CN111712714A - Inspection unit and inspection device - Google Patents
Inspection unit and inspection device Download PDFInfo
- Publication number
- CN111712714A CN111712714A CN201980012891.3A CN201980012891A CN111712714A CN 111712714 A CN111712714 A CN 111712714A CN 201980012891 A CN201980012891 A CN 201980012891A CN 111712714 A CN111712714 A CN 111712714A
- Authority
- CN
- China
- Prior art keywords
- inspection
- inspection jig
- contact
- jig
- movement restricting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
Abstract
The invention provides an inspection unit and an inspection apparatus. The inspection unit has a first inspection jig and a second inspection jig, each of which has: the contact is provided with a first contact portion capable of contacting an inspection object and a second contact portion capable of contacting an inspection device at both ends, and a housing for housing the contacts therein in a state where the first contact portion is exposed to the outside, and is arranged in parallel in a first direction. At least one of the first inspection jig and the second inspection jig is arranged to be movable in a first direction, and by moving at least one of the first inspection jig and the second inspection jig in the first direction in a state where the inspection object is brought close to each of the first contact portions from the second direction, each of the first contact portions is brought into contact with the inspection object in the first direction.
Description
Technical Field
The present disclosure relates to an inspection unit and an inspection apparatus having the same.
Background
In an electronic component module such as a camera or a liquid crystal panel, a conduction test, an operation characteristic test, and the like are generally performed in a manufacturing process thereof. The inspection is performed by connecting an electrode portion of an FPC contact electrode for connection to a main substrate provided in the electronic component module, an actually mounted substrate-to-substrate connector, or the like to an inspection apparatus using a probe.
As a jig for performing the above-described inspection, for example, there is a socket for electronic components described in patent document 1. The socket for electronic parts comprises: an electrode portion having a pair of tabs which are contactable with an electrode terminal of the electronic component and an electrode terminal of the connected electronic component, respectively; and a socket main body which houses the electrode portion therein. In the socket for an electronic component, the electrode portion extends and contracts in an arrangement direction in which the pair of contacts are connected, and the contacts are reciprocated in the arrangement direction and brought into contact with the electrode terminals of the electronic component and the electrode terminals of the connected electronic component in the arrangement direction.
Documents of the prior art
Patent document
Patent document 1: japanese unexamined patent application publication No. 2002-134202
Disclosure of Invention
Technical problem to be solved by the invention
In recent years, with diversification of inspection apparatuses and inspection objects, there have been increasing cases where it is difficult to cope with so-called linear sockets for electronic components, in which each contact is brought close to an inspection object in the same direction and brought into contact in the direction of approach.
For example, the display module may be inspected in a state where the electrode portion is disposed on the display panel. When the socket for electronic parts is used for the above-described inspection, one of the terminals is in contact with the electrode portion on the display panel in the approaching direction, and the other terminal is in contact with the inspection apparatus, but when the display panel is made of a weak material such as organic EL, an excessive force may act on the display and the display panel may break when the probe is in contact in the approaching direction.
An object of the present disclosure is to provide an inspection unit capable of bringing a contact portion of a contact into contact with an inspection object in a direction different from an approaching direction, and an inspection apparatus including the inspection unit.
Technical solution for solving technical problem
An example of the checking unit of the present disclosure is,
the inspection jig includes a first inspection jig and a second inspection jig, each of which includes:
a contact member having a first contact portion contactable with an inspection object and a second contact portion contactable with an inspection device at both ends thereof;
a housing that houses the contact inside in a state where the first contact portion is exposed to the outside;
the first inspection jig and the second inspection jig are arranged in parallel in a first direction,
at least one of the first inspection jig and the second inspection jig is configured to be movable in the first direction,
in a state where the inspection object is relatively brought close to each of the first contact portions from a second direction intersecting the first direction, at least one of the first inspection jig and the second inspection jig is moved in the first direction, whereby each of the first contact portions comes into contact with the inspection object in the first direction.
In addition, the inspection apparatus according to an example of the present disclosure,
at least one of said inspection units.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the inspection unit, at least one of the first inspection jig and the second inspection jig is disposed movably in the first direction, and in a state where the inspection object is brought into proximity with each of the first contact portions from the second direction, each of the first contact portions is brought into contact with the inspection object in the first direction by moving one of the first inspection jig and the second inspection jig in the first direction. Thus, an inspection unit in which the first contact portion of the contact can be brought into contact with the inspection object in a first direction different from the second direction (i.e., the approaching direction) can be realized.
In addition, according to the inspection apparatus, it is possible to realize an inspection apparatus that can be adapted to various inspection apparatuses and inspection objects by using the inspection means.
Drawings
Fig. 1 is a perspective view showing an inspection unit according to an embodiment of the present disclosure.
Fig. 2 is a sectional view taken along line II-II of fig. 1.
Fig. 3 is a first schematic diagram for explaining an operation when the board-to-board connector is brought into contact with the inspection unit of fig. 1.
Fig. 4 is a second schematic diagram for explaining an operation when the board-to-board connector is brought into contact with the inspection unit of fig. 1.
Fig. 5 is a third schematic diagram for explaining an operation when the board-to-board connector is brought into contact with the inspection unit of fig. 1.
Fig. 6 is a fourth schematic view for explaining an operation when the board-to-board connector is brought into contact with the inspection unit of fig. 1.
Fig. 7 is a cross-sectional view showing a first modification of the inspection unit of fig. 1.
Fig. 8 is a perspective view showing a second modification of the inspection unit of fig. 1.
Fig. 9 is a sectional view taken along line IX-IX of fig. 8.
Fig. 10 is a perspective view showing a third modification of the inspection unit of fig. 1.
Fig. 11 is a sectional view taken along line XI-XI of fig. 10.
Detailed Description
An example of the present disclosure is described below with reference to the drawings. In the following description, although terms (for example, terms including "upper", "lower", "right", "left") indicating a designated direction or position are used as necessary, the terms are used for easy understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of the terms. The following description is merely exemplary in nature and is not intended to limit the present disclosure, its application, or uses. Further, the drawings are schematic, and ratios of the respective dimensions and the like are not necessarily consistent with actual cases.
As shown in fig. 1, an inspection unit 1 according to an embodiment of the present disclosure includes a first inspection jig 2 and a second inspection jig 3, which are arranged in parallel with a gap 4 therebetween in a first direction X as shown in fig. 2.
As shown in fig. 2, each of the first inspection jig 2 and the second inspection jig 3 includes a conductive contact 10 and an insulating housing 20 accommodating the contact 10 therein. As shown in fig. 1, in the inspection unit 1, as an example, each of the first inspection jig 2 and the second inspection jig 3 has a plurality of rod-shaped contacts 10 extending in a second direction Y orthogonal to the first direction X. The contacts 10 of the inspection jigs 2, 3 are arranged in a row at equal intervals along a third direction Z orthogonal to the first direction X and the second direction Y.
As shown in fig. 2, each contact 10 has a first contact portion 11 and a second contact portion 12 provided at both ends in the extending direction thereof. The first contact portion 11 is configured to be in contact with an inspection target (for example, an electrode portion 111 of a substrate-to-substrate connector 110 disposed on a display panel), and the second contact portion 12 is configured to be in contact with a terminal 101 provided on a surface of a substrate 100 of an inspection apparatus.
In this embodiment, the board 100 and the board-to-board connector 110 of the inspection apparatus are arranged such that the terminals 101 of the board 100 and the electrode portions 111 of the board-to-board connector 110 face each other in the Y direction. Although not shown, the display panel is disposed on the opposite side of the second direction Y of the substrate 100 of the inspection apparatus with respect to the substrate-to-substrate connector 110. That is, the substrate-to-substrate connector 110 is located between the display panel and the substrate 100 of the inspection apparatus.
As shown in fig. 2, each housing 20 has a plurality of housing portions 21 in which the contacts 10 can be housed. The openings 22 and 23 are provided at both ends of each housing 21 in the second direction Y. Both end portions of each contact 10 protrude from the openings 22 and 23 to the outside of the housing 20, and each contact 10 is housed in each housing 21 in a state where each contact portion 11 and 12 is exposed to the outside of the housing 20. That is, in the inspection unit 1, the second contact portion 12 is exposed to the outside of the housing 20 in addition to the first contact portion 11.
As shown in fig. 2, the inspection unit 1 includes a movable portion 30 disposed in the gap 4 between the first inspection jig 2 and the second inspection jig 3 and connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3. The movable portion 30 includes an elastic member (e.g., a coil spring) that expands and contracts in the first direction X, and is configured to be able to independently advance and retreat the first inspection jig 2 and the second inspection jig 3 in the first direction X.
In this embodiment, as the inspection jigs 2 and 3 move, the substrate 100 having the terminals 101 that are contacted by the second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 also independently moves forward and backward in the first direction X.
As shown in fig. 2, the inspection unit 1 includes a first movement restricting portion 41 and a second movement restricting portion 42 arranged in parallel with the first inspection jig 2 and the second inspection jig 3 in the first direction X. Each of the first movement restricting section 41 and the second movement restricting section 42 is formed of an insulating rigid body as an example.
