JP2019158368A - Inspection unit and inspection apparatus - Google Patents

Inspection unit and inspection apparatus Download PDF

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JP2019158368A
JP2019158368A JP2018041068A JP2018041068A JP2019158368A JP 2019158368 A JP2019158368 A JP 2019158368A JP 2018041068 A JP2018041068 A JP 2018041068A JP 2018041068 A JP2018041068 A JP 2018041068A JP 2019158368 A JP2019158368 A JP 2019158368A
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Prior art keywords
inspection
contact
inspection jig
jig
movement
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JP6881354B2 (en
Inventor
直哉 笹野
Naoya Sasano
直哉 笹野
宏真 寺西
Hirosane Teranishi
宏真 寺西
貴浩 酒井
Takahiro Sakai
貴浩 酒井
チェ・シホン
Si Hun Choi
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Omron Corp
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Omron Corp
Omron Tateisi Electronics Co
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Priority to JP2018041068A priority Critical patent/JP6881354B2/en
Priority to PCT/JP2019/001829 priority patent/WO2019171797A1/en
Priority to CN201980012891.3A priority patent/CN111712714B/en
Priority to KR1020207023707A priority patent/KR102445148B1/en
Priority to TW108104106A priority patent/TWI697677B/en
Publication of JP2019158368A publication Critical patent/JP2019158368A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors

Abstract

To provide an inspection unit capable of contacting a contact part of a contact in a direction different from the approaching direction to an object to be inspected.SOLUTION: The inspection unit has a contact, a first inspection device, and a second inspection device. The contact is equipped with a first contact part which can contact with an object to be inspected on one end and a second contact part which can contact with an inspection apparatus on the other end. The first inspection device and second inspection device respectively have a housing which houses the contact part in a state where the first contact part is exposed to the outside, and are arranged side by side along a first direction. At least one of the first inspection device and second inspection device is disposed so as to be movable in the first direction. At least one of the first inspection device and second inspection device is moved in the first direction in a state where the object to be inspected is close to each of the first contact part from a second direction, whereby each of the first contact part is brought into contact with the object to be inspected in the first direction.SELECTED DRAWING: Figure 2

Description

本開示は、検査ユニット、および、この検査ユニットを備えた検査装置に関する。   The present disclosure relates to an inspection unit and an inspection apparatus including the inspection unit.

カメラあるいは液晶パネル等の電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板と接続するためのＦＰＣ接触電極あるいは実装された基板対基板コネクタ等の電極部と検査装置とを接続することにより行われる。   In an electronic component module such as a camera or a liquid crystal panel, a continuity test and an operation characteristic test are generally performed in the manufacturing process. These inspections use probe pins to connect the inspection device with an FPC contact electrode or a board-to-board connector mounted FPC contact electrode for connection to the main body board installed in the electronic component module. Done.

このような検査を行う治具としては、例えば、特許文献１に記載された電子部品用ソケットがある。この電子部品用ソケットは、電子部品の電極端子および被接続電子部品の電極端子に対してそれぞれ接触可能な一対のコンタクトを有する電極部と、この電極を内部に収容するソケット本体とを備えている。前記電子部品用ソケットでは、電極部が一対のコンタクトを結んだ配列方向に沿って伸縮することにより、各コンタクトがこの配列方向に沿って往復移動して電子部品の電極端子および被接続電子部品の電極端子に対してその配列方向で接触するように構成されている。   As a jig for performing such an inspection, for example, there is a socket for electronic components described in Patent Document 1. This socket for electronic parts includes an electrode part having a pair of contacts that can contact the electrode terminal of the electronic part and the electrode terminal of the connected electronic part, and a socket body that accommodates the electrode inside. . In the electronic component socket, the electrodes extend and contract along the arrangement direction connecting the pair of contacts, so that each contact reciprocates along the arrangement direction, and the electrode terminal of the electronic component and the connected electronic component It is comprised so that it may contact with the electrode terminal in the arrangement direction.

特開２００２−１３４２０２号公報JP 2002-134202 A

近年、検査装置および検査対象物の多様化に伴って、各コンタクトが同一方向に沿って検査対象物に対して接近し、その接近方向で接触する、いわゆる直線型の前記電子部品用ソケットでは対応することが困難な場合が増えている。   In recent years, with the diversification of inspection devices and inspection objects, so-called linear type sockets for electronic parts, in which each contact approaches the inspection object along the same direction and contacts in the approaching direction, are supported. More and more cases are difficult to do.

例えば、ディスプレイモジュールの検査は、ディスプレイパネル上に電極部が配置された状態で行われる場合がある。このような検査に前記電子部品用ソケットを用いると、一方のコンタクトがディスプレイパネル上の電極部に接近方向で接触し、他方のコンタクトが検査装置に接触するが、ディスプレイパネルが有機ＥＬのような強度の弱い材料で構成されていると、前記プローブピンが接近方向で接触したときにディスプレイに過度な力が作用してしまい、ディスプレイパネルが割れてしまう可能性がある。   For example, the display module may be inspected in a state where an electrode portion is disposed on the display panel. When the electronic component socket is used for such inspection, one contact contacts the electrode part on the display panel in the approaching direction, and the other contact contacts the inspection device. When the probe pin is made of a material having a low strength, an excessive force acts on the display when the probe pin contacts in the approaching direction, and the display panel may be broken.

本開示は、接触子の接点部を検査対象物に対する接近方向とは異なる方向で接触させることが可能な検査ユニット、および、この検査ユニットを備えた検査装置を提供することを目的とする。   An object of the present disclosure is to provide an inspection unit capable of bringing a contact portion of a contact into contact with an inspection object in a direction different from an approaching direction, and an inspection apparatus including the inspection unit.

本開示の一例の検査ユニットは、
検査対象物に接触可能な第１接点部と検査装置に接触可能な第２接点部が両端部にそれぞれ設けられた接触子と、
前記第１接点部が外部に露出した状態で前記接触子を内部に収容するハウジングと
をそれぞれ有し、第１方向に沿って並んで配置された第１検査治具および第２検査治具を備え、
前記第１検査治具および前記第２検査治具の少なくとも一方が、前記第１方向に沿って移動可能に配置され、
前記第１方向に交差する第２方向から前記第１接点部の各々に前記検査対象物を相対的に接近させた状態で、前記第１検査治具および前記第２検査治具の少なくとも一方を前記第１方向に沿って移動させることで、前記第１接点部の各々が、前記第１方向において前記検査対象物に接触する。 An example inspection unit of the present disclosure is:
A contact provided with a first contact portion that can contact the inspection object and a second contact portion that can contact the inspection device, at both ends; and
A first inspection jig and a second inspection jig, which are each arranged side by side along a first direction, each having a housing for accommodating the contact in the state where the first contact portion is exposed to the outside. Prepared,
At least one of the first inspection jig and the second inspection jig is arranged to be movable along the first direction;
At least one of the first inspection jig and the second inspection jig is placed in a state in which the inspection object is relatively approached to each of the first contact portions from the second direction intersecting the first direction. By moving along the first direction, each of the first contact portions comes into contact with the inspection object in the first direction.

