JP2023050670A - Sheet sticking device and sheet sticking method - Google Patents

Abstract

To provide a sheet sticking device and a sheet sticking method, capable of preventing a sticking failure from occurring in an adhesive sheet deformed to a prescribed planar shape and stuck to an adherend as much as possible.SOLUTION: A sheet sticking device EA comprises supplying means 10 for supplying an elastically deformable adhesive sheet AS, sheet holding means 20 for holding the adhesive sheet AS, pressing means 30 for pressing the adhesive sheet AS to an adherend WK, and tension applying means 40 for applying prescribed tension to the adhesive sheet AS. The sheet holding means 20 comprises a sheet holding member 22 including a sheet holding surface 22B and a sheet pressing surface 22C. The tension applying means 40a warps a protruding region ASH of the adhesive sheet AS in a direction of a sheet pressing surface 22C by holding the adhesive sheet AS in the sheet holding member 22 by applying prescribed tension to the adhesive sheet AS, and deforms the protruding region ASH to a prescribed planar shape to form a sticking surface AS3 stuck to the adherend WK.SELECTED DRAWING: Figure 1

Description

The present invention relates to a sheet sticking device and a sheet sticking method.

A sheet sticking device that deforms an adhesive sheet into a predetermined planar shape and sticks it to an adherend is known (see, for example, Patent Document 1).

JP 2012-84578 A

In the sheet sticking device 1 (sheet sticking device) described in Patent Document 1, the planar shape of the double-sided adhesive tape S (adhesive sheet) is deformed into an arc shape and stuck to the wafer W (adherend). Due to the difference between the length and the length of the outer side of the arc, the adhesive sheet attached to the adherend may cause wrinkles or air bubbles on the inner side of the arc, resulting in poor adhesion.

SUMMARY OF THE INVENTION An object of the present invention is to provide a sheet sticking device and a sheet sticking method that can prevent sticking defects from occurring in an adhesive sheet that is deformed into a predetermined planar shape and stuck to an adherend as much as possible.

The present invention employs the configurations described in the claims.

According to the present invention, by holding the adhesive sheet to which tension is applied by the sheet holding member, the protruding region is deformed into a predetermined planar shape to form the sticking surface. It is possible to prevent, as much as possible, the occurrence of defective attachment of the adhesive sheet attached to the body.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram of a sheet sticking device according to an embodiment of the present invention and an explanatory diagram of operation of the same device;

An embodiment of the present invention will be described below with reference to the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Furthermore, in the present embodiment, when viewed from the front in FIG. 1 parallel to the Y-axis, when the direction is indicated without designating the drawing, "up" is the direction of the arrow of the Z-axis and "down". is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the direction parallel to the Y axis in FIG. 1, and "rear" is the opposite direction. Note that since FIGS. 1C to 1I are views viewed from the same direction as FIG. 1B, arrows indicating directions are omitted.

The sheet sticking apparatus EA of the present invention comprises a supply means 10 for carrying out a supply step of supplying an elastically deformable adhesive sheet AS, and an opposite side of the adhesive surface AS1 of the adhesive sheet AS supplied by the supply means 10. A sheet holding means 20 for carrying out a sheet holding step of holding the adhesive sheet AS while coming into contact with the adhesive surface AS2, and a pressing step of pressing the adhesive sheet AS held by the sheet holding means 20 against the adherend WK. a tension applying means 40 for applying a predetermined tension to the adhesive sheet AS, and an energy applying means for applying heat as a predetermined energy to the adhesive sheet AS. 50, in the vicinity of an adherend supporting means 60 for carrying out an adherend supporting process for supporting the adherend WK and a width adjusting means 70 for carrying out a width adjusting process for adjusting the width of the sticking surface AS3. are placed.
The adherend WK of this embodiment has a circular shape centered on the reference position WKR.
Also, the adhesive sheet AS is made of a material that is softened by heat as predetermined energy.