The first movement restricting portion 41 is disposed on the opposite side of the second inspection jig 3 from the first inspection jig 2 with a gap 5 therebetween, and the second movement restricting portion 42 is disposed on the opposite side of the first inspection jig 2 from the second inspection jig 3 with a gap 6 therebetween in the first direction X. That is, the first inspection jig 2 is disposed between the first movement restricting portion 41 and the second inspection jig 3, and the second inspection jig 3 is disposed between the second movement restricting portion 42 and the first inspection jig 2.
As shown in fig. 2, the first movement restricting portion 41 restricts the first inspection jig 2 from moving in the first direction X in a direction of separating from the second inspection jig 3 (i.e., the left direction in fig. 2). The second movement restricting portion 42 restricts the second inspection jig 3 from moving in the first direction X in a direction away from the first inspection jig 2 (i.e., in the right direction in fig. 2).
In the inspection unit 1, the first movement restricting unit 41 and the second movement restricting unit 42 are fixed to the substrate 100 of the inspection apparatus as an example.
Next, an operation performed when each first contact portion 11 of the inspection unit 1 is connected to an inspection target (for example, an electrode portion 111 of the board-to-board connector 110) will be described with reference to fig. 3 to 6. The board-to-board connector 110 includes two recesses 112 that are open in the second direction Y, and electrode portions 111 are provided on outer surfaces of the recesses 112 in the first direction X.
First, as shown in fig. 3, an external force in a direction in which the first direction X is brought close to each other is applied to the first inspection jig 2 and the second inspection jig 3, and the inspection jigs 2 and 3 are moved in the direction of arrow a against the elastic force of the movable portion 30, so that the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 are opposed to the two recesses 112 of the board-to-board connector 110.
Then, as shown in fig. 4, the board-to-board connector 110 is moved in the second direction Y in a direction approaching the inspection unit 1 (i.e., in the direction of arrow B in fig. 4), and as shown in fig. 5, the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 are positioned at the insertion positions inside the concave portion 112 of the board-to-board connector 110 and not in contact with the bottom surface 113 of the concave portion 112.
At this time, the board-to-board connector 110 and the inspection unit 1 may be relatively brought close to each other so that the first contact portion 11 is brought into contact with one of a pair of side surfaces of the recess 112 facing in the first direction X and moved to the insertion position in the recess 112, or the board-to-board connector 110 and the inspection unit 1 may be relatively brought close to each other so that the first contact portion 11 is not brought into contact with one of a pair of side surfaces of the recess 112 facing in the first direction X and moved to the insertion position in the recess 112.
When the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 are moved to the insertion position, the external force applied to the inspection jigs 2 and 3 is released, and the inspection jigs 2 and 3 are moved in the first direction X and in the direction away from each other (i.e., the direction of arrow C in fig. 5) by the restoring force of the elastic member of the movable portion 30. As a result, as shown in fig. 6, the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 are moved to contact positions where they contact the electrode portions 111 of the board-to-board connector 110, and the inspection unit 1 is electrically connected to the board-to-board connector 110.
In the inspection unit 1, the first inspection jig 2 and the second inspection jig 3 are arranged in parallel to be movable in the first direction X, respectively, and the first contact portions 11 are brought into contact with the board-to-board connector 110 in the first direction X by moving the first inspection jig 2 and the second inspection jig 3 in the first direction X in a state where the board-to-board connector 110 is brought into proximity with the first contact portions 11 in the second direction Y. Accordingly, since the first contact portions 11 of the contacts 10 can be brought into contact with the board-to-board connector 110 in the first direction X different from the second direction Y (i.e., the approaching direction), it is not necessary to apply an excessive biasing force to the display panel in the approaching direction via the board-to-board connector 110, and the inspection unit 1 capable of preventing the display panel from being damaged can be realized.
The inspection unit 1 further includes a movable portion 30 for moving the first inspection jig 2 and the second inspection jig 3 in the first direction X. The movable portion 30 allows the first inspection jig 2 and the second inspection jig 3 to be easily moved in the first direction X.
The movable portion 30 includes an elastic member that is connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3 and extends and contracts in the first direction X. Accordingly, the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 can be pressed against the electrode portions 111 of the board-to-board connector 110 in the first direction X, and therefore, the contact reliability between the first contact portions 11 and the board-to-board connector 110 can be improved.
The inspection unit 1 further includes a first movement restricting unit 41 arranged in parallel with the first inspection jig 2 and the second inspection jig 3 in the first direction X, the first inspection jig 2 is arranged between the first movement restricting unit 41 and the second inspection jig 3, and the first movement restricting unit 41 restricts movement of the first inspection jig 2 in the first direction X in a direction away from the second inspection jig 3. For example, when the first inspection jig 2 is moved in the first direction X in a direction away from the second inspection jig 3, the first movement restricting portion 41 prevents the contact 10 of the first inspection jig 2 from being damaged by applying an excessive urging force to the first contact portion 11 of the contact 10 of the first inspection jig 2.
