 内搬 埠動 用 置 裝 遵 搬埠 間接 器交 料口 儲出 裝用 安車 上運 側搬 8 動 機 自 自 和 ο ο 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 82 經濟部中央標準局員工消費合作社印掣 A7 B7 五、發明説明（81)) 104上增加自動搬運車用埠外遮蔽門90而安裝自動搬運車 用埠内遮蔽門92於該等埠的儲料器起重機80側，進而在手 動用入口埠116和手動用出口埠118上增加手動用埠外遮 蔽門114而備附有手動用埠內遮蔽門112於該等埠的儲料 器起重機80側。 Μ下係就該等遮蔽門的動作做簡單說明。另外*在沒有 儲料器36之作業時該等的遮蔽門會處於全部被關閉的狀態。 首先就自動搬運車用璋内遮蔽門92加Μ敘述。當有來自 處理裝置32、34的投入要求時主電腦50會從被收納在適當 儲料器36内的匣子40中搜尋出可處理的匣子40，且對儲料 器36送出出庫之作業指示。接受此的儲料器控制器64，首 先使適當的自動搬運車用璋内遮蔽門92下降且打開，之後 利用儲料器起重機80將位於儲料器架96上的適當匣子40運 至自動搬蓮車用出口交接埠100上。當儲料器起重機80之 作業結束時儲料器控制器64，會使打開著的自動搬運車用 埠内遮蔽門92上升且關閉。儲料器控制器64，會打開自動 搬蓮車用埠外遮蔽門90，且從自動搬運車用出口交接埠 100驅使前進移動裝置84使該匣子40移動至自動搬運車用 出口埠86上。 又，在將自動搬蓮車用人口埠88上的匣子40予Μ人庫時 ，儲料器控制器64會打開自動搬運車用埠外遮蔽門90，且 首先會使用前進移動裝置84使自動搬運車用入口堉88上的 匣子40首先移動至自動搬蓮車用入口交接埠104上。接著 當移動完成而關閉自動搬運車用璋外遮蔽門90時，儲料器 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 〇 9 I i —II !- --- 1^1 - g .^1^1 ^ij 0¾. 、-° (請先閱讀背面之注意事項再填寫本頁) A 7 B7 經濟部中央標準局員工消費合作社印掣 五、發明説明（SI) 控制器64會使自動搬運車用埠内遮蔽門92下降且打開，並 利用儲料器起重機80使自動搬運車用入口交接堉104上的 匣子40朗儲料器架96移動。當該移動作業完成時儲料器控 制器64，會使自動搬運車用埠内遮蔽門92上升且闞閉。如 此完成來自自動搬運車用入口埠88之一系列的入庫作業。 如此一來，自動搬運車用璋内遮蔽門92和自動搬運車用埠 外遮蔽門90之任一方必會呈闞閉狀態，而可完全防止儲料 器36之内部和外部相通的情形。 其次就手動用埠内遮蔽門112加以敘述。當有來自處理 裝置32、34的投入要求時，主電腦50會從被收納在適當儲 料器36内的匣子40中搜尋出可處理的匣子40，且對儲料器 36發送出庫的作業指示。接受此的儲料器控制器64，首先 會使手動用璋內遮蔽門112下降且打開，再利用儲料器起 重機80將位於儲料器架96上的適當匣子40運至手動用出口 埠118上。儲料器控剌器64，在使打開狀態之手動用埠内 遮蔽門112上升且闢閉之後，會在儲料器36之操作面板121 上進行允許手動用出口埠118上之適當厘子40之取出的顯 示。按照操作面板121之操作，儲料器控制器64會打開手 動用埠外遮蔽門114，而操作者可從同埠中取出該匣子40。 又，透過手動用入口埠116將位於作業者手邊的匣子40 入庫於儲料器36内時，作業者藉由操作操作面板121 ，儲 料器控制器64，會打開手動用埠外遮蔽門114 使匣子 40置放在手動用入口埠116上。在翻閉手動用璋外遮蔽門 114之狀態下儲料器控制器64，接著會利用利用ID卡讀寫 (請先閱讀背面之注意事項再填寫本頁) 裝. 訂 .I》--J - I -..... 1 本紙張尺度適用中國國家標準（CNS ) A4規秸（210X 297公釐） 8 4 一 經濟部中央標準局員工消費合作社印製 A7 B7 _ 五、發明説明（S::) 裝置120讀取被記錄在置放於手動用入口埠116之匣子40 之ID卡72上的資訊，且將該資訊透過通信電瀵58向主電腦 50報告。主電腦50藉此就可知道作業者運來匣子40之情況 ，而對儲料器36發送該匣子40之入庫的作業指示。接受此 的儲料器控制器64，首先在使手動用埯內遮蔽門112下降 且打開之後，會驅使儲料器起重機80將位於手動用入口埠 116上的匣子40收納在儲料器架96上。該收納作業完成之 後儲料器控制器64會使手動用埠内遮蔽門112上升且關閉 Μ完成來自一系列之手動用入口埠116的入庫作業。如此 一來，手動用埠内遮蔽門112和手動用埠外遮蔽門114之 任一方必會呈闞閉狀態，而可完全防止儲料器36之內部和 外部相通的情形。 最後，就儲料器間搬運裝置用璋内遮蔽門110加Μ敘述 。從搬運處儲料器36載置於儲料器間搬蓮裝置42之台車 162上運至而來的匣子40係驅使儲料器間搬蓮裝置用掸外 遮蔽門122、儲料器間搬運裝置用升降機124及移載機82而 蓮至儲料器間搬運裝置用埠98上。此時儲料器間搬運裝置 用埠98係處於下方的位置，而儲料器間搬運裝置用掸外遮 蔽門122亦處於備關閉的狀態。接著儲料器間搬運裝置控 制器66，在使儲料器間搬蓮裝置用埠內遮蔽門110注下方 移動且打開之後，會利用儲料器起重機80將儲料器間搬運 裝置用埠98上的匣子40收納在儲料器架96上。當收納作業 完成時儲料器間搬蓮裝置控制器66會將儲料器間搬運裝置 用埠内遮蔽門110送回原來的位置上且將之關閉，Μ此完 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝. 訂 .1 ^ —Γ 經濟部中央標準局員工消費合作社印聚 A7 B7 五、發明説明（S.i) 成一系列的作業。 又，在將被收納在儲料器36之匣子40送出至台車162之 際，儲料器36在儲料器間搬運裝置控制器66之指示之下， 會Μ與現在所述相反的顒序利用儲料器起重機80、儲料器 間搬運裝置用埠内遮蔽門110、儲料器間搬運裝置用埠外 遮蔽門122、儲料器間搬運裝置用升降機124及移載機82進 行作業。如此一來，儲料器間搬運裝置用埤内遮蔽門110 和儲科器間搬運裝置用埠外遮蔽門122之任一方必會呈闞 閉狀態*而可完全防止儲料器36之内部和外部相通的情形。 如此藉由在成為儲料器36和外界之接點的自動搬運車用 入口交接埠104、自動搬運車用出口交接埠100、儲料器間 搬運裝置用埠98、手動用入口璋116、及手動用出口埠118 的儲料器36之外側和内側之兩方上設置使其任一方皆圼闞 閉狀態的門，就可從外部完全隔離儲料器36之内部。因而 ，儲料器36由於可透過自動搬運車用入口交接埠104、自 動搬蓮車用出口交接埠100 、儲料器間搬運裝置用埠98、 手動用入口璋116、及手動用出口埠118向四周環境解放， 所Κ可解消灰塵或霧氣會進入儲料器36内，且附著在被保 管的匣子40之晶圓70上而有帶來不良影響的可能性之問題。 藉此，就可獲得不會使儲料器36之外部的灰塵或霧氣混 入儲料器36內部，且不會帶給被收納在被管理的匣子40内 的晶圓70不良影響的效果。 儲料器36，更進一步在手動用出口埠118上包含有可讀 寫被裝接在匣子40上之ID卡72之資料的ID卡讀寫裝置120。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 〇 c (請先閱讀背面之注意事項再填寫本頁) 裝· 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（δ‘1) 儲料器190亦更進一步在手動用出口埠210上包含有可 諝寫被裝接在匣子40上之ID卡72之資料的ID卡講寫裝置 120 〇 就被安裝在該手動用出口埠118上的ID卡譲寫裝置120 加以敘述。就自動搬運車38所未具備0料器36和用以處 理由該儲料器36所出庫之匣子40的處理裝置32、34加K考 慮。當處理裝置32、34透1信電嫌58向主電腦50進行匣 子投入要求時’主電腦50會搜S在儲料器36上有無可處理 的匣子40 ,在有匣子40時會移至出庫作業上。移至出庫作 業的主電腦50，會對儲料器36’透過通信電纘58送出將位 於儲料器架96上的匣子40朝手動用出口 ±§118搬運的作業 指示。 接受此的儲料器36’會利用儲料器起重機80將適當的g 子40朝手動用出口増118蓮送。儲料器36會利用備附在手 動用出口埠118的ID卡讀寫裝置120 ’讀人被記錄於現在 所運來的g子40之ID卡72的資料'且將該資訊透過通信電 纜58向主電腦50報告。 接受此的主電腦50係進行由手動用出口埠118所出庫的 匣子40和發出出庫作業指示的匣子4〇之比較校對’ Μ辨識 同一性。之後，由於將次處理裝置32、34的裝置名稱寫入 於該ID卡72内所以會透過通信電纜58對儲料器36送出ID卡 寫入作業指示。 接受此的儲料器36，會在ID卡讓寫裝置120上發送該資 訊，而在被装接於半導體晶圓匣40的ID卡72上寫入次處理 (請先閲讀背面之注意事項再填寫本頁) 裝. --11 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X 297公釐） 87 -Ο f ΑΊ 經濟部中央標準局員工消費合作社印掣 B7 五、發明説明 (8；)) 1 1 I 裝 S 32 34的 裝 置 名 稱 。裝 置名稱 被 寫 入 的 ID卡 72會 將 該 1 1 I 裝 t 名 稱 顗 示 在 本 身 的 顯示 部74上 〇 當 該 寫 入作 業 完 成 時 ，~、 1 I 會 追 尋 相 反 的 路 徑 9 向 主電 腦50報 告 該 情 況 〇 讀 k 1 1 閱 ] 接 受 此 的 主 電 腦 50 * 由允 許來自 作 業 者 之 匣子 40之 手 動 讀 背 1 用 出 P 埠 118 的 取 出 作 業， 所Μ會 將 作 業 指 示送 至 儲 料 器 lt〇 1 I 3 6上 〇 接 受 此 的 髂 料 器 36， 會在儲 料 器 36之 操作 面 板 121 思 事 項 I | 上 再 1 進 行 允 許 手 動 用 出 P 埠118上的 缠 當 匣 子 40之 取 出 的 顯 填 裝 1 I 示 〇 本 頁 看 到 此 的 作 業 者 會 從手 動用出 α 埠 118 中取 出 適 當 匣 1 1 I 子 40 且 操 作 操 作 面 板 121 向儲料 器 36通 知 取出 作 業 完 成 1 1 的 情 況 0 接 受 此 儲 料 器 36就 會判斷 出 庫 作 業 已完 成 f 且 透 1 訂 通 通 信 電 m 58對 主 電 腦 50進 行該完 成 報 告 0 1 I 取 出 匣 子 40之 作 業 者 ，與 習知不 同 由 於 提 出投 入 要 求 的 1 I 處 理 裝 置 32 3 4係 被 顯 示在 匣子40 之 ID卡 72的顯 示 部 74上 1 1 1 所 W 無 須 對 作 業 者 終 端 機56進行， 就 可 直 接 朝該 處 理 裝 置 32 Λ 34之 適 當 匣 子 台 階 172 ‘ 182 運 送 0 J 1 如 此 藉 由 在 儲 料 器 36之手 動用出 Ρ 埠 118 上安 裝 ID卡 讀 J 1 寫 裝 置 120 主 電 腦 50就可 在被裝 接 於 匣 子 40之 ID卡 72的 1 I 顯 示 部 74上 寫 人 作 為 搬 運目 的地的 次 處 理 裝 置32 34之 裝 1 1 置 名 稱 〇 1 1 因 而 在 從 手 動 用 出 口埠 118取 出 匣 子 40時作 業 者 無 法 1 1 知 道 要 埋 送 至 哪 個 處 理裝 置32、 34上 較 佳 ，而 為 了 取 得 1 | 該 資 訊 就 沒 有 必 要 向 主 電腦 50之作 業 者 終 端 機56進 行 〇 因 1 I 此 t 就 可 解 消 作 業 時 間 浪費 的問題 〇 1 1 本紙張尺度财Hgj家縣（CNS > Α4· ( 2丨Qx297公楚） 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（8!,) 藉此，作業者看到顯示在被裝接於匣子40之ID卡72的顯 示部74上之裝置名稱*就可將該匣子40直接朗處理裝置32 、34運送。 ID卡72，係將通信部76配置在其底面。藉由利用該ID卡 72儲料器36就可在其手動用入口埠116或手動用出口埠118 中將ID卡讀寫裝置120對應前述之ID卡72的通信部76之位 置而配置在匣子承接器具220之下。ID卡讀寫裝置120 *係 透過由匣子承接器具130所作成的通信窗口 132與備附在ID 卡72之底面的通信部76進行通信。藉由將ID卡讓寫裝置 120配置在匣子承接器具220之下方，作業者就可在手動 用人口埠116上置放匣子40之際，或從手動用出口埠118取 出匣子40之際，即使將該等埠中的匣子40之載置方向，當 作該ID卡72朝向作業者側的方向，作業者在置放或取出該 等的匣子40時亦不會如習知般地造成阻礙。 如此地藉由在被安裝於儲料器36之手動用入口埠116或 手動用出口埠118上之該等埠的匣子承接器具220之下， 配置ID卡讀寫裝置120 ，就可將該處的匣子40之載置方向 設為朝向作業者側的方向。進而可將儲料器架96、自動搬 蓮車用入口交接埠104 、自動搬運車用出口交接埠100 、 及儲料器間搬運裝置用埠98中的匣子40之載置方向全部設 為外側方向。 因而，由於在儲料器36之自動搬運車用人口埠88的匣子 40之方向與在自動搬蓮車用入口交接埠104的匣子40之方 向係相差90度，所Μ可解消前進移動裝置84在作業中途必 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 。η (請先閱讀背面之注意事項再填寫本頁) 裝V. Description of the invention (丨: 7) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. , Box, showing that the capital is received in North Korea. 56 The short ID of the apprenticeship is 50% of the ID of the appropriation of the material, and the receipt of the machine is full. The internal storage of the school ’s brain reserves is not within 50% of the difference. The master device that received the final charge of the electricity and Lai You Ye Nao 40FNM display industry was compared with the messenger letter, the electronic electron Θ and the author ID50 can be combined, that is, the 50 is used as the main box frame. The brain of the industry is also used as a storage material, the brain material, self-answer, self-response, and 40 electricity, which is in the capital. Shidian Zizhi returns NO_ Ziyuan due to 50 winners. The main owner accepts the owner ID of a pair of 50 yuan UID. The brain display box is used in the operation of the asset management system and is not included in the overseas brain list. In addition to accepting the ID status of the 40th meeting, the user of the U40 56 main fruit machine received the fil self-question of the field of the 40th child, the 36th of the main material, and the subunit of the 36th party was sued or inquired. The fruit machine reports to the end of the storage box, and adds a photo of 6,450 boxes to receive 40 at the end of the set. The 0 · of the final needs to be entered into the box of the chaser brain. If you want to store material i5, you must store it 64 times. The inner box of the system is from the above-mentioned inquiry to the tig industry and will be used as a tool room. The master 36 and 36 will be controlled by the same school 56 at the material house. || 50 devices. If the device cannot be collected, the asset is installed by the 56. The ID of the old brain is held by the 50th end of the material room, 7B, and the tfcw of the on-board 50 borrower is used to restore the power reserve. Stored in the brain, and installed gjft36 indicates that the ratio of the main opposition of the teleportation industry 40 is the same as that of the receiver 7A. It is also used as a storage device. It is equipped with only 4064 main business maps. 40 is the master of the 4 materials in the title described in this box, the M of the child device as a child. . Reserve capital, Tong Na Cheng borrowed 40 times when the box system is 40M in the box and No of the work, the endogenous sub body is included in the control shown in the material containing the paper standard applicable China National Standard (CNS) A4 Specification (210X 297mm) 70 Packing --- Order (please read the notes on the back before filling this page) A7 A7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Description of the invention (丨; 8) The stocker unit No., rack No. and position No. of the warehouse are compared and verified, not only for the difference of ID data, but also for the difference of storage place data. The host computer 50 displays the operator's terminal 56 in a manner different from the data. As described above, the stocker controller 64 inquires the device data of the box 40 stored in the stocker 36 from the host computer 50, and reports the ID information of the box 40 and the storage place data thereof. In addition, the host computer 50 that has accepted this will not only compare the ID data as the target of the comparative calibration, but also the storage location data as the target of the comparative calibration when comparing and collating the device data held by itself. Therefore, the K storage place unit can grasp the inconsistency of the device data of the box 40 stored in the stocker 36 having the host computer 50 and the stocker controller 64. In addition, even in the stocker 36 having a large storage capacity, the problematic magazine 40 can be easily found. Another configuration example of the stocker will be described with reference to FIGS. 12 to 14. The stocker 190 includes an exit port 196 for an automatic truck, which is the same as the exit port 86 for an automatic truck of the stocker 36. However, the number of boxes 40 that can be placed on the port 196 is determined to be the input requirement for the processing devices 32 and 34, that is, the same as the maximum number of boxes that can be handled by the exit port 196 of the automatic transport vehicle. By. In this case, two boxes 40 can be placed on the port 196. The processing devices 32 and 34 require the host computer 50 to input the cassette 40 through the communication unit 58. At this time, the processing devices 32 and 34 will input the two boxes 40 as the processing units of the device. The host computer 50 that accepts this determines whether there is a cassette 40 on the appropriate stocker 190 that can be processed by the processing devices 32, 34. When there are two or more boxes 40 that can be processed, the Chinese paper standard (CNS) A4 (210X297 mm) will be applied to the paper size. M ^^^ 1 — ^ ϋ.-Ii ^^^ 1, one eJ_ ι — ^^^ 1 In-^ i— n. ^ 11 < (Read the precautions on the back before filling out this page) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^ A7 B7 V. Description of Invention (ί; Π) After the number of magazines in the library is 2, The controller 64 sends out the warehouse-out operation instructions for the exit port 196 for the automatic truck of the two boxes 40. The stocker controller 64 accepting this is to use the stocker crane 80 to transport the first box 40 to the exit transfer port 192 for the automatic truck. The stocker controller 64 drives the forward moving device 200 to forward the box 40 on the automatic truck outlet port 192 to the automatic truck exit 璋 196. This is parallel to the warehouse operation of the first II sub-40, while the warehouse operation of the second box 40 is performed on a device with the same sequence of K. When the two boxes are discharged from the automatic truck exit port 196, the stocker controller 64 reports the completion of the operation to the host computer 50. The host computer 50 that receives the completion report of the outbound operation from the stocker controller 64, and then sends to the automatic truck 38 via communication power 58 to send two boxes 40 to be placed on the automatic truck exit port 196. Commands transported to cassette steps 172, 182 of processing devices 32, 34. The automatic truck controller 60 that receives the order dispatches work from the plurality of automatic trucks 38 to the operator most suitable for the transportation operator, and drives the control bureau-side communication unit 62 and the truck-side communication unit 142. While carrying out the wireless communication, the carrying operation of the cassette 40 is performed. A description will be given of the transportation operation of the cassette 40 of the automatic truck 38. First, the pallet 140 is moved from the standby position toward the exit port 196 for the automatic transporter according to the induction belt 156 attached to the floor, which is the stocker 190 serving as a transfer place. When the trolley 140 reaches the exit port 196 for the automatic transport vehicle, the automatic transport vehicle 38 first checks whether the first box 40 exists on the automatic transport vehicle exit port 196 through the automatic transport vehicle communication unit 102. If there is the first paper size applicable to the Chinese National Standard (CNS) Α4 size (210X297 mm) J i Binding -------- External—1 ----— (Please read the precautions on the back before filling in this Page) Employees' cooperative of the Central Standards Bureau of the Ministry of Economic Affairs prints A7 B7 V. Description of the invention (7 丨 丨) If the box 40 is an automatic handling vehicle 38, it will drive the robot arm 144, the robot hand 146, and the machine gripper 148 during automatic handling. The first box 40 is taken into the vehicle exit port 196 and placed on its own transfer platform 150. The second cassette 40 is also placed on a transfer stage 150 different from itself in the same order. When the placement operation is completed, the trolley 140 moves from the stocker 190 again to the cassette steps 172 and 182 indicated by the processing devices 32 and 34 as the transfer place. When the cart 140 reaches the box steps 172, 182, the lotus cart 38 is automatically moved, and the appropriate boxes 40 on the transfer table 150 are sequentially placed on the indicated box steps 172, 182 in the reverse order. When all the instructed operations are completed, the automatic truck controller 60 reports the operation completion to the host computer 50 through the communication cable 58. The host computer 50 that receives the report that the supply operation of the processing devices 32 and 34 of the two boxes 40 by the automatic guided vehicle 38M is used to instruct the processing devices 32 and 34 to start processing through the communication electric lanthanum 58. In this way, by setting the number of the cassettes 40 that can be placed in the outlet port 196 of the automatic transport vehicle for the stocker 190 to the number of the cassettes 40 requested by the processing devices 32 and 34 that should be paid toward the dock. In the same way, it is possible to carry out the warehouse operation from the storage place in the stocker 190 to the exit 196 of the automatic truck in the number of units of the box 40 requested by the investors of the processing devices 32 and 34, and the automatic transfer of lotus One of a series of operations for the transportation from the vehicle exit port 196 to the cassette steps 172 and 182 of the processing devices 32 and 34. Therefore, when the number of cassette units required for the input from the processing devices 32 and 34 is greater than the number of cassettes that can be placed on the outlet port 196 of the automatic lotus car, the cassettes 40 exceeding the number of such cassettes will not become subsequent transports. operation. Therefore, this paper size is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) η. (Please read the precautions on the back before filling out this page) Installation, 1T. I-~ ----. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (71) The box 40 arriving at the steps 172, 182 of the processing device 32, 34 can be eliminated, and the box 40 cannot be started before the post-mine box 40 arrives The processing device 32, 34 needs to wait for processing. Thereby, after the preceding box 40 reaches the box steps 172, 182 of the processing devices 32, 34, the processing start time is not delayed by the following box 40. The stocker 190 further includes an inlet 璋 198 for an automatic transfer vehicle, which is the same as the inlet 璋 88 for an automatic transporter of the loader 36. However, the number of cassettes 40 that can be placed on the port 198 is determined to be the same as the maximum number of cassettes that the processing devices 32 and 34 require to withdraw. In this case, two cassettes 40 can be placed on the 璋 198. The processing devices 32 and 34 are M2 box units, and the box 40 is withdrawn. The host computer 50 accepting this, after securing the storage place of the stocker 190 of the cassettes 40, sends the conveyance operation instruction to the automatic transfer car 38 at one time. The automatic truck controller 60 that receives the instructions for the transfer operation of the maximum of two boxes 40 by the main battery 50 dispatches the work from the plurality of automatic transfer trucks 38 to the one most suitable for the transfer operator, and makes it perform The wireless communication communication operation is not performed by the control station-side communication unit 62 and the truck-side communication unit 142. A description will be given of the transportation operation of the cassette 40 of the automatic truck 38. First, the trolley 140 is directed from the standby position toward the processing devices 32 and 34 as the transfer place in accordance with the induction tape 156 attached to the floor. When the trolley 140 reaches the processing devices 32 and 34, the automatic truck 38 first determines whether the box 40 exists on the box steps 172 and 182 by checking the automatic truck communication unit 174. This paper size applies the Chinese National Standard (CNS) Α4 Regulation (210 × 297 mm)-3-- — ^-»-_ I--I · n —II! 11 X» is ^ -β (Please read first Note on the back, please fill in this page again.) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, A7, B7. 5. Description of the invention (7: 2) If there is the first box 40 on the box steps 172, 182, the automatic truck 38. The robot arm 144, the robot hand 146, and the robot claw 148 are driven to take the first box 40 located on the box steps 172 and 182, and place the first box 40 on the own transfer platform 150. With regard to the second box 40, people are taken from the box steps 172, 182 on different transfer platforms 150 in the same order. When the placing operation of the two boxes 40 is completed, the carriage 140 moves from the lotus processing unit 32 and 34 toward the population port 198 of the automatic truck indicated by the stocker 190 serving as the lotus. When arriving at the entrance port 198 for an automatic truck, the two boxes 40 will be sequentially placed from the transfer stage 150 on the entrance port 198 for an automatic truck in the reverse order to the previous order. When all the instructed operations are completed, the automatic car controller 60 will report the operation completion to the host computer 50 through the communication cable 58. The host computer 50 that has received the operation completion report from the automatic transfer truck 38 will instruct the stocker 190 on the storage operation of the automatic transfer vehicle inlet port 198 from the two boxes 40. According to the storage operation instruction sent through the communication antenna 58, after the stocker controller 64 secures the storage place of the box 40 on the stocker rack 96, it will start the storage work. The stocker 190 which has started the storage operation firstly drives the forward moving device 202 to move the first box 40 from the automatic port vehicle inlet port 198 to the automatic port vehicle inlet port 194. When the moving operation is completed, the stocker crane 80 will start to move, and the box 40 on the automatic transfer vehicle inlet transfer port 194 will be stored on the stocker rack 96 which has been more ensured by the stocker controller 64. Premises transport. Moreover, the operations of the first box 40 and the second box 40 are performed in the same order for different placement points in the same order. When 2 paper sizes are in accordance with Chinese National Standard (CNS) Α4 specification (210X297 mm) _ 7 r: _ --J ----------------------------- ----- (Please read the precautions on the back before filling this page) Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Β7 V. Description of the invention Π'Ί) A box is stored on the stocker rack 96 A series of tasks are completed when the storage place is in place, and the stocker controller 64 reports the operation completion to the host computer 50 through the communication cable 58. As described above, the number of the cassettes 40 that can be placed in the entrance port 198 of the automatic transport vehicle for the stocker 190 is set to the withdrawal requirements of the cassettes 40 required by the processing devices 32 and 34 that can use the port 198. The number is the same. Thereby, in the number of units required to withdraw the processing apparatuses 32 and 34, it is possible to carry out the transfer operation from the processing apparatuses 32 and 34 to the box 40 of the automatic transport vehicle population 璋 19δ and from the automatic transport vehicle entrance 璋 198 to The series of operations of the storage operation of the cassette 40 in the storage place of the stocker 190. Therefore, when there are more cassette units withdrawing requests from the processing devices 32 and 34 than the number of cassettes that can be placed on the entrance port 198 for the automatic truck, the boxes 40 exceeding the number of the cassettes will not be left in the processing device. Boxes 32 and 34 are on steps 172 and 182. Therefore, it is possible to solve the problem that it takes time to supply the processing devices 32 and 34 of the box 40 before the box steps 172 and 182 are delayed while the waiting time of the handling operation of the box 40 becomes longer. Thereby, the residues of the cassette steps 172, 182 of the processing devices 32, 34 of the cassette 40 after processing will be gone, and the cassette steps 172, 182 will be empty for a short time after processing, and the new pre-processing cassette 40 will not Delayed and available for storage and supply from the stocker 190. Referring to FIG. 13, the stocker 190 further includes a manual outlet port 210 similar to the manual outlet port 118 of the stocker 36. However, the number of boxes 40 that can be placed on the port 210 is determined to be the same as the maximum number of boxes required for the processing devices 32 and 34 to be put. In this case, two boxes 40 can be loaded. The paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210X 297 mm) _ „(Please read the precautions on the back before filling this page). J ------1 4ΙΊ —IJ-· Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention Γ7 1) Put on this port. For example, it is considered that the stocker 190 without the automatic truck 38 and the processing devices 32, 34 and M for processing the boxes 40 discharged from the stocker 190 are not considered. The processing devices 32 and 34 make a cassette input request to the host computer 50 through the communication cable 58. At this time, the processing devices 32 and 34 are the input requirements of the box 40 for the M2 box unit. The host computer 50 receiving this inquiry asks the stocker 36 whether there is a cassette 40 that can be processed by the processing units 32 and 34. When the number of processable boxes 40 is two, after the boxes 40 are designated as two, the stocker controller 64 sends out the warehouse 40's manual outlet 璋 210 for the warehouse-out operation instruction. The stocker controller 64 receiving this uses the stocker crane 80 to sequentially send the two boxes 40 to the manual outlet port 2 10 which holds the loading points of the two boxes 40 in order. The stocker controller 64 performs a display on the operation panel 121 of the stocker 190 to allow manual removal of the box 40 on the outlet 璋 210. When the operator sees this, the two boxes 40 are taken out from the manual outlet 璋 210, and the operation panel 121 notifies the stocker 190 of the completion of the removal operation. The stocker 190 accepting this will judge that the warehouse operation has been completed, and report the completion to the host computer 50 through the communication cable 58. The operator who takes out the cassette 40 does not know which of the processing devices 32 and 34 that issued the input request. Therefore, the operator will investigate the processing devices 32 and 34 that issued the input request to the operator terminal 56 of the host computer 50. The operator will place the box 40 on the appropriate box steps 172, 182 of the processing devices 32, 34 which issued the bid request. In this way, the number of the cassettes 40 that can be placed on the