TW201743671A - Manufacturing method of high-density multilayer board - Google Patents
Manufacturing method of high-density multilayer board Download PDFInfo
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本發明涉及一種多層板之製造方法,特別是涉及一種高密度增層多層板之製造方法。 The present invention relates to a method of manufacturing a multilayer board, and more particularly to a method of manufacturing a high density layered multilayer board.
印刷電路板是許多電子產品(如智慧型手機)中不可或缺的元件之一,其功能在於提供不同電子元件之間的電子訊號傳輸;隨著印刷電路板(printed circuit board,PCB)及電子元件製作技術的進步,印刷電路板及電子元件的設計亦隨之朝向小尺寸的方向,以符合現行電子產品微型化的需求。然而,在印刷電路板的體積或厚度減少的同時,伴隨而來的缺點是印刷電路板上可用的佈線面積亦相對減少,遂有多層印刷電路板的佈局設計相應被提出,以在不增加印刷電路板尺寸的前提下,增加可佈線的面積。 Printed circuit boards are one of the indispensable components of many electronic products (such as smart phones). Their function is to provide electronic signal transmission between different electronic components; along with printed circuit boards (PCBs) and electronics. Advances in component fabrication technology, the design of printed circuit boards and electronic components have also moved toward small dimensions to meet the current miniaturization of electronic products. However, while the volume or thickness of the printed circuit board is reduced, the attendant disadvantage is that the wiring area available on the printed circuit board is relatively reduced, and the layout design of the multilayer printed circuit board is correspondingly proposed so as not to increase the printing. Increase the area of the wiring under the premise of the board size.
為了減少印刷電路板的體積或厚度,目前業界多採用高密度互連(high density interconnection,HDI)技術,目的在於以相同或更小的體積或厚度形成更為密集的線路連接。HDI技術主要是透過雷射微鑽盲孔、細線寬及高性能的薄型材料等各種手段來達成線路高密度化,進而大幅提升單位面積上的連接功能。此外,任意層高密度連接板(any layer HDI)的設計更包含了電鍍填孔堆疊式的微盲孔結構,故可達到更為複雜的層間互連。 In order to reduce the size or thickness of printed circuit boards, high density interconnection (HDI) technology is currently used in the industry in order to form denser line connections with the same or smaller volume or thickness. HDI technology mainly achieves high density of lines through laser micro-drilling blind holes, thin line widths and high-performance thin materials, thereby greatly improving the connection function per unit area. In addition, the design of any layer of high-density interconnector (any layer HDI) includes a micro-blind hole structure with a plated and filled-hole stack, so that more complicated interlayer interconnection can be achieved.
一般而言,HDI技術僅使用單一核心板(core substrate),並採 用增層法(build-up method)從核心板的單面或雙面向外連續增層,其中每一次增層均涉及壓合半固化片及銅箔、雷射鑽孔、孔內金屬化及線路製作(曝光、顯影、蝕刻等程序),並依照所需層數重覆前述步驟數次以完成多層印刷電路板。因為HDI技術的高精密性,所以在所有製程中都須儘量避免板面發生彎曲變形,並確保所形成的埋孔、盲孔等層間電性連接結構的位置變動在可控制的範圍內,舉例來說,若在壓合過程中板面變形的現象過於嚴重,則成品將無法符合所需的要求而遭報廢,造成成本上的浪費。 In general, HDI technology uses only a single core substrate. The build-up method is used to continuously add layers from one side or both sides of the core board, each of which involves pressing the prepreg and copper foil, laser drilling, hole metallization and wiring. The process (exposure, development, etching, etc.) is performed, and the foregoing steps are repeated several times in accordance with the required number of layers to complete the multilayer printed circuit board. Because of the high precision of HDI technology, it is necessary to avoid bending deformation of the board surface in all processes, and to ensure that the positional variation of the interlayer electrical connection structure such as buried holes and blind holes is within a controllable range. In other words, if the deformation of the board surface is too serious during the pressing process, the finished product will not be able to meet the required requirements and be scrapped, resulting in waste of cost.
有鑑於現有技術存在之缺失,本發明之主要目的在於提供一種高密度增層多層板之製造方法,其可突破傳統製程中的限制(如多層板的層數因製程而有所限制),且因為製程裕度較大而可製作技術層別的多層板(如層數為單數的多層板)。 In view of the absence of the prior art, the main object of the present invention is to provide a method for manufacturing a high-density multi-layered multi-layer board, which can break through the limitations in the conventional process (for example, the number of layers of the multi-layer board is limited by the process), and Multi-layer boards of technical layers (such as multi-layer boards with a single number of layers) can be made because of the large process margin.
根據本發明的一較佳的實施例,所述高密度增層多層板之製造方法,包括以下步驟:將一第一核心板與一第二核心板貼合,其中該第一核心板的外側具有一第一核心線路層,該第二核心板的外側具有一第二核心線路層;依照所需層數,同時於該第一核心板及該第二核心板的外側進行增層製程,以於該第一核心線路層上形成至少一線路化的第一增層結構,並於該第二核心線路層上形成與至少一線路化的該第一增層結構數量相同的至少一線路化的第二增層結構;以及將貼合在一起的該第一核心板與該第二核心板分離。 According to a preferred embodiment of the present invention, the method for manufacturing the high-density multi-layered multi-layer board comprises the steps of: bonding a first core board to a second core board, wherein the outer side of the first core board Having a first core circuit layer, the outer side of the second core board has a second core circuit layer; according to the required number of layers, the layering process is simultaneously performed on the outer side of the first core board and the second core board, Forming at least one lined first buildup structure on the first core circuit layer, and forming at least one lined on the second core circuit layer in the same number as the at least one lined first buildup structure a second build-up structure; and separating the first core plate that is bonded together from the second core plate.
