TW201919821A - Method and apparatus for producing glass plate - Google Patents

Abstract

In executing a step for supplying a liquid (9) over a support table (3) provided with suction holes (3a), a step for disposing a glass plate (2) on the support table (3), a step for fixing the glass plate (2) to the support table (3) by means of suction by using a vacuum tank (10) connected to the suction holes (3a) via a flow path (4), and a step for machining end faces (2a) of the glass plate (2), the flow path (4) is branched several times by multiple branch headers (6, 7). Furthermore, the flow-path sectional area between a first solenoid valve (8), which is provided on the flow path (4), and a vacuum pump (5) is set to be larger than the flow-path sectional area between the first solenoid valve (8) and the suction holes (3a).

Description

Method and device for manufacturing glass plate

The present invention relates to a method for manufacturing a glass plate including a step of adsorbing and fixing a glass plate to a support table, and a device for manufacturing a glass plate for performing the method.

As is known, in the manufacturing process of a glass plate, it is common to cut a glass plate in order to cut out a product size. The end surface of the glass plate formed with cutting contains a large number of defects such as microcracks. Therefore, in order to remove these defects, it is common to process the end surface, for example, to grind the cut glass plate. Further, Patent Document 1 discloses an example of a form in which an end surface is processed.

In the form disclosed in Patent Document 1, a glass plate is adsorbed and fixed on a support table having adsorption holes (a plurality of adsorption holes in Patent Document 1), and the glass plate that has passed out of the support table is held by a grindstone. The end face is ground. In addition, a liquid such as water may be supplied to the support table. For example, a liquid supply port is formed on the support base, and the liquid flows out from the supply port to be supplied to the support base. This is to make the glass plate easy to move when positioning the glass plate on the support table before the grinding process.

However, in order to attract a glass plate to a support table, a vacuum pressure source such as a vacuum pump or a tank having a flow passage (piping) that passes through a fluid and connected to an adsorption hole is often used. The negative pressure generating source is large, so it is arranged outside the production line. By the negative pressure generating source, the negative pressure is applied to the glass plate on the support table through the adsorption hole, thereby performing adsorption. In addition, Patent Document 2 discloses a mode in which a semiconductor wafer is used as an adsorption target instead of a glass plate, and a negative pressure generation source (a vacuum generation source in Patent Document 2) is used to adsorb the semiconductor wafer to a support table. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-11547 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2016-174074

[Problems to be Solved by the Invention] However, as described above, when the end surface of a glass plate is processed, a negative pressure generation source is used to adsorb and fix the glass plate to a support table, and there are problems to be solved as described below. . That is, there is a difficulty in that a negative pressure of a desired size (a size that does not affect the processing of the end surface) is applied to the glass plate after the adsorption is started, and it takes a lot of time. Therefore, the current situation is to seek improvement from the viewpoint of shortening the takt time of the steps for processing the end faces.

The technical problem of the present invention, which is made in view of the above circumstances, is to reduce the time until a negative pressure of a desired magnitude acts on the glass plate when the glass plate is adsorbed and fixed to the support table using a negative pressure generating source, This reduces the cycle time. [Means for solving problems]

The first method of the present invention, which was pioneered in order to solve the above-mentioned problems, is a method for manufacturing a glass plate, which includes a placing step of placing a glass plate on a support table having a plurality of adsorption holes formed thereon, and an adsorption fixing step by A negative pressure generation source connected to each of a plurality of adsorption holes through a fluid flow path, and a glass plate is adsorbed and fixed to a support base through the plurality of adsorption holes. The method for manufacturing a glass plate is characterized in that In the section from the negative pressure generation source to the plurality of adsorption holes, a switching mechanism capable of switching the open state and the closed closed state of the flow path is provided. From the switching mechanism to the plurality of adsorption holes, a plurality of branch headers are used. Branch the flow path multiple times.

When a switching mechanism is provided in a section from a negative pressure generating source to a plurality of adsorption holes in a flow path, a flow path from a negative pressure generating source to a switching mechanism is always negative pressure. On the other hand, the flow path from the switching mechanism to the plurality of suction holes is a normal pressure in a closed state and a negative pressure in an open state. Here, in this method, the flow path is branched by a plurality of branch headers from the switching mechanism to a plurality of suction holes. Accordingly, since the flow path is branched multiple times, the length of the flow path (the volume of the flow path that should generate a negative pressure) from the switching mechanism to the plurality of adsorption holes is successfully reduced accordingly. Therefore, it is possible to quickly generate a negative pressure from the switching mechanism to a plurality of suction holes by the negative pressure generating source, and further, it is possible to reduce the time until a negative pressure having a desired magnitude acts on the glass plate. As a result, the cycle time from a series of steps from the mounting step to the adsorption fixing step can be shortened.

In the method, preferably, the plurality of branch headers include a first branch header oppositely disposed on the side of the plurality of adsorption holes on the flow path and a second branch header relatively disposed on the negative pressure generating source side, so that The length of the flow path from each of the plurality of adsorption holes to the first branch header, the length of the flow path from the first branch header to the second branch header, and the switching mechanism from the second branch header. The flow path length up to this point is shorter.

In a case where the plurality of branch headers include a first branch header and a second branch header, a flow path (hereinafter, referred to as a first flow path) connecting the plurality of adsorption holes and the first branch header and connecting the first branch The flow path of the header and the second branch header (hereinafter, referred to as the second flow path) is compared with the flow path connecting the second branch header and the switching mechanism (hereinafter, expressed as the third flow path). There are multiple roads. Therefore, if the lengths of the plurality of first flow paths and the second flow path are made shorter than the length of the third flow path, it is more advantageous in terms of reducing the volume of the flow path in the section from the switching mechanism to the plurality of adsorption holes.

