CN111712714B - Inspection unit and inspection device - Google Patents
Inspection unit and inspection device Download PDFInfo
- Publication number
- CN111712714B CN111712714B CN201980012891.3A CN201980012891A CN111712714B CN 111712714 B CN111712714 B CN 111712714B CN 201980012891 A CN201980012891 A CN 201980012891A CN 111712714 B CN111712714 B CN 111712714B
- Authority
- CN
- China
- Prior art keywords
- inspection
- inspection jig
- contact
- jig
- movement restricting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
Abstract
The invention provides an inspection unit and an inspection device. The inspection unit has a first inspection jig and a second inspection jig, each of which has: the first contact part and the second contact part are respectively arranged at two ends of the housing, and the first contact part and the second contact part are respectively arranged in parallel along a first direction. At least one of the first inspection jig and the second inspection jig is arranged to be movable in a first direction, and at least one of the first inspection jig and the second inspection jig is moved in the first direction in a state in which the inspection object is brought close to each of the first contact portions from the second direction, whereby each of the first contact portions is brought into contact with the inspection object in the first direction.
Description
Technical Field
The present disclosure relates to an inspection unit and an inspection apparatus having the same.
Background
In general, electronic component assemblies such as cameras and liquid crystal panels are subjected to conduction inspection, operation characteristic inspection, and the like in the manufacturing process thereof. The inspection is performed by connecting an electrode portion of an FPC contact electrode for connection to a main body substrate provided in an electronic component assembly, an electrode portion of a substrate-to-substrate connector to be mounted, or the like, to an inspection device using a probe.
As a jig for performing the above inspection, there is a socket for electronic parts described in patent document 1, for example. The socket for electronic components comprises: an electrode part having a pair of contacts respectively contactable with the electrode terminals of the electronic component and the electrode terminals of the connected electronic component; and a socket body which houses the electrode portion therein. In the socket for electronic parts, the electrode portion is extended and contracted in an arrangement direction connecting the pair of contacts, and each contact is reciprocally moved in the arrangement direction, and is configured to be in contact with the electrode terminal of the electronic part and the electrode terminal of the connected electronic part in the arrangement direction.
Prior art literature
Patent literature
Patent document 1: japanese patent application laid-open No. 2002-134202
Disclosure of Invention
Technical problem to be solved by the invention
In recent years, with the diversification of inspection apparatuses and inspection objects, there has been an increase in cases where it is difficult to cope with so-called linear sockets for electronic parts, in which joints are brought into proximity with an inspection object in the same direction and brought into contact with the inspection object in the approaching direction.
For example, the inspection of the display module may be performed in a state where the electrode portions are disposed on the display panel. When the above-described socket for electronic parts is used in the inspection, although one of the joints is in contact with the electrode portion on the display panel in the approaching direction and the other joint is in contact with the inspection device, when the display panel is made of a material having relatively weak strength such as an organic EL, an excessive force may act on the display when the probe is in contact in the approaching direction, and the display panel may be broken.
An object of the present disclosure is to provide an inspection unit capable of bringing a contact point portion of a contact into contact with an inspection object in a direction different from a direction of approach, and an inspection apparatus having the inspection unit.
Technical scheme for solving technical problems
The inspection unit of one example of the present disclosure is,
the inspection device comprises a first inspection fixture and a second inspection fixture, which are respectively provided with:
a contact member having a first contact portion contactable with an inspection object and a second contact portion contactable with an inspection device at both ends thereof;
a housing that houses the contact in a state where the first contact portion is exposed to the outside;
the first inspection jig and the second inspection jig are arranged in parallel along a first direction,
at least one of the first inspection jig and the second inspection jig is configured to be movable in the first direction,
and moving at least one of the first inspection jig and the second inspection jig in the first direction while the inspection object is relatively approaching each of the first contact portions from a second direction intersecting the first direction, whereby each of the first contact portions is brought into contact with the inspection object in the first direction.
In addition, an inspection apparatus according to an example of the present disclosure is,
at least one of the inspection units is provided.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the inspection unit, at least one of the first inspection jig and the second inspection jig is arranged so as to be movable in the first direction, and in a state in which the inspection object is brought close to each of the first contact portions from the second direction, either one of the first inspection jig and the second inspection jig is moved in the first direction, whereby each of the first contact portions is brought into contact with the inspection object in the first direction. Thereby, an inspection unit in which the first contact portion of the contact can be brought into contact with the inspection object in a first direction different from the second direction (i.e., the approaching direction) can be realized.
In addition, according to the inspection apparatus, it is possible to realize an inspection apparatus which can be used for various inspection apparatuses and inspection objects by using the inspection means.
Drawings
Fig. 1 is a perspective view showing an inspection unit according to an embodiment of the present disclosure.
Fig. 2 is a sectional view taken along line II-II of fig. 1.
Fig. 3 is a first schematic diagram for explaining an operation when the substrate-to-substrate connector is brought into contact with the inspection unit of fig. 1.
