TW202036775A - Sheet affixation method - Google Patents

Abstract

Provided is a sheet affixation method in which a sheet that changes to a prescribed state through a prescribed deformation due to application of a prescribed energy is employed as a first sheet, an integral object in which an adherend is supported by a frame member with the first sheet and a second sheet interposed therebetween is formed, and no creases are formed in the second sheet even when the prescribed energy is applied in order to change the first sheet to the prescribed state. This affixation method is a method for carrying out: a first sheet readying step for readying a first sheet AS1, which changes to a prescribed state due to having a prescribed energy applied thereto; a second sheet readying step for readying a second sheet AS2; a first affixation step for affixing the first sheet AS1 onto one surface WK1 of an adherend WK; a second affixation step for affixing the second sheet AS2 onto a frame member RF and the first sheet AS1 affixed to the adherend WK, and forming an integral object UP in which the adherend WK is supported by the frame member RF with the first sheet AS1 and the second sheet AS2 interposed therebetween; and an energy application step for applying an energy to the integral object UP and changing the first sheet AS1 to the prescribed state, wherein: the first sheet AS1 is one that changes to the prescribed state through a prescribed deformation due to application of energy; in the first sheet readying step, the first sheet AS1 shaped so as to not protrude beyond the one surface WK1 of the adherend WK is readied, in consideration of the fact that the first sheet AS1 experiences a prescribed deformation due to having energy applied thereto in the energy application step; and in the first affixation step, the first sheet AS1 is affixed to the adherend WK so that the first sheet AS1 does not protrude beyond the one surface WK1 of the adherend WK, in consideration of the fact that the first sheet AS1 experiences a prescribed deformation due to having energy applied thereto in a received energy application step.

Description

Film attaching method

The invention relates to a method for attaching a sheet.

Conventionally, there is known a sheet attaching method in which an adherend is formed to be supported by a body of a frame member via a first sheet and a second sheet (for example, refer to Patent Document 1). [Prior Technical Literature] [Patent Literature]

Patent Document 1: JP 2007-165363 A.

(The problem to be solved by the invention)

However, in the conventional mounting method (sheet attaching method) described in Patent Document 1, if a predetermined state is changed to a predetermined state due to a predetermined deformation such as shrinkage deformation or expansion deformation by applying predetermined energy as the crystal grain structure On the landing part DS (first sheet), the following problem occurs: the formed wafer W (subsequent body) is supported by the ring frame RF (frame member) via the first sheet and the dicing tape DT (second sheet) The one body is given a predetermined energy in order to change the first sheet to a predetermined state. As shown in Figure 1 (C), the deformation of the first sheet causes the wrinkles WV to be deformed in the second sheet. .

The object of the present invention is to provide a sheet attaching method. Even if the sheet attaching method adopts the first sheet as the first sheet by applying a predetermined energy and changing into a predetermined state with a predetermined deformation, the adhered body is formed through the first sheet and The second sheet is supported by a body of the frame member, and is given a predetermined energy in order to change the aforementioned first sheet to a predetermined state, and no wrinkles are formed in the second sheet. (Means to solve the problem)

The present invention adopts the composition described in the scope of the patent application. (Invention effect)

According to the present invention, in consideration of the predetermined deformation of the first sheet due to the application of predetermined energy, in the first sheet preparation step, prepare the first sheet in a shape that does not protrude from one surface of the bonded body, and perform the first attaching step In the method, the first sheet does not protrude from one surface of the adhered body, and the first sheet is attached to one surface of the adhered body, so even if the predetermined energy is applied, the predetermined deformation is changed to a predetermined state As the first sheet, the adhered body is supported by the frame member via the first sheet and the second sheet. Even if a predetermined energy is applied to change the first sheet to a predetermined state, it will not be Sheets form wrinkles.

Hereinafter, an embodiment of the present invention will be described based on the drawings. Furthermore, the X-axis, Y-axis, and Z-axis in this embodiment are in the relationship of being orthogonal respectively, the X-axis and Y-axis are set as the axes in the predetermined plane, and the Z-axis is set as the axis perpendicular to the predetermined plane. . Furthermore, in the present embodiment, the view from the front direction in FIG. 1 parallel to the Y axis is used as a reference. When the direction is shown without specifying the figure, "up" is the arrow direction of the Z axis and "down" is The direction opposite to the direction of the arrow of the aforementioned Z axis, "Left" is the direction of the arrow of the X axis and "Right" is the opposite direction of the arrow of the aforementioned X axis, "Front" is the forward direction in Figure 1 parallel to the Y axis and " "Back" is the opposite direction of the aforementioned front direction.