In the method, it is preferable that a plurality of side-by-side conveyor belts for carrying the glass plate in and out relative to the support table in a flat posture is provided, and the side-by-side formation for the plurality of carrier belts to pass through is provided. The support stage is divided into a plurality of division stages by a plurality of gaps, a first branch header is arranged below the division stage, and a second branch header is arranged in an area where the glass plate can be conveyed by a conveyor belt.

Here, if the first branch header is arranged below the dividing table, the plurality of suction holes can be made as close as possible to the first branch header. In addition, if the second branch header is disposed in a region where the glass plate can be conveyed by the conveyance belt, a plurality of second flow paths can be merged in the production (conveyance) line. Therefore, it is more advantageous in shortening the length of the first flow path and the second flow path. Here, the “arrangement of the second branch header in a region where the glass plate can be conveyed by the conveyer belt” includes a case where the second branch header is disposed below the plurality of conveyer belts and below the support table, and the second The branch header is arranged below a plurality of conveyor belts, but is not below the support table. From the viewpoint of further shortening the length of the second flow path, it is more preferable that the second branch header is disposed below the plurality of conveying belts and below the support table. From the viewpoint of equipment cost and workability of the piping, it is more preferable to arrange the second branch header below a plurality of conveyor belts, but not below the support table.

In the method, it is preferable that the cross-sectional area of the flow path of the flow path on the negative pressure generation source side from the switching mechanism is greater than the flow path of the flow paths on the side of the plurality of adsorption holes from the switching mechanism based on the switching mechanism. Sectional area.

In this case, since the negative pressure generation source side from the switching mechanism has a larger cross-sectional area of the flow path than a plurality of suction hole sides from the switching mechanism, the pressure loss can be reduced accordingly, so The flow rate of the fluid that can flow through the flow path increases. As a result, negative pressure can be generated in the entire region of the flow path more quickly, and the time until a negative pressure of a desired magnitude acts on the glass plate can be further reduced.

In the method, it is preferable that a liquid supply unit for supplying liquid to the support table is provided. The negative pressure generating source includes a first chamber connected to the flow path and maintained at a negative pressure inside; and a second chamber through the channel. Connected to the first chamber; the first opening and closing unit can switch the open state and the closed closed state to open the passage; and the second opening and closing unit can switch the open state and the closed to open the path for draining liquid from the second chamber. And the manufacturing method of the glass plate is performed in a closed state: in a storage step, the liquid self-flow path is passed through the first chamber and the channel while the first opening and closing unit is in an open state and the second opening and closing unit is in a closed state. Flowing into the second chamber for storage; and a draining step of draining the liquid stored in the second chamber through a path in a state where the first opening and closing unit is closed and the second opening and closing unit is open. .

When the liquid is supplied to the supporting table, the liquid permeates from the adsorption holes into a groove or the like provided with a flow path or a negative pressure generating source. Accordingly, when the adsorption and fixing step is performed, defects such as a delay in generation of negative pressure in the flow path are liable to occur. Therefore, in this method, in order to drain the liquid, a first chamber and a second chamber are provided for the negative pressure generating source, and a storage step and a drain step are performed. In the storage step, the liquid is allowed to flow from the flow path into the second chamber through the first chamber and the channel by storing the first opening and closing unit in an open state and the second opening and closing unit in a closed state for storage. Thereafter, in the liquid discharge step, the first opening and closing unit is closed and the second opening and closing unit is opened, and the liquid stored in the second chamber is discharged through the path. At this time, the first opening and closing unit is closed, and the first opening and closing unit in a state where the passage is closed separates the first chamber located on the flow path and the second chamber connected to the first chamber through the passage. This allows the liquid to be drained while a negative pressure is generated in the flow path or the like by the first chamber. By performing liquid discharge while performing the function of the negative pressure generating source in this way, it is possible to prevent defects caused by the penetration of liquid.

In the method, it is preferable that the height position of the flow path is gradually lowered from the plurality of adsorption hole sides toward the negative pressure generation source side. Here, the "gradual lowering of the height position of the flow path" includes not only the case where the height position of the flow path is continuously lowered from the side of the plurality of adsorption holes toward the negative pressure generating source, but also includes a horizontal section in a part of the flow path. Case.

If so, the liquid that has penetrated into the flow path from the adsorption hole easily flows from the side of the plurality of adsorption holes to the negative pressure generation source side by gravity, so it is preferable to perform the storage step and the liquid discharge step.

The second method of the present invention, which was pioneered in order to solve the above-mentioned problems, is a method for manufacturing a glass plate, which includes a mounting step of placing a glass plate on a support table having an adsorption hole formed thereon, and an adsorption fixing step of passing a fluid through A negative pressure generating source connected to the suction hole through the flow path, and the glass plate is adsorbed and fixed to the support table via the suction hole, and the manufacturing method of the glass plate is characterized in that between the suction hole and the negative pressure generation source on the flow path A switching mechanism capable of switching the open state and the closed closed state of the flow path is provided. Based on the switching mechanism, the cross-sectional area of the flow path of the flow path on the side of the negative pressure generation source from the switching mechanism is larger than the adsorption from the switching mechanism. The flow path cross-sectional area of the flow path on the hole side.

