KR20080009092A - Automatic convey system - Google Patents

Abstract

Objects are conveyed on a plurality of convey tables between at least one storage unit and a plurality of manufacturing devices. The objects are easily managed by an instruction of a control device with a high reliability and at a low cost. An ID card (20) having a built-in radio communication function is installed in all carriers (18) and an ID reader/writer (25) having a built-in radio communication function is installed in some convey AGV (automated guided vehicles) (10). The carrier ID is read/written from/to the ID card (20) by the instruction of an MCS (4) connected to the ID reader/writer (25). A carrier ID management unit (4a) manages the carrier ID.

Description

Automatic Material Handling System {AUTOMATIC CONVEY SYSTEM}

The present invention relates to an automatic material handling system for managing a conveyed object conveyed by a plurality of conveying bogies according to a command of a controller between one or more storage units and a plurality of manufacturing apparatuses.

In manufacturing facilities such as semiconductors and liquid crystals, fine dust in the air adversely affects the quality performance of the product, and therefore, the product in the manufacturing process (for example, in the case of semiconductor product manufacturing facilities, semiconductor substrates and glass substrates for liquid crystal display devices). And an intermediate article of a manufactured article such as a photomask glass substrate or an optical disk substrate) are stored in a cassette, and between a manufacturing apparatus and a storage unit such as a stocker or a simple buffer unit by a conveying system according to a manufacturing process. The automated material handling system (AMHS) which makes it convey is employ | adopted (refer patent document 1). As a conveying system, a conveying system employing an over head hoist transport (OHT) system, an over head shuttle system (OHS) system, and a conveyance truck that automatically runs on the floor, traveling on a track suspended from a ceiling and conveying a front opening Unified Pod (FOUP). The conveyance system by the conveyance trolley which runs on track | orbit is becoming mainstream.

In the automatic material handling system, a carrier ID (bar code, RFID (Radio Frequency Identification), infrared communication ID, etc.), which is identification information for identifying a carrier, is attached to each of the carriers as the transported object. When conveying carriers to a manufacturing apparatus by a conveyance trolley or to storage units, such as a simple buffer unit installed parallel to a stocker, a buffer stage, and a conveyance path | route, these loading port, an unloading port, or the interface unit part of both ports An ID reading and recording unit is provided in each of them, and reading and recording of the carrier ID which checks and manages the carrier ID by the controller of the automatic material handling system through this ID reading and recording unit is performed.

For example, Patent Literature 2 provides a wireless communication function connected to a host computer at each part of a manufacturing apparatus and storage units such as a stocker, a buffer stage, a simple buffer unit, and has a wireless communication function. An electronic module capable of storing predetermined information (identification information) is mounted on a cassette (carried object) individually, and a technique for managing a cassette by a host computer by reading and writing predetermined information to the electronic module by wireless communication is known. It is.

Patent Document 1: Patent Publication No. 2005-1886

Patent Document 2: Patent Publication No. 9-283595

However, since the ID reading and writing unit is expensive, there is a problem that the cost increases when the number of storage units such as the manufacturing apparatus and the stocker, the buffer stage, and the simple buffer unit installed in parallel to the conveying path is large.

In addition, when reading and recording identification information of a transported object using a wireless communication technology, there is a problem that it is difficult to set the location of the wireless communication function due to the directivity of the antenna used in the wireless communication technology. have. That is, if the transported object enters the blind spot of the radio communication possible range (for example, if the transported object deviates from the proper position), wireless communication cannot be performed. Therefore, the identification information of the transported object and the transported object cannot be confirmed. There is. In this case, in order to confirm the object and the identification information of the object to be conveyed, the automatic material handling system must be stopped, and the identification information must be read from the ID reading and recording unit for all the object to be conveyed. When the number of carriers is large, labor and time are involved, and the production process is stopped for a long time, which affects the productivity of the manufacturing facility.

