JPH06196544A - Manufacturing process control system - Google Patents

Abstract

PURPOSE:To obtain a manufacturing process control system which protects a carrier system from a trouble even when a process control host is subjected to an operational failure. CONSTITUTION:An IC card 11 is mounted into each lot case 6 where destination information is stored as memory data, indicating a stocker to keep the lot case. A stoker control terminal 9b, which provides an R/W 10b, is installed on stocker control parts 4'a and 4'b. The R/W is capable of reading and writing memory data of the IC cards 11. The stocker control parts 4'a and 4'b output a transfer command that indicates the transfer of the data to the stocker instructed by the destination information to a running control part 3 based on the destination information available from the IC cards 11. Therefore, since the movement of the lot case between the stokers is controlled by a stocker control means, this construction makes it possible to relieve the load to a process control host and protect the carriage system from a trouble even if the process control host is subjected to an operational failure.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing process control system for controlling the storage and transfer of wafers used in semiconductor manufacturing processes.

[0002]

2. Description of the Related Art Pattern formation, etching, thin film formation,
A semiconductor integrated circuit is formed on a silicon wafer by using a processing technique such as impurity diffusion.

In practice, a large number of semiconductor manufacturing apparatuses for carrying out the above-mentioned processing techniques are arranged along a predetermined manufacturing line, and several tens of wafers are accommodated in one case while each semiconductor is manufactured according to a predetermined manufacturing process table. Processed by manufacturing equipment.

The number of steps processed by the semiconductor manufacturing apparatus depends on the type of the semiconductor integrated circuit to be manufactured, but there are several hundreds. In order to manufacture such a semiconductor integrated circuit which requires a large number of processes, a manufacturing process control system as shown in FIG. 5 is required.

In FIG. 5, reference numeral 1 denotes a process management host, which manages a process table of each lot in which a plurality of semiconductor wafers are used as one unit. For example, information about up to which process the lot A manages can be detected by searching a database provided in itself.

Semiconductor wafers are always stored in lot cases 6 in lot units, except for being processed by a semiconductor manufacturing apparatus. Further, a bar code 7 in which a lot number for identifying a lot is written is attached to the lot case 6.

Reference numeral 2 denotes a transport management host, which gives a transfer command of the lot case 6 and a storage command to the stocker to the travel control unit 3 and the stocker control unit 4, respectively.

The traveling control unit 3 performs wired or wireless communication based on the transfer command received from the transfer management host 2, mounts the lot case 6 on the transfer vehicle 8 moving on a predetermined rail, and transfers it. Performs all controls necessary to move the to the specified stocker.

The stocker controller 4 (4a, 4b, ...)
One is installed corresponding to one stocker (not shown),
Based on the storage command received from the transport management host 2, all the necessary controls for storing the designated lot in the stocker are performed.

The stocker controller 4 includes a reader 5 (5a, 5a
b) is equipped, the lot case 6 can be identified by reading the bar code 7 attached to the lot case 6 using the reader 5.

The operation of the manufacturing process control system having the above structure will be described below.

When a lot processing (process) is completed in a certain semiconductor manufacturing apparatus, the lot case 6 is manually carried to the nearest stocker control section 4 and the lot number is confirmed. For example, when the lot case 6 is carried to the stocker controller 4a, the bar code 7 of the lot case 6 is read by the reader 5a.
Is read, and the lot number read via the stocker controller 4a is transmitted to the transport management host 2.

Then, the transfer management host 2 transmits the lot number to the process management host 1, and then the process management host 1 processes the lot of the lot number in the semiconductor manufacturing apparatus and its vicinity. Destination information, which is information on a stocker or the like provided in the.

Based on the destination information obtained from the process control host 1, the transfer control host 2 gives the travel control section 3 a movement command instructing the next stocker in which the lot case 6 should be stored.

Upon receipt of the movement command, the traveling control unit 3 moves the transport vehicle 8 to the position of the stocker control unit 4a, mounts the lot case 6 on the transport vehicle 8, and transfers the transport case to the stocker determined based on the transport command. Move 8

For example, when the destination information indicates the stocker control unit 4b, the lot case 6 mounted on the carrier 8 is carried to the position of the stocker control unit 4b, and thereafter, the lot case 6 is transferred by the stocker control unit 4b. Stocker control unit 4
It is stored in the stocker b.

[0017]

The conventional manufacturing process control system is configured as described above, and when the process control host 1 fails for some reason, it becomes impossible to obtain the destination information. Therefore, there is a problem in that the transfer command from the transfer management host 2 cannot be output, the transfer control of the lot case 6 by the transfer vehicle 8 cannot be performed, and the manufacturing line does not function at all.

Further, since the process control host 1 frequently performs all processes based on transport control such as communication, search, and command, the load on the process control host 1 is large. In order to withstand this large load, it is necessary to improve the performance and reliability of the computer used for the process control host 1, which causes a problem that the process control host 1 is too expensive.

The present invention has been made in order to solve the above-mentioned problems, so that even if a process control host fails, it does not hinder the transport system and the load on the process control host is reduced. The purpose is to obtain a manufacturing process control system that can be reduced.

[0020]

In the manufacturing process control system according to the first aspect of the present invention, a plurality of stockers for storing a lot case containing semiconductor wafers are arranged at predetermined positions, and the stockers of the plurality of stockers are arranged. After temporarily storing the lot case in any of the plurality of stockers according to a predetermined manufacturing process on a manufacturing line in which semiconductor manufacturing devices are arranged in association with each other, A system for sequentially performing a predetermined manufacturing process on a semiconductor wafer to manufacture a semiconductor integrated circuit, comprising: inter-stocker transfer means capable of transferring the lot case between the plurality of stockers; and the lot case equipped with the stock case. A storage unit that stores read / write destination information indicating a stocker in which the lot case should be stored next, The lot case is updated based on the destination information updating means for updating the destination information stored in the storage means every time a predetermined process by the semiconductor manufacturing apparatus is completed, and the destination information stored in the storage means. And a stocker control means for outputting a movement command for instructing movement to any one of the plurality of stockers, and a stocker for controlling the inter-stocker transportation means based on the movement instruction to instruct the lot case to the movement instruction. Based on the change with time of the destination information stored in the storage means and the transfer control means to be moved to, to grasp the processing status of the semiconductor wafer in the lot case, change the procedure of the predetermined manufacturing process, etc. And a process control means for performing process control.

Preferably, as in the manufacturing process management system according to claim 2, the preceding information stored in the storage means provided in the stocker and provided in the lot case stored in the stocker. Further comprising an information read / write means capable of reading and writing
The information read / write means can change the destination information in the storage means of the lot case.

Preferably, as in the manufacturing process control system according to claim 3, a stocker / apparatus transfer means capable of transferring the lot case between the stocker and the semiconductor manufacturing apparatus corresponding to the stocker. And a transfer control unit for controlling the transfer unit between the stocker and the apparatus.

[0023]

In the manufacturing process management system according to the first aspect of the present invention, each lot case is equipped with a readable / writable storage means for storing the destination information indicating the stocker in which the lot case is to be stored next. The means is
Based on the destination information stored in the storage means, a movement command for instructing movement of the lot case to one of the stockers is output to the transfer control means.

Therefore, the lot case can be moved between the stockers by the inter-stocker transfer means under the control of the stocker control means without depending on the process control means.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS <First Embodiment> FIG. 1 is a block diagram showing the system configuration of a manufacturing process control system according to a first embodiment of the present invention.

The overall construction of the manufacturing process control system of the first embodiment is as follows. That is, a plurality of stockers (not shown) for storing the lot case 6 in which a plurality of semiconductor wafers are stored in lot units are arranged at predetermined positions, and the semiconductor manufacturing apparatus is arranged in association with each of the plurality of stockers. On the manufacturing line, after the lot case 6 is temporarily stored in one of a plurality of stockers according to a predetermined manufacturing process, a predetermined manufacturing process is sequentially performed on the lots in the lot case 6 by the semiconductor manufacturing apparatus, It is a manufacturing process control system for manufacturing a semiconductor integrated circuit.

As shown in FIG. 1, an IC card 11 is attached to each lot case 6. The IC card 11 can read and write, as stored data, all processes in which lots (a plurality of semiconductor wafers) in the lot case 6 are processed, work-in-progress information indicating a current processing process stage, and the like. Therefore,
From the data stored in the IC card 11, it is possible to obtain the destination information indicating the stocker in which the lot case should be stored next.

Stocker control unit 4 '(4'a, 4'b,
...) to the stocker management terminals 9 (9a, 9b,
...) is provided, and each stocker management terminal 9 is provided with a reader / writer (R / W) 10 (10a, 10b, ...). Each R / W 10 can read and write data stored in the IC card 11.

Then, the stocker control section 4'reads / stores the stored data of the IC card 11 mounted in the lot case 6 into
Based on the destination information obtained by reading using W10, a travel command instructing to move to the stocker designated by the destination information is output to the travel control unit 3.

Further, a process control terminal 16 for updating the stored data of the IC card 11 mounted in the lot case 6.
However, after completion of the processing by each semiconductor manufacturing apparatus (not shown) provided at various places (only one is shown in FIG. 1), the R / W 20 provided in the process control terminal 16 provides the destination information in the destination information. The credit information is updated.

The process management host 1 obtains destination information that changes from moment to moment from the stocker management terminal 9 and the process management terminal 16 and recognizes the processing status of the lot in each lot case 6.

The transport management host 2 monitors the movement command given from the stocker control unit 4'to the travel control unit 3 to grasp the past transport history and the current position of the transport vehicle 8.

FIG. 2 is an explanatory view showing details of the periphery of the stocker controller 4 '. As shown in the figure, the stocker control unit 4'is integrally formed with the stocker 12 which is not shown in FIG. 1, and the R / W 10 is equipped at the loading / unloading port of the stocker 12.

The other configurations of the traveling control unit 3, the carrier vehicle 8 and the like are the same as the conventional ones, and therefore the description thereof will be omitted.

The operation of the manufacturing process control system of the first embodiment having the above configuration will be described below.

When the processing (process) of a lot is completed in a certain semiconductor manufacturing apparatus, the lot case 6 is manually carried to the nearest stocker control section 4 '(here, temporarily stocker control section 4'a). R of stocker management terminal 9a
/ W10a obtains the destination information from the stored data of the IC card 11 mounted in the lot case 6. Then, the stocker control unit 4'a sends the destination information to the process management host 1
Send to.

Next, the stocker control unit 4'a once stores the lot case 6 in the stocker, and gives the traveling control unit 3 an instruction to transfer the transport vehicle 8 to the stocker of the stocker control unit 4'a. Then, the traveling control unit 3 moves the transport vehicle 8 to the position of the stocker control unit 4'a.

When the transport vehicle 8 arrives at the position of the stocker control section 4'a, the lot case 6 is taken out from the stocker and mounted on the transport vehicle 8, and the stocker control section 4 '(tentatively, the stocker control is instructed by the destination information. A transfer command to the traveling control unit 3 is given to the traveling control unit 3. Then, the traveling control unit 3 moves the transport vehicle 8 to the position of the stocker control unit 4'b.

When the carrier 8 arrives at the position of the stocker controller 4'b, the lot case 6 is stored in the stocker of the stocker controller 4'b. Then, when there is a vacancy in the semiconductor manufacturing apparatus for processing the lot in the lot case 6, the lot is taken out from the lot case 6 in the stocker and set in the semiconductor manufacturing apparatus, and the lot is processed by the semiconductor manufacturing apparatus. Give.

After the processing is completed, the R / W of the process control terminal 16
By 20, the stored data of the IC card 11 of the lot case 6 is rewritten and the in-process information is updated.

Thereafter, the same process is repeated to process the lots in the lot case 6, and finally the semiconductor integrated circuit is manufactured.

As described above, in the first embodiment, the process control host 1 only recognizes the destination information of each lot case 6 received from the stocker control section 4 ', and the stocker inter-stocker of the actual lot case 6 is recognized. Transport control of lot case 6
This is performed by the stocker control unit 4'based on the stored data of the IC card 11 therein. Therefore, the load on the process control host 1 is reduced as compared with the conventional one, and the cost required for constructing the process control host 1 is not so high.

Even if the process control host 1 fails,
The IC card 11 of the lot case 6 has the lot case 6
All the processes in which lots (semiconductor wafers) in the package are processed, and destination information including work-in-progress information indicating the current processing stage is written in the IC card 11 as storage data. Based on the data
The transfer process can be continued.

<Second Embodiment> FIG. 3 shows a second embodiment of the present invention.
FIG. 7 is an explanatory diagram showing the periphery of the stocker control unit 4 ′ of the manufacturing process management system which is the embodiment of FIG. Stocker 12 shown in FIG.
Can store a plurality of lot cases 6 inside.

Further, as in the first embodiment, the R / W 10 is provided at the carry-in / out port of the stocker 12, and the stocker 12 is
An R / W 10 'is separately provided above the inside of the. In addition,
Other configurations and basic operations are the same as those in the first embodiment, and will be omitted.

Hereinafter, R / newly provided in the stocker 12
The function of W10 'will be described. The lot case 6 stored in the stocker 12 is automatically moved to the readable / writable position of the IC card 11 by the R / W 10 'after a predetermined time has elapsed. Then, based on the data stored in the IC card 11, the identification number of the lot case 6 is read and transferred to the process management host 1 via the stocker management terminal 9.

At this time, if it is necessary to change the process of the lot case 6 having the identification number read by the process management host 1, the process can be performed via the stocker management terminal 9 and the R / W 10 '.
The process change information can be written in the IC card 11 of the lot case 6.

As described above, in the second embodiment, the process management host 1 can write the process change of the lot in the lot case 6 to the IC card 11 while the lot case 6 is stored in the stocker 12. By setting the period, the transport management host 2 can change the storage data of the IC card 11 relatively easily.

<Third Embodiment> FIG. 4 shows a third embodiment of the present invention.
FIG. 7 is an explanatory diagram showing the periphery of the stocker control unit 4 ′ of the manufacturing process management system which is the embodiment of FIG. As shown in the figure, a rail 13 is provided between the stocker 12 and the semiconductor manufacturing apparatus 15 (not shown in the first and second embodiments). The rail 13 functions as a track through which the carrier 8'passes between the stocker 12 and the semiconductor manufacturing apparatus 15.

The semiconductor manufacturing apparatus 15 is equipped with a semiconductor manufacturing apparatus control unit 14, and the semiconductor manufacturing apparatus control unit 14 controls the temperature of the furnace and the flow rate of the material gas.
The operation control of the lot case 6 is performed, and the loading / unloading of the lot case 6 is also managed.

Since the other structure and basic operation are the same as those of the first or second embodiment, the description thereof will be omitted.

The features of the third embodiment will be described below. First, when the treatment by the semiconductor manufacturing apparatus 15 for the lot in the lot case 6 is completed, the semiconductor manufacturing apparatus control unit 1
4 gives a lot collection command to the stocker control unit 4 ', and the carrier 8'is moved to the semiconductor manufacturing device 15 by the cooperation of the semiconductor manufacturing device control unit 14 and the stocker control unit 4'.

Then, the lot case 6 is mounted on the carrier 8 ', the carrier 8'is moved to the vicinity of the stocker 12, and the lot case 6 is stored in the stocker 12.

When the lot case 6 to be processed next by the semiconductor manufacturing apparatus 15 is carried in from the stocker 12,
The semiconductor manufacturing apparatus control unit 14 outputs a manufacturing processing command to the stocker 12.

Then, the carrier 8'is moved to the stocker 12 by the cooperation of the semiconductor manufacturing apparatus controller 14 and the stocker controller 4 '.

Then, the lot case 6 is mounted on the transport vehicle 8 ', the transport vehicle 8'is moved to the semiconductor manufacturing apparatus 15, and a predetermined process by the semiconductor manufacturing apparatus 15 is performed on the lot in the lot case 6. Apply.

As described above, by automating the movement of the lot case 6 by the carrier 8'between the stocker 12 and the semiconductor manufacturing apparatus 15, manpower can be saved.

[0058]

As described above, in the manufacturing process control system according to the first aspect of the present invention, the storage means that readable and writable stores the destination information indicating the stocker in which the lot case should be stored next. The stocker control means is provided in the lot case, and based on the destination information stored in the storage means, the stocker control means outputs a movement command for instructing movement of the lot case to one of the plurality of stockers to the transport control means.

Therefore, the lot case can be moved between the stockers by the inter-stocker transfer means under the control of the stocker control means without depending on the process control means.

Therefore, the load on the process control means can be reduced, and even if the process control means fails, the inter-stocker transfer means transfers the lot cases between the stockers under the control of the stocker control means without any trouble. It can be performed.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a manufacturing process control system according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing the periphery of the stocker control unit of the first embodiment.

FIG. 3 is an explanatory diagram showing the periphery of a stocker controller of a manufacturing process management system according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing the periphery of a stocker controller of a manufacturing process management system according to a third embodiment of the present invention.

FIG. 5 is a block diagram showing a configuration of a conventional manufacturing process management system.

[Explanation of symbols]

 1 Process Management Host 2 Transport Management Host 3 Travel Control Section 4'Stocker Control Section 6 Lot Case 8 Transport Vehicle 9 Stocker Management Terminal 10 R / W 11 IC Card 12 Stocker 13 Rail 14 Semiconductor Manufacturing Equipment Control Section 15 Semiconductor Manufacturing Equipment 16 Process control terminal 20 R / W

Claims (3)

[Claims] 1. A plurality of stockers for storing a lot case containing semiconductor wafers are arranged at predetermined positions, and a predetermined number is set on a manufacturing line in which a semiconductor manufacturing apparatus is arranged in association with each of the plurality of stockers. According to the manufacturing process, after temporarily storing the lot case in any of the plurality of stockers, a predetermined manufacturing process is sequentially performed on the semiconductor wafer by the semiconductor manufacturing apparatus,
A manufacturing process management system for manufacturing a semiconductor integrated circuit, comprising: inter-stocker transfer means capable of transferring the lot case between the plurality of stockers; and a lot case equipped with the lot case, and the lot case is stored next. Storage means for storing destination information indicating a stocker to be readable and writable, and each time a predetermined process by the semiconductor manufacturing apparatus is completed,
Destination information updating means for updating the destination information stored in the storage means, and an instruction to move the lot case to one of the stockers based on the destination information stored in the storage means A stocker control unit that outputs a movement command; a conveyance control unit that controls the inter-stocker conveyance unit based on the movement instruction to move the lot case to the stocker instructed by the movement instruction; and a storage unit stored in the storage unit. Based on the change with time of the destination information, the manufacturing process management including a process management unit that grasps the processing status of the semiconductor wafer in the lot case and manages the process such as changing the procedure of the predetermined manufacturing process. system. 2. The information storage device further comprises: an information read / write unit equipped in the stocker and capable of reading / writing the preceding information stored in the storage unit installed in the lot case stored in the stocker. 2. The manufacturing process management system according to claim 1, wherein the management unit can change the destination information in the storage unit equipped in the lot case by the information reading / writing unit. 3. A stocker / inter-apparatus transfer means capable of transferring the lot case between the stocker and the semiconductor manufacturing apparatus corresponding to the stocker, and transfer for controlling the stocker / inter-apparatus transfer means. The manufacturing process management system according to claim 2, further comprising a control unit.