JP2010126301A - Conveying system and control method for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To attain shortening of a lead time of a lot and enhancement of an operation rate of a device by enhancing conveying ability. <P>SOLUTION: A conveying system includes: a conveying rail 1 for conveying an FOUP (front opening unified pod) 4 for storing a semiconductor wafer; an OHT (overhead hoist transport) truck 2 for transferring the FOUP 4 and traveling on the conveying rail 1; and a suspension type temporary storage shelf 3 for temporarily storing the FOUP 4. When the FOUP 4 after completion of treatment by the device 8 for performing the former step is conveyed and when a load port 8c of the device 8 for performing subsequent treatment is emptied, the OHT truck 2 conveys the recovered FOUP 4 to the device 8 for performing the subsequent treatment. When transferring of the FOUP 4 of the OHT truck 2 to the load port 8c is performed, a shelf unit of the suspension type temporary storage shelf 3 is retreated to smoothly perform the treatment. Further, when the load port 8c of the device 8 is not emptied, the OHT truck 2 transfers the FOUP 4 to the suspension type temporary storage shelf 3, waits empty of the load port 8c, and transfers the FOUP 4 to the load port 8c by the shelf unit. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to product transport control in semiconductor manufacturing and liquid crystal manufacturing lines, and in particular, temporary storage shelves and transport so that a lot that has been processed is collected and a lot to be processed next is input in the shortest time. The present invention relates to a transport system and a control method thereof for transporting using a carriage.

  In recent years, it has been arranged along a circular orbit between processes in a clean room, and a series of processing stations that perform various surface treatments (thin film formation, photolithography, cleaning, etching, inspection, etc.) of semiconductor wafers. For this purpose, an OHT (Overhead Hoist Transport) cart, which is a suspended transport cart, is often used to transport a storage container (hereinafter referred to as FOUP: Front Opening Unified Pod) containing the semiconductor wafer.

  Conventionally, using a general-purpose OHT carriage that lifts and conveys one FOUP by one unit, it is arranged along the conveyance rail between processes or between processes, and processes necessary for substrates stored in the FOUP Transferred to the FOUP loading / unloading port of the processing station to be performed, and stores the FOUP storing the substrate processed at the processing station and the substrate to be processed by the processing station. There has been proposed a method for exchanging the FOUP, an apparatus for carrying out the method, and a transport control method (Patent Document 1).

  Hereinafter, the conveyance control method disclosed in Patent Document 1 will be described. With regard to this conventional transport control method, the method for delivering articles in the OHT carriage is realized by the following first to fourth steps.

  1st process: The goods for carrying in to the predetermined | prescribed processing station currently hold | gripped by the holding part of an OHT cart are dropped, and this goods for carrying are slide plates which can move forward and backward, Comprising: It is transferred to one placement surface in a suspended temporary storage shelf (hereinafter referred to as OHB: Over Head Buffer) having a placement surface for the article.

  Second step: In the gripping part of the OHT carriage, the unloading article transferred to the article loading / unloading port of the predetermined processing station is gripped and raised, and this unloading article is placed on the other mounting surface in the OHB. To be transferred to.

  Third step: The carrying-in article transferred on one placement surface of the OHV is held and lowered by the holding part of the OHT carriage, and transferred to the article loading / unloading port of the predetermined processing station. .

  Fourth step: The carrying-out article transferred on the other mounting surface of the OHB is gripped and raised by the gripping portion of the OHT carriage.

  In the first embodiment of Patent Document 1, an OHT carriage that is subjected to traveling control in a predetermined direction along an in-process annular track and an inter-process annular track linked to the in-process annular track is configured to perform predetermined processing. In the suspension type temporary storage shelf, the article to be processed in the station and the article transferred to the article carrying-in / in port in the predetermined processing station and already processed in the predetermined processing station are exchanged. It is described that the slide plate is advanced and retracted together.

  As an article delivery method in the OHT carriage in the second embodiment of Patent Document 1, in the article delivery method in the OHT carriage in the first embodiment, the article is a FOUP in which a semiconductor substrate is detachably inserted and processed. It is described that the stations are arranged at appropriate positions along the annular track of the OHT carriage.

