TW202235459A - 感光化射線性或感放射線性樹脂組成物、感光化射線性或感放射線性膜、圖案形成方法、電子元件的製造方法、化合物、以及樹脂 - Google Patents

感光化射線性或感放射線性樹脂組成物、感光化射線性或感放射線性膜、圖案形成方法、電子元件的製造方法、化合物、以及樹脂 Download PDF

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TW202235459A
TW202235459A TW111101357A TW111101357A TW202235459A TW 202235459 A TW202235459 A TW 202235459A TW 111101357 A TW111101357 A TW 111101357A TW 111101357 A TW111101357 A TW 111101357A TW 202235459 A TW202235459 A TW 202235459A
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Taiwan
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group
sensitive
radiation
resin
formula
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TW111101357A
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Chinese (zh)
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吉村務
小島雅史
後藤研由
楜澤佑真
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日商富士軟片股份有限公司
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TW111101357A 2021-01-22 2022-01-13 感光化射線性或感放射線性樹脂組成物、感光化射線性或感放射線性膜、圖案形成方法、電子元件的製造方法、化合物、以及樹脂 TW202235459A (zh)

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US (1) US20230375925A1 (enExample)
EP (1) EP4282886A4 (enExample)
JP (1) JPWO2022158338A1 (enExample)
KR (1) KR102857260B1 (enExample)
CN (1) CN116783551A (enExample)
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JP2023010602A (ja) * 2021-07-08 2023-01-20 信越化学工業株式会社 ネガ型レジスト材料及びパターン形成方法
WO2023248569A1 (ja) * 2022-06-22 2023-12-28 Jsr株式会社 感放射線性樹脂組成物及びレジストパターン形成方法
KR20250126709A (ko) * 2022-12-28 2025-08-25 제이에스알 가부시키가이샤 감방사선성 조성물 및 레지스트 패턴 형성 방법
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