TW201939042A - Inspection unit and inspection device - Google Patents

Inspection unit and inspection device Download PDF

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Publication number
TW201939042A
TW201939042A TW108104106A TW108104106A TW201939042A TW 201939042 A TW201939042 A TW 201939042A TW 108104106 A TW108104106 A TW 108104106A TW 108104106 A TW108104106 A TW 108104106A TW 201939042 A TW201939042 A TW 201939042A
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Taiwan
Prior art keywords
inspection
inspection jig
contact
jig
movement restriction
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TW108104106A
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Chinese (zh)
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TWI697677B (en
Inventor
笹野直哉
寺西宏真
酒井貴浩
崔時薰
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日商歐姆龍股份有限公司
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Publication of TW201939042A publication Critical patent/TW201939042A/en
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Publication of TWI697677B publication Critical patent/TWI697677B/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867Handlers or transport devices, e.g. loaders, carriers, trays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834Automated test systems [ATE]; using microprocessors or computers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors

Abstract

This inspection unit comprises a first inspection tool and second inspection tool that are disposed so as to be aligned in a first direction and that each have: a contact element having formed, on the ends thereof, a first contact part capable of touching an object of inspection and a second contact part capable of touching an inspection device; and a housing for accommodating therein the contact element in a state where the first contact part is exposed to the outside. At least one from among the first inspection tool and second inspection tool is disposed so as to be capable of being moved along the first direction. Moving at least one from among the first inspection tool and second inspection tool along the first direction in a state in which an object of inspection has been brought close to the first contact parts from a second direction causes the first contact parts to come into contact with the object of inspection from the first direction.

Description

檢查單元以及檢查裝置Inspection unit and inspection device

本揭示是有關於一種檢查單元以及包括該檢查單元的檢查裝置。The present disclosure relates to an inspection unit and an inspection device including the inspection unit.

於相機或液晶面板等電子零件模組中,通常於其製造步驟中進行導通檢查及動作特性檢查等。該些檢查藉由使用探針,將用於與電子零件模組中所設置的本體基板連接的可撓性印刷電路(Flexible Printed Circuit,FPC)接觸電極或被安裝的基板對基板連接器等的電極部與檢查裝置連接來進行。In an electronic component module such as a camera or a liquid crystal panel, a continuity check and an operation characteristic check are usually performed in a manufacturing step thereof. These inspections use a probe to connect a flexible printed circuit (Flexible Printed Circuit (FPC)) contact electrode or a mounted board-to-board connector to the main board provided in the electronic component module. The electrode unit is connected to the inspection device.

作為進行此種檢查的治具,例如有專利文獻1中所記載的電子零件用插座(socket)。該電子零件用插座包括:電極部,具有可與電子零件的電極端子及被連接電子零件的電極端子分別接觸的一對接點(contact);以及插座本體,將該電極收納於內部。於所述電子零件用插座中,以如下方式構成:電極部沿著將一對接點連結的排列方向進行伸縮,藉此各接點沿著該排列方向進行往返移動,而於所述排列方向上與電子零件的電極端子及被連接電子零件的電極端子接觸。
[現有技術文獻]
[專利文獻]
As a jig for performing such an inspection, there is, for example, a socket for electronic parts described in Patent Document 1. The socket for an electronic component includes an electrode portion having a pair of contacts that can be respectively contacted with an electrode terminal of the electronic component and an electrode terminal of the connected electronic component, and a socket body that houses the electrode inside. In the socket for electronic parts, the electrode portion is configured to expand and contract along an arrangement direction connecting a pair of contacts, whereby each contact moves back and forth along the arrangement direction, and in the arrangement direction It is in contact with the electrode terminal of the electronic component and the electrode terminal of the connected electronic component.
[Prior Art Literature]
[Patent Literature]

專利文獻1:日本專利特開2002-134202號公報Patent Document 1: Japanese Patent Laid-Open No. 2002-134202

[發明所欲解決之課題][Problems to be Solved by the Invention]

近年來,伴隨檢查裝置及檢查對象物的多樣化,各接點沿著同一方向接近檢查對象物,並於其接近方向上進行接觸的所謂的直線型的所述電子零件用插座難以應對的情況增加。In recent years, with the diversification of inspection devices and inspection objects, it is difficult to cope with the so-called linear electronic component sockets in which the contacts approach the inspection object in the same direction and make contact in the approach direction. increase.

例如,顯示模組的檢查有時於在顯示面板上配置有電極部的狀態下進行。若於此種檢查中使用所述電子零件用插座,則一側的接於接近方向上接觸顯示面板上的電極部,另一側的接點接觸檢查裝置,但若顯示面板包含如有機電激發光(Electroluminescence,EL)般的強度弱的材料,則當所述探針於接近方向上接觸時過度的力作用於顯示器上,顯示面板有可能破裂。For example, the inspection of the display module may be performed in a state where an electrode portion is disposed on the display panel. If the socket for electronic parts is used in such inspection, one side contacts the electrode portion on the display panel in the approach direction, and the other side contacts the inspection device. However, if the display panel includes an electromechanical excitation, A material with weak intensity like Electroluminescence (EL), when the probe contacts in the approach direction, an excessive force acts on the display, and the display panel may be broken.

本揭示的目的在於提供一種可使接觸件的接點部在與對於檢查對象物的接近方向不同的方向上接觸的檢查單元、以及包括該檢查單元的檢查裝置。
[解決課題之手段]
An object of the present disclosure is to provide an inspection unit capable of contacting a contact portion of a contact in a direction different from an approaching direction with respect to an inspection target, and an inspection device including the inspection unit.
[Means for solving problems]

本揭示的一例的檢查單元包括沿著第一方向排列配置的第一檢查治具及第二檢查治具,所述第一檢查治具及第二檢查治具分別具有:
接觸件,於兩端部分別設置有可接觸檢查對象物的第一接點部與可接觸檢查裝置的第二接點部;以及
殼體,於所述第一接點部露出至外部的狀態下將所述接觸件收納於內部;
所述第一檢查治具及所述第二檢查治具的至少一者以可沿著所述第一方向移動的方式配置,且
於使所述檢查對象物自第二方向相對地接近各個所述第一接點部的狀態下,使所述第一檢查治具及所述第二檢查治具的至少一者沿著所述第一方向移動,藉此各個所述第一接點部於所述第一方向上接觸所述檢查對象物,所述第二方向與所述第一方向交叉。
An inspection unit according to an example of the present disclosure includes a first inspection jig and a second inspection jig arranged along a first direction, and the first inspection jig and the second inspection jig each have:
The contact is provided with a first contact portion that can contact the inspection object and a second contact portion that can contact the inspection device at both ends, and a case in which the first contact portion is exposed to the outside. The contact is stored inside;
At least one of the first inspection jig and the second inspection jig is arranged so as to be movable along the first direction, and the inspection object is relatively close to each place from the second direction. In a state of the first contact portion, at least one of the first inspection jig and the second inspection jig is moved in the first direction, whereby each of the first contact portions is The first direction contacts the inspection object, and the second direction intersects the first direction.

