TWI461135B - Method for fabricating circuit board - Google Patents
Method for fabricating circuit board Download PDFInfo
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- TWI461135B TWI461135B TW102107197A TW102107197A TWI461135B TW I461135 B TWI461135 B TW I461135B TW 102107197 A TW102107197 A TW 102107197A TW 102107197 A TW102107197 A TW 102107197A TW I461135 B TWI461135 B TW I461135B
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Description
本發明係有關於一種製作電路板之方法,且特別是有關於一種製作奇數層線路層之電路板或不對稱電路板之方法。The present invention relates to a method of fabricating a circuit board, and more particularly to a method of fabricating a circuit board or an asymmetric circuit board of an odd number of circuit layers.
隨著電子產業的蓬勃發展,電子產品不斷往輕、薄、短、小發展,印刷電路板(printed circuit board,PCB)亦逐漸朝向高密度佈線互連(high density interconnection,HDI)製程技術發展,俾能在更狹小的空間裡提供更多的功能,進而達到整體系統成本的降低。With the rapid development of the electronics industry, electronic products continue to be light, thin, short, and small, and printed circuit boards (PCBs) are gradually moving toward high-density interconnection (HDI) process technology.俾 can provide more functions in a smaller space, thus reducing the overall system cost.
習知技術中,電路板的製作方法為雙面疊合方式,主要藉由核心板與對稱於核心板兩側的增層結構所組成,然而使用核心板會導致整體結構厚度提升,為了降低電路板整體的厚度,因而發展單層疊合方式。然而,單層疊合方式容易發生板彎翹(warpage)的問題。In the prior art, the manufacturing method of the circuit board is a double-sided stacking method, which mainly consists of a core board and a build-up structure symmetrical on both sides of the core board. However, the use of the core board leads to an increase in the overall structure thickness, in order to reduce the circuit. The overall thickness of the board, thus developing a single stack. However, the single lamination method is prone to the problem of warpage of the board.
因此,業界極需發展一種製作電路板的方法,此方法不但能降低電路板厚度,又能避免板彎翹的問題。Therefore, the industry is in great need of developing a method of manufacturing a circuit board, which not only reduces the thickness of the board, but also avoids the problem of the board being bent.
本發明提供一種製作電路板之方法,包括以下 步驟:(a)提供一第一基板、一第二基板與一離形承載板,其中該離形承載板包括一工作區域與一外框區域,其中該外框區域包圍該工作區域;(b)黏合該第一基板、該第二基板、該離形承載板,以使該離形承載板形成於該第一基板與該第二基板之間;(c)形成一第一增層結構於該第一基板之上,形成一第二增層結構於該第二基板之上;(d)切割該外框區域,以使該第一基板、該第二基板與該離形承載板分離;以及(e)移除該離形承載板,以得到兩個電路板,其中之一為該第一基板與該第一增層結構之組合,另一為該第二基板與該第二增層結構之組合。The present invention provides a method of making a circuit board, including the following Step: (a) providing a first substrate, a second substrate, and a release carrier, wherein the release carrier includes a working area and an outer frame area, wherein the outer frame area surrounds the working area; Bonding the first substrate, the second substrate, and the release carrier such that the release carrier is formed between the first substrate and the second substrate; (c) forming a first build-up structure Forming a second build-up structure on the second substrate; (d) cutting the outer frame region to separate the first substrate and the second substrate from the release carrier; And (e) removing the off-load carrier to obtain two circuit boards, one of which is a combination of the first substrate and the first build-up structure, and the other is the second substrate and the second build-up layer A combination of structures.
10‧‧‧暫時基板10‧‧‧ Temporary substrate
12‧‧‧第一增層結構12‧‧‧First buildup structure
22‧‧‧第二增層結構22‧‧‧Second layered structure
100、100a‧‧‧第一基板100, 100a‧‧‧ first substrate
102‧‧‧第一中心層102‧‧‧ first central level
102a‧‧‧第一表面102a‧‧‧ first surface
102b‧‧‧第二表面102b‧‧‧second surface
104、104a‧‧‧第一金屬層104, 104a‧‧‧ first metal layer
106、106a‧‧‧第一內部線路層106, 106a‧‧‧First internal circuit layer
110‧‧‧第一導電盲孔110‧‧‧First conductive blind hole
121‧‧‧介電層121‧‧‧ dielectric layer
122‧‧‧導電盲孔122‧‧‧ Conductive blind holes
123、123a‧‧‧第一外部線路層123, 123a‧‧‧ first external circuit layer
150‧‧‧核心板150‧‧‧ core board
200、200a‧‧‧第二基板200, 200a‧‧‧ second substrate
202‧‧‧第二中心層202‧‧‧ second central layer
202a‧‧‧第三表面202a‧‧‧ third surface
202b‧‧‧第四表面202b‧‧‧Fourth surface
204‧‧‧第二金屬層204‧‧‧Second metal layer
206、206a‧‧‧第二內部線路層206, 206a‧‧‧Second internal circuit layer
210‧‧‧第二導電盲孔210‧‧‧Second conductive blind hole
221‧‧‧介電層221‧‧‧ dielectric layer
222‧‧‧導電盲孔222‧‧‧ Conductive blind holes
223‧‧‧第二外部線路層223‧‧‧Second external circuit layer
250‧‧‧核心板250‧‧‧ core board
300‧‧‧離形承載板300‧‧‧Distracted carrier
300a‧‧‧工作區域300a‧‧‧Working area
300b‧‧‧外框區域300b‧‧‧Outer frame area
400、500‧‧‧電路板400, 500‧‧‧ circuit boards
AA’、BB’、CC’、DD’‧‧‧切割道AA’, BB’, CC’, DD’‧‧ ‧ cutting road
第1圖為一示意圖,用以說明製作本發明電路板之方法中所需要的元件。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing the elements required in the method of fabricating the circuit board of the present invention.
第2A~2E圖為一系列剖面圖,用以說明本發明一第一實施例的流程。2A-2E are a series of cross-sectional views for explaining the flow of a first embodiment of the present invention.
第2D’圖為第2D圖之俯視圖。The 2D' diagram is a plan view of the 2D diagram.
第3A~3E圖為一系列剖面圖,用以說明本發明一第二實施例的流程。3A-3E are a series of cross-sectional views for explaining the flow of a second embodiment of the present invention.
請參見第1圖之示意圖,此圖顯示製作本發明電路板之方法中所需要的元件。如第1圖所示,首先提供第一基板100與第二基板200,以及提供離形承載板300,其中離形承載板300包括工作區域300a與外框區域300b, 其中外框區域300b包圍工作區域300a。Referring to the schematic of Figure 1, this figure shows the components required in the method of making the circuit board of the present invention. As shown in FIG. 1, first, a first substrate 100 and a second substrate 200 are provided, and a release carrier 300 is provided, wherein the release carrier 300 includes a working area 300a and an outer frame area 300b. The outer frame area 300b surrounds the work area 300a.
須注意的是,最後所需的電路板成品形成於「工作區域300a」中,後續步驟會移除外框區域300b,因此,本領域人士可依據實際應用之需求,調整工作區域300a與外框區域300b的尺寸。It should be noted that the final required circuit board product is formed in the "working area 300a", and the subsequent step will remove the outer frame area 300b. Therefore, those skilled in the art can adjust the working area 300a and the outer frame according to the needs of the actual application. The size of the area 300b.
請參見第2A-2E圖,該些圖顯示本發明電路板之製程階段步驟(a)~(e)。Please refer to FIG. 2A-2E, which shows steps (a) to (e) of the process stages of the circuit board of the present invention.
請參見第2A圖,進行步驟(a),其中第一基板100包括第一中心層102、第一金屬層104、第一內部線路層106與第一盲孔110,其中第一中心層102具有第一表面102a與對應之第二表面102b,且第二表面102b面對離形承載板300。第一表面102a上具有第一內部線路層106,第二表面102b上具有第一金屬層104,第一內部線路層106藉由第一盲孔110電性連接至第一金屬層104。Referring to FIG. 2A, step (a) is performed, wherein the first substrate 100 includes a first central layer 102, a first metal layer 104, a first internal wiring layer 106 and a first blind via 110, wherein the first central layer 102 has The first surface 102a and the corresponding second surface 102b, and the second surface 102b faces the off-load carrier 300. The first surface 102a has a first inner wiring layer 106, and the second surface 102b has a first metal layer 104. The first inner wiring layer 106 is electrically connected to the first metal layer 104 by the first blind via 110.