With respect to the above-mentioned conventional problem, the present invention provides an automatic system that can manage a conveyed object conveyed by a plurality of conveying bogies according to a command of a controller between one or more storage units and a plurality of manufacturing apparatuses inexpensively, conveniently and with high reliability. It is an object to provide a material handling system.

An automatic material handling system according to the present invention is an automatic material handling system that manages a conveyed object conveyed by a plurality of conveyance trucks according to a command of a controller between one or more storage units and a plurality of manufacturing apparatuses. And a readable and recordable identification information recording unit for recording identification information identifying the workpiece to be received in the object to be conveyed, wherein a portion of the conveyance balance is based on the command of the controller to identify the identification information to the identification information recording unit. An identification information reading and recording unit which reads and writes information, the controller is provided with an identification information management unit which accumulates and manages the identification information which has been read and written in the identification information reading and recording unit, and the identification The identification information recorded in the information recording unit, and accumulated in the identification information management unit And by it said controller to said identification information based on the identification information managed by the managing unit is characterized in that for performing the management of the target object.

Therefore, the identification information reading and recording unit, which reads and writes the identification information on the basis of the controller's command, is mounted only on a part of the conveyance balance on or from the identification information recording unit mounted on the conveyed object. Thereby, the cost is considerably reduced as compared with the conventional case where the identification information reading and recording unit is mounted in both the manufacturing apparatus and the storage unit. In addition, since the identification information reading and recording unit is mounted on the conveyance truck, the conveyance truck can read and record the identification information while performing the normal conveyance operation, so that the conveyed object can be easily managed. In addition, the conveyance trolley has excellent mobility for the manufacturing apparatus and the storage unit, and is easy to secure communication between the identification information reading and recording unit mounted on the conveyance trolley and the identification information recording unit mounted on the conveyed object. Therefore, it is possible to manage the conveyed object with high reliability. In the present invention, the identification information reading and recording unit may use the identification information reading and recording apparatus using conventional communication unit means employing the principle of light or wireless.

Here, the identification information reading and recording unit reads the identification information from the identification information recording unit when carrying out and carrying out the conveyed object to the storage unit and the manufacturing apparatus, and the controller It is preferable to further include an identification information confirming unit for confirming whether the identification information read by the identification information reading and recording unit and the identification information accumulated in the identification information management unit and managed by the identification information management unit match. Do.

Therefore, whenever the conveyance truck equipped with the identification information reading and recording unit carries in and out the conveyed object to the storage unit and the manufacturing apparatus, the identification information read from the identification information recording unit of the conveyed object and the identification information management It is confirmed whether the identification information accumulated in the unit and managed by the identification information management unit match. As a result, the identification information about the transported object is frequently checked to find the occurrence of a problem at an early time, and thus the management reliability of the transported object can be improved.

Further, the identification information reading and recording unit records the identification information when carrying out and carrying out the conveyed object to the storage unit and the manufacturing apparatus in a state where the identification information reading and recording unit is not installed. The identification information is read from the unit, and the controller matches the identification information read by the identification information reading and recording unit with the identification information accumulated in the identification information management unit and managed by the identification information management unit. It may further include identification information checking means for confirming.

Therefore, for the storage unit and the manufacturing apparatus in which the identification information reading and recording unit is already installed, the prior art employing the installed identification information reading and recording unit is utilized, while the storage unit in which the identification information reading and recording unit is not installed is used. And the conveyance trolley which mounts identification information reading and recording unit is used about a manufacturing apparatus. Therefore, since it is not necessary to install the identification information reading and recording unit newly while using the existing equipment, the cost can be reduced. And about the storage unit and manufacturing apparatus which are not provided with the identification information reading and recording unit, whenever the conveyance trolley equipped with the identification information reading and recording unit performs carrying in and carrying out of a to-be-carried object, the identification information recording of a to-be-carried object is recorded. Confirmation is made as to whether the identification information read out from the unit and the identification information accumulated in the identification information management unit and managed by the identification information management unit match. As a result, identification information about the transported object is frequently checked for the storage unit and the manufacturing apparatus, in which the identification information reading and recording unit is not installed, and the occurrence of a problem is found at an early time, thereby further improving the management reliability of the transported object. Can be.

