TW202303244A - Polarized light irradiation device, exposure device having the same, and method of polarized light irradiation - Google Patents

Abstract

The invention provides a polarized light irradiation device capable of enhancing the uniformity of the irradiation energy distribution of polarized light with respect to a work. The polarized light irradiation device 100 is configured by providing a plurality of irradiation heads 110 in which a plurality of light source sets 114 having a light source 120 and a polarizing element 122 corresponding to the light source 120 are arranged in a direction orthogonal to the transport direction of the work X. The boundary portions 130 formed between the polarizing elements 122 in one irradiation head 110 are arranged to overlap the boundary portions 130 in another irradiation head 110 adjacent to the irradiation head 110 along the transport direction of the work X. The irradiation boundary portion 132 formed between the irradiation boundary portions Z by the polarized light W from one irradiation head 110 is arranged to not be overlapped with the irradiation boundary portion 132 in another irradiation head 110 adjacent to the irradiation head 110 along the transport direction of the work X.

Description

Polarized light irradiation device, exposure device having the same, and polarized light irradiation method

The present invention mainly relates to a polarized light irradiation device for exposure used in the manufacture of a liquid crystal panel, an exposure device equipped with the same, and a polarized light irradiation method.

A liquid crystal alignment process is required in the manufacture of a liquid crystal panel, and conventionally, a rubbing process of physically rubbing the surface of a glass substrate has been performed (for example, Patent Document 1). The rubbing treatment refers to a treatment method in which an organic polymer film formed on a glass substrate is rubbed in a predetermined direction with a cloth with long hairs or the like to form a film capable of aligning liquid crystal molecules in a certain direction.

However, in the rubbing process, there are problems related to reliability such as lack of uniformity, possibility of electrostatic breakdown of TFTs, and adhesion of powder dust generated during rubbing.

In order to cope with the problem of such a rubbing method, an exposure apparatus capable of performing photo-alignment treatment has been proposed, and in this exposure apparatus, it has been attempted to use a long-arc mercury lamp as a light source. ＜Prior Technical Documents＞ ＜Patent Document＞

Patent Document 1: Japanese Patent Laid-Open No. 2007-17475

＜Problems to be solved by the invention＞

However, when a large-scale exposure apparatus capable of handling a large-area workpiece is required, it is difficult to use a single long-arc mercury lamp as a light source. Instead, it is necessary to use multiple light sources and multiple polarizers corresponding to them.

In the case of using multiple light sources and multiple polarizers, for example, a light source group consisting of one light source and its corresponding polarizer is multi-connected to form an irradiation head, and the plurality of irradiation heads are arranged in the conveying direction of the workpiece. To constitute a polarized light irradiation device.

When the polarized light irradiation device is configured in this way, a boundary portion occurs between adjacent light source groups. In this boundary portion, since the illuminance becomes lower than other regions, there arises a problem that the uniformity of the polarized light irradiation energy distribution to the workpiece deteriorates. In addition, in order to prevent erroneous irradiation of unpolarized light, light shielding measures such as shielding may be taken at the boundary portion.

The present invention has been accomplished in view of the above-mentioned problems, and its object is to provide a polarized light irradiation device, an exposure device having the same, and a polarized light irradiation method. In the case where the polarized light irradiation device is configured by combining multiple irradiation heads, the uniformity of the polarized light irradiation energy distribution to the workpiece can be improved. ＜Technical solution to the problem＞

According to one aspect of the present invention, a polarized light irradiation device is provided, which includes a plurality of irradiation heads in which a plurality of light source groups are arranged in a direction perpendicular to the conveying direction of the workpiece, and the light source group has a light source and a light source corresponding to the light source. the polarizing element, A plurality of the irradiation heads are arranged in a row in the conveying direction of the workpiece, A boundary portion is formed between the polarizing element in one of the light source groups and the polarizing element in another light source group adjacent to the light source group, The boundary portion in one of the irradiation heads is arranged in such a way that the boundary portion in the other irradiation head adjacent to the irradiation head overlaps along the conveying direction of the workpiece, An irradiation boundary portion is formed between irradiation ranges on the workpiece of the polarized lights irradiated from the plurality of light source groups included in the irradiation heads, The irradiation boundary portion formed by the respective polarized lights irradiated from one of the irradiation heads is arranged so as to be arranged to be opposite to the respective polarized lights irradiated from the other irradiation head adjacent to the irradiation head. The irradiation boundary portions do not overlap along the conveying direction of the workpiece.