また、本開示の一例の検査装置は、
前記検査ユニットを少なくとも１つ備えた。 In addition, an inspection apparatus according to an example of the present disclosure includes:
At least one inspection unit is provided.

前記検査ユニットによれば、第１検査治具および第２検査治具の少なくとも一方が、第１方向に沿って移動可能に配置され、第２方向から第１接点部の各々に検査対象物を接近させた状態で、第１検査治具および第２検査治具のいずれかを第１方向に沿って移動させることで、第１接点部の各々が第１方向において検査対象物に接触する。これにより、接触子の第１接点部を検査対象物に対する第２方向（すなわち、接近方向）とは異なる第１方向で接触可能な検査ユニットを実現できる。   According to the inspection unit, at least one of the first inspection jig and the second inspection jig is arranged to be movable along the first direction, and the inspection object is placed on each of the first contact portions from the second direction. In a state of being brought close, by moving either the first inspection jig or the second inspection jig along the first direction, each of the first contact portions comes into contact with the inspection object in the first direction. Thereby, the test | inspection unit which can contact the 1st contact part of a contact in the 1st direction different from the 2nd direction (namely, approach direction) with respect to a test subject is realizable.

また、前記検査装置によれば、前記検査ユニットにより、検査装置および検査対象物の多様化に対応可能な検査装置を実現できる。   Moreover, according to the said inspection apparatus, the inspection apparatus which can respond to diversification of an inspection apparatus and a test target object is realizable by the said inspection unit.

本開示の一実施形態の検査ユニットを示す斜視図。The perspective view which shows the test | inspection unit of one Embodiment of this indication. 図１のII-II線に沿った断面図。Sectional drawing along the II-II line of FIG. 図１の検査ユニットに基板対基板コネクタを接触させるときの動作を説明するための第１の模式図。The 1st schematic diagram for demonstrating operation | movement when making a board | substrate to board connector contact the test | inspection unit of FIG. 図１の検査ユニットに基板対基板コネクタを接触させるときの動作を説明するための第２の模式図。The 2nd schematic diagram for demonstrating operation | movement when making a board | substrate to board connector contact the test | inspection unit of FIG. 図１の検査ユニットに基板対基板コネクタを接触させるときの動作を説明するための第３の模式図。The 3rd schematic diagram for demonstrating operation | movement when making a board | substrate to board connector contact the test | inspection unit of FIG. 図１の検査ユニットに基板対基板コネクタを接触させるときの動作を説明するための第４の模式図。FIG. 6 is a fourth schematic diagram for explaining an operation when a board-to-board connector is brought into contact with the inspection unit of FIG. 1. 図１の検査ユニットの第１の変形例を示す断面図。Sectional drawing which shows the 1st modification of the test | inspection unit of FIG. 図１の検査ユニットの第２の変形例を示す斜視図。The perspective view which shows the 2nd modification of the test | inspection unit of FIG. 図８のIX-IX線に沿った断面図。Sectional drawing along the IX-IX line of FIG. 図１の検査ユニットの第３の変形例を示す斜視図。The perspective view which shows the 3rd modification of the test | inspection unit of FIG. 図１０のXI-XI線に沿った断面図。Sectional drawing along the XI-XI line of FIG.

以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語（例えば、「上」、「下」、「右」、「左」を含む用語）を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。   Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. In the following description, terms indicating specific directions or positions (for example, terms including “up”, “down”, “right”, “left”) are used as necessary. Is for facilitating the understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meaning of these terms. Further, the following description is merely illustrative in nature and is not intended to limit the present disclosure, the application thereof, or the use thereof. Furthermore, the drawings are schematic, and the ratios of dimensions and the like do not necessarily match the actual ones.

本開示の一実施形態の検査ユニット１は、図１に示すように、第１検査治具２および第２検査治具３を備え、図２に示すように、第１方向Ｘに沿って隙間４を空けて並んで配置されている。   An inspection unit 1 according to an embodiment of the present disclosure includes a first inspection jig 2 and a second inspection jig 3 as illustrated in FIG. 1, and a gap along the first direction X as illustrated in FIG. 2. 4 are arranged side by side.

第１検査治具２および第２検査治具３の各々は、図２に示すように、導電性の接触子１０と、この接触子１０を内部に収容する絶縁性のハウジング２０とを有している。この検査ユニット１では、一例として、図１に示すように、第１検査治具２および第２検査治具３の各々が、第１方向Ｘに直交する第２方向Ｙに延びる棒状の接触子１０を複数有している。各検査治具２、３の接触子１０は、第１方向Ｘおよび第２方向Ｙに直交する第３方向Ｚに沿って等間隔で一列に配置されている。   As shown in FIG. 2, each of the first inspection jig 2 and the second inspection jig 3 includes a conductive contact 10 and an insulating housing 20 that houses the contact 10 therein. ing. In this inspection unit 1, as an example, as shown in FIG. 1, each of the first inspection jig 2 and the second inspection jig 3 is a rod-shaped contact that extends in a second direction Y orthogonal to the first direction X. 10 is provided. The contacts 10 of the inspection jigs 2 and 3 are arranged in a line at equal intervals along a third direction Z orthogonal to the first direction X and the second direction Y.

各接触子１０は、図２に示すように、その延在方向の両端部にそれぞれ設けられた第１接点部１１および第２接点部１２を有している。第１接点部１１は、検査対象物（例えば、ディスプレイパネル上に配置された基板対基板コネクタ１１０の電極部１１１）に接触可能に構成され、第２接点部１２は、検査装置の基板１００の表面に設けられた端子１０１に接触可能に構成されている。   As shown in FIG. 2, each contact 10 has a first contact portion 11 and a second contact portion 12 provided at both ends in the extending direction. The 1st contact part 11 is comprised so that a test target object (for example, electrode part 111 of the board | substrate to board connector 110 arrange | positioned on a display panel) is contactable, and the 2nd contact part 12 is the board | substrate 100 of a test | inspection apparatus. The terminal 101 provided on the surface is configured to be contactable.

