JP2792800B2 - Manufacturing process management system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing process management system for controlling, for example , storage and transfer of wafers used in a semiconductor manufacturing process.

[0002]

2. Description of the Related Art Pattern formation, etching, thin film formation,
A semiconductor integrated circuit is formed on a silicon wafer by using a processing technique such as impurity diffusion.

In practice, a large number of semiconductor manufacturing apparatuses for performing the above-mentioned processing techniques are arranged along a predetermined manufacturing line, and several tens of wafers are stored in one case, and each semiconductor is manufactured according to a predetermined manufacturing process chart. Processed by manufacturing equipment.

The number of steps processed by a semiconductor manufacturing apparatus depends on the type of semiconductor integrated circuit to be manufactured. In order to manufacture a semiconductor integrated circuit requiring such a large number of processes, a manufacturing process management system as shown in FIG. 5 is required.

In FIG. 5, reference numeral 1 denotes a process management host, which manages a process chart of each lot in which a plurality of semiconductor wafers are set as one unit. For example, one of the in-process information lot A has completed processing up to which process can be detected by searching the databases provided in the process management host 1.

The semiconductor wafer is always stored in the lot case 6 in lot units except for processing in the semiconductor manufacturing apparatus. The lot case 6 is provided with a bar code 7 on which a lot number for identifying the lot is written.

Reference numeral 2 denotes a transport management host, which gives a transfer command of the lot case 6 and a storage command to the stocker to the traveling control unit 3 and the stocker control unit 4, respectively.

The traveling control unit 3 performs wired or wireless communication based on the transfer command received from the transfer management host 2, mounts the lot case 6 on the transfer vehicle 8 moving on a predetermined rail, and Performs all controls necessary to move to the specified stocker.

The stocker control unit 4 (4a, 4b,...)
Equipped with one corresponding to one stocker (not shown),
Based on a storage command received from the transport management host 2, all controls necessary to store the designated lot in the stocker are performed.

The stocker control unit 4 has a reader 5 (5a, 5a).
b) is equipped, and the lot case 6 can be identified by reading the bar code 7 attached to the lot case 6 using the reader 5.

The operation of the manufacturing process management system having the above configuration will be described below.

When the lot processing (process) is completed in a certain semiconductor manufacturing apparatus, the lot case 6 is manually carried to the nearest stocker control unit 4 to check the lot number. For example, when the lottery 6 is conveyed to the stocker controller 4a, the barcode 7 of the lottery 6 is read by the reader 5a.
Is transmitted to the transport management host 2 via the stocker controller 4a.

Then, the transport management host 2 transmits the lot number to the process management host 1, and then, from the process management host 1, sends the lot having the lot number to the semiconductor manufacturing apparatus to be processed next and its vicinity. Receiving destination information, which is information on stockers and the like provided in the server.

The transport management host 2 gives the travel control unit 3 a move command for instructing the next stocker in which the lot case 6 is to be stored, based on the destination information obtained from the process management host 1.

The traveling control unit 3 having received the movement command moves the transport vehicle 8 to the position of the stocker control unit 4a, mounts the lot case 6 on the transport vehicle 8, and transfers the transport vehicle to the stocker determined based on the travel command. Move 8

For example, when the destination information indicates the stocker control unit 4b, the lot case 6 mounted on the carrier 8 is transported to the position of the stocker control unit 4b. Stocker control unit 4
b is stored in the stocker.

[0017]

The conventional manufacturing process management system is configured as described above. If the process management host 1 fails for any reason, it becomes impossible to obtain destination information. For this reason, the transfer command from the transport management host 2 cannot be output, and the transport control of the lot case 6 by the transport vehicle 8 cannot be performed, thereby causing a problem that the production line does not function at all.

Further, since the process management host 1 frequently performs all processes based on transport control such as communication, search, and command, the load on the process management host 1 is large. In order to withstand this large load, it is necessary to increase the performance and reliability of the computer used for the process management host 1, and there is a problem that the process management host 1 is costly.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, so that even if the process management host fails, the transport system is not affected, and the load on the process management host is reduced. It is an object of the present invention to obtain a manufacturing process management system that can be reduced.