另外,本揭示的一例的檢查裝置包括至少一個所述檢查單元。
[發明的效果]
The inspection device according to an example of the present disclosure includes at least one of the inspection units.
[Effect of the invention]

根據所述檢查單元,第一檢查治具及第二檢查治具的至少一者以可沿著第一方向移動的方式配置,於使檢查對象物自第二方向接近各個第一接點部的狀態下,使第一檢查治具及第二檢查治具的任一者沿著第一方向移動,藉此各個第一接點部於第一方向上接觸檢查對象物。藉此,可實現可使接觸件的第一接點部在與對於檢查對象物的第二方向(即,接近方向)不同的第一方向上接觸的檢查單元。According to the inspection unit, at least one of the first inspection jig and the second inspection jig is disposed so as to be movable along the first direction, so that the inspection object approaches each of the first contact portions from the second direction. In the state, any one of the first inspection jig and the second inspection jig is moved in the first direction, whereby each first contact portion contacts the inspection object in the first direction. Thereby, it is possible to realize an inspection unit that can make the first contact portion of the contact in a first direction different from the second direction (ie, the approach direction) with respect to the inspection object.

另外,根據所述檢查裝置,藉由所述檢查單元,可實現可應對檢查裝置及檢查對象物的多樣化的檢查裝置。In addition, according to the inspection device, the inspection unit can realize an inspection device capable of responding to a variety of inspection devices and inspection objects.

以下,按照隨附圖式對本揭示的一例進行說明。再者,於以下的說明中,視需要使用表示特定的方向或位置的用語(例如包含「上」、「下」、「右」、「左」的用語),但該些用語的使用是為了使參照圖式的本揭示的理解變得容易,本揭示的技術範圍並不由該些用語的含義來限定。另外,以下的說明本質上只不過是例示,並不意圖限制本揭示、其適用物、或其用途。進而,圖式是示意性的圖,各尺寸的比率等未必與現實者一致。An example of the present disclosure will be described below with reference to the accompanying drawings. In addition, in the following description, terms (such as "up", "down", "right", and "left") are used to indicate specific directions or positions as necessary, but these terms are used for the purpose of To facilitate understanding of the present disclosure with reference to the drawings, the technical scope of the present disclosure is not limited by the meaning of these terms. In addition, the following description is merely exemplary in nature, and is not intended to limit the present disclosure, its application, or its use. Furthermore, the drawings are schematic, and the ratios and the like of the dimensions do not necessarily agree with those of a real person.

如圖1所示,本揭示的一實施方式的檢查單元1包括第一檢查治具2及第二檢查治具3,如圖2所示,第一檢查治具2及第二檢查治具3沿著第一方向X空開間隙4而排列配置。As shown in FIG. 1, an inspection unit 1 according to an embodiment of the present disclosure includes a first inspection jig 2 and a second inspection jig 3. As shown in FIG. 2, the first inspection jig 2 and the second inspection jig 3 The gaps 4 are arranged in a line along the first direction X.

如圖2所示,第一檢查治具2及第二檢查治具3分別具有導電性的接觸件10、及將該接觸件10收納於內部的絕緣性的殼體20。於該檢查單元1中,作為一例,如圖1所示,第一檢查治具2及第二檢查治具3分別具有多個在與第一方向X正交的第二方向Y上延伸的棒狀的接觸件10。各檢查治具2、檢查治具3的接觸件10沿著與第一方向X及第二方向Y正交的第三方向Z,等間隔地配置成一行。As shown in FIG. 2, the first inspection jig 2 and the second inspection jig 3 each have a conductive contact 10 and an insulating case 20 in which the contact 10 is housed. In this inspection unit 1, as an example, as shown in FIG. 1, each of the first inspection jig 2 and the second inspection jig 3 has a plurality of rods extending in a second direction Y orthogonal to the first direction X.状 的 件 件 10。 Contacts 10. The contact pieces 10 of each inspection jig 2 and inspection jig 3 are arranged in a line at regular intervals along a third direction Z orthogonal to the first direction X and the second direction Y.

如圖2所示,各接觸件10具有分別設置於其延伸方向的兩端部的第一接點部11及第二接點部12。第一接點部11以可接觸檢查對象物(例如,配置於顯示面板上的基板對基板連接器110的電極部111)的方式構成,第二接點部12以可接觸設置於檢查裝置的基板100的表面上的端子101的方式構成。As shown in FIG. 2, each contact 10 includes a first contact portion 11 and a second contact portion 12 provided at both ends in the extending direction. The first contact portion 11 is configured to be in contact with an inspection object (for example, the electrode portion 111 of the substrate-to-substrate connector 110 disposed on the display panel), and the second contact portion 12 is provided to be accessible to the inspection device. The structure of the terminals 101 on the surface of the substrate 100 is configured.

再者,於該實施方式中,檢查裝置的基板100及基板對基板連接器110以基板100的端子101與基板對基板連接器110的電極部111在Y方向上相向的方式配置。另外,雖然未圖示,但顯示面板相對於基板對基板連接器110,配置於檢查裝置的基板100的第二方向Y上的相反側。即,基板對基板連接器110位於顯示面板與檢查裝置的基板100之間。Furthermore, in this embodiment, the substrate 100 and the substrate-to-substrate connector 110 of the inspection device are arranged so that the terminal 101 of the substrate 100 and the electrode portion 111 of the substrate-to-substrate connector 110 face each other in the Y direction. In addition, although not shown, the display panel is disposed on the opposite side of the substrate-to-substrate connector 110 in the second direction Y of the substrate 100 of the inspection apparatus. That is, the board-to-board connector 110 is located between the display panel and the board 100 of the inspection apparatus.

如圖2所示,各殼體20於其內部具有可收納接觸件10的多個收納部21。於各收納部21的第二方向Y的兩端部分別設置有開口部22、開口部23。各接觸件10以其兩端部從開口部22、開口部23朝殼體20的外部突出,且各接點部11、接點部12露出至殼體20的外部的狀態被收納於各收納部21中。即,於所述檢查單元1中,除第一接點部11以外,第二接點部12亦露出至殼體20的外部。As shown in FIG. 2, each case 20 has a plurality of accommodating portions 21 in which the contacts 10 can be accommodated. An opening portion 22 and an opening portion 23 are provided at both end portions of the storage portion 21 in the second direction Y, respectively. Each contact 10 protrudes from the opening portion 22 and the opening portion 23 to the outside of the housing 20 at both ends thereof, and the contact portions 11 and 12 are exposed to the outside of the housing 20 in a state where they are exposed to the outside of the housing 20. Department 21. That is, in the inspection unit 1, in addition to the first contact portion 11, the second contact portion 12 is also exposed to the outside of the housing 20.