The inspection unit 1 further includes a second movement restricting unit 42 arranged in parallel with the first movement restricting unit 41, the first inspection jig 2, and the second inspection jig 3 in the first direction X, the second inspection jig 3 is arranged between the second movement restricting unit 42 and the first inspection jig 2, and the second movement restricting unit 42 restricts the movement of the second inspection jig 3 in the first direction X in a direction away from the first inspection jig 2. For example, when the second inspection jig 3 is moved in the first direction X in a direction away from the first inspection jig 2, the second movement restricting portion 42 prevents the contact 10 of the second inspection jig 3 from being damaged by applying an excessive urging force to the first contact portion 11 of the contact 10 of the second inspection jig 3.
The gaps 5 and 6 between the movement restricting portions 41 and 42 and the housings 20 of the inspection jigs 2 and 3 are configured to ensure pressure contact between the first contact portions 11 of the contacts 10 and the electrode portions 111 of the board-to-board connector 110, and to prevent the contacts 10 of the first inspection jig 2 from being damaged by applying an excessive force to the first contact portions 11 of the contacts 10 of the first inspection jig 2. For example, the dimension of each of the gaps 5 and 6 in the first direction X may be set to be within a range of not less than the shortest distance between the first contact portion 11 and the side surface of the recess 112 in the first direction X and not more than the dimension of the recess 112 in the first direction X of the board-to-board connector 110 when the first contact portion 11 is inserted in a state of being in contact with the side surface of the recess 112 of the board-to-board connector 110.
In addition, according to the inspection apparatus, the inspection unit 1 can realize an inspection apparatus that can cope with a variety of inspection apparatuses and inspection objects.
At least one of the first inspection jig 2 and the second inspection jig 3 may be disposed so as to be movable in the first direction X. For example, as shown in fig. 7, the first inspection jig 2 may be fixed to the substrate 100 of the inspection apparatus, and the movable portion 30 may be provided between the second inspection jig 3 and the second movement restricting portion 42. In this case, the movable portion 30 is configured to move at least one of the first inspection jig 2 and the second inspection jig 3 (the second inspection jig 3 in fig. 7) in the first direction X. In the inspection unit 1 shown in fig. 7, the first movement restricting unit 41 is omitted.
The first contact portion 11 that can be brought into contact with the inspection object and the second contact portion 12 that can be brought into contact with the inspection device may be provided at both ends of each of the contacts 10 of the first inspection jig 2 and the second inspection jig 3, and any configuration of the contacts 10 may be used depending on the design of the inspection unit 1 and the like. For example, as shown in fig. 8 and 9, a contact 10 having a curved shape in which a straight band portion 13 extending in the first direction X and a curved band portion 14 connected to the straight band portion 13 are alternately continuous may be used. For example, the shape, position, and the like of each of the first contact portion 11 and the second contact portion 12 may be appropriately changed according to various types of inspection apparatuses and inspection objects.
The movable portion 30, the first movement restricting portion 41, and the second movement restricting portion 42 may be omitted. For example, when the movable portion 30 is omitted, the user can manually move each of the first inspection jig 2 and the second inspection jig 3 to bring each of the first contact portions 11 into contact with the electrode portion 111 of the board-to-board connector 110 in the first direction X.
The movable portion 30 is not limited to an elastic member that expands and contracts in the first direction X, and any configuration that can move at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X may be employed. Further, the present invention is not limited to the case of being connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3, and for example, the present invention may be connected to the substrate 100 of the inspection apparatus to which the second contact portion 12 of the first inspection jig 2 is connected and the substrate 100 of the inspection apparatus to which the second contact portion 12 of the second inspection jig 3 is connected.
The inspection unit 1 may be appropriately changed in structure according to various modes of the inspection apparatus. For example, as shown in fig. 10 and 11, the inspection unit 1 may be configured such that the terminals 101 of the pair of substrates 100 of the inspection apparatus arranged to face each other are in contact with the electrode portions 111 of the substrate-to-substrate connector 110 arranged in a direction intersecting (e.g., orthogonal to) the direction in which the pair of substrates 100 face each other.
