JP4564241B2 - Semiconductor device production system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor device production system in which a barcode is attached to a storage case storing semi-finished products of a semiconductor device, and this is used as management information.
[0002]
[Prior art]
Conventionally, in this type of semiconductor device production system, a travel sheet, which is a slip in which product information is described, is issued for each manufacturing unit (hereinafter referred to as a lot) and sent to each process together with the product. In the conventional production system, a person collates the product information described in the travel sheet with the actual product.
[0003]
In addition, in order to store a half-finished product for one lot, a plurality of storage cases or magazines are required, such as two semi-finished product storage cases such as a wafer storage case and three to eight magazines. .
[0004]
[Problems to be solved by the invention]
In the conventional production system as described above, since the operator has judged the travel sheet and the semi-finished product, a defective product may be produced due to human error.
[0005]
Further, when a plurality of storage cases or magazines are required to store one lot of semi-finished products, there is a problem that storage cases, magazines or C-type cassettes of other lots are mixed.
[0006]
SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor device production system that simplifies the production process and minimizes human intervention.
[0007]
[Means for Solving the Problems]
A semiconductor device production system according to the present invention is used in a manufacturing process for producing a semiconductor device, and is attached to each of a plurality of types and a plurality of storage cases for storing semi-finished products of the semiconductor devices , A barcode that identifies the plurality of types and a plurality of storage cases; and a wireless barcode reader that can read these barcodes and communicate with a computer wirelessly, the computer receiving information from the wireless barcode reader comprising a determining function for determining the acceptability result of the manufacturing process of semi-finished products that are accommodated in the storage case based on a transfer function for transmitting the acceptance result in operator, to the said determining function includes the steps When a lot of storage cases that store one lot are mixed with a plurality of storage cases that store one lot at the time of lot insertion and withdrawal It is characterized in that it has a storage case confirmation function of confirming a.
[0008]
In the semiconductor device production system of the present invention, the determination function further includes a consistency confirmation function for confirming the consistency of the work sequence at the time of lot input or delivery of each process. It is.
[0010]
Furthermore, in the semiconductor device production system of the present invention, the computer further has an instruction function for instructing an operator of lot information to be produced next at the time of payout or a production number to be placed next. Is.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing a system configuration and a wireless barcode reader according to an embodiment of the present invention. FIG. 1A is a block diagram of the system configuration, and FIG. 1B is a perspective view of the wireless barcode reader.
[0012]
In FIG. 1A, a computer 5 is installed in a management center (not shown). The computer 5 is connected with a process order definition master 6, a process management database 7, a monitor 8, a wireless barcode reader communication device 9, and the like, which are registered databases for defining process orders, via a communication line 10. It is configured so that data can be exchanged between them.
[0013]
The wireless barcode reader communicator 9 is a system for wirelessly exchanging information with the wireless barcode reader 11 shown in FIG. 1B, and the wireless barcode reader 11 has a monitor for displaying a message. 11A, a speaker 11B that emits a buzzer, an input unit 11C that can input simple information, and the like.
[0014]
FIG. 2 is a process block diagram showing the order of the assembly process of the semiconductor device according to the present invention. It shows a state in which products are produced in respective process orders such as mold after cure 12H, Po12I, phosphoric acid 12J, exterior 12K, and T / F 12L.
[0015]
And in order to identify each process, process ID13A-13L is attached to each of these processes.
[0016]
The process ID may be a device ID for identifying a semiconductor device.
[0017]
In this series of assembling processes, storage cases 14A, 14B, and 14C for storing semi-finished products in the middle of manufacturing are placed in the respective processes from the manufacturing process input 12A to the dicing process 12C. Barcodes 15A to 15C are attached to the storage cases 14A to 14C as storage case IDs so that the storage cases 14A to 14C can be distinguished from other storage cases.
[0018]
When the semiconductor device is manufactured, the travel sheet 16 shown in FIG. 3 is issued for each lot, put in each of the storage cases 14A to 14C, and sent to the next process.
[0019]
A bar code 16A is attached to the travel sheet 16 as a lot ID for identifying the lot.