  The article transfer device in the OHT carriage in the third embodiment of Patent Document 1 includes an unloading article transferred to an article loading / unloading port of a processing station installed at a predetermined location along the traveling path of the OHT carriage. The OHB has an OHB that is positioned above the carrying article and is exchanged with the carrying article that is held by the article gripping portion of the OHT carriage. Each of the article placement surfaces of the slide plate is controlled by advancing and retreating of the slide plate to store or remove articles for loading or unloading. Only in the case of taking out, it operates so that one of the article placement surfaces faces the article gripping part of the lifting mechanism of the OHT carriage, and in other cases, it is driven so as to allow the raising and lowering movement of the OHT carriage. Controlled Rukoto have been described.

The article delivery device in the OHT carriage in the fourth embodiment of Patent Document 1 is a FOUP in which the article detachably accommodates the semiconductor substrate in the article delivery apparatus in the OHT carriage in the third embodiment, and is processed It is described that the stations are arranged at appropriate positions along the annular track of the OHT carriage.
JP 2007-96145 A

  However, in the configuration and control method of the OHT cart and the suspension-type temporary storage shelf shown in Patent Document 1, the FOUP processed by the apparatus and the FOUP to be processed next are exchanged by one OHT cart, so that the FOUP Although there is a certain effect of shortening the replacement time, since the OHT cart must perform the FOUP recovery operation from the device and the FOUP loading operation to the device, an unloaded OHT cart runs in the vicinity of the device. If not, a loss time may occur until the OHT carriage arrives.

  In addition, as for the transfer capacity of the entire transfer system, only the capability of the OHT carriage can be obtained, so the required transfer amount in the in-process bay where a high-throughput apparatus typified by a recent exposure apparatus is installed. Will run out of transport capacity.

  In addition, in the configuration of the suspended shelf in Patent Document 1, since it is installed on the transport rail, if it is installed on the load port of the device, the FOUP cannot be transferred to the device by the OHT carriage, so the device is placed under the transport rail. There is also a problem that there is a restriction on the installation location that can only be installed at a location where no load port is installed.

  The present invention was made to solve the problems of the prior art, and has a shelf unit that can move back and forth, and a suspended temporary storage shelf that can be transferred to and recovered from the load port of the apparatus. It is an object of the present invention to provide a transport system and a control method thereof for improving a transport capability by fusing a suspension-type transport cart, reducing a lot lead time, and suppressing a decrease in operation of the apparatus.

  In order to achieve the above object, a transfer system according to claim 1 of the present invention includes a processing apparatus for processing a semiconductor wafer having a load port, and a storage container for storing a lot of semiconductor wafers. Installed along the direction in which the transport rail of the transport rail, the automatic storage for storing the storage container, the multiple transport carts that transfer the storage container and travel on the transport rail, and the transport rail of the transport rail And a suspended temporary storage shelf for temporarily storing the storage container, and a control device for controlling storage and movement of the storage container.

  With this configuration, the storage container (FOUP) for the next processing can be temporarily stored in a suspended temporary storage shelf installed in the vicinity of the apparatus, thereby shortening the time for loading and unloading the storage container to the apparatus. Become.

  According to a second aspect of the present invention, in the transfer system according to the first aspect, the suspended temporary storage shelf includes a shelf unit that can move the storage container along the direction in which the transport carriage travels, and the storage container. The load port is provided with a transfer mechanism for transferring and collecting from the load port.

  With this configuration, the suspension-type temporary storage shelf moves so that it can be retracted when the storage container is transferred from the transport carriage to the processing device, so that the suspension-type temporary storage shelf can be installed on the load port. In addition, since the transfer mechanism can transfer the storage container directly to the processing device, in addition to the processing of the transfer cart, the transfer capability by the suspension type temporary storage shelf is also taken into account, so the capacity of the entire transfer system is improved. Can do.

  According to a third aspect of the present invention, in the transfer system according to the first or second aspect, the minimum width of the suspension-type temporary storage shelf is larger than the width of the storage container, and the storage container is moved from the transfer carriage to the load port of the processing apparatus. It is characterized in that the transfer and collection operations can be smoothly performed.