第一中心層102之材質為絕緣材料,例如:紙質酚醛樹脂(paper phenolic resin)、複合環氧樹脂(composite epoxy)、聚亞醯胺樹脂(polyimide resin)或玻璃纖維(glass fiber)。The material of the first central layer 102 is an insulating material such as a paper phenolic resin, a composite epoxy, a polyimide resin or a glass fiber.
第二基板200包括第二中心層202、第二金屬層204、第二內部線路層206與第二盲孔210,其中第二中心層202具有第三表面202a與對應之第四表面202b,且第四表面202b面對離形承載板300。第三表面202a上具有第二內部線路層206,第四表面202b上具有第二金屬層204,第二內部線路層206藉由第二盲孔210電性連接至第 二金屬層204。The second substrate 200 includes a second center layer 202, a second metal layer 204, a second inner wiring layer 206, and a second blind hole 210, wherein the second center layer 202 has a third surface 202a and a corresponding fourth surface 202b, and The fourth surface 202b faces the off-load carrier 300. The second surface 202a has a second internal wiring layer 206. The fourth surface 202b has a second metal layer 204. The second internal wiring layer 206 is electrically connected to the second via hole 210. Two metal layers 204.
須注意的是,第一基板100與第二基板200皆為雙面基板,且兩者具有相同厚度。所謂的「雙面基板」係指基板的雙面皆有金屬層,可經由圖案化步驟而形成線路層,以提供線路傳遞。上述之第一金屬層104與第二金屬層204為整層的金屬層,其尚未經過圖案化。It should be noted that both the first substrate 100 and the second substrate 200 are double-sided substrates, and both have the same thickness. The so-called "double-sided substrate" means that both sides of the substrate have a metal layer, and a wiring layer can be formed through a patterning step to provide line transfer. The first metal layer 104 and the second metal layer 204 are metal layers of the entire layer, which have not been patterned.
第一基板100的製作步驟如下,先提供雙面銅箔基板,可利用習知的濺鍍(sputtering)、壓合(laminate)或塗佈(coating)製程,將金屬層(例如銅箔)形成於中心層上。之後,經由雷射鑽孔(laser drilling method)於雙面銅箔基板中製作孔洞。之後藉由電鍍製程於孔洞中填充導電材料,以形成導電盲孔。接著,進行影像轉移製程(image transfer),以形成第一內部線路層106於第一中心層102之第一表面102a上。第二基板200之製法同於第一基板100,在此不再贅述。The manufacturing process of the first substrate 100 is as follows. First, a double-sided copper foil substrate is provided, and a metal layer (for example, a copper foil) can be formed by a conventional sputtering, laminating or coating process. On the center floor. Thereafter, holes are formed in the double-sided copper foil substrate via a laser drilling method. The conductive material is then filled into the holes by an electroplating process to form conductive vias. Next, an image transfer process is performed to form the first inner wiring layer 106 on the first surface 102a of the first central layer 102. The second substrate 200 is formed in the same manner as the first substrate 100, and details are not described herein again.
請參見第2B圖,進行步驟(b),黏合第一基板100、第二基板200、離形承載板300,以使離形承載板300形成於第一基板100與第二基板200之間。Referring to FIG. 2B, step (b) is performed to bond the first substrate 100, the second substrate 200, and the release carrier 300 such that the release carrier 300 is formed between the first substrate 100 and the second substrate 200.
離形承載板300之外框區域300b之材料包括膠材,例如玻離纖維樹脂(簡稱PP),其作用在於黏合第一基板100與第二基板200,且膠材經過一壓合步驟之後的流膠範圍為0.1 mm-5.0mm,以避免膠材擴散範圍過大。The material of the outer frame region 300b of the release carrier 300 includes a glue material, such as a fiberglass resin (abbreviated as PP), which functions to bond the first substrate 100 and the second substrate 200, and the rubber material passes through a pressing step. The flow range is from 0.1 mm to 5.0 mm to avoid excessive diffusion of the glue.
此外,由於第一中心層102之第二表面102b上的第一金屬層104並未被圖案化,因此,可藉由第一金 屬層104黏合外框區域300b與第一基板100。In addition, since the first metal layer 104 on the second surface 102b of the first central layer 102 is not patterned, the first gold can be The genus layer 104 bonds the outer frame region 300b and the first substrate 100.
