TW266331B - Semiconductor pressure sensor - Google Patents

Semiconductor pressure sensor

Info

Publication number
TW266331B
TW266331B TW084105133A TW84105133A TW266331B TW 266331 B TW266331 B TW 266331B TW 084105133 A TW084105133 A TW 084105133A TW 84105133 A TW84105133 A TW 84105133A TW 266331 B TW266331 B TW 266331B
Authority
TW
Taiwan
Prior art keywords
pressure sensor
semiconductor pressure
thick film
film substrate
die bonding
Prior art date
Application number
TW084105133A
Other languages
English (en)
Inventor
Eiji Kobayashi
Original Assignee
Mitsubishi Electric Machine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Machine filed Critical Mitsubishi Electric Machine
Application granted granted Critical
Publication of TW266331B publication Critical patent/TW266331B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
TW084105133A 1995-01-19 1995-05-23 Semiconductor pressure sensor TW266331B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7006512A JPH08193897A (ja) 1995-01-19 1995-01-19 半導体圧力センサ

Publications (1)

Publication Number Publication Date
TW266331B true TW266331B (en) 1995-12-21

Family

ID=11640474

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084105133A TW266331B (en) 1995-01-19 1995-05-23 Semiconductor pressure sensor

Country Status (4)

Country Link
US (1) US5721446A (zh)
JP (1) JPH08193897A (zh)
KR (1) KR0163626B1 (zh)
TW (1) TW266331B (zh)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6140144A (en) * 1996-08-08 2000-10-31 Integrated Sensing Systems, Inc. Method for packaging microsensors
JPH11108782A (ja) * 1997-10-02 1999-04-23 Denso Corp 半導体力学量センサ
JPH11295172A (ja) * 1998-04-06 1999-10-29 Denso Corp 半導体圧力センサ
DE19938207A1 (de) * 1999-08-12 2001-02-15 Bosch Gmbh Robert Sensor, insbesondere mikromechanischer Sensor, und Verfahren zu dessen Herstellung
JP3654116B2 (ja) * 2000-03-10 2005-06-02 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
US6570485B1 (en) 2000-11-17 2003-05-27 Honeywell International Inc. Transducer packaging assembly for use in sensing unit subjected to high G forces
US6432737B1 (en) 2001-01-03 2002-08-13 Amkor Technology, Inc. Method for forming a flip chip pressure sensor die package
US6441503B1 (en) 2001-01-03 2002-08-27 Amkor Technology, Inc. Bond wire pressure sensor die package
US6661080B1 (en) 2001-06-28 2003-12-09 Amkor Technology, Inc. Structure for backside saw cavity protection
US6586824B1 (en) 2001-07-26 2003-07-01 Amkor Technology, Inc. Reduced thickness packaged electronic device
DE10206464A1 (de) * 2002-02-16 2003-08-28 Micronas Gmbh Verfahren zur Herstellung einer Sensor- oder Aktuatoranordnung sowie Sensor- oder Aktuatoranordnung
US6892578B2 (en) * 2002-11-29 2005-05-17 Hitachi Metals Ltd. Acceleration sensor
JP2004271312A (ja) 2003-03-07 2004-09-30 Denso Corp 容量型半導体センサ装置
DE102004051468A1 (de) * 2004-10-22 2006-04-27 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP2007033047A (ja) * 2005-07-22 2007-02-08 Mitsubishi Electric Corp 半導体圧力センサ
US7524693B2 (en) * 2006-05-16 2009-04-28 Freescale Semiconductor, Inc. Method and apparatus for forming an electrical connection to a semiconductor substrate
JP4366666B1 (ja) * 2008-09-12 2009-11-18 オムロン株式会社 半導体装置
IT1400619B1 (it) * 2010-05-12 2013-06-14 Metallux Sa Sensore di pressione
JP5402863B2 (ja) * 2010-07-16 2014-01-29 株式会社デンソー センサチップの実装構造およびその実装方法
US9366593B2 (en) * 2013-09-27 2016-06-14 Infineon Technologies Ag Pressure sensor package with integrated sealing
JP2015224903A (ja) * 2014-05-26 2015-12-14 株式会社東芝 圧力センサ、マイクロフォン、超音波センサ、血圧センサ及びタッチパネル
DE102015121401A1 (de) * 2015-12-09 2017-06-14 ETO SENSORIC GmbH Drucksensorvorrichtung
JP6947367B2 (ja) * 2016-12-20 2021-10-13 ローム株式会社 センサモジュールおよびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119693A (en) * 1977-03-29 1978-10-19 Toshiba Corp Semiconductor pressure transducer
JPS56165361A (en) * 1980-05-23 1981-12-18 Mitsubishi Electric Corp Semiconductor pressure converter
JPS5736870A (ja) * 1980-08-15 1982-02-27 Hitachi Ltd Handotaidaiyafuramugatasensa

Also Published As

Publication number Publication date
JPH08193897A (ja) 1996-07-30
US5721446A (en) 1998-02-24
KR0163626B1 (ko) 1999-05-01
KR960029775A (ko) 1996-08-17

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