[0020]

According to a first aspect of the present invention, there is provided a manufacturing process management system, wherein a plurality of stockers for storing a lot case containing semiconductor wafers are arranged at predetermined positions. On a manufacturing line in which semiconductor manufacturing devices are arranged in association with each other, along with a predetermined manufacturing process, after temporarily storing the lot case in any of the plurality of stockers, the semiconductor manufacturing device A system for sequentially performing a predetermined manufacturing process on a semiconductor wafer and manufacturing a semiconductor integrated circuit, wherein the inter-stocker transport means capable of transporting the lot case among the plurality of stockers, and which is provided in the lot case, Storage means for storing readable and writable destination information indicating a stocker in which a lot case is to be stored next; A destination information update unit that updates the destination information stored in the storage unit each time a predetermined process is completed by the semiconductor manufacturing apparatus; and the lot case based on the destination information stored in the storage unit. A stocker control means for outputting a movement command instructing movement to any one of the plurality of stockers, and a stocker for controlling the inter-stocker transport means based on the movement command, and instructing the lot case to the movement command. Transfer control means for moving the semiconductor wafer in the lot case based on a change over time of the destination information stored in the storage means, and changing a procedure of the predetermined manufacturing process. A step management means for performing step management.

Preferably, the manufacturing process management according to claim 2 is performed.
As in the system, the storage means stores the lot case.
Further storing identification information for identifying the plurality of storages.
Each is installed in the mosquito and stored in the corresponding stocker
Stored in the storage means provided in the lot case.
The identified identification information and the preceding information can be read.
A plurality of information access means may be further provided. Desiring
Alternatively, as in the manufacturing process management system according to claim 3,
The information access means is stored in a corresponding stocker.
Stored in the storage means provided in the lot case.
Writing of the preceding information to be performed is further possible,
The step management means includes a plurality of information access means.
It is equipped in the stocker that stores the lot case
Using information access means,
The destination information can be changed for the stored storage means.
There may be.

Preferably, as in the manufacturing process management system according to claim 4 , the stocker-to-device transport means capable of transporting the lot case between the stocker and the semiconductor manufacturing device corresponding to the stocker. And a transfer control means for controlling the transfer means between the stocker and the device.

[0023]

According to a first aspect of the present invention, there is provided a manufacturing process management system, wherein each lot case is provided with storage means for reading and writing destination information indicating a stocker in which the lot case is to be stored next. Means are
Based on the destination information stored in the storage means, a movement command for instructing the lot case to move to any of the plurality of stockers is output to the transport control means.

Therefore, the lot case can be moved between the stockers by the stocker transporting means under the control of the stocker controlling means without using the process managing means.

[0025]

FIG. 1 is a block diagram showing a system configuration of a manufacturing process management system according to a first embodiment of the present invention.

The overall configuration of the manufacturing process management system according to the first embodiment is as follows. That is, a plurality of stockers (not shown) for storing a lot case 6 in which a plurality of semiconductor wafers are stored in lot units are arranged at predetermined positions, and a semiconductor manufacturing apparatus is arranged corresponding to each of the plurality of stockers. On the manufacturing line, after temporarily storing the lot case 6 in any of the plurality of stockers along a predetermined manufacturing process, the semiconductor manufacturing apparatus sequentially performs a predetermined manufacturing process on the lot in the lot case 6, This is a manufacturing process management system for manufacturing a semiconductor integrated circuit.

As shown in FIG. 1, an IC card 11 is mounted on each lot case 6. The IC card 11 can read and write, as storage data, all processes in which lots (a plurality of semiconductor wafers) in the lot case 6 are processed, in-process information indicating the current processing process stage, and the like. Therefore,
From the storage data of the IC card 11, destination information indicating a stocker in which a lot case is to be stored next can be obtained.

The stocker controller 4 '(4'a, 4'b,
..) Have stocker management terminals 9 (9a, 9b,
) Are provided, and each stocker management terminal 9 is provided with a reader / writer (R / W) 10 (10a, 10b, ...). Each R / W 10 can read and write data stored in the IC card 11.