離形承載板300之工作區域300a之材料包括無銅基板、有銅基板或金屬層,其作用在於支撐第一基板100與第二基板200,其並不會與第一基板100、第二基板200黏合。The material of the working area 300a of the release carrier 300 includes a copper-free substrate, a copper substrate or a metal layer, and functions to support the first substrate 100 and the second substrate 200, and does not overlap with the first substrate 100 and the second substrate. 200 bonding.
然而,工作區域300a之材料不限於上述提及之材料,只要是不會與第一中心層102之第二表面102b上的第一金屬層104(或是第二中心層202之第四表面202b上的第二金屬層204)產生黏合且具支撐性的材料皆可使用。However, the material of the work area 300a is not limited to the above-mentioned materials as long as it is not the first metal layer 104 on the second surface 102b of the first center layer 102 (or the fourth surface 202b of the second center layer 202). The upper second metal layer 204) can be used to produce a bonded and supportive material.
請參見第2C圖,進行步驟(c),形成第一增層結構12於第一基板100之上,以及形成第二增層結構22於第二基板200之上,以形成暫時基板10。第一增層結構12包括一層或多層結構。Referring to FIG. 2C, step (c) is performed to form a first build-up structure 12 over the first substrate 100 and a second build-up structure 22 over the second substrate 200 to form the temporary substrate 10. The first build-up structure 12 includes one or more layers of structure.
於第2C圖中,第一增層結構12包括:介電層121;導電盲孔122形成於介電層121中;第一外部線路層123形成於介電層121上,其中第一外部線路層123藉由導電盲孔122電性連接至第一內部線路層106。In FIG. 2C, the first build-up structure 12 includes: a dielectric layer 121; a conductive via 122 is formed in the dielectric layer 121; a first external circuit layer 123 is formed on the dielectric layer 121, wherein the first external line The layer 123 is electrically connected to the first inner wiring layer 106 by the conductive vias 122.
於另一實施例中,第一增層結構12包括多層結構,此多層結構包括至少一介電層121;至少一導電盲孔122形成於介電層中;至少一第一外部線路層123形成於介電層121上,其中第一外部線路層123藉由導電盲孔122電性連接至第一內部線路層106。In another embodiment, the first build-up structure 12 includes a multi-layer structure including at least one dielectric layer 121; at least one conductive via 122 is formed in the dielectric layer; at least one first external circuit layer 123 is formed. On the dielectric layer 121, the first external circuit layer 123 is electrically connected to the first internal circuit layer 106 by the conductive vias 122.
第二增層結構22包括:介電層221;導電盲孔 222形成於介電層221中;第二外部線路層223形成於介電層221上,其中第二外部線路層223藉由導電盲孔222電性連接至第二內部線路層206。The second build-up structure 22 includes: a dielectric layer 221; a conductive blind hole The second outer circuit layer 223 is formed on the dielectric layer 221 , and the second outer circuit layer 223 is electrically connected to the second inner circuit layer 206 via the conductive via 222 .
於另一實施例中,第二增層結構22包括多層結構,此多層結構包括至少一介電層221;至少一導電盲孔222形成於介電層中;至少一第二外部線路層223形成於介電層221上,其中第二外部線路層223藉由導電盲孔222電性連接至第二內部線路層206。In another embodiment, the second build-up structure 22 includes a multi-layer structure including at least one dielectric layer 221; at least one conductive via 222 is formed in the dielectric layer; at least one second external trace layer 223 is formed. On the dielectric layer 221 , the second external circuit layer 223 is electrically connected to the second internal wiring layer 206 by the conductive blind vias 222 .
須注意的是,於第2C圖中僅顯示一層第一增層結構12與一層第二增層結構22,然而,於其他實施例中,亦可形成多層的增層結構。第一增層結構12之厚度等於第二增層結構22之厚度,因此,當進行增層步驟時,兩邊對稱的厚度,使得電路板不會發生板彎翹(warpage)的問題。It should be noted that only one layer of the first build-up structure 12 and one layer of the second build-up structure 22 are shown in FIG. 2C. However, in other embodiments, a multi-layer build-up structure may also be formed. The thickness of the first build-up structure 12 is equal to the thickness of the second build-up structure 22, and therefore, when the build-up step is performed, the thickness of the two sides is symmetric, so that the board does not suffer from the problem of warpage of the board.