更進一步地,在將該第一核心板與該第二核心板貼合的步驟中,該第一核心板與該第二核心板是藉由一膠合層貼合在一起。 Further, in the step of bonding the first core board and the second core board, the first core board and the second core board are bonded together by a glue layer.
更進一步地,在同時於該第一核心板及該第二核心板的外側進行增層製程的步驟中,更包括:於最外側的線路化的該第一增 層結構上形成一第一增層結構,並於最外側的線路化的該第二增層結構上形成一第二增層結構。 Further, in the step of performing the build-up process on the outer side of the first core board and the second core board, the method further includes: the first increase in the outermost line A first build-up structure is formed on the layer structure, and a second build-up structure is formed on the outermost routed second build-up structure.
更進一步地,在將貼合在一起的該第一核心板與該第二核心板分離的步驟之後,更包括以下步驟:同時將該第一增層結構及該第一核心板線路化,以得到一第一多層板;以及依照所需層數,同時於該第一多層板的兩側進行增層製程。 Further, after the step of separating the first core board and the second core board that are bonded together, the method further includes the following steps: simultaneously linearizing the first build-up structure and the first core board to Obtaining a first multi-layer board; and performing a build-up process on both sides of the first multi-layer board in accordance with the required number of layers.
更進一步地,其中在同時於該第一多層板的兩側進行增層製程的步驟之後,更包括以下步驟:同時將該第二增層結構及該第二核心板線路化,以得到一第二多層板;以及依照所需層數,同時於該第二多層板的兩側進行增層製程。 Further, after the step of performing the build-up process on both sides of the first multi-layer board, the method further includes the step of simultaneously linearizing the second build-up structure and the second core board to obtain a a second multilayer board; and a build-up process on both sides of the second multilayer board in accordance with the desired number of layers.
更進一步地,在同時於該第二多層板的兩側進行增層製程的步驟之後,更包括以下步驟:於增層後的該第一多層板的外側及內側分別形成一第一增層結構;於增層後的該第二多層板的外側及內側分別形成一第二增層結構;以及將增層後的該第一多層板與增層後的該第二多層板貼合,其中增層後的該第一多層板內側的該第一增層結構與增層後的該第二多層板內側的該第二增層結構相連接。 Further, after the step of performing the build-up process on both sides of the second multi-layered board, the method further comprises the steps of: forming a first increase on the outer side and the inner side of the first multi-layered board after the layering a layer structure; a second build-up structure is formed on the outer side and the inner side of the second multi-layer board after the layering; and the first multi-layer board after the layering and the second multi-layer board after the layering And bonding, wherein the first build-up structure on the inner side of the layered first multilayer board is connected to the second build-up structure on the inner side of the second layer board after the build-up.
更進一步地,在將增層後的該第一多層板與增層後的該第二多層板貼合的步驟之後,更包括以下步驟:同時將增層後的該第一多層板外側的該第一增層結構與增層後的該第二多層板外側的該第二增層結構線路化;以及依照所需層數,同時於線路化的該第一增層結構及線路化的該第二增層結構的外側進行增層製程。 Further, after the step of bonding the layered first multi-layer board to the layered second multi-layer board, the method further comprises the step of: simultaneously adding the layered first multi-layer board The first build-up structure on the outer side and the second build-up structure on the outer side of the second multi-layer board after the layering are lined; and the first build-up structure and the line are simultaneously lined according to the required number of layers The outer side of the second build-up structure is subjected to a build-up process.
更進一步地,在同時於線路化的該第一增層結構及線路化的該第二增層結構的外側進行增層製程的步驟之後,更包括以下步驟:於最外側的線路化的該第一增層結構上形成一第一增層結構,並同時於最外側的線路化的該第二增層結構上形成一第二增層結構;將增層後的該第一多層板與增層後的該第二多層板分離;以及將增層後的該第一多層板的外側及內側的兩個該第一增 層結構線路化,以得到一第一高密度增層多層板,並同時將增層後的該第二多層板的外側及內側的兩個該第二增層結構線路化,以得到一第二高密度增層多層板。 Further, after the step of performing the build-up process on the outer side of the lined first build-up structure and the routed second build-up structure, the method further includes the step of: arranging the outermost line Forming a first build-up structure on a build-up structure, and simultaneously forming a second build-up structure on the outermost routed second build-up structure; adding the first multilayer board after the build-up Separating the second multilayer board after the layer; and two first increase of the outer side and the inner side of the first multilayer board after the layering The layer structure is lined to obtain a first high-density layered multi-layer board, and at the same time, the two outer layer structures of the outer layer and the inner side of the layered second multi-layer board are lined to obtain a first Two high-density layered multi-layer boards.
更進一步地,在得到該第一高密度增層多層板及該第二高密度增層多層板的步驟之後,更包括:依照所需層數,同時於該第一高密度增層多層板的兩側進行增層製程。 Further, after the step of obtaining the first high-density multi-layered multi-layer board and the second high-density multi-layer multi-layer board, the method further comprises: simultaneously, according to the required number of layers, simultaneously on the first high-density layer-added multi-layer board The build-up process is carried out on both sides.