  With this configuration, the storage container can be transferred from the transport carriage to the processing apparatus without interfering with the suspended temporary storage shelf.

  According to a fourth aspect of the present invention, in the transfer system according to the first or second aspect, the transfer mechanism of the suspension type temporary storage shelf grips the handle portion of the storage container and winds it with a wire. It is provided with.

  With this configuration, it is possible to transfer and collect the storage container transferred to the suspension-type temporary storage shelf to the load port of the processing apparatus.

  According to a fifth aspect of the present invention, in the conveyance system according to the first or second aspect, the suspended temporary storage shelf is closed when the storage container is stored, and the storage container is transferred to the load port of the processing apparatus and is recovered. An opening bottom plate portion is provided.

  With this configuration, it is possible to install a suspended temporary storage shelf at the upper position of the load port of the processing apparatus, which eliminates the limitation of the installation location and increases the number of installed units.

  According to a sixth aspect of the present invention, in the transfer system according to the second aspect, the suspension-type temporary storage shelf operates the movement and transfer mechanism of the shelf unit. It is characterized by performing.

  With this configuration, there is no need to mount a power source such as a battery on the suspension-type temporary storage shelf, the size can be reduced, and maintenance such as battery replacement is not necessary.

  Further, the invention described in claim 7 is the transfer system according to claim 2, wherein the suspension type temporary storage shelves are grouped by an arbitrary number from among the plurality of suspension type temporary storage shelves. The shelf unit of the shelf is movable along the traveling direction of the transport carriage.

  With this configuration, the collision prevention control between the shelf units may be performed only within the same group, and the control can be simplified.

  According to another aspect of the present invention, there is provided a transfer system control method comprising: a processing device for processing a semiconductor wafer having a load port; a transfer rail for automatically transferring a storage container for storing a lot of semiconductor wafers; An automatic storage for storing the storage container, a plurality of transport carts that transfer the storage container and travel on the transport rail, and a transport rail on the transport rail along the direction in which the transport cart travels. A control method for a transport system comprising a suspended temporary storage shelf for storing and a control device for controlling storage and movement of the storage container, a temporary storage shelf control step for controlling the suspended temporary storage shelf, Transport cart control process that controls the transport cart, automatic storage control process that controls the automatic storage, and the entire transport system, transport instructions to the temporary storage shelf control process and transport cart control process A conveyance control process for collecting inventory information from the automatic storage control process and managing inventory; a product allocation process for determining the processing order of a plurality of in-process lots; an apparatus process control process for controlling the processing apparatus; And a production progress management step for controlling the entire production progress of semiconductor wafer manufacturing, outputting a transfer instruction to the transfer control step, and outputting a process start instruction to the apparatus processing control step.

  By this method, it is possible to control the transport system that combines the transport cart and the suspension-type temporary storage shelf.

  The invention described in claim 9 is the control method according to claim 8, wherein when the storage container is transferred and not vacant on the load port of the processing apparatus, the transport carriage suspends the transported storage container temporarily. When the storage container is recovered from the load port and emptied after being transferred to the storage shelf, the storage container transferred by the suspension-type temporary storage shelf is transferred onto the load port.

  By this method, the storage container for the next processing is temporarily stored in the vicinity of the processing apparatus, so that the storage time of the storage container into the processing apparatus and the transport time of the transport cart can be shortened.

  Further, in the control method according to claim 8, when the processing in the processing device is completed, the suspension method of the processing device is performed by the suspended temporary storage shelf or the transport carriage to which the storage container is not transferred. The storage container on the load port is collected.

  By this method, the processing capacity of the transport system can be improved by collecting the storage container that has been processed by either the suspended temporary storage shelf or the transport cart.

  Further, the invention described in claim 11 is the control method according to claim 10, wherein in the collection of the storage container by the transfer carriage or the suspension type temporary storage shelf, the transfer carriage that can arrive at the processing apparatus that has been processed earliest is transferred. A prediction is made by a control process, and a transport cart or a suspension-type temporary storage shelf is selected from the prediction result, and the storage container is collected from the load port.