manual outlet port 210 is set to be the same as the number of the cassettes 40 required by the processing devices 32 and 34. In this way, the paper size of the number of boxes 40 required by the investigators 32 and 34 can be applied to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 77 (Please read the precautions on the back before filling (This page) Installation · --1H · A7 A7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (72) The unit conducts warehouse operations from the storage place of the stocker 190 to the manual outlet port 210, And a series of operations from the manual outlet port 210 to the operator's handling operations of the cassette steps 172, 182 of the processing devices 32, 34. Therefore, when the number of cassette units required for the input from the processing devices 32 and 34 is greater than the number of cassettes that can be placed on the manual outlet port 210, the number of cassettes 40 exceeding the number of such cassettes will become a mine-removing operation and can be carried out. Eliminate the problem of reduced operator efficiency. Thereby, the waiting time of the operator can be reduced, and at the same time, the supply time of the cassette 40 to the processing devices 32 and 34 can be shortened. Referring to plaque 4 and FIG. 5, the stocker 36 is the stocker transfer device 42 on the stocker transfer device port 98 as described above, and is provided with a port outside shield door 122 for the stocker transfer device and A lifter 124 for the transfer device between the stockers for lifting the port is installed on the side of the automatic transfer vehicle 38 on the side of the automatic transfer vehicle exit transfer port 192 and the automatic transfer vehicle inlet transfer port 194. 90, and further, there is a manual port outside shielding door 11 4 on the operator side of the manual entry port 116 and the manual exit port 2 10. K series makes a brief description of the action of these shielding doors. It should be noted that all the shutter doors are closed when the storage device 36 is operated. First, the outside port shielding door 90 for an automatic truck will be described. When there is a request for the input of the box 40 from the processing devices 32 and 34, the host computer 50 will search for a processable box 40 from the boxes 40 stored in the appropriate stocker 36, and send the box to the feeder 36 40 out of work instructions. The stocker controller 64 receiving this uses the stocker crane 80 to transport the appropriate box 40 on the stocker rack 96 to the exit transfer port 100 for the automatic truck. The dimensions of this paper are applicable to China National Standard (CNS) A4 (210X297 mm) ^. (Please read the notes on the back before filling this page). Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A 7 B7 V. Description of the invention (7Ί;) The stocker controller 64 will drive the forward moving device 84 from the exit transfer port 100 of the automatic truck to move the box 40 to Automatically move to the lotus port 86. At this time, since the shutter door 90 for the automatic truck is closed, first, after the shutter door 90 is lowered and opened, the box 40 is moved toward the exit port 86 for the truck. When the moving operation is completed, the stocker controller 64 raises and closes the shutter port 90 for the port of the automatic transport vehicle in the opened state. This completes a series of warehouse operations, and the stocker controller 64 will perform a job completion report to the host computer 50. In addition, when the magazine 40 on the entrance port 88 for the automatic guided vehicle is put in storage, the stocker controller 64 uses the advance moving device 84 to move the position on the entrance port 88 for the automatic guided vehicle based on the storage operation instruction from the host computer 50. The box 40 is first moved to the entrance transfer port 104 for an automatic truck. At this time, since the shelter door 90 outside the port for the automatic transport vehicle is closed, first, after the shelter door 90 is lowered and opened, the box 40 is moved toward the entrance port 104 for the automatic transport vehicle. When the moving operation is completed, the stocker controller 64 raises and closes the outside port shielding door 90 for the automatic truck in the opened state. When the operation is completed, the stocker controller 64 drives the stocker crane 80 to store the box 40 on the stocker rack 96, completes the work, and reports the gist to the main computer 50. Next, a manual description will be given of the out-of-port shielding door 114. When there is an input request from the processing devices 32 and 34, the host computer 50 searches for a processable box 40 from the boxes 40 stored in the appropriate stocker 36, and sends an operation instruction for the stocker 36 to the warehouse . The stocker controller 64 that accepts this is to use the stocker crane 80 to transport the appropriate box 40 on the stocker rack 96 to the paper size applicable to the Chinese National Standard (CNS) Α4 specification (210X297 mm) 79- -- ·- - - 1 : . . . . . Batch of clothing n I (Please read the notes on the back before filling this page) '-= 0 丨 外 --I— I -J-Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ΑΊ Β7 V. Description of the invention (T' /) Manually use port 118. Next, on the operation panel 121 of the stocker 36, a display that allows the appropriate cassette 40 on the manual outlet port 118 to be taken out is displayed. The worker who sees this operates the operation panel 121 in order to open the manual external port shielding door 114. Accepting the operation of the stocker controller 64 causes the shutter door 114 to lower and open. The operator then removes the box 40 from the same port. The operator operates the operation panel 121 again to raise and close the shutter door 114 in an opened state, and a series of warehouse operations are completed. The stocker controller 64 reports a job completion to the host computer 50 through the communication unit 58. In addition, when the box 40 located at the operator's hand is stored in the stocker 36 through the manual inlet port 116, the operator operates the operation panel 121 and the stocker controller 64 causes the closed manual port. The outer shield door 114 descends and opens. The stocker controller 64 is displayed on the operation panel 121 when the cassette 40 can also be placed on the manual inlet 璋 116. The operator who sees this will place the box 40 on the same port 116 and operate the operation panel 121 again. By this operation, it is known that the magazine 40 is placed on the stocker 36 on the manual inlet port 116, which will cause the shielding door 114 outside the manual port to rise and close, and then use the ID card reading and writing device 120 to read the recorded data. The information on the ID card 72 of the appropriate box 40 is reported to the host computer 50 through the communication fiber 58. In this way, the host computer 50 can know the situation in which the operator brought the box 40, and sends an operation instruction to the stocker 36 for the person bank of the box 40. The stocker 36 drives the exit port 86 for the automatic transporter to store the box 40 located in the manual population port 116 on the stocker rack 96 to complete the warehouse operation. Finally, * the port-side shielding door 122 plus M is described for the handling device between the stockers. The box 40 is loaded from the storage unit 36 to the storage unit 42. The paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) _ _ (Please read the precautions on the back before reading (Fill in this page), 3 «— Μ · 装. 