JP5017983B2 - Suction pad for plate - Google Patents

Description

  The present invention relates to a suction method and a suction pad for a plate-like object, and more specifically, is formed on the inner peripheral side of the seal member in a state where the seal member mounted on the mounting base material is in contact with the surface of the plate-like object. The present invention relates to a suction method and a suction pad for sucking and holding a plate-like object by applying a negative pressure to the sealed space.

  As is well known, a plate-like material represented by a glass substrate for a flat panel display such as a liquid crystal display (LCD) or a plasma display (PDP) is used for transfer during transfer or direction change in a polishing process. Furthermore, from the flow of automation, the position and angle are changed while being sucked and held by the suction pad.

  As this type of suction pad, the tip of the elastically deformable skirt (seal member) is pressed against the surface of the plate-like object, and the air in the sealed space surrounded by the close contact between the skirt and the plate-like object is used. In general, a structure is used in which suction is performed by a negative pressure suction means (vacuum pump or the like), and the sealed space is suctioned and held in a negative pressure.

  However, in such an adsorption method, when the sealed space is set to a negative pressure, the skirt portion slides with friction while expanding the diameter while pressed against the surface of the plate-like object. A fatal problem in terms of quality occurs that the surface is scratched. Moreover, in this type of conventional method, since the plate-like object is in a dry state, when the above-mentioned sealed space is sucked with negative pressure, foreign matter such as dust and dirt adhering to the surface of the plate-like object is obtained. There is also a problem that it becomes difficult to peel off the foreign matters.

  Therefore, according to the following Patent Document 1, the cleaning liquid (ion water) is confined in the space between the surface of the plate-like object (glass plate) and the skirt portion of the suction pad, and in this state, the space is negatively pressurized. Thus, a technique for adsorbing and holding a plate-like object is disclosed. More specifically, the on / off valve is opened with the skirt portion of the suction pad lowered and brought close to the surface of the glass plate, and ion water is supplied to the inside of the skirt portion. The pressing operation is stopped after the portion is pressed and expanded in diameter by its elastic deformation, and the supply of ionic water is stopped by closing the on-off valve. As a result, the skirt part is brought into close contact with the surface of the glass plate, and then the suction pad is raised, whereby the skirt part is elastically restored and contracted, and accordingly, there is a gap between the skirt part and the surface of the glass plate. By being in a negative pressure state, the glass plate is sucked and held by the suction pad.

  On the other hand, according to Patent Document 2 below, a groove is provided on the mounting surface on which the glass plate is mounted, a liquid supply hole for preventing the mounting surface from drying is opened in the groove, and a negative pressure is applied to the mounting surface. A holding surface plate having a suction hole for generation is disclosed. This holding surface plate allows water sent from the water supply source to flow out of the liquid supply hole, flow in the groove, supply water to the surface side of the mounting surface, and perform negative pressure suction through the suction hole. The glass plate is sucked and held on the mounting surface.

JP 2002-103265 A JP 2002-144180 A

  By the way, according to the adsorption pad disclosed in the above-mentioned Patent Document 1, the ionic water flows on the surface of the glass plate or remains in a space surrounded by the skirt portion and the glass plate. For this reason, it is possible to enjoy some advantages in terms of reducing friction between the skirt portion and the glass plate and suppressing dust and dirt from sticking to the surface of the glass plate. However, in such an adsorption method, the glass plate is adsorbed and held only by the negative pressure generated when the on-off valve is opened and the skirt portion is pressed against the glass plate and then the on-off valve is closed and the skirt portion is separated from the glass plate. In addition, since the negative pressure is generated with ionic water interposed, there arises a problem that the adsorptive power due to the negative pressure is insufficient. For this reason, when the increase in the size of glass substrates for flat panel displays (for example, for LCDs and PDPs) has been promoted in recent years, this kind of glass plate has fallen or dropped, and so on. The problem becomes serious.

  On the other hand, in the holding surface plate disclosed in Patent Document 2, the water that flows out from the liquid supply hole first flows in the groove and then enters between the glass plate and the mounting surface. Can be brought into close contact with the mounting surface by negative pressure. That is, in the vicinity of the opening of the suction hole that generates a negative pressure suction force on the glass plate, if the negative pressure suction force is sufficiently increased, it is sufficient for the liquid to always flow between the glass plate and the mounting surface. No gaps or spaces exist. Therefore, in the suction holding part due to the negative pressure on the glass plate, water is not substantially supplied to the contact surface to the mounting surface of the glass plate or is not sufficiently wetted with water and dried. In addition to not being able to reliably suppress the occurrence of scratches due to friction on the glass plate surface, there also arises a problem that the occurrence of dust and dirt sticking to the glass plate surface cannot be properly avoided.