In the inspection unit 1 shown in fig. 10 and 11, the inspection jigs 2 and 3 are arranged such that the first contact point portion 11 side end portions of the contacts 10 extending in the first direction X face each other in the first direction X. The end of the contact 10 of each inspection jig 2, 3 on the side of the first contact portion 11 is bent from the first direction X to the second direction Y, and the first contact portion 11 is provided at the tip end thereof. Each first contact portion 11 is arranged to be contactable with the electrode portion 111 of the board-to-board connector 110 in the second direction Y. The second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 are arranged so as to be contactable with the terminals 101 of the pair of substrates 100 facing in the first direction X, respectively, in the first direction X.
The inspection unit 1 shown in fig. 10 and 11 includes a movable portion (not shown) that can move the inspection jigs 2 and 3 in the first direction X together with the pair of substrates 100 of the inspection apparatus, and each of the first contact portions 11 is configured to be in contact with the electrode portion 111 of the substrate-to-substrate connector 110 in the first direction X by the movable portion.
Each of the inspection jigs 2 and 3 of the inspection unit 1 shown in fig. 10 and 11 has a contact 10 having a curved shape in which a linear band portion 13 extending in the first direction X and a curved band portion 14 connected to the linear band portion 13 are alternately continuous.
Various embodiments of the present disclosure are described in detail above with reference to the drawings, and finally, various aspects of the present disclosure are described. In the following description, a reference numeral is used as an example.
The inspection unit 1 of the first aspect of the present disclosure is,
the inspection jig includes a first inspection jig 2 and a second inspection jig 3, each of which includes:
a contact 10 having a first contact portion 11 contactable with an inspection object and a second contact portion 12 contactable with an inspection device provided at both ends thereof, respectively;
a housing 20 that houses the contact 10 therein in a state where the first contact portion 11 is exposed to the outside;
the first inspection jig 2 and the second inspection jig 3 are arranged in parallel in a first direction,
at least one of the first inspection jig 2 and the second inspection jig 3 is configured to be movable in the first direction X,
in a state where the inspection object is brought close to each of the first contact portions 11 from a second direction Y intersecting the first direction X, at least one of the first inspection jig 2 and the second inspection jig 3 is moved in the first direction X, whereby each of the first contact portions 11 is brought into contact with the inspection object in the first direction X.
According to the inspection unit of the first aspect, the inspection unit 1 in which the first contact portion 11 of the contact 10 can contact the inspection object in the first direction X different from the second direction Y (i.e., the approaching direction) can be realized.
The inspection unit 1 according to the second aspect of the present disclosure is,
the inspection jig further includes a movable portion 30 that moves at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X.
According to the inspection unit 1 of the second aspect, the movable portion 30 can easily move the first inspection jig 2 and the second inspection jig 3 in the first direction X.
The inspection unit 1 according to the third aspect of the present disclosure is,
the movable portion 30 has an elastic member that expands and contracts in the first direction X.
According to the inspection unit 1 of the third aspect, the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 can be pressed against the inspection object in the first direction X, and therefore, the reliability of contact between the first contact portions 11 and the inspection object can be improved.
The inspection unit 1 according to the fourth aspect of the present disclosure is,
further comprising a movement restricting part 41 arranged in parallel with the first inspection jig 2 and the second inspection jig 3 in the first direction X,
the first inspection jig 2 is disposed between the movement restricting portion 41 and the second inspection jig 3, and the movement of the first inspection jig 2 in the first direction X in a direction away from the second inspection jig 3 is restricted by the movement restricting portion 41.
According to the inspection unit 1 of the fourth aspect, the movement restricting portion 41 can prevent the contact 10 of the first inspection jig 2 from being damaged by applying an excessive urging force to the first contact portion 11 and the second contact portion 12 of the contact 1 of the first inspection jig 2 when the first inspection jig 2 is moved in the direction of separating from the second inspection jig 3 in the first direction X, for example.
The inspection unit 1 of the fifth aspect of the present disclosure is,
the movement restricting part is a first movement restricting part 41,
further comprising a second movement restricting section 42 arranged in parallel with the first movement restricting section 41, the first inspection jig 2 and the second inspection jig 3 in the first direction X,
the second inspection jig 3 is disposed between the second movement restricting portion 42 and the first inspection jig 2, and the second movement restricting portion 42 restricts the movement of the second inspection jig 3 in the first direction X in a direction away from the first inspection jig 2.
According to the inspection unit 1 of the fifth aspect, for example, when the second inspection jig 3 is moved in the first direction X in the direction of separating from the first inspection jig 2, the second movement restricting portion 42 can prevent the contact 10 of the second inspection jig 3 from being damaged by applying an excessive urging force to the first contact portion 11 and the second contact portion 12 of the contact 10 of the second inspection jig 3.
In the inspection apparatus according to the sixth aspect of the present disclosure,
at least one inspection unit 1 of the type described is provided.
