經濟部中央標準局只工消费合作杜印製 Λ 7 Η7 _ 一 —》a—· — ·—,,··〆'···-· ** — 五、發明説明（I ) 發明之背景 (1 )發明之領域 本發明係有關於一種運送容器，該容器係用以容納矽 晶圓及類似物。 (2 )習知技術之說明 一種傳統的運送容器（雖然於此並未顯示），包含了 :具有一開口於頂部上的貯存盒；用以正確的對準內部貯 放之矽晶圓（於後簡稱爲晶圓）的一內部插座（receptacle ):配合在該貯存盒之頂部開口上之一頂部門（具有墊片 置於其貯存盒與頂部門之間），以覆蓋該用以對準之內部 插座；及接著在該頂部門之內部頂部表面上之一晶圓壓板 。該因此組合之頂部開口形式運送容器，固持多數的直立 於該內部插座中以對準的晶圓，且適當的運送。 近年來，爲了減少發展成本與製造成本，已進行晶圓 的統一標準化。接下來，已建議使用國際標準化運送容器 。在大尺寸晶圓之發展的觀點下（在不遠的將來，移轉至 300mm或更大直徑的晶圓），已提出該種標準化的建 議，因爲該種大尺寸晶圓需要改良定位與精確的對準（以 容許卸貨者可執行高速的處理），而且，由減少多種成本 ，及相對應於大尺寸系統與自動化之發展的觀點，亦均有 此需要。 該種統一標準的運送容器（雖然於此並未顯示），包 含了··向前方開啓之一貯存盒；用以開啓與關閉該貯存盒 之前方開口的前方開啓介面機械標準門（於下簡稱爲 本纸張义度適用中國阀孓抒苹（CNS ) ( 2丨0 < :Μί ) _ 4 _ 一 ' (請先閲讀背而之注意事項再填寫本頁) t--裝·The Central Standards Bureau of the Ministry of Economic Affairs only prints Λ 7 Η7 _ I — — — — — — — ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, ** — V. Description of the Invention 1) Field of the invention The present invention relates to a transport container for containing silicon wafers and the like. (2) Description of conventional technology A conventional shipping container (although not shown here) includes: a storage box with an opening on the top; a silicon wafer (for An internal socket (hereinafter referred to as a wafer): a top section (with a gasket placed between the storage box and the top section) fitted on the top opening of the storage box to cover the alignment An internal socket; and then a wafer clamp on the internal top surface of the top door. The combined top-open container is thus transported, holding the majority of wafers erected in the internal socket for alignment, and transported appropriately. In recent years, in order to reduce development costs and manufacturing costs, wafers have been standardized uniformly. Next, the use of internationally standardized shipping containers has been suggested. From the perspective of the development of large-sized wafers (in the near future, migration to 300mm or larger diameter wafers), this standardized proposal has been proposed because the large-sized wafers need improved positioning and accuracy The need for alignment (to allow unloaders to perform high-speed processing), and from the viewpoint of reducing multiple costs and corresponding to the development of large-scale systems and automation. This unified standard shipping container (though not shown here) includes a storage box that opens forward; a mechanical front door with a front opening interface for opening and closing the front of the storage box (hereafter referred to as the abbreviation) For the meaning of this paper, China Valves (CNS) (2 丨 0 <: Μί) _ 4 _ Yi '(Please read the precautions before filling this page) t--packing ·
、1T 線 A7 A7 經濟部中央標準局Η工消f合作社印製 _____H7 五、發明説明@ ) F IMS門）；形成在該貯存盒之內部周邊表面上的多數 之配合槽；及一栓鎖機構，當該F I MS門接著時，可將 結合爪接合該配合槽，當該F I MS門移除時，脫離該結 合爪與配合槽。 該種前方開啓形式運送容器，容納了多數之垂直安排 的晶圓，且此一運送容器自半導體工廠運送至I C工廠， 於此，該晶圓被自動的設定於.多種處理器內。接下來，一 工作機器人自動的脫離該栓鎖機構，因此，該F I MS門 自動的自該貯存盒移除，且然後，由該卸貨者以自動之方 式，接續的自該貯存盒中取出該多數之晶圓。 此種形式之組態的習知技術文件，包含了日本專利 s h 〇 63 No. 82，788，曰本專利 sho 63，^^〇.166，948，日本專^1618 No. 279，546，及曰本專利He i 9，Νο-ί 0 7 ， 0 2 5 ° 滿足統一標準的運送容器，因此而組成，且在改良定 位精確度上的爲有效的，減少了多種成本及增進了自動化 ，但在運送上仍有一些問題產生。特別的，一種統一標準 的運送容器，在處理場地之間的工廠內運送，係已充分有 效，但在使用飛機或卡車自一半導體工廠運送至一 I C工 廠的長距離運送時，僅有一 F I MS門不能提供足夠高的 強度未確保充分之密封封閉，因爲該容器係暴露在多種的 外部環境中（包含了壓力變化，飛行時的震動等）。其結 果，由於外部空氣之進入，使得晶圓被微粒所污染，或遭 (I張尺度適用中國囡家代苹（CNS ) ( 2ΙΟχ2^Τ；ΜΜ~ --；--\·---„-I裝------訂------線 (請先閲讀背而之注意事項再填寫本I) 經濟部中央標隼局員工消费合作社印製 A7 H7 五、發明説明$ ) 受有機物污染，因此，恐怕不能維持該晶圓於足夠高的品 質。 發明之槪要說明 本發明係由前述之問題的觀點而設計，且因而，本發 明之目的係提供一種運送容器，其可維持足夠的充份封閉 限制，且即使在容器暴露於多種外部環境時，亦可維持其 內容物於高品質。 爲使達成前述目的，本發明係如下的組態： 依據本發明之第一相態，一種運送容器包含了： 用以容納物件之一貯存盒，該貯存盒爲一箱形，且於 一側邊上具有一開口 ： 用以開啓與關閉該貯存盒之開啓面之一內部門： 提供於該內部門之一密封構件，用以密封在貯存盒與 該內部門之間的間隙；及 用以覆蓋該內部門之一外部門，配合在已關閉之該貯 存盒的開啓面。 依據本發明之第二相態，該運送容器具有前述之第一 特徵，進一步的包含了用以接著與固定該外部門的夾持機 構，其中，該夾持機構具有提供在該貯存盒之外部周邊表 面上的一突起，及當該外部門配合至該貯存盒時，用以結 合該突起之被提供在外部門之邊緣上的一結合構件。 依據本發明之第三相態，該運送容器具有前述之第一 特徵，進一步的包含了用以接著與固定該外部門的夾持機 ^ -tIT0 (請先閱讀背而之注念事項4填ΐ：?本页) 本紙张尺度適用中國阀家炫嗥（CNS ) Λ4ΑΊ ( 2丨0.〇97:.>筇） -6 - 經濟部中央橾準局負工消资合作社印奴 五、發明説明4 ) 構’其中，該夾持機構包含了 ：自該貯存盒之外部周邊表 面突出之第一對置座；及自該外部門的邊緣突出之第二對 置座，當該外部配合至該貯存盒時，用以鄰接該第一對置 座；及一用以固持該第一與第二對置座之一抓持構件。 於本發明所述之"物件# ，至少包含了使用在電子與 電氣工業及半導體生產工業中之多種薄板，例如爲石英玻 璃，基底，半導體晶圓。 依據本發明之第一相態，當使用該運送容器運送該物 件時，容納例如爲精確晶圓或其他基底的物件之該貯存盒 的開啓面，係以該內部門所關閉與密封。在內部門鎖定之 後，該外部門置於該內部門上方，以允許該容器可運送。 該運送容器可使用例如爲飛機、船、卡車及類似物的多種 形態運送方式來運送。因爲供運送用的外部門，強化了密 封效果且防止內部門變形或脫落，故無論外部環境如何， 該容器可確保足夠高的封閉限制效果。 進一步的，依據本發明之第二與第三相態，在內部門 被鎖定之後，該外部門使用夾持機構，而覆蓋在已被該內 部門所封閉的該貯存盒之開口的面上。該外部門使用此種 夾持機構來接著，可防止該外部門輕易的脫落，且因而增 加了封閉限封之效果。 圖形之簡要說明 圖1係一分解透視圖，顯示依據本發明之一種運送容 器的實施例； 請先閱讀背而之注意事項再填寫本頁) •裝. •1Τ •線 本紙張尺度適用中國阀本標羋（CNS ) 210Χ2〔)7:Μί. A7 A7 經漪部中央標嗥局負工消费合作社印製 五、發明説明$ ) 圖2係一透視圖’顯示依據本發明之一種運送容器的 實施例； 圖3係一透視圖’顯示依.據本發明之一種運送容器的 二實施例； 圖4係一透視圖，顯示依據本發明之一種運送容器的 第三實施例： 圖5係一透視圖，顯示依據本發明之一種運送容器的 第四實施例； 圖6係一前視圖，顯示在示於圖1的運送容器中之— F I MS門內側之栓鎖機構；及 圖7係一剖視圖，顯示圖6中之該1 〇 〇 - 1 〇 1剖 面。 主要元件對照 1 貯存盒 2 凸緣 3 凸緣 4 對準肋 5 安裝槽 6 F I M S 門 7 矩形形狀墊片 8 栓鎖機構 9 板 '·. 10 盤 11 可移動桿狀元件 本紙张纽制巾關 ‘iH- ( CNS 7a4iVjTTliTT：^λ'^Γ)—— : 〇 - —; 裝 訂 線 (請先閱讀背而之注意事項#填寫本質) A； Η 7 經濟部中央標皐局貝工消f合作社印狀 五、 發明説明（6 ) 12 結合爪 13 外部門 14 夾持機構 14A 夾持機構 14B 夾持機構 15 安裝突起 16 結合件 17 矩形孔 18 結合突起 19 結合鈎 20 抗滑表面 21 第一對置座 21A 第一對置座 22 第二對置座 22A 第二對置座 23 相對應凹口面 24 凹口面 25 扣接元件 26 圓筒形結合槽 26A 圓筒形結合槽 27 抓持板 28 U型槽 29 內部抓持元件 30 外部抓持元件 --；--ί---„-i^------ΐτ------^ (請先閱讀背而之注意事項再填寫本頁) 經濟部中央樣準局貝工消費合作社印权 五、發明説明令) 31 轉軸 32 保持器 33 匙孔 較佳實施例之詳細說明 參照所附圖形，於下將詳細說明本發明之實施例。一 種運送容器的一實施例包含了：如示於圖1，一貯存盒1 F IMS門6 ; —外部門13 ;及一夾持機構14» 必須注意該F IMS門6具有一栓鎖機構8於其內（於後 將參照圖6詳述），且具有一示於圖7之剖面結構（於平 面100—101切割）》 貯存盒1係具有一開口於前方側邊之前方開啓形式的 箱形組態，由具有良好機械性質，抗污染性，可型成性之 樹脂所組成，例如爲，聚碳酸酯，壓克力樹脂，聚乙烯對 酞酸鹽，聚乙縮醛，PEEK，或這些樹脂之組合物，且 混合了塡料或添加劑，以提供.傳導性。於這些樹脂中，最 佳的爲具有優良透明性與機械強度之聚碳酸酯。 該貯存盒1包括了：一對凸緣2，整體的形成在該頂 部與底部側邊之開啓邊緣上，且延伸至貯存盒1的二側邊 :及形成在該盒之二側邊上的凸緣3，與凸緣2整體的形 成’且沿著該盒之頂部與底部底邊，自該盒的前方延伸至 後方。貯存盒1具有多數的對準肋4，以預定之節距（例 如’ 1 0mm之節距）整體的形成在該盒內之二側邊上， 因此’多數的（例如：25件）晶圓（未示於圖）可被支 本纸張尺度適用中國國家榡伞（CNS ) ( 2丨兑） -10- --;--1^---„-I¾------11------0 (誚先閱讀背而之注意事項再填巧本頁) 經濟部中央標準局負工消费合作社印聚 五、發明説明$ ) 撐在一水平且對準的垂直貯存。多數的作爲安裝槽5之具 有預定間隔之空穴，形成在接近於該貯存盒1之前方開口 之內側的頂部與底部上。 F I MS門6由輕重量矩形板所組成，該板之隅角已 去角，由彈性體，聚碳酸酯，聚丙烯或類似物所製成·。一 矩形形狀熱片7環繞該門之邊緣而粘合。該F I MS門6 亦具有一或更多的接著於其內部側邊上之保持器3 2 ( retainer ),該保持器32具有以規則間隔安排之齒狀突起， 以防止該晶圓在對準肋內移動。該F I MS門進一步的具 有一栓鎖機構於其內。該墊片7由石蠟彈性體，聚酯彈性 體，苯乙烯彈性體，矽橡膠，螢光塑膠橡膠或類似物所製 成。保持器3 2由聚酯彈性體，聚丙烯，聚乙烯，聚丁二 烯對酞酸鹽或類似物所製成。如示於圖1、 6及7中，此 一栓鎖機構8係被安排於F IMS門6之內側，且由一對 由多連桿構件所垂直可移動的支撐之板9所組成；被可轉 動的支撐於該對板9之間的一盤1 0，其具有一匙孔3 3 於中央處，使可以自外部操作該栓鎖機構；及一對可移動 桿狀元件1 1，每一該元件1 1經由一銷而連接該板9與 該盤1 0。每一板9具有自其頂部或底部部份突出之一結 合爪1 2，以使配入相對應之安裝槽5內。於此，依據栓 鎖機構8之數量，F IMS門6該有一或二匙孔3 3。 外部門1 3係由具有良好的機械性質，剛性、硬度及 可型成性之材料所形成，例如爲聚碳酸酯，聚丁二烯對酞 酸鹽聚乙縮醛，壓克力樹脂，PEEK或類似物，或一金 本紙張尺度適用中®國孓榡枣（C'N'S ) AW,枯（2丨0〆IK ;>对）_Ή_ - - ：--;----^--t------IT------.it (請先聞讀背而之注意事項再填寫本Μ} 經濟部中央標準局負工消费合作社印裝 五、發明説明9() 屬材料。如示於圖2 ’該外部門1 3具有形成在二側邊上 之中間部份處之向內下降部份’以相對應於貯存盒1之開 啓前方面。 夾持機構14包括了多數之元件’例如爲配合突起 1 5，結合件1 6 ’結合突起18及結合鈎19。安裝突 起1 5具有一三角形區段’且一些或數個突起1 5均於接 近開口之邊緣處，整體的形成在該貯存盒1之頂部及底部 上》多數的結合件1 6均與該外部門13整體的形成，每 一結合件16均自該外部門13之邊緣的頂部或底部面延 伸，且具有一矩形孔1 7。多數的結合突起1 8均於接近 開口之邊緣處，整體的形成貯存盒1之左及右側側邊上。 多數的結合鈎19均形成外部門13的邊緣之左及右側側 邊上，每一結合鈎1 9自中間部份中之下降部份延伸。進 —步的，此一鈎1 9係以可搖動（sway able )方式提供’ 且具有抗滑表面20。 當使用前述組態之運送容器，自半導體工廠運送至 I C工廠時，首先，一數量之切割好的晶圓，成層的以垂 直對準的方式貯存。而後，F IMS門6自動的配入該貯 存盒1之前方開口，且栓鎖機構8的盤1 0，由工作機械 人自動的以鎖定方向轉動。以該盤1 0之轉動動作，經由 元件1 1而向上或向下的滑動該一對板9，因此，該結合 爪1 2配入該相對應之安裝槽5，因而緊密的鎖定該 F IMS門6。於此狀態，經由該墊7之收縮反斥力，該 F IMS門6被維持在該貯存盒1之開口的頂部。 ：--1^---„-I装------1T------^ (請先閱讀背面之注意事項再填碎本頁) 本紙张尺度適用中國國家愫糸（CNS ) ( 2丨()/2<^7,:,>兑） -12- 經濟·邓中央榡準局員工消贽合作祍印製 五、發明説明ψ ) 爲了確保在持續使用下的該墊片之密封功能，該墊片 之材料在JIs Κ6301Α指定的測試方法下，具有 8 0或更少之硬度，或較佳的爲6 0或更少的硬度。 當F I MS門6以前述方式鎖定之後，經由手動的聯 結結合件1 6與安裝突起1 5 ,及聯結結合鈎1 9與結合 突起1 8，來裝配該外部門1 3，且一墊片或密封係固定 於該外部門1 3及F IMS門6之門，如此，該容器可被 運送。以此方式，經由合適之飛機或卡車，可將該運送容 器自一半導體工廠運送至一I C工廠或類似之工廠。因爲 供運送之容器的外部門1 3之硬度，該容器可被有效的密 封與保護，因此，可輕易的確保足夠高之封閉限制，以保 護該容器不被任何外部環境所損壞。其結果，不論運送時 間長或短，不會發生由於外部空氣進入容器內而導致之微 粒或有機污染該晶圓的情況，因此，可以維持該晶圓於高 品質。 當該運送容器抵達I C工廠時，以手將結合件1 6自 配合突起1 5脫離，且以手將結合釣19自結合突起1 8 脫離，因此，移除該外部門13。然後，該容器被設定在 —開啓器/裝載器上。而後，在栓鎖機構8內的盤1 0， 由工作機器人自動的以解除鎖定方向轉動，因此，該對板 9經由元件1 1而向上且向下的滑動，且結合爪1 2自安 裝槽5縮回，以允許移除該F IMS門6。而後， F IMS門6自動的自貯存盒1的前方脫離，且多數的晶 圓被接續的揀取。於此作業中，因爲該晶圓被垂直的安排 本紙張尺度適用中國园家標準（CNS ) Λ4岘格（2丨0X2W公姑）· 13 - ~； ； 抑衣 ------^ (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標隼局員工消费合作社印製 A~ ΙΟ 五'發明説明1(1 ) 且其姿勢維持於水平，因此，無須改變該運送容器之位置 ，因此，可以達成卓越的平順，有效率，及簡易的作業。 接下來，圖3顯示本發明之第二實施例。於此情況中 ，該夾持機構1 4A係由安裝突起1 5，結合件1 6第一 對置座2 1，第二對置座2 2及扣接元件2 5所組成。 一對第一對置座21凸出的整體形成在接近於開口邊 緣之該貯存盒1的二側邊上，每一對置座2 1之前方上嵌 接的形成一凹口面2 4。該第二對置座2 2亦凸出的整體 形成在外部門1 3之二側邊上，且每一對置座2 2嵌接的 形成一相對應之凹口面2 3。當該外部門1 3裝配且固定 時，這些外部門1 3之凹口面2 3與該第一對置座2 1之 凹口面2 4配合在一起。 扣接元件2 5由彈性體，聚碳酸酯’聚丙烯或其他類 似物所組成，以使其爲可撓的，且形成具有一U型區段。 當該外部門1 3裝配且固定時，使用此一元件2 5來抓取 第一及第二對置座2 1及2 2的嵌接之遠端側邊。其他之 組態係均相同於前述實施例。 於此安排方式，在F I M S門6被鎖定之後’手動的 聯結該結合件1 6與安裝突起1 5，該第一與第二對置座 2 1與2 2均被手動的置放在一起，然後接著該扣接元件 2 5，以確保固定外部門1 3。因此，可以相當簡單之組 態，裝配且緊密的固定該外部門1 3，以供運送之用。很 淸楚的，此一實施例亦提供了與前述實施例中所強調之相 同效果。 (請先閱讀背面之注意事邛再填寫本頁) -裝· 經濟部中央標準局員工消费合作社印製 五、發明説明埤 ) 接下來，圖4顯示本發明之第三實施例。於此情況中 ’該夾持機構14B係由安裝突起1 5，結合件1 6，第 —對置座21A，第二對置座22A，及抓持板27所組 成。 一對第一對置座21A凸出的整體形成在接近於開口 邊緣之該貯存盒1的二側邊上，每一對置座2 1 A之遠端 側邊形成具有圓筒形結合槽2 6 (具有實質上的爲半圓形 之區段）。該第二對置座22A亦凸出的整體形在外部門 1 3二側邊上，且每一對置座2 2 B的遠端側邊形成具有 圓筒形結合槽2 6A (具有實質上的爲半圓形之區段）。 