なお、この実施形態では、検査装置の基板１００および基板対基板コネクタ１１０は、基板１００の端子１０１が基板対基板コネクタ１１０の電極部１１１にＹ方向で対向するように配置されている。また、図示していないが、ディスプレイパネルは、基板対基板コネクタ１１０に対して検査装置の基板１００の第２方向Ｙにおける反対側に配置されている。すなわち、ディスプレイパネルと検査装置の基板１００との間に、基板対基板コネクタ１１０が位置している。   In this embodiment, the board 100 and the board-to-board connector 110 of the inspection apparatus are arranged so that the terminals 101 of the board 100 face the electrode portions 111 of the board-to-board connector 110 in the Y direction. Although not shown, the display panel is disposed on the opposite side of the substrate 100 of the inspection apparatus in the second direction Y with respect to the board-to-board connector 110. That is, the board-to-board connector 110 is located between the display panel and the board 100 of the inspection apparatus.

各ハウジング２０は、図２に示すように、その内部に接触子１０を収容可能な複数の収容部２１を有している。各収容部２１の第２方向Ｙの両端部には、それぞれ開口部２２、２３が設けられている。各接触子１０は、その両端部が開口部２２、２３からハウジング２０の外部に突出して、各接点部１１、１２がハウジング２０の外部に露出した状態で、各収容部２１に収容されている。すなわち、前記検査ユニット１では、第１接点部１１に加えて第２接点部１２もハウジング２０の外部に露出している。   As shown in FIG. 2, each housing 20 has a plurality of accommodating portions 21 that can accommodate the contacts 10 therein. Openings 22 and 23 are provided at both ends in the second direction Y of each accommodating portion 21, respectively. Each contact 10 is accommodated in each accommodating portion 21 with both end portions protruding from the openings 22 and 23 to the outside of the housing 20 and the contact portions 11 and 12 exposed to the outside of the housing 20. . That is, in the inspection unit 1, in addition to the first contact portion 11, the second contact portion 12 is also exposed to the outside of the housing 20.

また、検査ユニット１は、図２に示すように、第１検査治具２および第２検査治具３の間の隙間４に配置され、第１検査治具２のハウジング２０および第２検査治具３のハウジング２０に接続された可動部３０を備えている。この可動部３０は、第１方向Ｘに伸縮する弾性部材（例えば、コイルばね）を有し、第１検査治具２および第２検査治具３の各々を第１方向Ｘに独立して進退移動させることができるように構成されている。   Further, as shown in FIG. 2, the inspection unit 1 is disposed in the gap 4 between the first inspection jig 2 and the second inspection jig 3, and the housing 20 of the first inspection jig 2 and the second inspection jig. A movable part 30 connected to the housing 20 of the tool 3 is provided. The movable portion 30 has an elastic member (for example, a coil spring) that expands and contracts in the first direction X, and each of the first inspection jig 2 and the second inspection jig 3 advances and retreats independently in the first direction X. It is configured so that it can be moved.

なお、この実施形態では、各検査治具２、３の移動に伴って、各検査治具２、３の接触子１０の第２接点部１２が接触した端子１０１を有する基板１００もそれぞれ第１方向Ｘに独立して進退移動する。   In this embodiment, each of the substrates 100 having the terminals 101 with which the second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 are in contact with the movement of the inspection jigs 2 and 3 is also first. Move forward and backward independently in direction X.

さらに、検査ユニット１は、図２に示すように、第１方向Ｘにおいて、第１検査治具２および第２検査治具３と並んで配置された第１移動規制部４１および第２移動規制部４２を備えている。第１移動規制部４１および第２移動規制部４２の各々は、一例として、絶縁性の剛体で構成されている。   Further, as shown in FIG. 2, the inspection unit 1 includes a first movement restriction unit 41 and a second movement restriction that are arranged side by side with the first inspection jig 2 and the second inspection jig 3 in the first direction X. A portion 42 is provided. Each of the 1st movement control part 41 and the 2nd movement control part 42 is comprised by the insulating rigid body as an example.

第１移動規制部４１は、第１方向Ｘにおいて、第１検査治具２に対する第２検査治具３の反対側に隙間５を空けて配置され、第２移動規制部４２は、第２検査治具３に対する第１検査治具２の反対側に隙間６を空けて配置されている。すなわち、第１移動規制部４１と第２検査治具３との間に第１検査治具２が配置され、第２移動規制部４２と第１検査治具２との間に第２検査治具３が配置されている。   The first movement restricting portion 41 is arranged with a gap 5 on the opposite side of the second inspection jig 3 with respect to the first inspection jig 2 in the first direction X, and the second movement restricting portion 42 A gap 6 is arranged on the opposite side of the first inspection jig 2 with respect to the jig 3. That is, the first inspection jig 2 is disposed between the first movement restricting portion 41 and the second inspection jig 3, and the second inspection treatment is disposed between the second movement restricting portion 42 and the first inspection jig 2. A tool 3 is arranged.

図２に示すように、第１移動規制部４１は、第１検査治具２の第１方向Ｘでかつ第２検査治具３から離れる方向（すなわち、図２の左向き）への移動を規制する。また、第２移動規制部４２は、第２検査治具３の第１方向Ｘでかつ第１検査治具２から離れる方向（すなわち、図２の右向き）への移動を規制する。   As shown in FIG. 2, the first movement restricting portion 41 restricts movement of the first inspection jig 2 in the first direction X and away from the second inspection jig 3 (that is, leftward in FIG. 2). To do. The second movement restricting portion 42 restricts the movement of the second inspection jig 3 in the first direction X and in the direction away from the first inspection jig 2 (that is, rightward in FIG. 2).

なお、前記検査ユニット１では、第１移動規制部４１および第２移動規制部４２は、一例として、検査装置の基板１００に固定されている。   In the inspection unit 1, the first movement restriction unit 41 and the second movement restriction unit 42 are fixed to the substrate 100 of the inspection apparatus as an example.