According to the inspection apparatus of the sixth aspect, the inspection unit 1 can realize an inspection apparatus that can cope with a variety of inspection apparatuses and inspection objects.
It should be noted that any of the above-described embodiments or modifications can be appropriately combined to provide the effects of each of the embodiments or modifications. In addition, the embodiments may be combined with each other or the examples may be combined with each other or the embodiments may be combined with the examples, and features among the different embodiments or the examples may also be combined with each other.
The present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, but various variations and modifications will be apparent to those skilled in the art. It should be understood that the above-described variations and modifications are included in the present disclosure without departing from the scope of the present disclosure based on the scope of the appended claims.
Industrial applicability
The inspection unit of the present disclosure can be applied to an inspection device of a liquid crystal panel, for example.
The inspection apparatus of the present disclosure can be applied to, for example, inspection of a liquid crystal panel.
Description of the reference numerals
1 an inspection unit; 2 a first inspection jig; 3 a second inspection jig; 4, 5, 6 gaps; 10 contact pieces; 11 a first contact portion; 12 a second contact portion; 13 a linear belt portion; 14 bending the band portion; 20 a housing; 21 a storage part; 22, 23 opening parts; 30 a movable part; 41 a first movement restricting section; 42 a second movement restricting section; 100 a substrate; 101 terminals; 110 substrate-to-substrate connectors; 111 an electrode section; 112, a recess; 113 a bottom surface; a first direction of X; a Y second direction; a Z third direction; and the directions of A, B and C.
Claims (6)
1. An inspection unit, characterized in that,
the inspection jig includes a first inspection jig and a second inspection jig arranged in parallel in a first direction, each of the first inspection jig and the second inspection jig including:
a contact member having a first contact portion contactable with an inspection object and a second contact portion contactable with an inspection device at both ends thereof;
a housing that houses the contact inside in a state where the first contact portion is exposed to the outside;
at least one of the first inspection jig and the second inspection jig is configured to be movable in the first direction,
in a state where the inspection object is relatively brought close to each of the first contact portions from a second direction intersecting the first direction, at least one of the first inspection jig and the second inspection jig is moved in the first direction, whereby each of the first contact portions comes into contact with the inspection object in the first direction.
2. The inspection unit of claim 1,
the inspection jig further includes a movable portion that moves at least one of the first inspection jig and the second inspection jig in the first direction.
3. The inspection unit of claim 2,
the movable portion has an elastic member that expands and contracts in the first direction.
4. The examination unit of any one of claims 1 to 3,
further comprising a movement restricting section arranged in parallel with the first inspection jig and the second inspection jig in the first direction,
the first inspection jig is disposed between the movement restricting portion and the second inspection jig, and the movement of the first inspection jig in the first direction in a direction away from the second inspection jig is restricted by the movement restricting portion.
5. The inspection unit of claim 4,
the movement restricting part is a first movement restricting part,
further comprising a second movement restricting section arranged in parallel with the first movement restricting section, the first inspection jig, and the second inspection jig in the first direction,
the second inspection jig is disposed between the second movement restricting portion and the first inspection jig, and the second movement restricting portion restricts the second inspection jig from moving in the first direction in a direction away from the first inspection jig.
6. An inspection apparatus, characterized in that,
having at least one inspection unit according to any one of claims 1 to 5.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-041068 | 2018-03-07 | ||
| JP2018041068A JP6881354B2 (en) | 2018-03-07 | 2018-03-07 | Inspection unit and inspection equipment |
| PCT/JP2019/001829 WO2019171797A1 (en) | 2018-03-07 | 2019-01-22 | Inspection unit and inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111712714A true CN111712714A (en) | 2020-09-25 |
| CN111712714B CN111712714B (en) | 2023-06-13 |
Family
ID=67847099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980012891.3A Active CN111712714B (en) | 2018-03-07 | 2019-01-22 | Inspection unit and inspection device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6881354B2 (en) |
| KR (1) | KR102445148B1 (en) |
| CN (1) | CN111712714B (en) |
| TW (1) | TWI697677B (en) |
| WO (1) | WO2019171797A1 (en) |
Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5786469U (en) * | 1980-11-17 | 1982-05-28 | ||
| US4341433A (en) * | 1979-05-14 | 1982-07-27 | Amp Incorporated | Active device substrate connector |
| JPH0581721U (en) * | 1992-03-31 | 1993-11-05 | 太陽誘電株式会社 | Inspection tool for chip-shaped parts |
| JP2001318116A (en) * | 2000-05-11 | 2001-11-16 | Micronics Japan Co Ltd | Inspection apparatus for display panel board |
| JP2002214286A (en) * | 2001-01-19 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Bga substrate inspecting device |
| JP2004138405A (en) * | 2002-10-15 | 2004-05-13 | Renesas Technology Corp | Probe for measuring semiconductor device |
| CN1522372A (en) * | 2001-06-28 | 2004-08-18 | �ձ�������ʽ���� | Support body assembly for conductive contactor |
| CN1815819A (en) * | 2005-02-02 | 2006-08-09 | 住友电装株式会社 | Connector, connector testing apparatus and method |
| CN1834679A (en) * | 2005-03-14 | 2006-09-20 | 安捷伦科技有限公司 | Method and apparatus for a twisting fixture probe for probing test access point structures |
| JP2008032666A (en) * | 2006-08-01 | 2008-02-14 | Nidec-Read Corp | Tool for substrate inspection, and method of manufacturing substrate inspection tool |
| JP2008159992A (en) * | 2006-12-26 | 2008-07-10 | Seiko Epson Corp | Inspection jig, inspection apparatus, inspection method for electronic component, and manufacturing method for electronic component |
| US20090128171A1 (en) * | 2005-03-31 | 2009-05-21 | Katsuya Okumura | Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program |
| CN101506671A (en) * | 2005-12-02 | 2009-08-12 | 佛姆法克特股份有限公司 | Apparatus and method for adjusting an orientation of probes |
| CN101632027A (en) * | 2007-02-23 | 2010-01-20 | 品一（亚洲）有限公司 | Test fixture and method for circuit board testing |
| JP2010113907A (en) * | 2008-11-05 | 2010-05-20 | Yazaki Corp | Inspection device for inspecting fitting state of connector |
| DE102008061617A1 (en) * | 2008-12-11 | 2010-06-17 | Trw Automotive Gmbh | Method and tool for producing an electronic component with a plastic-coated carrier |
| KR20120011225A (en) * | 2010-07-28 | 2012-02-07 | 주식회사 프로이천 | probe pin and pin board having the same |
| TWM451543U (en) * | 2012-10-15 | 2013-04-21 | Mas Automation Corp | Conductive probe alignment device for power type battery |
| CN103930982A (en) * | 2011-07-06 | 2014-07-16 | 塞莱敦体系股份有限公司 | Test apparatus having a probe card and connector mechanism |
| CN104931870A (en) * | 2014-03-20 | 2015-09-23 | 日本电产理德股份有限公司 | Apparatus For Inspecting Vertically Aligned Flexible Circuit Boards |
| CN204731001U (en) * | 2015-05-25 | 2015-10-28 | 深圳市邦乐达科技有限公司 | A kind of connector probe test fixture |
| CN105874653A (en) * | 2013-11-29 | 2016-08-17 | 欧姆龙株式会社 | Connector |
| JP2017201239A (en) * | 2016-05-02 | 2017-11-09 | 日置電機株式会社 | Electric measurement operation tool of test probe |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS562418B2 (en) * | 1973-06-01 | 1981-01-20 | ||
| JP2508732Y2 (en) * | 1990-05-31 | 1996-08-28 | ソニー株式会社 | Contact device for electronic component measuring device |
| JP2002134202A (en) | 2000-10-27 | 2002-05-10 | Otax Co Ltd | Receptacle for electronic parts |
| JP2002374684A (en) | 2001-06-14 | 2002-12-26 | Yaskawa Electric Corp | Inspection device for inverter |
-
2018
- 2018-03-07 JP JP2018041068A patent/JP6881354B2/en active Active
-
2019
- 2019-01-22 KR KR1020207023707A patent/KR102445148B1/en active IP Right Grant
- 2019-01-22 WO PCT/JP2019/001829 patent/WO2019171797A1/en active Application Filing
- 2019-01-22 CN CN201980012891.3A patent/CN111712714B/en active Active
- 2019-02-01 TW TW108104106A patent/TWI697677B/en active
Patent Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4341433A (en) * | 1979-05-14 | 1982-07-27 | Amp Incorporated | Active device substrate connector |