The supply means 10 is supported by an output shaft 11A of a rotating motor 11 as a driving device, and includes a base member 12 that directly or indirectly supports each member constituting the supply means 10, and an adhesive sheet AS that is a release sheet. A support roller 13 that supports the original sheet RS temporarily adhered to the RL, a guide roller 14 that guides the original sheet RS, and a release edge 15A that folds back the release sheet RL and separates the adhesive sheet AS from the release sheet RL. It is supported by a peeling plate 15 as means and an output shaft (not shown) of a rotating motor 16A as a driving device, and is supported by a driving roller 16 that sandwiches the peeling sheet RL with a pinch roller 16B and an output shaft of the driving device (not shown). , while the sheet sticking apparatus EA is automatically operated, a collection roller 17 as a collection means for collecting the release sheet RL by constantly applying a predetermined tension to the release sheet RL existing between the pinch roller 16B and the pinch roller 16B. and length adjusting means 18 as cutting means for adjusting the length of the adhesive sheet AS to be attached to the adherend WK.
The length means 18 includes an air cylinder 18A as a driving device and a cutter blade 18C supported by its output shaft 18B.
In this embodiment, the planar shape of the adhesive sheet AS cut by the length adjusting means 18 is a rectangle.

The sheet holding means 20 includes a rotating motor 21 as a driving device, a truncated cone-shaped sheet holding member 22 supported by an output shaft 21A of the rotating motor 21, and a linear motion motor 23 as a driving device supported by the sheet holding member 22. and a gripping member 24 (holding means) which is supported by the output shaft 23A and enters into a concave portion 22A formed in the sheet holding member 22 to grip the adhesive sheet AS. The surface of the gripping member 24 facing the concave portion 22A is subjected to a non-adhesive treatment in which fluorine resin, silicon, or the like is laminated.
The sheet holding member 22 includes a sheet holding surface 22B that contacts a portion of the adhesive sheet AS to hold the adhesive sheet AS, and a sheet pressing surface that presses the adhesive sheet AS against the adherend WK when pressed by the pressing means 30. 22C.
In the present embodiment, the sheet holding means 20 is configured such that the adhesive sheet AS is in a ring shape (annular shape in the present embodiment) (a state in which the feeding direction leading end portion and the feeding direction trailing end portion of the adhesive sheet AS are connected). It is designed to hold.
The sheet pressing surface 22C and the lower surface of the gripping member 24 are made of an elastically deformable member such as rubber or resin. The center of rotation of the output shaft 21A and the center of rotation of the sheet holding member 22 coincide with the center axis 22L of the holding member. Further, the sheet pressing surface 22C can be adsorbed and held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector.

The pressing means 30 includes a direct-acting motor 31 as a driving device that supports the rotary motor 21 with an output shaft 31A.

The tension applying means 40 includes a rotating motor 41 as a driving device capable of torque control supported by the base member 12, a driving roller 42 supported by an output shaft (not shown) of the rotating motor 41, and a raw sheet RS. and a pinch roller 43 for sandwiching the sheet, and applying a predetermined tension to the adhesive sheet AS positioned between the supply means 10 and the sheet holding means 20 to hold the adhesive sheet AS on the sheet holding member 22, whereby the sheet The protruding region ASH of the adhesive sheet AS that is not held by the holding surface 22B is warped in the direction of the sheet pressing surface 22C, and the warped protruding region ASH is deformed into an annular shape as a predetermined planar shape and adhered to the adherend WK. It forms a sticking surface AS3.

The energy applying means 50 includes a heating device 51 such as a coil heater or a heating side of a heat pipe disposed inside the sheet holding member 22 .

The adherend support means 60 is supported by a slider 61A of a linear motor 61 as a drive device, and has a support table having a holding surface 62A that can be held by suction by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector. 62.
The support table 62 is formed with an annular recessed groove 62B that opens to a holding surface 62A. It is possible to individually suck and hold by two systems with the outer side which is the outside of the concave groove 62B.

The width adjustment means 70 includes a linear motion motor 71 as a driving device arranged in the groove 62B of the support table 62, and an annular cutting blade 72 as a cutting means supported by its output shaft 71A. ing. The center of the groove 62B and the cutting blade 72 coincides with the table center axis 62L passing through the center of the support table 62. As shown in FIG.

The operation of the above sheet sticking apparatus EA will be described.
First, the user of the sheet sticking device EA (hereinafter simply referred to as "user") is directed to the sheet sticking device EA in which each member is arranged at the initial position indicated by the solid line in FIGS. After the raw fabric RS is set as shown in the figure, a signal for starting automatic operation is inputted via an operation means (not shown) such as an operation panel or a personal computer. Then, the feeding means 10 and the tension applying means 40 drive the rotating motors 16A and 41, and the original sheet RS is fed out, and the leading edge of the adhesive sheet AS in the feeding direction is peeled off as indicated by the solid line in FIG. 1(A). When the peeling edge 15A of the plate 15 peels off a predetermined length, the rotation motors 16A and 41 are stopped. Next, when a user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the integrated object UP supporting the adherend WK with the frame member RF via the support tape ST on the support surface 62A, The object support means 60 drives the decompression means (not shown) to start holding the support surface 62A at the central portion and the outer portion by suction. At this time, the user or a transport means (not shown) places the integral object UP on the support table 62 so that the table central axis 62L and the reference position WKR of the adherend WK are aligned.

After that, the supply means 10, the tension applying means 40 and the energy applying means 50 drive the rotating motors 16A and 41 and the heating device 51 to let out the original fabric RS, as indicated by the chain double-dashed line in FIG. 1(A). When the tip of the adhesive sheet AS in the delivery direction is positioned between the recess 22A and the gripping member 24, the rotation motors 16A and 41 are stopped. Next, the sheet holding means 20 drives the direct-acting motor 23, and as shown in FIG. drives the rotation motor 11, and as shown in FIG. 1(D), the base member 12 is tilted in a direction in which the lower portion of the adhesive sheet AS approaches the sheet pressing surface 22C. Then, the supply means 10, the sheet holding means 20, and the tensioning means 40 drive the rotation motors 16A, 21, and 41 to supply the adhesive sheet AS, and rotate the sheet holding member clockwise when viewed from above. 22 is rotated to wind the adhesive sheet AS around the sheet holding member 22 . As a result, part of the adhesive sheet AS contacts the sheet holding surface 22B and is held by the sheet holding member 22, and the portion of the adhesive sheet AS that is not held by the sheet holding surface 22B becomes the protruding area ASH. .

When the adhesive sheet AS is held by the sheet holding member 22, the tension applying means 40 detects the torque applied from the adhesive sheet AS via the drive roller 42, and the torque is always kept at a predetermined value. By supplying the sheet AS, tension is applied to the adhesive sheet AS in the supply direction SD. The elastically deformable adhesive sheet AS wound around the sheet holding member 22 with the tension applied by the tension applying means 40 as described above is pushed out as shown in FIG. The area ASH is warped in the direction of the sheet pressing surface 22C, and an annular sticking surface AS3 is formed from the warped protruding area ASH.

Next, the rotation of the sheet holding member 22 is continued, and when the anti-adhesion surface AS2 of the rear portion of the adhesive sheet AS adheres to the adhesion surface AS1 of the leading end portion of the adhesive sheet AS in the delivery direction, the supply means 10 drives the air cylinder 18A. Then, the cutting blade 18C is moved back and forth to cut the adhesive sheet AS. After that, when the leading end of the adhesive sheet AS newly formed by this cutting is peeled off by the peeling edge 15A of the peeling plate 15 for a predetermined length, the supply means 10, the sheet holding means 20, the tension applying means 40 and the The energy application means 50 stops driving the rotary motors 16A, 21, 41 and the heating device 51. As a result, the adhesive sheet AS is held by the sheet holding member 22 with the sticking surface AS3 positioned below the sheet pressing surface 22C, as shown in FIG. 1(F). At this time, no slack is formed inside the arc on the sticking surface AS3. In the present embodiment, the energy imparting means 50 drives the heating device 51 to soften the adhesive sheet AS, so that the outer side of the arc of the sticking surface AS3 is efficiently pulled, and the protruding area ASH becomes the sheet pressing surface 22C. It becomes easy to warp so that it approaches .