Fig. 4 is a second schematic diagram for explaining an operation when the substrate-to-substrate connector is brought into contact with the inspection unit of fig. 1.
Fig. 5 is a third schematic diagram for explaining an operation when the substrate-to-substrate connector is brought into contact with the inspection unit of fig. 1.
Fig. 6 is a fourth schematic diagram for explaining an operation when the substrate-to-substrate connector is brought into contact with the inspection unit of fig. 1.
Fig. 7 is a cross-sectional view showing a first modification of the inspection unit of fig. 1.
Fig. 8 is a perspective view showing a second modification of the inspection unit of fig. 1.
Fig. 9 is a cross-sectional view taken along line IX-IX of fig. 8.
Fig. 10 is a perspective view showing a third modification of the inspection unit of fig. 1.
Fig. 11 is a cross-sectional view taken along line XI-XI of fig. 10.
Detailed Description
An example of the present disclosure is described below with reference to the drawings. In the following description, although terms (e.g., terms including "upper", "lower", "right", "left") indicating a specified direction or position are used as needed, the above terms are used for ease of understanding the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of the above terms. The following description is merely exemplary in nature and is not intended to limit the present disclosure, its application, or uses. The drawings are schematic, and the ratio of the dimensions and the like do not necessarily match the actual situation.
As shown in fig. 1, an inspection unit 1 according to one embodiment of the present disclosure includes a first inspection jig 2 and a second inspection jig 3, and is arranged in parallel with a gap 4 therebetween in a first direction X as shown in fig. 2.
As shown in fig. 2, each of the first inspection jig 2 and the second inspection jig 3 includes a conductive contact 10 and an insulating case 20 accommodating the contact 10 therein. As shown in fig. 1, in the inspection unit 1, as an example, each of the first inspection jig 2 and the second inspection jig 3 has a plurality of bar-shaped contacts 10 extending in a second direction Y orthogonal to the first direction X. The contacts 10 of the inspection jigs 2, 3 are arranged in a row at equal intervals along a third direction Z orthogonal to the first direction X and the second direction Y.
As shown in fig. 2, each contact 10 has a first contact portion 11 and a second contact portion 12 provided at both ends in the extending direction thereof, respectively. The first contact portion 11 is configured to be in contact with an inspection object (for example, the electrode portion 111 of the substrate-to-substrate connector 110 disposed on the display panel), and the second contact portion 12 is configured to be in contact with the terminal 101 provided on the surface of the substrate 100 of the inspection apparatus.
In this embodiment, the board 100 and the board-to-board connector 110 of the inspection apparatus are arranged such that the terminals 101 of the board 100 and the electrode portions 111 of the board-to-board connector 110 face each other in the Y direction. Although not shown, the display panel is disposed on the opposite side of the substrate 100 of the inspection apparatus in the second direction Y with respect to the substrate-to-substrate connector 110. That is, the substrate-to-substrate connector 110 is located between the display panel and the substrate 100 of the inspection apparatus.
As shown in fig. 2, each housing 20 has a plurality of storage portions 21 in which the contacts 10 can be stored. Openings 22 and 23 are provided at both ends of the storage portion 21 in the second direction Y. Both end portions of each contact 10 protrude from the opening portions 22 and 23 to the outside of the housing 20, and each contact 10 is accommodated in each accommodation portion 21 in a state where each contact portion 11 and 12 is exposed to the outside of the housing 20. That is, in the inspection unit 1, the second contact portion 12 is exposed to the outside of the housing 20 in addition to the first contact portion 11.
As shown in fig. 2, the inspection unit 1 includes a movable portion 30 disposed in the gap 4 between the first inspection jig 2 and the second inspection jig 3 and connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3. The movable portion 30 has an elastic member (for example, a coil spring) that expands and contracts in the first direction X, and is configured to allow the first inspection jig 2 and the second inspection jig 3 to move in and out independently of each other in the first direction X.
In this embodiment, the substrate 100 having the terminals 101 contacted by the second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 is also independently moved in the first direction X in response to the movement of the inspection jigs 2 and 3.
As shown in fig. 2, the inspection unit 1 includes a first movement restricting portion 41 and a second movement restricting portion 42 arranged in parallel with the first inspection jig 2 and the second inspection jig 3 in the first direction X. The first movement restricting portion 41 and the second movement restricting portion 42 are each made of an insulating rigid body as an example.
The first movement restricting portion 41 is disposed on the opposite side of the second inspection jig 3 with respect to the first inspection jig 2 with the gap 5 therebetween in the first direction X, and the second movement restricting portion 42 is disposed on the opposite side of the first inspection jig 2 with respect to the second inspection jig 3 with the gap 6 therebetween. That is, the first inspection jig 2 is disposed between the first movement restricting portion 41 and the second inspection jig 3, and the second inspection jig 3 is disposed between the second movement restricting portion 42 and the first inspection jig 2.