  Therefore, the techniques disclosed in both of Patent Documents 1 and 2 described above can be appropriately compatible with sufficiently increasing the negative pressure adsorption force on the glass plate and preventing drying of the glass plate surface. I have to say that this is not a good policy.

  In addition, the above problems may occur in the same manner not only for glass plates but also for other plate-like objects such as metal plates and ceramic plates.

  In view of the above circumstances, the present invention sufficiently increases the negative pressure adsorption force for a plate-like object, and causes the generation of scratches on the surface of the adsorption holding part due to the negative pressure of the plate-like object or the occurrence of dust or dirt. It is a technical issue to appropriately suppress the above.

This onset Ming was invented in order to solve the above technical problem, in a state in which the leading end of the sealing member mounted to the mounting base is in contact with the surface of the platelet, the inner peripheral side whole area of the sealing member A suction pad configured to suck and hold the plate-like object by applying a negative pressure to the sealed space to be formed, wherein the seal member is formed of a single foam sponge and is attached to the plate-like object. A contact portion is an outer peripheral elastic body having liquid absorbency, a negative pressure suction hole for sucking negative pressure into the sealed space, and a liquid for supplying liquid to the sealed space An inner periphery-side elasticity formed of a continuous foam sponge that forms a supply hole and absorbs the liquid supplied to the sealed space and allows the liquid to flow to the surface of the plate-like object. A body is mounted, the inner peripheral elastic body is mounted on the mounting base, and the sealed space The negative pressure suction holes in the outermost peripheral portion is marked in particular wherein the inner peripheral side elastic member to all positions except the gap and the sealed space is provided a gap which is open is located. Here, “liquid absorbency” means the property of absorbing liquid, and when the liquid is water, it means water absorption (synonymous with water retention) (hereinafter the same). Furthermore, “liquid absorption” means sucking a liquid, and when the liquid is water, it means water absorption (synonymous with water retention) (hereinafter the same).

According to such a configuration , a sealed space is formed in the entire inner peripheral side of the outer peripheral elastic body formed of a sealing member, that is, a single foam sponge attached to the mounting base material, and this sealed space is negative for the plate-like object. It corresponds to the suction holding part by pressure, and the size of the sealed space is sufficient to generate a sufficient negative pressure due to the presence of the seal member. Will be supplied. Note that the single foam sponge is a foamed elastic body in which the pores are in a non-communication state, and can reliably serve as a sealing member. Therefore, a high negative pressure adsorption force is generated on the surface portion which is a negative pressure adsorption holding portion of the plate-like object in contact with the sealed space, and at the same time, a sufficient amount of liquid is supplied and the wet state can be reliably maintained. become. As a result, the plate-like object is appropriately prevented from falling when the plate-like object is being held by suction, and the surface of the plate-like object may be rubbed or dust or Occurrence of dirt sticking can be appropriately suppressed, and the quality can be improved over a wide area on the surface of the plate-like object. In addition, the outer peripheral elastic body made of a single foam sponge as a seal member has a liquid-absorbing property at the contact portion with the plate-like object. In spite of having the property, the contact portion of the seal member with the plate-like object is always in a wet state because it has the liquid-absorbing property. Therefore, ing to be maintained in the surface portion is also always wet of the platelet to the abutment portion is in contact. Further, the inner peripheral elastic body arranged in the sealed space is formed of a continuous foam sponge, and this continuous foam sponge is a foamed elastic body in which the pores are in a continuous state. Can be made. The inner peripheral elastic body absorbs the liquid supplied to the sealed space and causes the liquid to flow out to the surface of the plate-like object. Thereby, it becomes possible to maintain always wet the entire surface of the platelet including a surface in contact with the enclosed space of the suction pad, for example, even a very thin plate material, plate-shaped Negative pressure acting on the surface of the object can be moderately received by the elastic force of the inner peripheral elastic body, and inappropriate depression deformation due to high negative pressure suction force is suppressed. In addition to this, the liquid absorbed by the inner circumferential elastic body flows out from the elastic body to the surface of the plate-like object, so that the surface of the plate-like object is always kept wet and dried. It is possible to avoid the precipitation of foreign matters caused by the above. The negative pressure suction is preferably performed continuously, and at the same time, liquid supply is preferably performed continuously.