[0020]
In each process from the mount 12D to the bonding 12F, a plurality of magazines 17A to 17C are installed for each process. It is attached as
[0021]
Furthermore, a plurality of C-type cassettes 19A to 19F are installed in each process from mold 12G to T / F 12L, which is the next process of bonding 12F, and these C-type cassettes 19A to 19F are also installed. In order to identify that the cassette is a C-type cassette for each process, cassette IDs are attached as barcodes 20A to 20F.
[0022]
FIG. 4 shows the process order definition master 6 shown in FIG. 1A, the data recorded in the process management database 7, and the consistency check sent from the wireless barcode reader 11 (FIG. 1B). It is explanatory drawing for demonstrating data etc. FIG. In the figure, process order definition master data 21 is created in advance before manufacturing a semiconductor device and registered in the process order definition master 6, and is prepared for each process ID 21A representing the manufacturing process of a product. In the drawing, data relating to the process ID “AK032” is shown.
[0023]
Further, the process sequence of the product is represented by a process ID 21B, and in this embodiment, the process ID 21B is recorded from “mount IN” to “bonding OUT” in the process order of the production line.
[0024]
The process ID 21B includes items of a process ID 21C and a storage case replacement 21D, and the process ID 21C includes a process name “wafer mound to bonding” and a process input (hereinafter referred to as IN) or a payout (hereinafter referred to as OUT). Information) is recorded.
[0025]
In the storage case replacement 21D, “present” is recorded when the storage case replacement occurs at OUT, and “none” is recorded when it does not occur.
[0026]
The process management database record data 22 is data in which information of each lot is recorded, and is created at or before the IN time of the lot. The lot ID 22A, the process ID 22B, and the process ID22C and storage case ID22D exist.
[0027]
These data are not only used to check data consistency when moving from process to process, but when data consistency is confirmed, the lot moves to the next process. Similarly to the above, each data is rewritten to the information of the next process.
[0028]
This consistency is performed by inputting consistency confirmation data 23 from the wireless barcode reader 11 (FIG. 1B) when the operator moves the process.
[0029]
This consistency confirmation data 23 is composed of a lot ID 23A, a process ID 23B, and a storage case ID 23C. Among these, the lot ID 23A is input from the barcode 16A of the travel sheet 16 (FIG. 3). The process ID 23B is input from the input unit 11C (FIG. 3) of the barcode 13A indicating the process ID attached to the input process 12A or each of the processes 12B to 12L (FIG. 2). The information of IN or OUT is connected.
[0030]
The above-described IN or OUT information may be read from the wireless barcode reader 11 by preparing a barcode in advance.
[0031]
On the other hand, the storage case ID 23C is obtained by reading the barcodes 15A to 15C attached to the storage cases 14A to 14C with the wireless barcode reader 11, and the bars of all cases in which lots to be moved are stored. The code is to be recorded.
[0032]
Next, a procedure of confirmation work according to the embodiment of the present invention will be described.
[0033]
First, in order to manufacture a semiconductor device, an operator must enter the barcode 16A described in the travel sheet 16 (FIG. 3) before entering or out of a lot in process. The lot ID is input from the wireless barcode reader 11 (FIG. 1B).
[0034]
Next, the barcodes 13A to 13L attached to the input 12A and each of the process devices 12B to 12L, that is, the process ID is input from the wireless barcode reader 11, and then whether the process is IN or OUT is determined by the wireless barcode. Input from the input unit 11 </ b> C of the reader 11.
[0035]
Finally, all the bar codes 15A to 15C which are the storage case IDs of the storage cases 14A to 14C in which the lots to be worked are stored are input.
[0036]
When all these inputs are completed, the wireless barcode reader 11 edits the consistency check data 23 and transmits it to the wireless barcode reader communication device 9 (FIG. 1A).
[0037]
The wireless barcode reader communication device 9 transfers the consistency check data 23 to the computer 5 (FIG. 1A) via the communication line 10 (FIG. 1A). The process order definition master data 21 is read from the master 6 (FIG. 1A), and the process management database record data 22 is read from the process management database 7 (FIG. 1A).
[0038]
In this reading procedure, first, the process management database recording data 22 having the same lot ID 22A as the lot ID 23A of the consistency confirmation data 23 is read.
[0039]
Next, the process order definition master data 21 having the same process ID 21A as the process ID 22B of the process management database record data 22 is read, and the computer 5 confirms the consistency.
[0040]
This consistency check operation will be described with reference to FIG. FIG. 5 is a flowchart showing the operation procedure of the consistency check. First, the computer 5 searches the process order definition master data 21 for the process ID 21B that is the same as the process ID 22C of the process management database record data 22, and Step 21C “bonding OUT step” and storage case replacement 21D “present” are acquired. In this case, the process 21C is used as confirmation process data, and the storage case replacement 21D is used as replacement data (step S5-1).
[0041]
Next, the process data acquired in (Step S5-1) is compared with the process ID 23B of the consistency confirmation data 23 (Step S5-2). If the result of this comparison is a mismatch (NG), the NG routine is entered and the process ends through NG1 (step S5-3). On the other hand, in the case of coincidence (OK), it is confirmed whether or not it is necessary to check the consistency of the storage case ID. When OUT, the confirmation is made when the replacement data acquired in (Step S5-1) is “None” (Step S5-4).
[0042]
If there is no need for comparison in this confirmation, the routine enters a NO routine, where it is determined to be OK (step S5-6) and ends. If a comparison is necessary, the routine enters YES, and the process management database recording data 22 is entered. It is checked whether the storage case ID 22D matches the storage case ID 23C of the consistency confirmation data 23 (step S5-5).
[0043]
In this confirmation, when all the storage case IDs 23C match, it is determined to be OK (step S5-6) and the process ends. When a case where the storage case IDs 23C do not match appears, the NG routine is entered and NG2 ( After step S5-7), the process ends.
[0044]
For this purpose, the confirmation result of the consistency performed by the computer 5 is sent to the monitor 8 (FIG. 1A) or the wireless barcode reader communication device 9 (FIG. 1A) via the communication line 10 (FIG. 1A). 1 (A)), the confirmation result is displayed on the screen of the monitor 8 (FIG. 1 (A)), and the operator is notified of the result.
[0045]
On the other hand, the wireless barcode reader communication device 9 sends the confirmation result to the wireless barcode reader 11 (FIG. 1B), and the wireless barcode reader 11 displays the result on the attached monitor 11A.
[0046]
When the result is NG, a buzzer sounds from the attached speaker 11B (FIG. 1 (B)), and informs the operator that there is an error in the input storage case in the process of moving from the buzzer.
[0047]
When the result is OK, the process ID 22C and the storage case ID 22D of the process management database recording data 22 are rewritten to the data of the process ID 23B and the storage case ID 23C of the consistency confirmation data 23.
[0048]
Here, the function of transmitting and instructing the worker the lot information to be produced next or the semiconductor manufacturing apparatus number to be set next will be described with reference to FIG.
[0049]
FIG. 6 is a flowchart for detecting the next lot to be produced for the semiconductor device currently performing the OUT operation and the semiconductor manufacturing apparatus to be set next for the lot currently performing the OUT operation. It is a flowchart which operate | moves.
[0050]
As preconditions, the process IDs of the process management database record data 24, 25, and 26 (hereinafter, FIG. 4) are set as apparatus IDs 24A, 25A, and 26A, and reservation IDs 24B, 25B, and 26B are added. Shall.
[0051]
In FIG. 6, if the current process is “mount cure”, first, from the corresponding process ID, in this case “AK032”, the process order definition master data 21 (FIG. 4), the next process ID “bonding” is performed. "(Step S6-1), and from the apparatus master data 27 (FIG. 4) of the corresponding process ID" AK032 "," bonding "which is the apparatus ID of the next process acquired in (step S6-1). All, that is, the process management database record data 23 for six units corresponding to the device IDs “bonding # 1 to # 6” are acquired (step S6-2).
[0052]
Next, all the process management database record data 25 and 26 for the device ID “bonding” acquired in (Step S6-2) are acquired (Step S6-3).
[0053]
Of the process management database record data 25 and 26 acquired in (Step S6-3), the process management database record data 25 at the present time has neither IN nor OUT, or an apparatus ID with OUT. (Step S6-4).
