JP5989501B2 - Transport method - Google Patents

Description

  The present invention relates to a conveying method for conveying a plate-like workpiece.

  In a grinding machine that grinds the surface of a plate-shaped workpiece, after the plate-shaped workpiece is ground by bringing a grinding wheel into contact with the surface to be ground, the conveyance pad contacts the grinding surface of the plate-shaped workpiece and the holding surface of the conveyance pad is used. The plate-like workpiece is sucked and held, and the plate-like workpiece is conveyed to, for example, a spinner device provided in the grinding device.

  As the transfer pad, for example, there is a transfer pad provided with a holding portion having a holding surface for sucking and holding a circular plate-shaped workpiece and a ring-shaped shower portion along the circumferential direction of the holding portion. Then, the plate-like workpiece can be sucked and held on the holding surface of the holding portion while supplying water from the shower portion to the back surface of the plate-like workpiece and preventing contamination from adhering to the plate-like workpiece (for example, the following) Patent Document 1 and Patent Document 2).

JP 2000-208593 A JP 2010-114353 A

  However, when the groove is exposed from the back surface by grinding the back surface of the plate-like workpiece having a groove formed on the surface, the back surface side can be held in a state where the groove is closed by the transport pad. If the groove is open on the side surface side of the plate-like workpiece, there is a problem that the suction force is lost from the portion where the groove is open. And even if water is discharged from the shower part of the transport pad as described above, the water flows substantially perpendicular to the holding surface of the transport pad, so that the suction force leaks from the groove of the plate-like workpiece, There is a problem that the plate-like workpiece cannot be sucked and held.

  The present invention has been made in view of the above circumstances, and sucks from the groove of the grooved plate-like workpiece held by the holding surface of the conveyance pad when the grooved plate-like workpiece having a groove opened on the side surface is conveyed. There is a problem to be solved by the invention in order to prevent power loss.

  The present invention relates to a holding table for holding the surface of a grooved plate-like workpiece having a groove formed on the surface and having a protective tape adhered to the surface via the protective tape, and a grooved plate held on the holding table. Grinding means for grinding the back surface of the workpiece and exposing the groove from the back surface side, and suctioning and holding the back surface of the grooved plate workpiece ground by the grinding device, the grooved plate workpiece from the holding table An unloading means for unloading the grooved plate-like workpiece from the holding table using a grinding device comprising at least a carrying device, wherein the unloading means has a holding surface for sucking and holding the grooved plate-like workpiece. And a first open / close valve that switches between communication between the holding surface and the suction source and a vertical drive unit that moves the transfer pad up and down, and the holding table holds the holding pad. Water supply means for supplying water to the side surface of the grooved plate-shaped workpiece when the holding surface of the conveyance pad contacts the back surface of the grooved plate-shaped workpiece is disposed on the outer peripheral side of the conveyance pad; The water supply means includes a supply port that discharges water from the outer peripheral side of the transport pad, a supply path that connects the supply port and the water supply source, and a second passage that is disposed in the supply path and opens and closes the supply path. An opening / closing valve, and the holding surface of the conveying pad is brought into contact with the back surface of the grooved plate-like workpiece after the grinding process held by the holding table by driving the vertical driving unit, A suction step in which the holding surface of the conveyance pad communicates with a suction source, and the holding surface sucks the back surface of the grooved plate-like workpiece; and the water supply means while continuing the suction step Open the second on-off valve of the grooved plate work from the supply port Water is supplied to the side surface, and the workpiece suction holding process of sucking and holding the grooved plate workpiece by the transport pad and the holding table holding the grooved plate workpiece are released while continuing the workpiece suction holding step. At the same time, the conveying pad is raised by the vertical drive unit, and the grooved plate workpiece is conveyed by the unloading step of unloading the grooved plate workpiece from the holding table.