Next, the adherend support means 60 drives the linear motor 61 to move the support table 62 to the right so that the table central axis 62L (the reference position WKR of the adherend WK) and the holding member central axis 22L are aligned. Then, the driving of the linear motor 61 is stopped. Then, the pressing means 30 drives the direct-acting motor 31 to lower the sheet holding member 22, and as shown in FIG. After pressing and sticking to the adherend WK and the support tape ST, the width adjusting means 70 drives the direct-acting motor 71 to raise and lower the cutting blade 72 as shown in FIG. The adhesive sheet AS is cut. Subsequently, the sheet holding means 20 drives the decompressing means (not shown) and the direct-acting motor 23 to start holding the sheet by suction on the sheet pressing surface 22C. stops driving the decompressing means (not shown) and releases the suction holding at the central portion of the support surface 62A.

After that, the pressing means 30 drives the direct-acting motor 31 to return the sheet holding member 22 to the initial position as shown in FIG. Then, the adherend integral WK1 having the adhered surface AS3 of the adhesive sheet AS adhered to the upper surface thereof is separated from the support surface 62A. Next, the sheet holding means 20 stops driving the decompressing means (not shown), releases the suction holding on the sheet pressing surface 22C, and transfers the integrated adherend WK1 to the user or the conveying means (not shown). The attachment support means 60 stops driving the depressurizing means (not shown), and the suction and holding on the outer side of the support surface 62A is released. Then, when the residual portion of the integrated object UP left on the support surface 62A is removed by a user or a transport means (not shown), the supply means 10 and the adherend support means 60 drive the rotation motor 11 and the linear motor 61. Then, the base member 12 and the support table 62 are returned to their initial positions, and the same operations as described above are repeated thereafter.

According to the embodiment as described above, the adhesive sheet AS to which tension is applied is held by the sheet holding member 22, so that the sticking surface AS3 is formed by deforming the protruding region ASH into an annular shape. It is possible to prevent, as much as possible, the occurrence of sticking defects in the adhesive sheet AS that is deformed in shape and stuck to the adherend WK.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. The process is not limited at all. For example, the supply means may be any means as long as it can supply an adhesive sheet that can be elastically deformed, and is not limited at all as long as it is within the technical scope in light of the common general knowledge at the time of filing. (Other means and steps are the same).

The supply means 10 is formed by forming a closed-loop shape or a notch in the entire short width direction in the strip-shaped adhesive sheet base material temporarily attached to the strip-shaped release sheet RL, so that a predetermined region partitioned by the cut is formed. may be supplied by peeling off the adhesive sheet AS from the original fabric RS that is the adhesive sheet AS, or a strip-shaped adhesive sheet raw fabric in which a strip-shaped adhesive sheet base material is temporarily attached to a strip-shaped release sheet RL is adopted. Then, in the middle of unwinding the strip-shaped adhesive sheet material, a closed-loop cut or a cut in the entire short width direction is formed in the adhesive sheet base material by a cutting blade as a cutting means, and a predetermined area partitioned by the cut is formed. may be supplied by peeling the adhesive sheet AS from the raw fabric RS that is the adhesive sheet AS, or the strip-shaped adhesive from the raw fabric RS in which the strip-shaped adhesive sheet AS is temporarily attached to the strip-shaped release sheet RL. The sheet AS may be peeled and supplied, or the adhesive sheet AS may be peeled and supplied from, for example, a fanfold-folded original sheet RS without being wound, or may be supplied without being wound. For example, a recovery means may be employed to recover the release sheet RL by fanfold folding, shredding with a shredder or the like, or carelessly accumulating the release sheet RL. The adhesive sheet AS that is not temporarily attached to the RL may be drawn out and supplied, or the rotation motor 11 may be omitted. The base member 12 does not need to be tilted so as to approach the pressing surface 22C, and the planar shape of the adhesive sheet AS cut by the length adjusting means 18 is determined by the shape of the cutter blade 18C and the side of the adhesive sheet AS in the delivery direction. Depending on the shape, it may be triangular, polygonal with pentagon or more, circular, elliptical, or any other shape. The length adjusting means 18 may or may not be provided in the case of forming the adhesive sheet AS of a predetermined length in the course of unwinding the original sheet.

The sheet holding means 20 may move the supply means 10 without rotating the sheet holding member 22 or while rotating the sheet holding member 22 to wind the adhesive sheet AS around the sheet holding member 22. Alternatively, the adhesive sheet AS may be wound around the sheet holding member 22. , an elliptical columnar shape, a polygonal columnar shape such as a triangle or a square, a flat plate shape, a spherical shape, a hemispherical shape, or other shapes, and the outer edge shape of the sheet pressing surface 22C may be, for example, It may be elliptical, polygonal such as triangular, quadrangular, or other shape, or the adhesive sheet AS may be placed in a non-circular state in which the leading end in the feeding direction and the trailing end in the feeding direction are not connected. Alternatively, at least one of the sheet pressing surface 22C and the lower surface of the gripping member 24 may be made of a material that cannot be elastically deformed, such as metal or pottery, or the sheet pressing surface 22C may adsorb and hold the sheet pressing surface 22C. Alternatively, instead of or in combination with the holding means for holding the adhesive sheet AS between the recess 22A and the holding member 24, for example, a decompression pump or a vacuum may be provided through a suction hole formed in the sheet holding surface 22B. Holding means for holding the adhesive sheet AS by depressurizing means such as an ejector may be employed.

The pressing means 30 may press the adhesive sheet AS against the adherend WK by moving the adherend WK without moving the adhesive sheet AS or while moving the adhesive sheet AS. The sheet holding member 22 may be lowered to press the adhesive sheet AS against the adherend WK without stopping the movement of the adhesive sheet 62 .

The tension applying means 40 may warp the protruding region ASH toward the sheet pressing surface 22C and bring the protruding region ASH into contact with the sheet pressing surface 22C to form the sticking surface AS3, or may bend the protruding region ASH to the sheet pressing surface 22C. The adhesive sheet AS may be formed without abutting on the adhesive sheet AS. Considering the conditions, the magnitude and direction of the predetermined tension applied to the attachment sheet AS can be arbitrarily changed. It may be supported by another support member, or, for example, by moving at least one of the supply means 10 and the sheet holding means 20 away from the other, or by slidably gripping the adhesive sheet AS, the supply means may be moved. Adhesive sheet AS located between 10 and sheet holding means 20 may be tensioned.
The shape of the sticking surface AS3 formed by the tensioning means 40 may be, for example, an elliptical ring shape, a polygonal ring shape such as a triangular ring shape or a square ring shape, or another annular shape. It may be a non-annular shape in which the portion is not connected to the rear end portion in the delivery direction, or may be an elliptical shape, a polygonal shape such as a triangle or a square, or any other shape.

The energy applying means 50 may apply various energies to the adhesive sheet AS from outside the sheet holding member 22 without being arranged inside the sheet holding member 22, or may be a multi-joint robot as a driving device, It may be supported by another support member, or may be applied with electromagnetic waves such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays, or gamma rays as predetermined energy, or may be applied with hot water, hot air, cold water, cold air, etc. It can be arbitrarily determined in consideration of the characteristics, characteristics, properties, materials, composition, configuration, etc. of the adhesive sheet AS. It is possible to arbitrarily change the amount, intensity, etc. of the predetermined energy to be applied to the attachment sheet AS in consideration of various conditions such as shape, size, weight, atmospheric conditions, and other factors. may or may not be provided in the sheet sticking apparatus EA.