The suction pad has a structure in which a gap is formed between the inner and outer surfaces of the outer peripheral side elastic body and the inner peripheral side elastic body, and a negative pressure suction hole is opened in the gap . This means that a gap for opening the negative pressure suction hole is provided at the outermost peripheral portion of the sealed space.

  In this way, it is possible to appropriately apply a negative pressure to the sealed space on the inner peripheral side of the outer peripheral side elastic body and to the inner peripheral side elastic body in the space, and it is also advantageous in terms of layout. It becomes.

  Furthermore, it can be set as the structure where the liquid supply hole has opened so that a liquid may flow in into the said inner peripheral side elastic body.

  By doing so, the liquid is supplied to the inner peripheral elastic body so that it is constantly infiltrated, and the surface of the plate-like object is always kept wet, and such a state is maintained and sealed. Since negative pressure suction is performed in the space, the surface of the plate-like object is sucked with negative pressure by the suction pad in a surely and uniformly wet state.

  Moreover, it can comprise so that the mounting surface to the attachment base material of the said inner peripheral side elastic body and outer peripheral side elastic body may be arrange | positioned in the state parallel to the surface of a plate-shaped object.

  This simplifies the structure for surrounding the inner circumferential elastic body with the outer circumferential elastic body, and simplifies the work for bringing both into contact with the surface of the plate-like object.

  And under such a structure, it can comprise so that the said outer peripheral side elastic body may elastically deform in the direction perpendicular | vertical to the mounting surface to an attachment base material.

  In this way, when negative pressure suction is performed on the sealed space, the outer peripheral elastic body (seal member) is compressed and deformed in a direction perpendicular to the surface of the plate-like object, and the plate-like shape accompanying this deformation. Since friction with the surface of the object is not generated, it is further advantageous in preventing the occurrence of scratches.

  The suction pad having the above configuration is suitable when the plate-like object is a glass substrate for a flat panel display, and in such a case, it is advantageous that the liquid is water.

As described above, according to the suction method and suction pad for a plate-like object according to the present invention, the size of the sealed space formed on the inner peripheral side due to the presence of the seal member mounted on the mounting base material is sufficiently negative. The liquid is supplied while suctioning a negative pressure into the sealed space, as long as it is sufficient to generate pressure. Therefore, a high negative pressure adsorption force is generated on the surface portion which is a negative pressure adsorption holding portion of the plate-like object in contact with the sealed space, and at the same time, a sufficient amount of liquid is supplied and the wet state can be reliably maintained. become. As a result, the plate-like object is appropriately prevented from falling when the plate-like object is being held by suction, and the surface of the plate-like object may be rubbed or dust or Occurrence of dirt sticking can be appropriately suppressed, and the quality can be improved over a wide area on the surface of the plate-like object. Moreover, since the sealing member is an outer peripheral elastic body that is formed of a single foam sponge and has a liquid-absorbing portion in contact with the plate-like object, the sealing member has airtightness with the inner peripheral side as a sealed space. Nevertheless, the contact portion of the seal member with the plate-like object is always wet because it has liquid absorption. Therefore, the surface portion of the plate-like object that is in contact with the contact portion is always maintained in a wet state, and the entire surface of the plate-like object is always wet, including the surface that is in contact with the sealed space. Can be maintained. Furthermore, the inner peripheral elastic body arranged in the sealed space is formed of a continuous foam sponge, absorbs the liquid supplied to the sealed space, and causes the liquid to flow out to the surface of the plate-like object. For example, even if it is a very thin plate-like object, the negative pressure acting on the surface of the plate-like object can be appropriately received by the elastic force of the inner peripheral side elastic body, and unreasonable depression deformation due to the high negative pressure suction force It is suppressed. In addition to this, the liquid absorbed by the inner circumferential elastic body flows out from the elastic body to the surface of the plate-like object, so that the surface of the plate-like object is always kept wet and dried. It is possible to avoid the precipitation of foreign matters caused by the above.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 illustrates an external perspective view of a plate-like suction pad 1 according to an embodiment of the present invention. In the present embodiment, a glass substrate for a liquid crystal display is employed as the plate-like object. In addition, as an example of use, after polishing two sides (for example, two long sides) in the four-side polishing process of the glass substrate, for example, four corners of the glass substrate to polish the remaining two sides. This is used when each part is sucked and held by the suction pad 1 and changed in direction by 90 degrees.

  As shown in the figure, the suction pad 1 is formed on the surface of a mounting base 2 having a disc shape, and an annular or cylindrical sealing member (outer peripheral elastic body) 3 having a maximum diameter substantially the same. And the inner peripheral side elastic body 4 arranged concentrically with a predetermined gap interposed on the inner peripheral side of the outer peripheral side elastic body 3 is attached (fixed). A lid 5 used for supplying liquid (water) and sucking gas (air) is fixed and integrated on the back surface side of the mounting base 2.

  The outer peripheral side elastic body 3 is formed of a single-foam sponge in which a large number of holes are not communicated and does not allow water and air to pass therethrough, and only the outer surface (at least the front end surface 3a) has water absorption (water retention). . On the other hand, the inner peripheral side elastic body 4 is formed of a continuous foam sponge in which a large number of holes are in communication with each other and allows water and air to pass therethrough, and the whole has water absorption (water retention). A plurality of through holes 4x penetrating in the thickness direction are formed.

More specifically, as shown in FIGS. 2A and 2B, a plurality of liquid supply holes whose front ends are open so that water flows into the inner peripheral elastic body 4 at the center of the mounting base 2. 6 is formed, and a plurality of negative pressure suction holes 7 whose ends are opened in the gap between the inner and outer surfaces of the outer peripheral side elastic body 3 and the inner peripheral side elastic body 4 are formed so as to surround the outer peripheral portion thereof. Yes. And the front end surface 3a of the outer peripheral side elastic body 3 and the front end surface 4a of the inner peripheral side elastic body 4 are located on the same surface (or substantially on the same surface), and the front end surface 3a of the outer peripheral side elastic body 3 is By being in close contact with the surface of the glass substrate G, the inner peripheral side of the outer peripheral elastic body 3 becomes a sealed space S (including the location of the inner peripheral elastic body 4). Therefore, a gap in which the negative pressure suction hole 7 is opened is provided in the outermost peripheral part of the sealed space S, and the inner peripheral elastic body 4 is arranged in all parts of the sealed space S except for the gap. .

  Further, when the glass substrate G is sucked and held by the suction pad 1, the mounting surfaces of the outer peripheral side elastic body 3 and the inner peripheral side elastic body 4 on the mounting base 2 are parallel to the surface of the glass substrate G. It becomes a state. Therefore, the outer peripheral side elastic body 3 and the inner peripheral side elastic body 4 are configured to be elastically deformed in a direction perpendicular to the mounting surface to the mounting base 2.

  A liquid pipe 8 serving as a liquid supply source is attached to an upper portion of the lid 5 fixed to the attachment base material 2, and the attachment base material 2 is connected from the liquid pipe 8 through the liquid supply path 8 a. Water is supplied to each liquid supply hole 6. Further, a negative pressure pipe 9 serving as a negative pressure suction source is attached to the upper portion of the lid 5, and negative pressure is applied to each negative pressure suction hole 7 from the negative pressure pipe 9 through the negative pressure suction path 9 a. It is supposed to occur.

  According to the suction pad 1 having the above configuration, the glass substrate G is appropriately sucked and held as follows.

  First, a large amount of water is attached in a state where a gap exists between the front end surfaces 4a and 3a of both the inner peripheral side elastic body 4 and the outer peripheral side elastic body 3 of the suction pad 1 and the surface of the glass substrate G. The liquid is supplied from the liquid supply holes 6 of the substrate 2 to the entire surface of the glass substrate G through the inner peripheral elastic body 4 and is kept in a wet state. In such a state, the outer peripheral side elastic body 3 of the suction pad 1 is pressed and brought into close contact with the surface of the glass substrate G, thereby making the inner peripheral side of the outer peripheral side elastic body 3 a sealed space S and a large amount. The water in the sealed space S is sucked through the negative pressure suction hole 7 of the suction pad 1 while continuing to flow in the sealed space S.

  As a result, a high negative pressure adsorption force is generated on the surface of the glass substrate G in contact with the sealed space S by the negative pressure suction performed positively and continuously, and at the same time, a sufficient amount of water is on the inner peripheral side. Since it is supplied through the elastic body 4, the surface of the glass substrate G can be reliably maintained in a wet state. Accordingly, the shortage of negative pressure when the glass substrate G is held by suction is solved, and the glass substrate G is prevented from dropping or dropping, and the surface of the glass substrate G is wetted before the negative pressure is sucked. The wet state is maintained over a wide surface including the wet state, and the generation of scratches or the occurrence of dust or dirt is suitably suppressed.

  Furthermore, since the front end surface 3a of the outer peripheral side elastic body 3, that is, the contact portion with the glass substrate G has water absorption (water retention), the surface portion of the glass substrate G with which the front end surface 3a is in contact is also always present. The wet state is maintained, and the entire region including the other surface of the glass substrate G can be appropriately maintained in a wet state.

  Moreover, since the inner circumferential elastic body 4 is mounted on the mounting base 2 so as to be located in the sealed space S, even if it is a very thin plate-like object such as a glass substrate G for a liquid crystal display, A negative pressure acting on the surface of the glass substrate G can be moderately received by the elastic force of the inner peripheral elastic body 4, and inappropriate depression of the glass substrate G due to a high negative pressure suction force is suppressed.

  In addition, since the mounting surfaces of the inner peripheral side elastic body 4 and the outer peripheral side elastic body 3 to the mounting base 2 are arranged in parallel with the surface of the glass substrate G, the inner peripheral side elastic body 4 is placed on the outer peripheral side. The structure for surrounding with the elastic body 3 is simplified, and the work for bringing both the elastic bodies 3 and 4 into close contact with the surface of the glass substrate G is also simplified.

  Furthermore, since the outer peripheral side elastic body 3 is configured to be elastically deformed in a direction perpendicular to the mounting surface to the mounting base material 2, the outer peripheral side elastic body 3 is not attached to the glass substrate G when negative pressure suction is performed. The surface of the glass substrate G is compressed and deformed in the direction perpendicular to the surface of the glass substrate, and the friction with the surface of the glass substrate G due to this deformation does not occur, and the generation of scratches can be avoided more accurately.

  In this embodiment, the present invention is applied when the plate-like object is a glass substrate for a liquid crystal display. However, other glass substrates for flat panel displays, other metal plates, ceramic substrates, and the like are used. The present invention can be similarly applied to a plate-like object.

It is a principal part perspective view which shows the suction pad of the plate-shaped object which concerns on embodiment of this invention. FIG. 2A is a longitudinal front view of the suction pad, and FIG. 2B is a plan view of the suction pad.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Adsorption pad 2 Mounting base material 3 Outer peripheral side elastic body (seal member)
3a Front end surface (contact portion) of the outer peripheral elastic body
4 Inner peripheral side elastic body 6 Liquid supply hole 7 Negative pressure suction hole G Glass substrate (plate-like object)

Claims (5)

By applying a negative pressure to the sealed space formed in the entire inner peripheral side of the seal member in a state where the tip of the seal member mounted on the mounting substrate is in contact with the surface of the plate-like object, the plate-like A suction pad configured to suck and hold an object,
The sealing member is an outer peripheral elastic body that is formed of a single foam sponge, and a contact portion with the plate-like object has liquid absorbency,
In the mounting substrate, a negative pressure suction hole that performs negative pressure suction with respect to the sealed space, and a liquid supply hole that supplies liquid to the sealed space, and
In the sealed space, an inner peripheral elastic body formed by a continuous foam sponge that absorbs the liquid supplied to the sealed space and flows the liquid to the surface of the plate-like object is disposed. A peripheral elastic body is attached to the mounting base,
A clearance for opening the negative pressure suction hole is provided in an outermost peripheral portion of the sealed space, and the inner peripheral elastic body is disposed in all the portions of the sealed space except the clearance. Adsorption pad of plate-like material. The plate-like suction pad according to claim 1, wherein a liquid supply hole is opened so that the liquid flows into the inner peripheral elastic body. 3. The structure according to claim 1, wherein the mounting surface of the inner peripheral side elastic body and the outer peripheral side elastic body on the mounting base material is arranged in parallel with the surface of the plate-like object. The suction pad of the plate-shaped object of description. The suction pad for a plate-like object according to claim 3 , wherein the outer peripheral elastic body is configured to be elastically deformed in a direction perpendicular to a mounting surface to the mounting base. The said pad-shaped object is a glass substrate for flat panel displays, Comprising: The said liquid is water, The adsorption pad of the plate-shaped object in any one of Claims 1-4 characterized by the above-mentioned.

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