As shown in fig. 2, the first movement restricting portion 41 restricts movement of the first inspection jig 2 in the first direction X in a direction separating from the second inspection jig 3 (i.e., left direction in fig. 2). In addition, the second movement restriction portion 42 restricts movement of the second inspection jig 3 in the first direction X in a direction separate from the first inspection jig 2 (i.e., rightward in fig. 2).
In the inspection unit 1, the first movement restricting portion 41 and the second movement restricting portion 42 are fixed to the substrate 100 of the inspection apparatus as an example.
Next, with reference to fig. 3 to 6, an operation when each first contact portion 11 of the inspection unit 1 is connected to an inspection object (for example, the electrode portion 111 of the substrate-to-substrate connector 110) will be described. The board-to-board connector 110 has two recesses 112 open in the second direction Y, and electrode portions 111 are provided on the outer surfaces of the recesses 112 in the first direction X.
First, as shown in fig. 3, an external force in a direction of approaching the first direction X is applied to the first inspection jig 2 and the second inspection jig 3, and the inspection jigs 2 and 3 are moved in the direction of arrow a against the elastic force of the movable portion 30, respectively, so that the first contact portions 11 of the contacts 10 of the inspection jigs 2 and 3 face the two concave portions 112 of the substrate-to-substrate connector 110.
Then, as shown in fig. 4, the board-to-board connector 110 is moved in the second direction Y in the direction approaching the inspection unit 1 (i.e., in the direction of arrow B in fig. 4), and as shown in fig. 5, the first contact portions 11 of the contacts 10 of the inspection jigs 2, 3 are positioned at insertion positions inside the concave portion 112 of the board-to-board connector 110 and not in contact with the bottom surface 113 of the concave portion 112.
At this time, the substrate-to-substrate connector 110 may be brought into relative proximity with the inspection unit 1 so that the first contact portion 11 contacts one of a pair of side surfaces of the recess 112 facing in the first direction X and moves to the insertion position in the recess 112, or the substrate-to-substrate connector 110 may be brought into relative proximity with the inspection unit 1 so that the first contact portion 11 does not contact one of a pair of side surfaces of the recess 112 facing in the first direction X and moves to the insertion position in the recess 112.
When the first contact portion 11 of the contact 10 of each inspection jig 2, 3 is moved to the insertion position, the external force applied to each inspection jig 2, 3 is released, and each inspection jig 2, 3 is moved in the direction of separating from each other in the first direction X (i.e., the arrow C direction in fig. 5) by the restoring force of the elastic member of the movable portion 30. Thereby, as shown in fig. 6, the first contact portion 11 of the contact 10 of each inspection jig 2, 3 is moved to a contact position where it contacts the electrode portion 111 of the substrate-to-substrate connector 110, and the inspection unit 1 is electrically connected to the substrate-to-substrate connector 110.
In the inspection unit 1, the first inspection jig 2 and the second inspection jig 3 are arranged in parallel so as to be movable in the first direction X, and the first inspection jig 2 and the second inspection jig 3 are moved in the first direction X in a state where the substrate-to-substrate connector 110 is brought close to each of the first contact portions 11 from the second direction Y, whereby each of the first contact portions 11 is brought into contact with the substrate-to-substrate connector 110 in the first direction X. Accordingly, the first contact portion 11 of the contact 10 can be brought into contact with the substrate-to-substrate connector 110 in the first direction X different from the second direction Y (i.e., the approaching direction), and therefore, it is not necessary to apply an excessive force to the display panel in the approaching direction via the substrate-to-substrate connector 110, and it is possible to realize the inspection unit 1 capable of preventing breakage of the display panel.
The inspection unit 1 further includes a movable portion 30 that moves the first inspection jig 2 and the second inspection jig 3 in the first direction X. The movable portion 30 can easily move the first inspection jig 2 and the second inspection jig 3 in the first direction X.
The movable portion 30 has an elastic member that is connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3 and that expands and contracts in the first direction X. Accordingly, the first contact portion 11 of the contact 10 of each inspection jig 2, 3 can be pressed against the electrode portion 111 of the board-to-board connector 110 in the first direction X, so that the contact reliability between the first contact portion 11 and the board-to-board connector 110 can be improved.
The inspection unit 1 further includes a first movement restricting portion 41 disposed in parallel with the first inspection jig 2 and the second inspection jig 3 in the first direction X, the first inspection jig 2 is disposed between the first movement restricting portion 41 and the second inspection jig 3, and the first movement restricting portion 41 restricts movement of the first inspection jig 2 in the first direction X in a direction away from the second inspection jig 3. For example, when the first inspection jig 2 is moved in the first direction X in a direction away from the second inspection jig 3, the first movement restricting portion 41 can prevent the contact 10 of the first inspection jig 2 from being broken by applying an excessive force to the first contact portion 11 of the contact 10 of the first inspection jig 2.
The inspection unit 1 further includes a second movement restricting portion 42 arranged in parallel with the first movement restricting portion 41, the first inspection jig 2, and the second inspection jig 3 in the first direction X, and the second inspection jig 3 is arranged between the second movement restricting portion 42 and the first inspection jig 2, and the second movement restricting portion 42 restricts movement of the second inspection jig 3 in the first direction X in a direction away from the first inspection jig 2. For example, when the second inspection jig 3 moves in the first direction X in a direction away from the first inspection jig 2, the second movement restricting portion 42 can prevent the contact 10 of the second inspection jig 3 from being broken by applying an excessive force to the first contact portion 11 of the contact 10 of the second inspection jig 3.
The gaps 5 and 6 between the movement restricting portions 41 and 42 and the housings 20 of the inspection jigs 2 and 3 are configured to ensure pressure contact between the first contact portions 11 of the contacts 10 and the electrode portions 111 of the board-to-board connector 110, and to prevent the contacts 10 of the first inspection jig 2 from being broken by applying excessive force to the first contact portions 11 of the contacts 10 of the first inspection jig 2. For example, the dimensions in the first direction X of the respective gaps 5 and 6 may be set so that the shortest distance between the first contact portion 11 and the side surface of the recess 112 in the first direction X when the first contact portion 11 is inserted in contact with the side surface of the recess 112 of the substrate-to-substrate connector 110 is equal to or less than the dimensions in the first direction X of the recess 112 of the substrate-to-substrate connector 110.
In addition, according to the inspection apparatus, the inspection unit 1 can realize an inspection apparatus which can be used for various inspection apparatuses and inspection objects.
The first inspection jig 2 and the second inspection jig 3 may be arranged such that at least one of them is movable in the first direction X. For example, as shown in fig. 7, the first inspection jig 2 may be fixed to the substrate 100 of the inspection apparatus, and the movable portion 30 may be provided between the second inspection jig 3 and the second movement restricting portion 42. In this case, the movable portion 30 is configured to move at least one of the first inspection jig 2 and the second inspection jig 3 (the second inspection jig 3 in fig. 7) in the first direction X. In the inspection unit 1 shown in fig. 7, the first movement restricting portion 41 is omitted.
The first contact portion 11 that can be brought into contact with the inspection object and the second contact portion 12 that can be brought into contact with the inspection device may be provided at both end portions of each of the contacts 10 of the first inspection jig 2 and the second inspection jig 3, and any contact 10 may be used depending on the design of the inspection unit 1, and the like. For example, as shown in fig. 8 and 9, a contact 10 having a curved shape in which a linear belt portion 13 extending in the first direction X and a curved belt portion 14 connected to the linear belt portion 13 are alternately continuous may be used. For example, the shape and position of each of the first contact portion 11 and the second contact portion 12 may be changed as appropriate according to various modes of the inspection apparatus or the inspection object.
The movable portion 30, the first movement restricting portion 41, and the second movement restricting portion 42 may be omitted. For example, when the movable portion 30 is omitted, the user can manually move the first inspection jig 2 and the second inspection jig 3 to bring the first contact portions 11 into contact with the electrode portions 111 of the board-to-board connector 110 in the first direction X.
The movable portion 30 is not limited to an elastic member that expands and contracts in the first direction X, and may be any structure that can move at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X. Further, the present invention is not limited to the case of being connected to the housing 20 of the first inspection jig 2 and the housing 20 of the second inspection jig 3, and may be connected to, for example, the substrate 100 of the inspection apparatus to which the second contact portion 12 of the first inspection jig 2 is connected and the substrate 100 of the inspection apparatus to which the second contact portion 12 of the second inspection jig 3 is connected.
The inspection unit 1 may appropriately change its structure according to various modes of the inspection apparatus. For example, as shown in fig. 10 and 11, the inspection unit 1 may be configured such that each terminal 101 of the pair of substrates 100 of the inspection apparatus disposed to face each other is in contact with the electrode portion 111 of the substrate-to-substrate connector 110 disposed in a direction intersecting (for example, orthogonal to) a direction in which the pair of substrates 100 face each other.
In the inspection unit 1 shown in fig. 10 and 11, the inspection jigs 2 and 3 are disposed so that the first contact portion 11-side end portions of the contacts 10 extending in the first direction X face each other in the first direction X. The first contact portion 11 is provided at the tip end of each inspection jig 2, 3 at the first contact portion 11 side end of the contact 10, which is bent from the first direction X to the second direction Y. Each of the first contact portions 11 is arranged to be contactable with the electrode portion 111 of the substrate-to-substrate connector 110 in the second direction Y. The second contact portions 12 of the contacts 10 of the inspection jigs 2 and 3 are arranged to be contactable with the terminals 101 of the pair of substrates 100 facing each other in the first direction X.
The inspection unit 1 shown in fig. 10 and 11 includes a movable portion (not shown) that can move each of the inspection jigs 2 and 3 in the first direction X together with the pair of substrates 100 of the inspection apparatus, and each of the first contact portions 11 is configured to be contactable with the electrode portion 111 of the substrate-to-substrate connector 110 in the first direction X by the movable portion.
Each of the inspection jigs 2 and 3 of the inspection unit 1 shown in fig. 10 and 11 has a contact 10 having a curved shape in which a linear belt portion 13 extending in the first direction X and a curved belt portion 14 connected to the linear belt portion 13 are alternately continuous.
Various embodiments of the present disclosure have been described in detail above with reference to the drawings, and finally, various aspects of the present disclosure are described. In the following description, a reference numeral is used as an example.
The inspection unit 1 of the first embodiment of the present disclosure is,
the inspection apparatus includes a first inspection jig 2 and a second inspection jig 3, each of which includes:
a contactor 10 having a first contact portion 11 that can be brought into contact with an inspection object and a second contact portion 12 that can be brought into contact with an inspection device, respectively, provided at both end portions;
a housing 20 that houses the contact 10 in a state where the first contact portion 11 is exposed to the outside;
the first inspection jig 2 and the second inspection jig 3 are arranged in parallel in a first direction,
at least one of the first inspection jig 2 and the second inspection jig 3 is configured to be movable in the first direction X,
in a state where the inspection object is brought close to each of the first contact portions 11 from a second direction Y intersecting the first direction X, at least one of the first inspection jig 2 and the second inspection jig 3 is moved in the first direction X, whereby each of the first contact portions 11 is brought into contact with the inspection object in the first direction X.
According to the inspection unit of the first aspect, the inspection unit 1 in which the first contact point portion 11 of the contact 10 can be brought into contact with the inspection object in the first direction X different from the second direction Y (i.e., the approaching direction) can be realized.
The inspection unit 1 of the second aspect of the present disclosure is,
the inspection apparatus further includes a movable portion 30 that moves at least one of the first inspection jig 2 and the second inspection jig 3 in the first direction X.
According to the inspection unit 1 of the second embodiment, the first inspection jig 2 and the second inspection jig 3 can be easily moved in the first direction X by the movable portion 30.
The inspection unit 1 of the third embodiment of the present disclosure is,
the movable portion 30 has an elastic member that expands and contracts in the first direction X.
According to the inspection unit 1 of the third embodiment, the first contact portion 11 of the contact 10 of each inspection jig 2, 3 can be pressed against the inspection object in the first direction X, so that the contact reliability between the first contact portion 11 and the inspection object can be improved.
The inspection unit 1 of the fourth embodiment of the present disclosure is,
further comprises a movement limiting part 41 which is arranged in parallel with the first inspection jig 2 and the second inspection jig 3 in the first direction X,
the first inspection jig 2 is disposed between the movement restricting portion 41 and the second inspection jig 3, and the movement of the first inspection jig 2 in the first direction X in a direction away from the second inspection jig 3 is restricted by the movement restricting portion 41.
According to the inspection unit 1 of the fourth aspect, by the movement restricting portion 41, for example, when the first inspection jig 2 moves in the first direction X in the direction of separating from the second inspection jig 3, it is possible to prevent the contact 10 of the first inspection jig 2 from being broken by applying an excessive force to the first contact portion 11 and the second contact portion 12 of the contact 1 of the first inspection jig 2.
The inspection unit 1 of the fifth embodiment of the present disclosure is,
the movement restricting portion is a first movement restricting portion 41,
further comprises a second movement restriction part 42 which is arranged in parallel with the first movement restriction part 41, the first inspection jig 2 and the second inspection jig 3 in the first direction X,
the second inspection jig 3 is disposed between the second movement restricting portion 42 and the first inspection jig 2, and the second inspection jig 3 is restricted from moving in the first direction X in a direction away from the first inspection jig 2 by the second movement restricting portion 42.
According to the inspection unit 1 of the fifth aspect, by the second movement restriction portion 42, for example, when the second inspection jig 3 moves in the first direction X in a direction away from the first inspection jig 2, it is possible to prevent the contact 10 of the second inspection jig 3 from being broken by applying an excessive force to the first contact portion 11 and the second contact portion 12 of the contact 10 of the second inspection jig 3.
An inspection apparatus according to a sixth aspect of the present disclosure is,
at least one inspection unit 1 of the type described above is provided.
According to the inspection apparatus of the sixth aspect, the inspection unit 1 can realize the inspection apparatus capable of being used for various inspection apparatuses and inspection objects.
The present invention is not limited to the above-described embodiments, and various modifications may be employed. In addition, embodiments may be combined with each other or embodiments may be combined with embodiments, and features among different embodiments or embodiments may also be combined with each other.
The present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, but various variations and modifications will be apparent to those skilled in the art. It should be understood that such variations and modifications are included in the present disclosure without departing from the scope of the present disclosure based on the appended claims.
Industrial applicability
The inspection unit of the present disclosure may be applied to, for example, an inspection apparatus of a liquid crystal panel.
The inspection apparatus of the present disclosure can be applied to, for example, inspection of a liquid crystal panel.
Description of the reference numerals
1, an inspection unit; 2 a first inspection jig; 3 a second inspection jig; 4,5,6 gaps; 10 contacts; 11 a first contact portion; 12 a second contact portion; 13 straight line belt portions; 14 bending the belt portion; a 20-shell; a 21 storage section; 22 23 opening portions; 30 a movable part; 41 a first movement restriction portion; a second movement restriction portion 42; a 100 substrate; a 101 terminal; 110 substrate-to-substrate connector; a 111 electrode section; 112 recesses; 113 bottom surface; x is the first direction; y is the second direction; z is the third direction; and the directions A, B and C.
Claims (7)
1. An inspection unit, characterized in that,
the inspection device is provided with a first inspection jig and a second inspection jig which are arranged in parallel along a first direction, wherein the first inspection jig and the second inspection jig respectively comprise:
a contact member configured from a single member, having a first contact portion provided at one end in a second direction intersecting the first direction and contactable with an inspection object, and a second contact portion provided at the other end in the second direction and contactable with an inspection device;
a housing that houses the contact in a state where the first contact portion is exposed to the outside;
at least one of the first inspection jig and the second inspection jig is configured to be movable in the first direction,
moving at least one of the first inspection jig and the second inspection jig in the first direction while the inspection object is relatively approaching each of the first contact portions from a second direction intersecting the first direction, whereby each of the first contact portions is brought into contact with the inspection object in the first direction,
the inspection apparatus further includes a movable portion that moves at least one of the first inspection jig and the second inspection jig in the first direction.
2. The inspection unit of claim 1, wherein,
the movable portion has an elastic member that expands and contracts in the first direction.
3. An inspection unit as claimed in claim 1 or 2, characterized in that,
further comprises a movement limiting part which is arranged in parallel with the first inspection clamp and the second inspection clamp in the first direction and is arranged in contact with the first inspection clamp in the first direction,
the first inspection jig is disposed between the movement restricting portion and the second inspection jig, and the movement of the first inspection jig in the first direction in a direction away from the second inspection jig is restricted by the movement restricting portion.
4. The inspection unit of claim 3, wherein,
the movement restricting portion is a first movement restricting portion,
and a second movement restricting portion arranged in parallel with the first movement restricting portion, the first inspection jig, and the second inspection jig in the first direction, the first inspection jig and the second inspection jig being located between the first movement restricting portion and the second movement restricting portion, being arranged in contact with the second inspection jig in the first direction,
the second inspection jig is disposed between the second movement restricting portion and the first inspection jig, and the second inspection jig is restricted from moving in the first direction in a direction away from the first inspection jig by the second movement restricting portion.
5. An inspection unit, characterized in that,
the inspection device is provided with a first inspection jig and a second inspection jig which are arranged in parallel along a first direction, wherein the first inspection jig and the second inspection jig respectively comprise:
a contact member configured from a single member, having a first contact portion provided at one end in a second direction intersecting the first direction and contactable with an inspection object, and a second contact portion provided at the other end in the second direction and contactable with an inspection device;
a housing that houses the contact in a state where the first contact portion is exposed to the outside;
at least one of the first inspection jig and the second inspection jig is configured to be movable in the first direction,
moving at least one of the first inspection jig and the second inspection jig in the first direction while the inspection object is relatively approaching each of the first contact portions from a second direction intersecting the first direction, whereby each of the first contact portions is brought into contact with the inspection object in the first direction,
further comprises a movement limiting part which is arranged in parallel with the first inspection clamp and the second inspection clamp in the first direction and is arranged in contact with the first inspection clamp in the first direction,
the first inspection jig is disposed between the movement restricting portion and the second inspection jig, and the movement of the first inspection jig in the first direction in a direction away from the second inspection jig is restricted by the movement restricting portion.
6. The inspection unit of claim 5, wherein,
the movement restricting portion is a first movement restricting portion,
and a second movement restricting portion arranged in parallel with the first movement restricting portion, the first inspection jig, and the second inspection jig in the first direction, the first inspection jig and the second inspection jig being located between the first movement restricting portion and the second movement restricting portion, being arranged in contact with the second inspection jig in the first direction,
the second inspection jig is disposed between the second movement restricting portion and the first inspection jig, and the second inspection jig is restricted from moving in the first direction in a direction away from the first inspection jig by the second movement restricting portion.
