JP6907849B2 - Glass plate manufacturing method and manufacturing equipment - Google Patents

Description

The present invention relates to a method for manufacturing a glass plate including a step of sucking and fixing the glass plate to a support table, and a glass plate manufacturing apparatus for carrying out the method.

As is well known, in the manufacturing process of a glass plate, the glass plate is often cut in order to cut it into a product size. Since the end face of the glass plate formed by cutting contains many defects such as minute cracks, the glass plate after cutting is ground for the purpose of removing these defects. Therefore, it is customary to process the end face. Then, Patent Document 1 discloses an example of a mode in which an end face is processed.

In the embodiment disclosed in the same document, the glass plate is adsorbed and fixed to the support table in which the suction holes (multiple suction holes in the same document) are formed, and the glass plate is fixed to the end face of the glass plate protruding from the support table. It is ground with a grindstone. A liquid such as water may be supplied on the support table. For example, a liquid supply port is formed on the support table, and the liquid is discharged onto the support table from this supply port and supplied. This is to facilitate the movement of the glass plate when positioning the glass plate on the support table before the grinding process.

By the way, in order to adsorb the glass plate on the support table, a negative pressure generating source including a vacuum pump, a tank or the like connected to the adsorption hole through the fluid flow path (piping) is often used. Since the negative pressure source is large, it is located outside the production line. With such a negative pressure generation source, suction is performed by applying a negative pressure to the glass plate on the support table through the suction holes. Although Patent Document 2 targets a semiconductor wafer instead of a glass plate for adsorption, the semiconductor wafer is adsorbed on a support table by using a negative pressure generation source (vacuum generation source in the same document). Aspects for causing are disclosed.

Japanese Unexamined Patent Publication No. 2012-11547 Japanese Unexamined Patent Publication No. 2016-174074

However, as described above, when processing the end face of the glass plate, there are the following problems to be solved in the embodiment in which the glass plate is adsorbed and fixed to the support table by using the negative pressure generation source. That is, there is a problem that it takes an unreasonable amount of time for a negative pressure of a desired size (a size that does not hinder the processing of the end face) to act on the glass plate after the adsorption is started. Therefore, it is necessary to improve from the viewpoint of shortening the tact time of the process for processing the end face.

In the present invention made in view of the above circumstances, when the glass plate is adsorbed and fixed to the support table by using the negative pressure source, the time until the negative pressure of a desired magnitude acts on the glass plate is increased. The technical issue is to reduce and shorten the tact time.

The first method according to the present invention, which was devised to solve the above problems, includes a mounting step of placing a glass plate on a support table in which a plurality of suction holes are formed, and a plurality of mounting steps through a fluid flow path. It is a method of manufacturing a glass plate including a suction fixing step of sucking and fixing a glass plate to a support table through a plurality of suction holes by a negative pressure generating source connected to each of the suction holes of the flow path. In the section from the negative pressure generation source to the multiple suction holes, a switching mechanism that can switch between the open state and the closed state of the flow path is provided, and from the switching mechanism to the multiple suction holes, It is characterized by branching the flow path multiple times by multiple branch headers.

When a switching mechanism is provided in the section of the flow path from the negative pressure generation source to the plurality of suction holes, the flow path in the section from the negative pressure generation source to the switching mechanism is always negative pressure. On the other hand, the flow path in the section from the switching mechanism to the plurality of suction holes becomes normal pressure in the closed state and negative pressure in the open state. Here, in this method, the flow path is branched a plurality of times by a plurality of branch headers from the switching mechanism to the plurality of suction holes. As a result, we succeeded in reducing the length of the flow path (volume of the flow path in which negative pressure should be generated) in the section from the switching mechanism to the multiple suction holes by the amount that the flow path is branched multiple times. There is. Therefore, the negative pressure generation source makes it possible to quickly generate a negative pressure in the section from the switching mechanism to the plurality of suction holes, and by extension, the time until the negative pressure of a desired magnitude acts on the glass plate. Can be reduced. As a result, it is possible to shorten the tact time of a series of steps from the mounting step to the suction fixing step.

In the above method, a plurality of branch headers include a first branch header relatively arranged on the side of a plurality of suction holes on the flow path and a second branch header arranged relatively on the side of a negative pressure source. The flow path length from each of the plurality of suction holes to the first branch header and the flow path length from the first branch header to the second branch header are the flow from the second branch header to the switching mechanism. It is preferable to make it shorter than the road length.

When a plurality of branch headers include a first branch header and a second branch header, a flow path connecting the plurality of suction holes and the first branch header (hereinafter referred to as the first flow path) and the first branch The flow path connecting the header and the second branch header (hereinafter referred to as the second flow path) is compared with the flow path connecting the second branch header and the switching mechanism (hereinafter referred to as the third flow path). Therefore, the number of flow paths becomes large. Therefore, if the lengths of the large number of first and second flow paths are made shorter than the length of the third flow path, the volume of the flow paths in the section from the switching mechanism to the plurality of suction holes can be reduced. It will be even more advantageous in doing so.

In the above method, a plurality of parallel transport belts for loading and unloading the glass plate to the support table in a flat position are provided, and a plurality of parallel transport belts for inserting the plurality of transport belts are provided. It is preferable that the support table is divided into a plurality of divided tables by the gap, the first branch header is arranged below the divided table, and the second branch header is arranged in the area where the glass plate can be conveyed by the conveying belt.