  By this method, it is possible to shorten the collection and transport time of the storage container that has been processed.

  The invention described in claim 12 is the control method according to claim 8, wherein when there is no storage container on the load port of the processing apparatus and the container is vacant, the transport cart moves the transport container to the suspended temporary storage shelf. It is characterized in that it is transferred directly onto the load port without being transferred.

  By this method, the number of times of processing the storage container can be reduced without going through the suspended temporary storage shelf, and the time for the charging process can be shortened.

  According to the present invention, it is possible to collect a lot that has been processed (FOUP) and to input a lot to be processed next in the shortest time in connection with the conveyance control of the product in the production line. As a result, the production apparatus can be prevented from being lowered in operation, and the lot lead time can be shortened.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a diagram showing a plan view of a transport system according to an embodiment of the present invention. Moreover, in the following each figure, the same code | symbol is attached | subjected and shown to the thing which has the equivalent function corresponding to the illustrated structural member, and the description is not repeated.

  In the transfer system shown in FIG. 1, reference numeral 1 denotes a transfer rail on which a transfer carriage (OHT carriage) for transferring a plurality of lots of semiconductor wafers, etc. travels between each process, 2 denotes an OHT carriage that runs on the transfer rail, 3 Suspension-type temporary storage shelf 4 is a FOUP (storage container) for storing a plurality of semiconductor wafers, 8 is a device for processing and inspecting semiconductor wafers, 8 c is installed in front of the device 8, and is an OHT cart 2 or a load port 16 on which the FOUP 4 conveyed from the suspended temporary storage shelf 3 is transferred, and 16 is an automatic storage for storing and storing the FOUP 4.

  In order to process semiconductor wafers in the apparatus 8, the FOUP 4 transported from the OHT carriage 2 or transported and stored from the suspended temporary storage shelf 3 is transferred to the load port 8c. Further, the semiconductor wafer in the FOUP 4 transferred to the load port 8c moves into the apparatus 8 and is processed or inspected. Thereafter, the semiconductor wafer that has been processed or inspected is stored in the FOUP 4, and when the processing of all the semiconductor wafers is completed, the FOUP 4 is collected by the OHT carriage 2 or the suspended temporary storage shelf 3.

  2 is a front view of the transfer system in the present embodiment, FIG. 3 is a front view of a suspended temporary storage shelf, and FIG. 4 is a right side view of the suspended temporary storage shelf. 2 to 4, 2 a is used when the FOUP 4 is transferred by the OHT cart 2, is extended when the FOUP 4 is loaded and transferred, and is wound around the collection transfer. 2 b is for gripping the FOUP 4 of the OHT cart 2. It is a holding part.

  Reference numeral 3a denotes a frame of the suspension type temporary storage shelf 3, and 3b denotes a shelf unit for moving the FOUP 4 transferred from the suspension type temporary storage shelf 3. The shelf unit 3b includes a wire 3bs, a wire winding as a transfer mechanism. It comprises a take-up portion 3bt, a wire winding motor 3bu, a gripping portion 3bv, a power supply brush 3bw, a travel motor 3bx, a travel wheel 3by, and a bottom plate 3bz.

  Reference numeral 3c denotes a power supply line that supplies power for the power of the wire winding motor 3bu and the traveling motor 3bx of the shelf unit 3b via the power supply brush 3bw. Reference numeral 4a denotes a handle of the FOUP 4, 5 denotes a ceiling of the clean room, and 6 denotes a ceiling hanging bracket for installing the transport rail 1.

  Reference numeral 7 denotes a virtual line indicating the boundary of the group of the suspension type temporary storage shelves 3, and one group is constituted by a plurality of suspension type temporary storage shelves 3. Reference numeral 8 denotes an apparatus for processing or inspecting a semiconductor wafer. The group of the suspended temporary storage shelves 3 for the apparatus 8a is 7a, and the group of the suspended temporary storage shelves 3 for the apparatus 8b is 7b.

