JP5017983B2 - Suction pad for plate - Google Patents

Suction pad for plate Download PDF

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JP5017983B2
JP5017983B2 JP2006256278A JP2006256278A JP5017983B2 JP 5017983 B2 JP5017983 B2 JP 5017983B2 JP 2006256278 A JP2006256278 A JP 2006256278A JP 2006256278 A JP2006256278 A JP 2006256278A JP 5017983 B2 JP5017983 B2 JP 5017983B2
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plate
peripheral
elastic
negative pressure
liquid
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JP2008074565A (en
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直樹 西村
弘和 奥村
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日本電気硝子株式会社
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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    • Y02P20/52Improvements relating to the production of bulk chemicals using catalysts, e.g. selective catalysts

Description

本発明は、板状物の吸着方法及び吸着パッドに係り、詳しくは、取付基材に装着されたシール部材が板状物の表面に当接した状態でそのシール部材の内周側に形成される密閉空間に負圧を作用させて板状物を吸着保持する吸着方法及び吸着パッドに関する。   The present invention relates to a suction method and a suction pad for a plate-like object, and more specifically, is formed on the inner peripheral side of the seal member in a state where the seal member mounted on the mounting base material is in contact with the surface of the plate-like object. The present invention relates to a suction method and a suction pad for sucking and holding a plate-like object by applying a negative pressure to the sealed space.
周知のように、液晶ディスプレイ(LCD)やプラズマディスプレイ(PDP)等のフラットパネルディスプレイ用のガラス基板に代表される板状物は、搬送途中での移載時や研磨工程での方向転換時等に、自動化の推進の流れから、吸着パッドにより吸着保持された状態で位置や角度の変更が行われるに至っている。   As is well known, a plate-like material represented by a glass substrate for a flat panel display such as a liquid crystal display (LCD) or a plasma display (PDP) is used for transfer during transfer or direction change in a polishing process. Furthermore, from the flow of automation, the position and angle are changed while being sucked and held by the suction pad.
この種の吸着パッドとしては、板状物の表面に、弾性変形可能なスカート部(シール部材)の先端を押し当て、スカート部と板状物との密着によって囲まれた密閉空間内の空気を、負圧吸引手段(真空ポンプ等)で吸引し、この密閉空間を負圧にして板状物を吸着保持する構成が一般的とされている。   As this type of suction pad, the tip of the elastically deformable skirt (seal member) is pressed against the surface of the plate-like object, and the air in the sealed space surrounded by the close contact between the skirt and the plate-like object is used. In general, a structure is used in which suction is performed by a negative pressure suction means (vacuum pump or the like), and the sealed space is suctioned and held in a negative pressure.
しかしながら、このような吸着方法では、密閉空間を負圧にする際にスカート部が板状物の表面に押し当てられた状態で拡径しながら摩擦を伴って摺動するため、板状物の表面に擦れ傷が付くという品位面での致命的な問題が生じる。しかも、この種の従来の手法では、板状物が乾燥状態にあることから、上記の密閉空間を負圧吸引した場合には、板状物の表面に付着していた埃や汚れ等の異物がこびり付いて、その異物を剥離させることが困難になるという問題をも有している。   However, in such an adsorption method, when the sealed space is set to a negative pressure, the skirt portion slides with friction while expanding the diameter while pressed against the surface of the plate-like object. A fatal problem in terms of quality occurs that the surface is scratched. Moreover, in this type of conventional method, since the plate-like object is in a dry state, when the above-mentioned sealed space is sucked with negative pressure, foreign matter such as dust and dirt adhering to the surface of the plate-like object is obtained. There is also a problem that it becomes difficult to peel off the foreign matters.
そこで、下記の特許文献1によれば、板状物(ガラス板)の表面と吸着パッドのスカート部との間の空間に洗浄液(イオン水)を閉じ込め、このような状態でその空間を負圧にして板状物を吸着保持する手法が開示されている。詳述すると、ガラス板の表面に吸着パッドのスカート部を下降させて接近させた状態で開閉弁を開いてスカート部の内部にイオン水を供給し、このような状態でガラス板の表面にスカート部を押し付けてその弾性変形により拡径させた後に押し付け動作を停止させると共に、開閉弁を閉じてイオン水の供給を停止させる。これにより、スカート部はガラス板の表面に密着し、その後に吸着パッドを上昇させることにより、スカート部が弾性復元して収縮すると共に、これに伴ってスカート部とガラス板の表面との間が負圧状態となることにより、ガラス板が吸着パッドにより吸着保持される構成である。   Therefore, according to the following Patent Document 1, the cleaning liquid (ion water) is confined in the space between the surface of the plate-like object (glass plate) and the skirt portion of the suction pad, and in this state, the space is negatively pressurized. Thus, a technique for adsorbing and holding a plate-like object is disclosed. More specifically, the on / off valve is opened with the skirt portion of the suction pad lowered and brought close to the surface of the glass plate, and ion water is supplied to the inside of the skirt portion. The pressing operation is stopped after the portion is pressed and expanded in diameter by its elastic deformation, and the supply of ionic water is stopped by closing the on-off valve. As a result, the skirt part is brought into close contact with the surface of the glass plate, and then the suction pad is raised, whereby the skirt part is elastically restored and contracted, and accordingly, there is a gap between the skirt part and the surface of the glass plate. By being in a negative pressure state, the glass plate is sucked and held by the suction pad.
一方、下記の特許文献2によれば、ガラス板を載置する載置面に溝を設け、その溝内に載置面乾燥防止用の液体供給孔を開口させると共に、載置面に負圧発生用の吸引孔を開口させてなる保持定盤が開示されている。この保持定盤は、水供給源から送られた水を液体供給孔から流出させて溝内を流し、載置面の表面側に水を供給すると共に、吸引孔を通じて負圧吸引を行うことによりガラス板を載置面に吸着保持させる構成とされている。   On the other hand, according to Patent Document 2 below, a groove is provided on the mounting surface on which the glass plate is mounted, a liquid supply hole for preventing the mounting surface from drying is opened in the groove, and a negative pressure is applied to the mounting surface. A holding surface plate having a suction hole for generation is disclosed. This holding surface plate allows water sent from the water supply source to flow out of the liquid supply hole, flow in the groove, supply water to the surface side of the mounting surface, and perform negative pressure suction through the suction hole. The glass plate is sucked and held on the mounting surface.
特開2002−103265号公報JP 2002-103265 A 特開2002−144180号公報JP 2002-144180 A
ところで、上記の特許文献1に開示の吸着パッドによれば、イオン水は、ガラス板の表面上を流動するか或いはスカート部とガラス板とに囲まれた空間に止まるかの何れかの状態にあることから、スカート部とガラス板との摩擦緩和や、ガラス板表面への埃や汚れのこびり付き抑制等に関して、一応の利点を享受できる。しかしながら、このような吸着手法では、開閉弁を開いてスカート部をガラス板に押し付けた後に開閉弁を閉じてスカート部をガラス板から引き離そうとする場合に生じる負圧のみによって、ガラス板を吸着保持するものであり、且つその負圧はイオン水を介在させた状態で発生するものであるため、負圧による吸着力が不足するという問題が生じる。そのため、近年におけるフラットパネルディスプレイ用(例えばLCD用やPDP用等)のガラス基板のように大型化が推進されていると、この種のガラス板が脱落或いは落下する等のように、吸着力不足の問題が深刻となる。   By the way, according to the adsorption pad disclosed in the above-mentioned Patent Document 1, the ionic water flows on the surface of the glass plate or remains in a space surrounded by the skirt portion and the glass plate. For this reason, it is possible to enjoy some advantages in terms of reducing friction between the skirt portion and the glass plate and suppressing dust and dirt from sticking to the surface of the glass plate. However, in such an adsorption method, the glass plate is adsorbed and held only by the negative pressure generated when the on-off valve is opened and the skirt portion is pressed against the glass plate and then the on-off valve is closed and the skirt portion is separated from the glass plate. In addition, since the negative pressure is generated with ionic water interposed, there arises a problem that the adsorptive power due to the negative pressure is insufficient. For this reason, when the increase in the size of glass substrates for flat panel displays (for example, for LCDs and PDPs) has been promoted in recent years, this kind of glass plate has fallen or dropped, and so on. The problem becomes serious.
一方、上記の特許文献2に開示の保持定盤は、液体供給孔から流出した水が先ず溝内を流れ、その後にガラス板と載置面との間に侵入することになるが、ガラス板は負圧によって載置面に密に接触し得るものである。すなわち、ガラス板に負圧吸引力を生じさせる吸引孔の開口部の周辺では、負圧吸引力を充分に高めたならば、ガラス板と載置面との間に液体を常時流し込むための充分な隙間或いは空間が存在しなくなる。そのため、ガラス板に対する負圧による吸着保持部では、ガラス板の載置面への接触面に対して実質的に水が供給されず或いは水により充分に濡れた状態とはならずに乾燥し、ガラス板表面への摩擦に起因する擦れ傷の発生を確実に抑制できないばかりでなく、ガラス板表面への埃や汚れのこびり付きの発生に関しても適切に回避できないという問題が生じる。   On the other hand, in the holding surface plate disclosed in Patent Document 2, the water that flows out from the liquid supply hole first flows in the groove and then enters between the glass plate and the mounting surface. Can be brought into close contact with the mounting surface by negative pressure. That is, in the vicinity of the opening of the suction hole that generates a negative pressure suction force on the glass plate, if the negative pressure suction force is sufficiently increased, it is sufficient for the liquid to always flow between the glass plate and the mounting surface. No gaps or spaces exist. Therefore, in the suction holding part due to the negative pressure on the glass plate, water is not substantially supplied to the contact surface to the mounting surface of the glass plate or is not sufficiently wetted with water and dried. In addition to not being able to reliably suppress the occurrence of scratches due to friction on the glass plate surface, there also arises a problem that the occurrence of dust and dirt sticking to the glass plate surface cannot be properly avoided.
したがって、上記の特許文献1及び2の何れに開示の技術も、ガラス板に対する負圧吸着力を充分に高める事と、ガラス板表面の乾燥を防止する事とに対して、適切に両立し得る良策ではないと言わざるを得ない。   Therefore, the techniques disclosed in both of Patent Documents 1 and 2 described above can be appropriately compatible with sufficiently increasing the negative pressure adsorption force on the glass plate and preventing drying of the glass plate surface. I have to say that this is not a good policy.
尚、以上のような問題は、ガラス板に限らず、金属板やセラミック板等の他の板状物についても同様にして生じ得る。   In addition, the above problems may occur in the same manner not only for glass plates but also for other plate-like objects such as metal plates and ceramic plates.
本発明は、上記事情に鑑み、板状物に対する負圧吸着力を充分に高めた上で、板状物の負圧による吸着保持部における表面の擦れ傷の発生或いは埃や汚れのこびり付きの発生を適切に抑制することを技術的課題とする。   In view of the above circumstances, the present invention sufficiently increases the negative pressure adsorption force for a plate-like object, and causes the generation of scratches on the surface of the adsorption holding part due to the negative pressure of the plate-like object or the occurrence of dust or dirt. It is a technical issue to appropriately suppress the above.
上記技術的課題を解決するために創案された本発明は、取付基材に装着されたシール部材の先端が板状物の表面に当接した状態で、該シール部材の内周側全域に形成される密閉空間に負圧を作用させることにより、前記板状物を吸着保持するように構成した吸着パッドであって、前記シール部材は、単泡スポンジで形成されて前記板状物への当接部が吸液性を有する外周側弾性体であり、前記取付基材に、前記密閉空間に対して負圧吸引を行う負圧吸引孔と、前記密閉空間に対して液体を供給する液体供給孔とを形成すると共に、前記密閉空間内に、該密閉空間に供給される液体を吸液し且つ該液体を前記板状物の表面に流出させる連泡スポンジで形成された内周側弾性体を配置して、該内周側弾性体を前記取付基材に装着し、前記密閉空間の最外周部位に前記負圧吸引孔が開口する間隙が設けられ且つ該密閉空間の前記間隙を除く全部位に前記内周側弾性体が配置されていることに特徴づけられる。ここで、「吸液性」とは、液体を吸う性質を意味し、また液体が水である場合は、吸水性(保水性と同義)を意味する(以下、同様)。さらに、「吸液」とは、液体を吸うことを意味し、また液体が水である場合は、吸水(保水と同義)を意味する(以下、同様)。 This onset Ming was invented in order to solve the above technical problem, in a state in which the leading end of the sealing member mounted to the mounting base is in contact with the surface of the platelet, the inner peripheral side whole area of the sealing member A suction pad configured to suck and hold the plate-like object by applying a negative pressure to the sealed space to be formed, wherein the seal member is formed of a single foam sponge and is attached to the plate-like object. A contact portion is an outer peripheral elastic body having liquid absorbency, a negative pressure suction hole for sucking negative pressure into the sealed space, and a liquid for supplying liquid to the sealed space An inner periphery-side elasticity formed of a continuous foam sponge that forms a supply hole and absorbs the liquid supplied to the sealed space and allows the liquid to flow to the surface of the plate-like object. A body is mounted, the inner peripheral elastic body is mounted on the mounting base, and the sealed space The negative pressure suction holes in the outermost peripheral portion is marked in particular wherein the inner peripheral side elastic member to all positions except the gap and the sealed space is provided a gap which is open is located. Here, “liquid absorbency” means the property of absorbing liquid, and when the liquid is water, it means water absorption (synonymous with water retention) (hereinafter the same). Furthermore, “liquid absorption” means sucking a liquid, and when the liquid is water, it means water absorption (synonymous with water retention) (hereinafter the same).
このような構成によれば、取付基材に装着されたシール部材すなわち単泡スポンジで形成された外周側弾性体の内周側全域に密閉空間が形成され、この密閉空間が板状物に対する負圧による吸着保持部に該当すると共に、シール部材の存在により密閉空間の大きさを充分な負圧を発生させるに足るものとした上で、この密閉空間に対して負圧吸引を行いながら液体を供給することになる。なお、単泡スポンジは、多孔が非連通状態にある発泡弾性体であり、シール部材としての役割を確実に果たすことができる。したがって、密閉空間に接している板状物の負圧吸着保持部である表面部分には、高い負圧吸着力が発生すると同時に充分な量の液体が供給されて確実に濡れた状態を維持できることになる。これにより、板状物を吸着保持している際の当該板状物の落下等が適切に防止されると共に、負圧吸着保持部であっても板状物表面の擦れ傷の発生或いは埃や汚れのこびり付きの発生を適切に抑制することが可能となり、板状物表面の広い領域に亘って品位向上を図り得ることになる。しかも、シール部材である単泡スポンジからなる外周側弾性体は、板状物への当接部が吸液性を有しているため、このシール部材はその内周側を密閉空間とする気密性を有しているにも拘らず、当該シール部材の板状物への当接部は吸液性を有しているが故に常に湿潤な状態にある。したがって、この当接部が接している板状物の表面部分も常に濡れた状態に維持されることになる。また、密閉空間に配置された内周側弾性体は、連泡スポンジで形成されており、この連泡スポンジは、多孔が連通状態にある発泡弾性体であるため、全体に吸液性を持たせることができる。そして、この内周側弾性体は、密閉空間に供給される液体を吸液し且つ該液体を前記板状物の表面に流出させるものである。これにより、吸着パッドの密閉空間と接している表面を含めて板状物の表面全域を常に濡れた状態に維持することが可能となると共に、例えば極めて薄い板状物であっても、板状物の表面に作用する負圧を内周側弾性体の弾性力で適度に受けることができ、高い負圧吸引力による不当な窪み変形が抑制される。これに加えて、内周側弾性体により吸液した液体が、当該弾性体から板状物の表面に流出することになるため、板状物の表面を常に濡れた状態に維持して、乾燥に起因する異物の析出等を回避することが可能となる。なお、上記の負圧吸引は、連続して行うことが好ましく、且つこれと同時に液体の供給も連続して行うことが好ましい。 According to such a configuration , a sealed space is formed in the entire inner peripheral side of the outer peripheral elastic body formed of a sealing member, that is, a single foam sponge attached to the mounting base material, and this sealed space is negative for the plate-like object. It corresponds to the suction holding part by pressure, and the size of the sealed space is sufficient to generate a sufficient negative pressure due to the presence of the seal member. Will be supplied. Note that the single foam sponge is a foamed elastic body in which the pores are in a non-communication state, and can reliably serve as a sealing member. Therefore, a high negative pressure adsorption force is generated on the surface portion which is a negative pressure adsorption holding portion of the plate-like object in contact with the sealed space, and at the same time, a sufficient amount of liquid is supplied and the wet state can be reliably maintained. become. As a result, the plate-like object is appropriately prevented from falling when the plate-like object is being held by suction, and the surface of the plate-like object may be rubbed or dust or Occurrence of dirt sticking can be appropriately suppressed, and the quality can be improved over a wide area on the surface of the plate-like object. In addition, the outer peripheral elastic body made of a single foam sponge as a seal member has a liquid-absorbing property at the contact portion with the plate-like object. In spite of having the property, the contact portion of the seal member with the plate-like object is always in a wet state because it has the liquid-absorbing property. Therefore, ing to be maintained in the surface portion is also always wet of the platelet to the abutment portion is in contact. Further, the inner peripheral elastic body arranged in the sealed space is formed of a continuous foam sponge, and this continuous foam sponge is a foamed elastic body in which the pores are in a continuous state. Can be made. The inner peripheral elastic body absorbs the liquid supplied to the sealed space and causes the liquid to flow out to the surface of the plate-like object. Thereby, it becomes possible to maintain always wet the entire surface of the platelet including a surface in contact with the enclosed space of the suction pad, for example, even a very thin plate material, plate-shaped Negative pressure acting on the surface of the object can be moderately received by the elastic force of the inner peripheral elastic body, and inappropriate depression deformation due to high negative pressure suction force is suppressed. In addition to this, the liquid absorbed by the inner circumferential elastic body flows out from the elastic body to the surface of the plate-like object, so that the surface of the plate-like object is always kept wet and dried. It is possible to avoid the precipitation of foreign matters caused by the above. The negative pressure suction is preferably performed continuously, and at the same time, liquid supply is preferably performed continuously.
この吸着パッドは、前記外周側弾性体と内周側弾性体との内外面間に隙間が形成されると共に、該隙間に負圧吸引孔が開口している構造とされている。この事は、前記密閉空間の最外周部位に前記負圧吸引孔が開口する間隙が設けられていることを意味する。 The suction pad has a structure in which a gap is formed between the inner and outer surfaces of the outer peripheral side elastic body and the inner peripheral side elastic body, and a negative pressure suction hole is opened in the gap . This means that a gap for opening the negative pressure suction hole is provided at the outermost peripheral portion of the sealed space.
このようにすれば、外周側弾性体の内周側の密閉空間に対して及びその空間内の内周側弾性体に対して、適切に負圧を作用させることができ、またレイアウト面でも有利となる。   In this way, it is possible to appropriately apply a negative pressure to the sealed space on the inner peripheral side of the outer peripheral side elastic body and to the inner peripheral side elastic body in the space, and it is also advantageous in terms of layout. It becomes.
更に、前記内周側弾性体に液体が流入するように液体供給孔が開口している構造とすることができる。   Furthermore, it can be set as the structure where the liquid supply hole has opened so that a liquid may flow in into the said inner peripheral side elastic body.
このようにすれば、内周側弾性体には液体が供給されて常時滲み込んだ状態となり、板状物の表面は常に濡れた状態に維持されると共に、このような状態を維持して密閉空間に負圧吸引が行われるため、板状物の表面は確実に且つ均一に濡れた状態で吸着パッドにより負圧吸引されることになる。   By doing so, the liquid is supplied to the inner peripheral elastic body so that it is constantly infiltrated, and the surface of the plate-like object is always kept wet, and such a state is maintained and sealed. Since negative pressure suction is performed in the space, the surface of the plate-like object is sucked with negative pressure by the suction pad in a surely and uniformly wet state.
また、前記内周側弾性体及び外周側弾性体の取付基材への装着面が板状物の表面と平行な状態に配置されるように構成することができる。   Moreover, it can comprise so that the mounting surface to the attachment base material of the said inner peripheral side elastic body and outer peripheral side elastic body may be arrange | positioned in the state parallel to the surface of a plate-shaped object.
このようにすれば、内周側弾性体を外周側弾性体で取り囲ませるための構造が簡単になると共に、この両者を板状物の表面に接触させるための作業も簡素化される。   This simplifies the structure for surrounding the inner circumferential elastic body with the outer circumferential elastic body, and simplifies the work for bringing both into contact with the surface of the plate-like object.
そして、このような構成の下で、前記外周側弾性体が取付基材への装着面と垂直な方向に弾性変形するように構成することができる。   And under such a structure, it can comprise so that the said outer peripheral side elastic body may elastically deform in the direction perpendicular | vertical to the mounting surface to an attachment base material.
このようにすれば、密閉空間に対して負圧吸引を行った場合には、外周側弾性体(シール部材)が板状物の表面と垂直な方向に圧縮変形し、この変形に伴う板状物の表面との摩擦が生じなくなるため、擦れ傷の発生を防止する上で、より一層有利となる。   In this way, when negative pressure suction is performed on the sealed space, the outer peripheral elastic body (seal member) is compressed and deformed in a direction perpendicular to the surface of the plate-like object, and the plate-like shape accompanying this deformation. Since friction with the surface of the object is not generated, it is further advantageous in preventing the occurrence of scratches.
以上の構成を備えた吸着パッドは、板状物がフラットパネルディスプレイ用のガラス基板である場合に好適であり、またそのような場合には、前記液体が水であることが好都合である。   The suction pad having the above configuration is suitable when the plate-like object is a glass substrate for a flat panel display, and in such a case, it is advantageous that the liquid is water.
以上のように本発明に係る板状物の吸着方法及び吸着パッドによれば、取付基材に装着されたシール部材の存在によりその内周側に形成される密閉空間の大きさを充分な負圧を発生させるに足るものとした上で、この密閉空間に対して負圧吸引を行いながら液体を供給することになる。したがって、密閉空間に接している板状物の負圧吸着保持部である表面部分には、高い負圧吸着力が発生すると同時に充分な量の液体が供給されて確実に濡れた状態を維持できることになる。これにより、板状物を吸着保持している際の当該板状物の落下等が適切に防止されると共に、負圧吸着保持部であっても板状物表面の擦れ傷の発生或いは埃や汚れのこびり付きの発生を適切に抑制することが可能となり、板状物表面の広い領域に亘って品位向上を図り得ることになる。しかも、シール部材は、単泡スポンジで形成されて板状物への当接部が吸液性を有する外周側弾性体であるため、その内周側を密閉空間とする気密性を有しているにも拘らず、当該シール部材の板状物への当接部は吸液性を有しているが故に常に湿潤な状態にある。したがって、この当接部が接している板状物の表面部分も常に濡れた状態に維持されることになり、密閉空間と接している表面を含めて板状物の表面全域を常に濡れた状態に維持することが可能となる。更に、密閉空間に配置された内周側弾性体は、連泡スポンジで形成され、密閉空間に供給される液体を吸液し且つ該液体を前記板状物の表面に流出させるものであるため、例えば極めて薄い板状物であっても、板状物の表面に作用する負圧を内周側弾性体の弾性力で適度に受けることができ、高い負圧吸引力による不当な窪み変形が抑制される。これに加えて、内周側弾性体により吸液した液体が、当該弾性体から板状物の表面に流出することになるため、板状物の表面を常に濡れた状態に維持して、乾燥に起因する異物の析出等を回避することが可能となる。 As described above, according to the suction method and suction pad for a plate-like object according to the present invention, the size of the sealed space formed on the inner peripheral side due to the presence of the seal member mounted on the mounting base material is sufficiently negative. The liquid is supplied while suctioning a negative pressure into the sealed space, as long as it is sufficient to generate pressure. Therefore, a high negative pressure adsorption force is generated on the surface portion which is a negative pressure adsorption holding portion of the plate-like object in contact with the sealed space, and at the same time, a sufficient amount of liquid is supplied and the wet state can be reliably maintained. become. As a result, the plate-like object is appropriately prevented from falling when the plate-like object is being held by suction, and the surface of the plate-like object may be rubbed or dust or Occurrence of dirt sticking can be appropriately suppressed, and the quality can be improved over a wide area on the surface of the plate-like object. Moreover, since the sealing member is an outer peripheral elastic body that is formed of a single foam sponge and has a liquid-absorbing portion in contact with the plate-like object, the sealing member has airtightness with the inner peripheral side as a sealed space. Nevertheless, the contact portion of the seal member with the plate-like object is always wet because it has liquid absorption. Therefore, the surface portion of the plate-like object that is in contact with the contact portion is always maintained in a wet state, and the entire surface of the plate-like object is always wet, including the surface that is in contact with the sealed space. Can be maintained. Furthermore, the inner peripheral elastic body arranged in the sealed space is formed of a continuous foam sponge, absorbs the liquid supplied to the sealed space, and causes the liquid to flow out to the surface of the plate-like object. For example, even if it is a very thin plate-like object, the negative pressure acting on the surface of the plate-like object can be appropriately received by the elastic force of the inner peripheral side elastic body, and unreasonable depression deformation due to the high negative pressure suction force It is suppressed. In addition to this, the liquid absorbed by the inner circumferential elastic body flows out from the elastic body to the surface of the plate-like object, so that the surface of the plate-like object is always kept wet and dried. It is possible to avoid the precipitation of foreign matters caused by the above.
以下、本発明の実施形態を添付図面を参照して説明する。   Embodiments of the present invention will be described below with reference to the accompanying drawings.
図1は、本発明の実施形態に係る板状物の吸着パッド1の外観斜視形態を例示するものである。なお、本実施形態では、板状物として液晶ディスプレイ用のガラス基板が採用される。また、使用例としては、そのガラス基板の4辺の研磨工程で、2辺(例えば長辺である2辺)の研磨を終えた後に、残りの2辺を研磨すべく、ガラス基板の例えば四隅部をそれぞれ吸着パッド1で吸着保持して、90度方向変換する場合等に使用される。   FIG. 1 illustrates an external perspective view of a plate-like suction pad 1 according to an embodiment of the present invention. In the present embodiment, a glass substrate for a liquid crystal display is employed as the plate-like object. In addition, as an example of use, after polishing two sides (for example, two long sides) in the four-side polishing process of the glass substrate, for example, four corners of the glass substrate to polish the remaining two sides. This is used when each part is sucked and held by the suction pad 1 and changed in direction by 90 degrees.
同図に示すように、この吸着パッド1は、円板状をなす取付基材2の表面に、これと最大径が略同径の円環状または円筒状のシール部材(外周側弾性体)3と、この外周側弾性体3の内周側に所定の隙間を介在させて同心状に配置された内周側弾性体4とが装着(固着)されている。そして、この取付基材2の裏面側には、液体(水)の供給及び気体(空気)の吸引を行うために利用される蓋体5が固着一体化されている。   As shown in the figure, the suction pad 1 is formed on the surface of a mounting base 2 having a disc shape, and an annular or cylindrical sealing member (outer peripheral elastic body) 3 having a maximum diameter substantially the same. And the inner peripheral side elastic body 4 arranged concentrically with a predetermined gap interposed on the inner peripheral side of the outer peripheral side elastic body 3 is attached (fixed). A lid 5 used for supplying liquid (water) and sucking gas (air) is fixed and integrated on the back surface side of the mounting base 2.
外周側弾性体3は、多数孔が非連通状態とされて水及び空気を通さない単泡スポンジで形成され、外表面(少なくとも先端面3a)のみが吸水性(保水性)を有している。これに対して、内周側弾性体4は、多数孔が連通状態とされて水及び空気を通す連泡スポンジで形成され、その全体が吸水性(保水性)を有し、本実施形態では、厚み方向に貫通する複数の貫通孔4xが形成されている。   The outer peripheral side elastic body 3 is formed of a single-foam sponge in which a large number of holes are not communicated and does not allow water and air to pass therethrough, and only the outer surface (at least the front end surface 3a) has water absorption (water retention). . On the other hand, the inner peripheral side elastic body 4 is formed of a continuous foam sponge in which a large number of holes are in communication with each other and allows water and air to pass therethrough, and the whole has water absorption (water retention). A plurality of through holes 4x penetrating in the thickness direction are formed.
詳述すると、図2(a)、(b)に示すように、取付基材2の中央部には、内周側弾性体4に水が流入するように先端が開口する複数の液体供給孔6が形成されると共に、その外周部を取り囲むように、外周側弾性体3と内周側弾性体4との内外面間の隙間に先端が開口する複数の負圧吸引孔7が形成されている。そして、外周側弾性体3の先端面3aと内周側弾性体4の先端面4aとは同一面上(または略同一面上)に位置しており、外周側弾性体3の先端面3aがガラス基板Gの表面に密接することにより、外周側弾性体3の内周側が密閉空間S(内周側弾性体4の配設箇所を含む)となる。従って、密閉空間Sの最外周部位に、負圧吸引孔7が開口する間隙が設けられ、密閉空間Sの上記間隙を除く全部位に内周側弾性体4が配置された構造になっている。 More specifically, as shown in FIGS. 2A and 2B, a plurality of liquid supply holes whose front ends are open so that water flows into the inner peripheral elastic body 4 at the center of the mounting base 2. 6 is formed, and a plurality of negative pressure suction holes 7 whose ends are opened in the gap between the inner and outer surfaces of the outer peripheral side elastic body 3 and the inner peripheral side elastic body 4 are formed so as to surround the outer peripheral portion thereof. Yes. And the front end surface 3a of the outer peripheral side elastic body 3 and the front end surface 4a of the inner peripheral side elastic body 4 are located on the same surface (or substantially on the same surface), and the front end surface 3a of the outer peripheral side elastic body 3 is By being in close contact with the surface of the glass substrate G, the inner peripheral side of the outer peripheral elastic body 3 becomes a sealed space S (including the location of the inner peripheral elastic body 4). Therefore, a gap in which the negative pressure suction hole 7 is opened is provided in the outermost peripheral part of the sealed space S, and the inner peripheral elastic body 4 is arranged in all parts of the sealed space S except for the gap. .
更に、この吸着パッド1によりガラス基板Gが吸着保持された状態の下では、外周側弾性体3及び内周側弾性体4の取付基材2への装着面は、ガラス基板Gの表面と平行な状態となる。したがって、外周側弾性体3及び内周側弾性体4は、取付基材2への装着面と垂直な方向に弾性変形するように構成されている。   Further, when the glass substrate G is sucked and held by the suction pad 1, the mounting surfaces of the outer peripheral side elastic body 3 and the inner peripheral side elastic body 4 on the mounting base 2 are parallel to the surface of the glass substrate G. It becomes a state. Therefore, the outer peripheral side elastic body 3 and the inner peripheral side elastic body 4 are configured to be elastically deformed in a direction perpendicular to the mounting surface to the mounting base 2.
なお、取付基材2に固着されている蓋体5の上部には、液体の供給元となる液体用パイプ8が取り付けられており、この液体用パイプ8から液体供給経路8aを通じて取付基材2の各液体供給孔6に水が供給されるようになっている。また、この蓋体5の上部には、負圧の吸引元となる負圧用パイプ9が取り付けられており、この負圧用パイプ9から負圧吸引経路9aを通じて各負圧吸引孔7に負圧が発生するようになっている。   A liquid pipe 8 serving as a liquid supply source is attached to an upper portion of the lid 5 fixed to the attachment base material 2, and the attachment base material 2 is connected from the liquid pipe 8 through the liquid supply path 8 a. Water is supplied to each liquid supply hole 6. Further, a negative pressure pipe 9 serving as a negative pressure suction source is attached to the upper portion of the lid 5, and negative pressure is applied to each negative pressure suction hole 7 from the negative pressure pipe 9 through the negative pressure suction path 9 a. It is supposed to occur.
以上のような構成を備えた吸着パッド1によれば、以下のようにしてガラス基板Gが適切に吸着保持される。   According to the suction pad 1 having the above configuration, the glass substrate G is appropriately sucked and held as follows.
先ず、吸着パッド1の内周側弾性体4及び外周側弾性体3の両者の先端面4a、3aとガラス基板Gの表面との間に隙間が存在している状態で、多量の水を取付基材2の各液体供給孔6から内周側弾性体4を通じてガラス基板Gの全表面に供給し、湿潤な状態に維持しておく。このような状態とした上で、吸着パッド1の外周側弾性体3をガラス基板Gの表面に押し付けて密接させることにより、外周側弾性体3の内周側を密閉空間Sにすると共に、多量の水は依然として密閉空間S内に流し続けながら、吸着パッド1の負圧吸引孔7を通じて密閉空間S内の負圧吸引を行う。   First, a large amount of water is attached in a state where a gap exists between the front end surfaces 4a and 3a of both the inner peripheral side elastic body 4 and the outer peripheral side elastic body 3 of the suction pad 1 and the surface of the glass substrate G. The liquid is supplied from the liquid supply holes 6 of the substrate 2 to the entire surface of the glass substrate G through the inner peripheral elastic body 4 and is kept in a wet state. In such a state, the outer peripheral side elastic body 3 of the suction pad 1 is pressed and brought into close contact with the surface of the glass substrate G, thereby making the inner peripheral side of the outer peripheral side elastic body 3 a sealed space S and a large amount. The water in the sealed space S is sucked through the negative pressure suction hole 7 of the suction pad 1 while continuing to flow in the sealed space S.
これにより、密閉空間Sに接しているガラス基板Gの表面には、積極的に且つ連続して行われる負圧吸引により高い負圧吸着力が発生すると同時に、充分な量の水が内周側弾性体4を通じて供給されるため、このガラス基板Gの表面は確実に濡れた状態を維持できることになる。したがって、ガラス基板Gを吸着保持している際の負圧不足が解消して、ガラス基板Gの脱落或いは落下等が適切に防止されると共に、ガラス基板Gの表面は、負圧吸引前の濡れた状態を含めて広い表面に亘って湿潤な状態に維持され、擦れ傷の発生或いは埃や汚れのこびり付きの発生が好適に抑制される。   As a result, a high negative pressure adsorption force is generated on the surface of the glass substrate G in contact with the sealed space S by the negative pressure suction performed positively and continuously, and at the same time, a sufficient amount of water is on the inner peripheral side. Since it is supplied through the elastic body 4, the surface of the glass substrate G can be reliably maintained in a wet state. Accordingly, the shortage of negative pressure when the glass substrate G is held by suction is solved, and the glass substrate G is prevented from dropping or dropping, and the surface of the glass substrate G is wetted before the negative pressure is sucked. The wet state is maintained over a wide surface including the wet state, and the generation of scratches or the occurrence of dust or dirt is suitably suppressed.
更に、外周側弾性体3の先端面3aつまりガラス基板Gへの当接部が吸水性(保水性)を有しているため、この先端面3aが接しているガラス基板Gの表面部分も常に濡れた状態に維持されることになり、ガラス基板Gのその他の表面を含めて全領域を適切に湿潤な状態に維持することが可能となる。   Furthermore, since the front end surface 3a of the outer peripheral side elastic body 3, that is, the contact portion with the glass substrate G has water absorption (water retention), the surface portion of the glass substrate G with which the front end surface 3a is in contact is also always present. The wet state is maintained, and the entire region including the other surface of the glass substrate G can be appropriately maintained in a wet state.
しかも、内周側弾性体4は、密閉空間S内に位置するように取付基材2に装着されているため、液晶ディスプレイ用のガラス基板Gのように極めて薄い板状物であっても、ガラス基板Gの表面に作用する負圧を内周側弾性体4の弾性力で適度に受けることができ、高い負圧吸引力による不当なガラス基板Gの窪み変形が抑制される。   Moreover, since the inner circumferential elastic body 4 is mounted on the mounting base 2 so as to be located in the sealed space S, even if it is a very thin plate-like object such as a glass substrate G for a liquid crystal display, A negative pressure acting on the surface of the glass substrate G can be moderately received by the elastic force of the inner peripheral elastic body 4, and inappropriate depression of the glass substrate G due to a high negative pressure suction force is suppressed.
加えて、内周側弾性体4及び外周側弾性体3の取付基材2への装着面が、ガラス基板Gの表面と平行な状態に配置されるため、内周側弾性体4を外周側弾性体3で取り囲ませるための構造が簡単になると共に、この両弾性体3、4をガラス基板Gの表面に密接させるための作業も簡素化される。   In addition, since the mounting surfaces of the inner peripheral side elastic body 4 and the outer peripheral side elastic body 3 to the mounting base 2 are arranged in parallel with the surface of the glass substrate G, the inner peripheral side elastic body 4 is placed on the outer peripheral side. The structure for surrounding with the elastic body 3 is simplified, and the work for bringing both the elastic bodies 3 and 4 into close contact with the surface of the glass substrate G is also simplified.
更に、外周側弾性体3が取付基材2への装着面と垂直な方向に弾性変形するように構成されているので、負圧吸引を行った場合に、外周側弾性体3がガラス基板Gの表面と垂直な方向に圧縮変形し、この変形に伴うガラス基板Gの表面との摩擦が生じなくなり、擦れ傷の発生がより一層的確に回避される。   Furthermore, since the outer peripheral side elastic body 3 is configured to be elastically deformed in a direction perpendicular to the mounting surface to the mounting base material 2, the outer peripheral side elastic body 3 is not attached to the glass substrate G when negative pressure suction is performed. The surface of the glass substrate G is compressed and deformed in the direction perpendicular to the surface of the glass substrate, and the friction with the surface of the glass substrate G due to this deformation does not occur, and the generation of scratches can be avoided more accurately.
なお、この実施形態では、板状物が液晶ディスプレイ用のガラス基板である場合に本発明を適用したが、これ以外のフラットパネルディスプレイ用のガラス基板、或いは金属板やセラミック基板等からなる他の板状物についても同様にして本発明を適用することが可能である。   In this embodiment, the present invention is applied when the plate-like object is a glass substrate for a liquid crystal display. However, other glass substrates for flat panel displays, other metal plates, ceramic substrates, and the like are used. The present invention can be similarly applied to a plate-like object.
本発明の実施形態に係る板状物の吸着パッドを示す要部斜視図である。It is a principal part perspective view which shows the suction pad of the plate-shaped object which concerns on embodiment of this invention. 図2(a)は、上記吸着パッドの縦断正面図、図2(b)は、上記吸着パッドの平面図である。FIG. 2A is a longitudinal front view of the suction pad, and FIG. 2B is a plan view of the suction pad.
符号の説明Explanation of symbols
1 吸着パッド
2 取付基材
3 外周側弾性体(シール部材)
3a 外周側弾性体の先端面(当接部)
4 内周側弾性体
6 液体供給孔
7 負圧吸引孔
G ガラス基板(板状物)
DESCRIPTION OF SYMBOLS 1 Adsorption pad 2 Mounting base material 3 Outer peripheral side elastic body (seal member)
3a Front end surface (contact portion) of the outer peripheral elastic body
4 Inner peripheral side elastic body 6 Liquid supply hole 7 Negative pressure suction hole G Glass substrate (plate-like object)

Claims (5)

  1. 取付基材に装着されたシール部材の先端が板状物の表面に当接した状態で、該シール部材の内周側全域に形成される密閉空間に負圧を作用させることにより、前記板状物を吸着保持するように構成した吸着パッドであって、
    前記シール部材は、単泡スポンジで形成されて前記板状物への当接部が吸液性を有する外周側弾性体であり、
    前記取付基材に、前記密閉空間に対して負圧吸引を行う負圧吸引孔と、前記密閉空間に対して液体を供給する液体供給孔とを形成すると共に、
    前記密閉空間内に、該密閉空間に供給される液体を吸液し且つ該液体を前記板状物の表面に流出させる連泡スポンジで形成された内周側弾性体を配置して、該内周側弾性体を前記取付基材に装着し、
    前記密閉空間の最外周部位に前記負圧吸引孔が開口する隙間が設けられ且つ該密閉空間の前記隙間を除く全部位に前記内周側弾性体が配置されている
    ことを特徴とする板状物の吸着パッド。
    By applying a negative pressure to the sealed space formed in the entire inner peripheral side of the seal member in a state where the tip of the seal member mounted on the mounting substrate is in contact with the surface of the plate-like object, the plate-like A suction pad configured to suck and hold an object,
    The sealing member is an outer peripheral elastic body that is formed of a single foam sponge, and a contact portion with the plate-like object has liquid absorbency,
    In the mounting substrate, a negative pressure suction hole that performs negative pressure suction with respect to the sealed space, and a liquid supply hole that supplies liquid to the sealed space, and
    In the sealed space, an inner peripheral elastic body formed by a continuous foam sponge that absorbs the liquid supplied to the sealed space and flows the liquid to the surface of the plate-like object is disposed. A peripheral elastic body is attached to the mounting base,
    A clearance for opening the negative pressure suction hole is provided in an outermost peripheral portion of the sealed space, and the inner peripheral elastic body is disposed in all the portions of the sealed space except the clearance. Adsorption pad of plate-like material.
  2. 前記内周側弾性体に液体が流入するように液体供給孔が開口していることを特徴とする請求項1に記載の板状物の吸着パッド。 The plate-like suction pad according to claim 1, wherein a liquid supply hole is opened so that the liquid flows into the inner peripheral elastic body.
  3. 前記内周側弾性体及び外周側弾性体の取付基材への装着面が板状物の表面と平行な状態に配置されるように構成されていることを特徴とする請求項1または2に記載の板状物の吸着パッド。 3. The structure according to claim 1, wherein the mounting surface of the inner peripheral side elastic body and the outer peripheral side elastic body on the mounting base material is arranged in parallel with the surface of the plate-like object. The suction pad of the plate-shaped object of description.
  4. 前記外周側弾性体が取付基材への装着面と垂直な方向に弾性変形するように構成されていることを特徴とする請求項に記載の板状物の吸着パッド。 The suction pad for a plate-like object according to claim 3 , wherein the outer peripheral elastic body is configured to be elastically deformed in a direction perpendicular to a mounting surface to the mounting base.
  5. 前記板状物がフラットパネルディスプレイ用のガラス基板であって、前記液体が水であることを特徴とする請求項1〜4の何れかに記載の板状物の吸着パッド。 The said pad-shaped object is a glass substrate for flat panel displays, Comprising: The said liquid is water, The adsorption pad of the plate-shaped object in any one of Claims 1-4 characterized by the above-mentioned.
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JP5318536B2 (en) * 2008-11-10 2013-10-16 株式会社ディスコ Grinding equipment
JP5756956B2 (en) * 2010-11-22 2015-07-29 Smc株式会社 Vacuum adsorption device
JP5742196B2 (en) * 2010-12-06 2015-07-01 三菱マテリアルテクノ株式会社 Thin plate conveyor conveyor
DE102011109648A1 (en) * 2011-08-05 2013-02-07 Centrotherm Thermal Solutions Gmbh & Co. Kg Gripper of robot for gripping or holding disc-shaped substrate, has base having surface from which spacers project, to guide fluid to flow along surface to opening
JP5946316B2 (en) * 2012-04-20 2016-07-06 東洋機械金属株式会社 Parts extraction device
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CN105981153A (en) * 2013-12-03 2016-09-28 哈莫技术股份有限公司 Holding device
KR101619876B1 (en) * 2014-04-21 2016-05-11 울산과학기술원 Suction pad for transferring device and the transferring device comprising the same
JP2017123400A (en) * 2016-01-07 2017-07-13 株式会社ディスコ Chuck table
JP6887658B2 (en) * 2016-09-05 2021-06-16 学校法人 名城大学 Suction pad

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JP4756295B2 (en) * 2000-11-09 2011-08-24 日本電気硝子株式会社 Adsorption holding device and adsorption holding method for glass plate
JP2004040011A (en) * 2002-07-08 2004-02-05 Toyo Kohan Co Ltd Tool, apparatus, and method for supplying and taking out substrate
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