[0054]
As a result of the determination, in this case, since the device ID is OUT, the lot is not in progress. Therefore, the lot where the device ID “mount cure # 1” is currently OUT, that is, the semiconductor manufacturing device to which the lot ID 24C is set next is set. At present, 1 is set in the reservation ID of the process management database recording data for the lot that is OUT.
[0055]
When only the process management database record data 26 is acquired, the device ID 26A is a device ID with OUT, so that “bonding # 1” becomes the next semiconductor manufacturing apparatus, and the reservation ID 25B of the process management database record data 25 is “ 1 "is set.
[0056]
Further, in the method for detecting the next production lot, first, from the process order definition master data 21 of the process ID “AK032”, the immediately preceding process ID, in this case, the previous process is “mount”. “Mounts # 1 to # 3” are acquired (step S6-6), and then the device ID “mounts # 1 to ## of the previous process acquired in (step S6-6) from the device master data 27 of the corresponding process ID. All 3 ″ are acquired (step 5-7).
[0057]
Next, all the process management database record data 24 for the three device IDs “mount” acquired in (Step S6-7) are acquired (Step S6-8), and then the process acquired in (Step S6-8). It is determined whether the device data of the management database record data 24 is the device ID 24A with OUT and the lot ID 24C with the reservation ID “0” (step S6-9).
[0058]
As a result of the determination, if the process management database record data is an apparatus ID with OUT and the lot ID is “0”, the lot ID “01B34LK2” (FIG. 3) is currently applied to the semiconductor manufacturing apparatus that has performed the OUT operation. Next, the lot to be produced is set, and “1” is set in the reservation ID of the process management database recording data for the lot.
[0059]
That is, as shown in FIG. 4, when the current process is “mount cure”, the previous process is mount, the device ID is “mount # 1 to # 3”, and the process management database for up to three units is stored. Recorded data is acquired.
[0060]
When only the process management database record data 24 is acquired, since the apparatus ID 24A is OUT, the lot ID 24C “01B34LK1” becomes the next lot to be set, and “1” is set in the reservation ID 24B.
[0061]
Note that the reservation ID 24B is necessary to prevent the instruction of the same lot ID and the same apparatus ID, and is therefore returned to “0” when OUT (input) is OK.
[0062]
In this way, the detected lot information to be produced next or the semiconductor manufacturing apparatus number to be set next is sent to the monitor 8 (FIG. 1A) via the communication line 10 (FIG. 1A), Alternatively, it is sent to the wireless barcode reader communication device 9 (FIG. 1A), and the detection result is displayed on the screen of the monitor 8 to instruct the operator.
[0063]
Further, the wireless barcode reader communication device 9 sends the detection result to the wireless barcode reader 11 (FIG. 1B), and the wireless barcode reader 11 displays the result on the screen of the attached monitor 11A and works. Instruct the person.
[0064]
In this case, the instruction to the operator may be notified by an audio output instead of a visual display.
[0065]
In this way, by confirming the consistency of the work order at the time of lot input (IN) or payout (OUT) in each process, errors in the work order can be eliminated and defective production can be prevented.
[0066]
In addition, it is possible to prevent lots from being mistaken by checking lot storage cases at the time of lot insertion and withdrawal at each process. In addition, lots can be stored in a process consisting of multiple storage cases. It is possible to prevent the case from being mixed.
[0067]
Furthermore, by giving the worker the lot information to be produced next or the device number to be placed next at the time of payout, the worker can input the product without grasping the production status of the preceding and following processes.
[0068]
FIG. 7 is a block diagram showing the configuration of a production system according to another embodiment of the present invention. The same components as those in FIGS. 1 and 2 are denoted by the same reference numerals, and detailed description thereof is omitted. In the following description, differences from FIGS. 1 and 2 will be mainly described.
[0069]
In the figure, each of the process devices 12B to 12L is connected to the computer 5 through the communication line 10, and each of the process devices 12B to 12L has a function of stopping production in response to an instruction from the computer 5.