更進一步地,在同時於該第一高密度增層多層板的兩側進行增層製程的步驟之後,更包括:依照所需層數,同時於該第二高密度增層多層板的兩側進行增層製程。 Further, after the step of performing the build-up process on both sides of the first high-density multi-layered board, the method further comprises: simultaneously, according to the required number of layers, on both sides of the second high-density multi-layered board Carry out the layering process.
本發明至少具有以下有益效果:本發明實施例所提供的高密度增層多層板之製造方法可突破傳統製程“僅使用單一核心板,並於此核心板的一側或兩側形成線路化的增層結構”的限制,且可有效避免盲孔底端被擊穿及板面彎曲變形的問題,進而提高印刷電路板的佈線密度及可靠度。 The invention has at least the following beneficial effects: the manufacturing method of the high-density multi-layered multi-layer board provided by the embodiment of the invention can break through the traditional process “only use a single core board, and form a line on one side or both sides of the core board The limitation of the build-up structure can effectively avoid the problem that the bottom end of the blind hole is broken down and the plate surface is bent and deformed, thereby improving the wiring density and reliability of the printed circuit board.
為使能更進一步瞭解本發明之特徵及技術內容,請參閱以下有關本發明之詳細說明與附圖,但是此等說明與所附圖式僅係用來說明本發明,而非對本發明的權利範圍作任何的限制。 The detailed description of the present invention and the accompanying drawings are to be understood by the claims The scope is subject to any restrictions.
1‧‧‧第一高密度增層多層板 1‧‧‧First high-density multi-layer laminate
10‧‧‧第一多層板 10‧‧‧First Multilayer Board
11‧‧‧第一核心板 11‧‧‧First core board
111‧‧‧第一核心絕緣層 111‧‧‧First core insulation
112‧‧‧第一核心導電層 112‧‧‧First core conductive layer
2‧‧‧第二高密度增層多層板 2‧‧‧Second high-density multi-layer laminate
20‧‧‧第二多層板 20‧‧‧Second multilayer board
21‧‧‧第二核心板 21‧‧‧Second core board
211‧‧‧第二核心絕緣層 211‧‧‧Second core insulation
212‧‧‧第二核心導電層 212‧‧‧Second core conductive layer
112a‧‧‧第一核心線路層 112a‧‧‧First core circuit layer
113‧‧‧第一導電結構 113‧‧‧First conductive structure
12‧‧‧線路化的第一增層結構 12‧‧‧Lined first build-up structure
120‧‧‧第一增層結構 120‧‧‧First buildup structure
121‧‧‧第一增層絕緣層 121‧‧‧First buildup insulation
122‧‧‧第一導電結構 122‧‧‧First conductive structure
123‧‧‧第一增層導電層 123‧‧‧First build-up conductive layer
123a‧‧‧第一增層線路層 123a‧‧‧First build-up circuit layer
212a‧‧‧第二核心線路層 212a‧‧‧Second core circuit layer
213‧‧‧第二導電結構 213‧‧‧Second conductive structure
22‧‧‧線路化的第二增層結構 22‧‧‧Linear second build-up structure
220‧‧‧第二增層結構 220‧‧‧Second layered structure
221‧‧‧第二增層絕緣層 221‧‧‧Second build-up insulation
222‧‧‧第二導電結構 222‧‧‧Second conductive structure
223‧‧‧第二增層導電層 223‧‧‧Second build-up conductive layer
223a‧‧‧第二增層線路層 223a‧‧‧Second layered circuit layer
S101~S104‧‧‧步驟 S101~S104‧‧‧Steps
S201~S207‧‧‧步驟 S201~S207‧‧‧Steps
圖1為本發明第一實施例之高密度增層多層板之製造方法的流程示意圖。 1 is a schematic flow chart showing a method of manufacturing a high-density build-up multilayer board according to a first embodiment of the present invention.
圖2至圖7為本發明第一實施例之高密度增層多層板之製造方法的製程示意圖。 2 to 7 are schematic views showing the process of manufacturing a high-density build-up multilayer board according to a first embodiment of the present invention.
圖8為本發明第二實施例之高密度增層多層板之製造方法的流程示意圖。 Fig. 8 is a flow chart showing a method of manufacturing a high-density build-up multilayer board according to a second embodiment of the present invention.
圖9至圖11為本發明第二實施例之高密度增層多層板之製造方法的製程示意圖。 9 to 11 are schematic views showing the process of manufacturing a high-density build-up multilayer board according to a second embodiment of the present invention.
本發明所揭露的內容主要是關於一種任意層HDI多層印刷電路板的創新製法,有別於傳統製法僅使用單一核心板,並於此核心板的一側或兩側形成線路化的增層結構,本創新製法透過“先將兩核心板貼合,再依照所需層數,同時於兩核心板的外側進行增層製程”以及“先將貼合在一起的兩核心板分離,再依照所需層數,同時於其中一核心板的兩側進行增層製程,並同時於其中另一核心板的兩側進行增層製程”的流程設計,由於單一核心板或包括兩核心板的多層板於進行增層或壓合等製程時,施加於多層板的兩側的作用力均達到相互平衡,因此可有效避免板面彎曲變形的問題。 The disclosure of the present invention mainly relates to an innovative manufacturing method of an arbitrary layer HDI multilayer printed circuit board, which is different from the conventional method in that only a single core board is used, and a line-up layered structure is formed on one side or both sides of the core board. The innovative method is to "separate the two core plates first, and then carry out the layering process on the outer side of the two core plates according to the required number of layers" and "separate the two core plates that are attached together first, and then according to the The number of layers is required, and the process of layering is performed on both sides of one core board, and the process of adding layers on both sides of the core board is simultaneously performed, because a single core board or a multi-layer board including two core boards When the processes such as layering or pressing are performed, the forces applied to both sides of the multilayer board are balanced with each other, so that the problem of bending deformation of the board surface can be effectively avoided.