Then, the stocker control unit 4 ′ stores the data stored in the IC card 11 attached to the lot case 6 into an R /
Based on the destination information obtained by reading using W10, a movement command instructing movement to the stocker indicated by the destination information is output to the travel control unit 3.

A process management terminal 16 for updating data stored in the IC card 11 mounted on the lot case 6.
Are provided everywhere (only one is shown in FIG. 1), and after the processing by each semiconductor manufacturing apparatus (not shown) is completed, the R / W 20 provided in the process control terminal 16 causes the specification in the destination information to be performed. The hook information is updated.

The process management host 1 obtains the ever-changing destination information from the stocker management terminal 9 and the process management terminal 16, and recognizes the processing status of the lot in each lot case 6.

The transfer management host 2 monitors a transfer command given from the stocker control unit 4 'to the travel control unit 3 to grasp the past transfer history and the current position of the transfer vehicle 8.

FIG. 2 is an explanatory diagram showing details around the stocker control section 4 '. As shown in the drawing, the stocker control unit 4 'is formed integrally with a stocker 12 not shown in FIG. 1, and an R / W 10 is provided at the loading / unloading port of the stocker 12.

The other components such as the travel control unit 3 and the transport vehicle 8 are the same as those of the prior art, and the description is omitted.

Hereinafter, the operation of the manufacturing process management system according to the first embodiment having the above configuration will be described.

When the lot processing (process) is completed in a certain semiconductor manufacturing apparatus, the lot case 6 is manually carried to the nearest stocker control unit 4 '(here, temporarily referred to as the stocker control unit 4'a), and R of the stocker management terminal 9a
/ W10a obtains destination information from the storage data of the IC card 11 attached to the lot case 6. Then, the stocker control unit 4'a stores the destination information in the process management host 1.
Send to

Next, the stocker control unit 4'a temporarily stores the lot case 6 in the stocker, and gives the traveling control unit 3 a command to transfer the transport vehicle 8 to the stocker of the stocker control unit 4'a. Then, the traveling control unit 3 moves the carrier 8 to the position of the stocker control unit 4'a.

When the transport vehicle 8 arrives at the position of the stocker control unit 4'a, the lot case 6 is taken out of the stocker and mounted on the transport vehicle 8, and the stocker control unit 4 'designated by the destination information (tentatively, the stocker control unit 4'a). To the traveling control unit 3. Then, the travel control unit 3 moves the carrier 8 to the position of the stocker control unit 4'b.

When the transport vehicle 8 arrives at the position of the stocker control unit 4'b, the lot case 6 is stored in the stocker of the stocker control unit 4'b. Then, when there is a vacancy in the semiconductor manufacturing apparatus that processes the lot in the lot case 6, the lot is taken out from the lot case 6 in the stocker and set in the semiconductor manufacturing apparatus, and the processing by the semiconductor manufacturing apparatus is performed on the lot. Apply.

After the processing is completed, the R / W of the process management terminal 16
20 rewrites the data stored in the IC card 11 of the lot case 6 and updates the in-process information.

Thereafter, the same processing is repeated to process the lots in the lot case 6, and finally a semiconductor integrated circuit is manufactured.

As described above, in the first embodiment, the process management host 1 only recognizes the destination information of each lot case 6 received from the stocker control unit 4 ′, Control of lot case 6
Is performed by the stocker control unit 4 'based on the data stored in the IC card 11 in the storage unit. For this reason, the load on the process management host 1 is reduced as compared with the related art, and the cost required for constructing the process management host 1 is not so large.

Even if the process management host 1 fails,
The IC card 11 of the lot case 6 includes the lot case 6
The destination information including the in-process information indicating the current processing step and the whole process in which lots (a plurality of semiconductor wafers) in the lot are processed is written in the IC card 11 as storage data. Based on the data,
The transfer process can be continued.

<Second Embodiment> FIG. 3 shows a second embodiment of the present invention.
It is explanatory drawing which shows the periphery of the stocker control part 4 'of the manufacturing process management system which is an Example of FIG. Stocker 12 shown in FIG.
Has a plurality of lot cases 6 accommodated therein.

As in the first embodiment, an R / W 10 is provided at the loading / unloading port of the stocker 12 and the stocker 12 is provided.
An R / W 10 'is also separately provided above the inside of the. In addition,
Other configurations and basic operations are the same as those of the first embodiment, and thus description thereof is omitted.

Hereinafter, an R / R newly provided in the stocker 12 will be described.
The function of W10 'will be described. The lot case 6 stored in the stocker 12 is automatically moved to a readable / writable position of the IC card 11 by the R / W 10 'after a predetermined time has elapsed. Then, the identification number of the lot case 6 is read based on the data stored in the IC card 11 and transferred to the process management host 1 via the stocker management terminal 9. Also, R / W1 in all the stockers 12
By performing the read process by 0 ', the stocker 1
Inventory check processing for all lot cases 6 stored in
Can do so.

At this time, if it is necessary to change the process of the lot case 6 having the identification number read by the process management host 1, the process is performed via the stocker management terminal 9 and the R / W 10 '.
The process change information can be written to the IC card 11 of the lot case 6.

As described above, in the second embodiment, the process management host 1 can write the process change of the lot in the lot case 6 to the IC card 11 while the lot case 6 is stored in the stocker 12. By setting the period, the transport management host 2 can change the data stored in the IC card 11 relatively easily.

<Third Embodiment> FIG. 4 shows a third embodiment of the present invention.
It is explanatory drawing which shows the periphery of the stocker control part 4 'of the manufacturing process management system which is an Example of FIG. As shown in the figure, a rail 13 is provided between a stocker 12 and a semiconductor manufacturing apparatus 15 (not shown in the first and second embodiments). The rail 13 functions as a track through which the carrier 8 'passes between the stocker 12 and the semiconductor manufacturing apparatus 15.

The semiconductor manufacturing equipment 15 is equipped with a semiconductor manufacturing equipment control unit 14, and the semiconductor manufacturing equipment control unit 14 controls the semiconductor manufacturing equipment 1 such as furnace temperature control and material gas flow control.
5 and also manages the loading / unloading of the lot case 6.

The other configuration and basic operation are the same as those of the first embodiment or the second embodiment, and the description is omitted.

Hereinafter, features of the third embodiment will be described. First, when the processing by the semiconductor manufacturing apparatus 15 for the lot in the lot case 6 is completed, the semiconductor manufacturing apparatus control unit 1
4 gives a lot collection command to the stocker control unit 4 ', and moves the carrier 8' to the semiconductor manufacturing device 15 in cooperation with the semiconductor manufacturing device control unit 14 and the stocker control unit 4 '.

Then, the lot case 6 is mounted on the carrier 8 ′, and after the carrier 8 ′ is moved to the vicinity of the stocker 12, the lot case 6 is stored in the stocker 12.

When the semiconductor manufacturing apparatus 15 carries in the lot case 6 to be processed next from the stocker 12,
The semiconductor manufacturing device control unit 14 outputs a manufacturing processing command to the stocker 12.

Then, the transport vehicle 8 'is moved to the stocker 12 by the cooperation of the semiconductor manufacturing apparatus control section 14 and the stocker control section 4'.

After the lot case 6 is mounted on the carrier 8 ′ and the carrier 8 ′ is moved to the semiconductor manufacturing apparatus 15, predetermined processing by the semiconductor manufacturing apparatus 15 is performed on the lots in the lot case 6. Apply.

As described above, by automating the movement of the lot case 6 by the carrier 8 'between the stocker 12 and the semiconductor manufacturing apparatus 15, the labor can be saved.

[0058]

As described above, in the manufacturing process control system according to the first aspect of the present invention, the storage means in which the destination information indicating the stocker where the lot case is to be stored next is readable and writable is provided. Equipped in the lot case, the stocker control means outputs a movement command for instructing movement of the lot case to any of the plurality of stockers to the transport control means based on the destination information stored in the storage means.

Therefore, the lot case can be moved between the stockers by the stocker transporting means under the control of the stocker controlling means without using the process managing means.

