TW360775B - Optical gap-sensor - Google Patents

Optical gap-sensor

Info

Publication number
TW360775B
TW360775B TW085107564A TW85107564A TW360775B TW 360775 B TW360775 B TW 360775B TW 085107564 A TW085107564 A TW 085107564A TW 85107564 A TW85107564 A TW 85107564A TW 360775 B TW360775 B TW 360775B
Authority
TW
Taiwan
Prior art keywords
sensor
optical gap
measure
optical
light
Prior art date
Application number
TW085107564A
Other languages
English (en)
Inventor
Guenter Doemens
Anton Schick
Paul Koellensperger
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1995124022 external-priority patent/DE19524022A1/de
Priority claimed from DE1996108468 external-priority patent/DE19608468C2/de
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of TW360775B publication Critical patent/TW360775B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
TW085107564A 1995-06-30 1996-06-24 Optical gap-sensor TW360775B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1995124022 DE19524022A1 (de) 1995-06-30 1995-06-30 Optischer Abstandssensor
DE1996108468 DE19608468C2 (de) 1996-03-01 1996-03-01 Optischer Abstandssensor

Publications (1)

Publication Number Publication Date
TW360775B true TW360775B (en) 1999-06-11

Family

ID=26016461

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085107564A TW360775B (en) 1995-06-30 1996-06-24 Optical gap-sensor

Country Status (7)

Country Link
US (1) US5991040A (zh)
EP (1) EP0835423B1 (zh)
JP (1) JP2962581B2 (zh)
KR (1) KR100431764B1 (zh)
DE (1) DE59609158D1 (zh)
TW (1) TW360775B (zh)
WO (1) WO1997002466A1 (zh)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6098031A (en) * 1998-03-05 2000-08-01 Gsi Lumonics, Inc. Versatile method and system for high speed, 3D imaging of microscopic targets
US6191761B1 (en) * 1998-11-09 2001-02-20 University Of Washington Method and apparatus for determining optical distance
JP2001356011A (ja) * 2000-06-13 2001-12-26 National Institute Of Advanced Industrial & Technology 直動体の真直度計測装置
DE10034250C2 (de) * 2000-07-14 2003-04-17 Siemens Ag Konfokales Abbildungssystem
US6731383B2 (en) * 2000-09-12 2004-05-04 August Technology Corp. Confocal 3D inspection system and process
US6870609B2 (en) * 2001-02-09 2005-03-22 August Technology Corp. Confocal 3D inspection system and process
US20020145734A1 (en) * 2001-02-09 2002-10-10 Cory Watkins Confocal 3D inspection system and process
US20020148984A1 (en) * 2001-02-09 2002-10-17 Cory Watkins Confocal 3D inspection system and process
US6773935B2 (en) * 2001-07-16 2004-08-10 August Technology Corp. Confocal 3D inspection system and process
US6970287B1 (en) 2001-07-16 2005-11-29 August Technology Corp. Confocal 3D inspection system and process
US6882415B1 (en) 2001-07-16 2005-04-19 August Technology Corp. Confocal 3D inspection system and process
IL146174A (en) * 2001-10-25 2007-08-19 Camtek Ltd Confocal system for testing woofers
US20030178122A1 (en) * 2002-02-14 2003-09-25 Ianniello Peter J. High friction scrims, geonets, laminates and methods for using and making them
JP3809803B2 (ja) 2002-02-15 2006-08-16 オムロン株式会社 変位センサ
DE10242373B4 (de) 2002-09-12 2009-07-16 Siemens Ag Konfokaler Abstandssensor
DE10242374A1 (de) * 2002-09-12 2004-04-01 Siemens Ag Konfokaler Abstandssensor
US8665325B2 (en) * 2003-10-08 2014-03-04 Qwest Communications International Inc. Systems and methods for location based image telegraphy
JP4365292B2 (ja) * 2004-09-02 2009-11-18 株式会社カイジョー ワイヤボンディングにおけるボール圧着厚の測定方法
JP4234661B2 (ja) * 2004-09-30 2009-03-04 株式会社カイジョー ワイヤボンディングにおけるボールの検査方法
EP1817557A4 (en) * 2004-11-03 2010-06-16 Omniprobe Inc DEVICE AND METHOD FOR DETECTING CONTACT BETWEEN A PROBE TIP AND A SURFACE
DE102005015743B4 (de) * 2005-04-06 2018-08-23 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung und Positionsmesseinrichtung
DE102005025385B4 (de) * 2005-04-20 2007-03-22 Von Ardenne Anlagentechnik Gmbh Vakuumbeschichtungsanlage zur Beschichtung flächiger Substrate mit einer Messeinrichtung zur Transmissions- oder/und Reflexionsmessung
US7486386B1 (en) 2007-09-21 2009-02-03 Silison Laboratories Inc. Optical reflectance proximity sensor
FR2923006B1 (fr) * 2007-10-29 2010-05-14 Signoptic Technologies Dispositif optique pour l'observation de details structurels millimetriques ou submillimetriques d'un objet a comportement speculaire
US7907061B2 (en) * 2007-11-14 2011-03-15 Intersil Americas Inc. Proximity sensors and methods for sensing proximity
US8222591B2 (en) * 2009-07-07 2012-07-17 Intersil Americas Inc. Proximity sensors with improved ambient light rejection
US8575537B2 (en) 2010-12-09 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Compact multi-direction proximity sensor device and method
CN102608612B (zh) 2010-12-20 2015-07-15 美泰有限公司 用于游戏设备的近程传感器装置
DE102012016346B4 (de) 2012-08-16 2023-01-05 Carl Zeiss Microscopy Gmbh Laser-Scanning-Mikroskop
JP6811950B2 (ja) * 2016-12-09 2021-01-13 オリンパス株式会社 走査型共焦点顕微鏡装置、走査制御方法、及び、プログラム
CA3047628C (en) * 2017-01-30 2023-05-16 Opco Medical Aps Device for determination of the hemoglobin amount of a patient
CN108844627B (zh) * 2018-06-15 2020-04-10 Oppo广东移动通信有限公司 用于人眼安全的激光测试方法及电子设备
CN109490865B (zh) * 2018-12-11 2021-03-05 锐驰智光(北京)科技有限公司 一种面阵激光雷达
US11757533B2 (en) * 2021-08-13 2023-09-12 Lumentum Operations Llc Shutdown circuitry for a laser emitter

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3606541A (en) * 1968-09-28 1971-09-20 Mitsubishi Electric Corp Contact-less probe system
JPS57148240A (en) * 1981-03-10 1982-09-13 Nec Corp Detecting method for defect of pattern
JPS5988649A (ja) * 1982-11-13 1984-05-22 Idec Izumi Corp パタ−ン検査装置
DE3322712C2 (de) * 1983-06-24 1986-10-30 Daimler-Benz Ag, 7000 Stuttgart Optisches Abstandsmeßverfahren
US4719341A (en) * 1986-10-01 1988-01-12 Mechanical Technology Incorporated Fiber optic displacement sensor with oscillating optical path length
US4965442A (en) * 1989-11-07 1990-10-23 Massachusetts Institute Of Technology System for ascertaining direction of blur in a range-from-defocus camera
NL9100205A (nl) * 1991-02-06 1992-09-01 Philips Nv Inrichting voor het optisch meten van de hoogte van een oppervlak.
GB9102903D0 (en) * 1991-02-12 1991-03-27 Oxford Sensor Tech An optical sensor
JP2511391B2 (ja) * 1991-12-04 1996-06-26 シーメンス アクチエンゲゼルシヤフト 光学式間隔センサ
US5248876A (en) * 1992-04-21 1993-09-28 International Business Machines Corporation Tandem linear scanning confocal imaging system with focal volumes at different heights
JPH0694437A (ja) * 1992-09-14 1994-04-05 Fujitsu Ltd 印刷配線形状検査装置
US5594242A (en) * 1993-09-09 1997-01-14 Kabushiki Kaisha Topcon Position detecting apparatus which uses a continuously moving light spot
JPH07311025A (ja) * 1994-05-17 1995-11-28 Komatsu Ltd ３次元形状検査装置

Also Published As

Publication number Publication date
DE59609158D1 (de) 2002-06-06
EP0835423B1 (de) 2002-05-02
KR19990028413A (ko) 1999-04-15
JP2962581B2 (ja) 1999-10-12
WO1997002466A1 (de) 1997-01-23
JPH10512054A (ja) 1998-11-17
EP0835423A1 (de) 1998-04-15
US5991040A (en) 1999-11-23
KR100431764B1 (ko) 2004-09-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees