TW202017683A - 加工系統以及加工方法 - Google Patents

加工系統以及加工方法 Download PDF

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Publication number
TW202017683A
TW202017683A TW108139328A TW108139328A TW202017683A TW 202017683 A TW202017683 A TW 202017683A TW 108139328 A TW108139328 A TW 108139328A TW 108139328 A TW108139328 A TW 108139328A TW 202017683 A TW202017683 A TW 202017683A
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TW
Taiwan
Prior art keywords
processing
light
measurement
energy beam
irradiation
Prior art date
Application number
TW108139328A
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English (en)
Chinese (zh)
Inventor
江上茂樹
立崎陽介
Original Assignee
日商尼康股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商尼康股份有限公司 filed Critical 日商尼康股份有限公司
Publication of TW202017683A publication Critical patent/TW202017683A/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW108139328A 2018-10-31 2019-10-30 加工系統以及加工方法 TW202017683A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2018/040626 WO2020090075A1 (ja) 2018-10-31 2018-10-31 加工システム、及び、加工方法
WOPCT/JP2018/040626 2018-10-31

Publications (1)

Publication Number Publication Date
TW202017683A true TW202017683A (zh) 2020-05-16

Family

ID=70463641

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108139328A TW202017683A (zh) 2018-10-31 2019-10-30 加工系統以及加工方法

Country Status (6)

Country Link
US (2) US12397367B2 (https=)
EP (1) EP3875207A4 (https=)
JP (6) JP7235054B2 (https=)
CN (4) CN117245209A (https=)
TW (1) TW202017683A (https=)
WO (2) WO2020090075A1 (https=)

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Also Published As

Publication number Publication date
JP2024019574A (ja) 2024-02-09
JPWO2020090962A1 (ja) 2021-09-24
JP7613546B2 (ja) 2025-01-15
CN117245209A (zh) 2023-12-19
JP7409315B2 (ja) 2024-01-09
WO2020090962A1 (ja) 2020-05-07
EP3875207A4 (en) 2022-12-14
CN112930242B (zh) 2023-09-29
JP2023057171A (ja) 2023-04-20
JP7552756B2 (ja) 2024-09-18
CN117226248A (zh) 2023-12-15
JP7235054B2 (ja) 2023-03-08
CN117182292A (zh) 2023-12-08
CN112930242A (zh) 2021-06-08
US12397367B2 (en) 2025-08-26
JP2025031984A (ja) 2025-03-07
EP3875207A1 (en) 2021-09-08
WO2020090075A1 (ja) 2020-05-07
JPWO2020090075A1 (ja) 2021-09-24
US20250339920A1 (en) 2025-11-06
JP2024160010A (ja) 2024-11-08
US20210379693A1 (en) 2021-12-09

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