The sheet attaching method of the present invention can be implemented by the following sheet attaching device EA, for example. That is, the sheet attaching device EA is provided with: a first attaching mechanism 10 that performs a first sheet preparation step and performs a first attaching step. The first sheet preparation step is prepared by applying heat as a predetermined energy The first sheet AS1 that changes, that is, hardens to a predetermined state, the aforementioned first attaching step attaches the first sheet AS1 to one surface WK1 of the adherend WK; the second attaching mechanism 20 implements the preparation of the second sheet AS2 The second sheet preparation step and the second attaching step are performed. The second attaching step is to attach the second sheet AS2 to the first sheet AS1 attached to the adherend WK and the ring frame RF as the frame member to form The adhered body WK is supported by the body UP of the ring frame RF via the first sheet AS1 and the second sheet AS2; and the energy applying mechanism 30 performs an energy applying step of applying heat to the integral body UP to harden the first sheet AS1; In addition, the sheet attaching device EA is arranged in the vicinity of the conveying mechanism 40, and the conveying mechanism 40 performs a conveying step of conveying the adherend WK and the ring frame RF. In addition, for the first sheet AS1, a material that is hardened by applying heat to a predetermined deformation, that is, shrinking and deforming. In addition, it is assumed that the adherend WK has rigidity that does not deform together with the shrinkage deformation of the first sheet AS1. The so-called rigidity refers to the non-deformable nature of objects subjected to external forces such as compression, friction, and torsion.

The first attaching mechanism 10 implements the first cutting step as the first sheet preparation step. The first cutting step is used for the first original sheet RS1 on which the first release sheet RL1 is temporarily attached to the first substrate BS1. The first substrate BS1 forms a closed-loop first cut CU1, and the first sheet AS1 is formed in the area separated by the first cut CU1 to prepare the first sheet AS1, and the first sheet AS1 The other area forms the first useless piece US1. That is, the first attaching mechanism 10 is provided with: a support roller 11 to support the first original sheet RS1; a guide roller 12 to guide the first original sheet RS1; and a cutting mechanism 13 to form a first substrate BS1. Cut CU1; peeling roller 14 for winding the first unnecessary sheet US1; useless sheet recovery roller 15 as a recovery mechanism, which exists between the peeling roller 14 during the automatic operation of the sheet attaching device EA The first unnecessary sheet US1 is always given a predetermined tension, thereby recovering the aforementioned first unnecessary sheet US1; the peeling plate 16 as a peeling mechanism uses the peeling edge 16A to fold back the first peeling sheet RL1, and peeling off the first peeling sheet RL1 A piece of AS1; a pressing roller 17 as a pressing mechanism, pressing and attaching the first piece of AS1 on one surface WK1 of the adhered body WK; a driving roller 18, supported by the unshown output shaft of the rotating motor 18A as a driving machine ，It clamps the first peeling sheet RL1 with the pinch roller 18B; the recovery roller 19 as the recovery mechanism is supported by the output shaft of the driving machine not shown during the automatic operation of the sheet attaching device EA , To always apply a predetermined tension to the first peeling sheet RL1 existing between the pinch roller 18B, thereby recovering the first peeling sheet RL1; and a linear motion motor, not shown, as a driving machine, to make the first peeling sheet RL1 The entire attachment mechanism 10 moves in the front-rear direction. The cutting mechanism 13 is provided with: a die-cutting roller 13C supported by the output shaft 13B of the rotating motor 13A as a driving machine; a flat-shaped cutting knife 13E as a cutting member supported on the circumference of the aforementioned die-cutting roller 13C Surface 13D; and support roller 13F, which rotates synchronously with die cutting roller 13C.

