TW349236B - Silicon carbide composite article particularly useful for plasma reactors - Google Patents

Silicon carbide composite article particularly useful for plasma reactors

Info

Publication number
TW349236B
TW349236B TW086110603A TW86110603A TW349236B TW 349236 B TW349236 B TW 349236B TW 086110603 A TW086110603 A TW 086110603A TW 86110603 A TW86110603 A TW 86110603A TW 349236 B TW349236 B TW 349236B
Authority
TW
Taiwan
Prior art keywords
silicon carbide
composite article
particularly useful
carbide composite
plasma reactors
Prior art date
Application number
TW086110603A
Other languages
English (en)
Inventor
Hau A Lu
Nianci Han
Gerald Z Yin
Robert W Wu
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of TW349236B publication Critical patent/TW349236B/zh

Links

Classifications

    • H01L21/205—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32467—Material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/3255—Material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/914—Differential etching apparatus including particular materials of construction

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Ceramic Products (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
TW086110603A 1996-07-26 1997-07-25 Silicon carbide composite article particularly useful for plasma reactors TW349236B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/687,740 US5904778A (en) 1996-07-26 1996-07-26 Silicon carbide composite article particularly useful for plasma reactors

Publications (1)

Publication Number Publication Date
TW349236B true TW349236B (en) 1999-01-01

Family

ID=24761659

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086110603A TW349236B (en) 1996-07-26 1997-07-25 Silicon carbide composite article particularly useful for plasma reactors

Country Status (5)

Country Link
US (1) US5904778A (zh)
EP (1) EP0821397A3 (zh)
JP (1) JPH10139547A (zh)
KR (1) KR980011810A (zh)
TW (1) TW349236B (zh)

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Also Published As

Publication number Publication date
JPH10139547A (ja) 1998-05-26
EP0821397A3 (en) 1998-07-29
EP0821397A2 (en) 1998-01-28
US5904778A (en) 1999-05-18
KR980011810A (ko) 1998-04-30

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