、 1Τ -— Yin: 1---a- ··-1 A7 A7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs —— _-_____ V. The invention description (7¾) is again stored on the trolley 162 Port 98 is used to move the lotus device between the feeders. When the trolley 162 arrives, the controller 66 for moving the inter-stocker will entrust the stocker controller 64 to the container controller 64 via the communication circuit 58 to place the box 40 on the trolley 162 on the port 98 for the inter-stocker handling device. . On request 36, firstly, the port outside shielding port 122 for the conveying device between the stockers was moved horizontally and opened, and then the elevator 124M for the conveying device between the stockers was driven to raise the port 98 for the lotus device between the stockers. When the ascending operation is completed, the stocker controller 64 uses the transfer machine 82 to send the magazine 40 on the trolley 162 to the port 98 for the transfer device between the stockers. Next, the stocker controller 64 uses the state of the lifter 124M for the transfer device between the stockers to place the cassette 40, and moves the port 98 for the transfer device between the stockers to a lower position. The stocker controller 64, after the movement is completed, closes the shielding door 122 outside the port for the carrying device between the stockers, and uses the stocker crane 80 to store the box 40 on the stocker rack 96. This completes a series of operations, and the stocker controller 64 reports the gist to the stocker moving device controller 66 through the communication cable 58. In addition, when the box 40 stored in the stocker 36 is sent to the trolley 162, the stocker 36 will follow the instructions of the controller for moving the lotus device between the stockers, and use the sequence as it is now. In the opposite procedure, the stocker crane 80, the port outside shield door 122 for the storage device transfer device, the lifter 124 for the lotus device transfer device, and the transfer machine δ2 are used for operation. In this way, the automatic transfer car inlet transfer port 104, the automatic transfer car outlet transfer port 100 serving as the contact point between the stocker 36 and the outside atmosphere, the port 98 for the transfer device between the feeders, and the manual A bucket to shield the outside atmosphere is provided on the outer periphery of the stocker 36 using the inlet port 116 and the manual outlet port 118. The paper size is in accordance with the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) 〇 (please first Read the precautions on the back and fill in this page.), Π -I ^ J-! Printed by A7 B7, Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the invention (the d) can isolate the inside of the stocker 36 from the outside. . It is known that the stocker 36 passes through the automatic transfer vehicle inlet transfer port 104, the automatic transfer vehicle outlet transfer port 100, the storage port transfer device port 98, the manual inlet 璋 116, and the manual outlet. The port 118 is opened in the surrounding environment, and the dust or mist may enter the stocker 36 * and attach to the wafer 70 of the stored box 40, which may cause adverse effects. However, with the above configuration, it is possible to prevent dust or mist from being mixed into the inside of the stocker 36, and not to be taken outside the inside of the managed box 40. For the sake of effectiveness, the sound of 36 shadows is not good. The above-mentioned crystals on the circle are not stored. The 12 doors are covered by the storage. The 8 I 9 port is used for shipment. TMU ηκ Complies with the equipment of the room. i The equipment installation room for lifting and lowering is moved away and moved separately. 2 The material is stored in the upper part of the M and its storage is equipped with the up and down side. 2 i 4 The equipment is dropped to make the port connect to the port. Use a W to move hands freely and enter 4 illos to access the port to cover the external port car nx E throwing to move automatically and automatically ο install 10 amps □ out using τηπ hand and person Operation side 8 3 1ml ρη * Move the port □ Enter 0J Ρ Shield to open and hit HJ 0— Shield and so on, but should be hit by the state of the shield and pass through the phase part and the port machine 36 is lifted with a lowering device Storage and transportation equipment for material loading, storage and transportation, storage room, storage room, storage, storage, storage, storage, storage, storage, storage, storage, storage, storage, storage, storage, storage, storage, storage, storage, etc. ------ Install ------ Order ------- ^ J ----- (Please read the precautions on the back before filling this page) Picture to. Storage cover 4 Broken out 12 Material cover 2 2 11 Rong WMJ Cable Η 98 Lift the weight of the port and use the port device to install the material to make storage and transportation 2 Port 12 should be connected again at the port, pay 0P 11 people ffj P monthly shelter vehicle teB SBC 遒 Zunne moving port installation and installation Zun moving port indirect device delivery port storage loading and unloading vehicle loading and unloading side loading 8 Motivation self-reliance ο ο This paper standard applies to China National Standard (CNS) A4 Specifications (210X297mm) 82 A7 B7 printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (81)) 104. The port door 90 for automatic trucks and the port door 92 for automatic trucks were installed. On the side of the stocker crane 80 of these ports, the manual port 116 outside the manual port 116 and the manual exit port 118 are added to the manual port 116 and the manual port inside the door 112 is provided. Stocker crane 80 side. The following is a brief description of the action of these shielding doors. In addition, when the storage container 36 is not in operation, such shielding doors will be completely closed. First, the inside shield door 92 plus M for an automatic truck will be described. When there is a request for input from the processing devices 32, 34, the host computer 50 searches for a processable box 40 from the boxes 40 stored in the appropriate stocker 36, and sends out a storage operation instruction to the stocker 36. After receiving the stocker controller 64, firstly, the appropriate automatic transport vehicle inner hatch door 92 is lowered and opened, and then the stocker crane 80 is used to transport the appropriate box 40 on the stocker rack 96 to the automatic transfer. Lotus car exit port 100. When the operation of the stocker crane 80 is completed, the stocker controller 64 raises and closes the shutter door 92 in the open port for the automatic truck. The stocker controller 64 opens the outside door 90 for the automatic transfer vehicle port, and drives the forward moving device 84 from the automatic transfer vehicle exit transfer port 100 to move the box 40 to the automatic transfer vehicle port 86. In addition, when the box 40 on the population port 88 for the automatic transfer vehicle is used in the M warehouse, the stocker controller 64 will open the outside door 90 for the automatic transfer vehicle, and first use the forward moving device 84 to make the automatic The box 40 on the entrance yoke 88 for the van is first moved to the entrance transfer port 104 for the automatic lotus car. Then, when the movement is completed and the outer shroud door 90 for the automatic truck is closed, the paper size of the stocker applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) 〇9 I i —II!---- 1 ^ 1-g. ^ 1 ^ 1 ^ ij 0¾. 、-° (Please read the precautions on the back before filling this page) A 7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (SI) The controller 64 will make the port door in the automatic truck 92 It is lowered and opened, and the stocker crane 80 is used to move the magazine 40 rack stocker rack 96 on the automatic transfer truck inlet transfer shaft 104. When the moving operation is completed, the stocker controller 64 raises and closes the shutter door 92 in the port for the automatic truck. This completes the warehousing operation of a series of one of the entrance ports 88 for automatic trucks. In this way, any one of the inside shroud door 92 for the automatic transport vehicle and the outside shroud door 90 for the automatic transport vehicle port will be closed, and the communication between the inside and the outside of the stocker 36 can be completely prevented. Next, the in-port shielding door 112 will be described manually. When there is an input request from the processing devices 32 and 34, the host computer 50 searches for a processable box 40 from the boxes 40 stored in the appropriate stocker 36, and sends an operation instruction for the stocker 36 to the warehouse . Accepting the stocker controller 64, the manual inside shield door 112 is lowered and opened first, and then the stocker crane 80 is used to transport the appropriate box 40 on the stocker rack 96 to the manual outlet port 118. on. The stocker controller 64 will raise and open the closed manual door 112 in the open port, and then perform an appropriate 40 on the operation panel 121 of the stocker 36 to allow manual use of the outlet port 118. Take out the display. According to the operation of the operation panel 121, the stocker controller 64 will open the manual outside port shielding door 114, and the operator can remove the box 40 from the same port. In addition, when the box 40 located at the operator's hand is stored in the stocker 36 through the manual inlet port 116, the operator operates the operation panel 121 and the stocker controller 64 to open the manual port outside shielding door 114. The cassette 40 is placed on the manual inlet port 116. In the state of manually closing the external cover door 114, the stocker controller 64 will be read and written using an ID card (please read the precautions on the back before filling this page). Order. I》-J-I-. . . . . 