JP2000511329A - 電子顕微鏡の光学結合画像センサ用の解像度拡張装置 - Google Patents
電子顕微鏡の光学結合画像センサ用の解像度拡張装置Info
- Publication number
- JP2000511329A JP2000511329A JP09514311A JP51431197A JP2000511329A JP 2000511329 A JP2000511329 A JP 2000511329A JP 09514311 A JP09514311 A JP 09514311A JP 51431197 A JP51431197 A JP 51431197A JP 2000511329 A JP2000511329 A JP 2000511329A
- Authority
- JP
- Japan
- Prior art keywords
- image
- scintillator
- light
- electron microscope
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/86—Vessels; Containers; Vacuum locks
- H01J29/89—Optical or photographic arrangements structurally combined or co-operating with the vessel
- H01J29/892—Optical or photographic arrangements structurally combined or co-operating with the vessel using fibre optics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1. 電子画像を形成する電子ビーム(11)と、該電子ビームの通路に配置さ れて前記電子画像を光画像に変換するシンチレータ(22)と、該光画像を受信 して記録するように配置された撮像センサ(26)とを備えた電子画像の解像度 を改良する装置において、該装置が更に、前記シンチレータ(22)に関係した 、前記光学画像を前記撮像センサ(26)へ転送するための転送光学素子(24 )を含み、且つ、吸光層(36)が前記シンチレータ(22)上に設けられてい ることを特徴とする電子画像の解像度を改良する装置。 2. 前記撮像センサが電荷結合デバイスであることを特徴とする請求項1に記 載の装置。 3. 前記撮像センサが陰極線管であることを特徴とする請求項1に記載の装置 。 4. 前記吸光層(36)上に更に導電コーティング(38)を含んでいること を特徴とする請求項1に記載の装置。 5. 前記シンチレータ(22)と、前記転送光学素子(24)との間に更に透 過導電層(40)を含んでいることを特徴とする請求項1に記載の装置。 6. 前記転送光学素子が光学繊維プレートを備えていることを特徴とする請求 項1に記載の装置。 7. 前記転送光学素子が光学レンズを備えていることを特徴とする請求項1に 記載の装置。 8. 前記シンチレータがイットリウム−アルミニウム−ガーネット結晶を備え ていることを特徴とする請求項1に記載の装置。 9. 前記シンチレータが粒状燐光物質からなるコーティングを備えていること を特徴とする請求項1に記載の装置。 10. 電子顕微鏡であって、光画像及び/又は回折パターンを形成する電子ビ ーム(11)が横断する投射室(10)を有し、前記電子顕微鏡により生成され た画像の解像度を改良し且つ前記電子ビームを傍受するように前記投射室内に配 置された、前記電子ビーム(11)の通路に配置されて前記電子画像を光画像に 変換するシンチレータ(22)と、該光画像を受信して記録するように配置され た撮像センサ(26)とを備えた装置を含んだ電子顕微鏡において、前記装置が 更に、前記シンチレータ(22)に関係した、前記光学画像を前記撮像センサ( 26)へ転送するための転送光学素子(24)を含み、且つ、吸光層(36)が 前記シンチレータ(22)上に設けられていることを特徴とする電子顕微鏡。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/539,017 | 1995-10-03 | ||
US08/539,017 US5635720A (en) | 1995-10-03 | 1995-10-03 | Resolution-enhancement device for an optically-coupled image sensor for an electron microscope |
PCT/US1996/015357 WO1997013270A1 (en) | 1995-10-03 | 1996-09-24 | Resolution-enhancement device for an optically-coupled image sensor for an electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000511329A true JP2000511329A (ja) | 2000-08-29 |
JP3967771B2 JP3967771B2 (ja) | 2007-08-29 |
Family
ID=24149406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51431197A Expired - Lifetime JP3967771B2 (ja) | 1995-10-03 | 1996-09-24 | 電子顕微鏡の光学結合画像センサ用の解像度拡張装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5635720A (ja) |
EP (1) | EP0853813B1 (ja) |
JP (1) | JP3967771B2 (ja) |
DE (1) | DE69629122T2 (ja) |
WO (1) | WO1997013270A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010212233A (ja) * | 2009-02-10 | 2010-09-24 | Univ Of Tokyo | 透過型電子顕微鏡 |
JP2019102456A (ja) * | 2017-11-30 | 2019-06-24 | ガタン インコーポレイテッドGatan Inc. | 電子顕微鏡法のための高密度高速発光体 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0988646A1 (en) * | 1997-06-13 | 2000-03-29 | Gatan, Inc. | Methods and apparatus for improving resolution and reducing noise in an image detector for an electron microscope |
US6031234A (en) * | 1997-12-08 | 2000-02-29 | General Electric Company | High resolution radiation imager |
US6518580B1 (en) * | 1998-11-16 | 2003-02-11 | The United States Of America As Represented By The United States Department Of Energy | Proton radiography based on near-threshold Cerenkov radiation |
WO2001024218A1 (en) * | 1999-09-30 | 2001-04-05 | Gatan, Inc. | Electron image detector coupled by optical fibers with absorbing outer cladding to reduce blurring |
US6803583B2 (en) * | 2001-03-21 | 2004-10-12 | M.E. Taylor Engineering Inc. | Scintillator for electron microscope and method of making |
JP2004127760A (ja) * | 2002-10-03 | 2004-04-22 | Jeol Ltd | 透過電子顕微鏡像の撮像装置 |
JP5815197B2 (ja) * | 2006-01-24 | 2015-11-17 | ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒルThe University Of North Carolina At Chapel Hill | 多色性分布を持つx線ビームを用いて対象物の画像を検知するシステムと方法 |
EP2006881A3 (en) * | 2007-06-18 | 2010-01-06 | FEI Company | In-chamber electron detector |
US7745786B2 (en) * | 2008-03-19 | 2010-06-29 | Fama Leo A | Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope |
JP5611223B2 (ja) | 2008-12-01 | 2014-10-22 | ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒルThe University Of North Carolina At Chapel Hill | 多色分布を持つx線ビームからのマルチビームイメージングを用いる対象の画像の検出システム及び方法 |
US8204174B2 (en) * | 2009-06-04 | 2012-06-19 | Nextray, Inc. | Systems and methods for detecting an image of an object by use of X-ray beams generated by multiple small area sources and by use of facing sides of adjacent monochromator crystals |
WO2010141735A2 (en) * | 2009-06-04 | 2010-12-09 | Nextray, Inc. | Strain matching of crystals and horizontally-spaced monochromator and analyzer crystal arrays in diffraction enhanced imaging systems and related methods |
JP5065516B2 (ja) | 2010-08-04 | 2012-11-07 | エフ イー アイ カンパニ | 薄い電子検出器における後方散乱の減少 |
US8993971B2 (en) * | 2011-06-15 | 2015-03-31 | The Board Of Trustees Of The Leland Stanford Junior University | High resolution positron emission tomography |
WO2013192608A1 (en) | 2012-06-22 | 2013-12-27 | Edax, Inc. | Method and apparatus for electron pattern imaging |
JP5967538B2 (ja) * | 2012-09-25 | 2016-08-10 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡および電子線検出器 |
WO2015015957A1 (ja) * | 2013-07-31 | 2015-02-05 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
US10809393B2 (en) | 2015-04-23 | 2020-10-20 | Fermi Research Alliance, Llc | Monocrystal-based microchannel plate image intensifier |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2740050A (en) * | 1952-03-15 | 1956-03-27 | Gen Electric | Phosphor screen and method of making the same |
GB2183898A (en) * | 1985-11-05 | 1987-06-10 | Texas Instruments Ltd | Checking voltages in integrated circuit by means of an electron detector |
US4739399A (en) * | 1987-08-06 | 1988-04-19 | Gatan Inc. | TV system for transmission electron microscopes |
FR2628562A1 (fr) * | 1988-03-11 | 1989-09-15 | Thomson Csf | Dispositif d'imagerie a structure matricielle |
JPH0775407B2 (ja) * | 1988-05-17 | 1995-08-09 | 日本放送協会 | 撮像デバイス |
FR2647955B1 (fr) * | 1989-05-30 | 1991-08-16 | Thomson Tubes Electroniques | Ecran d'entree de tube intensificateur d'image radiologique |
US5065029A (en) * | 1990-08-03 | 1991-11-12 | Gatan, Inc. | Cooled CCD camera for an electron microscope |
FR2666447B1 (fr) * | 1990-08-31 | 1996-08-14 | Thomson Tubes Electroniques | Tube intensificateur d'image avec compensation de courbe de brillance. |
-
1995
- 1995-10-03 US US08/539,017 patent/US5635720A/en not_active Expired - Lifetime
-
1996
- 1996-09-24 WO PCT/US1996/015357 patent/WO1997013270A1/en active IP Right Grant
- 1996-09-24 EP EP96933893A patent/EP0853813B1/en not_active Expired - Lifetime
- 1996-09-24 DE DE69629122T patent/DE69629122T2/de not_active Expired - Lifetime
- 1996-09-24 JP JP51431197A patent/JP3967771B2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010212233A (ja) * | 2009-02-10 | 2010-09-24 | Univ Of Tokyo | 透過型電子顕微鏡 |
JP2019102456A (ja) * | 2017-11-30 | 2019-06-24 | ガタン インコーポレイテッドGatan Inc. | 電子顕微鏡法のための高密度高速発光体 |
Also Published As
Publication number | Publication date |
---|---|
EP0853813B1 (en) | 2003-07-16 |
DE69629122T2 (de) | 2004-02-05 |
US5635720A (en) | 1997-06-03 |
EP0853813A1 (en) | 1998-07-22 |
WO1997013270A1 (en) | 1997-04-10 |
JP3967771B2 (ja) | 2007-08-29 |
DE69629122D1 (de) | 2003-08-21 |
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