KR102635479B1 - Handler for testing semiconductor devices - Google Patents

Abstract

The present invention relates to a handler used to test semiconductor devices and its information processing technology.
The handler for testing semiconductor devices according to the present invention includes a barcode reader that recognizes a barcode printed on the semiconductor devices at a point along the movement path of the semiconductor devices moving from loading by the loading portion to unloading by the unloading portion; and a control unit that controls the barcode reader, reads the barcode recognized by the barcode reader, and manages information for each individual semiconductor device. Includes.
According to the present invention, since information is managed for each individual semiconductor device rather than for each lot, the reliability of test results and management capabilities for individual semiconductor devices are improved, and history management becomes possible.

Description

Handler for semiconductor device testing {HANDLER FOR TESTING SEMICONDUCTOR DEVICES}

The present invention relates to a handler that supplies semiconductor devices to a tester.

After production, semiconductor devices must undergo testing before shipping. For this, a tester and a handler are needed, and the present invention relates to the handler.

The handler supports the tester to test semiconductor devices by electrically connecting multiple semiconductor devices to the tester. At this time, the handler stimulates the semiconductor devices in an environment according to the required test conditions and then electrically connects them to the tester. These handlers can be manufactured in various forms, such as in Korean Patent Publication Nos. 10-2011-0136440, 10-2012-0106320, and 10-2014-0121909, depending on test conditions, types of semiconductor devices to be tested, or customer requests. You can.

Typically, a handler is equipped with a loading element to allow multiple semiconductor devices to be moved together or tested together at once. Depending on the type of handler, the semiconductor devices may be electrically connected to the tester while loaded on the loading element, or may be electrically connected to the tester after being removed from the loading element. Here, the loading element has various configurations and names, such as test tray, shuttle, and loading plate, depending on the type of handler.

Meanwhile, semiconductor devices have been tested together in lot units of the same type produced under the same production conditions as in Korean Patent Publication No. 10-2009-0005901. The reason for this was to track when and under what conditions products produced were defective by testing quantities produced under the same conditions. Because testing is done in lot units, the handler loads or unloads semiconductor devices into and out of the loading element using a first-in-first-out method to prevent semiconductor devices from being mixed.

However, during the logistics flow during the testing process, semiconductor devices may be separated or mixed, and 100% first-in-first-out may not be possible due to errors by handlers or workers. Therefore, there is often a need to check whether each lot is managed. In particular, in recent years, production conditions have become more fragmented and lot quantities are decreasing, so we must pay more attention.

In addition, in order to optimize production conditions that are becoming more refined, there is a need to compare the characteristics of semiconductor devices tested under what production conditions and under what environmental conditions.

However, the current method of managing lot by lot does not solve the problems mentioned above or meet the need.

Therefore, it is predicted that there will come a time in the near future when individual management of semiconductor devices will be necessary. The present invention relates to a technology that can be used when a large quantity of semiconductor devices are supplied at once and individual management of the semiconductor devices is required in a handler where a large number of semiconductor devices are tested together at once.

The present invention provides technology for a handler capable of managing individual histories of semiconductor devices.

A handler for semiconductor device testing according to the present invention to achieve the above object includes a loading element capable of loading a semiconductor device to be tested; A transporter transporting the loading element; a loading portion that loads the semiconductor device to be tested onto the loading element at a loading position; a test portion that tests the semiconductor device loaded into the loading element by the loading portion; an unloading portion that unloads the semiconductor devices for which testing has been completed in the test portion from the loading element at an unloading position; a barcode recognition portion that recognizes a barcode printed on the semiconductor devices at a point along the moving path of the semiconductor devices from loading by the loading portion to unloading by the unloading portion; and a control part that controls the transporter, loading part, test part, unloading part and barcode recognition part, and manages information for each individual semiconductor device by reading the barcode recognized by the barcode recognition part. Includes.

A plurality of semiconductor devices may be loaded on the loading element so that they are arranged side by side at least in the direction in which the loading element moves, and the barcode recognition portion sequentially recognizes the barcodes of the semiconductor devices loaded on the moving loading element. It is installed above the path along which the element moves, and the control part causes the barcode recognition part to repeat movement and stop at least once when the loading element passes below the barcode recognition part. The transporter is controlled so that barcodes printed on a plurality of semiconductor devices loaded on the machine can be sequentially recognized.

The barcode recognition part includes a barcode reader that recognizes a barcode; An illuminator that illuminates the surface of the semiconductor device for barcode recognition by the barcode reader; Includes.

The illuminator is disposed between the barcode reader and the loading element, and the illuminator has a recognition window through which the barcode reader can recognize a barcode of a semiconductor device below the illuminator.

The illuminator includes an installation member having an upwardly convex semi-cylindrical surface at the bottom; and at least one irradiator installed on the semi-cylindrical surface of the installation member; It includes, and the recognition window is provided on the installation member.

The illuminator includes a dome-shaped reflector convex upward; and at least one irradiator installed below the reflector to provide indirect illumination to the semiconductor device through the reflector. It includes, and the recognition window is provided on the reflector.

The loading elements and transporters are provided in plural pieces so that the semiconductor devices move through multiple paths, and the bar code recognition part includes a bar code reader that recognizes bar codes; and a mover that moves the barcode reader so that the barcode reader can be selectively positioned above the plurality of paths. Includes.

The barcode recognition part includes an illuminator that illuminates the surface of the semiconductor device for barcode recognition by the barcode reader; It further includes, wherein the barcode reader and the illuminator are coupled to each other by a coupling member, so that the barcode reader and the illuminator move together by the operation of the mover.

The information processing method of the handler for testing semiconductor devices according to the present invention to achieve the above object includes a recognition step of recognizing a barcode printed on a semiconductor device on a path along which the semiconductor device moves; A confirmation step of analyzing the barcode recognized in the recognition step to confirm the identifier for each semiconductor device and information about the corresponding semiconductor device; A storage step of storing identifiers and information for each semiconductor device confirmed in the confirmation step; and a transmission step of transmitting the identifier and information stored in the storage step to the tester so that the tester can store the test result of the semiconductor device by linking it to the identifier of the semiconductor device. It includes, wherein the recognition step and the transmission step are performed before or after testing the semiconductor device.

The information processing method of the semiconductor device test handler described above includes a recording step of linking the test results for the semiconductor device from the tester to the identifier of the semiconductor device and recording them; It may further include.

The present invention has the following effects because the individual history of semiconductor devices can be managed using barcodes in a handler where a large number of semiconductor devices are tested together after they are supplied in large quantities.

First, even if semiconductor devices are mixed during the test process, it is possible to check information about each semiconductor device.

Second, it becomes possible to confirm what quality of semiconductor device was completed through what production and testing conditions.

Third, the development direction for semiconductor devices can be established more precisely.

Fourth, because all history can be stored and managed, the history can be confirmed even during retest.

Fifth, since the role of managers in preventing problems such as mixing of semiconductor devices is reduced, the utilization rate of manpower can be increased accordingly.

1 and 2 are conceptual plan views of a semiconductor device test handler according to an embodiment of the present invention.
Figure 3 is a configuration diagram of the control part applied to the handler of Figure 1.
FIG. 4 is a structural diagram according to a first example of a barcode recognition portion that can be applied to the handler of FIG. 1.
FIG. 5 is a structural diagram according to a second example of a barcode recognition portion that can be applied to the handler of FIG. 1.
Figure 6 is a modified example of the barcode recognition part of Figure 5.
FIG. 7 is a structural diagram according to a third example of a barcode recognition portion that can be applied to the handler of FIG. 1.
FIG. 8 is a flowchart of an information processing method performed in the handler of FIG. 1.

Hereinafter, for the sake of brevity, overlapping descriptions will be omitted or compressed as much as possible, and preferred embodiments according to the present invention will be described.

<Description of the basic configuration of the handler>

1 and 2 are conceptual plan views of a semiconductor device test handler 100 (hereinafter abbreviated as 'handler') according to an embodiment of the present invention.

As shown in Figure 1, the handler 100 according to an embodiment of the present invention includes two loading plates (111, 112), two first transporters (121, 122), two unloading plates (131, 132), It includes two second transporters (141, 142), a loading part (150), a test part (160), an unloading part (170), a barcode recognition part (180), and a control part (190).

The loading plates (111, 112) are moved between the loading positions (LP ₁ , LP ₂ ) and the test position (TP) by the first transporters (121, 122), and have a loading groove ( LS). Here, the eight loading grooves (LS) are arranged in a 2×4 matrix. Accordingly, the semiconductor elements are stacked so that two are arranged side by side in the front-to-back direction, and four are arranged side by side in the left and right directions in which the loading plates 111 and 112 move. That is, the loading plates 111 and 112 function as loading elements on which semiconductor devices are loaded.

The first transporters 121 and 122 transport the loading plates 111 and 112 so that the loading plates 111 and 112 can be selectively positioned at the loading positions LP ₁ and LP ₂ and the test positions TP.

The unloading plates (131, 132) are moved between the test position (TP) and the unloading positions (UP ₁ , UP ₂ ) by the second transporters (141, 142), and are loaded with eight semiconductor devices. It has grooves (LS).

The second transporters (141, 142) have unloading plates (131, 132) so that the unloading plates (131, 132) can be selectively positioned at the test position (TP) and the unloading positions (UP ₁ , UP ₂ ). transport

The loading portion 150 loads the semiconductor devices to be tested from the customer tray to the loading plates 111 and 112 at the loading positions LP ₁ and LP ₂ .

The test part 160 electrically connects the eight semiconductor devices loaded onto the loading plates 111 and 112 by the loading part 150 to the tester. This test portion 160 may be provided with a test chamber 161 to block the external environment to a certain extent in order to maintain the stimulation state of the semiconductor devices. In addition, the test portion 160 is implemented to extract semiconductor devices from the loading plates 111 and 112 and electrically connect them to the tester, as referenced in Korean Patent Publication No. 10-2014-0121909. Of course, depending on implementation, the semiconductor device loaded on the loading plates 111 and 112 may be electrically connected to the tester.

The unloading portion 170 unloads the semiconductor devices for which testing has been completed from the unloading plates 131 and 132 at the unloading positions UP ₁ and UP ₂ into an empty customer tray.

The barcode recognition part 180 is installed above the path along which the loading plates 111 and 112 move, and moves the loading plates 111 and 112 from the loading positions (LP ₁ and LP ₂ ) to the test position (TP). In the process, the barcode of the semiconductor device loaded on the loading plates 111 and 112 passing below the barcode recognition portion 180 is recognized. In this embodiment, the barcode recognition part 180 is provided between the loading position (LP ₁ , LP ₂ ) and the test position (TP). However, depending on the implementation, as long as it is possible to identify the semiconductor device by recognizing the barcode printed on the semiconductor device on the movement path of the moving semiconductor device from loading to unloading in the handler 100, the barcode recognition part 180 ) may be provided at any point on the movement path of the semiconductor device.

In this embodiment, since the barcode recognition part 180 is provided between the loading position (LP ₁ , LP ₂ ) and the test position (TP), the moving distance of the loading plates 111 and 112 and the unloading plates 131 and 132 )'s travel distance is different. For this reason, as mentioned above, the first transporters 121 and 122 for moving the loading plates 111 and 112 and the second transporters 141 and 142 for moving the unloading plates 131 and 132 are separately configured. do. However, if the barcode recognition part 180 is provided in a position other than between the loading position (LP ₁ , LP ₂ ) and the test position (TP) or between the test position (TP) and the unloading position (UP ₁ , UP ₂ ) It may be configured to move the loading plates 111 and 112 and the unloading plates 131 and 132 together using only two transporters.

And in the handler 100 according to this embodiment, the loading plates 111 and 112 and the unloading plates 131 and 132 are provided in pairs as shown in FIG. 2, so the movement path (C ₁ , C ₂ ) of the semiconductor device There are two. Therefore, the barcode recognition part 180 must be configured to recognize both the barcode of the semiconductor device loaded on the front loading plate 111 and the barcode of the semiconductor device loaded on the rear loading plate 112.

Since the above barcode recognition part 180 is the most important feature of the present invention, it will be described by embodiment in a separate table of contents.

The control part 190 includes first transporters 121 and 122, second transporters 141 and 142, a loading part 150, a test part 160, an unloading part 170 and a barcode recognition part 180. Controls and reads barcodes recognized by the barcode recognition unit 180 to manage information for each individual semiconductor device. This control part 190 includes a confirmation unit 191, a storage unit 192, and a communication unit 193, as shown in the configuration diagram of FIG. 3.

The verification unit 191 analyzes the barcode recognized by the barcode recognition unit 180 and verifies the identifier for each semiconductor device and information about the corresponding semiconductor device.

The storage unit 192 stores the identifier and information for each semiconductor device confirmed in the confirmation unit 191 or stores information received from the tester.

The communication unit 193 transmits identifiers and information for each semiconductor device stored or to be stored in the storage unit 192 to the tester or receives information from the tester.

Meanwhile, in this embodiment, a barcode is used as a medium for individual management of semiconductor devices. The barcode contains information about the identifier for the semiconductor device and the production conditions when producing the semiconductor device, and is printed on the semiconductor device by the manufacturer that produces the semiconductor device. Therefore, any form of media should be interpreted as a barcode as referred to in this specification and claims if it contains information about the identifier for the semiconductor device and the production conditions when producing the semiconductor device.

Next, the operation of the handler 100 having the above configuration will be described.

The loading portion 150 loads the semiconductor devices loaded on the customer tray onto the loading plates 111 and 112 at the loading positions LP ₁ and LP ₂ . Then, the first transporters 121 and 122 are operated to move the loading plates 111 and 112 from the loading positions LP ₁ and LP ₂ to the test position TP. At this time, in the process of moving the loading plates (111, 112) from the loading positions (LP ₁ , LP ₂ ) to the test position (TP), the barcode recognition part 180 is a semiconductor device loaded on the loading plates (111, 112). recognizes the barcode. Then, the control part 190 reads the recognized barcode, checks the identifier and information, stores the identifier and information, and transmits it to the tester. At this time, both loading plates (111, 112) are implemented to alternately move from the loading positions (LP ₁ , LP ₂ ) to the test position (TP), if necessary for barcode recognition by the barcode recognition part 180. It can be.

Continuing, the test part 160 draws out the semiconductor elements from the loading plates 111 and 112 at the test position (TP) and electrically connects them to the tester. When the test is completed, the drawn semiconductor elements are moved to the test position (TP). ) and load it on the unloading plates (131, 132) waiting in the waiting area. And the unloading plates (131, 132) on which the semiconductor devices for which testing has been completed are loaded move from the test position (TP) to the unloading positions (UP ₁ , UP ₂ ). Finally, the unloading portion 170 unloads the semiconductor devices from the unloading plates 131 and 132 at the unloading positions (UP ₁ and UP ₂ ) into an empty customer tray.

<Explanation of barcode recognition>

1. When a barcode reader is applied

The barcode recognition part 180 may include two barcode readers (181a, 182a) and a mover (184a) as shown in the structural diagram of FIG. 4.

The barcode readers 181a and 182a are provided as barcode readers and recognize barcodes of semiconductor devices loaded on the loading plates 111 and 112. In this example, the barcode reading speed is slow and only one barcode can be recognized by the barcode reader, so the loading plates 111 and 112 need to be paused to recognize the barcode. Therefore, the control part 190 moves the loading plates 111 and 112 four times when the loading plates 111 and 112 pass below the barcode readers 181a and 182a, and moves and stops the first transporter 121. , 122) must be controlled. Of course, the front barcode reader 181a recognizes the barcodes of the semiconductor elements in the front row of the loading plates 111 and 112, and the rear barcode reader 182a recognizes the barcodes of the semiconductor elements in the rear row of the loading plates 111 and 112. Recognize their barcode.

The mover 184a moves the two barcode readers 181a and 182a in the front and rear direction and may be provided as a cylinder. Accordingly, the barcode readers 181a and 182a may be located above the loading plate 111 at the front or above the loading plate 112 at the rear. Due to this configuration of the mobile unit 184a, the two barcode readers 181a and 182a can read all barcodes of semiconductor devices loaded on the front loading plate 111 and the rear loading plate 112. Of course, even when there are three or more movement paths of the semiconductor devices, the barcodes of all semiconductor devices moving through three or more paths can be read by the two barcode readers (181a, 182a) under the control of the mover (184a).

In addition, since the gap between the front loading plate 111 and the rear loading plate 112 can be narrowed regardless of the front-to-back width of the barcode readers (181a, 182a), there is also the advantage of reducing the front-to-back width of the equipment.

2. When area camera is applied

The barcode recognition part 180 according to this example may include a barcode reader 181b, an illuminator 183b, and a mover 184b, as shown in the structural diagram of FIG. 5.

The barcode reader (181b) is equipped with an area camera and photographs the barcodes of four semiconductor devices arranged in a 2x2 matrix loaded on the loading plates (111, 112) at once. Therefore, the control unit 190 can obtain the barcodes of eight semiconductor devices by stopping the loading plates 111 and 112 only twice. If an area camera with a wide shooting area is used, barcodes of eight semiconductor devices can be obtained with just one stop of the loading plates (111, 112). Of course, the photographed barcodes are read by the control unit 190 to obtain identifiers and information about the corresponding semiconductor devices.

The illuminator 183b is mounted on the lower part of the barcode reader 181b so as to be disposed between the barcode reader 181b and the loading plates 111 and 112, and includes a reflector RP and irradiators IS.

The reflector (RP) has a dome shape that is convex upward and reflects the light irradiated by the irradiation sources (IS) onto the surface of the semiconductor device below. This reflector (RP) is provided with a disk-shaped recognition window (RW) to open the surface of the semiconductor device to the area camera so as not to interfere with the shooting of the barcode reader (181b).

Illuminators (IS) irradiate light toward the reflector (RP). That is, in this example, an indirect lighting method is used in which the light irradiated by the irradiation sources (IS) is reflected by the reflector (RP) and then incident on the surface of the semiconductor device. These irradiation sources (IS) are preferably arranged in a ring shape at the bottom of the reflector (RP) to balance lighting. Additionally, it is desirable for irradiators (IS) to be equipped to irradiate light of various colors. This is because the barcode reader 181b can perform recognition optimized for lighting of a specific color depending on recognition conditions such as the color or background color of the barcode. For example, when 100 irradiation sources (IS) are provided, it is desirable to divide the irradiation sources (IS) emitting blue light, red light, green light, and transparent light into 25 each and arrange them appropriately.

The mover 184b moves the barcode reader 181b in the forward and backward directions. Accordingly, the illuminator 183b mounted on the barcode reader 181b is also moved by the mover 184b.

Meanwhile, according to a modified example, as shown in the structural diagram of FIG. 6, the illuminator 184b' may be composed of two reflection mirrors RM and an irradiation source IS.

3. When a line scan camera is applied

The barcode recognition part 180 according to this example may include a barcode reader 181c, an illuminator 183c, and a mover 184c, as shown in the structural diagram of FIG. 7.

The barcode reader 181c is equipped with a line scan camera and scans the barcodes of the semiconductor devices loaded on the loading plates 111 and 112. Therefore, the control unit 190 can obtain barcodes of eight semiconductor devices by continuously moving the loading plates 111 and 112 without stopping them.

The illuminator 183c is provided below the barcode reader 181c and includes an installation member (IE) and an examiner (IS).

The installation member IE has a shape having a semi-cylindrical surface convex upward at the bottom. This installation member (IE) is an elongated hole in the front-back direction perpendicular to the direction in which the loading plates 111 and 112 move in order to open the surface of the semiconductor device to the line scan camera so as not to interfere with the scanning of the barcode reader 181c. It is provided with a recognition window (RW). In addition, the installation member (IE) is coupled to the barcode reader (181c) by a coupling member (JE) and can move together with the barcode reader (181c).

Irradiators (IS) are installed on the semi-cylindrical surface of the installation member (IE) to irradiate light onto the surface of the semiconductor device. Here too, it is desirable for irradiators (IS) to be equipped to irradiate light of various colors.

The mover 184c moves the barcode reader 181a in the forward and backward directions.

<Description of information processing methods>

Next, the information processing method performed in the handler 100 having the above configuration will be described with reference to the flowchart of FIG. 8.

1. Recognition<S801>

The barcode recognition part 180 recognizes the barcode of the semiconductor device loaded on the loading plates 111 and 112 when the loading plates 111 and 112 move from the loading positions (LP ₁ and LP ₂ ) to the test position (TP). .

2. Confirm<S802>

The confirmation unit 191 of the control unit 190 analyzes the barcode recognized in step S801 to confirm the identifier for each semiconductor device and information about the corresponding semiconductor device. Therefore, the confirmation unit 191 can confirm under what production conditions the corresponding semiconductor device was produced.

3. Save<S803>

The storage unit 192 stores the identifier and information for each semiconductor device identified in step S802.

4. Transmission<S804>

The communication unit 193 of the control unit 190 transmits the stored identifier and information to the tester in step S803. Therefore, the tester can store the test results of a specific semiconductor device by linking them to the identifier of the specific semiconductor device.

Of course, steps S803 and S804 may be performed simultaneously or sequentially depending on implementation.

5. Receiving<S805>

The communication unit 193 receives information about test results of a specific semiconductor device from the tester.

6. Record<S806>

The storage unit 192 records and stores information about the test results received in step S805 by linking it to the identifier of a specific semiconductor device.

In this embodiment, step S804 is performed before the test so that the tester can know the identifier and information of the semiconductor device to be tested. However, depending on the implementation, the barcode recognition part 180 may be provided between the test position (TP) and the unloading position (UP ₁ , UP ₂ ), and in this case, the tester uses the identifier and information of the tested semiconductor device. You can find out. Of course, in any case, the tester can accurately specify the semiconductor device that must be tested or has been tested.

Additionally, information about the test conditions of the current handler 100 is also transmitted in the information transmitted to the tester in step S804. And information about the current test conditions of the handler 100 is also recorded and stored in step S806.

Additionally, the information recorded and stored in step S806 can be used in a future retest of the semiconductor device, and when a retest is performed, even the retest results are stored in the storage unit 192.

Meanwhile, since the embodiment described above is only explained as an example among various types of handlers, the present invention should not be construed as being limited to the above-mentioned handler. In other words, the present invention can be applied to any type of handler.

Accordingly, the specific description of the present invention has been made by way of examples with reference to the accompanying drawings, but since the above-described embodiments are only explained by referring to preferred examples of the present invention, it is understood that the present invention is limited to the above-described embodiments. It should not be construed as such, and the scope of rights of the present invention should be understood as the scope of the claims described later and their equivalents.

100: Handler
111, 112: loading plate
121, 122: first transporter
150: loading part
160: Test part
170: Unloading part
180: Barcode recognition part
181a, 182, 181b, 181c: Barcode recognition device
183b, 183c: Illuminator
RP: Reflector
IE: Installation member
IS: Investigator
RW: Recognition window
184a, 184b, 184c: mobile device
190: Control part

Claims (7)

a loading element capable of loading semiconductor devices to be tested;
A transporter transporting the loading element;
a loading portion that loads the semiconductor device to be tested onto the loading element at a loading position;
a test portion that tests the semiconductor device loaded into the loading element by the loading portion;
an unloading portion that unloads the semiconductor devices for which testing has been completed in the test portion from the loading element at an unloading position;
a barcode recognition portion that recognizes a barcode printed on the semiconductor devices at a point along the moving path of the semiconductor devices from loading by the loading portion to unloading by the unloading portion; and
A control part that controls the transporter, loading part, test part, unloading part and barcode recognition part, and manages information for each individual semiconductor device by reading the barcode recognized by the barcode recognition part; Including,
The barcode recognition part is
A barcode reader that recognizes barcodes;
An illuminator that illuminates the surface of the semiconductor device for barcode recognition by the barcode reader; Including,
The fixture is
A dome-shaped reflector convex upward; and
at least one irradiator installed below the reflector to provide indirect illumination to the semiconductor device through the reflector; Includes,
The illuminator has a recognition window that can recognize a barcode of a semiconductor device located below the illuminator,
The recognition window is provided on the reflector
Handler for semiconductor device testing.
A loading plate on which semiconductor devices to be tested can be loaded;
An unloading plate on which tested semiconductor devices can be loaded;
a first transporter that transports the loading plate so that the loading plate can be selectively positioned at a loading position and a test position;
a second transporter transporting the unloading plate so that the unloading plate can be selectively positioned at the test position and the unloading position;
a loading portion that loads the semiconductor device to be tested onto the loading plate at the loading position;
a test portion that tests the semiconductor device loaded onto the loading plate by the loading portion;
an unloading part that unloads the semiconductor devices for which tests have been completed in the test part from the unloading plate at the unloading position;
a barcode recognition portion that recognizes barcodes printed on semiconductor devices between the loading position and the test position; and
A control part that controls the first transporter, the second transporter, the loading part, the unloading part and the barcode recognition part, and manages information for each individual semiconductor device by reading the barcode recognized by the barcode recognition part; Including,
The control part reads the recognized barcode, verifies the identifier and information, and then transmits the identifier and information to the tester.
The moving distance of the loading plate by the first transporter and the moving distance of the unloading plate by the second transporter are different,
The loading plate, the unloading plate, the first transporter, and the second transporter are provided in plural numbers, so that the semiconductor device moves through a plurality of paths,
The plurality of loading plates are alternately moved from the loading position to the test position,
The barcode recognition part is
A barcode reader that recognizes barcodes;
an illuminator that illuminates the surface of the semiconductor device for barcode recognition by the barcode reader, and is coupled to the barcode reader by a coupling member; and
a mover that moves the barcode reader and the illuminator together so that the barcode reader and the illuminator can be selectively positioned above the plurality of paths; containing
Handler for semiconductor device testing.
According to clause 2,
The barcode reader is equipped with a rice scan camera that scans the barcode of the semiconductor devices loaded on the loading plate,
The loading plate moves continuously without stopping while the barcode reader scans the barcodes of the semiconductor devices loaded on the loading plate.
Handler for semiconductor device testing. According to clause 2,
The barcode reader is an area camera, which captures barcodes of a plurality of semiconductor devices located within an imaging area provided on the loading plate at the same time.
Handler for semiconductor device testing.
According to clause 2,
The control part continuously moves the loading plate when the loading plate passes below the barcode recognition part so that the barcode recognition part sequentially recognizes barcodes printed on a plurality of semiconductor devices loaded on the loading plate. Controlling the first transporter and the second transporter so that
Handler for semiconductor device testing.
According to claim 1 or 2,
The information managed by the control part for each individual semiconductor device includes information on the production conditions when producing the semiconductor device, information on the test conditions of the semiconductor device, and test results of the semiconductor device.
Handler for semiconductor device testing.
According to clause 2,
The illuminator is,
An installation member having an upwardly convex semi-cylindrical surface at the bottom; and
at least one irradiator installed on the semi-cylindrical surface of the installation member; Includes,
The illuminator has a recognition window that can recognize a barcode of a semiconductor device located below the illuminator,
The recognition window is provided on the installation member.
Handler for semiconductor device testing.

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