【０００１】
【発明の属する技術分野】
本発明は、吸着パッドよりガラス基板を剥離する方法に関し、特に液晶ディスプレイ向けガラス基板およびプラズマディスプレイ向けガラス基板等の大型ガラス基板の片面を多孔質軟質樹脂等からなる吸着パッドに吸着保持させた状態で、もう片面を研磨布等に摺接させ研磨した後で、吸着パッドより大型ガラス基板を剥離する際に好適に使用できる。
【０００２】
【従来の技術】
近年、大画面の液晶テレビおよびプラズマテレビの普及に従い、液晶テレビ、プラズマテレビ向けガラス基板のサイズは大きくなっている。またパーソナルコンピュータ用液晶パネルは、フロート法などで製造された１枚の薄い大板ガラスから、液晶パネルとするためのフォトリソ工程を経た後、パネルサイズに切断する、言い換えれば、多面取りされる。
【０００３】
これらガラス基板の製造直後の表面は完全な平滑面ではなく、多少のうねりやマイクロコルゲーション、凹凸、キズ等を有しているので、通常、これらの基板は研磨した後に使用される。近年、研磨されるガラス基板は、板厚は薄いままでサイズが大型化している。
【０００４】
ガラス基板を片面研磨する際は、ガラス基板の片面を保持した状態で、もう片方の面を研磨布等に摺接させて研磨する。研磨する際のガラス基板の保持については、加圧盤またはテーブル等に貼着された微小空泡を有する多孔質軟質樹脂からなる吸着パッドを吸水させて、その平滑な吸着面に加圧ローラ等の押圧手段でガラス基板を押しつけることで、ガラス基板の片面を吸着保持する方法が広く用いられている。
【０００５】
該方法を前記大型のガラス基板の保持に使用すると、吸着面積が広いため十分な保持力が得られること、および吸着保持させることが容易なこと等の利点がある。しかしながら、ガラス基板が薄くサイズが大きい程、吸着パッドに吸着保持されたガラス基板を、研磨後に吸着パッドより剥離する際に、ガラス基板が大きくしなり、言い換えれば、反って破損し易い。破損を防ぐためには、剥離速度を遅くせざるを得ない。
【０００６】
このことの対策として、例えば、特許文献１には、上側の可撓自在な定盤でガラス基板の全面を保持し、定盤を可撓手段で撓ませてガラス基板を下側の研磨テーブル上の吸着パッドから剥離させていき、定盤を退避手段で研磨テーブルから退避移動させることで、ガラス基板を研磨テーブルから自動で剥離するガラス基板の吸着パッドからの剥離方法およびその機械が開示されている。
【０００７】
また、特許文献２には、ガラス基板の一方側を吸着パッドによって、保持した後、ガラス板の他方側と吸着パッドとの境界に向けて圧縮エアを噴出し、ガラス板を浮上させ、そして、浮上したガラス板と吸着パッドとの隙間に水滴を供給して吸着パッドの吸着力を無くすことで、ガラス板を吸着パッドから自動で剥離するガラス基板の吸着パッドからの剥離方法およびその機械が開示されている。
【０００８】
特許文献２に記載の、吸着パッドからガラス基板を剥離する際に高圧エアで水を吸着パッドとガラス基板の境界に吹きこんで隙間を生じさせて吸着パッドよりガラス基板を剥離させることは、特に、ガラス基板のサイズが大きい場合、および板厚が薄い場合、吸着パッドへのガラス基板の吸着を素早く解いて剥離時にガラス基板の反りを少なくする作用を有するため、ガラス基板の破損の発生が減少する効果が大きい。
【０００９】
【特許文献１】
特開２０００−８４８４４号公報
【特許文献２】
特開２０００−９４３１９号公報
【００１０】
【発明が解決しようとする課題】
しかしながら、吸着パッドよりのガラス基板の剥離時に、吸着パッドとガラス基板との隙間に吹きこむ水の量が少ないと、水が分散し、吸着パッドとガラス基板との間に生じる隙間を広げることができずに、吸着を素早く解くことが困難となり、例えば、吸盤によりガラス基板の片側を吸い付けてガラス基板を引くことで、吸着パッドよりガラス基板を無理に剥離しようとすると、ガラス基板が反って破損する可能性が高くなるという問題があった。一旦、破損すると続いて剥離する基板のキズ防止のため、破損した際のガラス片を吸着パッドから完全に取り除く、または吸着パッドを取り替える必要があり、工程のロス時間が大きい。
【００１１】
ガラス基板を反らせないためには、ガラス基板を引く速度、言い換えれば、吸着パッドよりガラス基板を剥離する速度を遅くせざるを得ないが、剥離に要する時間が長くなり、工程の生産性が低下する。
【００１２】
一方、吸着パッドとガラス基板との隙間に吹きこむ水の量が多いと、吸着パッドに多量の水が吸収されるため、吸着パッド中の水分が過多となり、ガラス基板の保持力が不足して、ガラス基板が滑り破損が生じ易いという問題があった。また、工程内に水が飛び散り作業環境が汚くなる等、作業環境に悪影響を与える。
【００１３】