  The basic transport control of the FOUP 4 performed in the above configuration will be described. If the load port 8c of the apparatus 8 that performs the next process is vacant, the FOUP 4 that has completed the process in the apparatus 8 that performs the previous process has the load port 8c of the apparatus 8 that the OHT cart 2 performs the next process. To be transferred and transferred. If the load port 8c of the corresponding device 8 is not vacant, the OHT carriage 2 transports the FOUP 4 to the suspended temporary storage shelf 3 (shelf unit 3b) and transfers it.

  Further, when the processing in the apparatus 8 is finished, the OHT that can arrive the earliest among the suspended temporary storage shelf 3 (shelf unit 3b) that does not store the FOUP 4 or the OHT cart 2 that does not carry the FOUP 4 The collection operation of the FOUP 4 that has been processed is performed by one of the carts 2.

  Further, when the FOUP 4 is not transferred to the load port 8c and is not vacant, and the FOUP 4 is also transferred to the shelf unit 3b, the processed FOUP 4 is collected and the load port 8c of the apparatus 8 is vacant. In this case, transfer of the FOUP 4 placed on the shelf unit 3b to the load port 8c is performed. In this operation, first, the shelf unit 3b of the suspension type temporary storage shelf 3 is moved onto the load port 8c, the bottom plate 3bz is opened, and the handle 4a of the FOUP 4 is gripped by the grip portion 3bv. The FOUP 4 is transferred to the load port 8c.

  Further, the operation of the suspended temporary storage shelf 3 will be described in detail with reference to FIGS. The front view of the suspended temporary storage shelf 3 in FIG. 3 shows the front surface of the FOUP 4, and the right side view of the suspended temporary storage shelf 3 in FIG. 4 shows the right side surface of the FOUP 4.

  The shelf unit 3b of the suspension type temporary storage shelf 3 is provided with a traveling motor 3bx and a traveling wheel 3by. Electricity is supplied from the power supply line 3c via the power supply brush 3bw, and the traveling motor 3bx rotates. The traveling wheel 3by rotates so as to travel in the groove portion of the frame 3a, and the shelf unit 3b moves in the same direction as the transport rail 1. The FOUP 4 is stored in the shelf unit 3b of the suspension type temporary storage shelf 3 with the handle 4a hooked on the grip portion 3bv. When the FOUP 4 is transferred to the load port 8c, the power supply line is the same as described above. The bottom plate 3bz is opened by the electric power from 3c via the power supply brush 3bw, the wire winding portion 3bt connected to the wire winding motor 3bu is rotated, the wire 3bs is extended, and the FOUP 4 gripped by the gripping portion 3bv is lowered. , Loaded and transferred to the load port 8c.

  When the processing of the FOUP 4 is completed in the device 8 and the FOUP 4 is collected by the suspended temporary storage shelf 3, the shelf unit 3b moves onto the load port 8c of the device 8, the bottom plate 3bz opens, and the wire winding is performed. The wire take-up part 3bt connected to the motor 3bu rotates, the wire 3bs extends, and the handle 4a of the FOUP 4 is hooked by the grip part 3bv. Next, the wire winding portion 3bt connected to the wire winding motor 3bu rotates in reverse, winds up the wire 3bs, raises the FOUP 4, stores it in the shelf unit 3b, and then closes the bottom plate 3bz.

  Further, the FOUP 4 is collected by the OHT cart 2, but is collected and transferred to the suspended temporary storage shelf 3 (shelf unit 3b) by the reverse operation when the load port 8c of the apparatus 8 is not empty. The OHT cart 2 is collected from the FOUP 4. As a result, the FOUP 4 transported by the OHT carriage 2 for processing in the apparatus 8 can be directly transferred to the load port 8c. After this processing, the FOUP 4 collected and transferred to the shelf unit 3b is transferred to the OHT carriage. It is also possible to collect and convey by 2.

  FIG. 5 is a block diagram showing a transport system control device having each control process, 9 is a production progress management unit for managing the entire production progress, and 10 is a transport control unit for controlling the entire transport system, and is suspended and temporarily stored under the control. A temporary storage shelf control unit 13 that controls the shelf 3, a transport cart control unit 14 that controls the OHT cart 2, and an automatic storage control unit 15 that controls the automatic storage 16 are arranged. Further, 11 is a product allocation unit that determines the order of products to be processed next, and 12 is a device processing control unit that controls the device 8.