Here, if the first branch header is arranged below the partition table, it is possible to bring the plurality of suction holes and the first branch header as close as possible. Further, if the second branch header is arranged in the area where the glass plate can be conveyed by the conveying belt, a plurality of second flow paths can be merged in the manufacturing (conveying) line. Therefore, it is further advantageous in shortening the lengths of the first flow path and the second flow path. Here, "arranging the second branch header in the area where the glass plate can be conveyed by the transfer belt" includes the case where the second branch header is arranged below the plurality of transfer belts and below the support table, and the case where the second branch header is arranged and supported. This includes the case where the second branch header is arranged below the plurality of transport belts, but not below the table. From the viewpoint of shortening the length of the second flow path, it is more preferable to arrange the second branch header below the plurality of transport belts and below the support table. From the viewpoint of equipment cost and workability of piping, it is more preferable to arrange the second branch header below the plurality of transport belts, although not below the support table.

In the above method, the cross-sectional area of the flow path from the switching mechanism to the negative pressure source side is made larger than the cross-sectional area of the flow path from the switching mechanism to the plurality of suction hole sides based on the switching mechanism. Is preferable.

In this way, on the negative pressure generation source side from the switching mechanism, the pressure loss can be reduced by the amount that the flow path cross-sectional area of the flow path is larger than that on the plurality of suction hole sides from the switching mechanism. The flow rate of the fluid that can flow through is increased. As a result, the negative pressure can be generated more quickly in the entire flow path, and the time until the negative pressure of a desired magnitude acts on the glass plate can be further reduced.

In the above method, a liquid supply means for supplying a liquid is provided on a support table, a negative pressure source is connected to a flow path, and a first chamber, a first chamber, and a passage where the inside is maintained at a negative pressure are provided. The second chamber connected via the first chamber, the first opening / closing means capable of switching between the open state and the closed state in which the passage is opened, and the open state and the closed state in which the path for draining the liquid from the second chamber is opened and closed. With a second opening / closing means capable of switching between the above, the first opening / closing means in the open state, and the second opening / closing means in the closed state, the first chamber from the flow path and the second chamber via the passage. A storage process in which a liquid is allowed to flow into the chamber and is stored, and a drainage process in which the liquid stored in the second chamber is drained through a route with the first opening / closing means in the closed state and the second opening / closing means in the open state. It is preferable to carry out the liquid step.

When the liquid is supplied onto the support table, the liquid infiltrates through the suction holes into the flow path, the tank provided by the negative pressure source, and the like. Due to this, when the suction fixing step is executed, problems such as delay in generating negative pressure in the flow path are likely to occur. Then, in this method, the first chamber and the second chamber are provided in the negative pressure generation source for the drainage of the liquid, and the storage step and the drainage step are executed. In the storage process, by opening the first opening / closing means and closing the second opening / closing means, the liquid flows from the flow path into the first chamber and the second chamber via the passage and is stored. To go. After that, in the drainage step, the liquid stored in the second chamber is drained through the route with the first opening / closing means in the closed state and the second opening / closing means in the open state. At this time, the first opening / closing means is closed, and both the first chamber located on the flow path and the second chamber connected to the first chamber via the passage are in a closed state. By being partitioned by one opening / closing means, it is possible to drain the liquid while generating a negative pressure in the flow path or the like by the first chamber. By draining the liquid while performing the function of the negative pressure source in this way, it is possible to prevent problems due to the infiltration of the liquid.

In the above method, it is preferable to gradually lower the height position of the flow path from the plurality of suction hole sides toward the negative pressure generation source side. Here, "gradually lowering the height position of the flow path" is only when the height position of the flow path is continuously lowered from the plurality of suction hole sides toward the negative pressure generation source side. However, it also includes the case where a horizontal section is included in a part of the flow path.

In this way, the liquid that has entered the flow path from the suction holes can easily flow from the plurality of suction holes to the negative pressure source side due to gravity, so that the above storage step and drainage step are executed. It becomes suitable for the process.

The second method according to the present invention, which was devised to solve the above problems, is a mounting step of placing a glass plate on a support table in which suction holes are formed, and suction holes through a fluid flow path. It is a method of manufacturing a glass plate including a suction fixing step of sucking and fixing a glass plate to a support table through a suction hole by a connected negative pressure generation source, and the suction hole and the negative pressure generation source on the flow path. A switching mechanism that can switch between the open state and the closed state of the flow path is provided between the two, and the cross-sectional area of the flow path from the switching mechanism to the negative pressure source side is determined based on the switching mechanism. It is characterized by being larger than the flow path cross-sectional area of the flow path on the suction hole side from the switching mechanism.