另外,如圖2所示,檢查單元1包括配置於第一檢查治具2與第二檢查治具3之間的間隙4中,並與第一檢查治具2的殼體20及第二檢查治具3的殼體20連接的可動部30。該可動部30具有於第一方向X上進行伸縮的彈性構件(例如螺旋彈簧),以可使第一檢查治具2及第二檢查治具3分別於第一方向X上獨立地進行進退移動的方式構成。In addition, as shown in FIG. 2, the inspection unit 1 includes a gap 4 disposed between the first inspection jig 2 and the second inspection jig 3, and a case 20 and a second inspection with the first inspection jig 2. The movable portion 30 is connected to the case 20 of the jig 3. The movable portion 30 has an elastic member (for example, a coil spring) that expands and contracts in the first direction X, so that the first inspection jig 2 and the second inspection jig 3 can move forward and backward independently in the first direction X, respectively. Way of posing.

再者,於該實施方式中,伴隨各檢查治具2、檢查治具3的移動,具有端子101的基板100亦分別於第一方向X上獨立地進行進退移動,所述端子101為各檢查治具2、檢查治具3的接觸件10的第二接點部12所接觸。Furthermore, in this embodiment, along with the movement of each inspection jig 2 and inspection jig 3, the substrate 100 having the terminal 101 is also moved forward and backward independently in the first direction X, and the terminal 101 is each inspection The second contact portion 12 of the contact 10 of the jig 2 and the inspection jig 3 is in contact.

進而,如圖2所示,檢查單元1於第一方向X上,包括與第一檢查治具2及第二檢查治具3排列配置的第一移動限制部41及第二移動限制部42。作為一例,第一移動限制部41及第二移動限制部42分別包含絕緣性的剛體。Further, as shown in FIG. 2, the inspection unit 1 includes a first movement restriction portion 41 and a second movement restriction portion 42 arranged in a line with the first inspection jig 2 and the second inspection jig 3 in the first direction X. As an example, each of the first movement restriction portion 41 and the second movement restriction portion 42 includes an insulating rigid body.

於第一方向X上,第一移動限制部41空開間隙5而配置於相對於第一檢查治具2的第二檢查治具3的相反側,第二移動限制部42空開間隙6而配置於相對於第二檢查治具3的第一檢查治具2的相反側。即,在第一移動限制部41與第二檢查治具3之間配置有第一檢查治具2,在第二移動限制部42與第一檢查治具2之間配置有第二檢查治具3。In the first direction X, the first movement restricting portion 41 is spaced apart from the gap 5 and is disposed on the opposite side of the second inspection fixture 3 relative to the first inspection fixture 2, and the second movement restricting portion 42 is opened from the gap 6 and It is arranged on the opposite side of the first inspection jig 2 from the second inspection jig 3. That is, the first inspection jig 2 is disposed between the first movement restriction portion 41 and the second inspection jig 3, and the second inspection jig is disposed between the second movement restriction portion 42 and the first inspection jig 2. 3.

如圖2所示,第一移動限制部41限制第一檢查治具2於第一方向X上且朝遠離第二檢查治具3的方向(即,圖2的向左)的移動。另外,第二移動限制部42限制第二檢查治具3於第一方向X上且朝遠離第一檢查治具2的方向(即,圖2的向右)的移動。As shown in FIG. 2, the first movement restricting portion 41 restricts movement of the first inspection jig 2 in the first direction X and away from the second inspection jig 3 (ie, leftward in FIG. 2). In addition, the second movement restricting portion 42 restricts movement of the second inspection jig 3 in the first direction X and away from the first inspection jig 2 (ie, rightward in FIG. 2).

再者,於所述檢查單元1中,作為一例,第一移動限制部41及第二移動限制部42被固定於檢查裝置的基板100上。Furthermore, in the inspection unit 1, as an example, the first movement restriction portion 41 and the second movement restriction portion 42 are fixed to the substrate 100 of the inspection apparatus.

繼而,參照圖3~圖6,對使所述檢查單元1的各第一接點部11與檢查對象物(例如,基板對基板連接器110的電極部111)連接時的動作進行說明。再者,基板對基板連接器110具有於第二方向Y上開口的兩個凹部112,於該凹部112的第一方向X上的外側面上分別設置有電極部111。Next, an operation when each first contact portion 11 of the inspection unit 1 is connected to an inspection object (for example, the electrode portion 111 of the board-to-board connector 110) will be described with reference to FIGS. 3 to 6. Furthermore, the board-to-board connector 110 has two recessed portions 112 opened in the second direction Y, and electrode portions 111 are provided on the outer surfaces of the recessed portions 112 in the first direction X, respectively.

首先,如圖3所示,針對第一檢查治具2及第二檢查治具3,施加第一方向X且使兩者相互接近的方向的外力,使各檢查治具2、檢查治具3對抗可動部30的彈力而分別朝箭頭A方向移動,而使各檢查治具2、檢查治具3的接觸件10的第一接點部11與基板對基板連接器110的兩個凹部112相向。First, as shown in FIG. 3, an external force in a direction of a first direction X and a direction in which the two approach each other is applied to the first inspection jig 2 and the second inspection jig 3, and each inspection jig 2 and inspection jig 3 are applied. The first contact portion 11 of the contact 10 of each inspection jig 2, inspection jig 3 and the two recesses 112 of the board-to-board connector 110 are opposed to each other by moving in the direction of arrow A against the elastic force of the movable portion 30. .

然後,如圖4所示,使基板對基板連接器110於第二方向Y上且朝接近檢查單元1的方向(即,圖4的箭頭B方向)移動,如圖5所示,使各檢查治具2、檢查治具3的接觸件10的第一接點部11位於基板對基板連接器110的凹部112的內部且不接觸凹部112的底面113的插入位置上。Then, as shown in FIG. 4, the substrate-to-board connector 110 is moved in the second direction Y and in a direction close to the inspection unit 1 (ie, the direction of the arrow B in FIG. 4). As shown in FIG. 5, each inspection is performed. The first contact portion 11 of the contact 10 of the jig 2 and the inspection jig 3 is located inside the recess 112 of the substrate-to-substrate connector 110 and does not contact the insertion position of the bottom surface 113 of the recess 112.