於一實施例中,形成增層結構之步驟如下,形成絕緣層(例如玻璃纖維樹脂(PP))於第一基板100(或第二基板)之上。之後,金屬層(例如銅箔)形成於絕緣層之上,進行壓合。最後,再進行鑽孔(可使用雷射鑽孔或機械鑽孔),以形成孔洞,形成全面性導電層。之後,形成圖案化乾膜,最後電鍍填孔與形成圖案化線路,之後,去除乾膜。In one embodiment, the step of forming the build-up structure is as follows, forming an insulating layer (eg, fiberglass resin (PP)) over the first substrate 100 (or the second substrate). Thereafter, a metal layer (for example, a copper foil) is formed on the insulating layer to be pressed. Finally, drilling is performed (laser drilling or mechanical drilling can be used) to form holes to form a comprehensive conductive layer. Thereafter, a patterned dry film is formed, and finally the holes are filled and patterned to form a pattern, after which the dry film is removed.
於另一實施例中,形成增層結構之步驟如下,於第一基板100(或第二基板)之上形成絕緣層(例如ABF膜(Ajinimoto)),進行壓合步驟。接著,進行鑽孔(可使用雷射鑽孔或機械鑽孔)。之後,電鍍填孔與形成圖案化乾膜,最 後蝕刻以形成線路,最後去除乾膜。In another embodiment, the step of forming the build-up structure is as follows. An insulating layer (for example, an ABF film) is formed on the first substrate 100 (or the second substrate) to perform a pressing step. Next, drill holes (laser drilling or mechanical drilling). After that, the holes are plated and patterned to form a dry film. After etching to form a line, the dry film is finally removed.
請參見第2D圖,進行步驟(d),對暫時基板10進行切割步驟,沿著外框區域300b的切線道AA’與BB’進行切割,以使第一基板100、第二基板200與離形承載板300分離,由於離形承載板300之工作區域300a並不會與第一基板100或第二基板200黏合,因此,當切割具有黏性的外框區域300b時,可輕易地移除離形承載板300。Referring to FIG. 2D, performing step (d), performing a cutting step on the temporary substrate 10, cutting along the tangential tracks AA' and BB' of the outer frame region 300b, so that the first substrate 100 and the second substrate 200 are separated from each other. The shaped carrier plate 300 is separated. Since the working area 300a of the release carrier 300 does not adhere to the first substrate 100 or the second substrate 200, it can be easily removed when the viscous outer frame region 300b is cut. Detached carrier plate 300.
另外,第2D’圖顯示第2D圖之俯視圖,由圖中可知,沿著切割道AA’、BB’、CC’、DD’進行切割,以使第一基板100、第二基板200與離形承載板300分離。2D' is a plan view showing the 2D view, and it can be seen from the figure that the cutting is performed along the scribe lines AA', BB', CC', DD' to make the first substrate 100, the second substrate 200 and the off-shape The carrier plate 300 is separated.
請參見第2E圖,移除離形承載板300之後,可分別得到兩個電路板400,兩個電路板400為彼此對稱之結構,兩個電路板400其中之一為第一基板100與第一增層結構12之組合,另一為第二基板200與第二增層結構22之組合。為簡化說明,第2E圖中僅顯示一個電路板400,包括第一基板100與其上的第一增層結構12。Referring to FIG. 2E, after the off-load carrier 300 is removed, two circuit boards 400 can be respectively obtained. The two circuit boards 400 are symmetrical to each other, and one of the two circuit boards 400 is the first substrate 100 and the first One combination of the build-up structures 12 and the other is a combination of the second substrate 200 and the second build-up structure 22. To simplify the description, only one circuit board 400 is shown in FIG. 2E, including the first substrate 100 and the first build-up structure 12 thereon.
之後,可對第一中心層102之第二表面102b上的第一金屬層104與第一增層結構22最外層之第一外部線路層123進行圖案化步驟。Thereafter, a patterning step may be performed on the first metal layer 104 on the second surface 102b of the first central layer 102 and the first outer wiring layer 123 on the outermost layer of the first buildup structure 22.
於本發明第一實施例中,因為第一基板100與第二基板200具有相同厚度,且第一增層結構12與第二增層結構22具有相同厚度,因此,可避免發生板彎翹(warpage)的問題。此外,因為最後會移除離形承載板300,因此,可降低電路板的整體厚度,以符合微小化之趨勢。In the first embodiment of the present invention, since the first substrate 100 and the second substrate 200 have the same thickness, and the first build-up structure 12 and the second build-up structure 22 have the same thickness, the plate warp can be avoided ( Warpage) problem. In addition, since the off-load carrier 300 is finally removed, the overall thickness of the board can be reduced to meet the trend of miniaturization.
另外,習知使用雙面疊合方法,僅能得到偶數層(例如兩層、四層、六層、八層等)的線路層,而藉由本發明之製作方法,可得到奇數層的線路層之電路板400,如第2E圖中,得到三層線路層(第一金屬層104、第一內部線路層106與第一外部線路層123)之電路板400。In addition, it is conventional to use a double-sided lamination method to obtain only a circuit layer of an even layer (for example, two layers, four layers, six layers, eight layers, etc.), and by the manufacturing method of the present invention, an odd-numbered layer circuit layer can be obtained. The circuit board 400, as in FIG. 2E, obtains a circuit board 400 of three circuit layers (a first metal layer 104, a first internal wiring layer 106, and a first external wiring layer 123).
本發明另提供一第二實施例,請參見第3A~3E圖,該些圖顯示本發明電路板之製程階段步驟(a)~(e)。第3A~3E圖中的標號與第2A-2E圖中標號相同者,代表相同元件,為簡化說明,在此不再贅述。The present invention further provides a second embodiment, please refer to FIGS. 3A-3E, which show steps (a) to (e) of the process stages of the circuit board of the present invention. The reference numerals in the 3A to 3E drawings are the same as those in the second A-2E, and represent the same components. For the sake of simplicity, the description will not be repeated here.
須注意的是,於第一實施例中,於第2A圖中,所使用之第一基板100與第二基板200皆為雙面基板(雙面具有金屬層)。於第二實施例中,於第3A圖中,第一基板100與第二基板200皆為多層基板,層數不限,且第一基板100中包括核心板150(核心板150位於多層基板中的中心位置),第二基板200中亦包括核心板250(核心板250位於多層基板中的中心位置)。此處所謂的『核心板』係指銅箔基板。It should be noted that in the first embodiment, in the second embodiment, the first substrate 100 and the second substrate 200 are both double-sided substrates (metal layers on both sides). In the second embodiment, in the third embodiment, the first substrate 100 and the second substrate 200 are both multi-layer substrates, the number of layers is not limited, and the first substrate 100 includes the core board 150 (the core board 150 is located in the multi-layer substrate) The central position of the second substrate 200 also includes a core plate 250 (the core plate 250 is located at a central position in the multilayer substrate). The term "core board" as used herein refers to a copper foil substrate.
請參見第3A圖,進行步驟(a),提供第一基板100a、第二基板200a與離形承載板300,其中離形承載板300包括工作區域300a與外框區域300b,其中外框區域300b包圍工作區域300a。Referring to FIG. 3A, step (a) is performed to provide a first substrate 100a, a second substrate 200a and a release carrier 300, wherein the release carrier 300 includes a working area 300a and an outer frame area 300b, wherein the outer frame area 300b Surrounds the work area 300a.
須注意的是,第一基板100a為多層基板,其具有多層線路結構,於第3A圖中顯示四層線路層,且其包括核心板(core board)150。同樣的,第二基板200a為多層 基板,其具有多層線路結構,於第3A圖中顯示四層線路層,且其包括核心板(core board)250。It should be noted that the first substrate 100a is a multilayer substrate having a multilayer wiring structure, and a four-layer wiring layer is shown in FIG. 3A, and includes a core board 150. Similarly, the second substrate 200a is a plurality of layers The substrate, which has a multilayer wiring structure, shows a four-layer wiring layer in FIG. 3A, and includes a core board 250.
請參見第3B圖,進行步驟(b),黏合第一基板100a、第二基板200a與離形承載板300,以使離形承載板300形成於第一基板100a與第二基板200a之間。Referring to FIG. 3B, step (b) is performed to bond the first substrate 100a, the second substrate 200a and the release carrier 300 such that the release carrier 300 is formed between the first substrate 100a and the second substrate 200a.
請參見第3C圖,進行步驟(c),形成第一增層結構12於第一基板100a之上,形成第二增層結構22於第二基板200a之上。Referring to FIG. 3C, step (c) is performed to form a first build-up structure 12 over the first substrate 100a to form a second build-up structure 22 over the second substrate 200a.
第一增層結構12包括至少一介電層121;至少一導電盲孔122形成於介電層中;至少一第一外部線路層123形成於介電層121上,其中第一外部線路層123藉由導電盲孔122電性連接至第一內部線路層106a。The first build-up structure 12 includes at least one dielectric layer 121; at least one conductive via 122 is formed in the dielectric layer; at least one first external trace layer 123 is formed on the dielectric layer 121, wherein the first external trace layer 123 The conductive inner via layer 106a is electrically connected to the first inner wiring layer 106a.
第二增層結構22包括至少一介電層221;至少一導電盲孔222形成於介電層中;至少一第二外部線路層223形成於介電層221上,其中第二外部線路層223藉由導電盲孔222電性連接至第二內部線路層206a。The second build-up structure 22 includes at least one dielectric layer 221; at least one conductive via 222 is formed in the dielectric layer; at least one second external trace layer 223 is formed on the dielectric layer 221, wherein the second external trace layer 223 The conductive via 222 is electrically connected to the second internal wiring layer 206a.
須注意的是,第一增層結構12包括至少一層增層結構,第二增層結構22包括至少一層增層結構,第3C圖中顯示兩層的第一增層結構12以及兩層第二增層結構22。第一增層結構12與第二增層結構22之數目為相同,本領域人士可依實際應用之需求對增層結構之數目進行調整。It should be noted that the first build-up structure 12 includes at least one build-up structure, the second build-up structure 22 includes at least one build-up structure, and the third build-up structure 12 and two layers of the second layer are shown in FIG. 3C. Layering structure 22. The number of the first build-up structure 12 and the second build-up structure 22 are the same, and those skilled in the art can adjust the number of build-up structures according to the needs of practical applications.
請參見第3D圖,進行步驟(d),沿著切割道AA’與BB’切割外框區域300b,以使第一基板100a、第二基板 200a與離形承載板300分離。Referring to FIG. 3D, step (d) is performed to cut the outer frame region 300b along the scribe lines AA' and BB' to make the first substrate 100a and the second substrate. The 200a is separated from the off-load carrier 300.
請參見第3E圖,進行步驟(e),移除離形承載板300,以分別得到兩個電路板500,兩個電路板500為彼此對稱之結構,兩個電路板500其中之一為第一基板100a與第一增層結構12之組合,另一為第二基板200a與第二增層結構22之組合。為簡化說明,第3E圖中僅顯示一個電路板500,包括第一基板100a與其上的兩層第一增層結構12。Referring to FIG. 3E, step (e) is performed to remove the off-load carrier 300 to obtain two circuit boards 500 respectively. The two circuit boards 500 are symmetrical to each other, and one of the two circuit boards 500 is One substrate 100a is combined with the first build-up structure 12, and the other is a combination of the second substrate 200a and the second build-up structure 22. To simplify the description, only one circuit board 500 is shown in FIG. 3E, including the first substrate 100a and the two first layer buildup structures 12 thereon.
之後,可對第一中心層102之第二表面102b上的第一金屬層104a與第一增層結構22最外層之第一外部線路層123a進行圖案化步驟。Thereafter, a patterning step may be performed on the first metal layer 104a on the second surface 102b of the first central layer 102 and the first outer wiring layer 123a on the outermost layer of the first buildup structure 22.
習知使用雙面疊合方式製作電路板時,核心板必定位於中心位置,亦即,僅能製作出對稱的電路板(核心基板位於中心)。需注意的是,本發明第二實施例中,藉由使用本發明之製法,於第3E圖中,由第一金屬層104a往上共具有六層線路層,其中核心板150位於第二、第三線路層之間,因此,製作出不對稱的(asymmetric)電路板500(核心板不位於中心)。Conventionally, when a circuit board is fabricated using a double-sided stacking method, the core board must be positioned at a center position, that is, only a symmetrical circuit board can be fabricated (the core substrate is at the center). It should be noted that, in the second embodiment of the present invention, by using the method of the present invention, in the third embodiment, the first metal layer 104a has a total of six circuit layers, wherein the core board 150 is located in the second embodiment. Between the third circuit layers, therefore, an asymmetric circuit board 500 is fabricated (the core board is not centered).
100‧‧‧第一基板100‧‧‧First substrate
200‧‧‧第二基板200‧‧‧second substrate
300‧‧‧離形承載板300‧‧‧Distracted carrier
300a‧‧‧工作區域300a‧‧‧Working area
300b‧‧‧外框區域300b‧‧‧Outer frame area
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