TW344672B - Fluorochemical recovery and recycle using membranes - Google Patents

Fluorochemical recovery and recycle using membranes

Info

Publication number
TW344672B
TW344672B TW086115994A TW86115994A TW344672B TW 344672 B TW344672 B TW 344672B TW 086115994 A TW086115994 A TW 086115994A TW 86115994 A TW86115994 A TW 86115994A TW 344672 B TW344672 B TW 344672B
Authority
TW
Taiwan
Prior art keywords
fluorochemicals
gas
diluent gas
rich
stream
Prior art date
Application number
TW086115994A
Other languages
English (en)
Inventor
Chernyakov Losif
Hsiao-Ling Hsiung Thomas
Schwarz Alexander
Hsu-Kuang Yang James
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Application granted granted Critical
Publication of TW344672B publication Critical patent/TW344672B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
    • B01D61/44—Ion-selective electrodialysis
    • B01D61/52—Accessories; Auxiliary operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
    • B01D61/44—Ion-selective electrodialysis
    • B01D61/445—Ion-selective electrodialysis with bipolar membranes; Water splitting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J47/00—Ion-exchange processes in general; Apparatus therefor
    • B01J47/12—Ion-exchange processes in general; Apparatus therefor characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes
    • B01J47/127—Ion-exchange processes in general; Apparatus therefor characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes in the form of filaments or fibres
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
    • C02F1/4693—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Water Supply & Treatment (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Urology & Nephrology (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treating Waste Gases (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
TW086115994A 1996-10-31 1997-10-28 Fluorochemical recovery and recycle using membranes TW344672B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/741,843 US5730779A (en) 1996-10-31 1996-10-31 Fluorochemical recovery and recycle using membranes

Publications (1)

Publication Number Publication Date
TW344672B true TW344672B (en) 1998-11-11

Family

ID=24982434

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086115994A TW344672B (en) 1996-10-31 1997-10-28 Fluorochemical recovery and recycle using membranes

Country Status (8)

Country Link
US (1) US5730779A (zh)
EP (1) EP0839568A1 (zh)
JP (1) JP3152389B2 (zh)
KR (1) KR19980033215A (zh)
CA (1) CA2218147A1 (zh)
MY (1) MY115253A (zh)
SG (1) SG50891A1 (zh)
TW (1) TW344672B (zh)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858065A (en) * 1995-07-17 1999-01-12 American Air Liquide Process and system for separation and recovery of perfluorocompound gases
US5785741A (en) 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
IE80909B1 (en) 1996-06-14 1999-06-16 Air Liquide An improved process and system for separation and recovery of perfluorocompound gases
WO1998032521A1 (en) * 1997-01-23 1998-07-30 Carbon Membranes Ltd. Recovery of perfluorinated compounds and hydrofluorocarbon gases using molecular sieve membranes
CN1150144C (zh) * 1997-05-02 2004-05-19 纳幕尔杜邦公司 用半透膜从碳氟化合物中分离出二氧化碳
EP0980347B1 (en) * 1997-05-02 2004-04-14 E.I. Du Pont De Nemours And Company Separation of co 2? from unsaturated fluorinated compounds by semipermeable membrane
US5855647A (en) * 1997-05-15 1999-01-05 American Air Liquide, Inc. Process for recovering SF6 from a gas
US5976222A (en) * 1998-03-23 1999-11-02 Air Products And Chemicals, Inc. Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series
US6032484A (en) * 1998-03-23 2000-03-07 Air Products And Chemicals, Inc. Recovery of perfluorinated compounds from the exhaust of semiconductor fabs with recycle of vacuum pump diluent
US6187077B1 (en) 1998-04-17 2001-02-13 American Air Liquide Inc. Separation of CF4 and C2F6 from a perfluorocompound mixture
DE19837845C2 (de) * 1998-08-20 2002-09-12 Solvay Fluor & Derivate Auftrennung von SF6/N2-Gemischen und SF6/Luft-Gemischen
DE19910678A1 (de) * 1998-08-20 2000-09-14 Solvay Fluor & Derivate Verfahren zur Reinigung von SF¶6¶-kontaminierten Gasen
US6395066B1 (en) * 1999-03-05 2002-05-28 Ube Industries, Ltd. Partially carbonized asymmetric hollow fiber separation membrane, process for its production, and gas separation method
SG80623A1 (en) * 1999-04-26 2001-05-22 Air Prod & Chem Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series
EP1048337A1 (en) * 1999-04-28 2000-11-02 Air Products And Chemicals, Inc. Recovery of perfluorinated compounds from the exhaust of semiconductors fabrications with recycle of vaccum pump dilutent
DE19923155A1 (de) * 1999-05-20 2000-11-23 Solvay Fluor & Derivate SF¶6¶-Abtrennung aus Isoliergasen aus gasisolierten Leitungen
JP4357046B2 (ja) * 1999-10-01 2009-11-04 株式会社東芝 ガス回収装置
US7625540B2 (en) * 1999-12-03 2009-12-01 Edwards Vacuum, Inc. Fluorine removal by ion exchange
JP4018858B2 (ja) * 1999-12-20 2007-12-05 大同エアプロダクツ・エレクトロニクス株式会社 パーフルオロ化合物分離回収方法およびそれに用いるパーフルオロ化合物分離回収装置
JP2002035528A (ja) * 2000-07-26 2002-02-05 Japan Atom Energy Res Inst ガス分離装置
JP3794268B2 (ja) * 2001-01-05 2006-07-05 栗田工業株式会社 電気脱イオン装置及びその運転方法
JP4089223B2 (ja) * 2001-12-26 2008-05-28 宇部興産株式会社 ハロゲン化合物ガスの分離回収装置および分離回収方法
US6921428B2 (en) * 2001-01-25 2005-07-26 Ube Industries, Ltd. Device and method for separating and collecting halide gas
EP1505146A1 (en) 2003-08-05 2005-02-09 Air Products And Chemicals, Inc. Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols
JP4415656B2 (ja) * 2003-11-26 2010-02-17 ダイキン工業株式会社 二フッ化カルボニルの精製方法
JP4950034B2 (ja) * 2004-06-02 2012-06-13 ゴールデン・トライアングル・エンタープライジズ・ピーティーワイ・リミテッド 六弗化硫黄ガスの回収
JP5202836B2 (ja) * 2006-12-01 2013-06-05 日本エア・リキード株式会社 キセノンの回収システムおよび回収装置
RU2505345C2 (ru) * 2008-07-04 2014-01-27 Дзе Саут Эфрикен Нюклеа Энерджи Корпорейшн Лимитед Способ выделения газообразного компонента из смеси газообразных соединений
KR101514801B1 (ko) * 2013-06-25 2015-04-24 (주)파인텍 과불화화합물의 분리 및 재활용시스템
KR101676099B1 (ko) * 2014-09-24 2016-11-15 오씨아이 주식회사 Nf3 가스 분리농축 방법, 장치 및 시스템
EP3797857A1 (en) 2019-09-30 2021-03-31 General Electric Technology GmbH Method and apparatus for recycling heptafluoroisobutyronitrile
CN112028371B (zh) * 2020-10-08 2023-10-24 江苏电科环保有限公司 利用boe废液制备氟化氢铵的系统

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263178A (en) * 1975-11-17 1977-05-25 Toshiba Corp Gas separation unit
FR2405081A1 (fr) * 1977-10-06 1979-05-04 Commissariat Energie Atomique Procede de separation de gaz dans un melange
US4180388A (en) * 1978-03-20 1979-12-25 Monsanto Company Processes
DE3061132D1 (en) * 1979-04-03 1982-12-30 Monsanto Co Gas recovery process
US4424067A (en) * 1982-07-29 1984-01-03 Allied Corporation Purification of anhydrous hydrogen fluoride
JPS5990613A (ja) * 1982-07-29 1984-05-25 リンデ・アクチエンゲゼルシヤフト ガス混合物の分離方法及び装置
US4597777A (en) * 1983-02-15 1986-07-01 Monsanto Company Membrane gas separation processes
DE3416519A1 (de) * 1983-05-20 1984-11-22 Linde Ag, 6200 Wiesbaden Verfahren und vorrichtung zur zerlegung eines gasgemisches
US4435191A (en) * 1983-06-30 1984-03-06 Monsanto Company Process for separating aggressive gases from gas mixtures
US4654063A (en) * 1984-12-21 1987-03-31 Air Products And Chemicals, Inc. Process for recovering hydrogen from a multi-component gas stream
US4781907A (en) * 1985-12-04 1988-11-01 Mcneill John M Production of membrane-derived nitrogen from combustion gases
US4701187A (en) * 1986-11-03 1987-10-20 Air Products And Chemicals, Inc. Process for separating components of a gas stream
JPS63296820A (ja) * 1987-05-29 1988-12-02 Ube Ind Ltd 高純度水素又はヘリウムの製造方法
USRE33678E (en) * 1987-06-23 1991-09-03 Union Carbide Industrial Gases Technology Corporation Membrane separation system and process
US4787919A (en) * 1987-06-23 1988-11-29 Union Carbide Corporation Membrane separation system and process
DE3723193A1 (de) * 1987-07-14 1989-01-26 Metallgesellschaft Ag Verfahren zur herstellung von alkoholaten
FR2636858B1 (fr) * 1988-09-08 1990-11-02 Air Liquide Procede et installation de separation d'un constituant a permeabilite intermediaire d'un melange gazeux
US4894068A (en) * 1988-12-27 1990-01-16 Permea, Inc. Process for capturing nitrogen from air using gas separation membranes
US5051114B2 (en) * 1989-06-15 1996-01-16 Du Pont Canada Perfluorodioxole membranes
WO1992019359A1 (en) * 1991-05-07 1992-11-12 Membrane Technology And Research, Inc. Process for removing condensable components from gas streams
US5240471A (en) * 1991-07-02 1993-08-31 L'air Liquide Multistage cascade-sweep process for membrane gas separation
US5252219A (en) * 1992-12-18 1993-10-12 Permea, Inc. Compressed permeate sweep membrane separation process
US5378263A (en) * 1992-12-21 1995-01-03 Praxair Technology, Inc. High purity membrane nitrogen
US5282969A (en) * 1993-04-29 1994-02-01 Permea, Inc. High pressure feed membrane separation process
US5482539A (en) * 1993-09-22 1996-01-09 Enerfex, Inc. Multiple stage semi-permeable membrane process and apparatus for gas separation
US5417742A (en) * 1993-12-03 1995-05-23 The Boc Group, Inc. Removal of perfluorocarbons from gas streams
JP2854240B2 (ja) * 1994-05-09 1999-02-03 株式会社新潟鉄工所 ガス回収循環装置
JP2756459B2 (ja) * 1994-05-31 1998-05-25 日本合成アルコール株式会社 エチレン水和反応における不純エチレン流の処理方法
US5455016A (en) * 1994-08-31 1995-10-03 Air Products And Chemicals, Inc. Membrane-assisted process to produce ammonia
FR2724327B1 (fr) * 1994-09-12 1996-10-25 Air Liquide Procede de separation membranaire par cascade de membranes de selectivites differentes
US5502969A (en) * 1995-02-16 1996-04-02 Praxair Technology, Inc. Cryogenic rectification system for fluorine compound recovery
CA2170190A1 (en) * 1995-03-07 1996-09-08 Dwayne T. Friesen Volatile organic component removal by membrane separation using countercurrent sweep gas
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases

Also Published As

Publication number Publication date
US5730779A (en) 1998-03-24
EP0839568A1 (en) 1998-05-06
KR19980033215A (ko) 1998-07-25
CA2218147A1 (en) 1998-04-30
JPH10128034A (ja) 1998-05-19
MY115253A (en) 2003-04-30
JP3152389B2 (ja) 2001-04-03
SG50891A1 (en) 1998-07-20

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