Therefore, the load on the process management means can be reduced, and even if the process management means fails, the lot case can be moved between the stockers by the stocker transport means without any trouble under the control of the stocker control means. It can be performed. A manufacturing process management system according to claim 2
System is installed in each of multiple stockers,
Memory installed in the lot case stored in the stocker
Can read identification information and destination information stored in the means
With multiple information access means
Data stored in the stocker as information access means
More identification information and destination information can be obtained. The result
Inquiry of process management means for identification information and destination information
Identification information read by the information access means without
Information stored in the stocker based on the
Inventory check process for
The load on the process control means can be reduced.
You. A process of the manufacturing process management system according to claim 3.
The management means is a lot case of the plurality of information access means.
Information access means installed in the stocker that stores data
By using the storage means equipped in the lot case,
Because the stored contents can be changed,
Changes in the stocker, etc.
The destination information stored in the storage means
Can be changed promptly. Further, according to claim 4
Manufacturing process management system supports stockers and stockers
Of lot cases to and from semiconductor manufacturing equipment
Transfer device between stocker and device, and stocker and device
Transport control means for controlling the inter-transport means,
Under the control of the transport control means, the stocker and the semiconductor manufacturing apparatus
Transfer between the two, and the load on the process management means
Can be reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a manufacturing process management system according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram illustrating the vicinity of a stocker control unit according to the first embodiment.

FIG. 3 is an explanatory diagram showing the vicinity of a stocker control section of a manufacturing process management system according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing the vicinity of a stocker control unit of a manufacturing process management system according to a third embodiment of the present invention.

FIG. 5 is a block diagram showing a configuration of a conventional manufacturing process management system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Process management host 2 Transport management host 3 Travel control part 4 'Stocker control part 6 Lot case 8 Transport vehicle 9 Stocker management terminal 10 R / W 11 IC card 12 Stocker 13 Rail 14 Semiconductor manufacturing equipment control part 15 Semiconductor manufacturing equipment 16 Process control terminal 20 R / W

Continued on the front page (58) Fields surveyed (Int.Cl. ⁶ , DB name) H01L 21/68 B65G 37/02 B65G 49/07 G06F 17/60 H01L 21/02

Claims (4)

(57) [Claims] A plurality of stockers for storing a lot case containing semiconductor wafers are arranged at predetermined positions, and a plurality of stockers are arranged on a production line in which a semiconductor manufacturing apparatus is arranged in correspondence with each of the plurality of stockers. Along with the manufacturing process, after temporarily storing the lot case in any of the plurality of stockers, a predetermined manufacturing process is sequentially performed on the semiconductor wafer by the semiconductor manufacturing apparatus,
A manufacturing process management system for manufacturing a semiconductor integrated circuit, comprising: inter-stocker transport means capable of transporting the lot case among the plurality of stockers; and being mounted on the lot case, wherein the lot case is stored next. Storage means for storing destination information indicating a stocker to be readable and writable, and each time predetermined processing by the semiconductor manufacturing apparatus ends,
Destination information updating means for updating the destination information stored in the storage means; and instructing movement of the lot case to any of the plurality of stockers based on the destination information stored in the storage means. A stocker control unit that outputs a movement command, a conveyance control unit that controls the inter-stocker conveyance unit based on the movement command, and moves the lot case to a stocker that is instructed by the movement command, and stored in the storage unit. A process management means for grasping the processing status of the semiconductor wafer in the lot case based on a change over time of the destination information and performing process management such as a change in a procedure of the predetermined manufacturing process. system. 2. The storage means stores the lot case.
Further, identification information to be distinguished is further stored, and the corresponding
The lot case stored in the container
Of the identification information and the preceding information stored in the storage means.
Further equipped with a plurality of readable information access means
The manufacturing process management system according to claim 1 , wherein 3. The information access means according to claim 1, wherein :
The information provided in the lot case stored in the container
The writing of the preceding information to be stored in
The process management means may include a plurality of information access means.
It is equipped in the stocker that stores the lot case
Using information access means,
The destination information can be changed for the stored storage means.
3. The manufacturing process management system according to claim 2 , wherein: 4. The stocker and a corresponding one of the stockers
The lot case with the semiconductor manufacturing apparatus
Between the stocker and the device capable of transporting the paper, and a transport control means for controlling the transporter between the stocker and the device.
4. The manufacturing process management system according to claim 3 , further comprising a step.