7. An inspection device, characterized in that,
at least one inspection unit according to any one of claims 1 to 6.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-041068 | 2018-03-07 | ||
| JP2018041068A JP6881354B2 (en) | 2018-03-07 | 2018-03-07 | Inspection unit and inspection equipment |
| PCT/JP2019/001829 WO2019171797A1 (en) | 2018-03-07 | 2019-01-22 | Inspection unit and inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111712714A CN111712714A (en) | 2020-09-25 |
| CN111712714B true CN111712714B (en) | 2023-06-13 |
Family
ID=67847099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980012891.3A Active CN111712714B (en) | 2018-03-07 | 2019-01-22 | Inspection unit and inspection device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6881354B2 (en) |
| KR (1) | KR102445148B1 (en) |
| CN (1) | CN111712714B (en) |
| TW (1) | TWI697677B (en) |
| WO (1) | WO2019171797A1 (en) |
Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5786469U (en) * | 1980-11-17 | 1982-05-28 | ||
| US4341433A (en) * | 1979-05-14 | 1982-07-27 | Amp Incorporated | Active device substrate connector |
| JPH0581721U (en) * | 1992-03-31 | 1993-11-05 | 太陽誘電株式会社 | Inspection tool for chip-shaped parts |
| JP2001318116A (en) * | 2000-05-11 | 2001-11-16 | Micronics Japan Co Ltd | Inspection apparatus for display panel board |
| JP2002214286A (en) * | 2001-01-19 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Bga substrate inspecting device |
| JP2004138405A (en) * | 2002-10-15 | 2004-05-13 | Renesas Technology Corp | Probe for measuring semiconductor device |
| CN1522372A (en) * | 2001-06-28 | 2004-08-18 | �ձ�������ʽ���� | Support body assembly for conductive contactor |
| CN1815819A (en) * | 2005-02-02 | 2006-08-09 | 住友电装株式会社 | Connector, connector testing apparatus and method |
| CN1834679A (en) * | 2005-03-14 | 2006-09-20 | 安捷伦科技有限公司 | Method and apparatus for a twisting fixture probe for probing test access point structures |
| JP2008032666A (en) * | 2006-08-01 | 2008-02-14 | Nidec-Read Corp | Tool for substrate inspection, and method of manufacturing substrate inspection tool |
| JP2008159992A (en) * | 2006-12-26 | 2008-07-10 | Seiko Epson Corp | Inspection jig, inspection apparatus, inspection method for electronic component, and manufacturing method for electronic component |
| CN101506671A (en) * | 2005-12-02 | 2009-08-12 | 佛姆法克特股份有限公司 | Apparatus and method for adjusting an orientation of probes |
| CN101632027A (en) * | 2007-02-23 | 2010-01-20 | 品一（亚洲）有限公司 | Test fixture and method for circuit board testing |
| JP2010113907A (en) * | 2008-11-05 | 2010-05-20 | Yazaki Corp | Inspection device for inspecting fitting state of connector |
| DE102008061617A1 (en) * | 2008-12-11 | 2010-06-17 | Trw Automotive Gmbh | Method and tool for producing an electronic component with a plastic-coated carrier |
| KR20120011225A (en) * | 2010-07-28 | 2012-02-07 | 주식회사 프로이천 | probe pin and pin board having the same |
| CN103930982A (en) * | 2011-07-06 | 2014-07-16 | 塞莱敦体系股份有限公司 | Test apparatus having a probe card and connector mechanism |
| CN104931870A (en) * | 2014-03-20 | 2015-09-23 | 日本电产理德股份有限公司 | Apparatus For Inspecting Vertically Aligned Flexible Circuit Boards |
| CN204731001U (en) * | 2015-05-25 | 2015-10-28 | 深圳市邦乐达科技有限公司 | A kind of connector probe test fixture |
| CN105874653A (en) * | 2013-11-29 | 2016-08-17 | 欧姆龙株式会社 | Connector |
| JP2017201239A (en) * | 2016-05-02 | 2017-11-09 | 日置電機株式会社 | Electric measurement operation tool of test probe |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS562418B2 (en) * | 1973-06-01 | 1981-01-20 | ||
| JP2508732Y2 (en) * | 1990-05-31 | 1996-08-28 | ソニー株式会社 | Contact device for electronic component measuring device |
| JP2002134202A (en) | 2000-10-27 | 2002-05-10 | Otax Co Ltd | Receptacle for electronic parts |
| JP2002374684A (en) | 2001-06-14 | 2002-12-26 | Yaskawa Electric Corp | Inspection device for inverter |
| WO2006106876A1 (en) * | 2005-03-31 | 2006-10-12 | Octec Inc. | Microstructure probe card, and microstructure inspecting device, method, and computer program |
| TWM451543U (en) * | 2012-10-15 | 2013-04-21 | Mas Automation Corp | Conductive probe alignment device for power type battery |
-
2018
- 2018-03-07 JP JP2018041068A patent/JP6881354B2/en active Active
-
2019
- 2019-01-22 KR KR1020207023707A patent/KR102445148B1/en active IP Right Grant
- 2019-01-22 WO PCT/JP2019/001829 patent/WO2019171797A1/en active Application Filing
- 2019-01-22 CN CN201980012891.3A patent/CN111712714B/en active Active
- 2019-02-01 TW TW108104106A patent/TWI697677B/en active
Patent Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4341433A (en) * | 1979-05-14 | 1982-07-27 | Amp Incorporated | Active device substrate connector |
