TW290724B - - Google Patents

Info

Publication number
TW290724B
TW290724B TW085104692A TW85104692A TW290724B TW 290724 B TW290724 B TW 290724B TW 085104692 A TW085104692 A TW 085104692A TW 85104692 A TW85104692 A TW 85104692A TW 290724 B TW290724 B TW 290724B
Authority
TW
Taiwan
Application number
TW085104692A
Original Assignee
Siemens Ag
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag, Ibm filed Critical Siemens Ag
Application granted granted Critical
Publication of TW290724B publication Critical patent/TW290724B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
TW085104692A 1995-03-29 1996-04-19 TW290724B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/412,442 US5543348A (en) 1995-03-29 1995-03-29 Controlled recrystallization of buried strap in a semiconductor memory device

Publications (1)

Publication Number Publication Date
TW290724B true TW290724B (zh) 1996-11-11

Family

ID=23632996

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085104692A TW290724B (zh) 1995-03-29 1996-04-19

Country Status (5)

Country Link
US (2) US5543348A (zh)
EP (1) EP0739033A3 (zh)
JP (1) JP3078223B2 (zh)
KR (1) KR100202278B1 (zh)
TW (1) TW290724B (zh)

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US6380575B1 (en) 1999-08-31 2002-04-30 International Business Machines Corporation DRAM trench cell
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Also Published As

Publication number Publication date
JP3078223B2 (ja) 2000-08-21
EP0739033A2 (en) 1996-10-23
JPH0992799A (ja) 1997-04-04
US5670805A (en) 1997-09-23
KR100202278B1 (ko) 1999-06-15
US5543348A (en) 1996-08-06
EP0739033A3 (en) 2000-01-12

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees