DE69629122D1 - Vorrichtung zur auflösungserhöhung eines optischgekoppelten bildsensors für einen elektronenmikroskop - Google Patents

Vorrichtung zur auflösungserhöhung eines optischgekoppelten bildsensors für einen elektronenmikroskop

Info

Publication number
DE69629122D1
DE69629122D1 DE69629122T DE69629122T DE69629122D1 DE 69629122 D1 DE69629122 D1 DE 69629122D1 DE 69629122 T DE69629122 T DE 69629122T DE 69629122 T DE69629122 T DE 69629122T DE 69629122 D1 DE69629122 D1 DE 69629122D1
Authority
DE
Germany
Prior art keywords
resolution
increasing
image sensor
optically coupled
electronic microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69629122T
Other languages
English (en)
Other versions
DE69629122T2 (de
Inventor
E Mooney
L Krivanek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gatan Inc
Original Assignee
Gatan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gatan Inc filed Critical Gatan Inc
Publication of DE69629122D1 publication Critical patent/DE69629122D1/de
Application granted granted Critical
Publication of DE69629122T2 publication Critical patent/DE69629122T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86—Vessels; Containers; Vacuum locks
    • H01J29/89—Optical or photographic arrangements structurally combined or co-operating with the vessel
    • H01J29/892—Optical or photographic arrangements structurally combined or co-operating with the vessel using fibre optics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
DE69629122T 1995-10-03 1996-09-24 Vorrichtung zur auflösungserhöhung eines optischgekoppelten bildsensors für einen elektronenmikroskop Expired - Lifetime DE69629122T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US539017 1995-10-03
US08/539,017 US5635720A (en) 1995-10-03 1995-10-03 Resolution-enhancement device for an optically-coupled image sensor for an electron microscope
PCT/US1996/015357 WO1997013270A1 (en) 1995-10-03 1996-09-24 Resolution-enhancement device for an optically-coupled image sensor for an electron microscope

Publications (2)

Publication Number Publication Date
DE69629122D1 true DE69629122D1 (de) 2003-08-21
DE69629122T2 DE69629122T2 (de) 2004-02-05

Family

ID=24149406

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629122T Expired - Lifetime DE69629122T2 (de) 1995-10-03 1996-09-24 Vorrichtung zur auflösungserhöhung eines optischgekoppelten bildsensors für einen elektronenmikroskop

Country Status (5)

Country Link
US (1) US5635720A (de)
EP (1) EP0853813B1 (de)
JP (1) JP3967771B2 (de)
DE (1) DE69629122T2 (de)
WO (1) WO1997013270A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0988646A1 (de) * 1997-06-13 2000-03-29 Gatan, Inc. Verfahren und gerät zur auflösungerhöhung und rauschenreduzierung in einem abbildungs-detektor für elektronenmikroskop
US6031234A (en) * 1997-12-08 2000-02-29 General Electric Company High resolution radiation imager
US6518580B1 (en) * 1998-11-16 2003-02-11 The United States Of America As Represented By The United States Department Of Energy Proton radiography based on near-threshold Cerenkov radiation
US6455860B1 (en) 1999-09-30 2002-09-24 Gatan, Inc. Resolution enhancement device for an optically-coupled image sensor using high extra-mural absorbent fiber
US6803583B2 (en) * 2001-03-21 2004-10-12 M.E. Taylor Engineering Inc. Scintillator for electron microscope and method of making
JP2004127760A (ja) * 2002-10-03 2004-04-22 Jeol Ltd 透過電子顕微鏡像の撮像装置
CN101405596B (zh) * 2006-01-24 2012-07-04 北卡罗来纳大学查珀尔希尔分校 使用具有多色分布的x射线束检测对象图像的系统和方法
EP2006881A3 (de) * 2007-06-18 2010-01-06 FEI Company Kammerinterner Elektronendetektor
US7745786B2 (en) * 2008-03-19 2010-06-29 Fama Leo A Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
MX2011005779A (es) 2008-12-01 2012-04-30 Univ North Carolina Sistemas y metodos para detectar una imagen de un objeto al utilizar creacion de imagenes que haces multiples a partir de un haz de rayos x que tiene una distribucion policromatica.
JP5529573B2 (ja) * 2009-02-10 2014-06-25 国立大学法人 東京大学 透過型電子顕微鏡
US8204174B2 (en) * 2009-06-04 2012-06-19 Nextray, Inc. Systems and methods for detecting an image of an object by use of X-ray beams generated by multiple small area sources and by use of facing sides of adjacent monochromator crystals
CA2763367C (en) * 2009-06-04 2016-09-13 Nextray, Inc. Strain matching of crystals and horizontally-spaced monochromator and analyzer crystal arrays in diffraction enhanced imaging systems and related methods
JP5065516B2 (ja) 2010-08-04 2012-11-07 エフ イー アイ カンパニ 薄い電子検出器における後方散乱の減少
US8993971B2 (en) * 2011-06-15 2015-03-31 The Board Of Trustees Of The Leland Stanford Junior University High resolution positron emission tomography
WO2013192608A1 (en) 2012-06-22 2013-12-27 Edax, Inc. Method and apparatus for electron pattern imaging
JP5967538B2 (ja) * 2012-09-25 2016-08-10 株式会社日立ハイテクノロジーズ 電子顕微鏡および電子線検出器
WO2015015957A1 (ja) * 2013-07-31 2015-02-05 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
WO2016172291A1 (en) * 2015-04-23 2016-10-27 Fermi Research Alliance, Llc Monocrystal-based microchannel plate image intensifier
JP2019102456A (ja) * 2017-11-30 2019-06-24 ガタン インコーポレイテッドＧａｔａｎ Ｉｎｃ． 電子顕微鏡法のための高密度高速発光体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2740050A (en) * 1952-03-15 1956-03-27 Gen Electric Phosphor screen and method of making the same
GB2183898A (en) * 1985-11-05 1987-06-10 Texas Instruments Ltd Checking voltages in integrated circuit by means of an electron detector
US4739399A (en) * 1987-08-06 1988-04-19 Gatan Inc. TV system for transmission electron microscopes
FR2628562A1 (fr) * 1988-03-11 1989-09-15 Thomson Csf Dispositif d'imagerie a structure matricielle
JPH0775407B2 (ja) * 1988-05-17 1995-08-09 日本放送協会 撮像デバイス
FR2647955B1 (fr) * 1989-05-30 1991-08-16 Thomson Tubes Electroniques Ecran d'entree de tube intensificateur d'image radiologique
US5065029A (en) * 1990-08-03 1991-11-12 Gatan, Inc. Cooled CCD camera for an electron microscope
FR2666447B1 (fr) * 1990-08-31 1996-08-14 Thomson Tubes Electroniques Tube intensificateur d'image avec compensation de courbe de brillance.

Also Published As

Publication number Publication date
EP0853813B1 (de) 2003-07-16
US5635720A (en) 1997-06-03
JP3967771B2 (ja) 2007-08-29
DE69629122T2 (de) 2004-02-05
EP0853813A1 (de) 1998-07-22
JP2000511329A (ja) 2000-08-29
WO1997013270A1 (en) 1997-04-10

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