此時,能夠以第一接點部11一面接觸凹部112於第一方向X上相向的一對側面的一者,一面移動至凹部112內的插入位置為止的方式,使基板對基板連接器110相對地接近檢查單元1,亦能夠以第一接點部11不接觸凹部112於第一方向X上相向的一對側面的一者而移動至凹部112內的插入位置為止的方式,使基板對基板連接器110相對地接近檢查單元1。At this time, the substrate-to-board connector 110 can be moved so that the first contact portion 11 contacts one of the pair of side surfaces of the recessed portion 112 facing in the first direction X while moving to the insertion position in the recessed portion 112. By relatively approaching the inspection unit 1, the substrate can be aligned so that the first contact portion 11 does not contact one of a pair of side surfaces of the recessed portion 112 facing in the first direction X to the insertion position in the recessed portion 112. The substrate connector 110 is relatively close to the inspection unit 1.

若各檢查治具2、檢查治具3的接觸件10的第一接點部11移動至插入位置為止,則釋放施加至各檢查治具2、檢查治具3中的外力,藉由可動部30的彈性構件的復原力來使各檢查治具2、檢查治具3於第一方向X上且朝相互分離的方向(即,圖5的箭頭C方向)分別移動。藉此,如圖6所示,各檢查治具2、檢查治具3的接觸件10的第一接點部11移動至接觸基板對基板連接器110的電極部111的接觸位置為止,檢查單元1與基板對基板連接器110被電性連接。When the first contact portion 11 of the contact 10 of each inspection jig 2 and inspection jig 3 moves to the insertion position, the external force applied to each inspection jig 2 and inspection jig 3 is released, and the movable part The restoring force of the elastic member of 30 moves each inspection jig 2 and inspection jig 3 in the first direction X and in a direction separated from each other (that is, the direction of arrow C in FIG. 5). Thereby, as shown in FIG. 6, the inspection unit is moved until the first contact portion 11 of the contact 10 of each inspection jig 2 and inspection jig 3 reaches the contact position between the contact substrate and the electrode portion 111 of the substrate connector 110. 1 is electrically connected to the board-to-board connector 110.

於所述檢查單元1中,第一檢查治具2及第二檢查治具3以分別可沿著第一方向X移動的方式排列配置,於使基板對基板連接器110自第二方向Y接近各個第一接點部11的狀態下,使第一檢查治具2及第二檢查治具3沿著第一方向X移動,藉此各個第一接點部11於第一方向X上接觸基板對基板連接器110。藉此,可使接觸件10的第一接點部11在與對於基板對基板連接器110的第二方向Y(即,接近方向)不同的第一方向X上接觸,因此於接近方向上過度的力不會經由基板對基板連接器110而作用於顯示面板上,能夠實現可防止顯示面板的破損的檢查單元1。In the inspection unit 1, the first inspection jig 2 and the second inspection jig 3 are arranged in such a manner that they can move along the first direction X, respectively, so that the board-to-board connector 110 approaches from the second direction Y. In the state of each of the first contact portions 11, the first inspection jig 2 and the second inspection jig 3 are moved along the first direction X, whereby each first contact portion 11 contacts the substrate in the first direction X On the substrate connector 110. Thereby, the first contact portion 11 of the contact 10 can be brought into contact with the first direction X which is different from the second direction Y (ie, the approaching direction) with respect to the board-to-board connector 110, and thus excessively approaches the approaching direction. It is possible to realize the inspection unit 1 capable of preventing the display panel from being damaged, without exerting a force on the display panel via the substrate-to-board connector 110.

另外,所述檢查單元1進而包括使第一檢查治具2及第二檢查治具3於第一方向X上移動的可動部30。藉由該可動部30,可容易地使第一檢查治具2及第二檢查治具3於第一方向X上移動。The inspection unit 1 further includes a movable portion 30 that moves the first inspection jig 2 and the second inspection jig 3 in the first direction X. With this movable portion 30, the first inspection jig 2 and the second inspection jig 3 can be easily moved in the first direction X.

另外,可動部30與第一檢查治具2的殼體20及第二檢查治具3的殼體20連接,具有於第一方向X上進行伸縮的彈性構件。藉此,可於第一方向X上,將各檢查治具2、檢查治具3的接觸件10的第一接點部11按壓於基板對基板連接器110的電極部111上,因此可提高第一接點部11與基板對基板連接器110之間的接觸可靠性。In addition, the movable portion 30 is connected to the case 20 of the first inspection jig 2 and the case 20 of the second inspection jig 3 and has an elastic member that expands and contracts in the first direction X. Thereby, in the first direction X, the first contact portion 11 of the contact 10 of each inspection jig 2 and inspection jig 3 can be pressed against the electrode portion 111 of the substrate-to-substrate connector 110, which can improve The contact reliability between the first contact portion 11 and the board-to-board connector 110 is reliable.

另外,所述檢查單元1於第一方向X上,進而包括與第一檢查治具2及第二檢查治具3排列配置的第一移動限制部41,在第一移動限制部41與第二檢查治具3之間配置第一檢查治具2,藉由第一移動限制部41來限制第一檢查治具2於第一方向X上且朝遠離第二檢查治具3的方向的移動。例如,當第一檢查治具2於第一方向X上且朝遠離第二檢查治具3的方向移動時,可藉由第一移動限制部41來防止第一檢查治具2的接觸件10的第一接點部11被施加過剩的力而導致第一檢查治具2的接觸件10破損。In addition, the inspection unit 1 further includes, in a first direction X, a first movement restricting portion 41 arranged in alignment with the first inspection fixture 2 and the second inspection fixture 3, and the first movement restricting portion 41 and the second movement restricting portion 41 The first inspection jig 2 is arranged between the inspection jigs 3, and the first inspection jig 2 is restricted by the first movement restricting portion 41 in the first direction X and moves away from the second inspection jig 3. For example, when the first inspection jig 2 moves in the first direction X and moves away from the second inspection jig 3, the contact 10 of the first inspection jig 2 can be prevented by the first movement restriction portion 41 Excessive force is applied to the first contact portion 11 of the first contact portion 11 and the contact 10 of the first inspection jig 2 is damaged.

另外,所述檢查單元1於第一方向X上,進而包括與第一移動限制部41、第一檢查治具2及第二檢查治具3排列配置的第二移動限制部42,在第二移動限制部42與第一檢查治具2之間配置第二檢查治具3,藉由第二移動限制部42來限制第二檢查治具3於第一方向X上且朝遠離第一檢查治具2的方向的移動。例如,當第二檢查治具3於第一方向X上且朝遠離第一檢查治具2的方向移動時,可藉由第二移動限制部42來防止第二檢查治具3的接觸件10的第一接點部11被施加過剩的力而導致第二檢查治具3的接觸件10破損。In addition, the inspection unit 1 further includes, in a first direction X, a second movement restriction portion 42 which is arranged in alignment with the first movement restriction portion 41, the first inspection jig 2 and the second inspection jig 3. A second inspection jig 3 is arranged between the movement restriction part 42 and the first inspection jig 2, and the second inspection jig 3 is restricted by the second movement restriction part 42 in the first direction X and away from the first inspection jig With 2 directions of movement. For example, when the second inspection jig 3 is moved in the first direction X and away from the first inspection jig 2, the contact 10 of the second inspection jig 3 may be prevented by the second movement restriction portion 42. Excessive force is applied to the first contact portion 11 of the first contact portion 11 and the contact 10 of the second inspection jig 3 is damaged.

再者,各移動限制部41、移動限制部42與各檢查治具2、檢查治具3的殼體20之間的各間隙5、間隙6以如下方式構成:確保各接觸件10的第一接點部11與基板對基板連接器110的電極部111之間的接觸壓力,並可防止第一檢查治具2的接觸件10的第一接點部11被施加過剩的力而導致第一檢查治具2的接觸件10破損。例如,各間隙5、間隙6的第一方向X的尺寸能夠以處於如下的範圍內的方式構成,所述範圍是將第一接點部11以接觸基板對基板連接器110的凹部112的側面的狀態插入時的第一方向X上的第一接點部11與凹部112的側面之間的最短距離以上、基板對基板連接器110的凹部112的第一方向X的尺寸以下的範圍。In addition, each of the gaps 5 and 6 between each of the movement restricting portions 41 and 42 and the housing 20 of each inspection jig 2 and inspection jig 3 is configured as follows: The contact pressure between the contact portion 11 and the electrode portion 111 of the substrate-to-board connector 110 can prevent the first contact portion 11 of the contact 10 of the first inspection jig 2 from being applied with an excessive force to cause the first The contact 10 of the inspection jig 2 is broken. For example, the dimensions of the first direction X of each of the gaps 5 and 6 can be configured within a range in which the first contact portion 11 contacts a side surface of the recessed portion 112 of the substrate-to-board connector 110. The range in which the shortest distance between the first contact point 11 in the first direction X and the side surface of the recessed portion 112 in the inserted state is not more than the size of the first direction X of the recessed portion 112 of the board-to-board connector 110.

另外,根據所述檢查裝置,藉由所述檢查單元1,可實現可應對檢查裝置及檢查對象物的多樣化的檢查裝置。In addition, according to the inspection device, the inspection unit 1 can realize an inspection device capable of responding to a variety of inspection devices and inspection objects.

再者,第一檢查治具2及第二檢查治具3只要至少一者以可沿著第一方向X移動的方式配置即可。例如,如圖7所示,亦可將第一檢查治具2固定於檢查裝置的基板100上,在第二檢查治具3與第二移動限制部41之間設置可動部30。於此情況下,可動部30以使第一檢查治具2及第二檢查治具3的至少任一者(於圖7中,第二檢查治具3)沿著第一方向X移動的方式構成。再者,於圖7中所示的檢查單元1中,省略第一移動限制部41。In addition, at least one of the first inspection jig 2 and the second inspection jig 3 may be arranged so as to be movable along the first direction X. For example, as shown in FIG. 7, the first inspection jig 2 may be fixed to the substrate 100 of the inspection device, and a movable portion 30 may be provided between the second inspection jig 3 and the second movement restriction portion 41. In this case, the movable unit 30 moves at least any one of the first inspection jig 2 and the second inspection jig 3 (the second inspection jig 3 in FIG. 7) along the first direction X. Make up. Furthermore, in the inspection unit 1 shown in FIG. 7, the first movement restriction portion 41 is omitted.

第一檢查治具2及第二檢查治具3的各接觸件10只要於兩端部分別設置有可接觸檢查對象物的第一接點部11與可接觸檢查裝置的第二接點部12即可,可對應於檢查單元1的設計等,使用任意的結構的接觸件10。例如,如圖8及圖9所示,亦可使用具有於第一方向X上延長的直線帶部13、及與直線帶部13連接的彎曲帶部14交替地連續的蛇行形狀的接觸件10。另外,例如第一接點部11及第二接點部12分別可對應於檢查裝置或檢查對象物的各種形態,適宜變更形狀及位置等。As long as each contact 10 of the first inspection jig 2 and the second inspection jig 3 is provided with a first contact portion 11 capable of contacting an inspection object and a second contact portion 12 of an accessible inspection device at both end portions, respectively, That is, the contact 10 having an arbitrary structure may be used in accordance with the design and the like of the inspection unit 1. For example, as shown in FIGS. 8 and 9, it is also possible to use a contact 10 having a meandering shape having a straight belt portion 13 extending in the first direction X and a curved belt portion 14 connected to the straight belt portion 13 alternately and continuously. . In addition, for example, the first contact portion 11 and the second contact portion 12 may correspond to various forms of an inspection device or an inspection object, and may be appropriately changed in shape and position.

可動部30、第一移動限制部41及第二移動限制部42亦可省略。例如,當省略了可動部30時,用戶可手動地使第一檢查治具2及第二檢查治具3分別移動,藉此使各第一接點部11於第一方向X上接觸基板對基板連接器110的電極部111。The movable portion 30, the first movement restriction portion 41, and the second movement restriction portion 42 may be omitted. For example, when the movable portion 30 is omitted, the user may manually move the first inspection jig 2 and the second inspection jig 3 separately, thereby causing each first contact portion 11 to contact the substrate pair in the first direction X. The electrode portion 111 of the substrate connector 110.

可動部30並不限定於在第一方向X上進行伸縮的彈性構件,可採用可使第一檢查治具2及第二檢查治具3的至少一者於第一方向X上移動的任意的結構。另外,可動部30並不限定於與第一檢查治具2的殼體20及第二檢查治具3的殼體20連接的情況,例如,可動部30亦可與連接有第一檢查治具2的第二接點部12的檢查裝置的基板100、及連接有第二檢查治具3的第二接點部12的檢查裝置的基板100連接。The movable portion 30 is not limited to an elastic member that expands and contracts in the first direction X, and any one that can move at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X may be used. structure. In addition, the movable portion 30 is not limited to the case where it is connected to the case 20 of the first inspection jig 2 and the case 20 of the second inspection jig 3. For example, the movable portion 30 may be connected to the first inspection jig. The substrate 100 of the inspection device of the second contact portion 12 of 2 and the substrate 100 of the inspection device of the second contact portion 12 of the second inspection jig 3 are connected.

檢查單元1可對應於檢查裝置的各種形態,適宜變更其結構。例如,如圖10及圖11所示,亦能夠以可接觸檢查裝置的一對基板100的各端子101及基板對基板連接器110的電極部111的方式構成檢查單元1,所述檢查裝置的一對基板100以相向的方式配置,所述基板對基板連接器110配置在與一對基板100相向的方向交叉(例如,正交)的方向上。The inspection unit 1 can correspond to various forms of the inspection device, and its structure can be appropriately changed. For example, as shown in FIGS. 10 and 11, the inspection unit 1 can also be configured so that each terminal 101 of a pair of substrates 100 and an electrode portion 111 of the substrate-to-substrate connector 110 of the inspection device can be contacted. The pair of substrates 100 are arranged so as to face each other, and the substrate-to-board connector 110 is arranged in a direction crossing (eg, orthogonal) to a direction in which the pair of substrates 100 face each other.

於圖10及圖11中所示的檢查單元1中,各檢查治具2、檢查治具3以沿著第一方向X延長的接觸件10的第一接點部11側的端部於第一方向X上相互相向的方式配置。各檢查治具2、檢查治具3的接觸件10的第一接點部11側的端部自第一方向X朝第二方向Y彎曲,於其前端部設置有第一接點部11。各第一接點部11以於第二方向Y上,可接觸基板對基板連接器110的電極部111的方式配置。另外,各檢查治具2、檢查治具3的接觸件10的第二接點部12以分別可於第一方向X上接觸於第一方向X上相向的一對基板100的端子101的方式配置。In the inspection unit 1 shown in FIG. 10 and FIG. 11, each inspection jig 2, inspection jig 3, an end portion on the first contact portion 11 side of the contact 10 extended along the first direction X is located on the first side. They are arranged so as to face each other in one direction X. Each of the inspection jigs 2 and 3 of the contact 10 of the inspection jig 3 is bent from a first direction X toward a second direction Y, and a first contact portion 11 is provided at a front end thereof. Each of the first contact portions 11 is disposed so as to be able to contact the electrode portion 111 of the substrate-to-board connector 110 in the second direction Y. In addition, the second contact portion 12 of the contact 10 of each inspection jig 2 and inspection jig 3 is capable of contacting the terminals 101 of the pair of substrates 100 facing each other in the first direction X in the first direction X, respectively. Configuration.

另外,於圖10及圖11中所示的檢查單元1中,具有可使檢查裝置的一對基板100與各檢查治具2、檢查治具3一同於第一方向X上移動的可動部(未圖示),並以各個第一接點部11藉由該可動部而可於第一方向X上接觸基板對基板連接器110的電極部111的方式構成。In addition, the inspection unit 1 shown in FIG. 10 and FIG. 11 includes a movable portion (a pair of substrates 100 of the inspection apparatus that can move in the first direction X together with the inspection jigs 2 and 3). (Not shown), and each first contact portion 11 is configured so that the movable portion can contact the electrode portion 111 of the substrate-to-board connector 110 in the first direction X.

再者,圖10及圖11中所示的檢查單元1的各檢查治具2、檢查治具3包括接觸件10,所述接觸件10具有於第一方向X上延伸的直線帶部13、及與直線帶部13連接的彎曲帶部14交替地連續的蛇行形狀。Furthermore, each of the inspection jigs 2 and 3 of the inspection unit 1 shown in FIGS. 10 and 11 includes a contact 10 having a linear band portion 13 extending in the first direction X, And the curved belt portion 14 connected to the straight belt portion 13 alternately and continuously meanders.

以上,參照圖式對本揭示中的各種實施方式進行了詳細說明,最後,對本揭示的各種形態進行說明。再者,於以下的說明中,作為一例,亦添加參照符號來進行記載。The various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure are described. In addition, in the following description, as an example, a reference numeral is added and described.

本揭示的第一形態的檢查單元1包括沿著第一方向排列配置的第一檢查治具2及第二檢查治具3,所述第一檢查治具2及第二檢查治具3分別具有:
接觸件10,於兩端部分別設置有可接觸檢查對象物的第一接點部11與可接觸檢查裝置的第二接點部12;以及
殼體20,於所述第一接點部11露出至外部的狀態下將所述接觸件10收納於內部;
所述第一檢查治具2及所述第二檢查治具3的至少一者以可沿著所述第一方向X移動的方式配置,且
於使所述檢查對象物自第二方向Y接近各個所述第一接點部11的狀態下,使所述第一檢查治具2及所述第二檢查治具3的至少一者沿著所述第一方向X移動,藉此各個所述第一接點部11於所述第一方向X上接觸所述檢查對象物,所述第二方向Y與所述第一方向X交叉。
The inspection unit 1 of the first aspect of the present disclosure includes a first inspection jig 2 and a second inspection jig 3 arranged in a line along a first direction. The first inspection jig 2 and the second inspection jig 3 each have :
The contact 10 is provided at both ends with a first contact portion 11 capable of contacting an inspection object and a second contact portion 12 capable of contacting an inspection device; and a housing 20 at the first contact portion 11. Accommodating the contact 10 inside when exposed to the outside;
At least one of the first inspection jig 2 and the second inspection jig 3 is arranged so as to be movable along the first direction X, and is configured to make the inspection object approach from the second direction Y In a state of each of the first contact portions 11, at least one of the first inspection jig 2 and the second inspection jig 3 is moved along the first direction X, whereby each of the The first contact portion 11 contacts the inspection object in the first direction X, and the second direction Y intersects the first direction X.

根據第一形態的檢查單元,可實現可使接觸件10的第一接點部11在與對於檢查對象物的第二方向Y(即,接近方向)不同的第一方向X上接觸的檢查單元1。According to the inspection unit of the first aspect, it is possible to realize an inspection unit that can contact the first contact portion 11 of the contact 10 in a first direction X that is different from the second direction Y (ie, the approach direction) with respect to the inspection object. 1.

本揭示的第二形態的檢查單元1中,
進而包括使所述第一檢查治具2及所述第二檢查治具3的至少一者於所述第一方向X上移動的可動部30。
In the inspection unit 1 of the second aspect of the present disclosure,
Furthermore, it includes a movable portion 30 that moves at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X.

根據第二形態的檢查單元1,藉由可動部30,可容易地使第一檢查治具2及第二檢查治具3於第一方向X上移動。According to the inspection unit 1 of the second aspect, the first inspection jig 2 and the second inspection jig 3 can be easily moved in the first direction X by the movable section 30.

本揭示的第三形態的檢查單元1中,
所述可動部30具有於所述第一方向X上進行伸縮的彈性構件。
In the inspection unit 1 according to the third aspect of the present disclosure,
The movable portion 30 includes an elastic member that expands and contracts in the first direction X.

