TW202020919A - 電子源工作方法 - Google Patents

電子源工作方法 Download PDF

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Publication number
TW202020919A
TW202020919A TW108136469A TW108136469A TW202020919A TW 202020919 A TW202020919 A TW 202020919A TW 108136469 A TW108136469 A TW 108136469A TW 108136469 A TW108136469 A TW 108136469A TW 202020919 A TW202020919 A TW 202020919A
Authority
TW
Taiwan
Prior art keywords
electron source
temperature
emission
working
needle tip
Prior art date
Application number
TW108136469A
Other languages
English (en)
Chinese (zh)
Inventor
劉華榮
靳學明
戚玉軒
王學慧
李藝晶
王俊聽
鄭春寧
錢慶
Original Assignee
中國電子科技集團公司第三十八研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 中國電子科技集團公司第三十八研究所 filed Critical 中國電子科技集團公司第三十八研究所
Publication of TW202020919A publication Critical patent/TW202020919A/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044—Point emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06341—Field emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
TW108136469A 2018-10-12 2019-10-08 電子源工作方法 TW202020919A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201811190748.7 2018-10-12
CN201811190748.7A CN111048372B (zh) 2018-10-12 2018-10-12 一种电子源工作方法

Publications (1)

Publication Number Publication Date
TW202020919A true TW202020919A (zh) 2020-06-01

Family

ID=70164171

Family Applications (2)

Application Number Title Priority Date Filing Date
TW108136469A TW202020919A (zh) 2018-10-12 2019-10-08 電子源工作方法
TW108136929A TWI729527B (zh) 2018-10-12 2019-10-14 電子源工作方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW108136929A TWI729527B (zh) 2018-10-12 2019-10-14 電子源工作方法

Country Status (7)

Country Link
US (1) US11430625B2 (enExample)
EP (1) EP3770944A4 (enExample)
JP (1) JP6959457B2 (enExample)
KR (1) KR102469975B1 (enExample)
CN (1) CN111048372B (enExample)
TW (2) TW202020919A (enExample)
WO (1) WO2020073512A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11335529B2 (en) * 2020-06-19 2022-05-17 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Thermally enhanced compound field emitter

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5912533A (ja) 1982-07-12 1984-01-23 Hitachi Ltd 拡散補給形電子線源
JPH07192669A (ja) 1993-12-27 1995-07-28 Jeol Ltd 電界電離型ガスフェーズイオン源の調整方法
US6281626B1 (en) * 1998-03-24 2001-08-28 Casio Computer Co., Ltd. Cold emission electrode method of manufacturing the same and display device using the same
US6573642B1 (en) * 2000-01-26 2003-06-03 Motorola, Inc. Field emission device and method for the conditioning thereof
JP2003100244A (ja) * 2001-09-26 2003-04-04 Jeol Ltd 電子ビーム源
US7431856B2 (en) 2005-05-18 2008-10-07 National Research Council Of Canada Nano-tip fabrication by spatially controlled etching
CN102394204B (zh) 2008-03-19 2014-10-08 清华大学 场发射电子源
JP2011065790A (ja) * 2009-09-15 2011-03-31 Tokyo Electron Ltd 電子源、電子源の製造方法及び電子放出方法
JP5455700B2 (ja) 2010-02-18 2014-03-26 株式会社日立ハイテクノロジーズ 電界放出電子銃及びその制御方法
JP5363413B2 (ja) 2010-05-10 2013-12-11 電気化学工業株式会社 電子源
US8736170B1 (en) * 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source
CN102789947B (zh) 2011-05-16 2015-06-17 中国电子科技集团公司第三十八研究所 粒子源及其制造方法
CN102789946B (zh) * 2011-05-16 2016-01-13 中国电子科技集团公司第三十八研究所 粒子源
CN102842474B (zh) * 2011-06-22 2015-11-25 中国电子科技集团公司第三十八研究所 粒子源及其制造方法
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
US8952605B2 (en) 2012-07-03 2015-02-10 National Institute For Materials Science Metal hexaboride cold field emitter, method of fabricating same, and electron gun
CN104704601B (zh) * 2012-10-12 2017-06-23 株式会社日立高新技术 电子源的制造方法
JP6266458B2 (ja) * 2013-08-09 2018-01-24 株式会社日立ハイテクサイエンス イリジウムティップ、ガス電界電離イオン源、集束イオンビーム装置、電子源、電子顕微鏡、電子ビーム応用分析装置、イオン電子複合ビーム装置、走査プローブ顕微鏡、およびマスク修正装置
CN105140091B (zh) * 2015-07-27 2017-05-31 北京中科科仪股份有限公司 一种场发射电子枪烘烤装置和一种电子枪室的烘烤方法
US10133181B2 (en) 2015-08-14 2018-11-20 Kla-Tencor Corporation Electron source
US9984846B2 (en) 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment

Also Published As

Publication number Publication date
US20210050172A1 (en) 2021-02-18
US11430625B2 (en) 2022-08-30
TWI729527B (zh) 2021-06-01
JP2021512469A (ja) 2021-05-13
EP3770944A4 (en) 2021-08-11
KR20200105891A (ko) 2020-09-09
JP6959457B2 (ja) 2021-11-02
KR102469975B1 (ko) 2022-11-23
EP3770944A1 (en) 2021-01-27
CN111048372A (zh) 2020-04-21
TW202015088A (zh) 2020-04-16
WO2020073512A1 (zh) 2020-04-16
CN111048372B (zh) 2021-04-27

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