The second attaching mechanism 20 implements a second cutting step as a second sheet preparation step. The aforementioned second cutting step is used for the second original sheet RS2 with the second base material BS2 temporarily attached to the second release sheet RL2. The second sheet of base material BS2 forms a closed-loop second cut CU2, a second sheet AS2 is formed in the area separated by the second cut CU2 to prepare the second sheet AS2, and the second sheet AS2 The area forms a second useless piece US2. That is, the second attaching mechanism 20 is provided with: a support roller 21 to support the second original sheet RS2; a guide roller 22 to guide the second original sheet RS2; and a cutting mechanism 23 to form a second substrate BS2. Cut CU2; peeling roller 24 for winding the second unnecessary sheet US2; useless sheet recovery roller 25 as a recovery mechanism, during the period of automatic operation of the sheet attaching device EA, to the peeling roller 24 The second unnecessary sheet US2 is always given a predetermined tension to recover the second unnecessary sheet US2; the peeling plate 26 as a peeling mechanism uses the peeling edge 26A to fold back the second peeling sheet RL2, and peels off the second peeling sheet RL2. Two pieces of AS2; the pressing roller 27 as a pressing mechanism, presses and attaches the second piece AS2 to the first piece AS1 and the ring frame RF attached to the adherend WK; the driving roller 28 is supported by the rotating machine as the driving machine The output shaft (not shown) of the motor 28A clamps the second peeling sheet RL2 with the pinch roller 28B; and the recovery roller 29 as a recovery mechanism is supported by the output shaft of the driving machine (not shown) for sheet attachment During the automatic operation of the device EA, a predetermined tension is always applied to the second peeling sheet RL2 existing between the pinch roller 28B, and the second peeling sheet RL2 is recovered. The cutting mechanism 23 is provided with: a die-cutting roller 23C supported by the output shaft 23B of a rotating motor 23A as a driving machine; a flat-shaped cutting knife 23E as a cutting member supported on the circumference of the aforementioned die-cutting roller 23C Surface 23D; and support roller 23F, which rotates synchronously with die cutting roller 23C.

The energy imparting mechanism 30 is provided with: a main body box 31 that can accommodate a plurality of integrated objects UP; a box cover 32 that is supported by the output shaft 32B of a linear motion motor 32A as a driving machine, and can open and close the opening 31A of the main body box 31; and The heating mechanism 33 such as the coil heater or the heating side of the heat pipe as the energy generation source is supported on the bottom surface 31B of the main body box 31 and the top surface 32C of the box cover 32, respectively.

The conveying mechanism 40 is equipped with a holding table 42, which is supported by a slider 41A of a linear motor 41 as a driving device, and has a decompression mechanism (holding mechanism) not shown such as a decompression pump or a vacuum ejector for suction Keep the retaining surface 42A.

The sheet attaching method of the present invention implemented by the above sheet attaching device EA will be described. First of all, for the sheet attaching device EA with each member arranged at the initial position shown by the solid line in Fig. 1 (A), the user of the sheet attaching device EA (hereinafter referred to as "user") is as described above After the first original film RS1 and the second original film RS2 are set as shown in the figure, a signal to start operation is input through an operating mechanism not shown such as an operating panel or a personal computer. Then, the first attaching mechanism 10 and the second attaching mechanism 20 drive the rotating motors 13A, 18A and the rotating motors 23A, 28A to rotate the die-cutting rollers 13C, 23C and apply the first substrate BS1 to the second substrate. The base material BS2 forms a first cut CU1 and a second cut CU2. While forming the first sheet AS1, the second sheet AS2, the first unnecessary sheet US1, and the second unnecessary sheet US2, the first original sheet RS1 and the second original sheet are drawn out. Slice RS2.

Here, in the first sheet preparation step, it is considered that the first sheet AS1 shrinks and deforms by applying heat in the energy application step, and the first sheet is formed into a shape that does not protrude from one surface WK1 of the adhered body WK AS1 prepares the aforementioned first piece AS1 (the same applies to the following). Specifically, in the case of the first sheet AS1 of the shape extending from one surface WK1 of the adherend WK, it is predicted that when heat is applied by the energy applying mechanism 30, as shown in FIG. 1(C), since the first The sheet AS1 shrinks and deforms to form wrinkles WV on the second sheet AS2. Therefore, in this embodiment, when one surface WK1 of the adherend WK has a circular shape with a diameter of 300 mm, the first attaching mechanism 10 forms the first sheet AS1 with a circular shape with a diameter of 299 mm. Then, as shown in Figure 1 (A), if the leading end of the first sheet AS1 and the second sheet AS2 in the drawing direction is peeled off by the peeling edges 16A, 26A of the peeling plates 16, 26 by a predetermined length, the first sticker The attachment mechanism 10 and the second attachment mechanism 20 stop the driving of the rotating motors 13A, 18A and the rotating motors 23A, 28A.