According to the method, by providing a switching mechanism between the suction hole on the flow path and the negative pressure generating source, the flow path from the negative pressure generating source to the switching mechanism always becomes negative pressure. On the other hand, the flow path from the switching mechanism to the suction hole is a normal pressure in a closed state and a negative pressure in an open state. In addition, on the source side of the negative pressure from the switching mechanism, the cross-sectional area of the flow path is increased compared to the suction hole side from the switching mechanism, so the pressure loss can be reduced accordingly, so The flow rate of the fluid flowing therethrough increases. Therefore, a negative pressure can be quickly generated by the negative pressure generating source in the flow path from the switching mechanism to the suction hole, and the time until the negative pressure of a desired magnitude acts on the glass plate can be further reduced. Based on the above, the method can shorten the cycle time of a series of steps from the mounting step to the adsorption and fixing step.

The third method of the present invention, which was pioneered in order to solve the above-mentioned problems, is a method for manufacturing a glass plate, which includes a liquid supply step of supplying a liquid to a support table formed with an adsorption hole, and a mounting step of placing glass on the support table. A plate; and an adsorption and fixing step, the negative pressure generating source connected to the adsorption hole through a fluid flow path, and the glass plate is adsorbed and fixed to the support table through the adsorption hole, the manufacturing method of the glass plate is characterized in that The pressure generating source includes: a first chamber connected to the flow path and maintained at a negative pressure inside; a second chamber connected to the first chamber via a passage; a first opening and closing unit capable of switching an open state and a closed closing state for opening the passage; State; and a second opening and closing unit capable of switching between an open state and a closed closed state in which a path for discharging liquid from the second chamber is opened, and the manufacturing method of the glass plate is performed: a storage step in which the first opening and closing unit is An open state, and a state in which the second opening and closing unit is closed, the liquid flows from the flow path to the second chamber through the first chamber and the passage for storage; In the first opening and closing unit is closed and the second opening and closing unit is opened state, for discharge of the liquid stored in the liquid chamber through the second path.

Due to the execution of the liquid supply step, the liquid penetrates from the adsorption hole into the flow path or the groove provided in the negative pressure generation source. Accordingly, when the adsorption and fixing step is performed, defects such as a delay in generation of negative pressure in the flow path are liable to occur. Therefore, in this method, in order to drain the liquid, a first chamber and a second chamber are provided for the negative pressure generating source, and a storage step and a drain step are performed. Here, when the liquid discharge step is performed, the first opening and closing unit is closed, and the first opening and closing unit in a state where the passage is closed will connect the first chamber connected to the flow path and the first chamber through the passage. The second room is separated by two rooms. Therefore, the liquid can be drained while a negative pressure is generated in the flow path or the like by the first chamber. By performing the drainage while performing the function of the negative pressure generating source in this way, it is possible to prevent the generation of the negative pressure from being delayed due to the penetration of the liquid. Therefore, the time until a negative pressure of a desired magnitude is applied to the glass plate can be reduced. Based on the above, this method can shorten the cycle time.

The device of the present invention, which was pioneered in order to solve the problem, is a glass plate manufacturing device, which includes a support table formed with a plurality of adsorption holes, and a negative pressure generation source that passes through a fluid flow path to the plurality of adsorption holes. Each of them is connected, and a negative pressure is applied to a glass plate placed on a supporting table via a plurality of suction holes. The manufacturing apparatus of the glass plate is characterized in that a negative pressure generation source is provided to a plurality of suction holes in a flow path. A switching mechanism capable of switching between an open state in which the flow path is opened and a closed state in which the flow path is closed is provided. The flow path is branched multiple times by a plurality of branch headers from the switching mechanism to a plurality of suction holes.

According to the apparatus, it is possible to obtain the same operations and effects as those in the first method. [Effect of the invention]

According to the method and apparatus for manufacturing a glass plate of the present invention, when a glass plate is adsorbed and fixed to a support table using a negative pressure generating source, it is possible to reduce the time until a negative pressure of a desired magnitude acts on the glass plate. Can reduce the cycle time.

Hereinafter, the manufacturing method and manufacturing apparatus of the glass plate of embodiment of this invention are demonstrated with reference to the attached drawing.

<First Embodiment> First, a glass plate manufacturing apparatus according to a first embodiment of the present invention will be described.

As shown in FIG. 1, a glass plate manufacturing apparatus 1 (hereinafter, simply referred to as a manufacturing apparatus 1) includes a support table 3 that forms a plurality of suction holes 3 a for suction-fixing the glass plate 2, and a fluid-permeable flow path. 4 and a vacuum pump 5 connected to each of the plurality of suction holes 3a, and applying a negative pressure to the glass plate 2 on the support table 3 through the plurality of suction holes 3a; between the plurality of suction holes 3a and the vacuum pump 5 The first branch header 6 and the second branch header 7 that branch the flow path 4; between the second branch header 7 and the vacuum pump 5, as an open state and a closed closed state that can open the flow path 4 The first solenoid valve 8 of the switching mechanism; between the first solenoid valve 8 and the vacuum pump 5, the liquid 9 (see FIG. 2) that has penetrated into the flow path 4 can be discharged to the vacuum tank 10 outside the flow path 4; Compressed gas is sent to the compressor 12 in the flow path 4 through the connection flow path 11 connected to the flow path 4 between the second branch header 7 and the first solenoid valve 8; and the connection flow can be switched. The second solenoid valve 13 is opened in an open state and closed in a closed state. In addition, in the manufacturing apparatus 1, the negative pressure generating source includes a vacuum pump 5 and a vacuum tank 10.

The support stand 3 can support the glass plate 2 from below in a flat posture. The support table 3 is divided into a plurality of divided tables sandwiching a plurality of gaps 14 formed in parallel, and a plurality of suction holes 3a are formed in each divided table. In the present embodiment, there are fourteen divided stations in total (only a part of which is shown in FIG. 1). In the following description, each of the divided stations will be described as a divided station A, a divided station B, and a divided station N in this order.

In each of the division table A to the division table N, in addition to the plurality of adsorption holes 3a, a plurality of supply ports are formed as liquid supply units for supplying liquid 9 (for example, water) to the respective division tables. 3b. Each of the plurality of supply ports 3 b is connected to a liquid supply source (for example, a pump (not shown)) through a supply pipe 15 (not shown in FIG. 1). Further, a belt 16 (not shown in FIG. 1) for inserting and unloading the glass plate 2 into and out of the support base 3 into a part of the plurality of gaps 14 will be described later.

The flow path 4 has a circular flow path cross section in the entire area from the plurality of suction holes 3 a to the vacuum tank 10. The flow path 4 can pass through the gas (for example, air) existing in the flow path 4 and the liquid 9 that has penetrated into the flow path 4 through the adsorption holes 3 a. The height position of the flow path 4 is continuously lowered from the plurality of suction holes 3 a side toward the vacuum tank 10 side. Thereby, the liquid 9 which has penetrated into the flow path 4 flows to the side of the vacuum tank 10 (negative pressure generation source) by gravity.

Among the two branched headers 6 and 7, the first branched header 6 is oppositely disposed on the flow path 4 with a plurality of suction holes 3 a side, and the second branched header 7 is relatively disposed on the vacuum tank 10 side.

The first branch header 6 is arranged one for each of the divided stations A to N. The plurality of branched flow paths 4 a branched by each of the first branch headers 6 are respectively connected to the suction holes 3 a formed in the respective divided tables. That is, the number of branch channels 4 a formed by one first branch header 6 is the same as the number of suction holes 3 a formed in each of the division tables.

Only one second branch header 7 is arranged. The second branched header 7 branches into fourteen branched flow paths 4 b (only a part of which is shown in FIG. 1), and the fourteen branched flow paths 4 b are respectively connected to the first branched header 6. That is, the number of branched flow paths 4b branched by the second branched header 7 is the same as the number of the first branched header 6 (all are fourteen in this embodiment).

In addition, in FIG. 1, in order to facilitate understanding of the piping of the flow path 4, the first branch header 6 is illustrated in a different configuration from the actual one. This will be described in detail using FIGS. 3 and 4 to be described later. Actually, each of the first branch headers 6 is disposed below each of the division tables. The second branch header 7 is arranged below the plurality of conveying belts 16 and below the non-supporting stage 3. In addition, the first solenoid valve 8, the negative pressure generating source (the vacuum pump 5 and the vacuum tank 10), the compressor 12, and the second solenoid valve 13 are arranged outside a production (conveyance) line.

Here, in this embodiment, the flow path 4 is branched by the first branch header 6 and the second branch header 7 twice (two steps), but it is not limited to this. As a modification of the present embodiment, the flow path 4 may be branched three times (three steps).

The first solenoid valve 8 is in a state where the gas and liquid 9 can pass through the first solenoid valve 8 from the side of the plurality of adsorption holes 3a toward the vacuum tank 10 when the first solenoid valve 8 is in the open state, and becomes a gas and liquid when the closed state is in the closed state. A state in which the liquid 9 cannot pass through the first solenoid valve 8. When the first solenoid valve 8 is closed, the compressed gas from the compressor 12 is also in a state where it cannot pass through the first solenoid valve 8.

The vacuum pump 5 is always running, and the inside of the vacuum tank 10 is always maintained at a negative pressure. Thereby, in the section 4d connecting the first solenoid valve 8 and the vacuum tank 10 (negative pressure generating source) to the flow path 4, a negative pressure is always generated regardless of the opening and closing of the first solenoid valve 8. In contrast, in the section where the first solenoid valve 8 and the plurality of suction holes 3a are connected to the flow path 4 (two branch flow paths 4a and 4b and the section 4c connecting the second branch header 7 and the first solenoid valve 8) In a state where the glass plate 2 is placed on the support base 3, if the first solenoid valve 8 is in an open state, a negative pressure is generated, so that the glass plate 2 can be adsorbed and fixed on the support base 3. On the other hand, when the first solenoid valve 8 is closed, the state where the negative pressure is generated is released, and the suction and fixing of the support plate 3 to the glass plate 2 can be released.

Based on the first solenoid valve 8, the cross-sectional area S1 of the flow path on the side of the vacuum tank 10 is larger than the cross-sectional area S2 of the flow path on the side of the plurality of suction holes 3 a. From the viewpoint of more quickly generating negative pressure in the section from the first solenoid valve 8 to the plurality of suction holes 3a, it is preferable that the ratio (S1 / S2, unitless) of the cross-sectional area of the flow path is 2 or more. On the other hand, from the viewpoint of reducing the equipment cost and the workability of piping installation, it is preferable that the ratio (S1 / S2, unitless) of the flow path cross-sectional area is 15 or less. In the present embodiment, among the two pipes connected via the first solenoid valve 8, the cross-sectional area of the pipe on the side of the vacuum tank 10 is larger than the cross-sectional area of the pipe on the side of the plurality of suction holes 3a. Thereby, the cross-sectional area of the flow path in the section 4d is larger than the cross-sectional area of the flow path in the section 4c.

In addition, regarding the size of the cross-sectional area of the flow path between the branched flow path 4a, the branched flow path 4b, and the section 4c, the closer to the first solenoid valve 8, the larger the cross-sectional area of the flow path. Furthermore, regarding the lengths of the three 4a, 4b, and 4c, the lengths of the branch flow paths 4a and 4b are shorter than the length of the section 4c. The lengths of the branched flow paths 4a and 4b are preferably 75% or less based on the length of the section 4c. On the other hand, the lengths of the branched flow paths 4a and 4b are preferably both 5% or more based on the length of the section 4c. Here, the "length of the branched flow path 4a (branched flow path 4b)" when the length of a plurality of branched flow paths 4a (branched flow path 4b) is common means the common length of the branched flow path 4a (branched flow path 4b). When the lengths of the branch flow paths 4a (branch flow paths 4b) do not match, it means the length of the longest.