Preferably, One light source group is composed of a plurality of light sources and one polarizing element.

Preferably, The light source includes a discharge lamp and a reflector that reflects light from the discharge lamp.

Preferably, The light source includes LEDs.

Preferably, The polarized light irradiation device further includes an adjustment mechanism for adjusting an irradiation angle of the polarized light from the light source group to the workpiece in a direction perpendicular to a conveyance direction of the workpiece.

Preferably, The polarized light irradiation device further includes a second adjustment mechanism for adjusting an irradiation angle of the polarized light from the light source group with respect to the workpiece to a conveyance direction of the workpiece.

Preferably, The light source or a box accommodating the light source and the polarizing element is attached to the irradiation head.

According to another aspect of the present invention,

Provided is an exposure device including the above-mentioned polarized light irradiation device and a workpiece conveyance device. According to another aspect of the present invention, a kind of polarized light irradiation method is provided, the polarized light from the polarized light irradiation device is irradiated to workpiece, The polarized light irradiation device includes a plurality of irradiation heads in which a plurality of light source groups are arranged in a direction perpendicular to the transport direction of the workpiece. The light source group has a light source and a polarizing element corresponding to the light source. The irradiating heads are arranged in a row in the conveying direction of the workpiece, between the polarizing element in one light source group and the polarizing element in another light source group adjacent to the light source group A boundary portion is formed between them, and the boundary portion of one of the irradiation heads overlaps with the boundary portion of the other irradiation head adjacent to the irradiation head along the conveying direction of the workpiece. arrangement, An irradiation boundary portion is formed between irradiation ranges on the workpiece of the polarized light irradiated from the plurality of light source groups included in each of the irradiation heads, The irradiation boundary portion formed by the respective polarized lights irradiated from one of the irradiation heads is arranged so as to be arranged to be opposite to the respective polarized lights irradiated from the other irradiation head adjacent to the irradiation head. The irradiation boundary portions do not overlap along the conveying direction of the workpiece. ＜Invention effects＞

According to the polarized light irradiation device, the exposure device provided therewith, and the polarized light irradiation method of the present invention, the boundary between polarized light elements in one irradiation head is equal to the polarized light in another irradiation head adjacent to the irradiation head. The boundary parts between the elements are arranged so as to overlap along the conveying direction of the workpiece, and the irradiation boundary part formed by each polarized light irradiated from one irradiation head is arranged so as to be separated from another irradiation head adjacent to the irradiation head. The irradiation boundaries formed by the irradiated polarized lights do not overlap along the transport direction of the workpiece.

As a result, it is only necessary to arrange one irradiation head and another adjacent irradiation head so that the boundary portion thereof overlaps along the conveying direction of the workpiece, so the positioning of each irradiation head is easy, and the polarized light irradiated on the workpiece The irradiation boundary parts in the workpiece do not overlap along the conveying direction of the workpiece, so the uniformity of the energy distribution of the polarized light irradiation on the workpiece can be improved.

(Structure of Exposure Device 10 ) Hereinafter, the exposure apparatus 10 provided with the polarized light irradiation apparatus 100 which concerns on embodiment of this invention to which it is applied is demonstrated. The exposure apparatus 10 is mainly used for manufacturing the photo-alignment film (work X) used for a liquid crystal panel. As shown in FIG. 1 , the exposure device 10 roughly includes a workpiece conveyance device 20 and a polarized light irradiation device 100 .

The workpiece conveyance device 20 is a device for substantially horizontally conveying the photo-alignment film (work X) exposed by the exposure device 10 in a predetermined direction (the conveyance direction of the workpiece X), and a known conveyance device is used. A known conveying device is, for example, a method in which the table on which the workpiece X is placed is moved relative to the polarized light irradiation device 100, or a method of winding the workpiece X (photo-alignment film) on a long film formed in a roll shape with another core material. However, the method of moving the workpiece X relative to the polarized light irradiation device 100 and the like.