根據第三形態的檢查單元1,可於第一方向X上,將各檢查治具2、檢查治具3的接觸件10的第一接點部11按壓於檢查對象物上,因此可提高第一接點部11與檢查對象物之間的接觸可靠性。According to the inspection unit 1 of the third aspect, the first contact portion 11 of the contact 10 of each of the inspection jig 2 and the inspection jig 3 can be pressed against the inspection object in the first direction X. The contact between the one contact portion 11 and the inspection object is reliable.

本揭示的第四形態的檢查單元1中,
於所述第一方向X上,進而包括與所述第一檢查治具2及所述第二檢查治具3排列配置的移動限制部41,且
在所述移動限制部41與所述第二檢查治具3之間配置所述第一檢查治具2,藉由所述移動限制部41來限制所述第一檢查治具2於所述第一方向X上且朝遠離所述第二檢查治具3的方向的移動。
In the inspection unit 1 of the fourth aspect of the present disclosure,
In the first direction X, it further includes a movement restricting portion 41 arranged in alignment with the first inspection jig 2 and the second inspection jig 3, and the movement restricting portion 41 and the second The first inspection jig 2 is arranged between the inspection jigs 3, and the first inspection jig 2 is restricted by the movement restricting portion 41 in the first direction X and away from the second inspection Movement in the direction of the jig 3.

根據第四形態的檢查單元1,例如當第一檢查治具2於第一方向X上且朝遠離第二檢查治具3的方向移動時,可藉由移動限制部41來防止第一檢查治具2的接觸件10的第一接點部11及第二接點部12被施加過剩的力而導致第一檢查治具2的接觸件10破損。According to the inspection unit 1 of the fourth aspect, for example, when the first inspection jig 2 moves in the first direction X and moves away from the second inspection jig 3, the first inspection jig can be prevented by the movement restriction portion 41. Excessive force is applied to the first contact portion 11 and the second contact portion 12 of the contact 10 of the tool 2 and the contact 10 of the first inspection jig 2 is damaged.

本揭示的第五形態的檢查單元1中,
所述移動限制部為第一移動限制部41,
於所述第一方向X上,進而包括與所述第一移動限制部41、所述第一檢查治具2及所述第二檢查治具3排列配置的第二移動限制部42,
在所述第二移動限制部42與所述第一檢查治具2之間配置所述第二檢查治具3,藉由所述第二移動限制部42來限制所述第二檢查治具3於所述第一方向X上且朝遠離所述第一檢查治具2的方向的移動。
In the inspection unit 1 of the fifth aspect of the present disclosure,
The movement restriction portion is a first movement restriction portion 41,
In the first direction X, it further includes a second movement restriction portion 42 arranged in alignment with the first movement restriction portion 41, the first inspection jig 2 and the second inspection jig 3.
The second inspection jig 3 is disposed between the second movement restriction unit 42 and the first inspection jig 2, and the second inspection jig 3 is restricted by the second movement restriction unit 42. Movement in the first direction X and in a direction away from the first inspection jig 2.

根據第五形態的檢查單元1,例如當第二檢查治具3於第一方向X上且朝遠離第一檢查治具2的方向移動時,可藉由第二移動限制部42來防止第二檢查治具3的接觸件10的第一接點部11及第二接點部12被施加過剩的力而導致第二檢查治具3的接觸件10破損。According to the inspection unit 1 of the fifth aspect, for example, when the second inspection jig 3 moves in the first direction X and moves away from the first inspection jig 2, the second movement restricting portion 42 can prevent the second Excessive force is applied to the first contact portion 11 and the second contact portion 12 of the contact 10 of the inspection jig 3 and the contact 10 of the second inspection jig 3 is damaged.

本揭示的第六形態的檢查裝置包括至少一個所述形態的檢查單元1。An inspection apparatus of a sixth aspect of the present disclosure includes at least one inspection unit 1 of the aforementioned aspect.

根據第六形態的檢查裝置,藉由檢查單元1,可實現可應對檢查裝置及檢查對象物的多樣化的檢查裝置。According to the inspection apparatus of the sixth aspect, the inspection unit 1 can realize an inspection apparatus that can respond to a variety of inspection apparatuses and inspection objects.

再者,藉由將所述各種實施方式或變形例中的任意的實施方式或變形例適宜組合,可取得各自所具有的效果。另外,可進行實施方式彼此的組合、或實施例彼此的組合、或實施方式與實施例的組合,並且亦可進行不同的實施方式或實施例中的特徵彼此的組合。Furthermore, by appropriately combining any of the various embodiments or modifications described above, the respective effects can be obtained. In addition, a combination of the embodiments, a combination of the examples, or a combination of the embodiments and the examples may be performed, and a combination of features in different embodiments or examples may also be performed.

一面參照隨附圖式一面與較佳的實施方式相關聯而充分地記載了本揭示,但對於已熟練該技術的人們而言,明白各種變形或修正。此種變形或修正只要不脫離由隨附的申請範圍所限定的本揭示的範圍,則應理解為包含於其中。
[產業上之可利用性]
The present disclosure is fully described in association with the preferred embodiments with reference to the accompanying drawings, but various modifications or corrections will be apparent to those skilled in the art. Such variations or modifications should be understood to be included therein as long as they do not depart from the scope of the present disclosure as defined by the scope of the accompanying application.
[Industrial availability]

本揭示的檢查單元例如可應用於液晶面板的檢查裝置。The inspection unit of the present disclosure can be applied to, for example, an inspection device for a liquid crystal panel.

本揭示的檢查裝置例如可用於液晶面板的檢查。The inspection device of the present disclosure can be used for inspection of a liquid crystal panel, for example.

1‧‧‧檢查單元1‧‧‧ Inspection Unit

2‧‧‧第一檢查治具 2‧‧‧The first inspection fixture

3‧‧‧第二檢查治具 3‧‧‧Second Inspection Fixture

4、5、6‧‧‧間隙 4, 5, 6‧‧‧ clearance

10‧‧‧接觸件 10‧‧‧Contact

11‧‧‧第一接點部 11‧‧‧First contact department

12‧‧‧第二接點部 12‧‧‧Second Contact Section

13‧‧‧直線帶部 13‧‧‧Straight belt section

14‧‧‧彎曲帶部 14‧‧‧ curved belt

20‧‧‧殼體 20‧‧‧shell

21‧‧‧收納部 21‧‧‧Storage

22、23‧‧‧開口部 22, 23‧‧‧ opening

30‧‧‧可動部 30‧‧‧ Movable section

41‧‧‧第一移動限制部 41‧‧‧First movement restriction section

42‧‧‧第二移動限制部 42‧‧‧Second Movement Restriction Section

100‧‧‧基板 100‧‧‧ substrate

101‧‧‧端子 101‧‧‧terminal

110‧‧‧基板對基板連接器 110‧‧‧board-to-board connector

111‧‧‧電極部 111‧‧‧electrode section

112‧‧‧凹部 112‧‧‧ Recess

113‧‧‧底面 113‧‧‧ underside

X‧‧‧第一方向 X‧‧‧ first direction

Y‧‧‧第二方向 Y‧‧‧ second direction

Z‧‧‧第三方向 Z‧‧‧ Third direction

A、B、C‧‧‧方向 A, B, C‧‧‧ directions

圖1是表示本揭示的一實施方式的檢查單元的立體圖。FIG. 1 is a perspective view showing an inspection unit according to an embodiment of the present disclosure.

圖2是沿著圖1的II-II線的剖面圖。 FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 1.

圖3是用於說明使基板對基板連接器接觸圖1的檢查單元時的動作的第一示意圖。 FIG. 3 is a first schematic diagram for explaining an operation when the board-to-board connector is brought into contact with the inspection unit of FIG. 1.

圖4是用於說明使基板對基板連接器接觸圖1的檢查單元時的動作的第二示意圖。 FIG. 4 is a second schematic diagram for explaining an operation when the substrate-to-board connector is brought into contact with the inspection unit of FIG. 1.

圖5是用於說明使基板對基板連接器接觸圖1的檢查單元時的動作的第三示意圖。 FIG. 5 is a third schematic diagram for explaining an operation when the substrate-to-board connector is brought into contact with the inspection unit of FIG. 1.

圖6是用於說明使基板對基板連接器接觸圖1的檢查單元時的動作的第四示意圖。 FIG. 6 is a fourth schematic diagram for explaining an operation when the substrate-to-board connector is brought into contact with the inspection unit of FIG. 1.

圖7是表示圖1的檢查單元的第一變形例的剖面圖。 FIG. 7 is a sectional view showing a first modified example of the inspection unit of FIG. 1.

圖8是表示圖1的檢查單元的第二變形例的立體圖。 FIG. 8 is a perspective view showing a second modification of the inspection unit of FIG. 1.

圖9是沿著圖8的IX-IX線的剖面圖。 FIG. 9 is a cross-sectional view taken along the line IX-IX in FIG. 8.

圖10是表示圖1的檢查單元的第三變形例的立體圖。 FIG. 10 is a perspective view showing a third modified example of the inspection unit of FIG. 1.

圖11是沿著圖10的XI-XI線的剖面圖。 FIG. 11 is a cross-sectional view taken along the line XI-XI in FIG. 10.

Claims (6)

一種檢查單元,包括沿著第一方向排列配置的第一檢查治具及第二檢查治具,所述第一檢查治具及所述第二檢查治具分別具有: 接觸件,於兩端部分別設置有能夠接觸檢查對象物的第一接點部與能夠接觸檢查裝置的第二接點部;以及 殼體,於所述第一接點部露出至外部的狀態下將所述接觸件收納於內部; 所述第一檢查治具及所述第二檢查治具的至少一者以能夠沿著所述第一方向移動的方式配置,且 於使所述檢查對象物自第二方向相對地接近各個所述第一接點部的狀態下,使所述第一檢查治具及所述第二檢查治具的至少一者沿著所述第一方向移動,藉此各個所述第一接點部於所述第一方向上接觸所述檢查對象物,所述第二方向與所述第一方向交叉。An inspection unit includes a first inspection jig and a second inspection jig arranged along a first direction. The first inspection jig and the second inspection jig have: A contact, each of which is provided with a first contact portion capable of contacting the inspection object and a second contact portion capable of contacting the inspection device at both end portions; and A housing for accommodating the contacts in the state where the first contact portion is exposed to the outside; At least one of the first inspection jig and the second inspection jig is configured to be movable along the first direction, and And at least one of the first inspection jig and the second inspection jig along the state in a state where the inspection object is relatively close to each of the first contact portions from the second direction. The first direction moves so that each of the first contact portions contacts the inspection object in the first direction, and the second direction intersects the first direction. 如申請專利範圍第1項所述的檢查單元,更包括: 可動部,使所述第一檢查治具及所述第二檢查治具的至少一者於所述第一方向上移動。The inspection unit described in item 1 of the patent application scope further includes: The movable part moves at least one of the first inspection jig and the second inspection jig in the first direction. 如申請專利範圍第2項所述的檢查單元,其中 所述可動部具有於所述第一方向上進行伸縮的彈性構件。The inspection unit according to item 2 of the patent application scope, wherein The movable portion includes an elastic member that expands and contracts in the first direction. 如申請專利範圍第1項至第3項中任一項所述的檢查單元,其於所述第一方向上,更包括: 移動限制部,與所述第一檢查治具及所述第二檢查治具排列配置,且 在所述移動限制部與所述第二檢查治具之間配置所述第一檢查治具,藉由所述移動限制部來限制所述第一檢查治具於所述第一方向上且朝遠離所述第二檢查治具的方向的移動。The inspection unit according to any one of claims 1 to 3 in the scope of patent application, further comprising: The movement restricting portion is arranged in alignment with the first inspection jig and the second inspection jig, and The first inspection jig is disposed between the movement restriction part and the second inspection jig, and the first inspection jig is restricted by the movement restriction part in the first direction and toward the first direction. Move away from the direction of the second inspection jig. 如申請專利範圍第4項所述的檢查單元,其中 所述移動限制部為第一移動限制部, 於所述第一方向上,更包括與所述第一移動限制部、所述第一檢查治具及所述第二檢查治具排列配置的第二移動限制部, 在所述第二移動限制部與所述第一檢查治具之間配置所述第二檢查治具,藉由所述第二移動限制部來限制所述第二檢查治具於所述第一方向上且朝遠離所述第一檢查治具的方向的移動。The inspection unit according to item 4 of the scope of patent application, wherein The movement restriction portion is a first movement restriction portion, In the first direction, it further includes a second movement restricting portion arranged in alignment with the first movement restricting portion, the first inspection jig, and the second inspection jig, The second inspection jig is arranged between the second movement restriction part and the first inspection jig, and the second inspection jig is restricted by the second movement restriction part to the first inspection jig. Moving in a direction and away from the first inspection jig. 一種檢查裝置,包括: 至少一個如申請專利範圍第1項至第5項中任一項所述的檢查單元。An inspection device includes: At least one inspection unit according to any one of claims 1 to 5 of the scope of patent application.
TW108104106A 2018-03-07 2019-02-01 Inspection unit and inspection device TWI697677B (en)

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JP6881354B2 (en) 2021-06-02
KR20200112889A (en) 2020-10-05
KR102445148B1 (en) 2022-09-21
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TWI697677B (en) 2020-07-01
CN111712714A (en) 2020-09-25

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