  In the transport method according to the present invention, water is continuously supplied to the side surface of the grooved plate workpiece by the water supply means while the grooved plate workpiece is being unloaded by the unloading means. Prevents leakage. Therefore, the grooved plate-like workpiece can be securely held, and the grooved plate-like workpiece does not fall during carrying out.

It is sectional drawing which shows the structure of a grinding device. It is a perspective view which shows the structure of the carrying-out means with which a grinding apparatus is equipped. It is a perspective view which shows the structure of a plate-shaped workpiece with a groove | channel. It is sectional drawing which shows the state which implements a suction process. It is sectional drawing which shows the state which implements a workpiece | work suction holding process, continuing a suction process. It is sectional drawing which shows the state which implements a carrying out process, continuing a workpiece | work suction holding process.

  A grinding apparatus 1 shown in FIG. 1 is a grinding apparatus capable of forming individual devices by grinding a surface of a workpiece having grooves formed on the surface to expose the grooves from the back surface side. The grinding apparatus 1 includes a holding table 2 that holds the surface of the workpiece, and a grinding means 3 that grinds the back surface of the workpiece held by the holding table 2 and exposes a groove formed on the surface from the back surface side. And an unloading means 4 for sucking and holding the back surface of the workpiece ground by the grinding means 3 and unloading the workpiece from the holding table 2.

  The holding table 2 has a holding portion 20 formed of a porous member, and the upper surface side of the holding portion 20 is a holding surface 21 for sucking and holding a workpiece. A flow path 22 through which air flows is formed at the lower end of the holding unit 20. The holding unit 20 is connected to the suction source 24 via the valve 23. When the valve 23 is opened, the workpiece can be sucked and held from below by the suction force acting on the holding unit 20. The holding unit 20 is connected to a supply source 26 via a valve 25. When the valve 25 is opened, air is supplied from the supply source 26 to the lower side of the workpiece held on the holding surface 21. Can be supplied.

  The grinding means 3 includes at least a spindle 30, a grinding wheel 32 attached to the lower part of the spindle 30 via a mount 31, and a grindstone 33 fixed to the lower part of the grinding wheel 32 in an annular shape. The workpiece can be ground while pressing the workpiece.

  The unloading means 4 includes a transport pad 40 having a holding member 40a for sucking and holding a workpiece and a frame body 40b for supporting the holding member 40a. The lower surface of the holding member 40a is a holding surface 400 for sucking and holding the workpiece. In addition, the unloading means 4 includes at least a first opening / closing valve 43 that switches communication between the holding surface 400 and the suction source 46 and a vertical drive unit 44 that moves the transport pad 40 up and down. Yes. The holding member 40a constituting the transport pad 40 is formed of, for example, a porous member.

  As shown in FIG. 1, a transport arm 42 is connected to the transport pad 40 via a connecting portion 41. A suction path 45 that allows the holding surface 400 and the suction source 46 to communicate with each other is formed in the central portion of the holding pad 40, and the first opening / closing valve 43 is disposed in the suction path 45. When the first opening / closing valve 43 is opened together with the operation of the suction source 46, the suction source 46 and the holding surface 400 of the transport pad 40 communicate with each other, and a suction action can be generated on the holding surface 400.

  A support portion 7 extending in the vertical direction is connected to one end of the transfer arm 42, and an up-and-down drive portion 44 is disposed via the elevating portion 6. The vertical drive unit 44 includes a ball screw 440 extending in the vertical direction and a motor 441 connected to one end of the ball screw 440. When the ball screw 440 is rotated by being driven by the motor 441, the elevating unit 6 moves in the vertical direction (Z-axis direction), so that the transport pad 40 can be operated in the Z-axis direction. Further, the carry-out means 4 is provided with a movement drive unit 8, and the conveyance pad 40 can be moved in the horizontal direction (X-axis direction).