每一抓持板2 7由彈性體，聚碳酸酯，聚丙烯或其他類似 所組成，以使其基本上成爲一可撓矩形板。此一板在約中 央處形成具有一U型槽2 8，以分離的界定出一內部抓持 元件2 9及一外部抓持元件3 0。其他之組態均相同於前 述之實施例。 以此安排方式，在F I MS門6被鎖定之後，手動的 聯結該結合件1 6與安裝突起1 5，該第一與第二對置座 2 1 A與2 2 A均被手動的置放在一起（且一墊片置於二 對置座之間），然後接著該抓持板27,經由壓下該抓持 板2 7至該貯存盒1的側邊面上，固持該結合槽2 6與 2 6 A在內部與外部抓持元件2 9與3 0之間，以確保固 定該外部門1 3。因此，可以相當簡單之組態，裝配且緊 密的固定該外部門1 3 ’以供運送之用。很淸楚的，此一 實施例亦提供了與前述實施例中所強調之相同效果。 I-,— I — ^——I — (請先閱讀背面之注意事項再填寫本頁) 、1Τ 線 本紙張尺度適用中國®家標準（CN'S ) Λ4現怙（2lOx 2W公兑）-15 - 經濟部中央標隼局負工消费合作社印策 五、發明説明1(3 ) 圖5顯示該第四實施例，其中，夾持機構1 4具有一 轉軸1 3。特別的，具有轉軸3 1之一夾，具係可移除的 配至該外部門，因此，該夾具可被轉動的固持。以此種組 態，當該外部門自該容器移除時，該夾具部份仍維持與該 外部門結合，因此，不再須要安全的保持該脫離之夾具部 份。進一步的，且爲該夾具部份亦可被移除，以供淸潔且 乾燥該外部門，此一組態在改良供淸楚與乾燥之操作能力 上，具有有利之優點。 前述之實施例均以使用圖1中的貯存盒1之範例來顯 示，但是，本發明並不侷限於此一組態。例如，該貯存盒 可以爲一橢圓區段，扁圓區段，多邊形區段或類似物。進 —步的，該貯存盒可以形成爲一半透明組態。其亦可以適 當的增加或減少對準肋4之數。此外，在貯存盒1之內側 ，多數的配合槽5可提供在頂部、底部、左側、及右側側 邊上。墊片7之材料、數量、形狀及/或結構’均可依需 要而適當的改變。栓鎖機構8不應侷限於前述之組態’其 亦可依需要來變化，或可以適當之已知組態來替代（例如 ，曰本專利號碼He i 4，No . 505 ’ 234所揭示 之組態）。 例如，一或更多的板9可被提供在F I MS 6之內側 及/或後方側邊上，或一或更多的結合爪1 2可適當的自 該板9的頂部與底部及/或左側與右側側邊突出。—凸輪 元件、螺紋元件，軌條與小齒輪等’均可使用於該滑板9 。一種使用多數的磁鐵之開啓與關閉機構’可使用以取代 本紙張尺度適用中國國家標举（CNS )以圯格（2丨Ox· ) - 16 - . ； 抑衣 ------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局負工消費合作社印製 3^7796 Λ ______^_ ΙΓ 五、發明説明t；4 ) 該閃鎖機構。只要可具有類似之功能，該外部門1 3可以 任何材料，任何生產方法，形成爲任何形狀或組態。 於前述實施例中，雖然所顯示之夾持機構1 4，1 4 A與1 4 B均爲手動操作，但該夾持機構並不侷限於此， 其可以爲一種可由機器自動的操作之機械夾持機構。進一 步的’夾持機構亦不應侷限於前述（1 4，1 4 A及1 4 B) ’其亦可依需要而改良、或可以適當之已知的習知技 術之組態來替代（例如日本專利號碼Sh〇63No . 1 6 6 ’ 9 4 8等所揭示之組態）。例如，在第二與第三 實施例中，可省略該配合突起1 5與該結合件1 6。可選 擇的’當然可使用例如爲鳩尾接合組態，榫與榫孔組態等 的夾持機構。 如前所述’本發明之第一組態在維持足夠高之封閉限 制係爲有效的’因而即使當該容器暴露於任何外部環境時 ，仍可維持該容器的內合物於高品質。 進一步的’本發明之第二與第三組態可防止該外部門 之輕易脫落，且進一步的維持高的封閉限制，因此，可維 指該容器之內合物於高品質。 . ---^裝------訂------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適爪中國國家標隼（CNS > Λ4见格（2IOX2V7公兑） -17-、 1T line A7 A7 Printed by the Central Standards Bureau of the Ministry of Economic Affairs 合作 ____H7. Fifth, the invention description @) F IMS door); most of the mating grooves formed on the inner peripheral surface of the storage box; and a latch When the FI MS door is connected, the mechanism can engage the engaging claws with the engaging groove, and when the FI MS door is removed, disengage the engaging claws from the engaging groove. This front-open form transport container contains most of the vertically arranged wafers, and this transport container is transported from the semiconductor factory to the IC factory, where the wafer is automatically set in a variety of processors. Next, a working robot is automatically disengaged from the latch mechanism. Therefore, the FI MS door is automatically removed from the storage box, and then, the unloader successively removes the storage box from the storage box. Most wafers. Conventional technical files of this form of configuration include Japanese patent sh 〇63 No. 82,788, Japanese patent sho 63, ^^ 〇.166,948, Japanese patent ^ 1618 No. 279,546, and The Japanese patent He i 9, Νο-ί 0 7, 0 2 5 ° meets the unified standards of the transport container, so it is composed, and is effective in improving the positioning accuracy, reducing a variety of costs and improving automation, but There are still some problems in shipping. In particular, a uniform standard shipping container, which is transported in the factory between processing sites, is fully effective. However, when using a plane or truck to transport a long distance from a semiconductor factory to an IC factory, there is only one FI MS. The door does not provide sufficient strength to ensure adequate hermetic sealing, as the container is exposed to a variety of external environments (including pressure changes, vibration during flight, etc.). As a result, the wafer was contaminated by particles due to the ingress of external air, or the size of the wafer was suitable for the Chinese market (CNS) (2ΙΟχ2 ^ Τ; MM ~-;-\ · ---… -I install ------ order ------ line (please read the back notice first and then fill out this I) printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 H7 V. Invention Description $) It is contaminated with organic substances, and therefore, the wafer may not be maintained at a sufficiently high quality. SUMMARY OF THE INVENTION It is to be noted that the present invention is designed from the viewpoint of the aforementioned problems, and therefore, an object of the present invention is to provide a transport container which can Maintain sufficient adequate containment limits, and maintain the contents of high quality even when the container is exposed to a variety of external environments. In order to achieve the foregoing objectives, the present invention is configured as follows: According to the first phase of the present invention State, a shipping container includes: a storage box for accommodating objects, the storage box is box-shaped, and has an opening on one side: an inner door for opening and closing the storage box : A sealing member provided in one of the inner gates, It is used to seal the gap between the storage box and the inner door; and to cover an outer door of the inner door and cooperate with the opened surface of the closed storage box. According to the second aspect of the present invention, the transport The container has the aforementioned first feature, further comprising a clamping mechanism for adhering and fixing the outer door, wherein the clamping mechanism has a protrusion provided on an outer peripheral surface of the storage box, and when the outer When the department is fitted to the storage box, it is used to combine a protruding member provided on the edge of the outer door. According to a third aspect of the present invention, the transport container has the aforementioned first feature, and further includes an application. Next, the clamper that fixes the external door ^ -tIT0 (Please read the note 4 on the back: fill in this page :? This page) This paper size is suitable for Chinese valve house (CNS) Λ4ΑΊ (2 丨 0. 〇97 :. > 筇) -6-Innu Slave of Consumers and Consumers Cooperatives, Central Government Standards Bureau, Ministry of Economic Affairs, 5. Description of Invention 4) Structure, wherein the holding mechanism includes: protruding from the outer peripheral surface of the storage box The first pair of seats; and A second opposing seat with a protruding edge of the outer door for abutting the first opposing seat when the outside fits into the storage box; and a grip for holding one of the first and second opposing seats The "object" described in the present invention includes at least a variety of thin plates used in the electronics and electrical industry and the semiconductor production industry, such as quartz glass, substrates, and semiconductor wafers. According to the first phase of the present invention State, when using the transport container to transport the object, the open side of the storage box containing objects such as precision wafers or other substrates is closed and sealed by the inner door. After the inner door is locked, the outer door It is placed above the inner door to allow the container to be transported. The transport container can be transported using various forms of transport such as airplanes, boats, trucks and the like. Since the outer door for transportation strengthens the sealing effect and prevents the inner door from deforming or falling off, the container can ensure a sufficiently high closing restriction effect regardless of the external environment. Further, according to the second and third phases of the present invention, after the inner door is locked, the outer door uses a clamping mechanism to cover the opening surface of the storage box that has been closed by the inner door. The external door uses such a clamping mechanism to prevent the external door from falling off easily, and thus the effect of the closed limit seal is increased. Brief Description of the Figures Figure 1 is an exploded perspective view showing an embodiment of a shipping container according to the present invention; please read the precautions on the back before filling out this page) • Packing. This standard (CNS) 210 × 2 〔) 7: Μί. A7 A7 Printed by the Central Standards Bureau of the Ministry of Standards and Labor of the Consumers ’Cooperatives. 5. Description of the invention $) Figure 2 is a perspective view 'showing a transport container according to the present invention Embodiment; Figure 3 is a perspective view showing two embodiments of a shipping container according to the present invention; Figure 4 is a perspective view showing a third embodiment of a shipping container according to the present invention: Figure 5 is a A perspective view showing a fourth embodiment of a shipping container according to the present invention; FIG. 6 is a front view showing the locking mechanism inside the FI MS door shown in the shipping container shown in FIG. 1; and FIG. 7 is a The sectional view shows the section 100-101 in FIG. Comparison of main components 1 Storage box 2 Flange 3 Flange 4 Alignment rib 5 Mounting slot 6 FIMS door 7 Rectangular gasket 8 Latch mechanism 9 plate '.. 