1 This paper size applies the Chinese National Standard (CNS) A4 (210X 297 mm) 8 4 A7 B7 printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs _ V. Description of the invention (S: :) Device 120 reads The information recorded on the ID card 72 placed in the box 40 of the manual inlet port 116 is recorded, and the information is reported to the host computer 50 through the communication line 58. In this way, the host computer 50 can know the operator's arrival of the box 40, and send the storage operation instruction of the box 40 to the stocker 36. The stocker controller 64 that accepts this will first drive the stocker crane 80 to store the box 40 located on the manual inlet port 116 in the stocker rack 96 after lowering and opening the manual inner shield door 112. on. After the storage operation is completed, the stocker controller 64 raises and closes the shutter door 112 in the manual port to complete the storage operation from a series of manual port 116. In this way, any one of the manual in-port shielding door 112 and the manual out-of-port shielding door 114 will be closed, and the internal and external communication between the stocker 36 can be completely prevented. Finally, a description will be given of the inside shield door 110 plus M for the handling device between the stockers. The box 40, which is transported from the storage place where the stocker 36 is placed on the trolley 162 of the storage room moving device 42, drives the storage room between the storage room moving device and the outer shield door 122 and the storage room. The device lifter 124 and the transfer machine 82 are connected to the device port 98 for conveyance between the stockers. At this time, the port 98 for the transporting device between the stockers is in a lower position, and the outer shield door 122 for the transporting device between the stockers is also in a closed state. Next, the storage device transfer device controller 66 moves and opens the shielding door 110 in the storage container transfer device port, and then uses the stocker crane 80 to move the storage container transfer device port 98. The upper box 40 is stored on a stocker rack 96. When the storage operation is completed, the controller for moving the storage device between the storage devices 66 will return the shielding door 110 in the port for the storage device to the original position and close it. At the end of this paper, the Chinese standard applies to the paper size. (CNS) Α4 specification (210X297 mm) (Please read the precautions on the back before filling this page). Order. 1 ^ Γ Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (S. i) into a series of operations. When the magazine 40 stored in the stocker 36 is sent out to the trolley 162, the stocker 36 is instructed by the conveyer controller 66 between the stockers to perform the reverse order as described now. The operation is performed by the stocker crane 80, the in-port shield door 110 for the transporter between the stockers, the out-of-port shield door 122 for the transporter between the stockers, the lifter 124 for the transporter between the stockers, and the transfer machine 82. In this way, any one of the inside shield door 110 for the transfer device between the stockers and the outside shield door 122 for the port between the storage devices must be closed *, which can completely prevent the internal and External communication. In this way, the inlet transfer port 104 for the automatic transfer vehicle, the outlet transfer port 100 for the automatic transfer vehicle, the port 98 for the transfer device between the stockers, the manual inlet 璋 116, and Doors of the stocker 36 of the manual outlet port 118 are provided on both the outer side and the inner side so that either one is closed, and the inside of the stocker 36 can be completely isolated from the outside. Therefore, the stocker 36 can pass through the automatic transfer vehicle inlet transfer port 104, the automatic transfer vehicle outlet transfer port 100, the storage compartment transfer device port 98, the manual inlet port 116, and the manual outlet port 118. The liberation to the surrounding environment can solve the problem of the possibility that dust or mist will enter the stocker 36 and attach to the wafer 70 of the stored box 40 and cause adverse effects. This makes it possible to obtain an effect that dust or mist outside the stocker 36 is not mixed into the stocker 36 and does not adversely affect the wafer 70 stored in the managed box 40. The stocker 36 further includes an ID card reading / writing device 120 for reading and writing data of the ID card 72 attached to the cassette 40 on the manual outlet port 118. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 〇c (Please read the precautions on the back before filling out this page) Packing · Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (Δ'1) The stocker 190 further includes an ID card writing and writing device 120 on the manual outlet port 210 that can write data of the ID card 72 attached to the box 40. The ID card transcription device 120 on the outlet port 118 is used for manual description. It is considered that the automatic handling vehicle 38 does not have the feeder 36 and the processing devices 32 and 34 of the box 40 out of the stocker 36 for processing reasons plus K. When the processing devices 32, 34 pass the letter 58 to the host computer 50 for a box input request, the 'host computer 50 will search if there is a box 40 that can be processed on the stocker 36, and will move to the warehouse when the box 40 is present. Homework. The host computer 50 moved to the warehouse operation will send a work instruction to the stocker 36 'through the communication unit 58 to move the box 40 located on the stocker rack 96 toward the manual exit ± §118. The stocker 36 'accepting this will use the stocker crane 80 to send the appropriate g 40 to the manual outlet 118. The stocker 36 uses the ID card reading and writing device 120 provided in the manual outlet port 118 to 'read data recorded on the ID card 72 of the G40 currently shipped' and transmits the information through the communication cable 58 Report to host computer 50. The host computer 50 accepting this compares and verifies the identity of the box 40 which has been discharged from the manual outlet port 118 and the box 40 which has issued an instruction for the operation of the warehouse. Thereafter, since the device names of the secondary processing devices 32 and 34 are written in the ID card 72, the ID card writing operation instruction is sent to the stocker 36 through the communication cable 58. The stocker 36 accepting this will send the information on the ID card to the writing device 120, and write the secondary processing on the ID card 72 mounted on the semiconductor wafer cassette 40 (please read the precautions on the back before (Fill in this page). --11 This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21〇X 297 mm) 87 -〇 f ΑΊ Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs B7 V. Description of the invention (8;)) 1 1 I Device name for S 32 34. The ID card 72 with the device name written on it will display the 1 1 I device name on its own display 74. When the writing operation is completed, ~, 1 I will follow the opposite path 9 to the host computer 50 Report this situation 〇read k 1 1 read] The host computer 50 that accepts this * Manual reading from the operator's box 40 is allowed to read out 1 Use P port 118 to take out the job, so the job instructions will be sent to the stocker lt〇1 I 3 6 The receiver 36 accepting this, will be on the operation panel 121 of the stocker 36 Considerations I | 1 and then perform manual removal of the box 40 on the P port 118 to take out The display is filled with 1 I. The operator who sees this on this page will take out the appropriate box 1 1 I sub 40 from the manual use port α 118 and the operation panel 121 notifies the stocker 36 of the completion of the removal operation 1 1 0 Accepting this stocker 36 will judge the warehouse operation Completed and communicated with 1 through the communication m 58 to complete the completion report to the host computer 0 1 I The operator who took out the box 40 is different from the conventional one. The 1 I processing device 32 3 4 system is displayed on the request The display section 74 of the ID card 72 of the box 40 can be transported directly to the appropriate box step 172 '182 of the processing device 32 Λ 34 without having to carry out the operator terminal 56. The ID card reader J 1 writing device 120 is installed on the manual output port 118 of the stocker 36, and the host computer 50 can write a person on the 1 I display portion 74 of the ID card 72 attached to the box 40 as a transfer destination. Of the secondary processing device 32 34 1 1 Set the name 〇 1 1 Therefore, when taking out the cassette 40 from the manual outlet port 118, the operator cannot 1 1 know which processing device 32, 34 is to be buried, and in order to obtain 1 | The information is not necessary to the Lord The terminal 56 of the operator 50 of the computer 50 can solve the problem of wasted time because of 1 I. This paper can be used in Hgj home counties (CNS > Α4 · (2 丨 Qx297)) Central standard of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Bureau A7 B7 V. Description of Invention (8 !,) By this, the operator sees the device name * displayed on the display portion 74 of the ID card 72 attached to the box 40, and then the box 40 is transported directly to the processing units 32 and 34. The ID card 72 is provided with a communication unit 76 on the bottom surface thereof. By using the ID card 72 stocker 36, the ID card read-write device 120 can be arranged in the box in the manual inlet port 116 or manual outlet port 118 corresponding to the position of the communication unit 76 of the ID card 72 described above. Under the appliance 220. The ID card reading and writing device 120 * communicates with a communication unit 76 provided on the bottom surface of the ID card 72 through a communication window 132 made by the cassette receiving device 130. By arranging the ID card so that the writing device 120 is below the cassette receiving device 220, the operator can place the cassette 40 on the manual port 116 or remove the cassette 40 from the manual exit port 118. Taking the placement direction of the boxes 40 in these ports as the direction in which the ID card 72 faces the operator side, the operator will not cause obstacles as usual when placing or taking out such boxes 40. In this way, by arranging the ID card reading and writing device 120 under the box receiving device 220 installed on the manual inlet port 116 or manual outlet port 118 of the stocker 36, The mounting direction of the cassette 40 is a direction toward the operator. Furthermore, the placement directions of the magazine 40 in the stocker rack 96, the inlet transfer port 104 for the automatic transfer vehicle, the outlet transfer port 100 for the automatic transfer vehicle, and the port 98 for the transfer device between the stockers can be set to the outside. direction. Therefore, since the direction of the box 40 in the population port 88 for the automatic transfer vehicle of the stocker 36 is 90 degrees from the direction of the box 40 in the entrance transfer port 104 for the automatic transfer vehicle, the forward moving device 84 can be eliminated. In the middle of the operation, the paper size must be in accordance with Chinese National Standard (CNS) A4 (210X 297 mm). η (Please read the precautions on the back before filling this page)
I 冰—I -in A7 B7 經濟部中央標準局員工消費合作社印聚 五、發明説明 (fw ) 1 1 需 進 行 旋 轉 作 業 的 問 題 0 1 1 I 又 由 於 在 儲 料 器 36 之 白 動 搬 運 車 用 出 口 埠 86的 匣 子 40 1 1 | 之 方 向 與 在 白 動 搬 運 車 用 出 口 交 接 埠 100 的 匣 子 40之 方 向 請 先 1 1 閱 1 係 相 差 90度 » 所 Μ 可 解 消 前 進 移 動 裝 置 84在 作 業 中 途 必 需 讀 背 I ιδ 1 進 行 旋 轉 作 業 的 間 題 0 1 I 意 1 I 再 者 由 於 被 置 放 在 手 動 用 入 口 埠 116 和 手 動 用 出 D 埠 事 項 1 | 118 上 的 匣 子 40之 ID卡 72的 方 向 沒 有 朝 向 作 業 者 作 業 面 » 再 4 就 可 難 要 確 寫 本 裝 所 解 消 很 認 被 配 置 在 同 埠 上 的 匣 子 40 是 什 麽 頁 1 的 問 題 〇 1 1 藉 此 作 業 者 就 可 很 容 易 讀 取 顯 示 於 被 置 放 在 手 動 用 入 1 1 口 埠 116 和 手 動 用 出 P 埠 118 上 的 匣 子 40之 ID卡 72的 顯 示 1 訂 1 I 部 74之 資 訊 0 又 藉 由 將 白 動 搬 運 車 用 出 口 交 接 埠 / 100 和 白 動 搬 蓮 車 用 出 P 埠 86之 匣 子 40的 載 置 方 向 設 為 相 同 9 1 1 I 或 將 白 動 搬 運 車 用 入 P 交 接 埠 104 和 白 動 搬 運 車 用 入 口 埠 1 1 88 之 匣 子 40的 載 置 方 向 設 為 相 同 就 沒 必 要 在 該 等 埠 間 之 1 匣 子 40的 移 動 作 業 之 中 途 將 前 進 移 動 裝 置 84之 匣 子 40的 方 1 | 向 旋 轉 90度 〇 I | 在 上 述 之 半 導 體 晶 圓 匣 搬 運 裝 置 中 的 匣 子 40 9 會 因 該 等 1 1 製 程 而 有 非 常 討 厭 灰 塵 或 霧 氣 等 雜 質 附 著 在 晶 圓 70的 情 況 1 1 和 沒 有 那 樣 程 度 的 情 況 0 因 此 關 於 儲 料 器 36之 保 管 IM 環 境 1 1 的 要 求 亦 會 有 所 不 同 0 因 此 對 於 用 Μ 保 管 關 於 保 管 TtPT 環 境 1 I 有 嚴 格 要 求 之 製 程 的 匣 子 40之 儲 料 器 36而 言 9 就 可 使 用 具 1 I 備 白 動 搬 蓮 車 用 埠 外 遮 蔽 門 90 ·> 白 動 搬 運 車 用 璋 內 遮 蔽 門 1 1 I 92 > 手 動 用 璋 外 遮 蔽 門 114 手 動 用 埠 內 遮 蔽 門 112 、 儲 1 1 本紙張尺度適用中國國家標準（CNS ) A4規枱（210X297公f ) A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明 (88 ) 1 1 1 料 器 間 搬 蓮 裝 置 用 埠 外 遮 蔽 門 122 儲 料 器 間 搬 運 裝 置 用 1 1 I 埠 內 遮 蔽 門 110 等 的 遮 蔽 門 而 對 於 用 Μ 保 管 沒 有 那 麽 嚴 1 1 1 格 要 求 之 製 程 的 匣 子 40之 儲 料 器 36而 * 就 可 使 用 沒 有 具 請 先 1 1 ί 備 該 等 遮 蔽 門 者 〇 1½] 讀 背 1 | 面 1 如 此 按 照 用 以 處 理 匣 子 40之 處 理 裝 置 32 34所 進 行 的 製 1 I 意 1 I 程 而 藉 由 將 用 以 保 管 該 匣 子 40之 儲 料 器 36的 形 態 分 別 使 事 項 1 I 用 於 有 遮 蔽 門 和 無 遮 蔽 門 上 % 就 可 —. 面 將 具 高 價 的 遮 蔽 門 再 填 器 最 足 闢 寫 本 裝 之 儲 料 36之 使 用 抑 制 在 小 限 而 —· 面 滿 於 嚴 格 之 保 頁 '—^ 1 管 塌 境 的 要 求 〇 1 1 在 半 導 體 之 製 造 中 在 從 某 一 製 程 之 處 理 结 束 至 下 一 製 1 1 程 之 處 理 開 始 的 作 業 時 間 及 有 必 要 嚴 格 管 理 期 間 之 作 業 環 1 訂 1 I 境 的 製 程 為 很 長 的 製 造 製 程 中 存 在 有 幾 個 0 因 此 半 導 體 晶 圓 匣 搬 運 裝 置 混 合 有 有 遮 蔽 門 之 儲 料 器 36和 無 遮 蔽 門 之 1 1 儲 料 器 36 〇 而 且 主 電 腦 50亦 可 從 輸 入 機 構 54中 提 供 從 處 1 1 理 结 束 至 處 理 開 始 的 作 業 時 間 和 嚴 格 管 理 其 間 之 作 業 時 間 1 的 製 造 製 程 之 資 訊 〇 對 於 在 被 嚴 格 管 理 之 製 造 製 程 中 所 使 1 i 用 的 儲 料 器 36而 — 可 全 不 使 用 具 有 遮 蔽 門 者 進 而 亦 可 進 1 1 行 提 高 優 先 順 序 的 搬 運 控 制 以 便 將 使 用 儲 料 器 間 搬 運 裝 置 1 1 I 42之 儲 料 器 間 之 搬 運 作 業 及 使 用 白 動 搬 運 車 38之 儲 料 器 36 1 1 和 處 理 裝 置 32 Λ 34間 之 搬 運 作 業 與 其 他 的 製 造 製 程 比 較 而 1 1 可 快 速 進 行 0 1 I 在 該 種 的 半 導 體 晶 圓 匣 搬 蓮 裝 置 上 混 合 有 有 遮 蔽 門 和 無 1 I 遮 蔽 門 之 儲 料 器 36 0 進 而 主 電 腦 50可 在 嚴 格 管 理 作 業 rm 塌 境 1 1 I 之 製 造 製 程 Λ 和 除 此 K 外 的 製 程 中 分 別 使 用 該 等 儲 料 器 36 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29?公釐）I Bing—I -in A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (fw) 1 1 Problems that need to be rotated. 0 1 1 I It is also used for the white moving van in the stocker 36 The direction of the box 40 1 1 | at the exit port 86 and the direction of the box 40 at the exit transfer port 100 for the white moving van. Please note that the difference is 90 degrees first »The movable forward moving device 84 is necessary in the middle of the operation Read back I ιδ 1 The problem of rotating work 0 1 I meaning 1 I Furthermore, because the ID card 72 of the box 40 on the manual inlet port 116 and the manual outlet port D 1 | 118 is not oriented Toward the operator's work surface »It will be difficult to confirm the writing of this book. The problem of page 1 of the box 40 arranged on the same port is clear. 1 1 With this, the operator can easily read the display of the ID card 72 displayed in the box 40 placed on the manual use port 1 116 and the manual use port P 118. 1 Order 1 I Section 74 Information 0 The direction of mounting the box 40 of the white moving van exit port 100 and the white moving lotus car P port 86 is set to the same 9 1 1 I or the white moving van is used in the P The placement direction of the box 40 of the transfer port 104 and the entrance port 1 1 88 for the white moving van is set to be the same, so it is not necessary to advance the box 40 of the mobile device 84 in the middle of the movement operation of the box 40 between the ports. Square 1 | Rotate 90 degrees 〇I | The box 40 9 in the above-mentioned semiconductor wafer cassette handling device may be very nasty to dust or mist and other impurities attached to the wafer 70 due to the 1 1 process. 1 1 and No such feeling Condition 0 Therefore, the requirements for the storage of the IM environment 1 1 of the stocker 36 will also be different. 0 Therefore, for the storage of the storage 36 of the box 40 with a strict process for storage of the TtPT environment 1 by M, 9 Can be used with 1 I white-portable lotus door outside the door 90. > White-portable door inside the door 1 1 I 92 > Manual external door 114 The manual door inside the door 112, Storage 1 1 This paper size applies to Chinese National Standards (CNS) A4 regulations (210X297 male f) A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (88) Outer port shelter door 122 1 1 I Inner port shelter door 110 and other shelter doors are used for the storage door and other storage doors are not as strict as those stored by M 1 1 1 compartment. Can be used without tools. Please prepare 1 1 1½] Read back 1 | Surface 1 In this way, according to the manufacturing process of the processing device 32 34 for processing the box 40, the process is performed according to the form of the storage device 36 used to store the box 40. 1 I can be used on covered doors and uncovered doors%. — The use of high-priced covered door refills is sufficient to limit the use of the storage material 36 in the book, and the surface is full of strict "Protection sheet" — ^ 1 Requirement for tube collapse. 0 1 1 In semiconductor manufacturing, the operating time from the end of the processing of a certain process to the processing of the next 1 1 process and the need to strictly manage the operating cycle 1 The process of ordering an I environment is a very long manufacturing process. There are several zeros in the manufacturing process. Therefore, the semiconductor wafer cassette handling device is mixed with a shutter 36 and The shutter 1 1 stocker 36 〇 Moreover, the host computer 50 can also provide information from the input mechanism 54 on the operating time from the end of the processing 1 1 to the start of processing and the manufacturing process 1 in which the operating time 1 is strictly managed. The stocker 36 for 1 i used in the strictly controlled manufacturing process can be used without the use of a cover door, and can also be used to improve the priority of the conveyance control in order to use the conveyer between the stockers. 1 I 42 The transfer operation between the stockers and the use of the stocker 36 1 1 of the white moving truck 38 and the processing device 32 Λ 34 The transfer operation between the 34 and 34 is compared with other manufacturing processes and 1 1 can be quickly performed 0 1 I In this kind of semiconductor wafer box moving device, a storage door 36 0 with and without a 1 I shielding door is mixed, and the host computer 50 can perform strict management operations. These processes are used in manufacturing processes Λ and processes other than K 36 1 1 This paper size is in accordance with China National Standard (CNS) A4 (210X29? Mm)
經濟部智慧財產局員工消費合作社印製 。同時，主電腦50可進行提高優先順序的搬蓮控制Μ便將 使用儲料器間搬運裝置42之儲料器間之搬運作業暨使用自 動搬運車38之儲料器36及處理裝置32、34間之搬運作業與 其他的製造製程比較而可快速進行。因此，就可將具高價 的遮蔽門之儲料器36之使用抑制在最小限，且一面使用與 其他製程相同的儲料器間搬運裝置42和自動搬運車38而一 面滿足嚴格的搬運作業時間和醑於其作業環境的要求。 〔元件編號之說明] 30 搬 運 裝 置 32 處 理 裝 置 34 處 理 裝 置 36 儲 料 器 38 白 動 搬 運 車 40 匣 子 42 搬 運 裝 置 50 主 電 腦 52 主 機 54 輸 入 機 構 56 終 端 機 58 通 信 電 纜 60 白 動 搬 蓮 車 控 制器 62 通 信 單 元 64 儲 料 器 控 制 器 66 搬 運 裝 置 控 制 器 本紙張尺度適用中國國家標準（CNS)A4规格（ 210X297公釐） —92 _修正頁 ----------梵-------ΐτ------终 (請先閲讀背面之注_項再填寫本頁) k A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（9〇 ) 1 1 70 半 導 體 晶 圓 1 1 72 ID卡 1 74 顯 示 部 請 ! 先 1 76 通 信 部 閲 讀 1 背 I 80 儲 料 器 起 重 機 之 1 注 1 82 移 載 機 意 事 1 項 I 84 移 動 裝 置 再 填 1 86 白 動 搬 蓮 車 用 出 □ 埠 寫 本 (;- 頁 1 88 白 動 搬 運 車 用 入 P 埠 1 1 90 白 動 搬 運 車 用 埠 外 遮 蔽 門 1 1 92 白 動 搬 運 車 用 埠 内 遮 蔽 門 1 1 94 儲 料 器 面 板 訂 1 96 儲 料 器 架 1 I 98 搬 運 裝 置 用 埠 1 1 1 100 白 動 搬 運 車 用 出 〇 交 接 埠 1 1 線 * 102 通 信 單 元 104 g 動 搬 蓮 車 用 入 〇 交 接 埠 1 | 110 搬 運 裝 置 用 埠 内 遮 蔽 門 1 I 112 手 動 用 埠 内 遮 蔽 門 1 1 I 114 手 動 用 埠 外 遮 蔽 門 1 1 116 手 s&l. 動 用 入 口 埠 1 1 118 手 動 用 出 D 埠 1 I 120 ID卡 讀 寫 裝 置 1 1 I 121 操 作 面 板 1 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公嫠） -93 -修正頁 經濟部智慧財產局員工消費合作社印製 _ A 7 rP^c ^ B7 五、發明説明（91) 122 搬運裝置用埠外遮蔽門 124 升降機 130 匣子承接器具 132 通信窗口 140 台車 142 通信單元 144 機器臂 146 機器手 148 機器手爪 150 移載台 152 操作面板 154 緩衡板 156 感應帶 160 行走軌道 162 台車 164 懸吊金屬器具 170 主機 172 匣子台階 174 自動搬運車通信單元 180 主機 182 匣子台階 190 儲料器 192 自動搬運車用出口交接埠 194 自動搬運車用入口交接埠 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -94~- 修正頁 ----------gt--------IT------^ . /11 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 _B7 五、發明説明（92) 196 白 動 搬 運 車 用 出 □ 埠 198 g 動 搬 運 車 用 入 P 埠 200 移 動 裝 置 202 移 動 裝 置 210 手 動 用 出 P 埠 220 匣 子 承 接 器 具 230 半 導 體 晶 圓 匣 搬 運 裝置 232 匣 子 234 儲 料 器 240 ID卡 250 移 動 裝 置 252 白 動 搬 運 車 用 出 □ 埠 254 白 動 搬 運 車 用 入 P 埠 260 手 動 用 入 P 埠 262 手 動 用 出 □ 埠 270 ID卡 讀 寫 裝 置 (請先閲讀背面之注意事項再填寫本頁) -線！ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 修正頁Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. At the same time, the host computer 50 can perform the priority-moving control. Then, the storage operation between the stockers using the stocker handling device 42 and the stocker 36 and the processing devices 32 and 34 using the automatic carrier 38 will be performed. Compared with other manufacturing processes, the transfer operation can be performed quickly. Therefore, it is possible to suppress the use of the stocker 36 with a high-priced shielding door to a minimum, and to meet the strict handling operation time while using the same inter-stocker conveyance device 42 and the automatic conveyor 38 as other processes. Respond to the requirements of their operating environment. [Description of component numbers] 30 Carrying device 32 Processing device 34 Processing device 36 Stocker 38 White moving van 40 Box 42 Moving device 50 Host computer 52 Host 54 Input mechanism 56 Terminal 58 Communication cable 60 White moving lotus car control 62 Communication unit 64 Stocker controller 66 Handling device controller This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) —92 _correction page ------------ Van-- ----- ΐτ ------ Final (Please read the note _ item on the back before filling this page) k A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (9) 70 Semiconductor wafer 1 1 72 ID card 1 74 Display section please! First 1 76 Communication section read 1 Back I 80 Stocker crane 1 Note 1 82 Transfer machine intention 1 item I 84 Mobile device refill 1 86 white Moving lotus Vehicle exit □ Port copybook (;-Page 1 88 White moving van into P port 1 1 90 White moving van outside port door 1 1 92 White moving van inside port door 1 1 94 Stocker Panel order 1 96 Stocker rack 1 I 98 Port for carrying device 1 1 1 100 For white moving vans 0 Transfer port 1 1 line * 102 Communication unit 104 g For moving lotus cars 0 Transfer port 1 | 110 Handling Device in-port cover door 1 I 112 Manual in-port cover door 1 1 I 114 Manual-port cover door 1 1 116 Hand s & l. Use of inlet port 1 1 118 Manual use of D-port 1 I 120 ID card read Writing device 1 1 I 121 Operation panel 1 1 1 This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 cm) -93-Revised page Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs _ A 7 rP ^ c ^ B7 V. Description of the invention (91) 122 Covering door outside port for carrying device 124 Lift 130 box Undertake equipment 132 Communication window 140 Trolley 142 Communication unit 144 Robot arm 146 Robot hand 148 Robot gripper 150 Transfer platform 152 Operation panel 154 Slow balance plate 156 Induction belt 160 Travel track 162 Trolley 164 Suspension metal appliance 170 Main unit 172 Box step 174 Communication unit for automatic truck 180 Main unit 182 Box step 190 Stocker 192 Outlet transfer port for automatic truck 194 Inlet transfer port for automatic truck This paper is applicable to Chinese National Standard (CNS) A4 (210X297 mm) -94 ~ -Correction page ---------- gt -------- IT ------ ^. / 11 (Please read the notes on the back before filling this page) Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives_B7 V. Description of the Invention (92) 196 For white moving vans □ Port 198 g For moving vans into P port 200 Mobile device 202 Mobile device 210 Manual use P port 220 Box receiving device 230 Semiconductor wafer box handling device 232 box 234 stocker 240 ID card 250 mobile device 252 white moving truck □ a white movable port 254 into the P guided vehicles with manual port 260 with the port 262 into the P manually written out □ port 270 ID card reading means (Read Notes on the back and then fill the page) - Line! This paper size applies to China National Standard (CNS) A4 (210X297 mm) correction page