According to this method, since the switching mechanism is provided between the suction hole and the negative pressure generation source on the flow path, the flow path in the section from the negative pressure generation source to the switching mechanism is always negative pressure. On the other hand, the flow path in the section from the switching mechanism to the suction hole becomes normal pressure in the closed state and negative pressure in the open state. Further, on the negative pressure source side from the switching mechanism, the pressure loss can be reduced by the amount that the flow path cross-sectional area of the flow path is larger than that on the suction hole side from the switching mechanism, so that the flow rate of the fluid that can flow in the flow path can be reduced. Will increase. Therefore, the negative pressure generation source makes it possible to quickly generate a negative pressure in the flow path in the section from the switching mechanism to the suction hole, and it takes time for the negative pressure of a desired magnitude to act on the glass plate. It is possible to further reduce the pressure. From the above, according to this method, the takt time of a series of steps from the mounting step to the adsorption fixing step can be shortened.

The third method according to the present invention, which was devised to solve the above problems, is a liquid supply step of supplying a liquid on a support table in which suction holes are formed, and a glass plate is placed on the support table. A method for manufacturing a glass plate, which includes a mounting step and a suction fixing step of sucking and fixing the glass plate to a support table through the suction holes by a negative pressure generating source connected to the suction holes through a fluid flow path. Therefore, the negative pressure source is connected to the flow path and the inside is maintained by negative pressure, the first chamber and the second chamber connected to the first chamber via the passage, and the passage is opened and closed. The first opening / closing means is provided with a first opening / closing means capable of switching between the closed state and a second opening / closing means capable of switching between an open state in which the path for draining liquid from the second chamber is opened and a closed state in which the liquid is discharged. With the open state and the second opening / closing means closed, the storage process of flowing and storing the liquid from the flow path to the first chamber and the second chamber via the passage, and the first opening / closing means are closed. It is characterized by performing a drainage step of draining the liquid stored in the second chamber through the route in a state of being in a state and in a state of opening the second opening / closing means.

Due to the execution of the liquid supply process, the liquid infiltrates through the suction holes into the flow path, the tank provided by the negative pressure source, and the like. Due to this, when the suction fixing step is executed, problems such as delay in the generation of negative pressure in the flow path are likely to occur. Then, in this method, the first chamber and the second chamber are provided in the negative pressure generation source for the drainage of the liquid, and the storage step and the drainage step are executed. Here, when the drainage process is executed, the first opening / closing means is closed, and both the first chamber connected to the flow path and the second chamber connected to the first chamber via the passage are in the passage. It is partitioned by the first opening and closing means in a closed state. Therefore, it is possible to drain the liquid while generating a negative pressure in the flow path or the like by the first chamber. By draining the liquid while performing the function of the negative pressure source in this way, it is possible to suppress the delay in the generation of the negative pressure due to the infiltration of the liquid. Therefore, it is possible to reduce the time until a negative pressure of a desired magnitude acts on the glass plate. From the above, according to this method, the takt time can be shortened.

The device according to the present invention, which was devised to solve the above problems, has a support table in which a plurality of suction holes are formed, is connected to each of the plurality of suction holes through a fluid flow path, and has a plurality of suction holes. It is a glass plate manufacturing apparatus provided with a negative pressure generating source that causes a negative pressure to act on a glass plate placed on a support table through a hole, and a plurality of adsorptions from the negative pressure generating source in the flow path. A switching mechanism that can switch between the open state and the closed state of the flow path is provided in the section leading to the hole, and the flow path is connected multiple times by a plurality of branch headers from the switching mechanism to the plurality of suction holes. Characterized by branching.

According to this device, it is possible to obtain the same action / effect as the above-mentioned first method.

According to the glass plate manufacturing method and manufacturing apparatus according to the present invention, when a glass plate is attracted to and fixed to a support table using a negative pressure generating source, a negative pressure of a desired magnitude acts on the glass plate. Since the time required for the operation can be reduced, the tact time can be shortened.

It is a piping diagram which shows the piping of the flow path in the glass plate manufacturing apparatus which concerns on 1st Embodiment of this invention. It is a partial longitudinal side view which shows the periphery of the negative pressure generation source in the glass plate manufacturing apparatus which concerns on 1st Embodiment of this invention. It is a partial longitudinal front view which shows the periphery of the support table in the glass plate manufacturing apparatus which concerns on 1st Embodiment of this invention. It is a partial longitudinal side view which shows the periphery of the support table in the glass plate manufacturing apparatus which concerns on 1st Embodiment of this invention. It is a partial longitudinal side view which shows the periphery of the negative pressure generation source in the glass plate manufacturing apparatus which concerns on 2nd Embodiment of this invention.

Hereinafter, a method for manufacturing a glass plate and a manufacturing apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings.

<First Embodiment>
First, the glass plate manufacturing apparatus according to the first embodiment of the present invention will be described.

As shown in FIG. 1, the glass plate manufacturing apparatus 1 (hereinafter, simply referred to as the manufacturing apparatus 1) includes a support table 3 in which a plurality of suction holes 3a for adsorbing and fixing the glass plate 2 are formed, and a fluid. A vacuum pump 5 connected to each of the plurality of suction holes 3a through the flow path 4 and applying a negative pressure to the glass plate 2 on the support table 3 through the plurality of suction holes 3a, and the plurality of suction holes 3a. A first branch header 6 and a second branch header 7 for branching the flow path 4 between the vacuum pump 5 and an open state in which the flow path 4 is opened between the second branch header 7 and the vacuum pump 5. The liquid 9 (see FIG. 2) that has entered the flow path 4 is passed between the first electromagnetic valve 8 as a switching mechanism that can switch between the closed and closed states, and the first electromagnetic valve 8 and the vacuum pump 5. The compressed gas is passed through the vacuum tank 10 capable of draining the liquid to the outside of the flow path 4 and the connection flow path 11 connected to the flow path 4 between the second branch header 7 and the first electromagnetic valve 8. A second electromagnetic valve 13 capable of switching between an open state in which the connection flow path 11 is open and a closed state in which the connection flow path 11 is closed is provided. In the manufacturing apparatus 1, the negative pressure generation source is composed of the vacuum pump 5 and the vacuum tank 10.