本発明は、吸着パッドからガラスを剥離する際に、ガラス基板を破損させることなく素早く剥離する吸着パッドよりガラス基板を剥離する方法を提供することを課題とする。
【００１４】
【課題を解決するための手段】
本発明者が、上記の課題を解決する手段を検討したところ、吸着パッドよりガラス基板を剥離する際に、水を吹きこむ側を高くして、吸着パッドおよびガラス基板を水平面から下側に傾けた状態で、吸着パッドとガラス基板端部との境界にエアを吹きつけて吸着パッドとガラス基板の間に隙間を生じさせ、次いで、水を吹きこむと、吸着パッドとガラス基板の密着部と吸着パッドとガラス基板の隙間との境界に、重力により自然に水が集まり、少量の水を吹きこんだとしても、集まった水が吸着パッドに吸収され、吸着パッドの吸着力が低下し、吸着パッドよりのガラス基板の剥離が素早く円滑に行われることを見出し、本発明を完成させるに至った。
【００１５】
水を吹きこむ側を高くして、吸着パッドおよびガラス基板を水平面から下側に傾ける角度、即ち、吸着パッドおよびガラス基板が水平面となす角度は、水が重力で流下し得る角度であればよく、１度以上、９０度以下の角度で選定できる。傾きが、１度より小さいと、吸着パッドよりガラス基板を剥離する際に、吸着パッドとガラス基板の密着部と吸着パッドとガラス基板の隙間との境界に、水が重力により集中することなく分散する。境界線に水を集中させるのに、好ましい角度は、１０度以上であり、吸着パッドとガラス基板を水平面から下側に傾ける角度、即ち、吸着パッドおよびガラス基板が水平面となす角度は、好ましくは、１０度以上、９０度以下である。尚、傾ける角度の上限は、水平面より垂直である９０度である。
【００１６】
即ち、本発明は、吸着パッドと吸着パッドに吸着保持されたガラス基板端部との境界に生じさせた隙間に水を吹きこんで吸着を解き、吸着パッドよりガラス基板を剥離する方法であって、吸着パッドおよびガラス基板を、水を吹きこむ側を高くして水平面より傾けた状態で、吸着パッドとガラス基板との境界に水を吹きこんで隙間を広げつつ剥離することを特徴とする吸着パッドよりガラス基板を剥離する方法である。
【００１７】
更に、吸着パッドおよびガラス基板を傾けた際の、水平面となす角度が１度以上、９０度以下であることを特徴とする請求項１に記載の吸着パッドよりガラス基板を剥離する方法である。
【００１８】
更に、本発明は、加圧盤を有する片面研磨機の加圧盤の自転軸を傾斜させることにより、吸着パッドおよびガラス基板を傾けることを特徴とする上記の吸着パッドよりガラス基板を剥離する方法である。
【００１９】
更に、本発明は、加圧盤を有する片面研磨機の加圧盤の自転軸に傾斜手段を付設したことを特徴とする上記の吸着パッドよりガラス基板を剥離する方法に使用する片面研磨機である。
【００２０】
【発明の実施の形態】
実施の形態について説明する。
【００２１】
図１は、本発明の吸着パッドよりガラス基板を剥離する方法を用いて、吸着パッドよりガラス基板を剥離する一例を示す側面図である。
【００２２】
自転軸１によって吊り下げられており、下面を平滑に加工してなる定盤である加圧盤２に吸着パッド３を貼着する。詳しくは、加圧盤２の下面に、両面粘着シートで吸着パッド３を貼り付け、更に、吸着パッド３の下面、即ち、吸着面にガラス基板Ｇを吸着し保持する。ガラス基板Ｇの吸着パッド３への保持は吸着パッド３に水を含ませ、ガラス基板Ｇを図示しない加圧ローラ等で押圧しつつ接触させると、ガラス基板Ｇが吸着パッド３に吸着され、吸着面に保持される。
【００２３】
図１に示すように、エアシリンダ４を駆動し、カム５を通じて回転軸６により回転可能な傾斜手段７を作動し、傾斜手段７に保持された自転軸１を傾け、加圧盤２を傾け、加圧盤２に貼着された吸着パッド３吸着されたガラス基板Ｇを、ハンド８に付設した複数の吸盤９で吸着しつつ、吸着パッド３とガラス基板Ｇとの間に図示しないエアガンで高圧エアを吹きつけ隙間を生じさせた後、その隙間にスプレーガン１０で水を吹きこんで隙間を広げつつ、言い換えれば、吸着している面積を少なくしていき、ガラス基板Ｇの水を吹きこむ側近傍を吸盤で下方に引くことによって、吸着パッド３からガラス基板Ｇを剥離させる。
【００２４】
その際、エアシリンダ４を駆動することにより、自転軸１を傾斜させることで加圧盤２が傾斜し、吸着パッド３およびガラス基板Ｇは、水を吹きこむ側を高くして水平面から下側に傾けた状態となる。傾けた状態にしたことで、吸着パッド３とガラス基板Ｇの間の隙間に水を吹きこんだ際、吸着パッド３とガラス基板Ｇの密着部と吸着パッド３とガラス基板Ｇの隙間との境界に、水が重力によりガラス基板Ｇ上を流れて自然に集まり、集まった水が吸着パッド３に吸収されることで吸着が解かれて隙間が広がっていき、少量の水を吹きこんだとしても、吸着パッド３の吸着力が素早く低下し、吸着パッド３よりのガラス基板Ｇの剥離が円滑に行える。
【００２５】
このように、吸着パッド３と吸着パッド３の下面に吸着保持されたガラス基板Ｇ端部との境界に生じさせた隙間に水を吹きこんで吸着を解く場合、水を吹きこむ側のガラス基板Ｇの端部を高くして、吸着パッド３およびガラス基板Ｇを水平面から下側に傾けた状態で、吸着パッド３とガラス基板Ｇとの隙間に水を吹きこみ、吹きこんだ水を重力の作用で吸水性のないガラス基板Ｇ上に流して、吸着パッド３とガラス基板Ｇの密着部と吸着パッド３とガラス基板Ｇの隙間との境界に水を集めて吸着を解くこととすれば、少量の水で円滑に吸着パッド３よりガラス基板Ｇが剥離され、本発明の吸着パッドよりガラス基板を剥離する方法が特に好適に使用できる。
【００２６】
図２は、本発明の吸着パッドよりガラス基板を剥離する方法を用いて、吸着パッドよりガラス基板を剥離する一例を示す側面図である。
【００２７】
テーブル１１上に両面粘着シートで吸着パッド３を貼り付け、更に、吸着パッド３の上面、言い換えれば、吸着面にガラス基板Ｇを吸着して保持する。ガラス基板Ｇの吸着パッド３への保持は吸着パッド３に水を含ませ、ガラス基板Ｇを図示しない加圧ローラ等で押圧しつつ接触させると、ガラス基板Ｇが吸着パッド３に吸着され、吸着面に保持される。
【００２８】
図２に示すように、水を吹きこむ側を高くして水平面に対して傾斜させたテーブル１１上で、吸着パッド３に吸着した状態のガラス基板Ｇを、ハンド８に付設した複数の吸盤９で上方より吸着し、吸着パッド３とガラス基板Ｇとの間に図示しないエアガンでエアを吹きつけ隙間を生じさせた後、その隙間にスプレーガン１０で水を吹きこんで、ガラス基板Ｇの水を吹きこむ側近傍を吸盤９で上方に引くことによって、吸着パッド３からガラス基板Ｇを剥離させる。
【００２９】
水を吹きこむ側のガラス基板端部を高くして、吸着パッド３およびガラス基板Ｇは水平面から下側に傾けた状態にしたことで、吸着パッド３とガラス基板Ｇの間の隙間に水を吹きこんだ際、吸着パッド３とガラス基板Ｇの密着部と吸着パッド３とガラス基板Ｇの隙間との境界に、水が重力により自然に集まり、少量の水を吹きこんだとしても、吸着パッド３の吸着力が素早く低下し、吸着パッド３よりのガラス基板Ｇの剥離が円滑に行える。
【００３０】
【実施例】
オスカー式片面研磨機を用い本発明の実施を行った。先に、オスカー式研磨機について説明する。
【００３１】
図３は、実施例で使用したオスカー式片面研磨機の主要部の側面図である。
【００３２】
図３に示すように、使用したオスカー式片面研磨機は、ガラス基板Ｇを片面研磨する際は、上側に加圧盤２を配し、研磨対象であるガラス基板Ｇを挟み込んだ下側の研磨盤１４を回転させることによって研磨する。詳しくは、該オスカー式片面研磨機は、加圧盤２の下面に、両面粘着シート１２で吸着パッド３を貼り付け、更に、吸着パッド３の下面、即ち、吸着面にガラス基板Ｇの非研磨面側を吸着し密着させて保持する。ガラス基板Ｇの吸着パッド３への保持は、吸着パッド３に水を含ませ、ガラス基板Ｇを図示しない加圧ローラ等で押圧しつつ接触させると、ガラス基板Ｇが吸着パッド３に吸着され、吸着面に保持される。自転軸１を中心に自転可能な加圧盤２を加圧し、保持されたガラス基板Ｇの下面側である研磨面を、回転駆動軸１３を中心に回転する研磨盤１４に両面粘着シート１２´で貼着され研磨布１５上に、酸化セリウムからなる研磨砥粒を水に懸濁させてスラリーとした研磨液を供給しながら、両面粘着シート１２´で貼り付けた研磨布１５に加圧し摺接することで研磨を行う片面研磨機である。
実施例１
オスカー式研磨機の上部加圧盤２を用いて、図１に示すように、吸着パッド３にガラス基板Ｇが吸着保持された状態で、エアシリンダ４を駆動し前述の手順で自転軸１を傾斜させて、吸着パッド３およびガラス基板Ｇを、水を吹きこむ側のガラス基板端部を高くして、水平面から下側に３０度傾けた状態とした。次いで、吸着パッド３とガラス基板Ｇの端部との境界に図示しないエアガンでエアを吹きつけ、吸着パッド３とガラス基板Ｇの間に隙間を生じさせ、次いで、その隙間にスプレーガン１０で水を吹きこみ、５０枚のガラス基板Ｇの剥離テストを行った。
【００３３】
詳しくは、図３に示したオスカー式片面研磨機を用い、直径、１２００ｍｍの加圧盤２の下面全面に貼着した吸着パッド３（富士紡績製 商品名 ポリパス
２０００Ｒ）に水を含ませた後、板厚、０．７ｍｍ、大きさ、６８０ｍｍ×８８０ｍｍのガラス基板Ｇを、押圧ローラにより押圧して吸着させた。
【００３４】
その後、図１に示すように、エアシリンダ４を駆動し自転軸１を傾け加圧盤２の下面を傾けて、水を吹きこむ側のガラス基板Ｇの端部を高くして、吸着パッド３およびガラス基板Ｇを水平面から下側に３０度傾けた状態にし、図示しないエアガンで、エアを吸着パッド３とガラス基板Ｇの端部の境界に０．６ＭＰａで吹きつけて、吸着パッド３とガラス基板Ｇの間に隙間を生じさせた後、該隙間に、スプレーガン１０で水５０ｍｌを、１秒間吹きこみつつ、剥離時間１０秒間で、ガラス基板Ｇの水を吹きこむ側近傍を吸盤９で下方に引くことによって、吸着パッド３からガラス基板Ｇを剥離させた。
【００３５】
このようにして、前記ガラス基板Ｇを５０枚剥離したが、破損したガラス基板Ｇは無く、剥離中の様子を目視で確認したところ、剥離中のガラス基板Ｇの剥がれる速さはほぼ一定であり、スプレーガン１０で供給した水は、吸着パッド３とガラス基板Ｇが密着している部分と、吸着パッド３とガラス基板Ｇが剥離していき広がっていく隙間との境界線に集まっていた。供給した水が重力によりガラス基板Ｇ上を流れて、該境界線に自然に集まり、吸着パッド３のガラス基板Ｇに対する吸着力が素早く低下して、吸着パッド３よりのガラス基板Ｇの剥離が円滑に行えた。
【００３６】
このように、本発明の吸着パッドよりガラス基板を剥離する方法により、吸着パッド３に吸着保持されたガラス基板Ｇを剥離させる際に、ガラス基板Ｇに無理な反りを生じさせず、破損させることなくスムーズに剥離させられた。
比較例１
加圧盤２の自転軸１を傾けない以外、言い換えれば、加圧盤２の下面を傾けず水平にした以外は、実施例１と同様に５０枚のガラス基板Ｇの剥離テストを行った。即ち、実施例１で用いたのと同じオスカー式片面研磨装置およびガラス基板Ｇを用い、同様の剥離手順及び条件で吸着パッド３およびガラス基板Ｇを傾けず水平として剥離テストを行った。
【００３７】
前記ガラス基板Ｇを５０枚剥離したが、２枚のガラス基板Ｇが破損した。剥離中の様子を目視で確認したところ、剥離中のガラス基板Ｇの剥がれる速さは不規則で剥がれ方にムラがあり、スプレーガン１０で供給した水は、吸着パッド３とガラス基板Ｇが密着している部分と、吸着パッド３とガラス基板Ｇが剥離していき広がっていく隙間との境界線に集まることなく、供給した水の大部分が反ったガラス基板面を伝って落下し、境界線に到達しない。
【００３８】
【発明の効果】
本発明の吸着パッドよりガラス基板を剥離する方法を用いれば、吸着パッドからガラスを剥離する際に、吸着パッドとガラス基板が密着している部分と、吸着パッドとガラス基板が剥離していき広がっていく隙間との境界線に、供給した水が重力により自然に集まり、吸着パッドのガラス基板に対する吸着力が素早く低下して、ガラス基板に無理な反り返りを生じさせず、ガラス基板を破損させることなく、素早く滑らかに剥離させられる。
【００３９】
また、使用する水の量が少ないので、ガラスの保持力の低下や作業環境に悪影響を与えることもない。
【図面の簡単な説明】
【図１】本発明の吸着パッドよりガラス基板を剥離する方法を用いて、吸着パッドよりガラス基板を剥離する一例を示す側面図である。
【図２】本発明の吸着パッドよりガラス基板を剥離する方法を用いて、吸着パッドよりガラス基板を剥離する一例を示す側面図である。
【図３】実施例で使用したオスカー式片面研磨機の主要部の側面図である。
【符号の説明】
Ｇ ガラス基板
１ 自転軸
２ 加圧盤
３ 吸着パッド
４ エアシリンダ
５ カム
６ 回転軸
７ 傾斜手段
８ ハンド
９ 吸盤
１０ スプレーガン
１１ テーブル
１２、１２´ 両面粘着シート
１３ 回転駆動軸
１４ 研磨盤
１５ 研磨布[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method of peeling a glass substrate from an adsorption pad, and in particular, a state where one side of a large glass substrate such as a glass substrate for a liquid crystal display and a glass substrate for a plasma display is adsorbed and held by an adsorption pad made of a porous soft resin or the like Then, after the other surface is brought into sliding contact with a polishing cloth and polished, the large glass substrate can be suitably peeled off from the suction pad.
[0002]
[Prior art]
In recent years, with the spread of large-screen liquid crystal televisions and plasma televisions, the sizes of glass substrates for liquid crystal televisions and plasma televisions have increased. A liquid crystal panel for a personal computer is cut from a thin large glass plate manufactured by a float method or the like into a panel size after passing through a photolithography process for forming a liquid crystal panel, in other words, multi-faceted.
[0003]
Since the surface immediately after the production of these glass substrates is not a completely smooth surface but has some waviness, microcorrugation, unevenness, scratches, etc., these substrates are usually used after being polished. In recent years, glass substrates to be polished have been increased in size while the plate thickness remains thin.
[0004]
When the glass substrate is polished on one side, the other side is slid on a polishing cloth or the like while holding the one side of the glass substrate. For holding the glass substrate during polishing, the suction pad made of a porous soft resin having fine air bubbles attached to a pressure plate or a table or the like is allowed to absorb water, and a pressure roller or the like is applied to the smooth suction surface. A method of attracting and holding one side of a glass substrate by pressing the glass substrate with a pressing means is widely used.
[0005]
When this method is used to hold the large glass substrate, there are advantages such as a sufficient holding force due to a wide adsorption area and easy adsorption and holding. However, the thinner the glass substrate is, the larger the glass substrate is when the glass substrate adsorbed and held on the suction pad is peeled off from the suction pad after polishing. In other words, the glass substrate is more likely to be damaged. In order to prevent breakage, the peeling speed must be slowed down.
[0006]
As a countermeasure against this, for example, in Patent Document 1, the entire surface of the glass substrate is held by an upper flexible platen, and the platen is bent by a flexible means so that the glass substrate is placed on the lower polishing table. A method of peeling a glass substrate from a suction pad and its machine are disclosed, in which the glass substrate is automatically peeled from the polishing table by peeling the surface plate from the polishing table with a retracting means. Yes.
[0007]
Further, in Patent Document 2, after holding one side of the glass substrate by the suction pad, the compressed air is blown toward the boundary between the other side of the glass plate and the suction pad, the glass plate is floated, and Disclosed is a method for peeling a glass substrate from a suction pad and its machine by automatically removing the glass plate from the suction pad by supplying water droplets to the gap between the floated glass plate and the suction pad to eliminate the suction force of the suction pad. Has been.
[0008]
When the glass substrate is peeled from the suction pad described in Patent Document 2, water is blown into the boundary between the suction pad and the glass substrate with high-pressure air to create a gap, and the glass substrate is peeled off from the suction pad. When the glass substrate size is large and the plate thickness is thin, the glass substrate has a function of quickly releasing the adsorption of the glass substrate to the suction pad and reducing the warpage of the glass substrate at the time of peeling. Great effect.
[0009]
[Patent Document 1]
JP 2000-84844 A [Patent Document 2]
JP 2000-94319 A [0010]
[Problems to be solved by the invention]
However, when the amount of water blown into the gap between the suction pad and the glass substrate is small when the glass substrate is peeled off from the suction pad, the water is dispersed and the gap generated between the suction pad and the glass substrate can be widened. It is difficult to quickly remove the suction, for example, if you try to force the glass substrate to peel from the suction pad by sucking one side of the glass substrate with a suction cup and pulling the glass substrate, the glass substrate will warp There was a problem that the possibility of breakage increased. In order to prevent scratches on the substrate that subsequently peels when damaged, it is necessary to completely remove the broken glass piece from the suction pad or to replace the suction pad, resulting in a long process loss time.
[0011]
In order not to warp the glass substrate, it is necessary to slow down the speed of pulling the glass substrate, in other words, the speed of peeling the glass substrate from the suction pad, but the time required for peeling becomes longer and the productivity of the process is reduced. To do.
[0012]
On the other hand, if the amount of water blown into the gap between the suction pad and the glass substrate is large, a large amount of water is absorbed by the suction pad, resulting in excessive moisture in the suction pad and insufficient holding power of the glass substrate. There was a problem that the glass substrate was liable to slip. In addition, the work environment is adversely affected, such as water splashing in the process and the work environment becoming dirty.
[0013]
This invention makes it a subject to provide the method of peeling a glass substrate from the suction pad which peels quickly, without damaging a glass substrate, when peeling glass from a suction pad.
[0014]
[Means for Solving the Problems]
When the present inventor has studied means for solving the above problems, when peeling the glass substrate from the suction pad, the side to which water is blown is raised, and the suction pad and the glass substrate are tilted downward from the horizontal plane. In such a state, air is blown to the boundary between the suction pad and the glass substrate end to create a gap between the suction pad and the glass substrate, and then water is blown into the contact portion between the suction pad and the glass substrate. Even if water gathers naturally due to gravity at the boundary between the suction pad and the gap between the glass substrate and a small amount of water is blown in, the collected water is absorbed by the suction pad, reducing the suction force of the suction pad and causing adsorption. It has been found that the glass substrate can be quickly and smoothly peeled from the pad, and the present invention has been completed.
[0015]
The angle at which the suction pad and the glass substrate are tilted downward from the horizontal plane by raising the side that blows water, that is, the angle between the suction pad and the glass substrate and the horizontal plane may be any angle that allows water to flow down by gravity. The angle can be selected from 1 degree to 90 degrees. If the inclination is less than 1 degree, when the glass substrate is peeled off from the suction pad, water is not concentrated by gravity at the boundary between the suction pad and the adhesion portion of the glass substrate and the gap between the suction pad and the glass substrate. To do. A preferable angle for concentrating water on the boundary line is 10 degrees or more, and an angle at which the suction pad and the glass substrate are inclined downward from the horizontal plane, that is, an angle between the suction pad and the glass substrate with respect to the horizontal plane is preferably It is 10 degrees or more and 90 degrees or less. The upper limit of the tilt angle is 90 degrees that is perpendicular to the horizontal plane.
[0016]
That is, the present invention is a method of releasing water by blowing water into a gap formed at the boundary between the suction pad and the edge of the glass substrate held by the suction pad, and peeling the glass substrate from the suction pad. The adsorption pad and the glass substrate are peeled while blowing the water to the boundary between the adsorption pad and the glass substrate while widening the gap between the suction pad and the glass substrate with the water blowing side raised and inclined from the horizontal plane. In this method, the glass substrate is peeled off from the pad.
[0017]
The method of peeling a glass substrate from the suction pad according to claim 1, wherein an angle formed with a horizontal plane when the suction pad and the glass substrate are tilted is 1 degree or more and 90 degrees or less.
[0018]
Furthermore, the present invention is a method of peeling a glass substrate from the above suction pad, wherein the suction pad and the glass substrate are tilted by tilting the rotation axis of the pressure plate of a single-side polishing machine having a pressure plate. .
[0019]
Furthermore, the present invention is a single-side polishing machine used for the method of peeling a glass substrate from the above suction pad, characterized in that a tilting means is attached to the rotation axis of a pressure board of a single-side polishing machine having a pressure board.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments will be described.
[0021]
FIG. 1 is a side view showing an example of peeling a glass substrate from the suction pad using the method of peeling the glass substrate from the suction pad of the present invention.
[0022]
A suction pad 3 is attached to a pressure plate 2 that is a surface plate that is suspended by a rotation shaft 1 and that has a lower surface processed smoothly. Specifically, the suction pad 3 is attached to the lower surface of the pressure plate 2 with a double-sided adhesive sheet, and the glass substrate G is sucked and held on the lower surface of the suction pad 3, that is, the suction surface. The glass substrate G is held on the suction pad 3 when water is contained in the suction pad 3 and the glass substrate G is brought into contact with the suction pad 3 while being pressed by a pressure roller or the like (not shown). Held on the surface.
[0023]
As shown in FIG. 1, the air cylinder 4 is driven, the tilting means 7 that can be rotated by the rotating shaft 6 through the cam 5 is actuated, the rotation shaft 1 held by the tilting means 7 is tilted, the pressure plate 2 is tilted, Adsorption pad 3 affixed to pressure board 2 Adsorbed glass substrate G adsorbed by a plurality of suction cups 9 attached to hand 8, high pressure air with an air gun (not shown) between adsorption pad 3 and glass substrate G After the gap is blown, water is blown into the gap with the spray gun 10 to widen the gap. In other words, the adsorbed area is reduced and the glass substrate G is blown with water. The glass substrate G is peeled from the suction pad 3 by pulling the vicinity downward with a suction cup.
[0024]
At that time, by driving the air cylinder 4, the pressure plate 2 is inclined by inclining the rotation shaft 1, and the suction pad 3 and the glass substrate G are raised from the horizontal plane to the lower side with the water blowing side raised. It will be tilted. By inclining, when water is blown into the gap between the suction pad 3 and the glass substrate G, the boundary between the suction pad 3 and the adhesion portion of the glass substrate G and the gap between the suction pad 3 and the glass substrate G Furthermore, even if water flows on the glass substrate G by gravity and gathers naturally, and the collected water is absorbed by the suction pad 3, the adsorption is released and the gap is widened, and a small amount of water is blown in. The suction force of the suction pad 3 is quickly reduced, and the glass substrate G can be peeled off from the suction pad 3 smoothly.
[0025]
Thus, when water is blown into the gap formed at the boundary between the suction pad 3 and the glass substrate G end held by suction on the lower surface of the suction pad 3, the glass substrate on the side that blows water is used. With the end of G raised and the suction pad 3 and the glass substrate G tilted downward from the horizontal plane, water is blown into the gap between the suction pad 3 and the glass substrate G, and the blown water is If it is made to flow on the glass substrate G which does not absorb water by action, water is collected at the boundary between the adhering portion of the adsorbing pad 3 and the glass substrate G and the gap between the adsorbing pad 3 and the glass substrate G, and the adsorption is released. A method in which the glass substrate G is smoothly peeled off from the suction pad 3 with a small amount of water and the glass substrate is peeled off from the suction pad of the present invention can be used particularly preferably.
[0026]
FIG. 2 is a side view showing an example of peeling the glass substrate from the suction pad using the method of peeling the glass substrate from the suction pad of the present invention.
[0027]
The suction pad 3 is attached to the table 11 with a double-sided adhesive sheet, and the glass substrate G is sucked and held on the upper surface of the suction pad 3, in other words, the suction surface. The glass substrate G is held on the suction pad 3 when water is contained in the suction pad 3 and the glass substrate G is brought into contact with the suction pad 3 while being pressed by a pressure roller or the like (not shown). Held on the surface.
[0028]
As shown in FIG. 2, a plurality of suction cups 9 are attached to a hand 8 with a glass substrate G in a state of being adsorbed to the suction pad 3 on a table 11 that is inclined with respect to a horizontal plane with the water blowing side raised. Then, air is blown between the suction pad 3 and the glass substrate G with an air gun (not shown) to create a gap, and then water is blown into the gap with the spray gun 10. The glass substrate G is peeled off from the suction pad 3 by pulling the vicinity of the side where the air is blown upward with the suction cup 9.
[0029]
The edge of the glass substrate on the side to which water is blown is raised so that the suction pad 3 and the glass substrate G are inclined downward from the horizontal plane, so that water is introduced into the gap between the suction pad 3 and the glass substrate G. Even when water is naturally collected by gravity at the boundary between the adhering portion of the suction pad 3 and the glass substrate G and the gap between the suction pad 3 and the glass substrate G when it is blown, even if a small amount of water is blown, 3 is quickly reduced, and the glass substrate G can be smoothly peeled off from the suction pad 3.
[0030]
【Example】
The present invention was carried out using an Oscar single-side polishing machine. First, the Oscar type polishing machine will be described.
[0031]
FIG. 3 is a side view of the main part of the Oscar-type single-side polishing machine used in the examples.
[0032]
As shown in FIG. 3, the used Oscar-type single-side polishing machine has a pressure platen 2 on the upper side when the glass substrate G is polished on one side, and a lower polishing plate sandwiching the glass substrate G to be polished. Polishing by rotating 14. Specifically, the Oscar type single-side polishing machine has the suction pad 3 attached to the lower surface of the pressure plate 2 with a double-sided pressure-sensitive adhesive sheet 12, and the non-polishing surface of the glass substrate G on the lower surface of the suction pad 3, that is, the suction surface Adhere and hold the side. Holding the glass substrate G to the suction pad 3 includes water in the suction pad 3 and when the glass substrate G is brought into contact with the glass substrate G while being pressed by a pressure roller (not shown), the glass substrate G is sucked to the suction pad 3. It is held on the suction surface. The pressure plate 2 capable of rotating about the rotation shaft 1 is pressurized, and the polishing surface, which is the lower surface side of the held glass substrate G, is attached to the polishing plate 14 rotating about the rotation drive shaft 13 with a double-sided adhesive sheet 12 ′. The abrasive cloth 15 made of cerium oxide is suspended in water and applied as a slurry to the abrasive cloth 15 that has been adhered to the abrasive cloth 15 and applied to the abrasive cloth 15 attached with the double-sided pressure-sensitive adhesive sheet 12 'for sliding contact. This is a single-side polishing machine that performs polishing.
Example 1
As shown in FIG. 1, using the upper pressure plate 2 of the Oscar type polishing machine, the air cylinder 4 is driven while the glass substrate G is sucked and held on the suction pad 3, and the rotation shaft 1 is tilted by the above-described procedure. Thus, the suction pad 3 and the glass substrate G were in a state where the glass substrate end on the side to which water was blown was raised and tilted 30 degrees downward from the horizontal plane. Next, air is blown to the boundary between the suction pad 3 and the end of the glass substrate G with an air gun (not shown) to form a gap between the suction pad 3 and the glass substrate G, and then water is sprayed into the gap with the spray gun 10. Then, a peel test of 50 glass substrates G was performed.
[0033]
Specifically, using the Oscar single-side polishing machine shown in FIG. 3, after water is included in the suction pad 3 (trade name Polypass 2000R, manufactured by Fuji Boseki) attached to the entire lower surface of the pressure plate 2 having a diameter of 1200 mm, A glass substrate G having a plate thickness of 0.7 mm, a size of 680 mm × 880 mm was pressed and adsorbed by a pressing roller.
[0034]
Thereafter, as shown in FIG. 1, the air cylinder 4 is driven, the rotation shaft 1 is tilted, the lower surface of the pressure plate 2 is tilted, the end of the glass substrate G on the water blowing side is raised, the suction pad 3 and The glass substrate G is inclined 30 degrees downward from the horizontal plane, and air is blown to the boundary between the suction pad 3 and the end of the glass substrate G with an air gun (not shown) at 0.6 MPa. After a gap is formed between G, 50 ml of water is blown into the gap with a spray gun 10 for 1 second, and the vicinity of the glass substrate G where water is blown is lowered with a suction cup 9 for 10 seconds. The glass substrate G was peeled off from the suction pad 3 by pulling on.
[0035]
In this way, 50 pieces of the glass substrate G were peeled off, but there was no broken glass substrate G, and when the state of peeling was visually confirmed, the speed at which the glass substrate G being peeled off was almost constant. The water supplied by the spray gun 10 gathered at the boundary line between the portion where the suction pad 3 and the glass substrate G are in close contact with the gap where the suction pad 3 and the glass substrate G peel and spread. The supplied water flows on the glass substrate G by gravity, and naturally gathers at the boundary line. The suction force of the suction pad 3 to the glass substrate G is quickly reduced, and the glass substrate G is smoothly peeled from the suction pad 3. I was able to do it.
[0036]
Thus, when the glass substrate G adsorbed and held on the adsorption pad 3 is exfoliated by the method of exfoliating the glass substrate from the adsorption pad of the present invention, the glass substrate G is damaged without causing excessive warpage. It was peeled off smoothly.
Comparative Example 1
A peel test of 50 glass substrates G was performed in the same manner as in Example 1 except that the rotation axis 1 of the pressure plate 2 was not inclined, in other words, the lower surface of the pressure plate 2 was horizontal without being inclined. That is, using the same Oscar single-side polishing apparatus and glass substrate G as used in Example 1, the peeling test was performed with the suction pad 3 and the glass substrate G being horizontal without tilting under the same peeling procedure and conditions.
[0037]
Although 50 glass substrates G were peeled off, two glass substrates G were damaged. When the state during peeling was visually confirmed, the peeling speed of the glass substrate G during peeling was irregular and uneven in the peeling method, and the water supplied by the spray gun 10 was in close contact with the suction pad 3 and the glass substrate G. The main part of the supplied water falls down along the curved glass substrate surface without gathering at the boundary line between the portion where the suction pad 3 and the glass substrate G peel and spread, and the boundary Does not reach the line.
[0038]
【The invention's effect】
If the method for peeling the glass substrate from the suction pad of the present invention is used, when the glass is peeled from the suction pad, the portion where the suction pad and the glass substrate are in close contact with each other and the suction pad and the glass substrate are peeled off and spread. The supplied water naturally gathers due to gravity at the boundary with the gap, and the suction force of the suction pad to the glass substrate is quickly reduced, causing the glass substrate to be damaged without causing excessive warping of the glass substrate. It can be peeled off quickly and smoothly.
[0039]
Further, since the amount of water to be used is small, there is no adverse effect on the holding power of the glass and the working environment.
[Brief description of the drawings]
FIG. 1 is a side view showing an example of peeling a glass substrate from a suction pad using the method for peeling a glass substrate from the suction pad of the present invention.
FIG. 2 is a side view showing an example of peeling the glass substrate from the suction pad using the method of peeling the glass substrate from the suction pad of the present invention.
FIG. 3 is a side view of a main part of an Oscar type single-side polishing machine used in Examples.
[Explanation of symbols]
G Glass substrate 1 Rotating shaft 2 Pressure plate 3 Suction pad 4 Air cylinder 5 Cam 6 Rotating shaft 7 Inclining means 8 Hand 9 Suction cup 10 Spray gun 11 Table 12, 12 'Double-sided adhesive sheet 13 Rotating drive shaft 14 Polishing disc 15 Polishing cloth