Here, in the identification information confirming unit, the identification information read by the identification information reading and recording unit does not coincide with the identification information accumulated in the identification information management unit and managed by the identification information management unit. If not, the controller rewrites the identification information accumulated and managed by the identification information management unit into the identification information read by the identification information reading and recording unit, or is accumulated in the identification information management unit and the The conveyed object can be rearranged to match the identification information managed by the identification information management unit.

Accordingly, the identification information accumulated in the identification information management unit by the identification information confirming unit and managed by the identification information management unit, such as when data is disrupted due to system trouble, and read by the identification information reading and recording unit. If an inconsistency with the identified identification information is found, for example, the automatic material handling system is once stopped, and the transport cart provided with the identification information reading and recording unit is automatically driven one turn around the manufacturing apparatus and the storage unit, and all conveyed objects Or identification information of the transported object on the manufacturing apparatus and the storage unit not equipped with the identification information reading and recording unit, and accumulated in the identification information management unit based on the read identification information and managed by the identification information management unit. Record the information again. As another method, each conveyed object is rearranged to match the identification information accumulated and managed by the identification information management unit. As a result, problems can be minimized, and the automatic material handling system can be restarted at an earlier time, thereby further improving the reliability of the management of the conveyed object.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic perspective view which shows the automatic material handling system which concerns on this embodiment containing an OHT conveyance trolley, the simple buffer unit, and a manufacturing apparatus.

2 is a schematic perspective view showing the structure of a carrier.

3 is a schematic perspective view showing the structure of the OHT conveyance trolley.

Fig. 4 is a side view of the OHT carrying cart, the simplified buffer unit and the carrier, with the OHT carrying cart loading or unloading the carrier with respect to the simple buffer unit.

5 is a block diagram of an automatic material handling system according to each embodiment.

It is a top view which shows the structure of the automatic material handling system containing an OHT conveyance bogie, the track | orbit of an OHT conveyance bogie, a simple buffer unit, and a manufacturing apparatus.

It is a schematic perspective view which shows the modification of the structure of OHT conveyance trolley | bogie.

It is a schematic perspective view which shows the modification of the material handling system which concerns on this embodiment containing an OHT conveyance trolley, the simple buffer unit, and a manufacturing apparatus.

It is a schematic perspective view which shows the modification of OHT conveyance trolley structure.

EMBODIMENT OF THE INVENTION Hereinafter, with reference to drawings, the best form for implementing the automatic material handling system which concerns on this invention is demonstrated based on a specific example.

The automatic material handling system according to the present embodiment will be described with reference to FIGS. 1 to 6. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic perspective view of the automatic material handling system which affects this embodiment containing an OHT conveyance trolley, a simple buffer unit, and a manufacturing apparatus. 2 is a schematic perspective view showing the structure of a carrier. 3 is a schematic perspective view showing the structure of the OHT conveyance trolley. Fig. 4 is a side view of the OHT carrying cart, the simplified buffer unit and the carrier in a state in which the OHT carrying cart loads or unloads a carrier with respect to the simple buffer unit. 5 is a block diagram of an automatic material handling system according to the present embodiment. It is a top view which shows the structure of the automatic material handling system containing an OHT conveyance bogie, the track | orbit of an OHT conveyance bogie, a simple buffer unit, and a manufacturing apparatus.