[0070]
In the present embodiment, when various types of information are read from the wireless barcode reader 11 (FIG. 1B), the apparatus IDs 13A to 13L for identifying the individual process apparatuses 12B to 12L are input. Since the production of the device having the device ID inputted when the result of the consistency check shown in FIG. 5 is NG can be stopped, in particular, it is possible to surely prevent the creation of a defect that occurs during IN (input). I can do it.
[0071]
Further, production can be stopped even when a product other than the lot information to be produced next designated at the time of OUT (dispensing) or the device number to be placed next is IN (input).
[0072]
【The invention's effect】
According to the above-described present invention, by confirming the consistency of the work sequence at the time of lot input or delivery of each process, the error in the work sequence can be eliminated and production failure can be prevented.
[0073]
In addition, according to the present invention, the lot storage case can be prevented by checking the storage case of the lot at the time of lot insertion or withdrawal in each process, and the lot is configured by a plurality of storage cases. Also in the process, it is possible to prevent the storage cases of other lots from being mixed.
[0074]
Furthermore, according to the present invention, at the time of paying out, by instructing the worker about the lot information to be produced next, the device number to be placed next, etc., the worker can input the product without grasping the production status of the preceding and following processes. As a result, human intervention for process control is minimized, so that human error is eliminated, and the reliability of the entire system can be remarkably improved.
[Brief description of the drawings]
FIG. 1 is a diagram showing a system configuration and a wireless barcode reader according to an embodiment of the present invention, in which (A) is a block diagram of the system configuration and (B) is a perspective view of the wireless barcode reader.
FIG. 2 is a process block diagram showing an order of assembly processes of a semiconductor device according to the present invention.
FIG. 3 is an explanatory diagram of a travel sheet.
FIG. 4 is an explanatory diagram for explaining consistency confirmation data sent from a wireless barcode reader according to the present invention.
FIG. 5 is a flowchart showing an operation procedure of consistency check according to the present invention.
FIG. 6 is a flowchart for detecting the next semiconductor manufacturing apparatus according to the present invention.
FIG. 7 is a block diagram showing a configuration of a production system according to another embodiment of the present invention.
FIG. 8 is an explanatory diagram for explaining the number of storage cases, magazines, and C-type cassettes used in each process in a conventional system.
[Explanation of symbols]
1, 2 Storage case 3 Magazine 4 C-type cassette 5 Computer 6 Process order definition master 7 Process management database 8, 11A Monitor 9 Wireless bar code reader communication device 10 Communication line 11 Wireless bar code reader 11B Speaker 11C Input unit 12A Input Process 12B Wafer mounting process 12C Dicing process 12D Mounting process 12E Mant cure process 12F Bonding process 12G Mold process 12H Mold after cure process 12I Po process 12J Phosphoric acid process 12K Exterior process 12L T / F process 13A-13L Process ID
14A-14C Storage cases 15A-15C, 16A Barcode 16 Travel sheets 17A-17C Magazines 18A-18C, 20A-20F Barcode 21 Process order definition master data 21A, 22B Process ID
22, 24-26 Process management database record data 22A, 23A, 24C Lot ID
22C, 23B Process ID
22D, 23C storage case ID
23 Consistency check data 24A, 25A, 26A Device ID
24B, 25B, 26B Reservation ID

Claims (3)

A plurality of types and a plurality of storage cases that are used in a manufacturing process for producing a semiconductor device and store semi-finished products of the semiconductor device, and a plurality of types and a plurality of storage cases attached to each of these storage cases, It includes a barcode for identifying , a wireless barcode reader that reads these barcodes and can communicate with a computer wirelessly,
A determination function for determining a pass / fail result of a manufacturing process of a semi-finished product stored in the storage case based on information received from the wireless barcode reader;
And a transmission function for transmitting the acceptance result in operator,
The determination function has a storage case confirmation function for confirming that a plurality of storage cases storing one lot are mixed with storage cases storing other lots at the time of lot insertion and withdrawal in each process. A semiconductor device production system. 2. The semiconductor device production system according to claim 1, wherein the determination function further includes a consistency confirmation function for confirming the consistency of the work sequence at the time of lot insertion or delivery of each process. 2. The semiconductor device production system according to claim 1 , wherein the computer further has an instruction function for instructing an operator of lot information to be produced next at the time of payout or a production number to be placed next.

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