10 tray 11 Removable rod-shaped element 'iH- (CNS 7a4iVjTTliTT: ^ λ' ^ Γ) ——: 〇- —; gutter (please read the precautions for the back first # fill in the essence) A; Η 7 Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (6) 12 Engagement claws 13 Outer door 14 Clamping mechanism 14A Clamping mechanism 14B Clamping mechanism 15 Mounting protrusion 16 Coupler 17 Rectangular hole 18 Combination protrusion 19 Combination hook 20 Anti-slip surface 21 First pair Placement seat 21A First opposite seat 22 Second opposite seat 22A Second opposite seat 23 Corresponding notch surface 24 Notch surface 25 Fastening element 26 Cylindrical coupling groove 26A Cylindrical coupling groove 27 Holding plate 28 U-shaped groove 29 Internal grasping element 30 External grasping element-; --- „-i ^ ------ ΐτ ------ ^ (Please read the precautions in the back first (Fill in this page again) (Printing rights of the Shell Specimen Consumer Cooperative of the Central Procurement Bureau of the Ministry of Economic Affairs 5. Instructions for Invention) 31 Rotary shaft 32 Guarantee Detailed description of the preferred embodiment of the 33 keyhole of the holder With reference to the attached drawings, the embodiment of the present invention will be described in detail below. An embodiment of a shipping container includes: as shown in FIG. 1, a storage box 1 F IMS Door 6;-outer door 13; and a clamping mechanism 14 »It must be noted that the F IMS door 6 has a latch mechanism 8 therein (which will be described in detail later with reference to FIG. 6), and has a Sectional structure (cut from plane 100-101)》 Storage box 1 has a box configuration with an opening in front of the front side, and is made of resin with good mechanical properties, anti-pollution, and formability. For example, polycarbonate, acrylic resin, polyethylene terephthalate, polyacetal, PEEK, or a combination of these resins, and mixed with additives or additives to provide conductivity. In these Among the resins, the best is polycarbonate with excellent transparency and mechanical strength. The storage box 1 includes: a pair of flanges 2 formed integrally on the open edges of the top and bottom sides, and extending to Two sides of storage box 1: and formed on both sides of the box The flange 3 on the side is integrally formed with the flange 2 and extends from the front to the rear of the box along the top and bottom edges of the box. The storage box 1 has a plurality of alignment ribs 4 to be predetermined The pitch (for example, a pitch of '10mm) is integrally formed on the two sides of the box, so' most (for example: 25 pieces) of wafers (not shown) can be applied to the paper size. Chinese National Umbrella (CNS) (2 丨) -10--;-1 ^ --- „-I¾ ------ 11 ------ 0 (诮 Read first and pay attention Please fill in the details on this page) Printed by the Central Bureau of Standards of the Ministry of Economic Affairs and Consumer Cooperatives of the People's Republic of China 5. Description of Inventions $) Supported in a horizontal and aligned vertical storage. Most of the cavities having a predetermined interval as the mounting grooves 5 are formed on the top and the bottom of the inside of the opening near the front side of the storage box 1. The F I MS door 6 is composed of a light-weight rectangular plate whose corners have been chamfered and made of elastomer, polycarbonate, polypropylene or the like. A rectangular shaped heat sheet 7 is bonded around the edge of the door. The FI MS gate 6 also has one or more retainers 3 2 (retainer) attached to its inner side. The retainer 32 has toothed protrusions arranged at regular intervals to prevent the wafer from being aligned. Intracostal movement. The F I MS door further has a latching mechanism therein. The gasket 7 is made of paraffin elastomer, polyester elastomer, styrene elastomer, silicone rubber, fluorescent plastic rubber or the like. The holder 32 is made of polyester elastomer, polypropylene, polyethylene, polybutadiene terephthalate or the like. As shown in Figs. 1, 6, and 7, this latching mechanism 8 is arranged inside the F IMS door 6 and is composed of a pair of plates 9 supported vertically by a multi-link member; A plate 10 rotatably supported between the pair of plates 9 has a keyhole 3 3 at the center so that the latching mechanism can be operated from outside; and a pair of movable rod-shaped elements 11 1 A component 11 connects the board 9 and the disk 10 via a pin. Each plate 9 has a coupling claw 12 protruding from the top or bottom portion thereof so as to fit into the corresponding mounting groove 5. Here, the F IMS door 6 should have one or two keyholes 3 3 depending on the number of latching mechanisms 8. The outer part 1 3 is made of materials with good mechanical properties, rigidity, hardness and formability, such as polycarbonate, polybutadiene terephthalate, polyacetal, acrylic resin, PEEK Or similar, or a gold paper size suitable for use in China ® Chinese jujube (C'N'S) AW, dry (2 丨 0〆IK; > right) _Ή_--:-; ---- ^- t------IT------.it (please read this and read the precautions before filling out this M) Printed by the Consumers ’Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention 9 () Materials. As shown in Figure 2 'The outer door 13 has an inwardly lowered portion formed at the middle portion on the two sides' to correspond to the front side of the storage box 1. The clamping mechanism 14 includes Most of the components are, for example, the fitting protrusions 15 and the coupling members 16 and the coupling protrusions 18 and the coupling hooks 19. The mounting protrusions 15 have a triangular section, and some or several protrusions 15 are near the edge of the opening. The whole is formed on the top and bottom of the storage box 1. Most of the joints 16 are integrally formed with the outer door 13, and each joint 16 is from the edge of the outer door 13. The top or bottom surface of the housing extends with a rectangular hole 17. Most of the coupling protrusions 18 are located near the edge of the opening, forming the left and right sides of the storage box 1 as a whole. Most of the coupling hooks 19 are formed On the left and right sides of the edge of the outer gate 13, each coupling hook 19 extends from the descending part of the middle section. Further, this hook 19 is provided in a sway able manner 'And it has anti-slip surface 20. When using the transport container configured as described above to transport from a semiconductor factory to an IC factory, first, a number of cut wafers are stored in layers in a vertically aligned manner. Then, F The IMS door 6 is automatically fitted into the front opening of the storage box 1, and the disk 10 of the latch mechanism 8 is automatically rotated in the locked direction by the working robot. With the rotation of the disk 10, the component 1 1 Slide the pair of plates 9 up or down, so that the coupling claws 12 fit into the corresponding mounting grooves 5, thereby tightly locking the F IMS door 6. In this state, the contraction of the pad 7 via the pad 7 Repulsive force, the F IMS door 6 is maintained in the opening of the storage box 1 Top.:-1 ^ --- „-I pack ------ 1T ------ ^ (Please read the precautions on the back before filling out this page) This paper size is applicable to Chinese countries 愫 糸(CNS) (2 丨 () / 2 < ^ 7,:, > exchange) -12- Economy · Deng Central Bureau of quasi-station staff eliminates cooperation and prints V. Description of invention ψ) In order to ensure continuous use The sealing function of the gasket. The material of the gasket has a hardness of 80 or less, or preferably a hardness of 60 or less under the test method specified by JIs κ6301A. After the FI MS door 6 is locked in the foregoing manner, the outer door 13 is assembled by manually coupling the coupling member 16 and the mounting protrusion 15 and the coupling hook 19 and the coupling protrusion 18, and a gasket or The seal is fixed to the door of the outer door 13 and the F IMS door 6, so that the container can be transported. In this way, the transport container can be transported from a semiconductor factory to an IC factory or the like via a suitable airplane or truck. Due to the hardness of the outer part of the container for transport, the container can be effectively sealed and protected. Therefore, it is easy to ensure a high enough sealing limit to protect the container from any external environment. As a result, no matter whether the transportation time is long or short, the wafer will not be contaminated with particles or organics due to the entry of outside air into the container, so the wafer can be maintained at a high quality. When the transport container arrived at the IC factory, the coupling member 16 was detached from the fitting protrusion 15 by hand, and the coupling fishing 19 was detached from the coupling protrusion 18 by hand. Therefore, the outer door 13 was removed. The container is then set on the —opener / loader. Then, the disk 10 in the latch mechanism 8 is automatically rotated in the unlocking direction by the work robot. Therefore, the pair of plates 9 slide upward and downward through the element 11 and the claw 12 is self-installed in the groove. 5 retracts to allow the F IMS gate 6 to be removed. Then, the F IMS door 6 is automatically released from the front of the storage box 1, and most of the wafers are successively picked. In this operation, because the wafer is arranged vertically, the paper size is applicable to the Chinese Gardener's Standard (CNS) Λ4 Dange (2 丨 0X2W aunt) · 13-~;; Yi Yi -------- ^ ( Please read the precautions on the back before filling this page) Printed by A ~ ΙΟ 5 'Invention Note 1 (1) of the Central Bureau of Standards of the Ministry of Economic Affairs and its posture maintained at a level, so there is no need to change the position of the shipping container Therefore, it can achieve excellent smoothness, efficiency, and simple operation. Next, Fig. 3 shows a second embodiment of the present invention. In this case, the clamping mechanism 14A is composed of a mounting protrusion 15, a coupling member 16 of a first opposing seat 21, a second opposing seat 22, and a fastening member 25. The projecting whole of a pair of first pair of seats 21 is formed on two sides of the storage box 1 close to the opening edge, and a notch surface 24 is fitted in front of each pair of seats 21. The second opposite seat 22 is also formed integrally on the two sides of the outer door 13, and each of the opposite seat 22 is embedded to form a corresponding notch surface 23. When the outer gates 13 are assembled and fixed, the notch surfaces 23 of the outer gates 13 and the notch surfaces 2 4 of the first opposing seat 21 are fitted together. The fastening element 25 is composed of an elastomer, polycarbonate 'polypropylene or the like so that it is flexible and formed with a U-shaped section. When the outer door 13 is assembled and fixed, this element 25 is used to grasp the distal ends of the first and second opposed seats 21 and 22, which are engaged. The other configurations are the same as the foregoing embodiments. In this arrangement, after the FIMS door 6 is locked, the coupling member 16 and the mounting protrusion 15 are manually connected, and the first and second opposing seats 2 1 and 22 are manually placed together. This fastening element 25 is then followed to ensure that the outer door 1 3 is fixed. Therefore, the outer door 13 can be assembled and tightly fixed for a relatively simple configuration for transportation. Quite clearly, this embodiment also provides the same effects as those emphasized in the previous embodiments. (Please read the cautions on the reverse side before filling out this page)-Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention 接下来 Next, FIG. 4 shows a third embodiment of the present invention. In this case, the holding mechanism 14B is composed of a mounting protrusion 15, a coupling member 16, a first opposing seat 21A, a second opposing seat 22A, and a holding plate 27. A pair of first pair of seats 21A protrudes integrally formed on the two sides of the storage box 1 near the edge of the opening, and a distal side of each pair of seats 2 1 A forms a cylindrical coupling groove 2 6 (with substantially semi-circular segments). The second opposite seat 22A also has a protruding integral shape on the side of the outer gate 13 and the distal side of each opposite seat 2 2 B is formed with a cylindrical coupling groove 2 6A (having a substantial Is a semi-circular section). Each of the grasping plates 27 is composed of an elastomer, polycarbonate, polypropylene, or the like so that it becomes substantially a flexible rectangular plate. A U-shaped groove 28 is formed at the center of the plate to define an inner gripping element 29 and an outer gripping element 30 separately. The other configurations are the same as the aforementioned embodiment. In this arrangement, after the FI MS door 6 is locked, the coupling member 16 and the mounting protrusion 15 are manually connected, and the first and second opposing seats 2 1 A and 2 2 A are manually placed. Together (and a gasket is placed between two opposite seats), and then the holding plate 27 is pressed to the side surface of the storage box 1 by pressing the holding plate 27 to hold the combining groove 2 6 and 2 6 A hold the elements between 9 and 30 internally and externally to secure the external door 1 3. Therefore, the outer door 1 3 ′ can be configured fairly easily, assembled and tightly fixed for transportation. Quite clearly, this embodiment also provides the same effects as those emphasized in the previous embodiments. I-, — I — ^ —— I — (Please read the notes on the back before filling out this page), 1T line paper size is applicable to China® Home Standard (CN'S) Λ4 Now (2lOx 2W) -15- Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Consumer Cooperatives, V. Invention Description 1 (3) FIG. 5 shows the fourth embodiment, in which the clamping mechanism 14 has a rotating shaft 13. In particular, it has a clamp of the rotating shaft 31, which can be removably fitted to the outer door, so the clamp can be held by rotation. With this configuration, when the external department is removed from the container, the gripper portion is still integrated with the external department, and therefore, it is no longer necessary to safely maintain the detached gripper portion. Furthermore, the fixture part can also be removed for cleaning and drying the external door. This configuration has an advantageous advantage in improving the operation ability for cleaning and drying. The foregoing embodiments are shown by using the storage box 1 in FIG. 1 as an example, but the present invention is not limited to this configuration. For example, the storage box may be an oval section, an oblate section, a polygonal section or the like. Further, the storage box can be formed into a semi-transparent configuration. It can also increase or decrease the number of alignment ribs 4 appropriately. In addition, inside the storage box 1, most of the fitting grooves 5 can be provided on the top, bottom, left, and right sides. The material, number, shape, and / or structure of the gasket 7 can be appropriately changed as needed. The latching mechanism 8 should not be limited to the aforementioned configuration, it can also be changed as needed, or it can be replaced with a suitable known configuration (for example, as disclosed in Japanese Patent No. He i 4, No. 505 '234 configuration). For example, one or more plates 9 may be provided on the inside and / or rear sides of the FI MS 6, or one or more engaging claws 12 may be appropriately from the top and bottom of the plate 9 and / or The left and right sides protrude. — Cam elements, threaded elements, rails and pinions, etc. can be used for this slide 9. A kind of opening and closing mechanism using most magnets can be used to replace the paper size. Applicable to China National Standards (CNS) to 圯 grid (2 丨 Ox ·)-16-.; Please read the precautions on the back before filling out this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 3 ^ 7796 Λ ______ ^ _ ΙΓ 5. Description of the invention t; 4) The flash lock mechanism. As long as it can have similar functions, the external gate 1 3 can be formed into any shape or configuration in any material and any production method. In the foregoing embodiment, although the clamping mechanisms 14, 1 4 A, and 1 4 B shown are all manually operated, the clamping mechanism is not limited to this, and it may be a machine that can be automatically operated by a machine Clamping mechanism. The further 'clamping mechanism should not be limited to the aforementioned (1, 14, 4 A and 1 4 B)', it can also be modified as needed, or it can be replaced by an appropriate known conventional technology configuration (for example Japanese Patent No. Sh〇63No. 16 6 '9 4 8 etc.). For example, in the second and third embodiments, the fitting protrusion 15 and the coupling member 16 may be omitted. Alternatively, of course, a clamping mechanism such as a dovetail joint configuration, a tenon and tenon hole configuration, etc. may be used. As described above, "the first configuration of the present invention is effective in maintaining a sufficiently high closed limit" so that even when the container is exposed to any external environment, the contents of the container can be maintained at a high quality. Further, the second and third configurations of the present invention can prevent the outer door from falling off easily, and further maintain a high sealing limit. Therefore, the internal compound of the container can be maintained at a high quality. --- ^ Installation ------ Order ------ line (Please read the notes on the back before filling this page) This paper is suitable for Chinese national standard (CNS > Λ4 see the grid ( 2IOX2V7) -17-