TW201916773A - 電路板的製作方法 - Google Patents

電路板的製作方法 Download PDF

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TW201916773A
TW201916773A TW107121607A TW107121607A TW201916773A TW 201916773 A TW201916773 A TW 201916773A TW 107121607 A TW107121607 A TW 107121607A TW 107121607 A TW107121607 A TW 107121607A TW 201916773 A TW201916773 A TW 201916773A
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silver
layer
copper
circuit layer
circuit
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胡先欽
楊梅
戴俊
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大陸商宏啟勝精密電子(秦皇島)有限公司
大陸商鵬鼎控股(深圳)股份有限公司
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Abstract

一種電路板的製作方法,其包括以下步驟:提供一絕緣基板,並在所述絕緣基板上開設至少一貫穿所述絕緣基板的二相對表面的通孔;在所述二相對表面分別形成一銀層,並在所述通孔內形成一連接二銀層的銀導電結構;對帶有所述銀層及所述銀導電結構的絕緣基板進行鍍銅以形成一銅線路層,所述銅線路層覆蓋所述銀導電結構及所述銀層的部分區域;及藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層,所述第一蝕刻液不腐蝕所述銅線路層。

Description

電路板的製作方法
本發明涉及一種電路板的製作方法。
目前,許多電路板會有高複雜度,高精度,高密集度的佈線要求。習知技術中,在電路板的線路製作時,通常使用減成法或半加成法製作線路。係然,目前使用的減成法或半加成法在蝕刻銅層形成線路時,由於橫向蝕刻的發生,往往需要增加線路補償以避免線路頂部線寬的減小,從而增加了製程難度。
有鑑於此,有必要提供一種上述問題的電路板的製作方法。
一種電路板的製作方法,其包括以下步驟:提供一絕緣基板,並在所述絕緣基板上開設至少一貫穿所述絕緣基板的二相對表面的通孔;在所述二相對表面分別形成一銀層,並在所述通孔內形成一連接二銀層的銀導電結構;對帶有所述銀層及所述銀導電結構的絕緣基板進行鍍銅以形成一銅線路層,所述銅線路層覆蓋所述銀導電結構及所述銀層的部分區域;及藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層,所示第一蝕刻液不腐蝕所述銅線路層。
進一步地,所述銀線路層中各線路的線寬小於所述銅線路層中對應的線路的線寬,所述銀線路層中各線路之間的間距大於所述銅線路層中對應的線路之間的間距。
進一步地,“在所述二相對表面分別形成一銀層,並在所述通孔內形成一連接二銀層的銀導電結構”具體包括:將含有奈米銀顆粒的銀漿塗佈於所述絕緣基板的所述二相對表面及所述通孔,並進行烘烤以將所述二相對表面的銀漿固化形成二銀層,並將每一通孔內的銀漿固化形成一銀導電結構。
進一步地,所述奈米銀顆粒的粒徑小於100奈米。