When the second solenoid valve 13 is in the open state, the compressed gas (for example, compressed air) can pass through the second solenoid valve 13 from the compressor 12 side toward the flow path 4 side. In addition, by transmitting the compressed gas in the flow path 4 from the compressor 12, the pressure rise in the flow path 4 can be accelerated, and the adsorption and fixation of the glass plate 2 can be released at a high speed. On the other hand, when the second solenoid valve 13 is closed, the compressed gas cannot pass through the second solenoid valve 13. When the second solenoid valve 13 is in the closed state, the gas and liquid 9 that have penetrated from the flow path 4 into the connection flow path 11 are also in a state where they cannot pass through the second solenoid valve 13. In addition, a buffer tank may be provided between the compressor 12 and the second solenoid valve 13 to maintain a positive pressure inside.

Here, including the drawings referred to in the description of this embodiment including FIG. 1, the hollow arrows indicate the gas in the state where the first solenoid valve 8 is opened and the second solenoid valve 13 is closed. The flow of liquid 9. The dotted arrows only indicate the flow of the gas in this state. Furthermore, the solid arrows indicate only the flow of the liquid 9 in this state.

As shown in FIG. 2, the vacuum tank 10 includes a first tank 17 as a first chamber connected to the flow path 4, and a second tank 19 as a first chamber 17 and a second chamber connected to the first chamber 18 via the first passage 18. ; The first valve 20 as the first opening and closing unit capable of switching the open state and the closed closed state that opened the first channel 18; as the open state and the lock capable of opening the path 21 for discharging liquid from the second tank 19 The second valve 22 of the second on-off unit of the closed state; the third valve 24 that opens and closes the second passage 23 capable of transmitting compressed gas or atmosphere to the second tank 19; Third channel 25.

The first tank 17 is a buffer tank. With the operation of the vacuum pump 5, the inside of the first tank 17 is always maintained at a negative pressure. In addition, the first tank 17 has a function of distributing the advancing path of the gas and the liquid 9 that have reached the first tank 17 through the flow path 4. The first tank 17 enables the gas reaching itself to enter the third channel 25, and the liquid 9 reaching it can enter the first channel 18 connected to the second tank 19.

The second groove 19 is disposed below the first groove 17. Further, the first channel 18 connects the bottom of the first groove 17 and the top of the second groove 19, and its height position continuously descends from the first groove 17 side toward the second groove 19 side. Thereby, when the first valve 20 is in the open state, the liquid 9 that has reached the first tank 17 can flow into the second tank 19 through the first passage 18 by its own weight.

Normally, while the first valve 20 is in the open state, the second valve 22 is in the closed state. At this time, the liquid 9 that has reached the first tank 17 through the flow path 4 is stored in the second tank 19. When the liquid is discharged, the second valve 22 is opened after the first valve 20 is closed. Thereby, the liquid 9 stored in the second tank 19 can be drained through the path 21. The path 21 is connected to the bottom of the second groove 19, and its height position decreases as it faces away from the second groove 19. Therefore, the liquid 9 flows through the path 21 by its own weight.

Usually, the third valve 24 is in a closed state. If the third valve 24 is opened after the first valve 20 is closed and the second valve 22 is opened after the liquid is discharged, air or the like flows into the second tank 19 through the second passage 23 Therefore, the drainage of the liquid 9 can be promoted.

As shown in FIG. 3 and FIG. 4, in addition to the components already described, the manufacturing apparatus 1 includes a plurality of side-by-side conveying belts 16 for carrying the glass plate 2 into and out of the support stand 3 in a flat posture. And a grindstone 26 as an end surface processing unit for processing the end surface 2a beyond the support table 3 of the glass plate 2 suction-fixed to the support table 3.

The plurality of conveying belts 16 can carry the glass plate 2 before the end surface 2a is processed into the support table 3 in the T1 direction, and can carry the processed glass plate 2 from the support table 3 in the T2 direction. Therefore, the length in the longitudinal direction of the conveyance belt 16 is longer than the length in the longitudinal direction of the support base 3, and the conveyance belt 16 is arranged so as to penetrate the gap of the support base 3. These conveying belts 16 are wound around a driving pulley and a driven pulley (both are not shown), and the height position of the conveying surface can be changed up and down by a lifting mechanism (not shown).

The plurality of conveyance belts 16 convey the glass plate 2 in the T1 direction in a state where the height position of the conveyance surface is higher than the support stand 3. Next, as shown by the two-dot chain line in FIG. 3 and FIG. 4, when the glass plate 2 reaches directly above the support base 3, the feeding operation is stopped, and the height position of the conveying surface is gradually lowered to transfer the glass plate 2 to Support table 3. After the handover, as shown by the solid lines in FIG. 3 and FIG. 4, it waits in the gap 14 until the processing of the end face 2 a is completed. Next, when the processing of the end surface 2a is completed, the height position of the conveyance surface is gradually raised, and the glass plate 2 is retrieved from the support stand 3. Finally, the feeding operation is performed again, and the glass plate 2 is conveyed in the T2 direction while the height position of the conveyance surface is higher than the support table 3.

As for the grindstone 26, one of the end surfaces 2a and 2a of the glass plate 2 extending in parallel is used for grinding and the other is used for grinding. The two grinding stones 26 and 26 are ground on both end surfaces 2a and 2a by rotating around the axis extending in the up-down direction as a center and moving in the T3 direction (opposite to the T1 direction and T2 direction). The moving direction of the grinding stone during the grinding process may be the same direction as the T1 direction and the T2 direction. In the present embodiment, a configuration is adopted in which two grinding stones 26 and 26 are ground while sandwiching the glass plate 2 in parallel.

In addition, although the illustration is omitted, the manufacturing apparatus 1 includes a first positioning mechanism for moving the glass plate 2 before the grinding process on the support table 3 in addition to the components described above to perform positioning. The first positioning mechanism includes, for example, a plurality of positioning pins for abutting on one of the end faces 2a and 2a of one of the end faces 2a, and pressing the glass plate 2 toward the other end face 2a. One of the end faces 2a is a pressing member that presses one of the end faces 2a of the glass plate 2 to each positioning pin. By the first positioning mechanism, the glass plate 2 can be moved in the arrangement direction of the division table A to the division table N and can be arranged at a desired position. The manufacturing apparatus 1 may further include a second positioning mechanism (not shown) in order to arrange the glass plate 2 at a desired position by moving the glass plate 2 in the T1 direction.

As shown in FIGS. 3 and 4, each of the first branch headers 6 is disposed directly below each of the division tables A to N. Thereby, the branch flow path 4a which connects each 1st branch header 6 and the adsorption hole 3a formed in each division stage A-N is extended up and down. The second branch header 7 is disposed directly below the plurality of conveying belts 16 and directly below the non-supporting table 3. The second branch header 7 is arranged below each of the first branch headers 6.

Next, a method for manufacturing a glass plate according to a first embodiment of the present invention using the manufacturing apparatus 1 will be described.

In the manufacturing method of the glass plate of this embodiment, first, the liquid supply process which supplies the liquid 9 to the support stand 3 is performed. In the liquid supply step, the liquid 9 is caused to flow out from a plurality of supply ports 3 b formed in each of the divided tables to be supplied. Thereby, the glass plate 2 can be easily moved on the support stand 3 in the subsequent positioning step. With the execution of the liquid supply step, a part of the liquid 9 penetrates into the flow path 4 from the adsorption holes 3 a formed in the respective dividing tables.

After the liquid supply step is completed, a step of placing the glass plate 2 on the support table 3 is performed next. The placing step is performed by transferring the glass plates 2 (the glass plate 2 before the end surface 2 a is processed) carried in by the plurality of conveyance belts 16 from the plurality of conveyance belts 16 to the support table 3.

After the placing step is completed, a positioning step of moving the glass plate 2 on the support table 3 for positioning is performed next. The first positioning mechanism is used in the execution of the positioning step. Thereby, the glass plate 2 is moved in the arrangement direction of the division table A-division table N, and is arrange | positioned at a desired position.

After the positioning step is completed, the vacuum tank 10 connected to each of the plurality of adsorption holes 3a through the flow path 4 is executed, and the adsorption of the glass plate 2 to the support table 3 via the plurality of adsorption holes 3a is performed. Fixed step. The suction and fixing step is performed by setting the first solenoid valve 8 which is closed in the initial state to the open state. The second solenoid valve 13 maintains an initial state, that is, a closed state.

When the first solenoid valve 8 is opened, the gas and liquid 9 existing in the two branched flow paths 4 a and 4 b and the section 4 c on the flow path 4 flow into the section 4 d sequentially through the first solenoid valve 8. Along with this, the air pressure in the two branch flow paths 4a, 4b, and the section 4c gradually decreases to generate a negative pressure, and the negative pressure acts on the glass plate 2 so that the glass plate 2 is fixed to the support base 3 by adsorption. In addition, in the present embodiment, the first tank 17 of the vacuum tank 10 is always maintained at a negative pressure, so the section 4d on the flow path 4 is generated before the first solenoid valve 8 is opened. The state of negative pressure.

The gas and liquid 9 flowing into the section 4 d pass through the section 4 d and reach the first tank 17 provided in the vacuum tank 10. Therefore, the travel path is allocated by the first groove 17. After entering the third channel 25, the gas reaches the vacuum pump 5. On the other hand, after the liquid 9 enters the first channel 18 connected to the second tank 19, the liquid 9 is discharged to the outside of the flow path 4 by performing a storage step and a liquid discharging step described below.

In the storage step, as the initial state, the first valve 20 is set to the open state and the second valve 22 is set to the closed state, whereby the liquid 9 flowing into the second tank 19 in the empty state through the first passage 18 is set. Store it. In the liquid discharge step, the first valve 20 is brought into a closed state and the second valve 22 is brought into an open state. Thereby, the liquid 9 stored in the second tank 19 is drained through the path 21. In addition, when the inside of the second tank 19 becomes the empty state again by the liquid discharge, the first valve is returned to the open state after the second valve 22 is returned to the closed state. As a result, the storage step and the liquid discharging step can be repeatedly performed.

After the glass plate 2 is suction-fixed on the support table 3 by the execution of the suction-fixing step, the end surface processing step of processing the end surface 2a beyond the glass plate 2 from the support table 3 is performed. In the end surface processing step, both end surfaces 2 a and 2 a of the glass plate 2 extending in parallel are ground. In addition, as a modification of this embodiment, the end surfaces 2a, 2a may be ground instead of or in addition to the grinding process.

After the end surface processing step is completed, an adsorption release step of releasing the adsorption and fixing of the support plate 3 to the glass plate 2 is performed next. The adsorption release step is performed by transmitting the compressed gas in the convection path 4 of the self-compressor 12 after the first solenoid valve 8 is closed and the second solenoid valve 13 is opened.

When the compressed gas is delivered into the flow path 4, the air pressure in the two branch flow paths 4a, 4b and the section 4c gradually rises, and the state where a negative pressure is generated is released. Thereby, the suction and fixing of the support plate 3 to the glass plate 2 is released.

In addition, in the present embodiment, the compressed gas is conveyed in the convection channel 4 with the execution of the adsorption release step, but it is not limited to this. As a modification of the present embodiment, even if the first solenoid valve 8 is closed without transmitting the compressed gas, the suction and fixing of the glass plate 2 can be released. Furthermore, as a modification of this embodiment, the suction and fixation of the glass plate 2 may be released by transmitting the atmosphere sucked from the outside of the flow path 4 into the flow path 4.

After the completion of the adsorption release step, finally, the glass plate 2 (the glass plate 2 processed by the end surface 2a) is retrieved from the support table 3 by a plurality of conveying belts 16, and is accompanied by the conveyance by the plurality of conveying belts 16 , The step of transferring the glass plate 2 to a further downstream side.

Next, main operations and effects of the manufacturing apparatus 1 and the manufacturing method will be described.

In the manufacturing apparatus 1 and the manufacturing method, the flow path 4 is increased by the first branch header 6 and the second branch header 7 from the first solenoid valve 8 (switching mechanism) to the plurality of suction holes 3a. Second (twice) branch. As a result, the volume of the flow path 4 in the interval from the first solenoid valve 8 to the plurality of suction holes 3a is reduced. Therefore, the vacuum tank 10 (a negative pressure generating source) can quickly make the suction from the first solenoid valve 8 to the plurality of suction holes 3a. The flow path 4 in the section of the hole 3a generates a negative pressure. Therefore, the time until a negative pressure of a desired magnitude is applied to the glass plate 2 can be reduced. As a result, the cycle time of the step for processing the end surface 2a can be shortened.

Further, the side of the vacuum tank 10 from the first solenoid valve 8 has a larger flow cross-sectional area than the side of the plurality of suction holes 3a from the first solenoid valve 8, so that the pressure loss can be reduced accordingly. Therefore, the flow rate of the gas and the liquid 9 that can flow through the flow path 4 on the side of the vacuum tank 10 from the first solenoid valve 8 is increased. Therefore, the negative pressure can be generated more quickly in the flow path 4 on the side of the plurality of suction holes 3 a than the first solenoid valve 8, and the time until the negative pressure of a desired magnitude acts on the glass plate 2 can be further reduced.

In addition, when the liquid 9 which is also a cause of the generation of the negative pressure is discharged from the inside of the flow path 4 to the outside of the flow path 4, the liquid can be discharged without stopping the operation of the vacuum tank 10 (negative pressure generation source). Thereby, it is possible to prevent a delay in the generation of negative pressure caused by the penetration of the liquid 9. Therefore, negative pressure can be quickly generated in the entire region of the flow path 4, and the time until a negative pressure of a desired magnitude acts on the glass plate 2 can be reduced.

<Second Embodiment> Next, a glass plate manufacturing apparatus according to a second embodiment of the present invention and a glass plate manufacturing method according to the second embodiment of the present invention using the apparatus will be described. In the second embodiment, only differences from the first embodiment will be described. Regarding the points in common with the first embodiment, the same reference numerals are given to the drawings to be referred to in the description of the second embodiment, and repeated explanations are omitted.

As shown in FIG. 5, the manufacturing device 1 according to the second embodiment is different from the manufacturing device 1 according to the first embodiment in the configuration of the vacuum tank 10. In the vacuum tank 10 of the second embodiment, the first tank 17, the second tank 19, and the first valve 20 of the vacuum tank 10 of the first embodiment are replaced with an upper chamber 27 a of the tank 27 and a lower chamber 27 b of the tank 27, respectively. And a shutter 28 capable of opening and closing the passage that continuously connects the upper chamber 27a and the lower chamber 27b.

The manufacturing method of the glass plate of 2nd Embodiment using the manufacturing apparatus 1 of 2nd Embodiment can also be implemented similarly to the manufacturing method of the glass plate of 1st Embodiment. In addition, with the manufacturing apparatus 1 and the manufacturing method of the second embodiment, the same main operations and effects as those of the manufacturing apparatus 1 and the manufacturing method of the first embodiment can also be obtained.

1‧‧‧ glass plate manufacturing device

2‧‧‧ glass plate

2a‧‧‧face

3‧‧‧ support

3a‧‧‧ adsorption hole

3b‧‧‧ supply port

4‧‧‧flow

4a‧‧‧ branch flow path

4b‧‧‧ branch flow path

4c‧‧‧ interval

4d‧‧‧ interval

5‧‧‧Vacuum pump

6‧‧‧ first branch header

7‧‧‧ second branch header

8‧‧‧The first solenoid valve

9‧‧‧ liquid

10‧‧‧Vacuum tank

11‧‧‧ Connect the flow path

12‧‧‧compressor

13‧‧‧Second Solenoid Valve

14‧‧‧ clearance

15‧‧‧ supply pipe

16‧‧‧handling belt

17‧‧‧ the first slot

18‧‧‧ the first channel

19‧‧‧Second Slot

20‧‧‧First Valve

21‧‧‧ Path

22‧‧‧Second Valve

23‧‧‧Second Channel

24‧‧‧ Third Valve

25‧‧‧ third channel

26‧‧‧ Millstone

27‧‧‧slot

27a‧‧‧Upper room

27b‧‧‧ Lower room

28‧‧‧ bezel

A ～ N‧‧‧ Split Table

T1 ～ T3‧‧‧‧direction

FIG. 1 is a piping diagram showing piping of a flow path in a glass plate manufacturing apparatus according to a first embodiment of the present invention. FIG. 2 is a partial vertical cross-sectional side view showing a periphery of a negative pressure generating source in the glass plate manufacturing apparatus according to the first embodiment of the present invention. FIG. 3 is a partial vertical cross-sectional front view showing the periphery of a support base in the glass plate manufacturing apparatus according to the first embodiment of the present invention. FIG. 4 is a partial vertical cross-sectional side view showing a periphery of a support base in the glass plate manufacturing apparatus according to the first embodiment of the present invention. FIG. 5 is a partial vertical cross-sectional side view showing a periphery of a negative pressure generating source in a glass plate manufacturing apparatus according to a second embodiment of the present invention.

