TW364217B - Monolithic multilayer piezoelectric actuator and production process - Google Patents
Monolithic multilayer piezoelectric actuator and production processInfo
- Publication number
- TW364217B TW364217B TW086104356A TW86104356A TW364217B TW 364217 B TW364217 B TW 364217B TW 086104356 A TW086104356 A TW 086104356A TW 86104356 A TW86104356 A TW 86104356A TW 364217 B TW364217 B TW 364217B
- Authority
- TW
- Taiwan
- Prior art keywords
- production process
- piezoelectric actuator
- multilayer piezoelectric
- monolithic multilayer
- optimum
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 2
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G23/00—Compounds of titanium
- C01G23/003—Titanates
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G25/00—Compounds of zirconium
- C01G25/006—Compounds containing, besides zirconium, two or more other elements, with the exception of oxygen or hydrogen
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- C—CHEMISTRY; METALLURGY
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/472—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on lead titanates
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
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- C—CHEMISTRY; METALLURGY
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
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- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
- C04B35/497—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates based on solid solutions with lead oxides
- C04B35/499—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates based on solid solutions with lead oxides containing also titanates
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/6261—Milling
- C04B35/6262—Milling of calcined, sintered clinker or ceramics
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
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- C—CHEMISTRY; METALLURGY
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
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- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3279—Nickel oxides, nickalates, or oxide-forming salts thereof
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3289—Noble metal oxides
- C04B2235/3291—Silver oxides
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- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6025—Tape casting, e.g. with a doctor blade
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- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/66—Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S310/00—Electrical generator or motor structure
- Y10S310/80—Piezoelectric polymers, e.g. PVDF
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Compositions Of Oxide Ceramics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Fuel-Injection Apparatus (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19615695A DE19615695C1 (de) | 1996-04-19 | 1996-04-19 | Verfahren zur Herstellung eines Piezoaktors monolithischer Vielschichtbauweise |
Publications (1)
Publication Number | Publication Date |
---|---|
TW364217B true TW364217B (en) | 1999-07-11 |
Family
ID=7791880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086104356A TW364217B (en) | 1996-04-19 | 1997-04-07 | Monolithic multilayer piezoelectric actuator and production process |
Country Status (14)
Country | Link |
---|---|
US (1) | US6230378B1 (zh) |
EP (1) | EP0894341B1 (zh) |
JP (1) | JP4112010B2 (zh) |
KR (1) | KR100450075B1 (zh) |
CN (1) | CN1174496C (zh) |
AT (1) | ATE186613T1 (zh) |
CA (1) | CA2252392C (zh) |
DE (2) | DE19615695C1 (zh) |
ES (1) | ES2140228T3 (zh) |
IN (1) | IN190409B (zh) |
PT (1) | PT894341E (zh) |
RU (1) | RU2169964C2 (zh) |
TW (1) | TW364217B (zh) |
WO (1) | WO1997040537A1 (zh) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19715488C1 (de) | 1997-04-14 | 1998-06-25 | Siemens Ag | Piezoaktor mit neuer Kontaktierung und Herstellverfahren |
DE19824916C1 (de) * | 1998-06-04 | 1999-09-30 | Daimler Chrysler Ag | Einspritzventil |
DE19905340C2 (de) * | 1999-02-09 | 2001-09-13 | Siemens Ag | Verfahren und Anordnung zur Voreinstellung und dynamischen Nachführung piezoelektrischer Aktoren |
DE19946836A1 (de) * | 1999-09-30 | 2000-11-09 | Bosch Gmbh Robert | Piezoaktor und ein Verfahren zu dessen Herstellung |
ATE481743T1 (de) | 1999-12-16 | 2010-10-15 | Epcos Ag | Zwischenprodukt für ein piezoelektrisches bauelement |
DE10021919C2 (de) * | 2000-02-04 | 2002-03-07 | Pi Ceramic Gmbh | Verfahren zur Herstellung monolithischer piezokeramischer Vielschichtaktoren sowie monolithischer piezokeramischer Vielschichtaktor |
DE10006352A1 (de) * | 2000-02-12 | 2001-08-30 | Bosch Gmbh Robert | Piezoelektrischer Keramikkörper mit silberhaltigen Innenelektroden |
US6518690B2 (en) * | 2000-04-19 | 2003-02-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film type elements and process for producing the same |
JP2002054526A (ja) * | 2000-05-31 | 2002-02-20 | Denso Corp | インジェクタ用圧電体素子 |
DE60142818D1 (de) * | 2000-05-31 | 2010-09-30 | Denso Corp | Piezoelektrisches Bauelement für eine Einspritzvorrichtung |
US6586889B1 (en) | 2000-06-21 | 2003-07-01 | Si Diamond Technology, Inc. | MEMS field emission device |
US7248444B1 (en) * | 2000-07-21 | 2007-07-24 | Lauer Mark A | Electromagnetic heads, flexures, gimbals and actuators formed on and from a wafer substrate |
DE10101188A1 (de) * | 2001-01-12 | 2002-08-01 | Bosch Gmbh Robert | Piezoelektrisches keramisches Material, Verfahren zu dessen Herstellung und elektrokeramisches Mehrlagenbauteil |
DE10205928A1 (de) * | 2001-02-21 | 2002-08-22 | Ceramtec Ag | Verfahren zur Herstellung piezokeramischer Vielschichtaktoren |
DE10231471A1 (de) * | 2001-09-29 | 2003-06-26 | Ceramtec Ag | Piezokeramische Werkstoffe auf der Basis von Blei-Zirkonat-Titanat (PZT) mit valenzkompensierten Ag-haltigen Komplexen |
SG107103A1 (en) * | 2002-05-24 | 2004-11-29 | Ntu Ventures Private Ltd | Process for producing nanocrystalline composites |
DE10223965A1 (de) * | 2002-05-29 | 2003-12-11 | Siemens Ag | Schwingungsdämpfungsvorrichtung für Antriebsaggregate von Schiffsantriebsanlagen von Über- und Unterwasserschiffen |
EP1578730A3 (de) * | 2002-05-29 | 2005-12-14 | Siemens Aktiengesellschaft | Piezokeramische zusammensetzung, piezokeramischer körper mit der zusammensetzung und verfahren zum herstellen der zusammensetzung und des körpers |
US7323073B2 (en) * | 2002-06-05 | 2008-01-29 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric porcelain composition, laminated piezoelectric device therefrom and process for producing the same |
JP4221576B2 (ja) * | 2003-03-10 | 2009-02-12 | セイコーエプソン株式会社 | セラミックス膜の製造方法および強誘電体キャパシタの製造方法、ならびにセラミックス膜、強誘電体キャパシタおよび半導体装置 |
DE10345500B4 (de) | 2003-09-30 | 2015-02-12 | Epcos Ag | Keramisches Vielschicht-Bauelement |
JP4593912B2 (ja) * | 2003-12-24 | 2010-12-08 | 京セラ株式会社 | 積層型圧電素子およびその製法、並びに噴射装置 |
DE102004002204A1 (de) | 2004-01-15 | 2005-08-11 | Epcos Ag | Keramikmaterial |
JP4554232B2 (ja) * | 2004-02-17 | 2010-09-29 | 株式会社デンソー | 圧電スタック及び圧電スタックの製造方法 |
JP4283730B2 (ja) * | 2004-05-24 | 2009-06-24 | Tdk株式会社 | 圧電磁器及び圧電素子の製造方法、圧電磁器の製造における焼成工程の焼成温度を低下させる方法、並びに圧電素子 |
DE102004047696B4 (de) * | 2004-09-30 | 2006-12-07 | Siemens Ag | Piezoelektrischer Biegewandler |
DE102005015112B4 (de) * | 2005-04-01 | 2007-05-24 | Siemens Ag | Monolithisches piezoelektrisches Bauteil mit mechanischer Entkopplungsschicht, Verfahren zum Herstellen des Bauteils und Verwendung des Bauteils |
DE102005061529B4 (de) * | 2005-12-22 | 2008-04-17 | Siemens Ag | Bleizirkonattitanat mit Nickel-Molybdän-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils |
EP1998383B1 (en) * | 2006-02-27 | 2016-12-28 | Kyocera Corporation | Method for manufacturing ceramic member, and ceramic member for gas sensor device, fuel cell device, filter device, multi-layer piezoelectric device, injection apparatus, and fuel injection system |
DE102006057691A1 (de) * | 2006-12-07 | 2008-06-12 | Robert Bosch Gmbh | Niedrig sinterndes, piezoelektrisches Material auf Blei-Zirkonat-Titanat-Mischkristall-Basis, Verfahren zu dessen Herstellung sowie ein dieses Material umfassendes piezoelektrisches Bauelement |
JP4711083B2 (ja) * | 2006-12-27 | 2011-06-29 | Tdk株式会社 | 積層型圧電素子 |
DE102007004813B4 (de) * | 2007-01-31 | 2016-01-14 | Continental Automotive Gmbh | Verfahren zur Herstellung eines piezokeramischen Vielschichtaktors |
DE102007010239A1 (de) * | 2007-03-02 | 2008-09-04 | Epcos Ag | Piezoelektrisches Material, Vielschicht-Aktuator und Verfahren zur Herstellung eines piezoelektrischen Bauelements |
DE102007029601A1 (de) | 2007-06-27 | 2009-01-02 | Siemens Ag | Bleizirkonattitanat mit Eisen-Niob-Wolfram-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils |
DE102007029600A1 (de) | 2007-06-27 | 2009-01-02 | Siemens Ag | Bleizirkonattitanat mit Scandium-Wolfram-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils |
DE102007029613A1 (de) | 2007-06-27 | 2009-01-02 | Siemens Ag | Bleizirkonattitanat mit Nickel-Wolfram-Dotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils unter Verwendung des Bleizirkonattitanats und Verwendung des piezokeramischen Bauteils |
DE102007045089A1 (de) | 2007-09-07 | 2009-03-12 | Epcos Ag | Keramikmaterial, Verfahren zur Herstellung desselben und elektrokeramisches Bauelement umfassend das Keramikmaterial |
DE102008000537A1 (de) | 2008-03-06 | 2009-09-10 | Robert Bosch Gmbh | Piezoaktor |
CN101255051B (zh) * | 2008-03-20 | 2010-12-15 | 山东理工大学 | 新型红外导电陶瓷及其制备方法 |
JP4930569B2 (ja) * | 2009-10-14 | 2012-05-16 | 株式会社村田製作所 | 磁気ヘッド駆動用圧電セラミックアクチュエータ |
DE102009058795A1 (de) * | 2009-12-18 | 2011-06-22 | Epcos Ag, 81669 | Piezoelektrisches Keramikmaterial, Verfahren zur Herstellung des piezoelektrischen Keramikmaterials, piezoelektrisches Vielschichtbauelement und Verfahren zur Herstellung des piezoelektrischen Vielschichtbauelements |
DE102010005403A1 (de) * | 2010-01-22 | 2011-07-28 | Epcos Ag, 81669 | Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements und piezoelektrisches Vielschichtbauelement |
US9870053B2 (en) * | 2010-02-08 | 2018-01-16 | Immersion Corporation | Systems and methods for haptic feedback using laterally driven piezoelectric actuators |
RU2461097C1 (ru) * | 2011-03-03 | 2012-09-10 | Сергей Иванович Чижиков | Способ изготовления акустооптических модуляторов |
US9490770B2 (en) * | 2011-03-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising temperature compensating layer and perimeter distributed bragg reflector |
US9490418B2 (en) * | 2011-03-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer |
US9590165B2 (en) * | 2011-03-29 | 2017-03-07 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising aluminum scandium nitride and temperature compensation feature |
WO2016031995A1 (ja) * | 2014-08-29 | 2016-03-03 | 京セラ株式会社 | 圧電磁器およびその製法、ならびに電子部品 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6362280A (ja) | 1986-09-03 | 1988-03-18 | Toyota Motor Corp | 積層型圧電素子およびその製法 |
JPH01260870A (ja) * | 1988-04-12 | 1989-10-18 | Toray Ind Inc | 変性チタン酸ジルコン酸鉛薄膜の形成方法 |
DE4141648C2 (de) * | 1990-12-17 | 1997-01-09 | Toshiba Kawasaki Kk | Keramischer Kondensator |
DE4201937C2 (de) | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelektrisches laminiertes Stellglied |
WO1992017420A1 (en) | 1991-04-03 | 1992-10-15 | American Superconductor Corporation | Electroceramics and process for making the same |
-
1996
- 1996-04-19 DE DE19615695A patent/DE19615695C1/de not_active Expired - Lifetime
-
1997
- 1997-03-10 DE DE59700699T patent/DE59700699D1/de not_active Expired - Lifetime
- 1997-03-10 ES ES97916337T patent/ES2140228T3/es not_active Expired - Lifetime
- 1997-03-10 JP JP53755497A patent/JP4112010B2/ja not_active Expired - Lifetime
- 1997-03-10 CA CA002252392A patent/CA2252392C/en not_active Expired - Lifetime
- 1997-03-10 WO PCT/DE1997/000463 patent/WO1997040537A1/de active IP Right Grant
- 1997-03-10 KR KR10-1998-0708358A patent/KR100450075B1/ko not_active IP Right Cessation
- 1997-03-10 EP EP97916337A patent/EP0894341B1/de not_active Expired - Lifetime
- 1997-03-10 PT PT97916337T patent/PT894341E/pt unknown
- 1997-03-10 CN CNB971943095A patent/CN1174496C/zh not_active Expired - Lifetime
- 1997-03-10 US US09/155,471 patent/US6230378B1/en not_active Expired - Lifetime
- 1997-03-10 AT AT97916337T patent/ATE186613T1/de active
- 1997-03-10 RU RU98120688/28A patent/RU2169964C2/ru active
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Also Published As
Publication number | Publication date |
---|---|
KR20000010523A (ko) | 2000-02-15 |
EP0894341A1 (de) | 1999-02-03 |
CN1217087A (zh) | 1999-05-19 |
US6230378B1 (en) | 2001-05-15 |
EP0894341B1 (de) | 1999-11-10 |
CN1174496C (zh) | 2004-11-03 |
JP4112010B2 (ja) | 2008-07-02 |
DE59700699D1 (de) | 1999-12-16 |
CA2252392A1 (en) | 1997-10-30 |
WO1997040537A1 (de) | 1997-10-30 |
ES2140228T3 (es) | 2000-02-16 |
KR100450075B1 (ko) | 2004-12-16 |
RU2169964C2 (ru) | 2001-06-27 |
IN190409B (zh) | 2003-07-26 |
ATE186613T1 (de) | 1999-11-15 |
CA2252392C (en) | 2004-10-26 |
JP2000508835A (ja) | 2000-07-11 |
DE19615695C1 (de) | 1997-07-03 |
PT894341E (pt) | 2000-04-28 |
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