EP0347739A3 - Scanning tunneling microscope and surface topographic observation method - Google Patents

Scanning tunneling microscope and surface topographic observation method Download PDF

Info

Publication number
EP0347739A3
EP0347739A3 EP19890110834 EP89110834A EP0347739A3 EP 0347739 A3 EP0347739 A3 EP 0347739A3 EP 19890110834 EP19890110834 EP 19890110834 EP 89110834 A EP89110834 A EP 89110834A EP 0347739 A3 EP0347739 A3 EP 0347739A3
Authority
EP
European Patent Office
Prior art keywords
observation method
probe
tunneling microscope
scanning tunneling
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19890110834
Other languages
German (de)
French (fr)
Other versions
EP0347739A2 (en
EP0347739B1 (en
Inventor
Sumio Hosaka
Shigeyuki Hosoki
Keiji Takata
Tsuyoshi Hitachi-Dai4Kyoshin-Ryo 4-14-6 Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of EP0347739A2 publication Critical patent/EP0347739A2/en
Publication of EP0347739A3 publication Critical patent/EP0347739A3/en
Application granted granted Critical
Publication of EP0347739B1 publication Critical patent/EP0347739B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip

Abstract

In a surface topographic observation method using a scanning tunneling microscope, a probe (2) is moved away from the surface (5a) of a sample (5) and is moved on a plane to move it successively to points of measurement on the sample surface in order to obtain texture information of the sample. That is, the probe (2) is moved on a plane completely prevent­ ing the probe tip from colliding with the sample surface (5a) and enabling the probe to effect scanning at high speeds.
EP89110834A 1988-06-24 1989-06-14 Scanning tunneling microscope and surface topographic observation method Expired - Lifetime EP0347739B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63154696A JP2936545B2 (en) 1988-06-24 1988-06-24 Scanning probe microscope
JP154696/88 1988-06-24

Publications (3)

Publication Number Publication Date
EP0347739A2 EP0347739A2 (en) 1989-12-27
EP0347739A3 true EP0347739A3 (en) 1991-09-25
EP0347739B1 EP0347739B1 (en) 1996-12-11

Family

ID=15589947

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89110834A Expired - Lifetime EP0347739B1 (en) 1988-06-24 1989-06-14 Scanning tunneling microscope and surface topographic observation method

Country Status (5)

Country Link
US (1) US5162653A (en)
EP (1) EP0347739B1 (en)
JP (1) JP2936545B2 (en)
CA (1) CA1315898C (en)
DE (1) DE68927537T2 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990004250A1 (en) * 1988-10-04 1990-04-19 Kyowa Electric & Chemical Co., Ltd. Driving mechanism of tape recorder
US4952857A (en) * 1989-03-24 1990-08-28 Quanscan, Inc. Scanning micromechanical probe control system
US5266801A (en) * 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
US5224376A (en) * 1989-12-08 1993-07-06 Digital Instruments, Inc. Atomic force microscope
JPH041949A (en) * 1990-04-18 1992-01-07 Canon Inc Information input and/or output device
CA2059990C (en) * 1991-01-29 1997-11-25 Shun-Ichi Shido Moving apparatus, a moving method and an information detection and/or input apparatus using the same
GB9107890D0 (en) * 1991-04-13 1991-05-29 T & N Technology Ltd Mapping a surface of a workpiece
US5217304A (en) * 1991-08-02 1993-06-08 The United States Of America As Represented By The United States Department Of Energy Electrical network method for the thermal or structural characterization of a conducting material sample or structure
JPH0642953A (en) * 1992-07-24 1994-02-18 Matsushita Electric Ind Co Ltd Interatomic force microscope
US5412980A (en) * 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
USRE36488E (en) * 1992-08-07 2000-01-11 Veeco Instruments Inc. Tapping atomic force microscope with phase or frequency detection
JP3246987B2 (en) * 1992-09-10 2002-01-15 キヤノン株式会社 Information processing device with multi-probe control circuit
US5347854A (en) * 1992-09-22 1994-09-20 International Business Machines Corporation Two dimensional profiling with a contact force atomic force microscope
US5321977A (en) * 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
US5338932A (en) * 1993-01-04 1994-08-16 Motorola, Inc. Method and apparatus for measuring the topography of a semiconductor device
US6520005B2 (en) * 1994-12-22 2003-02-18 Kla-Tencor Corporation System for sensing a sample
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
US5801381A (en) * 1997-05-21 1998-09-01 International Business Machines Corporation Method for protecting a probe tip using active lateral scanning control
US6881954B1 (en) * 1999-07-27 2005-04-19 Hitachi Construction Machinery Co., Ltd. Scanning probe microscope and method of measurement
JP2003227788A (en) * 2002-02-05 2003-08-15 Inst Of Physical & Chemical Res Scanning probe microscope and measuring method of surface structure of sample
JP2007309919A (en) 2006-04-20 2007-11-29 Hitachi Kenki Fine Tech Co Ltd Scanning probe microscope
EP1884738B1 (en) 2006-07-28 2009-03-25 Siemens Aktiengesellschaft Method of determining the diameter of a hole in a workpiece
US7423264B2 (en) 2006-09-08 2008-09-09 Kla-Tencor Technologies Corporation Atomic force microscope
JP4547418B2 (en) * 2007-11-30 2010-09-22 富士通セミコンダクター株式会社 Microscope device and driving method thereof
KR101004966B1 (en) * 2009-01-21 2011-01-06 서울대학교산학협력단 Fast image scanning method for the operation of atomic force microscope under liquid conditions
CA2825038A1 (en) * 2011-01-31 2012-08-09 Infinitesima Limited Adaptive mode scanning probe microscope
CN105241908A (en) * 2015-08-28 2016-01-13 广州市本原纳米仪器有限公司 Improved scanning method for scanning probe microscope
CN108519048B (en) * 2018-04-27 2019-12-31 刘明亮 Precast concrete component surface roughness quantitative determination device
CN109297401B (en) * 2018-09-14 2020-09-01 南京溧水高新创业投资管理有限公司 Aluminum-plastic plate flatness detection equipment and aluminum-plastic plate flatness detection process

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0195349A2 (en) * 1985-03-22 1986-09-24 International Business Machines Corporation Low-energy scanning transmission electron microscope
EP0254429A1 (en) * 1986-06-27 1988-01-27 Rank Taylor Hobson Limited Metrological apparatus and process

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238503A (en) * 1987-03-27 1988-10-04 Jeol Ltd Chip scanner for scanning tunnel microscope
JP2566794B2 (en) * 1987-10-15 1996-12-25 セイコー電子工業株式会社 Measuring method of scanning tunneling microscope
US4841148A (en) * 1988-03-21 1989-06-20 The Board Of Trustees Of The University Of Illinois Variable temperature scanning tunneling microscope
US4870352A (en) * 1988-07-05 1989-09-26 Fibertek, Inc. Contactless current probe based on electron tunneling
JPH02311702A (en) * 1989-05-29 1990-12-27 Olympus Optical Co Ltd Scanning type tunnel microscope apparatus
US5059793A (en) * 1989-10-04 1991-10-22 Olympus Optical Co., Ltd. Scanning tunneling microscope having proper servo control function

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0195349A2 (en) * 1985-03-22 1986-09-24 International Business Machines Corporation Low-energy scanning transmission electron microscope
EP0254429A1 (en) * 1986-06-27 1988-01-27 Rank Taylor Hobson Limited Metrological apparatus and process

Also Published As

Publication number Publication date
US5162653A (en) 1992-11-10
JPH025340A (en) 1990-01-10
JP2936545B2 (en) 1999-08-23
CA1315898C (en) 1993-04-06
EP0347739A2 (en) 1989-12-27
DE68927537T2 (en) 1997-06-26
EP0347739B1 (en) 1996-12-11
DE68927537D1 (en) 1997-01-23

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