As shown in FIGS. 1 and 6, in the automatic material handling system according to the present embodiment, an OHT traveling on a rail (orbit) 15 attached to the ceiling 9 by a rail suspension member 16. The conveyance trolley (transfer robot) 10 according to the manufacturing process, that is, according to the instructions of the Manufacturing Execution System (MES) 5 and the Material Control System (MCS) 4, the semiconductor manufacturing apparatuses (manufacturing apparatuses) 13 ), The carrier (carried object) 18 in which the substrate is stored is automatically conveyed, and the loading and unloading of the carrier 18 is performed through the loading port 14a and the unloading port 14b. In addition, according to the necessity of the process adjustment at the time of conveyance, the simple arrangement | positioning on both sides (12a, 12b, and 12c of FIG. 6) of the rail 15 of a conveyance trolley and attached to the ceiling 9 by the buffer suspension member 17 is carried out. On the buffer unit (storage unit) 12, the carrier 18 is temporarily stored. On the other hand, it should be noted that the simple buffer unit 12 can be supported not only on the ceiling 9 but also on the wall or floor. Here, in the present embodiment, it is assumed that the ID reading and writing unit is already provided in the semiconductor manufacturing apparatus 13 and the stocker (not shown), so that the ID data is managed according to the prior art. The simple buffer unit 12 is not provided with an ID reading and writing unit.

As shown in FIG. 2, the carrier FOUP 18 accommodates a substrate to be processed, that is, a substrate to be processed, and is provided on the upper surface of the substrate receiving portion 22. The flange 21 is gripped by the OHT conveyance trolley 10 and conveyed. In addition, an ID card (identification information recording unit) 20 is provided on the side surface of the substrate accommodating portion 22. Note that the ID card 20 is installed in all the carriers 18. Here, the ID card 20 reads and records the carrier ID (identification information such as information on the substrate accommodated by each carrier 18 or information on the progress of the processing process of the carrier 18, etc.). It is a possible data recording medium, and a removable one is preferable. In addition, the ID card 20 has a built-in wireless communication function, wirelessly stores an ID reading and recording unit (identification information reading and recording unit) 25 and a wireless communication function built in the OHT conveyance truck 10 described later. Communication is possible. Further, the carrier ID transmitted from the ID reading and recording unit 25 described later is recorded on the ID card 20, and the ID card 20 reads the carrier ID, which is read by the ID reading and recording unit 25. It transmits to ID reading and recording unit 25 mentioned later. On the other hand, the ID card 20 is not limited to the position shown in FIG. 2, and if the ID card 20 is in a position capable of communicating with the ID reading and recording unit 25 installed in the OHT transport trolley 10 described later, Can be installed at the location.

As shown in FIG. 3, the OHT conveyance trolley 10 is installed so that it can run on the rail 15 by the positioning mechanism 28, is accommodated in the conveyance trolley | bogie main body 27, and has a rotating / lifting function. It is mounted on the conveyance robot 11 installed so that it can be installed. The transfer robot 11 includes a first stage arm 31, a second stage arm 33, a third stage arm 35, and a gripper part connected to a rotating / elevating shaft 30 that can rotate and move up and down. It consists of 26. Here, the first end arm 31 and the second end arm 33 are connected to each other via the rotating shaft 32 at the tip of the first end arm 31, and the second end arm 33 and the third end arm 33 are connected to each other. The end arm 35 is connected to each other via the rotation shaft 34 at the tip of the second end arm 33, and the third end arm 35 and the gripper portion 26 are connected to each other of the third end arm 35. It is connected via the rotating shaft 36 at the tip. And the OHT conveyance trolley 10 rotates and raises or lowers the 1st stage arm 31, the 2nd stage arm 33, and the 3rd stage arm 35 of the transfer robot 11, and the gripper part ( 26, the flange 21 of the carrier 18 is gripped. For example, as shown in FIG. 4, when the carrier 18 is loaded in the simple buffer unit 12, the 1st stage arm 31 of the conveyance robot 11, the 2nd stage arm 33, By rotating and raising or lowering the third end arm 35, the gripper portion 26 holding the flange 21 of the carrier 18 is moved to be positioned on the simple buffer unit 12. After the carrier 18 is positioned in the simple buffer unit 12, the gripper 26 is released from the flange 21 of the carrier 18. On the other hand, when the carrier 18 is unloaded from the simple buffer unit 12, the first stage arm 31, the second stage arm 33, and the third stage arm 35 of the transfer robot 11 are rotated. And by raising or lowering, the gripper part 26 is moved to position on the carrier 18 of the simple buffer unit 12. As shown in FIG. After the carrier 18 is located in the simple buffer unit 12, the gripper portion 26 grips the flange 21 of the carrier 18, and then transfers the transfer robot 11 to the inside of the transfer cart main body 27. Accept. On the other hand, when the OHT conveyance trolley 10 runs, it should care about storing the conveyance robot 11 in the conveyance trolley main body 27, and preventing collision with other facilities.

Moreover, the ID card 20 of a carrier is located in the inner surface part of the conveyance trolley | bogie main body 27 in the state which opposes the conveyance robot 11, and the conveyance robot 11 was accommodated in the conveyance trolley main body 27. The ID reading and writing unit 25 is provided at a position to correspond to. On the other hand, the ID reading and recording unit 25 is provided in some OHT conveyance trolley 10. In addition, the ID reading and recording unit 25 has a built-in wireless communication function, and can perform wireless communication with the ID card 20. The ID reading and recording unit 25 is connected to an MCS 4 to be described later, and transmits a carrier ID to be recorded to the ID card 20 based on a command from the MCS 4 to be described later. The carrier ID to be read from the ID card 20 is received. On the other hand, the ID reading and recording unit 25 is not limited to the position shown in FIG. 3, and may be provided at any position on the OHT conveyance trolley 10 as long as it is a position that can communicate with the ID card 20.

As shown in Fig. 5, in this automatic material handling system 1, a manufacturing execution system MES (Manufacturing Execution System) 5 and a conveyance control system (controller) MCS (Material Control System) 4, Communication between the semiconductor manufacturing apparatus 13, the OHT conveyance trolley 10 which is a conveyance system, and the storage unit 2 equipped with the simple buffer unit 12 and the stocker which is not demonstrated, respectively, communicates regarding communication related commands, reports, etc. Is done.

The MES 5 is an information processing system for progress management and production automation of a semiconductor manufacturing line, and includes a function of a scheduler and a dispatcher, and reports the status of a port from the semiconductor manufacturing apparatus 13 (shipping report and dispatch). Completion report, etc.), and a port reservation, a sending command, etc. are given to the semiconductor manufacturing apparatus 13.

The MCS 4 receives a conveyance order from the MES 5 and accordingly instructs each of the OHT conveyance trolley 10 and the storage unit 2 to operate organically to perform the conveyance command received from the MES 5. Down. In addition, the MCS 4 monitors the states of the OHT conveyance trolley 10 and the storage unit 2. The MCS 4 also includes a carrier ID management unit (identification information management unit) 4a and a carrier ID confirmation unit (identification information confirmation unit) 4b. The carrier ID management unit 4a is for accumulating and managing transport destination data output corresponding to the carrier ID for each carrier from the MES 5. The carrier ID verification unit 4b uses the ID card 20 through the ID reading and recording unit 25 every time the OHT transport cart 10 loads and unloads the carrier 18 into the simple buffer unit 12. It is for confirming whether the carrier ID read out from) and the carrier ID accumulated and managed by the carrier ID management unit 4a match.