続いて、図３〜図６を参照して、前記検査ユニット１の各第１接点部１１を検査対象物（例えば、基板対基板コネクタ１１０の電極部１１１）に接続させるときの動作について説明する。なお、基板対基板コネクタ１１０は、第２方向Ｙに開口する２つの凹部１１２を有し、この凹部１１２の第１方向Ｘにおける外側面に電極部１１１がそれぞれ設けられている。   Next, with reference to FIGS. 3 to 6, an operation when each first contact portion 11 of the inspection unit 1 is connected to an inspection object (for example, the electrode portion 111 of the board-to-board connector 110) will be described. . The board-to-board connector 110 has two recesses 112 that open in the second direction Y, and electrode portions 111 are provided on the outer surfaces of the recesses 112 in the first direction X, respectively.

まず、図３に示すように、第１検査治具２および第２検査治具３に対して、第１方向Ｘでかつ相互に接近させる方向の外力を加え、各検査治具２、３を可動部３０の弾性力に抗して矢印Ａ方向にそれぞれ移動させて、各検査治具２、３の接触子１０の第１接点部１１を基板対基板コネクタ１１０の２つの凹部１１２に対向させる。   First, as shown in FIG. 3, an external force is applied to the first inspection jig 2 and the second inspection jig 3 in the first direction X and in the direction in which the inspection jigs 2 and 3 approach each other. The first contact portion 11 of the contact 10 of each of the inspection jigs 2 and 3 is opposed to the two concave portions 112 of the board-to-board connector 110 by moving in the direction of arrow A against the elastic force of the movable portion 30. .

そして、図４に示すように、基板対基板コネクタ１１０を第２方向Ｙでかつ検査ユニット１に接近する方向（すなわち、図４の矢印Ｂ方向）に移動させて、図５に示すように、各検査治具２、３の接触子１０の第１接点部１１が、基板対基板コネクタ１１０の凹部１１２の内部でかつ凹部１１２の底面１１３に接触しない挿入位置に位置させる。   Then, as shown in FIG. 4, the board-to-board connector 110 is moved in the second direction Y and in the direction approaching the inspection unit 1 (that is, in the direction of arrow B in FIG. 4), and as shown in FIG. The first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 are positioned at the insertion positions inside the recess 112 of the board-to-board connector 110 and not in contact with the bottom surface 113 of the recess 112.

このとき、第１接点部１１が凹部１１２の第１方向Ｘに対向する一対の側面の一方に接触しながら凹部１１２内の挿入位置まで移動するように、基板対基板コネクタ１１０を検査ユニット１に相対的に接近させてもよいし、第１接点部１１が凹部１１２の第１方向Ｘに対向する一対の側面の一方に接触せずに凹部１１２内の挿入位置まで移動するように、基板対基板コネクタ１１０を検査ユニット１に相対的に接近させてもよい。   At this time, the board-to-board connector 110 is moved to the inspection unit 1 so that the first contact portion 11 moves to the insertion position in the recess 112 while contacting one of the pair of side surfaces facing the first direction X of the recess 112. The first contact portion 11 may be moved closer to the insertion position in the recess 112 without contacting one of the pair of side surfaces facing the first direction X of the recess 112. The board connector 110 may be relatively close to the inspection unit 1.

各検査治具２、３の接触子１０の第１接点部１１が挿入位置まで移動すると、各検査治具２、３に加えていた外力を解放して、各検査治具２、３を可動部３０の弾性部材の復帰力により第１方向Ｘでかつ相互に離れる方向（すなわち、図５の矢印Ｃ方向）にそれぞれ移動させる。これにより、図６に示すように、各検査治具２、３の接触子１０の第１接点部１１が、基板対基板コネクタ１１０の電極部１１１に接触する接触位置まで移動して、検査ユニット１と基板対基板コネクタ１１０とが電気的に接続される。   When the first contact portion 11 of the contact 10 of each inspection jig 2 and 3 moves to the insertion position, the external force applied to each inspection jig 2 and 3 is released, and each inspection jig 2 and 3 can be moved. The elastic member of the portion 30 is moved in the first direction X and away from each other (that is, the direction of arrow C in FIG. 5) by the restoring force of the elastic member. Thereby, as shown in FIG. 6, the first contact portion 11 of the contact 10 of each inspection jig 2, 3 moves to the contact position where it contacts the electrode portion 111 of the board-to-board connector 110. 1 and the board-to-board connector 110 are electrically connected.

前記検査ユニット１では、第１検査治具２および第２検査治具３が第１方向Ｘに沿ってそれぞれ移動可能に並んで配置され、第２方向Ｙから第１接点部１１の各々に基板対基板コネクタ１１０を接近させた状態で、第１検査治具２および第２検査治具３を第１方向Ｘに沿って移動させることで、第１接点部１１の各々が、第１方向Ｘにおいて基板対基板コネクタ１１０に接触する。これにより、接触子１０の第１接点部１１を基板対基板コネクタ１１０に対する第２方向Ｙ（すなわち、接近方向）とは異なる第１方向Ｘで接触させることができるので、基板対基板コネクタ１１０を介してディスプレイパネルに対して接近方向に過度な力が作用することなく、ディスプレイパネルの破損を防止可能な検査ユニット１を実現できる。   In the inspection unit 1, the first inspection jig 2 and the second inspection jig 3 are arranged side by side so as to be movable along the first direction X, and the substrate is placed on each of the first contact portions 11 from the second direction Y. By moving the first inspection jig 2 and the second inspection jig 3 along the first direction X with the board-to-board connector 110 approaching, each of the first contact portions 11 is moved in the first direction X. Contact the board-to-board connector 110. Accordingly, the first contact portion 11 of the contact 10 can be brought into contact with the board-to-board connector 110 in the first direction X different from the second direction Y (that is, the approaching direction). Thus, it is possible to realize the inspection unit 1 capable of preventing the display panel from being damaged without applying an excessive force in the approaching direction to the display panel.

また、前記検査ユニット１が、第１検査治具２および第２検査治具３を第１方向Ｘに移動させる可動部３０をさらに備えている。この可動部３０により、第１検査治具２および第２検査治具３を第１方向Ｘに容易に移動させることができる。   The inspection unit 1 further includes a movable portion 30 that moves the first inspection jig 2 and the second inspection jig 3 in the first direction X. By this movable portion 30, the first inspection jig 2 and the second inspection jig 3 can be easily moved in the first direction X.

また、可動部３０が、第１検査治具２のハウジング２０および第２検査治具３のハウジング２０に接続され、第１方向Ｘに伸縮する弾性部材を有している。これにより、第１方向Ｘにおいて、各検査治具２、３の接触子１０の第１接点部１１を基板対基板コネクタ１１０の電極部１１１に押圧することができるので、第１接点部１１と基板対基板コネクタ１１０との間の接触信頼性を高めることができる。   The movable portion 30 includes an elastic member that is connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3 and expands and contracts in the first direction X. Thereby, in the 1st direction X, since the 1st contact part 11 of the contactor 10 of each inspection jig | tool 2, 3 can be pressed to the electrode part 111 of the board | substrate connector 110, the 1st contact part 11 and Contact reliability between the board-to-board connector 110 can be improved.

また、前記検査ユニット１が、第１方向Ｘにおいて、第１検査治具２および第２検査治具３と並んで配置された第１移動規制部４１をさらに備え、第１移動規制部４１と第２検査治具３との間に第１検査治具２が配置され、第１移動規制部４１によって第１検査治具２の第１方向Ｘでかつ第２検査治具３から離れる方向への移動が規制される。例えば、第１検査治具２が第１方向Ｘでかつ第２検査治具３から離れる方向に移動したときに、第１検査治具２の接触子１０の第１接点部１１に過剰な力が加えられて第１検査治具２の接触子１０が破損するのを、第１移動規制部４１により防止できる。   The inspection unit 1 further includes a first movement restricting portion 41 arranged side by side with the first inspection jig 2 and the second inspection jig 3 in the first direction X. The first inspection jig 2 is disposed between the second inspection jig 3 and the first movement restricting portion 41 moves in the first direction X of the first inspection jig 2 and away from the second inspection jig 3. Movement is restricted. For example, when the first inspection jig 2 moves in the first direction X and away from the second inspection jig 3, excessive force is applied to the first contact portion 11 of the contact 10 of the first inspection jig 2. The first movement restricting portion 41 can prevent the contact 10 of the first inspection jig 2 from being damaged by being added.

また、前記検査ユニット１が、第１方向Ｘにおいて、第１移動規制部４１、第１検査治具２および第２検査治具３と並んで配置された第２移動規制部４２をさらに備え、第２移動規制部４２と第１検査治具２との間に第２検査治具３が配置され、第２移動規制部４２によって第２検査治具３の第１方向Ｘでかつ第１検査治具２から離れる方向への移動が規制される。例えば、第２検査治具３が第１方向Ｘでかつ第１検査治具２から離れる方向に移動したときに、第２検査治具３の接触子１０の第１接点部１１に過剰な力が加えられて第２検査治具３の接触子１０が破損するのを、第２移動規制部４２により防止できる。   The inspection unit 1 further includes a second movement restricting portion 42 arranged in the first direction X along with the first movement restricting portion 41, the first inspection jig 2, and the second inspection jig 3. The second inspection jig 3 is disposed between the second movement restriction portion 42 and the first inspection jig 2, and the first inspection X in the first direction X of the second inspection jig 3 is performed by the second movement restriction portion 42. Movement in a direction away from the jig 2 is restricted. For example, when the second inspection jig 3 moves in the first direction X and away from the first inspection jig 2, excessive force is applied to the first contact portion 11 of the contact 10 of the second inspection jig 3. The second movement restricting portion 42 can prevent the contact 10 of the second inspection jig 3 from being damaged due to being added.

なお、各移動規制部材４１、４２と各検査治具２、３のハウジング２０との間の各隙間５、６は、各接触子１０の第１接点部１１と基板対基板コネクタ１１０の電極部１１１との間の接圧を確保しつつ、第１検査治具２の接触子１０の第１接点部１１に過剰な力が加えられて第１検査治具２の接触子１０が破損するのを防止できるように構成されている。例えば、各隙間５、６の第１方向Ｘの寸法は、第１接点部１１を基板対基板コネクタ１１０の凹部１１２の側面に接触した状態で挿入したときの第１方向Ｘにおける第１接点部１１と凹部１１２の側面との間の最短距離以上、基板対基板コネクタ１１０の凹部１１２の第１方向Ｘの寸法以下の範囲内にあるように構成することができる。   The clearances 5 and 6 between the movement restricting members 41 and 42 and the housings 20 of the inspection jigs 2 and 3 are the first contact part 11 of each contactor 10 and the electrode part of the board-to-board connector 110. The contact 10 of the first inspection jig 2 is damaged by applying excessive force to the first contact portion 11 of the contact 10 of the first inspection jig 2 while securing the contact pressure with the first inspection jig 2. It is comprised so that it can prevent. For example, the dimension of each gap 5, 6 in the first direction X is such that the first contact portion in the first direction X when the first contact portion 11 is inserted in contact with the side surface of the recess 112 of the board-to-board connector 110. 11 and the side surface of the recess 112 can be configured to be within the range of the shortest distance or more and not more than the dimension of the recess 112 of the board-to-board connector 110 in the first direction X.

また、前記検査装置によれば、前記検査ユニット１により、検査装置および検査対象物の多様化に対応可能な検査装置を実現できる。   Moreover, according to the said inspection apparatus, the inspection apparatus which can respond to the diversification of an inspection apparatus and a test target object by the said inspection unit 1 is realizable.

なお、第１検査治具２および第２検査治具３は、その少なくとも一方が第１方向Ｘに沿って移動可能に配置されていればよい。例えば、図７に示すように、第１検査治具２を検査装置の基板１００に固定して、第２検査治具３と第２移動規制部４１との間に可動部３０を設けてもよい。この場合、可動部３０は、第１検査治具２および第２検査治具３の少なくともいずれか（図７では、第２検査治具３）を第１方向Ｘに沿って移動させるように構成されている。なお、図７に示す検査ユニット１では、第１移動規制部４１を省略している。   It should be noted that at least one of the first inspection jig 2 and the second inspection jig 3 may be arranged so as to be movable along the first direction X. For example, as shown in FIG. 7, the first inspection jig 2 may be fixed to the substrate 100 of the inspection apparatus, and the movable unit 30 may be provided between the second inspection jig 3 and the second movement restriction unit 41. Good. In this case, the movable portion 30 is configured to move at least one of the first inspection jig 2 and the second inspection jig 3 (in FIG. 7, the second inspection jig 3) along the first direction X. Has been. In the inspection unit 1 shown in FIG. 7, the first movement restriction unit 41 is omitted.

第１検査治具２および第２検査治具３の各接触子１０は、検査対象物に接触可能な第１接点部１１と検査装置に接触可能な第２接点部１２が両端部にそれぞれ設けられていればよく、検査ユニット１の設計等に応じて、任意の構成の接触子１０を用いることができる。例えば、図８および図９に示すように、第１方向Ｘに延びる直線帯部１３と、直線帯部１３に接続された湾曲帯部１４とが交互に連続する蛇行形状を有する接触子１０を用いることもできる。また、例えば、第１接点部１１および第２接点部１２の各々は、検査装置あるいは検査対象物の様々な態様に応じて、形状および位置などを適宜変更することができる。   Each contact 10 of the first inspection jig 2 and the second inspection jig 3 is provided with a first contact portion 11 that can contact an inspection object and a second contact portion 12 that can contact an inspection device at both ends. The contactor 10 having an arbitrary configuration can be used depending on the design of the inspection unit 1 or the like. For example, as shown in FIG. 8 and FIG. 9, a contact 10 having a meandering shape in which a straight strip 13 extending in the first direction X and a curved strip 14 connected to the straight strip 13 are alternately arranged. It can also be used. Further, for example, each of the first contact portion 11 and the second contact portion 12 can be appropriately changed in shape, position, and the like according to various aspects of the inspection device or the inspection object.

可動部３０、第１移動規制部４１および第２移動規制部４２は、省略することもできる。例えば、可動部３０を省略した場合、ユーザが、手動で第１検査治具２および第２検査治具３の各々を移動させることで、各第１接点部１１を第１方向Ｘにおいて基板対基板コネクタ１１０の電極部１１１に接触させることができる。   The movable part 30, the 1st movement control part 41, and the 2nd movement control part 42 are also omissible. For example, when the movable portion 30 is omitted, the user manually moves each of the first inspection jig 2 and the second inspection jig 3 so that each first contact portion 11 is moved to the substrate pair in the first direction X. It can be brought into contact with the electrode part 111 of the board connector 110.

可動部３０は、第１方向Ｘに伸縮する弾性部材に限らず、第１検査治具２および第２検査治具３の少なくとも一方を第１方向Ｘに移動させることができる任意の構成を採用できる。また、第１検査治具２のハウジング２０および第２検査治具３のハウジング２０に接続されている場合に限らず、例えば、第１検査治具２の第２接点部１２が接続されている検査装置の基板１００と、第２検査治具３の第２接点部１２が接続されている検査装置の基板１００とに接続されていてもよい。   The movable portion 30 is not limited to an elastic member that expands and contracts in the first direction X, and adopts an arbitrary configuration that can move at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X. it can. Moreover, it is not restricted to the case where it connects with the housing 20 of the 1st inspection jig 2, and the housing 20 of the 2nd inspection jig 3, For example, the 2nd contact part 12 of the 1st inspection jig 2 is connected. It may be connected to the substrate 100 of the inspection apparatus and the substrate 100 of the inspection apparatus to which the second contact portion 12 of the second inspection jig 3 is connected.

検査ユニット１は、検査装置の様々な態様に応じて、その構成を適宜変更することができる。例えば、図１０および図１１に示すように、対向するように配置された検査装置の一対の基板１００の各端子１０１と、一対の基板１００が対向する方向に交差（例えば、直交）する方向に配置された基板対基板コネクタ１１０の電極部１１１とに接触可能に、検査ユニット１を構成することもできる。   The configuration of the inspection unit 1 can be changed as appropriate according to various aspects of the inspection apparatus. For example, as shown in FIGS. 10 and 11, the terminals 101 of the pair of substrates 100 of the inspection apparatus arranged to face each other and the direction in which the pair of substrates 100 cross each other (for example, orthogonal) The inspection unit 1 can also be configured so as to be able to come into contact with the electrode part 111 of the board-to-board connector 110 arranged.

図１０および図１１に示す検査ユニット１では、各検査治具２、３が、第１方向Ｘに沿って延びる接触子１０の第１接点部１１側の端部が、第１方向Ｘにおいて相互に対向するように配置されている。各検査治具２、３の接触子１０の第１接点部１１側の端部は、第１方向Ｘから第２方向Ｙに屈曲しており、その先端部に第１接点部１１が設けられている。各第１接点部１１は、第２方向Ｙにおいて、基板対基板コネクタ１１０の電極部１１１に接触可能に配置されている。また、各検査治具２、３の接触子１０の第２接点部１２は、第１方向Ｘに対向する一対の基板１００の端子１０１に、それぞれ第１方向Ｘで接触可能に配置されている。   In the inspection unit 1 shown in FIGS. 10 and 11, the inspection jigs 2 and 3 are arranged so that the end portions on the first contact portion 11 side of the contact 10 extending along the first direction X are mutually in the first direction X. It arrange | positions so that it may oppose. The end of the contact 10 on the first contact portion 11 side of each inspection jig 2 and 3 is bent from the first direction X to the second direction Y, and the first contact portion 11 is provided at the tip. ing. Each first contact portion 11 is arranged to be able to contact the electrode portion 111 of the board-to-board connector 110 in the second direction Y. The second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 are disposed so as to be able to contact the terminals 101 of the pair of substrates 100 facing the first direction X in the first direction X, respectively. .

また、図１０および図１１に示す検査ユニット１では、検査装置の一対の基板１００と共に各検査治具２、３を第１方向Ｘに移動させることができる可動部（図示せず）を有し、この可動部によって、第１接点部１１の各々が、第１方向Ｘにおいて基板対基板コネクタ１１０の電極部１１１に接触可能に構成されている。   The inspection unit 1 shown in FIGS. 10 and 11 has a movable part (not shown) that can move the inspection jigs 2 and 3 in the first direction X together with the pair of substrates 100 of the inspection apparatus. By this movable part, each of the first contact parts 11 is configured to be able to contact the electrode part 111 of the board-to-board connector 110 in the first direction X.

なお、図１０および図１１に示す検査ユニット１の各検査治具２、３は、第１方向Ｘに延びる直線帯部１３と、直線帯部１３に接続された湾曲帯部１４とが交互に連続する蛇行形状を有する接触子１０を備えている。   In addition, each inspection jig 2 and 3 of the inspection unit 1 shown in FIG. 10 and FIG. 11 has alternating straight strips 13 extending in the first direction X and curved strips 14 connected to the straight strips 13. A contact 10 having a continuous meandering shape is provided.

以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。   Although various embodiments in the present disclosure have been described in detail above with reference to the drawings, finally, various aspects of the present disclosure will be described. In the following description, reference numerals are also given as an example.

本開示の第１態様の検査ユニット１は、
検査対象物に接触可能な第１接点部１１と検査装置に接触可能な第２接点部１２が両端部にそれぞれ設けられた接触子１０と、
前記第１接点部１１が外部に露出した状態で前記接触子１０を内部に収容するハウジング２０と
をそれぞれ有し、第１方向に沿って並んで配置された第１検査治具２および第２検査治具３を備え、
前記第１検査治具２および前記第２検査治具３の少なくとも一方が、前記第１方向Ｘに沿って移動可能に配置され、
前記第１方向Ｘに交差する第２方向Ｙから前記第１接点部１１の各々に前記検査対象物を接近させた状態で、前記第１検査治具２および前記第２検査治具３の少なくとも一方を前記第１方向Ｘに沿って移動させることで、前記第１接点部１１の各々が、前記第１方向Ｘにおいて前記検査対象物に接触する。 The inspection unit 1 according to the first aspect of the present disclosure includes:
A first contact portion 11 capable of contacting an object to be inspected and a second contact portion 12 capable of contacting an inspection device provided at both ends, respectively;
The first inspection jig 2 and the second inspection jig 2 that are arranged side by side along the first direction, each having a housing 20 that accommodates the contact 10 therein with the first contact portion 11 exposed to the outside. Equipped with an inspection jig 3,
At least one of the first inspection jig 2 and the second inspection jig 3 is disposed so as to be movable along the first direction X,
At least one of the first inspection jig 2 and the second inspection jig 3 in a state in which the inspection object is made to approach each of the first contact portions 11 from a second direction Y intersecting the first direction X. By moving one of them along the first direction X, each of the first contact portions 11 comes into contact with the inspection object in the first direction X.

第１態様の検査ユニットによれば、接触子１０の第１接点部１１を検査対象物に対する第２方向Ｙ（すなわち、接近方向）とは異なる第１方向Ｘで接触可能な検査ユニット１を実現できる。   According to the inspection unit of the first aspect, the inspection unit 1 capable of contacting the first contact portion 11 of the contact 10 in the first direction X different from the second direction Y (that is, the approach direction) with respect to the inspection object is realized. it can.

本開示の第２態様の検査ユニット１は、
前記第１検査治具２および前記第２検査治具３の少なくとも一方を前記第１方向Ｘに移動させる可動部３０をさらに備える。 The inspection unit 1 according to the second aspect of the present disclosure includes:
It further includes a movable part 30 that moves at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X.

第２態様の検査ユニット１によれば、可動部３０により、第１検査治具２および第２検査治具３を第１方向Ｘに容易に移動させることができる。   According to the inspection unit 1 of the second aspect, the first inspection jig 2 and the second inspection jig 3 can be easily moved in the first direction X by the movable portion 30.

本開示の第３態様の検査ユニット１は、
前記可動部３０が、前記第１方向Ｘに伸縮する弾性部材を有する。 The inspection unit 1 according to the third aspect of the present disclosure includes:
The movable part 30 includes an elastic member that expands and contracts in the first direction X.

第３態様の検査ユニット１によれば、第１方向Ｘにおいて、各検査治具２、３の接触子１０の第１接点部１１を検査対象物に押圧することができるので、第１接点部１１と検査対象物との間の接触信頼性を高めることができる。   According to the inspection unit 1 of the third aspect, in the first direction X, the first contact portion 11 of the contact 10 of each inspection jig 2, 3 can be pressed against the inspection object, so the first contact portion The contact reliability between 11 and the inspection object can be enhanced.

本開示の第４態様の検査ユニット１は、
前記第１方向Ｘにおいて、前記第１検査治具２および前記第２検査治具３と並んで配置された移動規制部４１をさらに備え、
前記移動規制部４１と前記第２検査治具３との間に前記第１検査治具２が配置され、前記移動規制部４１によって前記第１検査治具２の前記第１方向Ｘでかつ前記第２検査治具３から離れる方向への移動が規制される。 The inspection unit 1 according to the fourth aspect of the present disclosure includes:
In the first direction X, it further comprises a movement restricting portion 41 arranged side by side with the first inspection jig 2 and the second inspection jig 3.
The first inspection jig 2 is disposed between the movement restricting portion 41 and the second inspection jig 3, and the movement restricting portion 41 moves the first inspection jig 2 in the first direction X and the Movement in a direction away from the second inspection jig 3 is restricted.

第４態様の検査ユニット１によれば、第１移動規制部４１により、例えば、第１検査治具２が、第１方向Ｘでかつ第２検査治具３から離れる方向に移動したときに、第１検査治具２の接触子１０の第１接点部１１および第２接点部１２に過剰な力が加えられて第１検査治具２の接触子１０が破損するのを防止できる。   According to the inspection unit 1 of the fourth aspect, for example, when the first inspection jig 2 is moved in the first direction X and away from the second inspection jig 3 by the first movement restricting portion 41, It is possible to prevent the contact 10 of the first inspection jig 2 from being damaged by applying excessive force to the first contact portion 11 and the second contact portion 12 of the contact 10 of the first inspection jig 2.

本開示の第５態様の検査ユニット１は、
前記移動規制部が第１移動規制部４１であり、
前記第１方向Ｘにおいて、前記第１移動規制部４１、前記第１検査治具２および前記第２検査治具３と並んで配置された第２移動規制部４２をさらに備え、
前記第２移動規制部４２と前記第１検査治具２との間に前記第２検査治具３が配置され、前記第２移動規制部４２によって前記第２検査治具３の前記第１方向Ｘでかつ前記第１検査治具２から離れる方向への移動が規制される。 The inspection unit 1 according to the fifth aspect of the present disclosure includes:
The movement restricting portion is a first movement restricting portion 41;
In the first direction X, it further comprises a second movement restriction part 42 arranged side by side with the first movement restriction part 41, the first inspection jig 2 and the second inspection jig 3,
The second inspection jig 3 is disposed between the second movement restriction portion 42 and the first inspection jig 2, and the second direction of the second inspection jig 3 is determined by the second movement restriction portion 42. X and movement in the direction away from the first inspection jig 2 are restricted.