| JPS5786469U (en) * | 1980-11-17 | 1982-05-28 | ||
| JPH0581721U (en) * | 1992-03-31 | 1993-11-05 | 太陽誘電株式会社 | Inspection tool for chip-shaped parts |
| JP2001318116A (en) * | 2000-05-11 | 2001-11-16 | Micronics Japan Co Ltd | Inspection apparatus for display panel board |
| JP2002214286A (en) * | 2001-01-19 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Bga substrate inspecting device |
| CN1522372A (en) * | 2001-06-28 | 2004-08-18 | �ձ�������ʽ���� | Support body assembly for conductive contactor |
| JP2004138405A (en) * | 2002-10-15 | 2004-05-13 | Renesas Technology Corp | Probe for measuring semiconductor device |
| CN1815819A (en) * | 2005-02-02 | 2006-08-09 | 住友电装株式会社 | Connector, connector testing apparatus and method |
| CN1834679A (en) * | 2005-03-14 | 2006-09-20 | 安捷伦科技有限公司 | Method and apparatus for a twisting fixture probe for probing test access point structures |
| US20090128171A1 (en) * | 2005-03-31 | 2009-05-21 | Katsuya Okumura | Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program |
| CN101506671A (en) * | 2005-12-02 | 2009-08-12 | 佛姆法克特股份有限公司 | Apparatus and method for adjusting an orientation of probes |
| JP2008032666A (en) * | 2006-08-01 | 2008-02-14 | Nidec-Read Corp | Tool for substrate inspection, and method of manufacturing substrate inspection tool |
| JP2008159992A (en) * | 2006-12-26 | 2008-07-10 | Seiko Epson Corp | Inspection jig, inspection apparatus, inspection method for electronic component, and manufacturing method for electronic component |
| CN101632027A (en) * | 2007-02-23 | 2010-01-20 | 品一（亚洲）有限公司 | Test fixture and method for circuit board testing |
| JP2010113907A (en) * | 2008-11-05 | 2010-05-20 | Yazaki Corp | Inspection device for inspecting fitting state of connector |
| DE102008061617A1 (en) * | 2008-12-11 | 2010-06-17 | Trw Automotive Gmbh | Method and tool for producing an electronic component with a plastic-coated carrier |
| KR20120011225A (en) * | 2010-07-28 | 2012-02-07 | 주식회사 프로이천 | probe pin and pin board having the same |
| CN103930982A (en) * | 2011-07-06 | 2014-07-16 | 塞莱敦体系股份有限公司 | Test apparatus having a probe card and connector mechanism |
| TWM451543U (en) * | 2012-10-15 | 2013-04-21 | Mas Automation Corp | Conductive probe alignment device for power type battery |
| CN105874653A (en) * | 2013-11-29 | 2016-08-17 | 欧姆龙株式会社 | Connector |
| CN104931870A (en) * | 2014-03-20 | 2015-09-23 | 日本电产理德股份有限公司 | Apparatus For Inspecting Vertically Aligned Flexible Circuit Boards |
| CN204731001U (en) * | 2015-05-25 | 2015-10-28 | 深圳市邦乐达科技有限公司 | A kind of connector probe test fixture |
| JP2017201239A (en) * | 2016-05-02 | 2017-11-09 | 日置電機株式会社 | Electric measurement operation tool of test probe |
Non-Patent Citations (2)
| Title |
|---|
| A. BONTEMPI等: "Micromachined temperature calibration tool for contact Scanning Thermal Microscope probes", 《2015 21ST INTERNATIONAL WORKSHOP ON THERMAL INVESTIGATIONS OF ICS AND SYSTEMS (THERMINIC)》 * |
| 张华坤等: "双探针原子力显微镜针尖对准方法研究", 《计量学报》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019171797A1 (en) | 2019-09-12 |
| KR102445148B1 (en) | 2022-09-21 |
| KR20200112889A (en) | 2020-10-05 |
| TWI697677B (en) | 2020-07-01 |
| JP2019158368A (en) | 2019-09-19 |
| CN111712714B (en) | 2023-06-13 |
| TW201939042A (en) | 2019-10-01 |
| JP6881354B2 (en) | 2021-06-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111007290B (en) | Probe, inspection unit, and inspection device | |
| CN110118882B (en) | Probe, inspection jig, inspection unit, and inspection apparatus | |
| CN107850624B (en) | Probe needle | |
| CN111239447B (en) | Probe, inspection tool, inspection unit, and inspection apparatus | |
| CN108401443B (en) | Socket with improved structure | |
| US10398051B2 (en) | Socket having a terminal unit assembly accommodated within a recess of a frame member | |
| JPWO2019138507A1 (en) | Probe pins, inspection jigs, inspection units and inspection equipment | |
| CN113892036B (en) | Probe, inspection tool and inspection unit | |
| JP7314633B2 (en) | Probe pins, inspection fixtures and inspection units | |
| JP6583582B2 (en) | Probe pin | |
| JP2019207245A (en) | Probe pin | |
| CN111712714B (en) | Inspection unit and inspection device | |
| CN111856090B (en) | Probe, inspection jig, and inspection module | |
| CN113631932A (en) | Probe, inspection tool, and inspection unit | |
| JP2020076664A (en) | Probe pin, inspection jig, inspection unit, and inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |