TW201732303A - Sorting machine for testing semiconductor devices and information processing method thereof can precisely establish development direction of semiconductor devices - Google Patents

Sorting machine for testing semiconductor devices and information processing method thereof can precisely establish development direction of semiconductor devices Download PDF

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Publication number
TW201732303A
TW201732303A TW105135976A TW105135976A TW201732303A TW 201732303 A TW201732303 A TW 201732303A TW 105135976 A TW105135976 A TW 105135976A TW 105135976 A TW105135976 A TW 105135976A TW 201732303 A TW201732303 A TW 201732303A
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semiconductor device
barcode
loading
sorting machine
identifier
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TW105135976A
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Chinese (zh)
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TWI620943B (en
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Hee-Kang Song
Tae-Min Lee
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Techwing Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C3/00Sorting according to destination
    • B07C3/18Devices or arrangements for indicating destination, e.g. by code marks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867Handlers or transport devices, e.g. loaders, carriers, trays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C3/00Sorting according to destination
    • B07C3/02Apparatus characterised by the means used for distribution
    • B07C3/08Apparatus characterised by the means used for distribution using arrangements of conveyors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C3/00Sorting according to destination
    • B07C3/20Arrangements for facilitating the visual reading of addresses, e.g. display arrangements coding stations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2894Aspects of quality control [QC]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/06009Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking
    • G06K19/06018Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking one-dimensional coding
    • G06K19/06028Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code with optically detectable marking one-dimensional coding using bar codes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention relates to a sorting machine for testing semiconductor devices and its information processing method. The sorting machine for testing semiconductor device according to the invention includes a barcode recognizer for recognizing barcodes assigned to multiple semiconductor devices at a position on a moving path of multiple semiconductor devices moving from a loading position by a loading portion to an unloading position by an unloading portion; and a control unit for controlling the barcode recognizer, reading barcodes recognized by the barcode recognizer to manage information for individual semiconductor device. According to the invention, since information management is performed for individual semiconductor device rather than a batch, the reliability of test results and the ability of managing individual semiconductor devices are enhanced, capable of achieving history management.

Description

半導體裝置測試用分選機及其資訊處理方法 Semiconductor device test sorting machine and information processing method thereof

本發明係關於向測試器供給半導體裝置的分選機(handler)。 The present invention relates to a handler for supplying a semiconductor device to a tester.

半導體裝置在生產後發貨前需要進行測試。為此需要測試器和分選機,本發明係關於分選機。 Semiconductor devices need to be tested before shipment after production. A tester and a sorter are required for this purpose, and the invention relates to a sorting machine.

分選機用於使多個半導體裝置與測試器電連接,而使測試器能夠測試半導體裝置。此時,分選機在根據所要求的測試條件的環境下刺激半導體裝置後使其與測試器電連接。分選機可根據測試條件、待測試的半導體裝置的種類或顧客的要求等以多種形態製作,如韓國公開專利10-2011-0136440號、10-2012-0106320號、10-2014-0121909號等。 A sorter is used to electrically connect a plurality of semiconductor devices to the tester, thereby enabling the tester to test the semiconductor device. At this time, the sorter electrically connects the semiconductor device to the tester after stimulating the semiconductor device according to the required test conditions. The sorting machine can be produced in various forms according to the test conditions, the type of the semiconductor device to be tested, or the customer's request, such as Korean Patent Publication No. 10-2011-0136440, 10-2012-0106320, 10-2014-0121909, etc. .

通常,分選機具備裝載要素,用於使多個半導體裝置同時移動或一次性地對其同時進行測試。根據分選機的種類,半導體裝置能夠以裝載於裝載要素的狀態下與測試器電連接或者從裝載要素引出後與測試器電連接。其中,裝載要素根據分選機的種類具有測試托盤、穿梭(shuttle)、裝載板等多種結構及名稱。 Typically, the sorter is provided with loading elements for simultaneously moving a plurality of semiconductor devices or simultaneously testing them at one time. According to the type of the sorting machine, the semiconductor device can be electrically connected to the tester in a state of being mounted on the load element or can be electrically connected to the tester after being taken out from the load element. Among them, the loading elements have various structures and names such as a test tray, a shuttle, and a loading plate depending on the type of the sorting machine.

另一方面,如韓國公開專利10-2009-0005901號,將相同生產條件下生產的相同種類的半導體裝置分為以批次 (lot)單位同時進行測試。其理由為在相同條件下生產的半導體裝置在相同條件下進行測試,由此能夠追蹤不良品為在何時何種條件下生產的。由於對以批次為單位的半導體裝置進行測試,分選機為了防止半導體裝置的混合,以先入先出的方式將半導體裝置加載於裝載要素或從裝載要素卸載。 On the other hand, the same type of semiconductor device produced under the same production conditions is divided into batches as disclosed in Korean Laid-Open Patent Publication No. 10-2009-0005901 (lot) Units are tested simultaneously. The reason for this is that the semiconductor device produced under the same conditions is tested under the same conditions, thereby being able to track when and under what conditions the defective product is produced. Since the semiconductor device in batches is tested, the sorter loads the semiconductor device into or out of the loading element in a first-in first-out manner in order to prevent mixing of the semiconductor device.

然而,在測試過程中的物流的流動中會出現半導體裝置脫離或混合的現象,會出現因分選機或者工作員的失誤(error)而不能實現100%先入先出的情況。因此,有必要經常要確認是否以批次(lot)為單位進行管理。尤其,最近因生產條件的細分導致半導體裝置的批次為單位的生產處於減少的趨勢,因此更需要留心。 However, in the flow of the flow during the test, there is a phenomenon that the semiconductor device is detached or mixed, and there may be a case where the sorting machine or the worker's error cannot achieve 100% first-in first-out. Therefore, it is necessary to always confirm whether or not to manage in units of lot. In particular, recently, the production of batch units of semiconductor devices is in a decreasing trend due to the subdivision of production conditions, and therefore more attention is required.

另外,為優化細分化的生產條件,比較在何種生產條件下以何種環境條件進行測試的半導體裝置出現何種特性的必要性也在抬頭。 In addition, in order to optimize the subdivided production conditions, it is also necessary to compare the characteristics of the semiconductor devices in which the environmental conditions are tested under which conditions.

但是以批次為單位管理的現有的方式不能解決或滿足上述問題。 However, the existing methods of managing in batches cannot solve or satisfy the above problems.

因此預測在不遠的將來會需要對半導體裝置進行個別管理。本發明關於在大量的半導體裝置一次性地供給並對多個半導體裝置一次性地同時測試的分選機中,需要對於半導體裝置進行個別管理時所使用的技術。 It is therefore predicted that individual management of semiconductor devices will be required in the near future. The present invention relates to a technique used for individually managing a semiconductor device in a sorting machine in which a large number of semiconductor devices are supplied at a time and a plurality of semiconductor devices are simultaneously tested at one time.

本發明提供一種能夠管理對於半導體裝置的個別履歷 的分選機的技術。 The present invention provides an ability to manage individual resumes for semiconductor devices The technology of the sorting machine.

為實現上述目的,本發明的半導體裝置測試用分選機包括:裝載要素,能夠裝載待測試的半導體裝置;輸送機,用於輸送上述裝載要素;加載部分,將待測試的半導體裝置向位於加載位置的上述裝載要素加載;測試部分,對於藉助上述加載部分向上述裝載要素加載的半導體裝置進行測試;卸載部分,將在上述測試部分結束測試的半導體裝置從位於卸載位置上的上述裝載要素卸載;條形碼識別部分,用於在從藉助上述加載部分的加載的位置移動至藉助上述卸載部分的卸載的位置的半導體裝置的移動路徑上的一位置,識別對多個半導體裝置賦予的條形碼;以及控制部分,對上述輸送機、加載部分、測試部分、卸載部分及條形碼識別部分進行控制,並讀取藉助上述條形碼識別部分識別的條形碼,來分別管理每個半導體裝置的資訊。 To achieve the above object, a semiconductor device test sorting machine of the present invention comprises: a loading element capable of loading a semiconductor device to be tested; a conveyor for transporting the loading element; and a loading portion for loading the semiconductor device to be tested The loading element loading of the position; the testing portion testing the semiconductor device loaded to the loading element by the loading portion; and the unloading portion unloading the semiconductor device tested at the testing portion from the loading element at the unloading position; a barcode identifying portion for identifying a barcode imparted to the plurality of semiconductor devices at a position on a moving path of the semiconductor device from a position of loading by the loading portion to a position of unloading by the unloading portion; and a control portion And controlling the conveyor, the loading portion, the testing portion, the unloading portion, and the barcode recognition portion, and reading the barcode recognized by the barcode recognition portion to manage the information of each semiconductor device.

在上述裝載要素,可至少沿著上述裝載要素移動的方向能夠並排裝載多個半導體裝置,上述條形碼識別部分設置於上述裝載要素的移動路徑的上方,用於依次識別裝載於移動的上述裝載要素的多個半導體裝置的條形碼,當上述裝載要素通過上述條形碼識別部分的下方時,上述控制部分控制上述輸送機,使得上述裝載要素反覆一次以上的移動和停止,以使上述條形碼識別部分依次識別對裝載於上述裝載要素的多個半導體裝置賦予的條形碼。 In the loading element, a plurality of semiconductor devices can be mounted in parallel along at least a direction in which the loading elements move, and the barcode identifying portion is provided above the moving path of the loading elements for sequentially identifying the loading elements mounted on the moving The barcode of the plurality of semiconductor devices, when the loading element passes under the barcode recognition portion, the control portion controls the conveyor to cause the loading element to repeatedly move and stop more than once, so that the barcode recognition portion sequentially recognizes the loading A barcode provided by a plurality of semiconductor devices on which the elements are mounted.

上述條形碼識別部分包括:條形碼識別器,用於識別 條形碼;照明器,用於使上述條形碼識別器識別條形碼,而向半導體裝置的表面照射照明。 The barcode recognition part includes a barcode identifier for identifying a bar code; an illuminator for causing the barcode recognizer to recognize the barcode and illuminate the surface of the semiconductor device.

上述照明器設置於上述條形碼識別器和上述裝載要素之間,上述照明器具有識別窗,用於使上述條形碼識別器識別位於上述照明器的下方的半導體裝置的條形碼。 The illuminator is disposed between the barcode identifier and the loading element, and the illuminator has an identification window for causing the barcode recognizer to recognize a barcode of a semiconductor device located below the illuminator.

上述照明器包括:設置部件,其下方具有向上方突出的半圓筒面;以及至少一個照射源,設置於上述設置部件的上述半圓筒面上,上述識別窗設置於上述設置部件。 The illuminator includes: a mounting member having a semi-cylindrical surface that protrudes upwardly; and at least one illumination source disposed on the semi-cylindrical surface of the installation member, wherein the identification window is provided on the installation member.

上述照明器包括:反射板,呈向上方突起的穹形;以及至少一個照射源,設置於上述反射板的下部,通過上述反射板向半導體裝置提供間接照明,上述識別窗設置於上述反射板。 The illuminator includes a reflecting plate having a dome shape protruding upward, and at least one illumination source disposed at a lower portion of the reflecting plate to provide indirect illumination to the semiconductor device through the reflecting plate, wherein the identification window is disposed on the reflecting plate.

上述裝載要素及輸送機設有多個,以使半導體裝置以多個路徑移動,上述條形碼識別部分包括:條形碼識別器,用於識別條形碼;以及移動器,移動上述條形碼識別器,來使上述條形碼識別器選擇性地位於上述多個路徑的上方。 The loading element and the conveyor are provided in plurality to move the semiconductor device in a plurality of paths, the barcode recognition portion includes: a barcode identifier for identifying the barcode; and a mover that moves the barcode identifier to make the barcode The identifier is selectively located above the plurality of paths.

上述條形碼識別部分還包括照明器,用於藉助上述條形碼識別器識別條形碼而向半導體裝置表面照射照明,上述條形碼識別器和上述照明器藉助結合部件相互結合,上述條形碼識別器和上述照明器藉助上述移動器的工作同時移動。 The barcode recognition portion further includes an illuminator for illuminating the surface of the semiconductor device by the barcode recognizer to recognize the barcode, wherein the barcode identifier and the illuminator are coupled to each other by a coupling member, wherein the barcode recognizer and the illuminator are The work of the mover moves at the same time.

為實現上述目的,本發明的半導體裝置測試用分選機的資訊處理方法包括識別步驟,在半導體裝置移動的路徑 上識別對半導體裝置賦予的條形碼;確認步驟,對上述識別步驟中識別的條形碼進行分析,確認各個半導體裝置的標識符以及與該半導體裝置有關的資訊;儲存步驟,儲存上述確認步驟中確認的各個半導體裝置的標識符和資訊;以及傳送步驟,向測試器側傳送上述儲存步驟中儲存的標識符和資訊,在測試器側以與該半導體裝置的標識符相關聯的方式儲存半導體裝置的測試結果,對半導體裝置進行測試之前或之後實施上述識別步驟及上述傳送步驟。 In order to achieve the above object, an information processing method for a semiconductor device test sorting machine of the present invention includes an identification step of moving a path in a semiconductor device Identifying a barcode applied to the semiconductor device; and confirming a step of analyzing the barcode identified in the identifying step, confirming an identifier of each semiconductor device and information related to the semiconductor device; and storing a step of storing each of the confirmations in the confirming step An identifier and information of the semiconductor device; and a transmitting step of transmitting the identifier and information stored in the storing step to the tester side, and storing the test result of the semiconductor device on the tester side in association with the identifier of the semiconductor device The identification step and the transfer step described above are performed before or after testing the semiconductor device.

上述半導體裝置測試用分選機還包括記錄步驟,與半導體裝置的標識符相關聯的方式記錄從側接收的與半導體裝置有關的測試結果。 The above-described semiconductor device test sorting machine further includes a recording step of recording a test result related to the semiconductor device received from the side in association with the identifier of the semiconductor device.

根據本發明,在半導體裝置被大量供給後,一次性地對多個半導體裝置同時進行測試的分選機中,利用條形碼管理與半導體裝置有關的個別履歷,因此具有以下效果。 According to the present invention, in a sorting machine in which a plurality of semiconductor devices are simultaneously tested in a large amount after the semiconductor device is supplied in a large amount, the individual history of the semiconductor device is managed by the bar code, and thus the following effects are obtained.

第一,在測試過程中即使半導體裝置被混合,也可確認各個半導體裝置的資訊。 First, information of each semiconductor device can be confirmed even if the semiconductor devices are mixed during the test.

第二,可確認在何種生產條件下通過何種測試條件完成何種質量的半導體裝置。 Second, it can be confirmed under what production conditions the quality of the semiconductor device is completed by which test conditions.

第三,可更精確樹立半導體裝置的開發方向。 Third, the development direction of semiconductor devices can be more accurately established.

第四,因可儲存管理所有履歷,再測試(retest)時也可確認履歷。 Fourth, since all the resumes can be stored and managed, the resume can be confirmed when retesting.

第五,可減少用於防止半導體裝置混合等問題的管理者的角色,從而提高人力的利用率。 Fifth, the role of the manager for preventing problems such as mixing of semiconductor devices can be reduced, thereby improving the utilization rate of manpower.

100‧‧‧分選機 100‧‧‧ sorting machine

111、112‧‧‧加載板 111, 112‧‧‧ loading board

121、122‧‧‧第一輸送機 121, 122‧‧‧ first conveyor

131、132‧‧‧卸載板 131, 132‧‧‧ Unloading board

141、142‧‧‧第二輸送機 141, 142‧‧‧Second conveyor

150‧‧‧加載部分 150‧‧‧Loading section

160‧‧‧測試部分 160‧‧‧Test section

161‧‧‧測試腔室 161‧‧‧Test chamber

170‧‧‧卸載部分 170‧‧‧Unloading section

180‧‧‧條形碼識別部分 180‧‧‧Barcode Identification Section

181a、181b、181c、182a‧‧‧條形碼識別器 181a, 181b, 181c, 182a‧‧‧ barcode identifier

183b、183c‧‧‧照明器 183b, 183c‧‧‧ illuminators

184a、184b、 184b’、184c‧‧‧移動器 184a, 184b, 184b’, 184c‧‧‧ mover

190‧‧‧控制部分 190‧‧‧Control section

191‧‧‧確認部 191‧‧‧Confirmation Department

192‧‧‧儲存部 192‧‧‧ Storage Department

193‧‧‧通訊部 193‧‧ Department of Communications

LP1、LP2‧‧‧加載位置 LP 1 , LP 2 ‧‧‧ loading position

UP1、UP2‧‧‧卸載位置 UP 1 , UP 2 ‧‧‧ Unloading position

LS‧‧‧裝載槽 LS‧‧‧ loading slot

C1、C2‧‧‧移動路徑 C 1 , C 2 ‧ ‧ moving path

TP‧‧‧測試位置 TP‧‧‧ test location

RW‧‧‧識別窗 RW‧‧‧ identification window

RP‧‧‧反射板 RP‧‧‧reflector

IS‧‧‧照射源 IS‧‧‧Irradiation source

RM‧‧‧反射鏡 RM‧‧‧Mirror

JE‧‧‧結合部件 JE‧‧‧Combined parts

IE‧‧‧設置部件 IE‧‧‧Settings

S801-S806‧‧‧步驟 S801-S806‧‧‧Steps

圖1及圖2為對本發明一實施例的半導體裝置測試分選機的概念性俯視圖。 1 and 2 are conceptual plan views of a semiconductor device test sorter according to an embodiment of the present invention.

圖3為適用於圖1的分選機的控制部分的結構圖。 Fig. 3 is a structural view of a control portion applicable to the sorting machine of Fig. 1.

圖4為可適用於圖1的分選機的條形碼識別部分的第一例的結構圖。 4 is a configuration diagram of a first example of a barcode recognition portion applicable to the sorting machine of FIG. 1.

圖5為可適用於圖1的分選機的條形碼識別部分的第二例的結構圖。 Fig. 5 is a structural diagram showing a second example of a barcode recognition portion applicable to the sorting machine of Fig. 1.

圖6為圖5的條形碼識別部分的變形例。 Fig. 6 is a modification of the barcode recognition portion of Fig. 5.

圖7為可適用於圖1的分選機的條形碼識別部分第三例的結構圖。 Fig. 7 is a structural view showing a third example of the barcode recognition portion applicable to the sorting machine of Fig. 1.

圖8為在圖1的分選機中實施的資訊處理方法的流程圖。 FIG. 8 is a flow chart of an information processing method implemented in the sorting machine of FIG. 1.

以下,為了說明的簡潔性,重複的說明盡可能省略或簡要的方式說明本發明的較佳實施例。 In the following, for the sake of brevity of the description, the repeated description of the preferred embodiments of the present invention will be omitted as appropriate.

分選機的基本結構的說明 Description of the basic structure of the sorting machine

圖1及圖2為對本發明一實施例的半導體裝置測試分選機100(以下簡稱分選機)的概念性俯視圖。 1 and 2 are conceptual plan views of a semiconductor device test sorter 100 (hereinafter referred to as a sorter) according to an embodiment of the present invention.

如圖1所示,本發明一實施例的分選機100包括:兩個加載板111、112、兩個第一輸送機121、122、兩個卸載板131、132、兩個第二輸送機141、142、加載部分150、測試部分160、卸載部分170、條形碼識別部分180及控制部分190。 As shown in FIG. 1, a sorting machine 100 according to an embodiment of the present invention includes: two loading plates 111, 112, two first conveyors 121, 122, two unloading plates 131, 132, and two second conveyors. 141, 142, loading portion 150, test portion 160, unloading portion 170, barcode recognition portion 180, and control portion 190.

加載板111、112藉助第一輸送機121、122在加載位置LP1、LP2和測試位置TP之間移動,並具有可加載八個半導體裝置的裝載槽LS。其中,八個裝載槽LS以2×4行列的形態排列。因此,半導體裝置向前後方向並排設置有兩個,且沿著加載板111、112移動的左右方向並排設置有四個。即,加載板111、112起到裝載半導體裝置的裝載要素的功能。 The loading plates 111, 112 are moved between the loading positions LP 1 , LP 2 and the test position TP by means of the first conveyors 121, 122 and have a loading slot LS into which eight semiconductor devices can be loaded. Among them, eight loading slots LS are arranged in a form of 2 × 4 rows and columns. Therefore, two semiconductor devices are arranged side by side in the front-rear direction, and four are arranged side by side in the left-right direction in which the loading plates 111 and 112 move. That is, the loading plates 111 and 112 function to load the loading elements of the semiconductor device.

第一輸送機121、122輸送加載板111、112,以使加載板111、112選擇性地位於加載位置LP1、LP2和測試位置TP。 The first conveyors 121, 122 transport the loading plates 111, 112 such that the loading plates 111, 112 are selectively located at the loading positions LP 1 , LP 2 and the test position TP.

卸載板131、132藉助第二輸送機141、142在測試位置TP和卸載位置UP1、UP2和之間移動,並具有可裝載八個半導體裝置的裝載槽LS。 Unloading a second conveyor plate 131 and 132, 141, 142 move in the testing position TP and the unloading position UP UP 2 and between the LS and having a loading slot of the semiconductor device can be loaded by means of eight.

第二輸送機141、142輸送卸載板131、132,以使卸載板131、132選擇性地位於測試位置TP和卸載位置UP1、UP2The second conveyors 141, 142 convey the unloading plates 131, 132 such that the unloading plates 131, 132 are selectively located at the test position TP and the unloading positions UP 1 , UP 2 .

加載部分150將待測試的半導體裝置從使用者托盤加載到位於加載位置LP1、LP2的加載板111、112。 The loading portion 150 loads the semiconductor device to be tested from the user tray to the loading plates 111, 112 at the loading positions LP 1 , LP 2 .

測試部分160將藉助加載部分150向加載板111、112加載的八個半導體裝置與測試器電連接。為了維持半導體裝置的刺激狀態,如上所述的測試部分160可具有一定程度上阻隔外部環境的測試腔室161。另外,參照韓國專利公開10-2014-0121909號,測試部分160從加載板111、112引出半導體裝置並使其與測試器電連接。當然,可根據實 施方式,測試部分160使處於加載板111、112裝載的狀態的半導體裝置與測試器電連接。 The test portion 160 electrically connects the eight semiconductor devices loaded to the loading plates 111, 112 by the loading portion 150 to the tester. In order to maintain the stimulating state of the semiconductor device, the test portion 160 as described above may have a test chamber 161 that blocks the external environment to some extent. Further, referring to Korean Patent Publication No. 10-2014-0121909, the test portion 160 takes out the semiconductor device from the loading plates 111, 112 and electrically connects it to the tester. Of course, it can be based on reality. In the manner, the test portion 160 electrically connects the semiconductor device in a state in which the loading plates 111, 112 are loaded, to the tester.

卸載部分170將結束測試的半導體裝置從位於卸載位置UP1、UP2的卸載板131、132向空的使用者托盤卸載。 The unloading portion 170 unloads the semiconductor device that has finished testing from the unloading plates 131, 132 located at the unloading positions UP 1 , UP 2 to the empty user tray.

條形碼識別部分180設置於加載板111、112移動的路徑的上方,在加載板111、112從加載位置LP1、LP2向測試位置TP移動的過程中,對經過條形碼識別部分180的下方的加載板111、112中所加載的半導體裝置的條形碼進行識別。本實施例的條形碼識別部分180設置於加載位置LP1、LP2和測試位置TP之間。但是可根據實施方式,在分選機100實現的加載到卸載,只要能夠在移動的半導體裝置的移動路徑上識別對半導體裝置賦予的條形碼來特定該半導體裝置,則條形碼識別部分180可設置於半導體裝置的移動路徑上的任一位置。 The barcode recognition portion 180 is disposed above the path on which the loading plates 111, 112 move, and loads the lower portion of the barcode recognition portion 180 during the movement of the loading plates 111, 112 from the loading positions LP 1 , LP 2 to the test position TP. The barcode of the semiconductor device loaded in the boards 111, 112 is identified. The barcode recognition portion 180 of the present embodiment is disposed between the loading positions LP 1 , LP 2 and the test position TP. However, according to the embodiment, the loading and unloading performed by the sorting machine 100 can be set in the semiconductor as long as the barcode given to the semiconductor device can be identified on the moving path of the moving semiconductor device to identify the semiconductor device. Any position on the path of the device.

本實施例中,由於條形碼識別部分180設置於加載位置LP1、LP2和測試位置TP之間,加載板111、112的移動距離和卸載板131、132的移動距離不同。因此如上所述,用於移動加載板111、112的第一輸送機121、122和用於移動卸載板131、132的第二輸送機141、142單獨設置。但是在條形碼識別部分180位於加載位置LP1、LP2和測試位置TP之間或測試位置TP和卸載位置UP1、UP2和之間以外的其他位置的情況下,僅由兩個輸送機同時移動加載板111、112和卸載板131、132。 In the present embodiment, since the barcode recognition portion 180 is disposed between the loading positions LP 1 , LP 2 and the test position TP, the moving distances of the loading plates 111, 112 and the moving distances of the unloading plates 131, 132 are different. Therefore, as described above, the first conveyors 121, 122 for moving the loading plates 111, 112 and the second conveyors 141, 142 for moving the unloading plates 131, 132 are separately provided. However, in the case where the barcode recognition portion 180 is located between the loading positions LP 1 , LP 2 and the test position TP or between the test position TP and the unloading positions UP 1 , UP 2 and between, only two conveyors are simultaneously The loading plates 111, 112 and the unloading plates 131, 132 are moved.

根據本實施例的分選機100,如圖2所示,由於加載 板111、112及卸載板131、132設置有一對,因此半導體裝置的移動路徑C1、C2也為2個。因此,條形碼識別部分180需對前方的加載板111中所裝載的半導體裝置的條形碼和後方的加載板112中裝載的半導體裝置的條形碼均可進行識別。 According to the sorting machine 100 of the present embodiment, as shown in FIG. 2, since the loading plates 111 and 112 and the unloading plates 131 and 132 are provided in a pair, the movement paths C 1 and C 2 of the semiconductor device are also two. Therefore, the barcode recognition portion 180 needs to recognize both the barcode of the semiconductor device loaded in the front loading plate 111 and the barcode of the semiconductor device loaded in the loading plate 112 at the rear.

上述條形碼識別180為本發明的最重要的特徵,因此在單獨的目次中根據實施例分解說明。 The above-described barcode recognition 180 is the most important feature of the present invention, and therefore, the explanation is decomposed according to the embodiment in a separate directory.

控制部分190對第一輸送機121、122,第二輸送機141、142、加載部分150、測試部分160、卸載部分170及條形碼識別部分180進行控制,並讀取藉助條形碼識別部分180識別的條形碼,來分別管理每個半導體裝置的資訊。如圖3的結構圖,控制部分190包括:確認部191、儲存部192、通訊部193。 The control portion 190 controls the first conveyors 121, 122, the second conveyors 141, 142, the loading portion 150, the test portion 160, the unloading portion 170, and the barcode recognition portion 180, and reads the barcode recognized by the barcode recognition portion 180. To manage the information of each semiconductor device separately. As shown in the configuration diagram of FIG. 3, the control unit 190 includes a confirmation unit 191, a storage unit 192, and a communication unit 193.

確認部191對條形碼識別部分180識別的條形碼進行分析,確認各個半導體裝置的標識符和與該半導體裝置有關的資訊。 The confirmation unit 191 analyzes the barcode recognized by the barcode recognition portion 180, and confirms the identifier of each semiconductor device and the information related to the semiconductor device.

儲存部192儲存確認部191中確認的各個半導體裝置的標識符和資訊或儲存來自測試器側的資訊。 The storage unit 192 stores the identifier and information of each semiconductor device confirmed in the confirmation unit 191 or stores information from the tester side.

通訊部193向測試器側傳送儲存在儲存部192或待儲存的各個半導體裝置的標識符和資訊或接收來自測試器側的資訊。 The communication section 193 transmits the identifier and information stored in the storage section 192 or the respective semiconductor devices to be stored or receives information from the tester side to the tester side.

另一方面,本實施例中為了半導體裝置的個別管理而將條形碼用作介質。條形碼包含與該半導體裝置有關的標識符和與生產該半導體裝置時的生產條件等有關的資訊, 由生產半導體裝置的生產商賦予。因此,只要是包含與該半導體裝置有關的標識符和生產該半導體裝置時的生產條件等的資訊,任何形態的介質均可理解為本說明書及權利要求書中所說的條形碼。 On the other hand, in the present embodiment, a barcode is used as a medium for individual management of a semiconductor device. The barcode includes information on an identifier associated with the semiconductor device and production conditions and the like at the time of producing the semiconductor device, Authorized by the manufacturer of the semiconductor device. Therefore, any form of medium can be understood as the bar code referred to in the specification and claims as long as it contains information on the identifier associated with the semiconductor device and the production conditions at the time of producing the semiconductor device.

以下說明具有上述結構的分選機100的運行。 The operation of the sorter 100 having the above structure will be described below.

加載部分150將裝載在使用者托盤上的半導體裝置向位於加載位置LP1、LP2上的加載板111、112加載。那麽,第一輸送機121、122會被驅動,將加載板111、112從加載位置LP1、LP2向測試位置TP移動。此時,加載板111、112在從加載位置LP1、LP2向測試位置TP移動的過程中,條形碼識別部分180對裝載在加載板111、112的半導體裝置的條形碼進行識別。控制部分190讀取所識別的條形碼來確認標識符及資訊後儲存標識符及資訊,並傳送至測試器側。此時,若需要藉助條形碼識別部分180的條形碼的識別,則兩個加載板111、112可以相互交互地從加載位置LP1、LP2向測試位置TP移動。 The loading portion 150 loads the semiconductor devices loaded on the user tray to the loading plates 111, 112 located at the loading positions LP 1 , LP 2 . Then, the first conveyors 121, 122 are driven to move the loading plates 111, 112 from the loading positions LP 1 , LP 2 to the test position TP. At this time, in the process of moving the loading plates 111, 112 from the loading positions LP 1 , LP 2 to the test position TP, the barcode identifying portion 180 recognizes the barcodes of the semiconductor devices loaded on the loading plates 111, 112. The control section 190 reads the identified barcode to confirm the identifier and information, stores the identifier and information, and transmits it to the tester side. At this time, if identification of the barcode by the barcode recognition portion 180 is required, the two loading plates 111, 112 can move from the loading positions LP 1 , LP 2 to the test position TP interactively with each other.

接著,測試部分160從位於測試位置TP的加載板111、112引出半導體裝置並使其與測試器側電連接後,若結束測試,則將引出的半導體裝置裝載到在測試位置TP等待的卸載板131、132。裝載有結束測試的半導體裝置的卸載板131、132從測試位置TP向卸載位置UP1、UP2移動。最後,卸載部分170從位於卸載位置UP1、UP2的卸載板131、132將半導體裝置卸載到空的使用者托盤。 Next, after the test portion 160 pulls out the semiconductor device from the loading plates 111, 112 at the test position TP and electrically connects it to the tester side, if the test is finished, the drawn semiconductor device is loaded to the unloading plate waiting at the test position TP. 131, 132. The unloading plates 131, 132 of the semiconductor device loaded with the end test are moved from the test position TP to the unloading positions UP 1 , UP 2 . Finally, the unloading portion 170 unloads the semiconductor device from the unloading plates 131, 132 at the unloading positions UP 1 , UP 2 to the empty user tray.

與條形碼識別部分有關的說明 Instructions related to the barcode recognition section

1.適用條形碼讀取器的情況 1. Applicable to the barcode reader

如圖4的結構圖所示,條形碼識別部分180包括兩個條形碼識別器181a、182a及移動器184a。 As shown in the block diagram of Fig. 4, the barcode recognition portion 180 includes two barcode recognizers 181a, 182a and a mover 184a.

條形碼識別器181a、182a作為條形碼讀取器,對加載在加載板111、112的半導體裝置的條形碼進行識別。本例中由於藉助條形碼讀取器讀取條形碼的速度慢、只能識別一個條形碼,因此為了識別條形碼而需要暫停在加載板111、112。因此,控制部分190在加載板111、112經過條形碼識別器181a、182a的下方時控制第一輸送機121、122,以使加載板111、112反覆四次移動及停止。當然,前方的條形碼識別器181a識別位於加載板111、112的前列的半導體裝置的條形碼,後方的條形碼識別器182a識別位於加載板111、112後列的半導體裝置的條形碼。 The barcode recognizers 181a and 182a recognize the barcodes of the semiconductor devices loaded on the loading plates 111 and 112 as barcode readers. In this example, since the barcode is read by the barcode reader at a slow speed and only one barcode can be recognized, it is necessary to pause the loading plates 111, 112 in order to recognize the barcode. Therefore, the control portion 190 controls the first conveyors 121, 122 when the loading plates 111, 112 pass under the bar code identifiers 181a, 182a, so that the loading plates 111, 112 are repeatedly moved and stopped four times. Of course, the front barcode recognizer 181a recognizes the barcode of the semiconductor device located in the front row of the loading plates 111, 112, and the rear barcode recognizer 182a recognizes the barcode of the semiconductor device located behind the loading plates 111, 112.

移動器184a使兩個條形碼識別器181a、182a沿著前後方向移動,並能夠以氣缸形式設置。因此,條形碼識別器181a、182a可設置於位於前方的加載板111的上方,也可設置於位於後方的加載板112的上方。根據如上所述的移動器184a的結構,僅以兩個條形碼識別器181a、182a也可讀取位於前方的加載板111和位於後方的加載板112所裝載的多個半導體裝置的條形碼。當然,半導體裝置的移動路徑為三個以上的情況下,藉助移動器184a的控制以兩個條形碼識別器181a、182a可讀取通過三個以上路徑移動的所有半導體裝置的條形碼。 The mover 184a moves the two barcode recognizers 181a, 182a in the front-rear direction and can be disposed in the form of a cylinder. Therefore, the barcode recognizers 181a, 182a may be disposed above the loading plate 111 located at the front, or may be disposed above the loading plate 112 located at the rear. According to the configuration of the mover 184a as described above, the bar code of the plurality of semiconductor devices mounted on the loading plate 111 located at the front and the loading plate 112 at the rear can be read by only the two barcode recognizers 181a, 182a. Of course, in the case where the movement path of the semiconductor device is three or more, the barcodes of all the semiconductor devices that are moved through the three or more paths can be read by the two barcode recognizers 181a, 182a by the control of the mover 184a.

並且,由於可與條形碼識別器181a、182a的前後的寬 度無關地減少前方的加載板111和後方的加載板112之間的距離,因此具有可減少裝置的前後寬度的優點。 And, because of the width of the front and rear of the barcode recognizers 181a, 182a The degree of distance between the front loading plate 111 and the rear loading plate 112 is reduced irrespectively, and thus has an advantage that the front and rear width of the device can be reduced.

2.適用區域相機的情況 2. The situation of the camera in the area

如圖5的結構圖所示,根據本實施例的條形碼識別部分180包括:條形碼識別器181b、照明器183b及移動器184b。 As shown in the structural diagram of Fig. 5, the barcode recognition portion 180 according to the present embodiment includes a barcode recognizer 181b, an illuminator 183b, and a mover 184b.

條形碼識別器181b以區域相機設置,一次性拍攝裝載於加載板111、112的2×2行列的形態排列的四個半導體裝置的條形碼。因此,控制部分190使加載板111、112僅停止兩次即可獲得八個半導體裝置的條形碼。若設置拍攝區域大的區域相機,則使加載板111、112僅停止一次即可獲得八個半導體裝置的條形碼。當然,所拍攝的條形碼藉助控制部分190來讀取,從而獲得與該半導體裝置有關的標識符和資訊。 The barcode recognizer 181b is provided with an area camera, and photographs the barcodes of the four semiconductor devices arranged in the form of 2 × 2 rows and columns of the loading plates 111 and 112 at a time. Therefore, the control portion 190 causes the loading plates 111, 112 to stop only twice to obtain the barcodes of the eight semiconductor devices. If the area camera having a large shooting area is set, the barcodes of the eight semiconductor devices can be obtained by stopping the loading plates 111, 112 only once. Of course, the captured barcode is read by the control portion 190 to obtain an identifier and information related to the semiconductor device.

照明器183b放置於條形碼識別器181b的下部而設置於條形碼識別器181b和加載板111、112之間,並包括反射板RP及照射源IS。 The illuminator 183b is placed at a lower portion of the barcode recognizer 181b and is disposed between the barcode recognizer 181b and the loading plates 111, 112, and includes a reflecting plate RP and an irradiation source IS.

反射板RP呈向上方突起的穹形,將藉助照射源IS照射的光向位於下方的半導體裝置的表面反射。如上所述的反射板RP具有以圓盤形穿透的識別窗RW來使半導體裝置的表面向區域相機開放,以免妨礙條形碼識別器181b的拍攝。 The reflecting plate RP has a meandering shape that protrudes upward, and reflects light irradiated by the irradiation source IS toward the surface of the semiconductor device located below. The reflecting plate RP as described above has the identification window RW penetrating in the shape of a disk to open the surface of the semiconductor device to the area camera so as not to hinder the photographing of the barcode recognizer 181b.

照射源IS將光照射至反射板RP側。即,本例中適用間接照明方式,藉助照射源IS照射的光藉助反射板RP反 射後,入射到半導體裝置的表面。較佳地,為了照明的均衡,如上所述的照射源IS以環形態排列在反射板RP的下部。較佳地,照射源IS以能夠照射多種色彩的光的方式設置。因為,藉助條形碼的顏色或底色等識別條件,條形碼識別器181b可進行特定顏色的照明的最優化的識別。例如,具有100個照射源IS的情況下,較佳地,以25個為單位來劃分發出藍色光、紅色光、綠色光及透明光的照射源IS並適當進行排列。 The illumination source IS illuminates the light to the side of the reflection plate RP. That is, in this example, the indirect illumination method is applied, and the light irradiated by the illumination source IS is reversed by the reflection plate RP. After the shot, it is incident on the surface of the semiconductor device. Preferably, for equalization of illumination, the illumination source IS as described above is arranged in a ring shape at a lower portion of the reflection plate RP. Preferably, the illumination source IS is provided in such a manner as to be capable of illuminating light of a plurality of colors. Because the recognition condition by the color or the background color of the barcode or the like, the barcode recognizer 181b can perform the optimal recognition of the illumination of the specific color. For example, in the case of having 100 illumination sources IS, it is preferable to divide the illumination sources IS that emit blue light, red light, green light, and transparent light in 25 units and arrange them appropriately.

移動器184b將條形碼識別器181b向前後方向移動。因此,放置於條形碼識別器181b的照明器183b也藉助移動器184b同時移動。 The mover 184b moves the barcode recognizer 181b in the front-rear direction. Therefore, the illuminator 183b placed on the barcode recognizer 181b is also simultaneously moved by the mover 184b.

另一方面,根據變形例,如圖6的結構圖所示,照明器184b’可以由兩個反射鏡RM和照射源IS構成。 On the other hand, according to the modification, as shown in the structural diagram of Fig. 6, the illuminator 184b' can be constituted by two mirrors RM and an illumination source IS.

3.適用線陣相機(line scan camera)的情況 3. For the case of line scan camera

如圖7的結構圖所示,根據本實施例的條形碼識別部分180可包括條形碼識別器181c、照明器183c及移動器184c。 As shown in the structural diagram of Fig. 7, the barcode recognition portion 180 according to the present embodiment may include a barcode recognizer 181c, a illuminator 183c, and a mover 184c.

條形碼識別器181c設置為線陣相機,對裝載於加載板111、112的半導體裝置的條形碼進行識別。因此,控制部分190能夠使加載板111、112不停止而持續移動,獲得八個半導體裝置的條形碼。 The barcode recognizer 181c is provided as a line camera to recognize the barcode of the semiconductor device mounted on the loading plates 111, 112. Therefore, the control portion 190 can cause the loading plates 111, 112 to continue to move without stopping, obtaining barcodes of eight semiconductor devices.

照明器183c設置於條形碼識別器181c的下部並包括設置部件IE及照射源IS。 The illuminator 183c is provided at a lower portion of the barcode recognizer 181c and includes a setting member IE and an illumination source IS.

設置部件IE呈下方具有向上方突出的半圓筒面的形 象。設置部件IE具有垂直於加載板111、112移動的方向並向前後方向以長的方式穿透的識別窗RW,以使半導體裝置的表面向線陣相機開放,以免妨礙條形碼識別器181c的掃描。另外,設置部件IE藉助結合部件JE與條形碼識別器181c相結合,從而可與條形碼識別器181c同時移動。 The setting member IE has a semi-cylindrical shape protruding upward from below. Elephant. The setting member IE has an identification window RW that is perpendicular to the direction in which the loading plates 111, 112 move and penetrates in the front-rear direction in a long manner to open the surface of the semiconductor device to the line camera so as not to interfere with the scanning of the bar code identifier 181c. Further, the setting member IE is combined with the barcode recognizer 181c via the joint member JE so as to be movable simultaneously with the barcode recognizer 181c.

照射源IS設置於設置部件IE的半圓筒面上將光照射至半導體裝置的表面。較佳地,照射源IS以能夠照射多種色彩的光的方式設置。 The illumination source IS is disposed on the semi-cylindrical surface of the setting member IE to illuminate the surface of the semiconductor device. Preferably, the illumination source IS is provided in such a manner as to be capable of illuminating light of a plurality of colors.

移動器184c使條形碼識別器181a向前後方向移動。 The mover 184c moves the barcode recognizer 181a in the forward and backward directions.

與資訊處理方法有關的說明 Instructions related to information processing methods

接著,參照圖8的流程圖說明在具有上述結構的分選機100實施的資訊處理方法。 Next, an information processing method implemented by the sorter 100 having the above configuration will be described with reference to a flowchart of FIG.

1.識別步驟S801 1. Identification step S801

加載板111、112從加載位置LP1、LP2向測試位置TP移動時,條形碼識別部分180對裝載在加載板111、112的半導體裝置的條形碼進行識別。 When the loading plates 111, 112 are moved from the loading positions LP 1 , LP 2 to the test position TP, the barcode identifying portion 180 recognizes the barcodes of the semiconductor devices loaded on the loading plates 111, 112.

2.確認步驟S802 2. Confirmation step S802

控制部分190的確認部191對步驟S801中識別的條形碼進行分析來確認與各個半導體裝置的標識符和該半導體裝置有關資訊。因此,藉助確認部191可確認該半導體裝置在何種生產條件等生產的。 The confirmation unit 191 of the control section 190 analyzes the barcode identified in step S801 to confirm the identifier of each semiconductor device and the information about the semiconductor device. Therefore, the confirmation unit 191 can confirm which production conditions and the like of the semiconductor device are produced.

3.儲存步驟S803 3. Storage step S803

儲存部192儲存在步驟S802確認的各個半導體裝置的標識符和資訊。 The storage unit 192 stores the identifiers and information of the respective semiconductor devices confirmed in step S802.

4.傳送步驟S804 4. Transfer step S804

控制部分190的通訊部193將在步驟S803中儲存的標識符合資訊傳送至測試器側。因此,測試器側可將特定半導體裝置的測試結果與特定半導體裝置的標識符連接來儲存。 The communication section 193 of the control section 190 transmits the identification compliance information stored in step S803 to the tester side. Therefore, the tester side can connect the test result of the specific semiconductor device to the identifier of the specific semiconductor device for storage.

當然,步驟S803和步驟S084根據實施方式可同時實施或依次實施。 Of course, step S803 and step S084 may be implemented simultaneously or sequentially according to an embodiment.

5.接收步驟S805 5. Receiving step S805

通訊部193接收與來自從測試器側的與特定半導體裝置的測試結果有關的資訊。 The communication section 193 receives information related to the test result from the tester side with respect to the specific semiconductor device.

6.記錄步驟S806 6. Recording step S806

儲存部192將與在儲存步驟S805接收的測試結果有關的資訊與特定半導體裝置的標識符連接來記錄並儲存。 The storage unit 192 records and stores information related to the test result received at the storage step S805 with the identifier of the specific semiconductor device.

根據本實施例,由於在測試之前實施步驟S804,因此測試器可獲知待測試的半導體裝置的標識符及資訊。但是可根據實施方式,條形碼識別部分180可設置於測試位置TP和卸載位置UP1、UP2之間,此種情況下,測試器可獲知已測試的半導體裝置的標識符及資訊。當然,無論任何情況下測試器可準確特定待測試或已測試的半導體裝置。 According to the present embodiment, since step S804 is implemented before the test, the tester can know the identifier and information of the semiconductor device to be tested. However, according to an embodiment, the barcode recognition portion 180 may be disposed between the test position TP and the unloading positions UP 1 , UP 2 , in which case the tester may know the identifier and information of the tested semiconductor device. Of course, the tester can accurately specify the semiconductor device to be tested or tested in any case.

另一方面,在步驟S804向測試器側傳送的資訊中包含與當前分選機100的測試條件有關的資訊而同時傳送。另外,與當前分選機100的測試條件有關的資訊在步驟S806中也記錄並保管。 On the other hand, the information transmitted to the tester side in step S804 contains information related to the test conditions of the current sorter 100 and is simultaneously transmitted. In addition, information related to the test conditions of the current sorter 100 is also recorded and stored in step S806.

並且,步驟S806中記錄並儲存的資訊將在之後在半 導體裝置的再測試中會被利用,在進行再測試的情況下再測試結果也儲存在儲存部192。 And, the information recorded and stored in step S806 will be half later The retesting of the conductor device is utilized, and in the case of retesting, the retest result is also stored in the storage portion 192.

另一方面,以上說明的實施例僅為說明多種形態的分選機中的一例,本發明並不局限於以上所關於的分選機。即,本發明可適用於任何形態的分選機。 On the other hand, the embodiment described above is only an example of a sorting machine for explaining various forms, and the present invention is not limited to the above-described sorting machine. That is, the present invention is applicable to a sorting machine of any form.

因此,照圖式的實施例對本發明進行了具體說明,然而上述實施例僅以本發明的較佳實施例來說明,因此不能理解為本發明限制於上述實施例,本發明請求保護的範圍應由申請專利範圍及其等同範圍而理解。 Therefore, the present invention has been specifically described with reference to the embodiments of the present invention. However, the above-described embodiments are only described in the preferred embodiments of the present invention, and therefore the invention is not limited to the above embodiments, and the scope of the claimed invention should be It is understood by the scope of the patent application and its equivalent scope.

100‧‧‧分選機 100‧‧‧ sorting machine

111、112‧‧‧加載板 111, 112‧‧‧ loading board

121、122‧‧‧第一輸送機 121, 122‧‧‧ first conveyor

131、132‧‧‧卸載板 131, 132‧‧‧ Unloading board

141、142‧‧‧第二輸送機 141, 142‧‧‧Second conveyor

150‧‧‧加載部分 150‧‧‧Loading section

160‧‧‧測試部分 160‧‧‧Test section

170‧‧‧卸載部分 170‧‧‧Unloading section

180‧‧‧條形碼識別部分 180‧‧‧Barcode Identification Section

190‧‧‧控制部分 190‧‧‧Control section

LP1、LP2‧‧‧加載位置 LP 1 , LP 2 ‧‧‧ loading position

UP1、UP2‧‧‧卸載位置 UP 1 , UP 2 ‧‧‧ Unloading position

LS‧‧‧裝載槽 LS‧‧‧ loading slot

Claims (10)

一種半導體裝置測試用分選機,包括:裝載要素,能夠裝載待測試的半導體裝置;輸送機,用於輸送該裝載要素;加載部分,將待測試的半導體裝置向位於加載位置的該裝載要素加載;測試部分,對藉助該加載部分向該裝載要素加載的半導體裝置進行測試;卸載部分,將在該測試部分結束測試的半導體裝置從位於卸載位置的該裝載要素卸載;條形碼識別部分,在從藉助該加載部分加載的位置移動至藉助該卸載部分卸載的位置的多個半導體裝置的移動路徑上的一位置,識別對多個半導體裝置賦予的條形碼;以及控制部分,對該輸送機、加載部分、測試部分、卸載部分及條形碼識別部分進行控制,並讀取藉助該條形碼識別部分識別的條形碼,來分別管理每個半導體裝置的資訊。 A semiconductor device testing sorting machine comprising: a loading element capable of loading a semiconductor device to be tested; a conveyor for conveying the loading element; and a loading portion loading the semiconductor device to be tested to the loading element at a loading position a test portion that tests a semiconductor device loaded with the loading element by the loading portion; and an unloading portion that unloads the semiconductor device that is tested at the end of the test portion from the loading element at the unloading position; the barcode recognition portion The loading portion loaded position moves to a position on a moving path of the plurality of semiconductor devices at a position unloaded by the unloading portion, identifies a barcode given to the plurality of semiconductor devices; and a control portion, the conveyor, the loading portion, The test portion, the unloading portion, and the barcode recognition portion are controlled, and the barcode recognized by the barcode recognition portion is read to separately manage the information of each semiconductor device. 如請求項1所記載的半導體裝置測試用分選機,其中在該裝載要素,至少沿著該裝載要素移動的方向能夠並排裝載多個半導體裝置;該條形碼識別部分設置於該裝載要素的移動路徑的上方,用於依次識別裝載於移動的該裝載要素的多個半導體裝置的條形碼; 當該裝載要素經過該條形碼識別部分的下方時,該控制部分控制該輸送機,使得該裝載要素反覆一次以上的移動和停止,以使該條形碼識別部分依次識別對裝載於該裝載要素的多個半導體裝置賦予的條形碼。 The semiconductor device testing sorting machine according to claim 1, wherein the loading element is capable of loading a plurality of semiconductor devices side by side in at least a direction along which the loading element moves; the barcode identifying portion is disposed in a moving path of the loading element Above, for sequentially identifying barcodes of a plurality of semiconductor devices mounted on the moving loading element; When the loading element passes under the barcode identifying portion, the control portion controls the conveyor such that the loading element repeatedly moves and stops more than once, so that the barcode identifying portion sequentially identifies the plurality of loading elements loaded on the loading element A barcode given by a semiconductor device. 如請求項1所記載的半導體裝置測試用分選機,其中該條形碼識別部分包括:條形碼識別器,用於識別條形碼;照明器,用於使該條形碼識別器識別條形碼,而向半導體裝置的表面照射照明。 The semiconductor device test sorting machine according to claim 1, wherein the barcode identifying portion includes: a barcode recognizer for identifying the barcode; and an illuminator for causing the barcode recognizer to recognize the barcode to the surface of the semiconductor device Illumination lighting. 如請求項3所記載的半導體裝置測試用分選機,其中該照明器設置於該條形碼識別器和該裝載要素之間,該照明器具有識別窗,用於使該條形碼識別器識別位於該照明器的下方的半導體裝置的條形碼。 The semiconductor device test sorting machine according to claim 3, wherein the illuminator is disposed between the barcode identifier and the loading element, the illuminator having an identification window for causing the barcode identifier to be located at the illumination The barcode of the semiconductor device below the device. 如請求項4所記載的半導體裝置測試用分選機,其中該照明器包括:設置部件,其下方具有向上方突出的半圓筒面;以及至少一個照射源,設置於該設置部件的該半圓筒面上,該識別窗設置於該設置部件。 The semiconductor device test sorting machine according to claim 4, wherein the illuminator comprises: a setting member having a semi-cylindrical surface protruding upwardly below; and at least one illumination source disposed in the semi-cylinder of the setting member On the face, the identification window is disposed on the setting component. 如請求項4所記載的半導體裝置測試用分選機,其中該照明器包括:反射板,呈向上方突起的穹形;以及 至少一個照射源,設置於該反射板的下部,通過該反射板向半導體裝置提供間接照明,該識別窗設置於該反射板。 The semiconductor device test sorting machine according to claim 4, wherein the illuminator comprises: a reflecting plate having a dome shape protruding upward; At least one illumination source is disposed at a lower portion of the reflector, and the indirect illumination is provided to the semiconductor device through the reflector, and the identification window is disposed on the reflector. 如請求項1所記載的半導體裝置測試用分選機,其中該裝載要素及輸送機設有多個,以使半導體裝置以多個路徑移動,該條形碼識別部分包括:條形碼識別器,用於識別條形碼;以及移動器,移動該條形碼識別器,來使該條形碼識別器選擇性地位於該多個路徑的上方。 The semiconductor device test sorting machine according to claim 1, wherein the loading element and the conveyor are provided in plurality to move the semiconductor device in a plurality of paths, the barcode recognition portion comprising: a barcode recognizer for identifying a barcode; and a mover that moves the barcode identifier to selectively position the barcode identifier above the plurality of paths. 如請求項7所記載的半導體裝置測試用分選機,其中該條形碼識別部分還包括照明器,用於藉助該條形碼識別器識別條形碼而向半導體裝置表面照射照明,該條形碼識別器和該照明器藉助結合部件相互結合,該條形碼識別器和該照明器藉助該移動器的工作同時移動。 The semiconductor device test sorting machine according to claim 7, wherein the barcode identifying portion further includes an illuminator for illuminating a surface of the semiconductor device by the barcode recognizer identifying the barcode, the barcode recognizer and the illuminator The bar code identifier and the illuminator are simultaneously moved by the operation of the mover by means of the coupling members. 一種半導體裝置測試用分選機的資訊處理方法,包括:識別步驟,在半導體裝置移動的路徑上識別對半導體裝置賦予的條形碼;確認步驟,對該識別步驟中識別的條形碼進行分析,確認各個半導體裝置的標識符以及與該半導體裝置有關的資訊;儲存步驟,儲存該確認步驟中確認的各個半導體裝置的標識符和資訊;以及 傳送步驟,向測試器側傳送該儲存步驟中儲存的標識符和資訊,在測試器側以與該半導體裝置的標識符相關聯的方式儲存半導體裝置的測試結果;對半導體裝置進行測試之前或之後實施該識別步驟及該傳送步驟。 An information processing method for a semiconductor device test sorting machine, comprising: an identifying step of identifying a barcode given to a semiconductor device on a path in which the semiconductor device moves; a confirming step, analyzing the barcode identified in the identifying step, and confirming each semiconductor An identifier of the device and information related to the semiconductor device; a storing step of storing an identifier and information of each semiconductor device confirmed in the confirming step; a transmitting step of transmitting the identifier and information stored in the storing step to the tester side, storing the test result of the semiconductor device on the tester side in association with the identifier of the semiconductor device; before or after testing the semiconductor device The identification step and the transmitting step are performed. 如請求項9所記載的半導體裝置測試用分選機的資訊處理方法,其中還包括:記錄步驟,與半導體裝置的標識符相關聯的方式記錄從測試器側接收的與半導體裝置有關的測試結果。 The information processing method of the semiconductor device test sorting machine according to claim 9, further comprising: a recording step of recording a test result related to the semiconductor device received from the tester side in association with the identifier of the semiconductor device .
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