(Structure of polarized light irradiation device 100 ) The polarized light irradiation device 100 according to the present embodiment includes a plurality of (three in the drawing) irradiation heads 110 arranged in a line in the conveyance direction of the workpiece X. As shown in FIG.

The irradiation head 110 roughly includes a irradiation head main body 112 , a plurality of light source groups 114 and an adjustment mechanism 115 .

The irradiation head main body 112 has: a casing 116 that accommodates a plurality of light source groups 114 extending in a direction perpendicular to the conveyance direction of the workpiece X; and a pair of support members 118 that are rotatably attached to the casing 116, respectively. Both ends in the length direction of the workpiece, and the housing 116 is supported above the workpiece conveying device 20 .

Thus, the angle of the housing 116 with respect to the workpiece X (and the workpiece conveyance device 20 ) can be freely set.

The light source group 114 housed in the casing 116 has a light source 120 and a polarizing element 122 , respectively.

The light source 120 emits light of a wavelength necessary for exposure of the workpiece X, and in this embodiment includes a discharge lamp 124 and a reflector 126 for reflecting light from the discharge lamp 124 in a predetermined direction. In addition, the light source 120 is not limited to the discharge lamp 124, For example, other types of light sources such as LED can be used.

The polarizing element 122 is a member that polarizes the light from the light source 120, and in this embodiment, a wire-grid polarizing element 122 is disposed at the position of the opening 128 formed on the bottom surface of the housing 116 (the surface facing the workpiece X). . Of course, the form of the polarizing element 122 is not limited to the wire grid type, and polarization may be performed in any form.

Such a plurality of light sources 120 are arranged in a line in the direction perpendicular to the conveyance direction of the workpiece X in the casing 116 . That is, the opening 128 formed in the bottom surface of the casing 116 is also arranged so as to extend in a direction perpendicular to the conveyance direction of the workpiece X. As shown in FIG.

In addition, as shown in FIG. 2 , a boundary portion 130 is formed between the polarizing element 122 in one light source group 114 and the polarizing element 122 in another light source group 114 adjacent to the light source group 114 .

Furthermore, the boundary portion 130 in one irradiation head 110 is arranged so that the boundary portion 130 in the other irradiation head 110 adjacent to the irradiation head 110 overlaps along the transport direction of the workpiece X. As shown in FIG.

Referring back to FIG. 1 , the adjustment mechanism 115 is a mechanism for adjusting the irradiation angle of the polarized light W from each light source group 114 on the workpiece X to a direction perpendicular to the conveyance direction of the workpiece X. In this embodiment, the adjustment mechanism 115 corresponding to each light source group 114 is housed in each irradiation head main body 112 . In addition, in FIG. 1 , only one light source group 114 is depicted with the adjustment mechanism 115 , but actually, the adjustment mechanism 115 is provided in each light source group 114 .

As shown in FIG. 3 , an irradiation boundary portion 132 is formed between each irradiation range Z on the workpiece X of each polarized light W irradiated from a plurality of light source groups 114 included in each irradiation head 110 . Furthermore, by adjusting using the adjustment mechanism 115 , the irradiation boundary portion 132 formed by each polarized light W irradiated from one irradiation head 110 is arranged so as to be different from each polarized light W irradiated from another irradiation head 110 adjacent to the irradiation head 110 . The irradiation boundary portion 132 formed by the light W does not overlap along the conveyance direction of the workpiece X. As shown in FIG. In addition, the irradiation boundary portion 132 is not limited to a portion where the illuminance is zero (mW/cm ² ), and a portion that overlaps with the polarized light W from the adjacent light source group 114 and has an illuminance lower than that in the irradiation range Z may also be considered. , or a part with high illuminance on the contrary.

In addition, as described above, the installation angle of the light source group 114 stored in each irradiation head 110 relative to the workpiece X is adjusted in advance so that the irradiation boundary portion 132 formed by each polarized light W irradiated from one irradiation head 110 is different from that from the workpiece X. When the irradiation boundary portion 132 formed by each polarized light W irradiated by another irradiation head 110 adjacent to the irradiation head 110 does not overlap along the transport direction of the workpiece X, the adjustment mechanism 115 is not an essential component.

(Features of Polarized Light Irradiating Device 100 and Exposure Device 10 ) According to the polarized light irradiation device 100 and the exposure device 10 including the same according to the present embodiment, the boundary portion 130 between the polarizing elements 122 in one irradiation head 110 is the same as that of the other irradiation head adjacent to the irradiation head 110 . The boundary portions 130 between the polarizing elements 122 in 110 are arranged so as to overlap along the transport direction of the workpiece X, and the irradiation boundary portion 132 formed by each polarized light W irradiated from one irradiation head 110 is arranged so as to be different from the The irradiation boundary portion 132 formed by the polarized lights W irradiated by another irradiation head 110 adjacent to the irradiation head 110 does not overlap along the transport direction of the workpiece X.

Thus, since one irradiation head 110 and the boundary portion 130 of another irradiation head 110 adjacent thereto can be arranged so as to overlap along the conveyance direction of the workpiece X, positioning of each irradiation head 110 is easy, and irradiation to Since the irradiation boundary portion 132 of the polarized light W of the workpiece X does not overlap along the transport direction of the workpiece X, the uniformity of the energy distribution phase of the polarized light irradiation on the workpiece X can be improved.

(Example 1) In the above-described embodiment, the light source group 114 is directly housed in the head body 112 , but instead, a cartridge smaller than the head body 112 that houses the light source group 114 may be prepared and housed in the head body 112 .

In addition, one light source group 114 may be accommodated in one box, or a plurality of light source groups 114 may be accommodated in one box.

(Example 2) The irradiation boundary portion 132 formed by each polarized light W irradiated from one irradiation head 110 and the irradiation boundary portion 132 formed by each polarized light W irradiated from another irradiation head 110 adjacent to the irradiation head 110 is along the workpiece X. The transport direction of the workpiece X does not overlap, as shown in FIG. 4 , the irradiation boundary portion 132 formed by each polarized light W from each irradiation head 110 may not overlap with each other along the transport direction of the workpiece X, as shown in FIG. 5 , If the irradiation boundary portions 132 formed by the polarized lights W from adjacent irradiation heads 110 do not overlap with each other along the conveying direction of the workpiece X, the irradiation boundaries formed by the respective polarized lights W from two adjacent irradiation heads 110 The parts 132 may overlap with each other along the conveyance direction of the workpiece X. As shown in FIG.

(Example 3) In the above-mentioned embodiment, the adjustment mechanism 115 for adjusting the irradiation angle of the polarized light W from each light source group 114 to the workpiece X in a direction perpendicular to the conveyance direction of the workpiece X is provided, but in addition , or instead, a second adjustment mechanism (not shown) for adjusting the irradiation angle of the polarized light W from each light source group 114 with respect to the workpiece X to the conveyance direction of the workpiece X may be provided.

It should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is shown not by the above-described description but by claims, and it is intended that all changes within the meanings equivalent to the claims and the range are included.

10: Exposure device 20: Workpiece conveying device 100: polarized light irradiation device 110: Irradiation head 112: The main body of the irradiation head 114: light source group 115: Adjustment mechanism 116: shell 118: supporting part 120: light source 122: Polarization element 124: discharge lamp 126: Mirror 128: (of housing 116) opening 130: Boundary 132: Boundary portion irradiation X: workpiece (photo-alignment film) W: polarized light Z: (polarized light W) irradiation range

FIG. 1 is a diagram showing an exposure apparatus 10 including a polarized light irradiation apparatus 100 to which the present invention is applied. FIG. 2 is a diagram showing an arrangement state of the polarizing element 122 in a state in which the polarized light irradiation device 100 is viewed from above. FIG. 3 is a diagram showing an arrangement state of the irradiation boundary portion 132 in a state in which the polarized light irradiation device 100 is viewed from above. FIG. 4 is a diagram showing an arrangement state of the irradiation boundary portion 132 in a state of planarly viewing the polarized light irradiation device 100 according to another example. FIG. 5 is a diagram illustrating an arrangement state of the irradiation boundary portion 132 in a state of planarly viewing the polarized light irradiation device 100 according to still another example.

10: Exposure device

20: Workpiece conveying device

100: polarized light irradiation device

110: Irradiation head

112: The main body of the irradiation head

114: light source group

115: Adjustment mechanism

116: shell

118: supporting part

120: light source

122: Polarization element

124: discharge lamp

126: Mirror

128: (of the housing 116) opening

130: Boundary

132: Boundary portion irradiation

X: Workpiece (photo-alignment film)

W: polarized light

Z: (of polarized light W) irradiation range around

Claims (9)

A polarized light irradiation device comprising a plurality of irradiation heads in which a plurality of light source groups are arranged in a direction perpendicular to a conveying direction of a workpiece, the light source group has a light source and a polarizing element corresponding to the light source, A plurality of the irradiation heads are arranged in a row in the conveying direction of the workpiece, A boundary portion is formed between the polarizing element in one of the light source groups and the polarizing element in another light source group adjacent to the light source group, The boundary portion in one of the irradiation heads is arranged in such a way that the boundary portion in the other irradiation head adjacent to the irradiation head overlaps along the conveying direction of the workpiece, An irradiation boundary portion is formed between irradiation ranges on the workpiece of the polarized light irradiated from the plurality of light source groups included in each of the irradiation heads, The irradiation boundary portion formed by the respective polarized lights irradiated from one of the irradiation heads is arranged so as to be arranged to be opposite to the respective polarized lights irradiated from the other irradiation head adjacent to the irradiation head. The irradiation boundary portions do not overlap along the conveying direction of the workpiece. The polarized light irradiation device according to claim 1, wherein, One light source group is composed of a plurality of light sources and one polarizing element. The polarized light irradiation device according to claim 1 or 2, wherein, The light source includes a discharge lamp and a reflector that reflects light from the discharge lamp. The polarized light irradiation device according to claim 1 or 2, wherein, The light source includes LEDs. The polarized light irradiation device according to claim 1 or 2, wherein, The polarized light irradiation device further includes an adjustment mechanism for adjusting an irradiation angle of the polarized light from the light source group to the workpiece in a direction perpendicular to a conveyance direction of the workpiece. The polarized light irradiation device according to claim 1 or 2, wherein, The polarized light irradiation device further includes a second adjustment mechanism for adjusting an irradiation angle of the polarized light from the light source group with respect to the workpiece to a conveyance direction of the workpiece. The polarized light irradiation device according to claim 1 or 2, wherein, The light source or a box accommodating the light source and the polarizing element is attached to the irradiation head. An exposure device, which has: The polarized light irradiation device described in Claim 1 or 2; and Workpiece conveyor. A polarized light irradiation method of irradiating a workpiece with polarized light from a polarized light irradiation device, The polarized light irradiation device includes a plurality of irradiation heads in which a plurality of light source groups are arranged in a direction perpendicular to the transport direction of the workpiece. The light source group has a light source and a polarizing element corresponding to the light source. The irradiating heads are arranged in a row in the conveying direction of the workpiece, between the polarizing element in one light source group and the polarizing element in another light source group adjacent to the light source group A boundary portion is formed between them, and the boundary portion of one of the irradiation heads overlaps with the boundary portion of the other irradiation head adjacent to the irradiation head along the conveying direction of the workpiece. arrangement, An irradiation boundary portion is formed between irradiation ranges on the workpiece of the polarized light irradiated from the plurality of light source groups included in each of the irradiation heads, The irradiation boundary portion formed by the respective polarized lights irradiated from one of the irradiation heads is arranged so as to be arranged to be opposite to the respective polarized lights irradiated from the other irradiation head adjacent to the irradiation head. The irradiation boundary portions do not overlap along the conveying direction of the workpiece.

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