Then, as shown in FIG. 1, if a user, a multi-joint robot arm or a conveyor mechanism not shown, such as a belt conveyor, arranges the bonded body WK in the opening RF1 of the ring frame RF. After the frame RF and the adhered body WK are placed on the holding table 42, the conveying mechanism 40 drives a decompression mechanism (not shown) to start suction and holding of the ring frame RF on the holding surface 42A and the adhered body WK. Then, when the transport mechanism 40 drives the linear motor 41 to move the holding table 42 to the left and the adhered body WK reaches a predetermined position relative to the peeling plate 16, the first attaching mechanism 10 drives the rotating motors 13A, 18A , While forming a new cut CU1 in the first substrate BS1, the first original sheet RS1 is drawn out according to the moving speed of the holding table 42. Thereby, as shown by the two-dot chain line in FIG. 1, the first sheet AS1 is peeled off from the first release sheet RL1, and the first sheet AS1 peeled off from the first peeling sheet RL1 is pressed by the pressing roller 17 and attached to the substrate Follow the body WK.

Here, in the first attaching step, considering that the first sheet AS1 shrinks and deforms by applying heat in the energy application step, it is adhered as described above so as not to protrude from one surface WK1 of the adhered body WK. One side WK1 of the body WK is attached to the first piece AS1. Specifically, if the first sheet AS1 is attached in a state where it protrudes from one surface WK1 of the adherend WK, it is predicted that when heat is applied by the energy applying mechanism 30, as shown in (C) in FIG. The shrinkage deformation of one piece of AS1 results in the formation of wrinkles WV on the second piece of AS2. Therefore, in this embodiment, for one surface WK1 of a circular shape with a diameter of 300mm, the outer edge of the first piece AS1 of a circular shape with a diameter of 299mm is located within the range of 0mm to 1mm from the outer edge of the aforementioned surface WK1. The aforementioned first sheet AS1 is attached to one surface WK1 of the adherend WK. At this time, the first attaching mechanism 10 drives a linear motion motor not shown in the figure to move the entire first attaching mechanism 10 in the front-rear direction, and perform the front-rear direction of the first sheet AS1 with respect to one surface WK1 of the adherend WK For the holding table 42 moving to the left, adjust the drive start timing of the rotating motors 13A and 18A to adjust the position of the first sheet AS1 relative to the side WK1 of the adhered body WK. Then, if the leading end portion of the next first sheet AS1 in the drawing direction after the first sheet AS1 is peeled off by the peeling edge 16A of the peeling plate 16 for a predetermined length, the first attaching mechanism 10 stops rotating the motors 13A, 18A The drive.

Next, if the holding table 42 continues to move to the left by the conveying mechanism 40 and the ring frame RF reaches a predetermined position relative to the peeling plate 26, the second attaching mechanism 20 drives the rotating motors 23A, 28A, While forming a new second cut CU2 in the second substrate BS2, the second original sheet RS2 is drawn out according to the moving speed of the holding table 42. As a result, as shown by the two-dot chain line in FIG. 1, the second sheet AS2 is peeled off from the second peeling sheet RL2, and the second sheet AS2 peeled from the second peeling sheet RL2 is pressed by the pressing roller 27 and attached to the ring The shaped frame RF and the first piece AS1 form an integrated object UP. Then, if the leading end portion of the next second sheet AS2 in the drawing direction after the first second sheet AS2 is peeled off by the peeling edge 26A of the peeling plate 26 for a predetermined length, the second attaching mechanism 20 stops rotating the motors 23A, 28A The drive.

Next, when the entire second sheet AS2 is attached to the ring frame RF and the first sheet AS1, and the holding table 42 supporting the integrated object UP reaches a predetermined position to the left of the pressing roller 27, the transport mechanism 40 stops the linear motor After the driving of 41, the driving of the decompression mechanism (not shown) is stopped, and the suction and holding of the ring frame RF and the adherend WK on the holding surface 42A are released. Then, after the user or a conveying mechanism not shown in the figure holds the integrated article UP and stores the above-mentioned integrated article UP in the main body box 31, the conveying mechanism 40 drives the linear motor 41 to return the holding table 42 to the initial position. Next, when the aforementioned actions are repeated to store a predetermined number of objects UP in the main body box 31, the energy imparting mechanism 30 drives the linear motion motor 32A, as shown in FIG. 1(B), the main body is closed by the box cover 32 The opening 31A of the box 31. Then, the energy applying mechanism 30 drives the heating mechanism 33 to apply heat to the integrated object UP for a predetermined time at a predetermined temperature. After the predetermined time has elapsed, after the heating mechanism 33 is stopped, the linear motion motor 32A is driven, and the main body box is released 31 of the opening 31A.