進一步地,每一銀層的厚度為0.15微米至0.3微米。
進一步地,步驟“對帶有所述銀層及所述銀導電結構的絕緣基板進行鍍銅以形成一銅線路層,所述銅線路層覆蓋所述銀導電結構及所述銀層的部分區域”具體包括:在每一銀層遠離所述絕緣基板的一側壓覆一感光膜以覆蓋所述銀層及所述銀導電結構;對所述感光膜進行曝光顯影以在所述感光膜上形成圖案,所述圖案包括對應所述銀導電結構的開口,且所述圖案除所述開口外還與所述銀層相對;對應所述圖案鍍銅以形成銅線路層,且所述銅線路層覆蓋所述銀導電結構及所述銀層的部分區域;及將所述曝光顯影後的感光膜剝離。
進一步地,所述電路板的製作方法在步驟“藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層”後還包括:藉由第二蝕刻液對所述絕緣基板進行蝕刻,以消除殘留的未被所述銅線路層覆蓋的銀層,其中,所述第二蝕刻液不腐蝕所述銅線路層及所述銀線路層。
一種電路板的製作方法,其包括以下步驟:在一絕緣基板的二相對表面分別形成一銀層,並在每一銀層遠離所述絕緣基板的表面形成一薄銅層,從而形成一中間體;在所述中間體上開設至少一通孔,所述通孔貫穿二薄銅層;對帶有所述通孔的中間體進行鍍銅以形成一銅線路層,所述銅線路層包括對應所述通孔形成的銅導電結構以連接二薄銅層,且所述銅線路層覆蓋所述銀層的部分區域;及對所述薄銅層進行酸洗,以去除未被所述銅線路層覆蓋的薄銅層;藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層,所示第一蝕刻液不腐蝕所述銅線路層。
進一步地,所述銀線路層中各線路的線寬小於所述銅線路層中對應的線路的線寬,所述銀線路層中各線路之間的間距大於所述銅線路層中對應的線路之間的間距。
進一步地,步驟“在所述二相對表面分別形成一銀層”具體包括:將含有奈米銀顆粒的銀漿塗佈於所述絕緣基板的所述二相對表面,並進行烘烤以將所述二相對表面的銀漿固化形成二銀層。
進一步地,所述奈米銀顆粒的粒徑小於100奈米。
進一步地,每一銀層的厚度為0.15微米至0.3微米。
進一步地,步驟“對帶有所述通孔的中間體進行鍍銅以形成一銅線路層,所述銅線路層包括對應所述通孔形成的銅導電結構以連接二薄銅層,且所述銅線路層覆蓋所述銀層的部分區域”具體包括:在每一薄銅層遠離所述絕緣基板的一側壓覆一感光膜以覆蓋所述薄銅層及所述通孔;對所述感光膜進行曝光顯影以在所述感光膜上形成圖案,所述圖案包括對應所述通孔的開口,且所述圖案除所述開口外還與所述薄銅層相對;對應所述圖案鍍銅以形成銅線路層,且所述銅線路層包括對應所述通孔形成的銅導電結構以連接二薄銅層,且所述銅線路層覆蓋所述銀層的部分區域;及將所述曝光顯影後的感光膜剝離。
進一步地,所述電路板的製作方法在步驟“在所述中間體上開設至少一通孔,所述通孔貫穿二薄銅層”後,步驟“對帶有所述通孔的中間體進行鍍銅以形成一銅線路層”前還包括:對所述通孔進行黑影工藝處理。
進一步地,所述電路板的製作方法在步驟“藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層”後還包括:藉由第二蝕刻液對所述絕緣基板進行蝕刻,以消除殘留的未被所述銅線路層覆蓋的銀層,其中,所述第二蝕刻液不腐蝕所述銅線路層及所述銀線路層。
本發明的電路板的製作方法,藉由銀線路層連接所述銅線路層與所述絕緣基板,使得所述銅線路層與所述絕緣基板之間結合力提高。另,由於銀線路層連接所述銅線路層與所述絕緣基板之間,故使用僅腐蝕所述銀層係然不腐蝕所述銅線路層的第一蝕刻液時,可適當延長蝕刻時間以改善整體線路底部殘足的問題,但不影響整體線路頂部的線寬,使得電路板製作時無需增加線路補償,降低了製程的難度。
下面將結合本發明實施例中的圖式,對本發明實施例中的技術方案進行清楚、完整地描述,顯然,所描述的實施例僅僅係本發明一部分實施例,而不係全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有做出創造性勞動前提下所獲得的所有其他實施例,均屬於本發明保護的範圍。
除非另有定義,本文所使用的所有的技術及科學術語與屬於本發明的技術領域的技術人員通常理解的含義相同。本文中在本發明的說明書中所使用的術語只係為了描述具體的實施例的目的,不係旨在於限制本發明。
下面結合圖式,對本發明的一些實施方式作詳細說明。在不衝突的情況下,下述的實施例及實施例中的特徵可相互組合。
請參閱圖1至圖8,本發明第一實施方式的電路板100的製作方法,其包括以下步驟:
步驟S1,請參閱圖1,提供一絕緣基板10,並在所述絕緣基板10上開設至少一通孔11。
所述絕緣基板10包括第一表面101及與所述第一表面101相對的第二表面103。所述通孔11貫穿所述第一表面101及所述第二表面103。
本實施方式中,所述絕緣基板10可為聚醯亞胺(PI)、聚對苯二甲酸乙二醇酯(PET)、聚丙烯(PP)或聚萘二甲酸乙二醇酯(PEN)材質。
所述通孔13藉由鐳射鐳射加工形成。
在其他實施方式中,所述絕緣基板10還可為其他絕緣材料。所述通孔11還可藉由其他方式形成,如機械切割、沖孔等。
步驟S2,請參閱圖2,在所述第一表面101及所述第二表面103分別形成一銀層20,並在所述通孔11內形成一連接二銀層20的銀導電結構21。
具體的,將含有奈米銀顆粒的銀漿塗佈於所述第一表面101、所述第二表面103及所述通孔11,並進行烘烤以將所述銀漿固化形成所述銀層20及所述銀導電結構21。
本實施方式中,所述奈米銀顆粒的粒徑小於100奈米,每一銀層20的厚度為0.15微米至0.3微米。
在其他實施方式中,所述奈米銀顆粒的粒徑及銀層20的厚度可根據需要進行調整。
本實施方式中,所述銀導電結構21填滿所述通孔11形成一銀柱連接二銀層20。
在其他實施方式中,所述銀導電結構21並未填滿所述通孔11,其形成於所述通孔11的內壁並連接二銀層20。
步驟S3,請參閱圖3,在每一銀層20遠離所述絕緣基板10的一側壓覆一感光膜30以覆蓋所述銀層20及銀導電結構21。
步驟S4,請參閱圖4,對所述感光膜30進行曝光顯影以在所述感光膜30上形成圖案31。其中,所述圖案31包括對應所述銀導電結構21的開口310。所述圖案31除所述開口310外與所述銀層20相對。
步驟S5,請參閱圖5,對應所述圖案31鍍銅以形成銅線路層40,且所述銅線路層40覆蓋所述銀導電結構21。
步驟S6,請參閱圖6,將所述曝光顯影後的感光膜30剝離。
步驟S7,請參閱圖7,對所述銀層20進行蝕刻,使得二銀層20分別製成與所述銅線路層40對應的銀線路層50,且所述銀線路層50中各線路的線寬小於所述銅線路層40中對應的線路的線寬,所述銀線路層50中各線路之間的間距大於所述銅線路層40中對應的線路之間的間距。
其中,蝕刻所述銀層20的第一蝕刻液僅蝕刻所述銀層20,但不腐蝕所述銅線路層40。
本實施方式中,所述電路板100的製作方法還可包括步驟S8,請參閱圖8,對所述絕緣基板10進行蝕刻,以消除殘留的未被所述銅線路層40覆蓋的銀層20,從而避免殘留的未被所述銅線路層40覆蓋的銀層20在電路板100的後續使用/加工過程中發生離子遷移現象。
其中,蝕刻所述絕緣基板10的第二蝕刻液不腐蝕所述銅線路層40及所述銀線路層50。
請參閱圖8,所述第一實施方式的製作方法製作的電路板100,其包括一絕緣基板10、一銀線路層50及一銅線路層40。所述絕緣基板10包括至少一貫穿所述絕緣基板10二相對表面的通孔11,一銀導電結構21形成於每一通孔11中。所述銀線路層50形成於所述絕緣基板10的所述二相對表面,且所述銀導電結構21二端連接二相對表面上的銀線路層50。所述銅線路層40覆蓋所述銀線路層50遠離所述絕緣基板10的一側。所述銀線路層50中各線路的線寬小於所述銅線路層40中對應的線路的線寬,所述銀線路層50中各線路之間的間距大於所述銅線路層40中對應的線路之間的間距。
請參閱圖9至圖17,本發明第二實施方式提供一種電路板200的製作方法,其包括以下步驟:
步驟S1,請參閱圖9,提供一絕緣基板10,並在所述絕緣基板10的二相對表面上分別形成一銀層20,及在每一銀層20遠離所述絕緣基板10的表面形成一薄銅層60,從而形成一中間體70。
具體的,將含有奈米銀顆粒的銀漿塗佈於所述絕緣基板10相對的第一表面101及第二表面103,並進行烘烤以將所述銀漿固化形成所述銀層20。在每一銀層20遠離所述絕緣基板10的表面電鍍形成一薄銅層60。所述薄銅層60可避免後續開孔、黑影工藝對銀層20造成損傷。
本實施方式中,所述奈米銀顆粒的粒徑小於100奈米,每一銀層20的厚度為0.15微米至0.3微米。所述薄銅層60的厚度為0.5微米至1微米。
在其他實施方式中,所述奈米銀顆粒的粒徑、所述銀層20的厚度及所述薄銅層60的厚度可根據需要進行調整。
步驟S2,請參閱圖10,在所述中間體70上開設至少一通孔71,所述通孔71貫穿二薄銅層60。
步驟S3,請參閱圖11,對所述通孔71進行黑影工藝處理,以在所述通孔71內壁上形成一石墨層(圖未標),使得後續電鍍金屬時提高電鍍速度。在其他實施方式中,可省略所述步驟。
步驟S4,請參閱圖12,在每一薄銅層60遠離所述絕緣基板10的一側壓覆一感光膜30以覆蓋所述薄銅層60及所述通孔71。
步驟S5,請參閱圖13,對所述感光膜30進行曝光顯影以在所述感光膜30上形成圖案31。其中,所述圖案31包括對應所述通孔71的開口310。所述圖案31除所述開口310外與所述薄銅層60相對。
步驟S6,請參閱圖14,對應所述圖案31鍍銅以形成銅線路層40,且所述銅線路層40包括對應所述通孔71形成的銅導電結構41以連接二薄銅層60。
步驟S7,請參閱圖15,將所述曝光顯影後的感光膜30剝離。
步驟S8,請參閱圖16,對所述薄銅層60進行酸洗,以去除未被所述銅線路層40覆蓋的薄銅層60。
步驟S9,請參閱圖17,對所述銀層20進行蝕刻,使得二銀層20分別製成與所述銅線路層40對應的銀線路層50,且所述銀線路層50中各線路的線寬小於所述銅線路層40中對應的線路的線寬,所述銀線路層50中各線路之間的間距大於所述銅線路層40中對應的線路之間的間距。蝕刻所述銀層20的第一蝕刻液僅蝕刻所述銀層20,但不腐蝕所述銅線路層40。
所述第二實施方式的電路板200的製作方法還可包括對所述絕緣基板10進行蝕刻,以消除殘留的未被所述銅線路層40覆蓋的銀層20。其中,蝕刻所述絕緣基板10的第二蝕刻液不腐蝕所述銅線路層40及所述銀線路層50。
在其他實施方式中,還可在每一銅線路層40遠離所述絕緣基板10的一側壓覆一覆蓋膜(圖未示)。
本發明提供的電路板的製作方法,藉由銀線路層50連接所述銅線路層40與所述絕緣基板10,使得所述銅線路層40與所述絕緣基板10之間結合力提高。
另,由於銀線路層50連接所述銅線路層40與所述絕緣基板10之間,故使用僅腐蝕所述銀層係然不腐蝕所述銅線路層的第一蝕刻液時,可適當延長蝕刻時間以改善整體線路底部殘足的問題,但不影響整體線路頂部的線寬,使得電路板製作時無需增加線路補償,降低了製程的難度。另,所述銀層20及銀導電結構21藉由奈米銀顆粒的銀漿塗佈形成,使得所述銀層20及銀導電結構21表面細緻光滑,導電性佳。
另,對於本領域的普通技術人員來說,可根據本發明的技術構思做出其它各種相應的改變與變形,而所有該等改變與變形均應屬於本發明申請專利範圍的保護範圍。
100、200‧‧‧電路板
10‧‧‧絕緣基板
11、71‧‧‧通孔
101‧‧‧第一表面
103‧‧‧第二表面
20‧‧‧銀層
21‧‧‧銀導電結構
30‧‧‧感光膜
31‧‧‧圖案
310‧‧‧開口
40‧‧‧銅線路層
50‧‧‧銀線路層
60‧‧‧薄銅層
70‧‧‧中間體
圖1為本發明第一實施方式中使用的絕緣基板上形成通孔的截面示意圖。
圖2為在圖1所示的絕緣基板上形成銀層的截面示意圖。
圖3為在圖2所示的銀層遠離絕緣基板的一側壓覆一感光膜的截面示意圖。
圖4為將圖3所示的感光膜曝光顯影後形成圖案的截面示意圖。
圖5為在圖4所示的圖案進行鍍銅形成銅線路層的截面示意圖。
圖6為將圖5中的感光膜剝離後的截面示意圖。
圖7為對圖6中的銀層進行蝕刻形成銀線路層的截面示意圖。
圖8為對圖7中的絕緣基板進行蝕刻後的截面示意圖。
圖9為本發明第二實施方式中在一絕緣基板的二側分別形成銀層及薄銅層形成中間體的截面示意圖。
圖10為在圖9所示的中間體上開設通孔的截面示意圖。
圖11為對圖9所示的通孔進行黑影工藝處理後的截面示意圖。
圖12為在圖11中的薄銅層遠離絕緣基板的一側壓覆感光膜的截面示意圖。
圖13為對圖12所示的感光膜進行曝光顯影形成圖案的截面示意圖。
圖14為對圖13所示的圖案鍍銅形成銅線路層的截面示意圖。
圖15為將圖14中的感光膜剝離後的截面示意圖。
圖16為對圖15中的薄銅層進行酸洗後的截面示意圖。
圖17為對圖16中的銀層進行蝕刻形成銀線路層的截面示意圖。

Claims (15)

  1. 一種電路板的製作方法,其包括以下步驟: 提供一絕緣基板,並在所述絕緣基板上開設至少一貫穿所述絕緣基板的二相對表面的通孔; 在所述二相對表面分別形成一銀層,並在所述通孔內形成一連接二銀層的銀導電結構; 對帶有所述銀層及所述銀導電結構的絕緣基板進行鍍銅以形成一銅線路層,所述銅線路層覆蓋所述銀導電結構及所述銀層的部分區域;及 藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層,所示第一蝕刻液不腐蝕所述銅線路層。
  2. 如申請專利範圍第1項所述的電路板的製作方法,其中,所述銀線路層中各線路的線寬小於所述銅線路層中對應的線路的線寬,所述銀線路層中各線路之間的間距大於所述銅線路層中對應的線路之間的間距。
  3. 如申請專利範圍第1項所述的電路板的製作方法,其中,步驟“在所述二相對表面分別形成一銀層,並在所述通孔內形成一連接二銀層的銀導電結構”具體包括: 將含有奈米銀顆粒的銀漿塗佈於所述絕緣基板的所述二相對表面及所述通孔,並進行烘烤以將所述二相對表面的銀漿固化形成二銀層,並將每一通孔內的銀漿固化形成一銀導電結構。
  4. 如申請專利範圍第3項所述的電路板的製作方法,其中,所述奈米銀顆粒的粒徑小於100奈米。
  5. 如申請專利範圍第1項所述的電路板的製作方法,其中,每一銀層的厚度為0.15微米至0.3微米。
  6. 如申請專利範圍第1項所述的電路板的製作方法,其中,步驟“對帶有所述銀層及所述銀導電結構的絕緣基板進行鍍銅以形成一銅線路層,所述銅線路層覆蓋所述銀導電結構及所述銀層的部分區域”具體包括: 在每一銀層遠離所述絕緣基板的一側壓覆一感光膜以覆蓋所述銀層及所述銀導電結構; 對所述感光膜進行曝光顯影以在所述感光膜上形成圖案,所述圖案包括對應所述銀導電結構的開口,且所述圖案除所述開口外還與所述銀層相對; 對應所述圖案鍍銅以形成銅線路層,且所述銅線路層覆蓋所述銀導電結構及所述銀層的部分區域;及 將所述曝光顯影後的感光膜剝離。
  7. 如申請專利範圍第1項所述的電路板的製作方法,其中,所述電路板的製作方法在步驟“藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層”後還包括: 藉由第二蝕刻液對所述絕緣基板進行蝕刻,以消除殘留的未被所述銅線路層覆蓋的銀層,其中,所述第二蝕刻液不腐蝕所述銅線路層及所述銀線路層。
  8. 一種電路板的製作方法,其包括以下步驟: 在一絕緣基板的二相對表面分別形成一銀層,並在每一銀層遠離所述絕緣基板的表面形成一薄銅層,從而形成一中間體; 在所述中間體上開設至少一通孔,所述通孔貫穿二薄銅層; 對帶有所述通孔的中間體進行鍍銅以形成一銅線路層,所述銅線路層包括對應所述通孔形成的銅導電結構以連接二薄銅層,且所述銅線路層覆蓋所述銀層的部分區域;及 對所述薄銅層進行酸洗,以去除未被所述銅線路層覆蓋的薄銅層; 藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層,所示第一蝕刻液不腐蝕所述銅線路層。
  9. 如申請專利範圍第8項所述的電路板的製作方法,其中,所述銀線路層中各線路的線寬小於所述銅線路層中對應的線路的線寬,所述銀線路層中各線路之間的間距大於所述銅線路層中對應的線路之間的間距。
  10. 如申請專利範圍第8項所述的電路板的製作方法,其中,步驟“在所述二相對表面分別形成一銀層”具體包括: 將含有奈米銀顆粒的銀漿塗佈於所述絕緣基板的所述二相對表面,並進行烘烤以將所述二相對表面的銀漿固化形成二銀層。
  11. 如申請專利範圍第10項所述的電路板的製作方法,其中,所述奈米銀顆粒的粒徑小於100奈米。
  12. 如申請專利範圍第8項所述的電路板的製作方法,其中,每一銀層的厚度為0.15微米至0.3微米。
  13. 如申請專利範圍第8項所述的電路板的製作方法,其中,步驟“對帶有所述通孔的中間體進行鍍銅以形成一銅線路層,所述銅線路層包括對應所述通孔形成的銅導電結構以連接二薄銅層,且所述銅線路層覆蓋所述銀層的部分區域”具體包括: 在每一薄銅層遠離所述絕緣基板的一側壓覆一感光膜以覆蓋所述薄銅層及所述通孔; 對所述感光膜進行曝光顯影以在所述感光膜上形成圖案,所述圖案包括對應所述通孔的開口,且所述圖案除所述開口外還與所述薄銅層相對; 對應所述圖案鍍銅以形成銅線路層,且所述銅線路層包括對應所述通孔形成的銅導電結構以連接二薄銅層,且所述銅線路層覆蓋所述銀層的部分區域;及 將所述曝光顯影後的感光膜剝離。
  14. 如申請專利範圍第8項所述的電路板的製作方法,其中,所述電路板的製作方法在步驟“在所述中間體上開設至少一通孔,所述通孔貫穿二薄銅層”後,步驟“對帶有所述通孔的中間體進行鍍銅以形成一銅線路層”前還包括: 對所述通孔進行黑影工藝處理。
  15. 如申請專利範圍第8項所述的電路板的製作方法,其中,所述電路板的製作方法在步驟“藉由第一蝕刻液將所述銀層蝕刻成與所述銅線路層對應的銀線路層”後還包括: 藉由第二蝕刻液對所述絕緣基板進行蝕刻,以消除殘留的未被所述銅線路層覆蓋的銀層,其中,所述第二蝕刻液不腐蝕所述銅線路層及所述銀線路層。
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