The support table 3 can support the glass plate 2 from below in a flat position. The support table 3 is divided into a plurality of divided tables with a plurality of gaps 14 formed in parallel interposed therebetween, and a plurality of suction holes 3a are formed in each divided table. In this embodiment, there are a total of 14 partition tables (only a part of which is shown in FIG. 1). In the following description, each partition table will be referred to as a partition table A, a partition table B, ..., A partition table N in order.

In addition to the plurality of suction holes 3a, each of the divided tables A to N is formed with a plurality of supply ports 3b as liquid supply means for flowing out and supplying the liquid 9 (for example, water) on each divided table. .. Each of the plurality of supply ports 3b is connected to a liquid supply source (for example, a pump, which is not shown) through a supply pipe 15 (not shown in FIG. 1). Further, as will be described in detail later, it is possible to insert a transport belt 16 (not shown in FIG. 1) for loading and unloading the glass plate 2 into and out of the support table 3 in a part of the plurality of gaps 14. ..

The flow path 4 has a circular flow path cross section in the entire area from the plurality of suction holes 3a to the vacuum tank 10. The gas (for example, air) existing in the flow path 4 and the liquid 9 that has entered the flow path 4 from the suction hole 3a can pass through the flow path 4. The height position of the flow path 4 continuously decreases from the plurality of suction holes 3a side toward the vacuum tank 10 side. As a result, the liquid 9 that has entered the flow path 4 flows to the vacuum tank 10 (negative pressure generation source) side due to gravity.

Of the two branch headers 6 and 7, the first branch header 6 is relatively arranged on the flow path 4 on the side of a plurality of suction holes 3a, and the second branch header 7 is relatively on the vacuum tank 10 side. It is located in.

One first branch header 6 is arranged for each of the partition tables A to N. Each of the plurality of branch flow paths 4a branched by each first branch header 6 is connected to the suction holes 3a formed in each division table. That is, the number of branch flow paths 4a formed by one first branch header 6 and the number of suction holes 3a formed in each division table are the same.

Only one second branch header 7 is arranged. The second branch header 7 branches into fourteen branch flow paths 4b (only a part of which is shown in FIG. 1), and each of the fourteen branch flow paths 4b is connected to the first branch header 6. .. That is, the number of branch flow paths 4b branched by the second branch header 7 and the number of first branch headers 6 are the same (14 in the present embodiment).

In FIG. 1, the first branch header 6 is shown in a different arrangement from the actual one in order to facilitate understanding of the piping of the flow path 4. As will be described in detail with reference to FIGS. 3 and 4 described later, in reality, each first branch header 6 is arranged below each partition table. The second branch header 7 is arranged below the plurality of transport belts 16, not below the support table 3. The first solenoid valve 8, the negative pressure generation source (vacuum pump 5 and vacuum tank 10), the compressor 12, and the second solenoid valve 13 are arranged outside the manufacturing (conveying) line.

Here, in the present embodiment, the flow path 4 is branched twice (two stages) by the first branch header 6 and the second branch header 7, but the present invention is not limited to this. As a modification of this embodiment, the flow path 4 may be branched three times (three steps) or more.

When the first solenoid valve 8 is opened, the gas and liquid 9 can pass through the first solenoid valve 8 from the plurality of suction holes 3a side toward the vacuum tank 10 side, and the first solenoid valve 8 is closed. In this state, the gas and the liquid 9 cannot pass through the first solenoid valve 8. When the first solenoid valve 8 is closed, the compressed gas from the compressor 12 cannot pass through the first solenoid valve 8.

The vacuum pump 5 is always in operation, and the inside of the vacuum tank 10 is always maintained at a negative pressure. As a result, in the section 4d connecting the first solenoid valve 8 and the vacuum tank 10 (negative pressure generation source) in the flow path 4, a negative pressure is always generated regardless of the opening and closing of the first solenoid valve 8. .. On the other hand, the section connecting the first solenoid valve 8 and the plurality of suction holes 3a in the flow path 4 (both branch flow paths 4a and 4b, and the section 4c connecting the second branch header 7 and the first solenoid valve 8). ), If the first solenoid valve 8 is opened while the glass plate 2 is placed on the support table 3, a negative pressure is generated and the glass plate 2 can be adsorbed and fixed to the support table 3. .. On the other hand, when the first solenoid valve 8 is closed, the state in which the negative pressure is generated is released, and the suction and fixing of the glass plate 2 by the support table 3 can be released.