  As shown in FIGS. 1 and 2, water supply means 5 is disposed on the outer peripheral side of the transport pad 40. The water supply means 5 includes a housing 50, an annular supply port 51 that can discharge water from the outer peripheral side of the transport pad 40, a supply path 52 that connects the water supply source 54 and the supply port 51, and a supply path 52 And at least a second opening / closing valve 53 that opens and closes the supply path 52.

  An inclined portion 402 having an inclined surface is formed below the outer peripheral portion 401 of the transport pad 40 shown in FIG. 1, and the supply port 51 is disposed along the inclined portion 402. When the water supply source 54 shown in FIG. 2A is activated and the second opening / closing valve 53 is opened, water flows into the supply path 52 and water is discharged from the supply port 51. Since water flows along the inclined portion 402 shown in FIG. 2B, it is possible to supply water toward the side surface of the workpiece sucked and held on the holding surface 400.

  In the following, a method for carrying out a workpiece using the grinding apparatus 1 will be described. The grooved plate-like workpiece W shown in FIG. 3A is formed with a lattice-like groove G that does not penetrate to the back surface Wb on the front surface Wa side, and is partitioned by the groove G to form a plurality of devices D. Is formed. A notch N for identifying the crystal orientation is formed on the side surface Wc of the grooved plate-like workpiece W. When grinding the grooved plate-like workpiece W, as shown in FIG. 3B, the protective tape T is stuck on the front surface Wa, and the back surface Wb, which is the surface opposite to the front surface Wa, faces upward. The groove G is exposed by grinding the back surface Wb of the grooved plate workpiece W by the grinding means 3 shown in FIG.

(1) Suction Step As shown in FIG. 4, in the grooved plate workpiece W after grinding, the groove G is exposed from the back surface Wb side, and the back surface Wb is exposed upward. The valve 23 is in an open state, and the surface Wa side of the grooved plate workpiece W is sucked and held by the suction force from the suction source 24. The vertical drive unit 44 rotates the ball screw 440 by driving the motor 441, and lowers the transport pad 40 toward the back surface Wb of the grooved plate-like workpiece W, for example, in the arrow Z1 direction.

  As shown in FIG. 5, when the holding surface 400 of the transport pad 40 comes into contact with the back surface Wb of the grooved plate-like workpiece W, the carry-out means 4 operates the suction source 46 and the first opening / closing valve 43. And the back surface Wb of the grooved plate-like workpiece W is sucked by the holding surface 400 of the transport pad 40.

(2) Workpiece suction / holding step While continuing the suction step, the workpiece supply / holding is performed by the water supply means 5 so that the suction force is not released from the groove G of the grooved plate-like workpiece W shown in FIG. Specifically, the water supply means 5 shown in FIG. 5 opens the second opening / closing valve 53 and supplies the water 9 to the supply path 52 along with the operation of the water supply source 54.

  As shown in the partially enlarged view of FIG. 5, the water 9 supplied to the supply path 52 is discharged from the annular supply port 51 and flows along the inclined portion 402. Since the water 9 flowing along the inclined portion 402 is supplied toward the side surface Wc of the grooved plate-like workpiece W, the side surface Wc of the grooved plate-like workpiece W is sealed with the water 9. Accordingly, the suction force does not leak from the groove G of the grooved plate workpiece W sucked by the holding surface 400.

(3) Unloading step The grooved plate workpiece W is unloaded from the holding table 2 while continuing the workpiece suction holding step. First, the holding table 2 shown in FIG. 5 closes the valve 23 to release suction holding of the grooved plate workpiece W. Next, the holding table 2 opens the valve 25 with the operation of the supply source 26 and supplies air toward the surface Wa of the grooved plate-like workpiece W. Accordingly, the grooved plate workpiece W is easily separated from the holding surface 21 by the air pressure.

  Next, the vertical drive unit 44 shown in FIG. 6 rotates the ball screw 440 by driving the motor 441 to raise the conveyance pad 40 that sucks and holds the grooved plate-like workpiece W in the arrow Z2 direction. Furthermore, the transfer pad 40 holding the grooved plate-like workpiece W is moved by the movement drive unit 8 in the direction of the arrow X1, for example. While the grooved plate-like workpiece W is being carried out, the water 9 is continuously supplied from the supply port 51 to the side surface Wc of the grooved plate-like workpiece W as shown in the partially enlarged view of FIG. In this manner, the grooved plate workpiece W is carried out from the holding table 2.

  As described above, in the present invention, since the water 9 is continuously supplied to the side surface Wc of the grooved plate-like workpiece W by the water supply means 5 while the grooved plate-like workpiece W is being carried out by the carry-out means 4, the grooved plate The suction force does not leak from the groove G of the shaped workpiece W, and the grooved plate-like workpiece W can be reliably held.

  In addition, although the supply port 51 which comprises the water supply means 5 shown to this embodiment is formed in cyclic | annular form, it is not limited to this structure. For example, a plurality of supply ports may be formed in the circumferential direction of the housing 50.

1: Grinding device 2: Holding table 20: Holding part 21: Holding surface 22: Flow path 23: Valve 24: Suction source 25: Valve 26: Supply source 3: Grinding means 30: Spindle 31: Mount 32: Grinding wheel 33: Grinding wheel 4: Unloading means 40: Transfer pad 40a: Holding member 40b: Frame body 400: Holding surface 401: Outer peripheral portion 402: Inclined portion 41: Connecting portion 42: Transfer arm 43: First opening / closing valve 44: Vertical drive portion 440 : Ball screw 441: Motor
45: Suction path 46: Suction source 5: Water supply means 50: Housing 51: Supply port 52: Supply path 53: Second open / close valve 54: Water supply source 6: Lifting section 7: Support section 8: Movement drive section 9 : Water W: Plate-like workpiece with groove Wa: Front surface Wb: Back surface Wc: Side surface T: Protection tape D: Device G: Groove N: Notch

Claims (1)

A holding table for holding the surface of the grooved plate-like workpiece having a groove formed on the surface and a protective tape adhered to the surface via the protective tape, and a grooved plate-like workpiece held on the holding table Grinding means for grinding the back surface and exposing the groove from the back surface side, and sucking and holding the back surface of the grooved plate workpiece ground by the grinding means, and carrying the grooved plate workpiece from the holding table An unloading means, and an unloading method of unloading the grooved plate-shaped workpiece from the holding table using a grinding device comprising at least
The carry-out means includes a conveyance pad having a holding surface for sucking and holding the grooved plate-shaped workpiece, a first opening / closing valve for switching between communication and blocking between the holding surface and the suction source, and raising and lowering the conveyance pad. And an up-and-down driving unit to be operated,
Water supply means for supplying water to the side surface of the grooved plate-like workpiece when the holding surface of the conveyance pad comes into contact with the back surface of the grooved plate-like workpiece held by the holding table is provided on the outer peripheral side of the conveyance pad. Arranged,
The water supply means includes a supply port for discharging water from the outer peripheral side of the transport pad;
A supply path for communicating the supply port with a water supply source;
A second opening / closing valve disposed in the supply path to open and close the supply path,
The holding surface of the conveyance pad is brought into contact with the back surface of the grooved plate-like workpiece after the grinding process held by the holding table by driving the vertical drive unit, the first opening / closing valve is opened, and the holding of the conveyance pad is performed. A suction step in which the surface communicates with a suction source, and the holding surface sucks the back surface of the grooved plate workpiece;
While continuing the suction step, the second opening / closing valve of the water supply means is opened to supply water from the supply port to the side surface of the grooved plate-like workpiece, and the grooved plate-like workpiece is removed by the transport pad. A workpiece suction holding process for sucking and holding;
While continuing the workpiece suction and holding step, the holding table releases the grooved plate-like workpiece and lifts the transport pad by the vertical drive unit to carry the grooved plate-like workpiece out of the holding table. An unloading process, and an unloading method.

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