第５態様の検査ユニット１によれば、第２移動規制部４２により、例えば、第２検査治具３が、第１方向Ｘでかつ第１検査治具２から離れる方向に移動したときに、第２検査治具３の接触子１０の第１接点部１１および第２接点部１２に過剰な力が加えられて第２検査治具３の接触子１０が破損するのを防止できる。   According to the inspection unit 1 of the fifth aspect, for example, when the second inspection jig 3 is moved in the first direction X and away from the first inspection jig 2 by the second movement restricting portion 42, It is possible to prevent the contact 10 of the second inspection jig 3 from being damaged by applying excessive force to the first contact portion 11 and the second contact portion 12 of the contact 10 of the second inspection jig 3.

本開示の第６態様の検査装置は、
前記態様の検査ユニット１を少なくとも１つ備えた。 The inspection device according to the sixth aspect of the present disclosure includes:
At least one inspection unit 1 according to the above aspect is provided.

第６態様の検査装置によれば、検査ユニット１により、検査装置および検査対象物の多様化に対応可能な検査装置を実現できる。   According to the inspection apparatus of the sixth aspect, the inspection unit 1 can realize an inspection apparatus that can cope with diversification of inspection apparatuses and inspection objects.

なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。   In addition, it can be made to show the effect which each has by combining arbitrary embodiment or modification of the said various embodiment or modification suitably. In addition, combinations of the embodiments, combinations of the examples, or combinations of the embodiments and examples are possible, and combinations of features in different embodiments or examples are also possible.

本開示の検査ユニットは、例えば、液晶パネルの検査装置に適用できる。   The inspection unit of the present disclosure can be applied to, for example, a liquid crystal panel inspection apparatus.

本開示の検査装置は、例えば、液晶パネルの検査に用いることができる。   The inspection device of the present disclosure can be used for, for example, inspection of a liquid crystal panel.

１ 検査ユニット
２ 第１検査治具
３ 第２検査治具
４、５、６ 隙間
１０ 接触子
１１ 第１接点部
１２ 第２接点部
１３ 直線帯部
１４ 湾曲帯部
２０ ハウジング
２１ 収容部
２２、２３ 開口部
３０ 可動部
４１ 第１移動規制部
４２ 第２移動規制部
１００ 基板
１０１ 端子
１１０ 基板対基板コネクタ
１１１ 電極部
１１２ 凹部
１１３ 底面
Ｘ 第１方向
Ｙ 第２方向
Ｚ 第３方向
Ａ、Ｂ、Ｃ 方向 DESCRIPTION OF SYMBOLS 1 Inspection unit 2 1st inspection jig 3 2nd inspection jig 4, 5, 6 Crevice 10 Contact 11 First contact part 12 Second contact part 13 Straight belt part 14 Curved belt part 20 Housing 21 Housing parts 22, 23 Opening 30 Movable part 41 First movement restricting part 42 Second movement restricting part 100 Substrate 101 Terminal 110 Substrate-to-board connector 111 Electrode part 112 Recess 113 Bottom surface X First direction Y Second direction Z Third direction A, B, C direction

Claims (6)

検査対象物に接触可能な第１接点部と検査装置に接触可能な第２接点部が両端部にそれぞれ設けられた接触子と、
前記第１接点部が外部に露出した状態で前記接触子を内部に収容するハウジングと
をそれぞれ有し、第１方向に沿って並んで配置された第１検査治具および第２検査治具を備え、
前記第１検査治具および前記第２検査治具の少なくとも一方が、前記第１方向に沿って移動可能に配置され、
前記第１方向に交差する第２方向から前記第１接点部の各々に前記検査対象物を相対的に接近させた状態で、前記第１検査治具および前記第２検査治具の少なくとも一方を前記第１方向に沿って移動させることで、前記第１接点部の各々が、前記第１方向において前記検査対象物に接触する、検査ユニット。 A contact provided with a first contact portion that can contact the inspection object and a second contact portion that can contact the inspection device, at both ends; and
A first inspection jig and a second inspection jig, which are each arranged side by side along a first direction, each having a housing for accommodating the contact in the state where the first contact portion is exposed to the outside. Prepared,
At least one of the first inspection jig and the second inspection jig is arranged to be movable along the first direction;
At least one of the first inspection jig and the second inspection jig is placed in a state in which the inspection object is relatively approached to each of the first contact portions from the second direction intersecting the first direction. An inspection unit in which each of the first contact portions comes into contact with the inspection object in the first direction by being moved along the first direction. 前記第１検査治具および前記第２検査治具の少なくとも一方を前記第１方向に移動させる可動部をさらに備える、請求項１の検査ユニット。   The inspection unit according to claim 1, further comprising a movable part that moves at least one of the first inspection jig and the second inspection jig in the first direction. 前記可動部が、前記第１方向に伸縮する弾性部材を有する、請求項２の検査ユニット。   The inspection unit according to claim 2, wherein the movable portion includes an elastic member that expands and contracts in the first direction. 前記第１方向において、前記第１検査治具および前記第２検査治具と並んで配置された移動規制部をさらに備え、
前記移動規制部と前記第２検査治具との間に前記第１検査治具が配置され、前記移動規制部によって前記第１検査治具の前記第１方向でかつ前記第２検査治具から離れる方向への移動が規制される、請求項１から３のいずれか１つの検査ユニット。 In the first direction, further comprising a movement restricting portion arranged side by side with the first inspection jig and the second inspection jig,
The first inspection jig is disposed between the movement restricting portion and the second inspection jig, and is moved from the second inspection jig in the first direction of the first inspection jig by the movement restricting portion. The inspection unit according to any one of claims 1 to 3, wherein movement in a direction away is restricted. 前記移動規制部が第１移動規制部であり、
前記第１方向において、前記第１移動規制部、前記第１検査治具および前記第２検査治具と並んで配置された第２移動規制部をさらに備え、
前記第２移動規制部と前記第１検査治具との間に前記第２検査治具が配置され、前記第２移動規制部によって前記第２検査治具の前記第１方向でかつ前記第１検査治具から離れる方向への移動が規制される、請求項４の検査ユニット。 The movement restriction unit is a first movement restriction unit;
In the first direction, further comprising a second movement restriction portion arranged alongside the first movement restriction portion, the first inspection jig and the second inspection jig,
The second inspection jig is disposed between the second movement restricting portion and the first inspection jig, and the second movement restricting portion causes the first direction of the second inspection jig and the first inspection jig. The inspection unit according to claim 4, wherein movement in a direction away from the inspection jig is restricted. 請求項１〜５のいずれか１つの検査ユニットを少なくとも１つ備えた検査装置。   An inspection apparatus comprising at least one inspection unit according to claim 1.
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