The adherend support means 60 may employ a support table 62 capable of holding by suction at least one of the central portion and the outer portion of the holding surface 62A. A support table 62 having a holding surface 62A that can be individually sucked and held by more than one system may be employed, or a support table 62 that has a holding surface 62A that can be sucked and held by only one system may be employed. , the support table 62 that cannot be held by suction on the holding surface 62A may be employed, and the sheet sticking apparatus EA of the present invention may or may not be provided with it.

The width adjustment means 70 may be supported by, for example, an articulated robot as a driving device or other members without being supported by the support table 62, or may have a straight cutting blade instead of an annular shape. The width of the sticking surface AS3 may be adjusted by moving the cutting means along a circular orbit or other shaped orbit, or the sticking surface may be adjusted while being supported by the sheet holding member 22 before sticking to the adherend WK. The width of AS3 may be adjusted, or after attaching the adhesive sheet AS to the adherend WK and separating the sheet holding member 22 from the attaching surface AS3, the width of the attaching surface AS3 may be adjusted. Then, the width of the sticking surface AS3 may be adjusted by cutting means from the adhesive surface AS1 side of the adhesive sheet AS, or the width of the sticking surface AS3 may be adjusted by cutting means from the opposite adhesive surface AS2 side of the adhesive sheet AS. Alternatively, it may or may not be provided in the sheet sticking apparatus EA of the present invention.

The sheet sticking apparatus EA may move the sheet holding member 22 without moving the adherend WK or while moving the adherend WK to align the adherend WK and the adhesive sheet AS. .

In the adhesive sheet AS, the entire protruding region ASH may serve as the sticking surface AS3, or a part of the protruding region ASH may serve as the sticking surface AS3. Alternatively, it may be softened by applying electromagnetic waves such as gamma rays, or heat such as hot water, hot air, cold water, cold air, or the like as predetermined energy, or it may not be softened by the predetermined energy.
The adherend WK may not be supported by the frame member RF, may not be adhered with the support tape ST, or may have another adhesive sheet on at least one of one surface and the other surface. It may be attached, or may be supported by an adherend supporting member such as metal, glass, or resin, or may not be supported by anything, or may be attached to nothing. .
The frame member may be circular, elliptical, triangular, square or more polygonal annular, non-cyclic (not closed loop), and may or may not be of any shape.

The adhesive sheet AS, the support tape ST, the other adhesive sheet, the adherend WK, the adherend support member, and the frame member RF in the present invention are not particularly limited in material, type, shape, and the like. For example, the adhesive sheet AS, the support tape ST, another adhesive sheet, the adherend WK, the adherend support member and the frame member RF may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. Alternatively, the adhesive sheet AS, the support tape ST and the other adhesive sheet may be pressure-sensitive adhesive, heat-sensitive adhesive, etc., and the heat-sensitive adhesive sheet AS, the support tape ST and When other adhesive sheets are employed, they may be bonded by an appropriate method such as providing heating means such as an appropriate coil heater or heat pipe for heating them. The adhesive sheet AS, the support tape ST and the other adhesive sheet may be, for example, a single-layer adhesive layer alone, a double-layer laminate of a base material and an adhesive layer, or a base material and an adhesive layer. 3 layers or 3 layers or more in which one or more intermediate layers are laminated between the adhesive layer, 3 layers or 3 layers or more in which one or more cover layers are laminated on the upper surface of the substrate, A base material, an intermediate layer or a cover layer provided in a detachable manner, a single-layer double-sided adhesive sheet consisting only of an adhesive layer, and a double-sided adhesive in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers Any material such as a sheet may be used. Examples of the adherend WK and adherend supporting member include food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, and ceramics. It may be a single object such as a wooden board or resin, or a composite formed by two or more of them, and members and articles of any shape can also be targeted. In addition, the adhesive sheet AS, the support tape and another adhesive sheet may be read in terms of functionality and usage, such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, Any sheet such as a recording layer-forming resin sheet, film, tape, or the like may be used.

The drive device in the above embodiment includes a rotating motor, a linear motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having two or more joints, an air cylinder, a hydraulic cylinder, and a rodless robot. Actuators such as cylinders and rotary cylinders can be used, and combinations thereof directly or indirectly can also be used.
In the above embodiments, when a rotating member such as a roller is employed, a drive device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or other members such as a shaft or a blade that rotates or does not rotate instead of the roller. Alternatively, if a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, a plate-like member or a round bar can be used instead of or in combination with the above examples. , a member such as a roller may be employed, the part to be peeled may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member, and supporting (holding) means When a device that supports (holds) a supported member (held member) such as a support (held) member is adopted, gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. may be used to support (hold) the supported member, and cutting means, cutting members, etc. When cutting the member to be cut or forming a cut or a cutting line in the member to be cut is adopted, instead of or in combination with the above examples, a cutter blade, a laser cutter, an ion beam, a thermal power , It is also possible to adopt a device that cuts by spraying heat, water pressure, heating wire, gas or liquid, etc., or to move and cut with a combination of appropriate driving devices. .

EA... Sheet sticking device 10... Supply means 20... Sheet holding means 22... Sheet holding member 22B... Sheet holding surface 22C... Sheet pressing surface 30... Pressing means 40... Tension applying means 50... Energy applying means AS... Adhesive sheet ASH... Protrusion Region AS1 Adhesion surface AS2 Anti-adhesion surface AS3 Attachment surface WK Adherend

Claims (4)

supply means for supplying an elastically deformable adhesive sheet;
sheet holding means for holding the adhesive sheet in contact with the side opposite to the adhesive surface of the adhesive sheet supplied by the supply means;
pressing means for pressing the adhesive sheet held by the sheet holding means against an adherend;
A sheet sticking device comprising a tension imparting means for imparting a predetermined tension to the adhesive sheet,
The sheet holding means has a sheet holding surface that abuts on a portion of the adhesive sheet to hold the adhesive sheet, and a sheet pressing surface that presses the adhesive sheet against the adherend when pressed by the pressing means. a sheet holding member provided with
The tension applying means applies the predetermined tension to the adhesive sheet positioned between the supply means and the sheet holding means to hold the adhesive sheet on the sheet holding member so that the sheet holding surface is stretched. The protruding region of the adhesive sheet that is not held by is warped in the direction of the sheet pressing surface, and the warped protruding region is deformed into a predetermined planar shape to form a sticking surface to be stuck to the adherend. sheet pasting device. 2. A sheet sticking apparatus according to claim 1, wherein said sheet holding means holds said adhesive sheet in a ring shape. The adhesive sheet is made of a material that is softened by a predetermined energy,
3. The sheet sticking apparatus according to claim 1, further comprising energy applying means for applying the predetermined energy to the adhesive sheet. a supply step of supplying an elastically deformable adhesive sheet with a supply means;
a sheet holding step of contacting the non-adhesive surface side, which is the opposite side of the adhesive surface of the adhesive sheet supplied in the supply step, and holding the adhesive sheet with sheet holding means;
a pressing step of pressing the adhesive sheet held in the sheet holding step against an adherend;
In the sheet sticking method, the tension applying step of applying a predetermined tension to the adhesive sheet is performed.
In the sheet holding step, a sheet holding surface that abuts on a portion of the adhesive sheet to hold the adhesive sheet, and a sheet pressing surface that presses the adhesive sheet against the adherend during pressing in the pressing step. using a sheet holding member with
In the tension applying step, the predetermined tension is applied to the adhesive sheet positioned between the supply means and the sheet holding means to hold the adhesive sheet on the sheet holding member, so that the sheet holding surface is stretched. The protruding region of the adhesive sheet that is not held by is warped in the direction of the sheet pressing surface, and the warped protruding region is deformed into a predetermined planar shape to form a sticking surface to be stuck to the adherend. How to attach the sheet.

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