除此之外,本創新製法透過上述的流程設計,任意層別皆可使用改進型半加成法(Modified Semi Additive Process,MSAP)來形成,以提升線路等級;再者,由於兩核心板結合和分離的時機可根據線路等級進行調整,因此本創新製法可具有較寬廣的製程裕度。 In addition, this innovative method is designed through the above process, and any layer can be formed by using Modified Semi Additive Process (MSAP) to improve the line level. Furthermore, due to the combination of the two core boards The timing of the separation and the timing can be adjusted according to the line level, so this innovative method can have a wide process margin.
在下文將參看隨附圖式更充分地描述各種例示性實施例,在隨附圖式中展示一些例示性實施例。然而,本發明概念可能以許多不同形式來體現,且不應解釋為限於本文中所闡述之例示性實施例。確切而言,提供此等例示性實施例使得本發明將為詳盡且完整,且將向熟習此項技術者充分傳達本發明概念的範疇。在諸圖式中,可為了清楚而誇示層及區之大小及相對大小。類似數字始終指示類似元件。 Various illustrative embodiments are described more fully hereinafter with reference to the accompanying drawings. However, the inventive concept may be embodied in many different forms and should not be construed as being limited to the illustrative embodiments set forth herein. Rather, these exemplary embodiments are provided so that this invention will be in the In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Similar numbers always indicate similar components.
應理解,雖然本文中可能使用術語第一、第二、第三等來描述各種元件或信號等,但此等元件或信號不應受此等術語限制。此等術語乃用以區分一元件與另一元件,或者一信號與另一信號。另外,如本文中所使用,術語「或」視實際情況可能包括相關聯之列出項目中之任一者或者多者之所有組合。 It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements or signals and the like, such elements or signals are not limited by the terms. These terms are used to distinguish one element from another, or a signal and another. In addition, as used herein, the term "or" may include all combinations of any one or more of the associated listed items.
請參見圖1,為本發明第一實施例之高密度增層多層板之製造方法的流程示意圖。如圖所示,所述高密度增層多層板之製造方法包括:步驟S101,將第一核心板與第二核心板貼合;步驟S102,同時於第一核心板及第二核心板的外側進行增層製程;步驟S103,將貼合在一起的第一核心板與第二核心板分離;以及步驟S104,同時於第一核心板的兩側進行增層製程,以得到第一多層板,並同時於第二核心板的兩側進行增層製程,以得到第二多層板。 1 is a schematic flow chart of a method for manufacturing a high-density build-up multilayer board according to a first embodiment of the present invention. As shown in the figure, the manufacturing method of the high-density multi-layered multi-layer board comprises: step S101, bonding the first core board and the second core board; and step S102, simultaneously on the outer side of the first core board and the second core board; Performing a layering process; step S103, separating the first core plate and the second core plate that are bonded together; and step S104, simultaneously performing a layering process on both sides of the first core plate to obtain the first multilayer board And at the same time, a build-up process is performed on both sides of the second core board to obtain a second multi-layer board.
步驟S101中,參見圖2及圖3所示,第一核心板11的主體為一第一核心絕緣層111,且外側及內側各具有一第一核心導電層112,第二核心板21的主體為一第二核心絕緣層211,且外側及內側各具有一第二核心導電層212。實務上,第一核心板11可透過一膠合層(未標示)與第二核心板21暫時結合,例如,第一和第二核心板11、21可藉由熱壓方式而直接貼附於膠合層的相對二表面上,然本發明並不限制於此;此後,可再利用曝光、微影、蝕刻等製程將外側的第一和第二核心導電層112、212圖案化,也就是將電路圖案分別轉移到第一和第二核心板11、21的外側,以於第一核心板11的外側形成一第一核心線路層112a,並於第二核心板21的外側形成一第二核心線路層212a。 In the step S101, as shown in FIG. 2 and FIG. 3, the main body of the first core board 11 is a first core insulating layer 111, and each of the outer and inner sides has a first core conductive layer 112, and the main body of the second core board 21 The second core insulating layer 211 has a second core conductive layer 212 on the outer side and the inner side. In practice, the first core board 11 can be temporarily combined with the second core board 21 through a glue layer (not shown). For example, the first and second core boards 11 and 21 can be directly attached to the glue by hot pressing. On the opposite surfaces of the layer, the invention is not limited thereto; thereafter, the outer first and second core conductive layers 112, 212 may be patterned by exposure, lithography, etching, etc., that is, the circuit The patterns are respectively transferred to the outer sides of the first and second core boards 11, 21 to form a first core circuit layer 112a on the outer side of the first core board 11, and a second core line on the outer side of the second core board 21. Layer 212a.
本實施例中,第一和第二核心板11、21的材質可以是金屬壓合芯層板(如樹脂壓合銅箔),其中第一和第二核心絕緣層111、211的材質可以是聚丙烯(polypropylene,PP)、環氧樹脂(epoxy resin)、聚亞醯胺(polyimide)等,第一和第二核心導電層112、212的材質可以是金、銀、銅、鋁等,然本發明並不限制於此。 In this embodiment, the material of the first and second core insulating layers 111, 21 may be a metal laminated core layer (such as a resin laminated copper foil), wherein the materials of the first and second core insulating layers 111, 211 may be Polypropylene (PP), epoxy resin, polyimide, etc., the first and second core conductive layers 112, 212 may be made of gold, silver, copper, aluminum, etc. The invention is not limited thereto.
步驟S102中,參見圖4所示,可依照所需層數,同時於包括第一和第二核心板11、21的層疊結構的兩側進行增層製程,以 於第一核心線路層112a上形成至少一線路化的第一增層結構12,並於第二核心線路層212a上形成至少一線路化的第二增層結構22,其中線路化的第一增層結構12與線路化的第二增層結構22的層數相同,也就是貼合在一起的第一和第二核心板11、21的兩側具有相對稱的佈線結構。須說明的是,雖然圖4僅顯示進行一次增層製程後的所述層疊結構,但是步驟S102中並不因此限制僅能進行一次增層製程。 In step S102, as shown in FIG. 4, the layer-adding process may be performed on both sides of the stacked structure including the first and second core plates 11, 21 in accordance with the required number of layers. Forming at least one lined first buildup structure 12 on the first core circuit layer 112a, and forming at least one lined second buildup structure 22 on the second core circuit layer 212a, wherein the first increase of the line The layer structure 12 has the same number of layers as the lined second build-up structure 22, that is, both sides of the first and second core sheets 11, 21 which are bonded together have a symmetrical wiring structure. It should be noted that although FIG. 4 only shows the laminated structure after performing one build-up process, step S102 does not limit the process of only one build-up process.
更進一步來說,線路化的第一和第二增層結構12、22可利用以下方式製作:首先,於第一核心線路層112a上形成一第一增層絕緣層121,並同時於第二核心線路層212a上形成一第二增層絕緣層221,其中第一和第二增層絕緣層221可以是有機材質;接著,於第一增層絕緣層121中形成與第一核心線路層112a電性連接的第一導電結構122,並同時於第二增層絕緣層221中形成與第二核心線路層212a電性連接的第二導電結構222,其中第一和第二導電結構122、222可以是導電盲孔或導電柱;最後,於第一增層絕緣層121上形成與第一導電結構122電性連接的第一增層線路層123a,並於第二增層絕緣層221上形成與第二導電結構222電性連接的第二增層線路層223a,其中第一和第二增層線路層123a、223a可以是金屬材質。 Furthermore, the lined first and second build-up structures 12, 22 can be fabricated by first forming a first build-up insulating layer 121 on the first core circuit layer 112a, and simultaneously at the second A second build-up insulating layer 221 is formed on the core circuit layer 212a. The first and second build-up insulating layers 221 may be organic materials. Then, the first core circuit layer 112a is formed in the first build-up insulating layer 121. The first conductive structure 122 is electrically connected, and the second conductive structure 222 electrically connected to the second core circuit layer 212a is formed in the second build-up insulating layer 221, wherein the first and second conductive structures 122, 222 are formed. The conductive via hole or the conductive pillar may be formed. Finally, the first build-up wiring layer 123a electrically connected to the first conductive structure 122 is formed on the first build-up insulating layer 121, and formed on the second build-up insulating layer 221 The second build-up wiring layer 223a electrically connected to the second conductive structure 222, wherein the first and second build-up wiring layers 123a, 223a may be made of a metal material.
承上述,熟悉本領域的技術人員應了解形成第一和第二增層絕緣層121、221、第一和第二導電結構122、222與第一和第二增層線路層123a、223a的相關製程技術,例如,第一和第二增層絕緣層121、221可利用壓合方式來形成,第一和第二導電結構122、222的製作方式包括:先利用雷射鑽孔、化學蝕刻或電漿(plasma)蝕刻等技術於第一和第二增層絕緣層121、221中形成開口(圖未示),然後再利用化學鍍或電鍍方式於開口中沉積金屬,第一和第二增層線路層123a、223a可利用一般曝光、微影、蝕刻等製程來形成。由此可知製程變化與選擇性極多,故於此不多加贅述。 In view of the above, those skilled in the art will appreciate that the formation of the first and second build-up insulating layers 121, 221, the first and second conductive structures 122, 222 are related to the first and second build-up wiring layers 123a, 223a. The process technology, for example, the first and second build-up insulating layers 121, 221 may be formed by a press-fit manner, and the first and second conductive structures 122, 222 are formed by: first using laser drilling, chemical etching, or A plasma etching technique or the like forms openings in the first and second build-up insulating layers 121, 221 (not shown), and then deposits metal in the openings by electroless plating or electroplating, first and second increases. The layer wiring layers 123a, 223a can be formed by processes such as general exposure, lithography, etching, and the like. It can be seen that the process variation and selectivity are extremely numerous, so it is not mentioned here.
步驟S103中,可利用有機溶劑將膠合層溶解,以使第一核心板11與第二核心板21分離。須說明的是,參見圖4所示,若是直接將第一核心板11與第二核心板21分離,則會得到兩個非對稱結構之多層板,然而非對稱結構之多層板不利於同時從雙面進行加工,而可能造成板面彎曲變形。因此,參見圖5及圖6A所示,於步驟S102中,更進一步於最外側的線路化的第一增層結構12上形成一第一增層結構120,並同時於最外側的線路化的第二增層結構22上形成一第二增層結構220,其中第一增層結構120不包括導電結構與線路圖案,僅包括一第一增層絕緣層121及一覆蓋第一增層絕緣層121的第一增層導電層123,第二增層結構220也不包括導電結構與線路圖案,僅包括一第二增層絕緣層221及一覆蓋第二增層絕緣層221的第二增層導電層223。 In step S103, the glue layer may be dissolved using an organic solvent to separate the first core plate 11 from the second core plate 21. It should be noted that, as shown in FIG. 4, if the first core board 11 and the second core board 21 are directly separated, two asymmetric boards of the asymmetric structure are obtained, but the asymmetric structure of the multi-layer board is disadvantageous for simultaneous Processing on both sides may cause bending deformation of the board surface. Therefore, referring to FIG. 5 and FIG. 6A, in step S102, a first build-up structure 120 is further formed on the outermost lined first build-up structure 12, and simultaneously on the outermost line. A second build-up structure 220 is formed on the second build-up structure 22, wherein the first build-up structure 120 does not include a conductive structure and a line pattern, and includes only a first build-up insulating layer 121 and a first build-up insulating layer. The first build-up conductive layer 123 of the 121, the second build-up structure 220 also does not include the conductive structure and the wiring pattern, and includes only a second build-up insulating layer 221 and a second build-up layer covering the second build-up insulating layer 221 Conductive layer 223.
承上述,參見圖6A及圖6B所示,於第一核心板11與第二核心板21分離之後(步驟S103),即可同時將第一增層結構120與由第一核心絕緣層111與第一核心導電層112組成的疊層結構線路化,以得到相對稱結構之第一多層板10,以及同時將第二增層結構220與由第二核心絕緣層211與第二核心導電層212組成的疊層結構線路化,以得到相對稱結構之第二多層板20。如圖6B所示,第一和第二多層板10、20可以是四層板,但不限於此。 As shown in FIG. 6A and FIG. 6B, after the first core board 11 and the second core board 21 are separated (step S103), the first build-up structure 120 and the first core insulating layer 111 can be simultaneously The stacked structure composed of the first core conductive layer 112 is lined to obtain the first multi-layered board 10 of the symmetrical structure, and simultaneously the second build-up structure 220 and the second core insulating layer 211 and the second core conductive layer The laminate structure of 212 is routed to obtain a second multilayer board 20 of a symmetrical structure. As shown in FIG. 6B, the first and second multilayer boards 10, 20 may be four-layer boards, but are not limited thereto.
此處所提及的「線路化」是指,同時於第一核心絕緣層111及第一增層絕緣層121中形成第一導電結構113、122後,再同時將第一核心導電層112及第一增層導電層123圖案化,以轉移線路圖案使第一核心導電層112成型為第一核心線路層112a,並使第一增層導電層123成型為第一增層線路層123a,其中第一核心線路層112a、第一增層線路層123a與第一導電結構113、122之間彼此電性連接;另指同時於第二核心絕緣層211及第二增層絕緣層221中形成第二導電結構213、222後,再同時將第二核心導電層212及第二增層導電層223圖案化,以轉移線路圖案使第二 核心導電層212成型為第二核心線路層212a,並使第二增層導電層223成型為第二增層線路層223a,其中第二核心線路層212a、第二增層線路層223a與第二導電結構213、222之間彼此電性連接。 The term "lined" as used herein refers to simultaneously forming the first conductive structures 113, 122 in the first core insulating layer 111 and the first build-up insulating layer 121, and simultaneously bonding the first core conductive layer 112 and The first build-up conductive layer 123 is patterned, the first core conductive layer 112 is formed into the first core wiring layer 112a by the transfer line pattern, and the first build-up conductive layer 123 is formed into the first build-up wiring layer 123a. The first core circuit layer 112a, the first build-up circuit layer 123a and the first conductive structures 113, 122 are electrically connected to each other; and the second core insulating layer 211 and the second build-up insulating layer 221 are formed simultaneously. After the two conductive structures 213 and 222, the second core conductive layer 212 and the second build-up conductive layer 223 are simultaneously patterned to transfer the line pattern to make the second The core conductive layer 212 is formed into the second core circuit layer 212a, and the second build-up conductive layer 223 is formed into the second build-up circuit layer 223a, wherein the second core circuit layer 212a, the second build-up circuit layer 223a and the second The conductive structures 213, 222 are electrically connected to each other.
值得注意的是,參見圖7所示,由於第一和第二多層板10、20的各層保持對稱,因此可再依照所需層數,同時於第一多層板10的兩側進行增層製程,以於第一核心線路層112a及第一增層線路層123a上分別形成至少一線路化的第一增層結構12,以及同時於第二多層板20的兩側進行增層製程,以於第二核心線路層212a及第二增層線路層223a上分別形成至少一線路化的第二增層結構22。如圖7所示,增層後的第一和第二多層板10、20可以是六層板,但不限於此。 It should be noted that, as shown in FIG. 7, since the layers of the first and second multilayer boards 10, 20 are symmetrical, they can be further increased on both sides of the first multilayer board 10 according to the required number of layers. a layer process for forming at least one lined first build-up structure 12 on the first core circuit layer 112a and the first build-up line layer 123a, and simultaneously performing a build-up process on both sides of the second multilayer board 20 At least one lined second build-up structure 22 is formed on the second core circuit layer 212a and the second build-up circuit layer 223a, respectively. As shown in FIG. 7, the first and second multilayer boards 10, 20 after the layering may be a six-layer board, but are not limited thereto.
請參見圖8,為本發明第二實施例之高密度增層多層板之製造方法的流程示意圖。如圖所示,所述高密度增層多層板之製造方法包括:步驟S201,將第一核心板與第二核心板貼合;步驟S202,同時於第一核心板及第二核心板的外側進行增層製程;步驟S203,將貼合在一起的第一核心板與第二核心板分離;步驟S204,同時於第一核心板的兩側進行增層製程,以得到第一多層板,並同時於第二核心板的兩側進行增層製程,以得到第二多層板;步驟S205,將第一多層板與第二多層板貼合;步驟S206,同時於第一多層板及第二多層板的外側進行增層製程;以及步驟S207,將貼合在一起的第一多層板與第二多層板分離。 FIG. 8 is a schematic flow chart of a method for manufacturing a high-density build-up multilayer board according to a second embodiment of the present invention. As shown in the figure, the manufacturing method of the high-density multi-layered multi-layer board includes: step S201, bonding the first core board and the second core board; and step S202, simultaneously on the outer side of the first core board and the second core board Performing a layering process; in step S203, separating the first core plate and the second core plate that are bonded together; and in step S204, simultaneously performing a build-up process on both sides of the first core plate to obtain the first multilayer board. And simultaneously performing a build-up process on both sides of the second core board to obtain a second multi-layer board; in step S205, the first multi-layer board is bonded to the second multi-layer board; in step S206, simultaneously on the first multi-layer The outer side of the board and the second multi-layer board is subjected to a build-up process; and in step S207, the first multi-layer board which is bonded together is separated from the second multi-layer board.
須說明的是,本實施例所提供的高密度增層多層板之製造方法的步驟S201~S204的相關細節,大致同於前一實施例所提供的高密度增層多層板之製造方法的步驟S101~S104,於此便不多加贅述。兩者間的主要差異在於:依照所需的線路等級,本實施例 所提供的高密度增層多層板之製造方法在完成第一多層板10與第二多層板20後,進一步再將兩者暫時結合,並同時從由第一和第二多層板10、20組成的層疊結構的兩側向外增層,待增加到一定層數後便將兩者分離。 It should be noted that the relevant details of the steps S201 to S204 of the manufacturing method of the high-density multi-layered multi-layer board provided in this embodiment are substantially the same as the steps of the manufacturing method of the high-density multi-layered multi-layer board provided in the previous embodiment. S101~S104, there will be no more details here. The main difference between the two is: according to the required line level, this embodiment The manufacturing method of the high-density layered multi-layer board is provided, after the first multi-layer board 10 and the second multi-layer board 20 are completed, the two are further temporarily combined, and simultaneously from the first and second multi-layer boards 10 The two sides of the 20-layered laminated structure are layered outwardly, and are separated after being added to a certain number of layers.
具體地說,步驟S205中,參見圖9所示,第一多層板10也可透過一膠合層(圖未示)與第二多層板20暫時結合;類似地,為了使第一和第二多層板10、20的各層保持對稱,並有利於後續同時對雙面進行加工,第一多層板10的外側及內側須分別形成一第一增層結構120,第二多層板20的外側及內側也須分別形成一第二增層結構220,其中第一和第二增層結構120、220不包括導電結構與線路圖案。關於第一和第二增層結構120、220的製作方式及其他相關細節可參考前一實施例所述內容,於此便不多加贅述。 Specifically, in step S205, as shown in FIG. 9, the first multilayer board 10 can also be temporarily combined with the second multilayer board 20 through a glue layer (not shown); similarly, in order to make the first and the first The layers of the two multi-layer boards 10, 20 are symmetrical, and are beneficial for subsequent processing on both sides. The outer side and the inner side of the first multi-layer board 10 are respectively formed with a first build-up structure 120, and the second multi-layer board 20 The outer side and the inner side are also respectively formed with a second build-up structure 220, wherein the first and second build-up structures 120, 220 do not include a conductive structure and a line pattern. For the manner of making the first and second build-up structures 120, 220 and other related details, reference may be made to the content of the previous embodiment, and no further details are provided herein.
步驟S206中,參見圖10所示,在將第一和第二多層板10、20貼合後,須先同時將外側的第一增層結構120及外側的第二增層結構220線路化,此後便可依照所需層數,同時於由第一和第二多層板10、20組成的層疊結構的兩側進行增層。如圖9及圖10所示,所述層疊結構的層數從十六層增加到十八層,但不限於此。 In step S206, as shown in FIG. 10, after the first and second multi-layer boards 10, 20 are bonded together, the outer first layer-adding structure 120 and the outer second layer-up structure 220 must be lined together. Thereafter, the layers can be layered on both sides of the laminated structure composed of the first and second multilayer sheets 10, 20 in accordance with the desired number of layers. As shown in FIGS. 9 and 10, the number of layers of the laminated structure is increased from sixteen layers to eighteen layers, but is not limited thereto.
步驟S207中,參見圖11所示,考慮到後續對於第一多層板10或第二多層板20的雙面加工需求,故在將兩者分離之前,須於最外側的線路化的第一增層結構12上再形成一第一增層結構120,並同時於最外側的線路化的第二增層結構22上再形成一第二增層結構220,以使所述層疊結構的層數從十八層增加到二十層,但不限於此。此後,同時將位於第一多層板10兩側的第一增層結構120線路化,即可得到一第一高密度增層多層板1,並同時將位於第二多層板20兩側的第二增層結構220線路化,即可得到一第二高密度增層多層板2;如圖11所示,第一和第二高密度增層多層板1、2的層數均為十層,但不限於此。 In step S207, referring to FIG. 11, in consideration of the subsequent double-sided processing demand for the first multilayer board 10 or the second multilayer board 20, it is necessary to be in the outermost line before the two are separated. A first build-up structure 120 is further formed on a build-up structure 12, and a second build-up structure 220 is further formed on the outermost routed second build-up structure 22 to make the layer of the laminated structure The number is increased from eighteen to twenty, but is not limited to this. Thereafter, the first build-up structure 120 on both sides of the first multilayer board 10 is simultaneously lined to obtain a first high-density build-up multilayer board 1 and simultaneously located on both sides of the second multi-layer board 20. The second build-up structure 220 is lined to obtain a second high-density build-up multilayer board 2; as shown in FIG. 11, the first and second high-density build-up multilayer boards 1 and 2 have ten layers. , but not limited to this.
值得說明的是,本實施例所提供的高密度增層多層板之製造 方法在完成第一多層板10與第二多層板20後,視需求可再於第一高密度增層多層板1的兩側進行增層製程,以及再同時於第二高密度增層多層板2的兩側進行增層製程,以使第一和第二高密度增層多層板1、2的層數累積到更十層以上。 It should be noted that the manufacture of the high-density build-up multilayer board provided by the embodiment After the first multi-layer board 10 and the second multi-layer board 20 are completed, the layering process can be further performed on both sides of the first high-density layer-up multi-layer board 1 as needed, and at the same time in the second high-density layer-adding layer. The both sides of the multilayer board 2 are subjected to a build-up process so that the number of layers of the first and second high-density build-up multilayer boards 1, 2 is accumulated to more than ten layers.
綜上所述,本發明實施例所提供的高密度增層多層板之製造方法可突破傳統製程“僅使用單一核心板,並於此核心板的一側或兩側形成線路化的增層結構”的限制,且可有效避免盲孔底端被擊穿及板面彎曲變形的問題,進而提高印刷電路板的佈線密度及可靠度。 In summary, the manufacturing method of the high-density multi-layered multi-layer board provided by the embodiment of the present invention can break through the traditional process “only a single core board is used, and a line-up layered structure is formed on one side or both sides of the core board. The limitation of the method can effectively avoid the problem that the bottom end of the blind hole is broken down and the plate surface is bent and deformed, thereby improving the wiring density and reliability of the printed circuit board.
再者,採用所述高密度增層多層板之製造方法,可以製作技術層別的多層板(如層數為單數的多層板),且由於任意層別皆可使用改進型半加成法(Modified Semi Additive Process,MSAP)來形成,因此可提升線路等級。 Furthermore, by using the manufacturing method of the high-density layered multi-layer board, a multi-layer board of a technical layer (for example, a multi-layer board having a single number of layers) can be produced, and a modified semi-additive method can be used for any layer ( The Modified Semi Additive Process (MSAP) is formed so that the line level can be improved.
承上述,兩核心板或兩多層板的結合和分離時機可根據線路等級進行調整,故所述高密度增層多層板之製造方法具有較寬廣的製程裕度。 According to the above, the timing of combining and separating the two core boards or the two multi-layer boards can be adjusted according to the line level, so that the manufacturing method of the high-density layer-added multi-layer board has a wide process margin.
以上僅為本發明的較佳可行實施例,非因此侷限本發明的專利範圍,故舉凡運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的保護範圍內。 The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, equivalent technical changes made by the present invention and the contents of the drawings are included in the scope of the present invention.
S101~S104‧‧‧步驟 S101~S104‧‧‧Steps
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TWI720898B (en) * | 2020-05-28 | 2021-03-01 | 欣興電子股份有限公司 | Carrier board structure with increased core layer wiring area and manufacturing method thereof |
TWI723835B (en) * | 2020-04-07 | 2021-04-01 | 健鼎科技股份有限公司 | Method of preparing anylayer high-density interconnect board |
CN113473748A (en) * | 2020-03-30 | 2021-10-01 | 健鼎(湖北)电子有限公司 | Manufacturing method of multilayer connecting plate |
TWI838065B (en) * | 2023-01-05 | 2024-04-01 | 健鼎科技股份有限公司 | Printed circuit board with symmetrical lamination structure and method for producing the same |
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TW566069B (en) * | 2003-04-04 | 2003-12-11 | Via Tech Inc | Method of fabricating multi-layer printed circuit board |
TW566070B (en) * | 2003-04-18 | 2003-12-11 | Via Tech Inc | Structure and manufacture of multi-layer board |
CN102548186A (en) * | 2012-02-15 | 2012-07-04 | 深圳崇达多层线路板有限公司 | Hexamethylene diisocyanate (HDI) plate with symmetrically pressed structure and manufacturing method thereof |
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CN113473748A (en) * | 2020-03-30 | 2021-10-01 | 健鼎(湖北)电子有限公司 | Manufacturing method of multilayer connecting plate |
TWI723835B (en) * | 2020-04-07 | 2021-04-01 | 健鼎科技股份有限公司 | Method of preparing anylayer high-density interconnect board |
TWI720898B (en) * | 2020-05-28 | 2021-03-01 | 欣興電子股份有限公司 | Carrier board structure with increased core layer wiring area and manufacturing method thereof |
TWI838065B (en) * | 2023-01-05 | 2024-04-01 | 健鼎科技股份有限公司 | Printed circuit board with symmetrical lamination structure and method for producing the same |
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