  In the transfer control unit 10 of this transfer system control device, the required transfer time to the device 8 that has been processed is predicted, and the OHT cart 2 or the suspension-type temporary storage shelf 3 that arrives earliest is allocated, and the transfer cart control unit 14 or a temporary storage shelf control unit 13 is instructed to convey.

  FIG. 6 is a flowchart showing the FOUP transfer process from the end of the process in the apparatus in the previous process until the transfer to the apparatus in the next process in the transfer system and control method of the present embodiment. . Below, the operation | movement of a conveyance process is demonstrated, referring FIGS.

  The apparatus processing control unit 12 grasps the availability of the load port 8c of the apparatus 8 to be processed next, and notifies the production progress management unit 9 of the result (S1).

  The production progress management unit 9 notifies the conveyance control unit 10 of the empty state of the load port 8c of the apparatus 8 that performs the next processing (S2).

  It is determined whether or not there is a vacancy in the load port 8c of the device 8 that performs the next process (the presence or absence of FOUP 4) (S3).

  When the load port 8c is empty (Yes in process S3), the transport control unit 10 collects the FOUP 4 from the apparatus 8 (load port 8c or shelf unit 3b) in the previous process, and performs the next process. The process which outputs the instruction | indication conveyed to the load port 8c of the apparatus 8 to the conveyance trolley | bogie control part 14 is performed (S4).

  The transport cart control unit 14 performs processing to collect the FOUP 4 from the device 8 of the previous process that has been processed, and to output an instruction to transport to the load port 8c of the device 8 that performs the next processing to the OHT cart 2 (S5). .

  For example, infrared communication is performed between the OHT carriage 2 that transports the processed FOUP 4 and the suspended temporary storage shelf 3 installed in the vicinity of the apparatus 8 that performs the next process, and a collision prevention control process is performed (S6). .

  When the OHT carriage 2 and the shelf unit 3b of the suspended temporary storage shelf 3 interfere with each other, the shelf unit 3b is retracted (S7). As shown in FIG. 4, the width Ws of the suspension type temporary storage shelf 3 is larger than the width Wf of the FOUP 4, and the shelf unit 3b is retracted, so that the transfer of the FOUP 4 from the OHT cart 2 to the load port 8c is smooth. It is configured to be able to do.

  The OHT carriage 2 performs the process of transferring the FOUP 4 to the load port 8c of the apparatus 8 and the process ends (S8).

  On the other hand, when the FOUP 4 is transferred onto the load port 8c and there is no space (No in process S3), the transport control unit 10 collects the FOUP 4 from the apparatus 8 of the previous process, and performs the next process. A process of outputting an instruction to transfer to the suspended temporary storage shelf 3 (shelf unit 3b) installed in the vicinity of 8 to the transport cart controller 14 is performed (S9).

  The transport cart control unit 14 instructs the OHT cart 2 to collect the FOUP 4 from the device 8 of the previous process that has been processed and transport it to the suspended temporary storage shelf 3 installed in the vicinity of the device 8 that performs the next processing. The output process is performed (S10).

  The OHT carriage 2 that transports the processed FOUP 4 performs a process of transporting (transferring to the shelf unit 3b) the FOUP 4 to the suspended temporary storage shelf 3 installed in the vicinity of the apparatus 8 that performs the next process (S11). .

  When the FOUP 4 previously transferred from the load port 8c of the apparatus 8 is collected, the FOUP 4 transferred to the suspended temporary storage shelf 3 is transferred to the load port 8c of the apparatus 8 by the shelf unit 3b. The process is performed and the process ends (S12).