Claims (9)

A manufacturing method of a glass plate includes a placing step of placing a glass plate on a support table having a plurality of adsorption holes formed thereon, and an adsorption fixing step of communicating with each of the plurality of adsorption holes through a fluid flow path. A negative pressure generation source connected to the user, and the glass plate is adsorbed and fixed to the support table through the plurality of suction holes; the method for manufacturing the glass plate is characterized in that the glass plate is Between the pressure generating source and the plurality of adsorption holes, a switching mechanism capable of switching between an open state in which the flow path is opened and a closed closed state is provided. The flow path is branched multiple times by a plurality of branch headers. The method for manufacturing a glass plate according to item 1 of the scope of patent application, wherein the plurality of branch headers include a first branch header disposed opposite to the plurality of adsorption holes on the flow path and a relative arrangement. The second branch header on the negative pressure generation source side makes the flow path length from each of the plurality of adsorption holes to the first branch header and from the first branch header The length of the flow path to the second branch header is shorter than the length of the flow path from the second branch header to the switching mechanism. The method for manufacturing a glass plate according to item 2 of the scope of patent application, wherein a plurality of parallel conveyor belts are provided to carry the glass plate in and out with respect to the support table in a flat posture, and The support table is divided into a plurality of division tables for a plurality of parallel formed gaps through which the plurality of conveying belts are inserted, and the first branch header is arranged below the division table, and The second branch header can be arranged in an area where the glass plate is conveyed by the conveyance belt. The method for manufacturing a glass plate according to any one of claims 1 to 3, wherein the negative pressure generation source side of the negative pressure generation source is started from the switching mechanism based on the switching mechanism. A cross-sectional area of the flow path of the flow path is larger than a cross-sectional area of the flow path of the flow path on the side of the plurality of adsorption holes from the switching mechanism. The method for manufacturing a glass plate according to any one of claims 1 to 4, wherein a liquid supply unit for supplying liquid to the support table is provided, and the negative pressure generation source includes: a first The second chamber is connected to the flow path and the interior is maintained at a negative pressure. The second chamber is connected to the first chamber via a passage. The first opening and closing unit can switch an open state and a closed closed state that open the passage. And a second opening and closing unit capable of switching between an open state and a closed closed state in which a path for discharging liquid from the second chamber is opened, and the manufacturing method of the glass plate is performed: a storing step in which the first When the opening and closing unit is in an open state and the second opening and closing unit is in a closed state, the liquid is caused to flow from the flow path to the second chamber through the first chamber and the passage. Storage; and a liquid discharging step, in a state where the first opening and closing unit is closed and the second opening and closing unit is opened, the liquid stored in the second chamber is passed through the path. Drain. The method for manufacturing a glass plate according to item 5 of the scope of patent application, wherein the height position of the flow path is gradually lowered from the plurality of adsorption holes toward the negative pressure generation source side. A manufacturing method of a glass plate includes a mounting step of placing a glass plate on a support table having an adsorption hole formed thereon, and an adsorption fixing step of a negative pressure generating source connected to the adsorption hole through a fluid flow path. The glass plate is suction-fixed to the support table through the suction hole, and the manufacturing method of the glass plate is characterized in that between the suction hole and the negative pressure generation source on the flow path, A switching mechanism capable of switching between an open state in which the flow path is opened and a closed closed state is provided, and based on the switching mechanism, the flow of the flow path on the negative pressure generation source side from the switching mechanism is set. The cross-sectional area of the flow path is larger than the cross-sectional area of the flow path of the flow path on the suction hole side from the switching mechanism. A method for manufacturing a glass plate includes: a liquid supply step of supplying liquid to a support table formed with an adsorption hole; a placing step of placing a glass plate on the support table; and an adsorption fixing step of passing a flow of a fluid through A negative pressure generating source connected to the suction hole, and the glass plate is suction-fixed to the support base via the suction hole, and the manufacturing method of the glass plate is characterized in that the negative pressure generating source is It includes: a first chamber connected to the flow path and maintained at a negative pressure inside; a second chamber connected to the first chamber via a channel; a first opening and closing unit capable of switching an open state that opens the channel and A closed closed state; and a second opening and closing unit capable of switching between an open state and a closed closed state that open a path for discharging liquid from the second chamber, and the manufacturing method of the glass plate is performed: a storage step, When the first opening and closing unit is in an open state and the second opening and closing unit is in a closed state, the liquid is caused to flow into the fluid from the flow path through the first chamber and the passage. Two chambers for storage; and a draining step, storing the first opening and closing unit in the closed state and the second opening and closing unit in the opened state, storing in the second chamber through the path pair. The liquid is drained. A manufacturing apparatus for a glass plate includes a support table formed with a plurality of adsorption holes, and a negative pressure generation source connected to each of the plurality of adsorption holes through a fluid flow path, and via the plurality of adsorptions. A negative pressure acts on the glass plate placed on the support table, and the manufacturing device of the glass plate is characterized in that the negative pressure generation source to the plurality of adsorption holes are in the flow path A switching mechanism capable of switching between an open state in which the flow path is opened and a closed closed state in which the flow path is opened is provided. And multiple branches.