In addition, when the carrier ID read out from the ID card 20 through the ID reading and recording unit 25 and the carrier ID accumulated and managed by the carrier ID management unit 4a do not match, the automatic material handling system ( 1) is stopped (i.e., the MCS 4 is stopped), and the OHT conveyance truck 10 provided with the ID reading and writing unit 25 causes the simple buffer unit 12 to turn once, thereby making the ID reading and writing unit The carrier ID is read from the ID card 20 of all the carriers 18 mounted in the simple buffer unit 12 via 25, and the carrier ID stored and managed by the carrier ID management unit 4a is read out. After rewriting to the completed carrier ID, the automatic material handling system 1 is restarted (that is, the MCS 4 is restarted). As another method, automatic material handling when the carrier ID read out from the ID card 20 through the ID reading and recording unit 25 and the carrier ID accumulated and managed by the carrier ID management unit 4a do not match. The system 1 is stopped (i.e., the MCS 4 is stopped), and each carrier is rearranged to match the carrier ID accumulated and managed by the carrier ID management unit 4a, and then the automatic material handling system 1 ) (I.e. restart MCS (4)).

The semiconductor manufacturing apparatus 13 is a process apparatus for physically or chemically treating a target object such as a substrate and a target for measuring the target object (in the case of a substrate, the film thickness, specific resistance, pattern area, and number of dusts). ) It includes a measuring device.

Accordingly, according to the automatic material handling system 1 according to the present embodiment, the ID card 20 mounted on the carrier 18 is used to read and write the carrier ID based on the command of the MCS 4. The read and write unit 25 is mounted only in part of the OHT conveyance trolley 10. As a result, the cost is reduced as compared with the conventional case in which the ID reading and writing unit 25 is mounted in all the semiconductor manufacturing apparatuses 13 and the storage units 2.

Moreover, the ID reading and recording unit 25 is mounted in the OHT conveyance trolley 10. Therefore, the carrier ID can be read and recorded while the OHT conveyance cart 10 performs a normal conveyance operation, and the carrier 18 can be managed simply.

Moreover, the OHT conveyance trolley 10 is excellent in the maneuverability with respect to the semiconductor manufacturing apparatus 13 and the storage unit 2, and is provided to the ID reading and recording unit 25 and the carrier 18 mounted in the OHT conveyance trolley 10. Communication between the mounted ID cards 20 is easy to secure, and the carrier 18 can be managed with high reliability.

In addition, the storage unit 2 (storage unit other than the simple buffer unit 12) and the semiconductor manufacturing apparatus 13 in which the ID reading and writing unit is already installed, the conventional technique which employ | adopted the installed ID reading and recording unit was adopted. On the other hand, for the simple buffer unit 12, the OHT conveyance truck 10 equipped with the ID reading and writing unit 25 is used. Therefore, since there is no need to install the ID reading and writing unit 25 newly in the simple buffer unit 12 using existing equipment, cost is reduced.

In addition, with respect to the simple buffer unit 12, the carrier ID of the MCS 4 is carried out every time the OHT carrying cart 10 equipped with the ID reading and writing unit 25 performs the loading and unloading of the carrier 18. In the confirmation unit 4b, it is confirmed whether the carrier ID read out from the ID card 20 of the carrier 18 and the carrier ID accumulated and managed by the carrier ID management unit 4a match. This makes it possible to frequently check the carrier ID for the carrier 18 with respect to the simple buffer unit 12 to find the occurrence of a problem at an early time, and further improve the reliability of the management of the carrier 18.

In addition, in the case where confusion occurs in the data due to a system error, the carrier ID and ID card 20 accumulated and managed by the carrier ID management unit 4a in the carrier ID checking unit 4b of the MCS 4 can be used. When a discrepancy with the carrier ID read out is detected, the automatic material handling system 1 is once stopped, and the simple buffer unit 12 is rounded to the OHT transport cart 10 equipped with the ID reading and recording unit 25. The carrier ID of the carrier 18 mounted in the simple buffer unit 12 is automatically rotated by turns, and the carrier ID stored and managed in the carrier ID management unit 4a is rewritten based on the read carrier ID. The carrier is rearranged in the carrier ID management unit 4a so as to match the carrier ID stored and managed. Therefore, the problem can be minimized, the automatic material handling system 1 can be restarted at an early time, and the reliability of the management of the carrier 18 can be further improved.

As mentioned above, the present invention is described in the above preferred embodiment, but the present invention is not limited thereto. It is thought that various other embodiments may be made without departing from the spirit and scope of the invention. In addition, in this embodiment, although the action and effect by the structure of this invention are disclosed, these action and effect are one example, and do not limit this invention. In addition, specific embodiment is the thing which showed the structure of this invention, and does not limit this invention.

In the automatic material handling system 1 according to the embodiment of the present invention, the OHT conveyance trolley 10 is employed as the conveying system, but the conveying system is not limited thereto. For example, various conveying systems, such as an OHS conveyance truck, an AGV conveyance truck, and an RGV conveyance truck, can be used.

In the automatic material handling system 1 according to the embodiment of the present invention, the ID reading and recording unit 25 and the ID card 10 communicate using a wireless communication function, but the present invention is not limited thereto. . For example, it is also possible to use a communication means conventionally employing the principle of light.

Moreover, in the automatic material handling system 1 which concerns on this embodiment, the OHT conveyance trolley 10 grapples the flange 21 of the carrier 18 by the gripper part 26 of the conveyance robot 11. Loading and unloading, but the present invention is not limited thereto. For example, as shown in FIG. 7, a carrier command is substituted for the gripper portion 26 and the rotation shaft 36 at the tip of the third end arm 35 of the transfer robot 11 of the OHT transfer truck 10. It is comprised by the member 41, and it can also load and unload by lifting the bottom face of the carrier 18 by this carrier instruction member 41. FIG. On the other hand, the upper surface of the carrier command member 41 is provided with a protruding motion pin 42 fitted to a recess provided on the bottom surface of the carrier 18, to position the carrier 18 and the transfer robot 11. It should be noted that it is to be ensured, and to prevent slipping between the carrier 18 and the transport robot (11).

Moreover, in the automatic material handling system 1 which concerns on this embodiment, although the simple buffer unit 12 in which the ID reading and writing unit is not provided is provided in both sides of the rail 15, it does not restrict to this. For example, as shown in FIG. 8, the simple buffer unit 12 is located directly below the rail 15 and is supported by the buffer suspension member 52 on the ceiling 9 or suspended from the ceiling. It may be the unit 51. On the other hand, it should be noted that the simple buffer unit 51 can be supported not only on the ceiling but also on the rail, the wall or the bottom. In this case, the OHT conveyance trolley 10 is not limited to the structure provided with the conveyance robot 11 shown in FIG. 3, and the lifting body which can be elevated up and down by the suspension belt 44 as shown in FIG. The gripper 46 provided on both sides of the 45 may be configured to clamp and grip the flange 21 of the carrier 18.

Moreover, in the automatic material handling system 1 which concerns on this embodiment, this invention is applied only to the simple buffer unit 12, The storage unit 2 other than the simple buffer unit 12, and the semiconductor manufacturing apparatus 13 are The management of loading and unloading of the carriers 18 thereon is carried out according to the prior art based on the ID reading and writing units already installed, but not limited thereto. For example, the present invention may be applied to the management of loading and unloading of the carrier 18 for all the storage units 2 with the simple buffer unit 12 and the semiconductor manufacturing apparatus 13. That is, some OHT conveyance trolleys equipped with the ID reading and writing unit 25 without installing the ID reading and writing unit in all the storage units 2 and the semiconductor manufacturing apparatus 13 with the simple buffer unit 12 are provided. (10) reads and writes the ID card 20 during loading and unloading of the carrier 18 for all the storage units 2 and the semiconductor manufacturing apparatus 13 equipped with the simple buffer unit 12. By performing the above, management can also be performed through the MCS 4.

Moreover, in the automatic material handling system 1 which concerns on this embodiment, as an identification information recording unit which records identification information for identifying each carrier, an ID card (identification information recording unit) which records carrier ID which is identification information. (20) is used, but not limited thereto. For example, a bar code may be used as the identification information recording unit. In this case, a barcode reading and recording apparatus is used as the identification information reading and recording unit.

Although the present invention has been described in detail with reference to specific embodiments, it will be apparent to those skilled in the art that various modifications and changes can be made without departing from the spirit and scope of the invention.

The present invention claims priority to Japanese Patent Application No. (Japanese Patent Application No. 2005-91673) filed March 28, 2005, the contents of which are incorporated herein by reference.

According to the automatic material handling system according to the present invention, an identification information reading and recording unit that reads and writes identification information based on a command of a controller is mounted only on a part of the conveyance truck. Thereby, the cost of each step is remarkably reduced compared with the conventional case where the identification information reading and recording unit is mounted in both the manufacturing apparatus and the storage unit. In addition, since the identification information reading and recording unit is mounted on the conveyance truck, the conveyance truck can read and record the identification information while performing the normal conveyance operation, so that the conveyed object can be easily managed. Moreover, the conveyance trolley is excellent in maneuverability with respect to the manufacturing apparatus and the storage unit, and high reliability because communication between the identification information reading and recording unit mounted on the conveyance trolley and the identification information recording unit mounted on the conveyed object is easy to ensure. It is possible to manage the consignment with

Claims (5)

An automatic material handling system for managing a conveyed object conveyed to a plurality of conveying trucks according to a command of a controller between one or more storage units and a plurality of manufacturing apparatuses, The conveyed object includes a readable and recordable identification information recording unit for recording identification information for identifying a workpiece received in the conveyed object, A part of the conveyance balance includes an identification information reading and recording unit which reads and records the identification information with respect to the identification information recording unit, respectively, based on a command of the controller, The controller includes an identification information management unit which accumulates and manages the identification information which has been read or recorded in the identification information reading and recording unit, Characterized in that the controller performs management of the object on the basis of the identification information recorded in the identification information recording unit and the identification information accumulated in the identification information management unit and managed by the identification information management unit. Automatic material handling system. The identification information reading and recording unit according to claim 1, wherein the identification information reading and recording unit reads the identification information from the identification information recording unit when carrying out and carrying out the conveyed object with respect to the storage unit and the manufacturing apparatus, The controller further comprises an identification information confirmation unit for confirming whether the identification information read by the identification information reading and recording unit and the identification information accumulated in the identification information management unit and managed by the identification information management unit match. Automatic material handling system, characterized in that it comprises. The identification information reading and recording unit according to claim 1, wherein the identification information reading and recording unit is used when carrying out and carrying out the conveyed object to the storage unit and the manufacturing apparatuses in which the identification information reading and recording unit is not installed. Reading the identification information from the information recording unit, The controller includes an identification information confirmation unit for confirming whether the identification information read by the identification information reading and recording unit and the identification information accumulated in the identification information management unit and managed by the identification information management unit match. It further comprises an automatic material handling system. 3. The apparatus according to claim 2, wherein in said identification information confirming unit, said identification information read by said identification information reading and recording unit and said identification information accumulated in said identification information management unit and managed by said identification information management unit are stored. If it is determined that they do not match, the controller rewrites the identification information accumulated in the identification information management unit and managed by the identification information management unit into the identification information read by the identification information reading and recording unit, or And reposition the conveyed object to conform to the identification information accumulated in the identification information management unit and managed by the identification information management unit. 4. The apparatus according to claim 3, wherein in the identification information confirming unit, the identification information read by the identification information reading and recording unit and the identification information accumulated in the identification information management unit and managed by the identification information management unit are If it is determined that they do not match, the controller rewrites the identification information accumulated in the identification information management unit and managed by the identification information management unit to the identification information read by the identification information reading and recording unit, or And reposition the conveyed object to conform to the identification information accumulated in the identification information management unit and managed by the identification information management unit.

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