With reference to the first solenoid valve 8, the flow path cross-sectional area S1 on the vacuum tank 10 side is larger than the flow path cross-sectional area S2 on the plurality of suction holes 3a side. From the viewpoint of more quickly generating a negative pressure in the section from the first solenoid valve 8 to the plurality of suction holes 3a, it is preferable that the ratio of the cross-sectional areas of the flow paths (S1 / S2, no unit) is 2 or more. On the other hand, from the viewpoint of reduction of equipment cost and workability of pipe installation, it is preferable that the ratio of the cross-sectional areas of the flow paths (S1 / S2, no unit) is 15 or less. In the present embodiment, in the two pipes connected via the first solenoid valve 8, the cross-sectional area of the pipe on the vacuum tank 10 side is larger than the cross-sectional area of the pipes on the plurality of suction holes 3a. As a result, the flow path cross-sectional area of the section 4d is larger than the flow path cross-sectional area of the section 4c.

Regarding the size of the flow path cross-sectional area between the branch flow path 4a, the branch flow path 4b, and the section 4c, the closer to the first solenoid valve 8, the larger the flow path cross-sectional area. .. Further, regarding the lengths of these three parties 4a, 4b, 4c, the lengths of the branch flow path 4a and the branch flow path 4b are both shorter than the length of the section 4c. The length of the branch flow path 4a and the branch flow path 4b is preferably 75% or less based on the length of the section 4c. On the other hand, the length of the branch flow path 4a and the branch flow path 4b is preferably 5% or more based on the length of the section 4c. Here, the "length of the branch flow path 4a (branch flow path 4b)" means the common length when the lengths of the plurality of branch flow paths 4a (branch flow path 4b) are common. When the lengths of the plurality of branch flow paths 4a (branch flow paths 4b) are not uniform, it means the length of the longest one.

When the second solenoid valve 13 is opened, the compressed gas (for example, compressed air) can pass through the second solenoid valve 13 from the compressor 12 side toward the flow path 4 side. Then, by sending the compressed gas from the compressor 12 into the flow path 4, it is possible to accelerate the rise of the air pressure in the flow path 4 and to speed up the release of the adsorption fixing of the glass plate 2. On the other hand, when the second solenoid valve 13 is closed, the compressed gas cannot pass through the second solenoid valve 13. When the second solenoid valve 13 is closed, the gas and liquid 9 that have entered the connecting flow path 11 from the flow path 4 cannot pass through the second solenoid valve 13. A buffer tank whose inside is maintained at a positive pressure may be arranged between the compressor 12 and the second solenoid valve 13.

Here, in each drawing referred to in the description of the present embodiment including FIG. 1, the white arrow indicates a state in which the first solenoid valve 8 is in the open state and the second solenoid valve 13 is in the closed state. It represents the flow of gas and liquid 9. Further, the broken line arrow represents the flow of only the gas in this state. Further, the solid arrow indicates the flow of only the liquid 9 in this state.

As shown in FIG. 2, the vacuum tank 10 has a first tank 17 as a first chamber connected to the flow path 4, and a second chamber as a second chamber connected to the first tank 17 via the first passage 18. The second tank 19, the first valve 20 as the first opening / closing means capable of switching between the open state and the closed state in which the first passage 18 is opened, and the path 21 for draining liquid from the second tank 19 are opened. A third valve 22 as a second opening / closing means capable of switching between an open state and a closed closed state, and a third passage 23 capable of sending compressed gas or air to the second tank 19 are opened / closed. A valve 24 and a third passage 25 connecting the upper part of the first tank 17 and the vacuum pump 5 are provided.

The first tank 17 is a buffer tank, and the inside of the first tank 17 is always maintained at a negative pressure as the vacuum pump 5 operates. In addition, the first tank 17 has a function of allocating the course of the gas and the liquid 9 that have passed through the flow path 4 and reached the first tank 17. The first tank 17 can allow the gas that has reached itself to enter the third passage 25, and the liquid 9 that has reached itself can enter the first passage 18 that is connected to the second tank 19. be.

The second tank 19 is arranged below the first tank 17. Further, the first passage 18 connects the bottom of the first tank 17 and the top of the second tank 19, and the height position thereof is continuously from the first tank 17 side to the second tank 19 side. It is declining. As a result, when the first valve 20 is in the open state, the liquid 9 that has reached the first tank 17 can pass through the first passage 18 by its own weight and flow into the second tank 19.

Normally, the first valve 20 is in the open state and the second valve 22 is in the closed state. In this case, the liquid 9 that has passed through the flow path 4 and reached the first tank 17 is stored in the second tank 19. At the time of drainage, the first valve 20 is closed and then the second valve 22 is opened. As a result, the liquid 9 stored in the second tank 19 can be drained through the path 21. The path 21 is connected to the bottom of the second tank 19, and its height position is lowered as it separates from the second tank 19. Therefore, the liquid 9 flows through the path 21 due to its own weight.

Normally, the third valve 24 is in the closed state. If the third valve 24 is opened after the first valve 20 is closed at the time of drainage, and then the second valve 22 is opened, air or the like passes through the second passage 23 to the second tank. Since it flows into 19, the drainage of the liquid 9 can be promoted.

As shown in FIGS. 3 and 4, in addition to the above-described components, the manufacturing apparatus 1 has a plurality of parallel transport belts 16 for loading and unloading the glass plate 2 to and from the support table 3 in a flat position. And a grindstone 26 as an end face processing means for processing the end face 2a protruding from the support table 3 of the glass plate 2 which is attracted and fixed to the support table 3.

The plurality of transport belts 16 carry the unprocessed glass plate 2 of the end surface 2a into the support table 3 along the T1 direction, and carry out the processed glass plate 2 from the support table 3 along the T2 direction. Is possible. Therefore, the length of the transport belt 16 in the longitudinal direction is longer than the length of the support table 3 in the longitudinal direction, and the transport belt 16 is arranged so as to penetrate the gap of the support table 3. These transport belts 16 are wound around a drive pulley and a driven pulley (both not shown), and the height position of the transport surface can be changed up and down by an elevating mechanism (not shown).

The plurality of transport belts 16 first transport the glass plate 2 along the T1 direction in a state where the height position of the transport surface is higher than that of the support table 3. Next, as shown by the alternate long and short dash line in FIGS. 3 and 4, when the glass plate 2 reaches directly above the support table 3, the feeding operation is stopped and the height position of the conveying surface is gradually lowered. The glass plate 2 is delivered to the support table 3. After delivery, as shown by solid lines in FIGS. 3 and 4, a standby is performed in the gap 14 until the processing of the end face 2a is completed. Next, when the processing of the end surface 2a is completed, the height position of the transport surface is gradually raised to take the glass plate 2 from the support table 3. Finally, the feeding operation is restarted, and the glass plate 2 is conveyed along the T2 direction in a state where the height position of the conveying surface is higher than that of the support table 3.

The grindstone 26 is arranged for grinding one of both end faces 2a and 2a extending in parallel with the glass plate 2 and for grinding the other. Each of the grindstones 26 and 26 grinds both end surfaces 2a and 2a by moving in the T3 direction (the direction opposite to the T1 direction and the T2 direction) while rotating around an axis extending in the vertical direction. .. The moving direction of the grindstone during grinding may be the same as the T1 direction and the T2 direction. In the present embodiment, both grindstones 26, 26 are configured to perform grinding while sandwiching the glass plate 2 and running in parallel.

Although not shown, the manufacturing apparatus 1 includes, in addition to the above-mentioned components, a first positioning mechanism for moving the glass plate 2 before grinding on the support table 3 for positioning. ing. In the first positioning mechanism, for example, a plurality of positioning pins for abutting one end surface 2a of both end faces 2a and 2a and a glass plate 2 in a state of being in contact with the other end face 2a are brought into contact with one end face 2a. Each positioning pin has a pressing member that presses one end surface 2a of the glass plate 2 by pushing it sideways. With this first positioning mechanism, the glass plate 2 can be moved along the arrangement direction of the divided tables A to N and arranged at a desired position. Since the manufacturing apparatus 1 arranges the glass plate 2 at a desired position by moving the glass plate 2 along the T1 direction, a second positioning mechanism (not shown) may be further provided.

As shown in FIGS. 3 and 4, each first branch header 6 is arranged directly below each of the partition tables A to N. As a result, the branch flow path 4a connecting the first branch header 6 and the suction holes 3a formed in the division tables A to N extends vertically. Further, the second branch header 7 is arranged not directly under the support table 3 but directly under the plurality of transport belts 16. In addition, the second branch header 7 is located below each first branch header 6.

Next, a method for manufacturing a glass plate according to the first embodiment of the present invention using the above-mentioned manufacturing apparatus 1 will be described.

In the method for manufacturing a glass plate according to the present embodiment, first, a liquid supply step of supplying the liquid 9 onto the support table 3 is executed. In the liquid supply step, the liquid 9 is discharged and supplied from a plurality of supply ports 3b formed in each partition table. This makes it easier to move the glass plate 2 on the support table 3 in the subsequent positioning step. With the execution of this liquid supply step, a part of the liquid 9 penetrates into the flow path 4 through the suction holes 3a formed in each division table.

When the liquid supply step is completed, the mounting step of placing the glass plate 2 on the support table 3 is then executed. The mounting step is performed by passing the glass plate 2 (glass plate 2 before processing of the end face 2a) carried in by the plurality of transport belts 16 from the plurality of transport belts 16 to the support table 3.

When the mounting step is completed, the positioning step of moving the glass plate 2 on the support table 3 and positioning the glass plate 2 is then executed. The above-mentioned first positioning mechanism is used to execute the positioning step. As a result, the glass plate 2 is moved along the arrangement direction of the divided tables A to N and arranged at a desired position.

When the positioning step is completed, the glass plate 2 is suction-fixed to the support table 3 via the plurality of suction holes 3a by the vacuum tank 10 connected to each of the plurality of suction holes 3a through the flow path 4. Perform the process. The suction fixing step is executed by opening the first solenoid valve 8 which is in the closed state in the initial state. The second solenoid valve 13 is maintained in the closed state, which is the initial state.

When the first solenoid valve 8 is opened, the two branch flow paths 4a and 4b on the flow path 4 and the gas and liquid 9 existing in the section 4c pass through the first solenoid valve 8 and sequentially pass through the section 4d. Inflow to. Along with this, the air pressure in both the branch flow paths 4a and 4b and the section 4c gradually decreases to generate a negative pressure, and the negative pressure acts on the glass plate 2 to act on the glass plate 2 on the support table 3. Is adsorbed and fixed. In the present embodiment, since the first tank 17 of the vacuum tank 10 is always maintained at a negative pressure, the first solenoid valve 8 is negative in the section 4d on the flow path 4 even before the first solenoid valve 8 is opened. It is in a state where pressure is generated.

The gas and liquid 9 that have flowed into the section 4d pass through the section 4d and reach the first tank 17 provided in the vacuum tank 10. Therefore, the course is divided by the first tank 17. After entering the third passage 25, the gas reaches the vacuum pump 5. On the other hand, the liquid 9 is discharged to the outside of the flow path 4 by executing the following storage step and drainage step after entering the first passage 18 connected to the second tank 19.

In the storage process, the first valve 20 is opened and the second valve 22 is closed as an initial state, so that the liquid flows into the empty second tank 19 through the first passage 18. The coming liquid 9 is stored. In the drainage step, the first valve 20 is closed and the second valve 22 is opened. As a result, the liquid 9 stored in the second tank 19 is drained through the path 21. When the inside of the second tank 19 becomes empty again due to drainage, the second valve 22 is returned to the closed state, and then the first valve is returned to the open state. In this way, the storage step and the drainage step can be repeatedly executed.

When the glass plate 2 is sucked and fixed to the support table 3 by the execution of the suction fixing step, the end face processing step of processing the end face 2a protruding from the support table 3 of the glass plate 2 is next executed. In the end face processing step, both end faces 2a and 2a extending in parallel of the glass plate 2 are ground. As a modification of the present embodiment, the both end surfaces 2a and 2a may be polished instead of or in addition to the grinding process.

When the end face processing step is completed, next, a suction release step of releasing the suction fixing of the glass plate 2 by the support table 3 is executed. The adsorption release step is executed by closing the first solenoid valve 8 and opening the second solenoid valve 13 and then sending the compressed gas from the compressor 12 into the flow path 4.

When the compressed gas is sent into the flow path 4, the air pressure in both the branch flow paths 4a and 4b and the section 4c gradually rises to release the state in which the negative pressure is generated. As a result, the suction and fixing of the glass plate 2 by the support table 3 is released.

In the present embodiment, the compressed gas is sent into the flow path 4 with the execution of the adsorption release step, but this is not the case. As a modification of the present embodiment, the suction fixing of the glass plate 2 can be released only by closing the first solenoid valve 8 without sending the compressed gas. Further, as a modification of the present embodiment, the adsorption and fixation of the glass plate 2 may be released by sending the air taken in from the outside of the flow path 4 into the flow path 4.

When the suction release step is completed, finally, the glass plate 2 (the processed glass plate 2 of the end face 2a) is taken from the support table 3 by the plurality of transport belts 16, and the glass plate 2 is transported by the plurality of transport belts 16. Then, the glass plate 2 is sent to the process on the downstream side.

Next, the main actions / effects of the above-mentioned manufacturing apparatus 1 and the manufacturing method will be described.

In the above-mentioned manufacturing apparatus 1 and manufacturing method, the flow path 4 is routed a plurality of times (two) by the first branch header 6 and the second branch header 7 from the first solenoid valve 8 (switching mechanism) to the plurality of suction holes 3a. (Times) Branching. As a result, the volume of the flow path 4 in the section from the first solenoid valve 8 to the plurality of suction holes 3a is reduced, so that the vacuum tank 10 (negative pressure generation source) can quickly increase the number of flow paths 4 from the first solenoid valve 8. It is possible to generate a negative pressure in the flow path 4 in the section leading to the suction hole 3a. Therefore, it is possible to reduce the time until a negative pressure of a desired magnitude acts on the glass plate 2. As a result, it is possible to shorten the tact time of the process for processing the end face 2a.

Further, on the vacuum tank 10 side from the first solenoid valve 8, the pressure loss can be reduced by the amount that the flow path cross-sectional area is larger than that on the plurality of suction holes 3a side from the first solenoid valve 8. Therefore, the flow rates of the gas and the liquid 9 that can flow in the flow path 4 on the vacuum tank 10 side are larger than those of the first solenoid valve 8. Therefore, a negative pressure can be generated more quickly in the flow paths 4 on the side of the plurality of suction holes 3a than the first solenoid valve 8, and the negative pressure of a desired size acts on the glass plate 2. It is possible to further reduce the time.

In addition, when draining the liquid 9 from the inside of the flow path 4 to the outside of the flow path 4, which causes a delay in the generation of negative pressure, the liquid is drained without stopping the operation of the vacuum tank 10 (negative pressure generation source). be able to. As a result, the delay in the generation of negative pressure due to the infiltration of the liquid 9 can be suppressed. Therefore, it is possible to quickly generate a negative pressure in the entire flow path 4, and it is possible to reduce the time until a negative pressure of a desired magnitude acts on the glass plate 2.

<Second embodiment>
Next, an apparatus for manufacturing a glass plate according to a second embodiment of the present invention and a method for producing a glass plate according to a second embodiment of the present invention using the apparatus will be described. The second embodiment will be described only with respect to the differences from the first embodiment described above. Regarding the common points with the first embodiment, the same reference numerals are given to the drawings referred to in the description of the second embodiment, and duplicate description will be omitted.

As shown in FIG. 5, the manufacturing apparatus 1 according to the second embodiment is different from the manufacturing apparatus 1 according to the first embodiment in the configuration of the vacuum tank 10. In the vacuum tank 10 of the second embodiment, the first tank 17, the second tank 19, and the first valve 20 of the vacuum tank 10 of the first embodiment are the upper chamber 27a of the tank 27 and the lower chamber of the tank 27, respectively. It has been replaced by a shutter 28 that can open and close the passage 27b and the passage connecting the upper chamber 27a and the lower chamber 27b.

The method for manufacturing the glass plate according to the second embodiment using the manufacturing apparatus 1 according to the second embodiment can also be carried out in the same manner as the method for manufacturing the glass plate according to the first embodiment. Further, the manufacturing apparatus 1 and the manufacturing method according to the second embodiment can also obtain the same main actions and effects as those of the manufacturing apparatus 1 and the manufacturing method according to the first embodiment.

1 Glass plate manufacturing equipment 2 Glass plate 2a End face 3 Support table 3a Suction hole 3b Supply port 4 Flow path 4a Branch flow path 4b Branch flow path 4c Section 4d Section 5 Vacuum pump 6 First branch header 7 Second branch header 8th 1 Electromagnetic valve 9 Liquid 10 Vacuum tank 14 Gap 16 Conveyance belt 17 1st tank 18 1st passage 19 2nd tank 20 1st valve 21 Path 22 2nd valve 26 Grinding stone A to N split table

Claims (6)

The plurality of suction holes are provided by a mounting step of placing a glass plate on a support table in which a plurality of suction holes are formed and a negative pressure generating source connected to each of the plurality of suction holes through a fluid flow path. It is a method of manufacturing a glass plate including a suction fixing step of sucking and fixing the glass plate to the support table via.
A plurality of parallel transport belts for loading and unloading the glass plate to the support table in a flat position are provided, and a plurality of gaps formed in parallel for inserting the plurality of transport belts are provided. The support table is divided into a plurality of divided tables,
A switching mechanism capable of switching between an open state in which the flow path is open and a closed state in which the flow path is closed is provided in a section of the flow path from the negative pressure generation source to the plurality of suction holes.
From the switching mechanism to the plurality of suction holes, the flow path is branched a plurality of times by a plurality of branch headers .
The plurality of branch headers include a first branch header relatively arranged on the plurality of suction hole sides on the flow path and a second branch header relatively arranged on the negative pressure source side. NS,
A method for manufacturing a glass plate, characterized in that the first branch header is arranged below the division table and the second branch header is arranged in a region where the glass plate can be conveyed by the transfer belt. The flow path length from each of the plurality of suction holes to the first branch header and the flow path length from the first branch header to the second branch header are changed from the second branch header to the switching mechanism. The method for manufacturing a glass plate according to claim 1, wherein the length is shorter than the length of the flow path up to. With the switching mechanism as a reference, the flow path cross-sectional area of the flow path from the switching mechanism to the negative pressure source side is larger than the flow path cross-sectional area of the flow path from the switching mechanism to the plurality of suction holes. The method for manufacturing a glass plate according to claim 1 or 2 , wherein the glass plate is manufactured. A liquid supply means for supplying the liquid is provided on the support table.
A first chamber in which the negative pressure generation source is connected to the flow path and the inside is maintained under negative pressure, a second chamber connected to the first chamber via a passage, and an open state in which the passage is open. It is provided with a first opening / closing means capable of switching between a closed closed state and a second opening / closing means capable of switching between an open state in which a path for draining liquid from the second chamber is opened and a closed closed state.
With the first opening / closing means in the open state and the second opening / closing means in the closed state, the liquid is allowed to flow from the flow path into the second chamber through the first chamber and the passage. Storage process to store and
With the first opening / closing means closed and the second opening / closing means open, the drainage step of draining the liquid stored in the second chamber through the path is executed. The method for manufacturing a glass plate according to any one of claims 1 to 3, wherein the glass plate is manufactured. The method for manufacturing a glass plate according to claim 4 , wherein the height position of the flow path is gradually lowered from the plurality of suction hole sides toward the negative pressure generation source side. A support table on which a plurality of suction holes are formed, and a glass plate connected to each of the plurality of suction holes through a fluid flow path and placed on the support table via the plurality of suction holes. A glass plate manufacturing apparatus including a negative pressure generating source on which a negative pressure is applied and a plurality of parallel transport belts for loading and unloading the glass plate to and from the support table in a flat position.
The support table is divided into a plurality of divided tables by a plurality of gaps formed in parallel for inserting the plurality of transport belts.
A switching mechanism capable of switching between an open state in which the flow path is open and a closed state in which the flow path is closed is provided in a section of the flow path from the negative pressure generation source to the plurality of suction holes.
From the switching mechanism to the plurality of suction holes, the flow path is branched a plurality of times by a plurality of branch headers .
The plurality of branch headers include a first branch header relatively arranged on the plurality of suction hole sides on the flow path and a second branch header relatively arranged on the negative pressure source side. NS,
A glass plate manufacturing apparatus, characterized in that the first branch header is arranged below the division table, and the second branch header is arranged in a region where the glass plate can be conveyed by the transfer belt. ..

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