| JPS5786469U (en) * | 1980-11-17 | 1982-05-28 | ||
| JPH0581721U (en) * | 1992-03-31 | 1993-11-05 | 太陽誘電株式会社 | Inspection tool for chip-shaped parts |
| JP2001318116A (en) * | 2000-05-11 | 2001-11-16 | Micronics Japan Co Ltd | Inspection apparatus for display panel board |
| JP2002214286A (en) * | 2001-01-19 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Bga substrate inspecting device |
| CN1522372A (en) * | 2001-06-28 | 2004-08-18 | �ձ�������ʽ���� | Support body assembly for conductive contactor |
| JP2004138405A (en) * | 2002-10-15 | 2004-05-13 | Renesas Technology Corp | Probe for measuring semiconductor device |
| CN1815819A (en) * | 2005-02-02 | 2006-08-09 | 住友电装株式会社 | Connector, connector testing apparatus and method |
| CN1834679A (en) * | 2005-03-14 | 2006-09-20 | 安捷伦科技有限公司 | Method and apparatus for a twisting fixture probe for probing test access point structures |
| CN101506671A (en) * | 2005-12-02 | 2009-08-12 | 佛姆法克特股份有限公司 | Apparatus and method for adjusting an orientation of probes |
| JP2008032666A (en) * | 2006-08-01 | 2008-02-14 | Nidec-Read Corp | Tool for substrate inspection, and method of manufacturing substrate inspection tool |
| JP2008159992A (en) * | 2006-12-26 | 2008-07-10 | Seiko Epson Corp | Inspection jig, inspection apparatus, inspection method for electronic component, and manufacturing method for electronic component |
| CN101632027A (en) * | 2007-02-23 | 2010-01-20 | 品一（亚洲）有限公司 | Test fixture and method for circuit board testing |
| JP2010113907A (en) * | 2008-11-05 | 2010-05-20 | Yazaki Corp | Inspection device for inspecting fitting state of connector |
| DE102008061617A1 (en) * | 2008-12-11 | 2010-06-17 | Trw Automotive Gmbh | Method and tool for producing an electronic component with a plastic-coated carrier |
| KR20120011225A (en) * | 2010-07-28 | 2012-02-07 | 주식회사 프로이천 | probe pin and pin board having the same |
| CN103930982A (en) * | 2011-07-06 | 2014-07-16 | 塞莱敦体系股份有限公司 | Test apparatus having a probe card and connector mechanism |
| CN105874653A (en) * | 2013-11-29 | 2016-08-17 | 欧姆龙株式会社 | Connector |
| CN104931870A (en) * | 2014-03-20 | 2015-09-23 | 日本电产理德股份有限公司 | Apparatus For Inspecting Vertically Aligned Flexible Circuit Boards |
| CN204731001U (en) * | 2015-05-25 | 2015-10-28 | 深圳市邦乐达科技有限公司 | A kind of connector probe test fixture |
| JP2017201239A (en) * | 2016-05-02 | 2017-11-09 | 日置電機株式会社 | Electric measurement operation tool of test probe |
Non-Patent Citations (2)
| Title |
|---|
| Micromachined temperature calibration tool for contact Scanning Thermal Microscope probes;A. Bontempi等;《2015 21st International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)》;20160125;全文 * |
| 双探针原子力显微镜针尖对准方法研究;张华坤等;《计量学报》;20150122;第36卷(第1期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019171797A1 (en) | 2019-09-12 |
| KR102445148B1 (en) | 2022-09-21 |
| KR20200112889A (en) | 2020-10-05 |
| CN111712714A (en) | 2020-09-25 |
| TWI697677B (en) | 2020-07-01 |
| JP2019158368A (en) | 2019-09-19 |
| TW201939042A (en) | 2019-10-01 |
| JP6881354B2 (en) | 2021-06-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110118882B (en) | Probe, inspection jig, inspection unit, and inspection apparatus | |
| CN111007288B (en) | Probe needle | |
| KR102067936B1 (en) | Probe pin, inspection jig, inspection unit and inspection apparatus | |
| CN111033272B (en) | Probe, inspection tool, inspection unit, and inspection device | |
| JP6988920B2 (en) | Probe pins, inspection jigs, inspection units and inspection equipment | |
| WO2017217042A1 (en) | Probe pin | |
| US10398051B2 (en) | Socket having a terminal unit assembly accommodated within a recess of a frame member | |
| KR20140109226A (en) | Electrical connector | |
| CN110277659B (en) | Connecting piece and socket | |
| JP7314633B2 (en) | Probe pins, inspection fixtures and inspection units | |
| JP6583582B2 (en) | Probe pin | |
| WO2017047495A1 (en) | Probe pin and inspection tool including same | |
| CN111712714B (en) | Inspection unit and inspection device | |
| US9614313B2 (en) | Electrical connector having a contact with a fixing part press-fitted within a housing | |
| JP2019207245A (en) | Probe pin | |
| CN111856090B (en) | Probe, inspection jig, and inspection module | |
| CN112005449B (en) | Connector with a locking member | |
| CN210690650U (en) | Probe, inspection jig, and inspection unit | |
| WO2020095679A1 (en) | Probe pin and inspection jig | |
| JP2020170008A (en) | Probe pin | |
| KR102648231B1 (en) | Probe pins, inspection jigs and inspection units | |
| JP2020076664A (en) | Probe pin, inspection jig, inspection unit, and inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |