TW241316B - - Google Patents
Info
- Publication number
- TW241316B TW241316B TW081106404A TW81106404A TW241316B TW 241316 B TW241316 B TW 241316B TW 081106404 A TW081106404 A TW 081106404A TW 81106404 A TW81106404 A TW 81106404A TW 241316 B TW241316 B TW 241316B
- Authority
- TW
- Taiwan
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/54—Electroplating of non-metallic surfaces
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/188—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by direct electroplating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
- Y10S205/916—Sequential electrolytic and nonelectrolytic, or nonelectrolytic and electrolytic coating from the same bath
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3205101A JPH0544075A (ja) | 1991-08-15 | 1991-08-15 | 無電解銅めつき代替銅ストライクめつき方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW241316B true TW241316B (enExample) | 1995-02-21 |
Family
ID=16501437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW081106404A TW241316B (enExample) | 1991-08-15 | 1992-08-13 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5454930A (enExample) |
| EP (1) | EP0530568A3 (enExample) |
| JP (1) | JPH0544075A (enExample) |
| KR (1) | KR930004502A (enExample) |
| TW (1) | TW241316B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103526239A (zh) * | 2013-10-08 | 2014-01-22 | 昆山纯柏精密五金有限公司 | 一种铜电镀液以及五金件的镀铜方法 |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2155075T3 (es) * | 1993-03-18 | 2001-05-01 | Atotech Usa Inc | Metodo de revestimiento por inmersion, auto-acelerante y auto-renovador, sin formaldehido. |
| JP3208410B2 (ja) | 1997-04-07 | 2001-09-10 | 奥野製薬工業株式会社 | 非導電性プラスチック成形品への電気めっき方法 |
| TWI223678B (en) * | 1998-03-20 | 2004-11-11 | Semitool Inc | Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper |
| US6565729B2 (en) | 1998-03-20 | 2003-05-20 | Semitool, Inc. | Method for electrochemically depositing metal on a semiconductor workpiece |
| US6113771A (en) * | 1998-04-21 | 2000-09-05 | Applied Materials, Inc. | Electro deposition chemistry |
| JP2000173868A (ja) * | 1998-12-01 | 2000-06-23 | Nichicon Corp | アルミニウム電解コンデンサ駆動用電解液 |
| US6551484B2 (en) | 1999-04-08 | 2003-04-22 | Applied Materials, Inc. | Reverse voltage bias for electro-chemical plating system and method |
| US6571657B1 (en) | 1999-04-08 | 2003-06-03 | Applied Materials Inc. | Multiple blade robot adjustment apparatus and associated method |
| DE19918833C2 (de) * | 1999-04-22 | 2002-10-31 | Atotech Deutschland Gmbh | Verfahren zum elektrolytischen Abscheiden einer Metallschicht auf Oberflächen eines elektrisch nichtleitenden Substrats und Anwendung des Verfahrens |
| US20030213772A9 (en) * | 1999-07-09 | 2003-11-20 | Mok Yeuk-Fai Edwin | Integrated semiconductor substrate bevel cleaning apparatus and method |
| US6913680B1 (en) | 2000-05-02 | 2005-07-05 | Applied Materials, Inc. | Method of application of electrical biasing to enhance metal deposition |
| JP2004513221A (ja) | 2000-05-23 | 2004-04-30 | アプライド マテリアルズ インコーポレイテッド | 銅シード層の異常を克服し表面形状サイズ及びアスペクト比を調整する方法と装置 |
| US6576110B2 (en) | 2000-07-07 | 2003-06-10 | Applied Materials, Inc. | Coated anode apparatus and associated method |
| WO2002029137A2 (en) * | 2000-10-03 | 2002-04-11 | Applied Materials,Inc. | Method and associated apparatus for tilting a substrate upon entry for metal deposition |
| US6776893B1 (en) | 2000-11-20 | 2004-08-17 | Enthone Inc. | Electroplating chemistry for the CU filling of submicron features of VLSI/ULSI interconnect |
| ATE466975T1 (de) * | 2000-12-13 | 2010-05-15 | Imec | Verfahren zur herstellung eines elektroplattierungsbad und zugehöriges kupfer- plattierungsverfahren |
| US6610189B2 (en) | 2001-01-03 | 2003-08-26 | Applied Materials, Inc. | Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature |
| US20040020780A1 (en) * | 2001-01-18 | 2004-02-05 | Hey H. Peter W. | Immersion bias for use in electro-chemical plating system |
| US6478937B2 (en) | 2001-01-19 | 2002-11-12 | Applied Material, Inc. | Substrate holder system with substrate extension apparatus and associated method |
| US20040253450A1 (en) * | 2001-05-24 | 2004-12-16 | Shipley Company, L.L.C. | Formaldehyde-free electroless copper plating process and solution for use in the process |
| JP4843164B2 (ja) * | 2001-08-21 | 2011-12-21 | 日本リーロナール有限会社 | 銅−樹脂複合材料の形成方法 |
| EP1322146A1 (en) * | 2001-12-18 | 2003-06-25 | Phoenix Precision Technology Corporation | Method of electroplating solder bumps on an organic circuit board |
| US20030146102A1 (en) * | 2002-02-05 | 2003-08-07 | Applied Materials, Inc. | Method for forming copper interconnects |
| US6911136B2 (en) * | 2002-04-29 | 2005-06-28 | Applied Materials, Inc. | Method for regulating the electrical power applied to a substrate during an immersion process |
| US20040200725A1 (en) * | 2003-04-09 | 2004-10-14 | Applied Materials Inc. | Application of antifoaming agent to reduce defects in a semiconductor electrochemical plating process |
| US20040206628A1 (en) * | 2003-04-18 | 2004-10-21 | Applied Materials, Inc. | Electrical bias during wafer exit from electrolyte bath |
| US20050092601A1 (en) * | 2003-10-29 | 2005-05-05 | Harald Herchen | Electrochemical plating cell having a diffusion member |
| US20050092602A1 (en) * | 2003-10-29 | 2005-05-05 | Harald Herchen | Electrochemical plating cell having a membrane stack |
| US6977049B2 (en) * | 2003-12-31 | 2005-12-20 | The Boc Group, Inc. | Treatment process for industrial waste stream |
| US20050139548A1 (en) * | 2003-12-31 | 2005-06-30 | The Boc Group, Inc. | Extraction and oxidation process |
| US20060102467A1 (en) * | 2004-11-15 | 2006-05-18 | Harald Herchen | Current collimation for thin seed and direct plating |
| JP2008031536A (ja) * | 2006-07-31 | 2008-02-14 | Ebara Udylite Kk | ダイレクトプレーティング方法 |
| KR100782782B1 (ko) * | 2006-11-23 | 2007-12-05 | 주식회사 포스코 | 프레스 교정기와 형상계측기를 이용한 판재형상 교정방법 |
| EP2305856A1 (en) * | 2009-09-28 | 2011-04-06 | ATOTECH Deutschland GmbH | Process for applying a metal coating to a non-conductive substrate |
| DE102010012204B4 (de) | 2010-03-19 | 2019-01-24 | MacDermid Enthone Inc. (n.d.Ges.d. Staates Delaware) | Verbessertes Verfahren zur Direktmetallisierung von nicht leitenden Substraten |
| CN102127781A (zh) * | 2011-02-25 | 2011-07-20 | 湖南大学 | 适用于印制板孔金属化的电化镀铜 |
| JP5996244B2 (ja) * | 2011-04-19 | 2016-09-21 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | 半導体上の銅のめっき |
| JP6474410B2 (ja) * | 2013-12-09 | 2019-02-27 | アヴニ | 電気化学的に不活性なカチオンを含む銅電着浴 |
| CN114408858B (zh) * | 2022-01-05 | 2023-03-17 | 北京科技大学 | 一种室温可吸氢锆基复合材料的制备方法 |
| CN118308711B (zh) * | 2024-03-20 | 2025-01-24 | 深圳市豪龙新材料技术有限公司 | 一种酸性光亮镀铜剂及其制备方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2644787A (en) * | 1950-01-05 | 1953-07-07 | Eckert Mauchly Comp Corp | Electrodeposition of a magnetic coating |
| US4228201A (en) * | 1977-06-06 | 1980-10-14 | Nathan Feldstein | Method for rendering a non-platable semiconductor substrate platable |
| US4209331A (en) * | 1978-05-25 | 1980-06-24 | Macdermid Incorporated | Electroless copper composition solution using a hypophosphite reducing agent |
| US4459184A (en) * | 1980-08-12 | 1984-07-10 | Macdermid, Inc. | Method for continuous metal deposition from a non-autocatalytic electroless plating bath using electric potential |
| WO1982000666A1 (en) * | 1980-08-12 | 1982-03-04 | Macdermid Inc | Method for continuous metal deposition from a non-autocatalytic electroless plating bath using electric potential |
| JPS57145969A (en) * | 1981-03-04 | 1982-09-09 | Agency Of Ind Science & Technol | Chemical plating method |
| NL8105922A (nl) * | 1981-12-31 | 1983-07-18 | Philips Nv | Werkwijze voor het partieel metalliseren van elektrisch geleidende niet-metallische patronen. |
| US4877450A (en) * | 1989-02-23 | 1989-10-31 | Learonal, Inc. | Formaldehyde-free electroless copper plating solutions |
| US5059243A (en) * | 1989-04-28 | 1991-10-22 | International Business Machines Corporation | Tetra aza ligand systems as complexing agents for electroless deposition of copper |
| JPH04120290A (ja) * | 1990-02-26 | 1992-04-21 | Ishihara Chem Co Ltd | 電気銅めっき液 |
-
1991
- 1991-08-15 JP JP3205101A patent/JPH0544075A/ja active Pending
-
1992
- 1992-08-13 KR KR1019920014557A patent/KR930004502A/ko not_active Withdrawn
- 1992-08-13 TW TW081106404A patent/TW241316B/zh active
- 1992-08-14 EP EP19920113878 patent/EP0530568A3/en not_active Withdrawn
-
1994
- 1994-07-28 US US08/333,890 patent/US5454930A/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103526239A (zh) * | 2013-10-08 | 2014-01-22 | 昆山纯柏精密五金有限公司 | 一种铜电镀液以及五金件的镀铜方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0530568A3 (en) | 1993-08-25 |
| EP0530568A2 (en) | 1993-03-10 |
| KR930004502A (ko) | 1993-03-22 |
| US5454930A (en) | 1995-10-03 |
| JPH0544075A (ja) | 1993-02-23 |