Here, the first sheet AS1 is cured by being given heat for a predetermined time at a predetermined temperature. Specifically, the elastic modulus of about 3 GPa (Giga Pascals) before curing changes to an elastic modulus of about 10 GPa after curing. At this time, the first sheet AS1 intends to harden with shrinkage deformation, but since the adhered body WK has rigidity that does not deform together with the shrinkage deformation of the first sheet AS1, the shrinkage deformation of the first sheet AS1 is due to the adhered body WK The rigidity is prevented, and the wrinkle WV is not formed in the second sheet AS2. Next, the user or a transport mechanism not shown in the figure takes out an object UP stored in the main body box 31, transports the aforementioned integrated object UP to the next step, and repeats the same operations described above.

According to the embodiment described above, considering that heat is applied and the first sheet AS1 shrinks and deforms, in the first sheet preparation step, prepare the first sheet AS1 in a shape that does not protrude from one surface WK1 of the bonded body WK. In the first attaching step, since the first piece AS1 does not protrude from one side WK1 of the adhered body WK, the first piece AS1 is attached to one side WK1 of the adhered body WK, so even if the The first sheet AS1 that is hardened due to shrinkage and deformation by heat is formed as a body UP supported by the bonded body WK via the first sheet AS1 and the second sheet AS2 on the ring frame RF, even if it is used to harden the first sheet AS1 It imparts heat without forming wrinkles on the second sheet AS2.

The mechanisms and steps in the present invention are not limited in any way as long as they can realize the actions, functions, or steps described in the foregoing mechanisms and steps, and are not limited to the simple embodiment shown in the foregoing embodiment at all. Or steps. For example, as long as the energy imparting step is a step that can impart energy to the whole body and change the first piece to a predetermined state, as long as it is within the technical scope based on the technical common sense at the time of the application, there is no limit (other institutions and steps) The same is true).

In the first attaching step and the second attaching step, the first useless sheet US1 and the second useless sheet US2 may not be peeled off from the first peeling sheet RL1 and the second peeling sheet RL2 to support the first sheet AS1 and the second sheet. For the sheet AS2, the first sheet AS1 and the second sheet AS2 may not be wound, but may be supported in a fanfold folded state, for example, when the first peeling sheet RL1 and the second peeling sheet RL2 are recovered, it may not be For winding, such as fan-folding or shredder shredder and recycling, it is also possible to simply gather and recycle without winding or fan-folding, or by using the first substrate BS1 and the second substrate BS2 form a first slit CU1 and a second slit CU2 in the overall width direction of the short strip, and the area separated by the first slit CU1 and the second slit CU2 is referred to as the first sheet AS1 And the second piece AS2, the other areas are set as the first unnecessary piece US1 and the second unnecessary piece US2, and the first original piece RS1 and the second original piece RS2 may not be moved or the cutting member may be moved while moving. The first substrate BS1 and the second substrate BS2 form a first cut CU1 and a second cut CU2. In the first attaching step and the second attaching step, for example, a so-called flat knife, which is far and close to the first substrate BS1 and the second substrate BS2, can be used as a cutting member, or a pair of die cutting rolls 13C, 23C The cutting blades 13E, 23E that can be detached or cannot be detached. The pressing roller 17 and the pressing roller 27 can also be kept away from the body WK to prevent stress or damage to the body WK. It can also replace the pressing roller. 17, 27, and the first piece AS1 is held by a holding member that is supported by the output shaft of the linear motion motor as a driving machine and can be adsorbed and held by a pressure reducing mechanism not shown such as a pressure reducing pump or a vacuum ejector And the second sheet AS2, pressing and attaching the first sheet AS1 and the second sheet AS2 held by the holding member to the adherend WK. In the first attaching step, imaging mechanisms such as cameras or projectors, or detection mechanisms such as various sensors such as optical sensors or ultrasonic sensors can also be used to detect the body that is moving to the left. Based on the detection result of the aforementioned detection mechanism, the position of one side of WK WK1, the position of WK1 and the extracted first piece AS1, the first attachment mechanism 10 drives the linear motion motor not shown, and adjusts the rotary motors 13A, 18A The drive start timing is to attach the first sheet AS1 so as not to protrude from one surface WK1 of the adhered body WK. Furthermore, when the position of the side WK1 of the adhered body WK that is moving to the left is fixed, the detection mechanism may not detect the position of the side WK1 of the adhered body WK, and the position of the first piece AS1 extracted is fixed. In this case, the detection mechanism may not detect the position of the first piece AS1, but when the position of one side WK1 of the adhered body WK that is moving to the left, and the position of the first piece AS1 extracted are fixed, The mechanism may not detect the position of one surface WK1 of the adhered body WK and the position of the first sheet AS1.

The first sheet preparation step may not be performed by the first attaching mechanism 10. For example, the first original sheet RS1 may be used to temporarily adhere the first sheet AS1 of a predetermined shape to the first release sheet RL1. A cutting step may not be implemented. Furthermore, in the foregoing case, considering that the first sheet AS1 shrinks and deforms by applying heat in the energy application step, prepare the first sheet AS1 in a shape that does not protrude from one surface WK1 of the bonded body WK. The second sheet preparation step may not be performed by the second attaching mechanism 20. For example, the second original sheet RS2 may be used to temporarily attach the second sheet AS2 of a predetermined shape to the second release sheet RL2. In the foregoing case, the first The second cutting step may not be implemented.

The energy imparting step can be implemented by one or more than three energy generation sources, and can also be implemented by using the box 31 or the box cover 32 without a main body. In the energy applying step, the energy generating source may be used to locally apply energy to the first piece AS1, so that the energy generating source and the first piece AS1 move relative to each other to apply energy to the entire first piece AS1, or the first piece AS1 AS1 gives energy all at once. In the energy application step, the time or amount of energy to irradiate the first sheet AS1 with energy can be arbitrarily determined in consideration of the characteristics, characteristics, properties, materials, composition, and composition of the first sheet AS1. The energy imparting step can also be implemented using electromagnetic waves such as ultraviolet, infrared, visible light, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air as predetermined energy, or negative heat such as cold water or cold air. The characteristics, characteristics, properties, material, composition and composition of a piece of AS1 can arbitrarily determine the predetermined energy. In the energy application step, a concentrating plate or a collecting plate can also be used to concentrate the predetermined energy on the first AS1. LED (Light Emitting Diode) lamps, high pressure mercury lamps, low pressure mercury lamps, Metal halide lamps, xenon lamps, halogen lamps, etc. generate energy in any way to impart energy to the first piece of AS1. The aforementioned LED lamps, high-pressure mercury lamps, low-pressure mercury lamps, metal halide lamps, xenon lamps, and halogen lamps can also be appropriately combined to produce Energy is given to the first piece of AS1. When the energy application step is implemented by other devices, the energy application step may not be implemented in the sheet attaching method of the present invention.

In the transport step, the first sheet AS1 and the second sheet AS2 may be attached to the adherend WK without moving the adherend WK or move the first attaching mechanism 10 and the second attaching mechanism 20 while moving. Alternatively, the adherend WK or the ring frame RF may not be sucked and held by the holding table 42. When the conveying step is performed by other devices, the conveying step may not be performed in the sheet attaching method of the present invention.

The shape of one surface WK1 of the adherend WK can be a round shape of 300 mm or more, or a round shape of less than 300 mm. Regarding the shape of the first sheet AS1 prepared in the first sheet preparation step, for example, for a round shape with a diameter of 300mm, one surface WK1 of the bonded body WK can be a round shape with a diameter of 300mm, or a diameter such as 299.5mm or 280mm. The round shape of 300mm or less can also be a shape other than a round shape such as a triangle, a polygonal shape of a square or more, an oval shape, etc. The shape of one surface WK1 of the bonded body WK may also be a shape other than a circle such as a triangle, a polygon of a quadrangle or more, or an ellipse. The shape of the first sheet AS1 prepared for the adherend WK having such one side WK1 may also be a shape other than a circle such as a triangle, a polygon of a quadrangle or more, and an ellipse. For example, the first elliptical piece AS1 may be prepared for one side WK1 of the quadrangular shape, or the first pentagonal piece AS1 may be prepared for one side WK1 of the ellipse. The predetermined deformation of the first sheet AS1 caused by the application of energy can be any deformation such as expansion deformation, expansion deformation, contraction deformation, contraction deformation, meandering deformation, and strain deformation. The so-called change of the first sheet AS1 to a predetermined state caused by the application of energy can be, for example, the change of increasing or decreasing the hardness or strength of the aforementioned first sheet, the change of increasing or decreasing the volume or volume of the aforementioned first sheet, Changes in the increase or decrease of the adhesion of the first sheet to the adherend, changes in the color of the first sheet, changes in the temperature rise or fall of the first sheet, changes in the softening or melting of the first sheet, etc. The change. As an example of the first sheet that changes to a predetermined state due to a predetermined deformation by applying energy, for example, it is exemplified that by applying heat or infrared rays as predetermined energy, the volume increases due to expansion deformation or expansion deformation, etc. The thing; or by the application of air-conditioning or refrigerant as a predetermined energy, the volume is reduced with shrinkage deformation or shrinking deformation, etc.; or by the application of ultraviolet rays as predetermined energy, which is accompanied by expansion, deformation, shrinkage and expansion Deformation, shrinkage deformation, meandering deformation or strain deformation, etc., which reduce the adhesion to the adherend or the color fades; or by giving predetermined energy infrared or ultrasonic waves, accompanied by expansion deformation or expansion deformation, etc. The temperature rises or softens, but the first sheet can be anything as long as it is given energy and changes to a predetermined state with a predetermined deformation. The frame member may be ring-shaped or not, and may have any shape. The sheet attaching method of the present invention can also be implemented by a device other than the sheet attaching device EA or manually.

The material, type, shape, etc. of the first sheet AS1, the second sheet AS2, and the adherend WK in the present invention are not particularly limited. For example, the first sheet AS1 and the second sheet AS2 can also be pressure-sensitive adhesive, heat-sensitive adhesive and other adhesive forms. In the case of the first sheet AS1 and the second sheet AS2 with thermal adhesive, just use the setting pair The first sheet AS1 and the second sheet AS2 may be heated by an appropriate method of heating mechanism such as an appropriate coil heater or the heating side of the heat pipe. In addition, the first sheet AS1 and the second sheet AS2 may be, for example, a single layer of only the adhesive layer, a thing with an intermediate layer between the substrate and the adhesive layer, and a cover on the upper surface of the substrate. Layers and other three or more layers, and the so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer. The double-sided adhesive sheet may have a single-layer or multiple-layer intermediate layer, or none Single layer or multiple layers in the middle layer. In addition, as the adherend WK, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers or compound semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, ceramics, wood boards, resins, etc. The single substance may also be a composite formed by two or more of the foregoing, and any form of member or article may also be targeted. Furthermore, the first sheet AS1 and the second sheet AS2 can also be replaced with functional and useful titles, such as labels for information recording, labels for decoration, protection sheets, dicing tape, die bonding Any sheet, film, tape, etc. such as die attach film, die attach tape, and recording layer forming resin sheet.

The driving machine in the foregoing embodiment can use rotary motors, linear motion motors, linear motors, single-axis robotic arms, multi-joint robotic arms with two-axis or three-axis or more joints, such as electric machines, air cylinders, hydraulic cylinders, and Actuators such as rodless cylinders and rotary cylinders, etc., and machines obtained by directly or indirectly combining the foregoing can also be used. In the foregoing embodiment, when a rotating member such as a roller is used, a driving device that drives the rotating member may be provided, or a deformable member such as rubber or resin may be used to form the surface of the rotating member or the rotating member itself It can also use non-deformable components to form the surface of the rotating component or the rotating component itself, or use rotating or non-rotating shafts or blades instead of rollers, and use pressing rollers or pressing heads, etc. When the pressing mechanism or pressing member presses the member to be pressed, instead of the above-exemplified member or in combination, it is possible to use rollers, rods, blade materials, rubber, resin, rubber, etc., or use air or gas ( Gas) and other gas blowing to press the structure, can also use rubber or resin and other deformable members to form the pressing member, can also be constructed with non-deformable members, in the use of peeling plate or peeling roller or other peeling mechanism or peeling In the case of peeling off a member such as a member, a plate-shaped member, round rod, roller, etc. may be used instead of the above-exemplified configuration or in combination, or a deformable member such as rubber or resin may be used to form the peeling member. It can also be constructed with non-deformable members. When supporting (holding) the supported member (member to be held) such as a supporting (holding) mechanism or supporting (holding) member, mechanical clamping or Clamp cylinder (chunk cylinder) and other holding mechanisms, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli (Bernoulli) adsorption, suction adsorption, drive The structure of supporting (holding) the supported member by a machine, etc., can be used instead of the above when a cutting mechanism or cutting member is used to cut the member to be cut, or when the member to be cut is formed with a cut or cutting line. The exemplified components or the combined use use components that are cut by cutting blades, laser cutters, ion beams, firepower, heat, water pressure, electric heating wires, gas or liquid, etc., or by combining them with The machine obtained by appropriately driving the machine moves the cutting member to perform cutting.

10: The first attachment agency 11.21: Support roller 12, 22: guide roller 13, 23: Cut off mechanism 13A, 18A, 23A, 28A: rotating motor 13B, 23B, 32B: output shaft 13C, 23C: Die cutting roll 13D, 23D: circumferential surface 13E, 23E: cutting knife 13F, 23F: Support roller 14, 24: peeling roller 15, 25: Useless sheet recovery roller 16, 26: Peel board 16A, 26A: Peeling edge 17, 27: pressing roller 18, 28: drive roller 18B, 28B: pinch roller 19, 29: Recovery roller 20: The second attachment mechanism 30: Energy Endowment Mechanism 31: Body box 31A: Opening 31B: bottom surface 32: cover 32A: Linear motion motor 32C: Top surface 33: heating mechanism 40: handling mechanism 41: Linear motor 41A: Slider 42: hold the stage 42A: Keep the surface AS1: the first piece AS2: second piece BS1: The first substrate BS2: The second substrate CU1: First cut CU2: second incision EA: Chip attaching device RF: Ring frame (frame member) RF1: Opening RL1: The first release sheet RL2: The second release sheet RS1: The first original film RS2: The second original film UP: One thing US1: The first useless piece US2: The second useless piece WK: The body is followed WK1: One side WK2: the other side WV: Wrinkle

(A) to (C) in FIG. 1 are explanatory diagrams of the present invention.

10: The first attachment agency

11.21: Support roller

12, 22: guide roller

13, 23: Cut off mechanism

13A, 18A, 23A, 28A: rotating motor

13B, 23B, 32B: output shaft

13C, 23C: Die cutting roll

13D, 23D: circumferential surface

13E, 23E: cutting knife

13F, 23F: Support roller

14, 24: peeling roller

15, 25: Useless sheet recovery roller

16, 26: Peel board

16A, 26A: Peeling edge

17, 27: pressing roller

18, 28: drive roller

18B, 28B: pinch roller

19, 29: Recovery roller

20: The second attachment mechanism

30: Energy Endowment Mechanism

31: Body box

31A: Opening

31B: bottom surface

32: cover

32A: Linear motion motor

32C: Top surface

33: heating mechanism

40: handling mechanism

41: Linear motor

41A: Slider

42: hold the stage

42A: Keep the surface

AS1: the first piece

AS2: second piece

BS1: The first substrate

BS2: The second substrate

CU1: First cut

CU2: second incision

EA: Chip attaching device

RF: Ring frame (frame member)

RF1: Opening

RL1: The first release sheet

RL2: The second release sheet

RS1: The first original film

RS2: The second original film

UP: One thing

US1: The first useless piece

US2: The second useless piece

WK: The body is followed

WK1: One side

WK2: the other side

WV: Wrinkle

Claims (3)

A method for attaching a piece of film, which implements the following steps: The first piece preparation step, preparing the first piece that is changed into a predetermined state by being given a predetermined energy; The second piece preparation step, prepare the second piece; In the first attaching step, attach the aforementioned first sheet to one side of the adherend; The second attaching step is to attach the second sheet to the first sheet and the frame member that have been attached to the bonded body, and form the bonded body to be supported by the frame via the first sheet and the second sheet A component; and The energy imparting step is to impart the energy to the one body to change the first piece to a predetermined state; The aforementioned first piece is changed into a predetermined state with a predetermined deformation by the aforementioned energy; In the first sheet preparation step, considering that the energy is applied in the energy application step to cause the first sheet to undergo the predetermined deformation, the first sheet having a shape that does not protrude from one surface of the adhered body is prepared ； In the first attaching step, considering that the predetermined deformation of the first sheet occurs by applying the energy in the energy applying step, so as not to protrude from one surface of the adhered body, The first sheet is attached to one side of the adhered body. The sheet attaching method described in claim 1, wherein in the first sheet preparation step, the first cutting step is used to temporarily attach the first original sheet with the first base material to the first release sheet , Forming a closed-loop first cut in the first sheet of base material, and forming the first sheet in the area separated by the first cut to prepare the first sheet. The sheet attaching method according to claim 1 or 2, wherein in the second sheet preparation step, the second cutting step is used for temporarily attaching the second release sheet to the second substrate. For the original sheet, a closed-loop second slit is formed in the second substrate, and the second sheet is formed in a region separated by the second slit to prepare the second sheet.

Images