  As a result of the processes S1 to S12 described above, the FOUP 4 that has been processed by the apparatus 8 in the previous process has the FOUP 4 collected by the OHT cart 2 when the load port 8c of the apparatus 8 to be processed in the next process is free. It can be directly transferred to and transferred to the load port 8c of the apparatus 8 to be processed in the next process. If the load port 8c is not empty, the FOUP 4 is transferred to the shelf unit 3b, and then the load port 8c becomes empty. Since the FOUP 4 can be transferred to the load port 8c by the shelf unit 3b, the lead time of the lot can be shortened and the operation deterioration of the apparatus 8 can be minimized.

  FIG. 7 is a flowchart showing processing until the FOUP 4 that has been processed in the apparatus 8 that is performing the current process is collected and transported in the transport system and control method thereof according to the present embodiment. Similarly to FIG. 6, the operation of the transport process will be described with reference to FIGS. 1 to 5 and 7.

  The apparatus processing control unit 12 performs a process of notifying the production progress management unit 9 that the FOUP 4 process has been completed in the apparatus 8 (S21).

  The production progress management unit 9 performs a process of collecting the processed FOUP 4 and outputting an instruction to the apparatus 8 for performing the next process to the conveyance control unit 10 (S22).

  In the transport control unit 10, in order to collect the processed FOUP 4, the shortest estimated arrival time of the OHT carriage 2 that arrives at the apparatus 8 or the information on the suspended temporary storage shelf 3 (whether it can be collected in the shelf unit 3b), Processing for making an inquiry to the transport cart control unit 14 and the temporary storage shelf control unit 13 is performed (S23).

  In the transport cart control unit 14 and the temporary storage shelf control unit 13, the OHT cart 2 or the suspended temporary storage shelf 3 (shelf unit 3 b) predicts from the past actual value and notifies the transport control unit 10 of the time that can be processed in the shortest time. (S24).

  In the transport control unit 10, a transport cart control unit 14 or a temporary storage shelf that collects the processed FOUP 4 from the load port 8 c of the device 8 and can process the transport to the transport destination (device 8) that performs the next process in the shortest time. Processing to output an instruction to the control unit 13 is performed (S25).

  In response to an instruction from the transport carriage control unit 14 or the temporary storage shelf control unit 13, the OHT carriage 2 or the suspended temporary storage shelf 3 (shelf unit 3b) that can arrive in the shortest is used to collect the processed FOUP 4 and perform processing. The process ends (S26).

  Through the processes of the above processes S21 to S26, the FOUP 4 that has been processed in the apparatus 8 can be collected and transported in the shortest time, and the FOUP 4 can be temporarily collected by the suspended temporary storage shelf 3 (shelf unit 3b). The FOUP 4 that performs the next processing can be loaded and transferred to the load port 8c of the apparatus 8, thereby reducing the lot lead time and minimizing the decrease in the operation of the apparatus 8.

  The transfer system and the control method thereof according to the present invention include a suspended temporary storage shelf in a semiconductor or liquid crystal production line, and by combining the OHT carriage and the suspended temporary storage shelf, the transfer capability can be improved and the processing is completed. It is possible to collect the FOUP that has been performed and to input the FOUP for the next processing in the shortest time, and it is useful as a configuration and method for suppressing a decrease in the operation of the production apparatus and shortening the lead time of the lot.

The top view which shows the conveyance system in embodiment of this invention The front view which shows the conveyance system in this embodiment The front view which shows the suspension type temporary storage shelf in this embodiment The right side view which shows the suspension type temporary storage shelf in this embodiment The block diagram which shows the conveyance system control apparatus in this embodiment Flowchart showing processing in which a FOUP for which processing has been completed in this embodiment is conveyed to an apparatus that performs next processing Flowchart showing processing for collecting and transporting FOUP 4 after processing in this embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Transport rail 2 OHT cart 2a Belt 2b, 3bv Grasping part 3 Suspended temporary storage shelf 3a Frame 3b Shelf unit 3bs Wire 3bt Wire winding part 3bu Wire winding motor 3bw Feeding brush 3bx Traveling motor 3by Traveling wheel 3bz Bottom plate 3c Feed line 4 FOUP
4a Handle 5 Ceiling 6 Ceiling hanger 7a, 7b Storage shelf group 8, 8a, 8b Device 8c Load port 9 Production progress management unit 10 Transport control unit 11 Product allocation unit 12 Device processing control unit 13 Temporary storage shelf control unit 14 Transport Dolly control unit 15 Automatic storage control unit 16 Automatic storage

Claims (12)

A processing apparatus for processing a semiconductor wafer having a load port;
A transport rail for automatically transporting a storage container for storing a lot of semiconductor wafers, and
An automatic storage for storing the storage container;
A plurality of transport carts that transfer the storage container and travel on the transport rail;
A suspension-type temporary storage shelf that is installed along the direction in which the transport carriage of the transport rail travels and temporarily stores the storage container;
A control device for controlling storage and movement of the storage container;
A conveyance system characterized by comprising:   The suspension-type temporary storage shelf includes a shelf unit that can move the storage container along a direction in which the transport carriage travels, and a transfer that transfers the storage container to a load port of the processing apparatus and recovers from the load port. The transport system according to claim 1, further comprising a mechanism.   The minimum width of the suspension-type temporary storage shelf is larger than the width of the storage container, and the storage container can be smoothly transferred and recovered from the transport carriage to the load port of the processing apparatus. The transport system according to claim 1 or 2, characterized in that   The transfer system according to claim 1, wherein the transfer mechanism of the suspension-type temporary storage shelf includes a storage container gripping part that grips a handle part of the storage container and winds it with a wire.   The said suspension type temporary storage shelf is equipped with the baseplate part which closes at the time of the storage of the said storage container, and opens the said storage container at the time of transfer to the load port of the said processing apparatus, and collection | recovery. Transport system.   3. The transfer system according to claim 2, wherein the suspension-type temporary storage shelf performs power supply from a power supply line via a power supply brush in order to move the shelf unit and operate the transfer mechanism.   The suspension-type temporary storage shelves are grouped into an arbitrary number from among the plurality of suspension-type temporary storage shelves, and the shelf units of the suspension-type temporary storage shelves can move along the traveling direction of the transport carriage only within the group The conveyance system according to claim 2, wherein A processing apparatus for processing a semiconductor wafer provided with a load port, a transport rail for automatically transporting a storage container for storing a lot of semiconductor wafers, an automatic storage for storing the storage container, and the storage container A plurality of transport carts that travel on the transport rail, and a suspended temporary storage shelf that is installed along the direction of travel of the transport rail of the transport rail and temporarily stores the storage container; A control device for controlling storage and movement of the storage container, and a control method of a transport system comprising:
Controls the temporary storage shelf control step for controlling the suspension-type temporary storage shelf, the transport cart control step for controlling the transport cart, the automatic storage cabinet control step for controlling the automatic storage cabinet, and the overall transport system. Collecting inventory information from the transport instruction to the temporary storage shelf control process and the transport cart control process and the automatic storage control process and managing the inventory, and the processing order of a plurality of in-process lots. A product allocation process to be determined, an apparatus processing control process for controlling the processing apparatus, an overall production progress of semiconductor wafer manufacturing, and a transfer instruction is output to the transfer control process. And a production progress management step for outputting a processing start instruction.   When the storage container is transferred onto the load port of the processing apparatus and is not empty, the transfer cart transfers the storage container being transferred to the suspension temporary storage shelf, and stores the storage container from above the load port. 9. The method according to claim 8, wherein when the container is recovered and emptied, the storage container transferred by the suspension-type temporary storage shelf is transferred onto the load port.   When the processing in the processing apparatus is completed, the storage container on the load port of the processing apparatus is collected by the suspended temporary storage shelf or the transport carriage that has not transferred the storage container. The control method of the conveyance system of Claim 8.   In the collection of the storage container by the transport cart or the suspended temporary storage shelf, the transport cart that can reach the processing device that has been processed earliest is predicted by the transport control step, and the transport cart or The method of controlling a transfer system according to claim 10, wherein the suspension-type temporary storage shelf is selected and the storage container is collected from a load port.   When there is no storage container on the load port of the processing apparatus, the transport cart transfers the storage container to be transported directly onto the load port without being transferred to the suspended temporary storage shelf. The method for controlling a transport system according to claim 8, wherein:

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