TW201643529A - Photo-alignment polarized light irradiation device - Google Patents

Abstract

Provided is a photo-alignment polarized light irradiation device, which includes: an irradiation unit having an irradiation surface for irradiating an object to be irradiated with a polarized light; a stage on which the object to be irradiated is mounted; a transport mechanism transporting the stage such that the object to be irradiated on the stage passes through an irradiation region, which is irradiated by the polarized light from the irradiation surface, in parallel to the irradiation surface; a position detecting member for detecting a position of the stage or the object to be irradiated during movement of the stage transported by the transport mechanism; and a control member performing predetermined control based on a detection result of the position detecting member, for properly managing an irradiation state of the polarized light with respect to the object to be irradiated and suppressing production of defective objects.

Description

Polarized light irradiation device

Embodiments of the present invention relate to a polarized light irradiation device for light alignment.

In the manufacturing process of a liquid crystal panel or the like, an object to be irradiated such as an alignment film of a liquid crystal panel or an alignment layer of a viewing angle compensation film is subjected to alignment treatment. In the alignment treatment, there is known a polarized light irradiation device for light alignment used for performing so-called light alignment, which is performed by irradiating a polarizing light of a predetermined wavelength to an alignment film.

For example, the polarizing light irradiation device of the present invention includes an irradiation unit (unit) provided with an irradiation surface that irradiates polarized light, a stage, a substrate on which an alignment film is formed, and a substrate Agency, moving the stage. The irradiation unit has an irradiation area that irradiates polarized light from the irradiation surface. The transport mechanism transports the stage so that the substrate on the stage passes through the irradiation area of the irradiation unit so as to be parallel to the irradiation surface.

Further, as an apparatus similar to the above-described polarized light irradiation device for light alignment, there is known an exposure apparatus that exposes an exposure light for irradiating a substrate with a first stage and a second stage on which a substrate is mounted. The part of the system transports the first stage and the second stage.

Prior art literature

Patent literature

Patent Document 1: Japanese Patent Laid-Open Publication No. 2008-191302

[Problems to be solved by the invention]

However, in the manufacturing process of the liquid crystal panel, the accuracy of the positional deviation of the optical axis of the polarized light irradiated to the alignment film as the object to be irradiated is controlled within an allowable value of about ±0.1°. On the other hand, in the polarized light irradiation device for light distribution, the movement of the stage transported by the transport mechanism may cause a change with time in the transport state of the transport mechanism or deterioration of the transport mechanism. The table generates vibration. When vibration occurs in the moving stage, when the substrate passes through the irradiation region, the irradiation state of the polarized light to the alignment film fluctuates, which causes a problem that the quality of the alignment film is lowered. In particular, there is a tendency that the positional deviation or vibration of the stage in the circumferential direction orthogonal to the irradiation surface of the irradiation unit greatly affects the quality of the alignment film.

In view of the above, it is an object of the present invention to provide a polarized light irradiation device for light alignment, which can appropriately control the irradiation state of polarized light to an object to be irradiated, and can suppress a decrease in the manufacturing quality of the object to be irradiated.

[Technical means to solve the problem]

The polarized light irradiation device for light distribution according to the embodiment includes an irradiation unit provided with an irradiation surface that irradiates the irradiated object with polarized light, a stage on which the irradiated object is mounted, and a transport mechanism that transports the stage to The irradiated object on the stage passes through an irradiation region of polarized light that is irradiated from the irradiation surface so as to be parallel to the irradiation surface, and the position detecting member is in the stage that is transported by the transport mechanism During the movement, the distance to the stage or the object to be irradiated is measured, and the position of the stage or the object to be irradiated is detected; and a control unit is detected based on the position detecting unit The test results are issued to perform the prescribed control.

(Effect of the invention)

According to the present invention, it is possible to appropriately manage the irradiation state of the polarized light to the object to be irradiated, and it is possible to suppress a decrease in the manufacturing quality of the object to be irradiated.

The polarized light irradiation device (hereinafter referred to as a polarized light irradiation device) 1 for an optical alignment according to the embodiment to be described below includes an irradiation unit 13, a stage 15, a transport mechanism 16, a photosensor 18 as a position detecting means, and a control Control unit 19 of the component. An irradiation surface B is provided in the irradiation unit 13. The irradiation surface B has an irradiation area A that irradiates the substrate 11 as an object to be irradiated with polarized light. The substrate 11 is mounted on the stage 15. The transport mechanism 16 transports the stage 15 so that the substrate 11 on the stage 15 passes through the irradiation area A so as to be parallel to the irradiation surface B. The photo sensor 18 detects the position of the stage 15 or the substrate 11 during the movement of the stage 15 transported by the transport mechanism 16. The control unit 19 performs predetermined control based on the detection result detected by the photo sensor 18.

In addition, the photosensor 18 included in the polarized light irradiation device 1 of the embodiment to be described below is a transport direction of the stage 15 or the substrate 11 with respect to the stage 15 in the axial direction orthogonal to the irradiation surface B. The rotation angle is detected.

In addition, the photosensor 18 included in the polarized light irradiation device 1 of the embodiment described below is disposed in the irradiation region A, and is disposed on one side and the other in the transport direction of the stage 15 with respect to the irradiation region A. At least one of the sides.

Further, the photosensor 18 included in the polarized light irradiation device 1 of the embodiment described below is disposed such that at least one of the direction orthogonal to the irradiation surface B and the direction parallel to the irradiation surface B is at least one of the stages 15 or the position of the substrate 11 is detected.

Further, the polarized light irradiation device 1 of the embodiment described below includes the irradiation portion 12 having the irradiation unit 13. The photo sensor 18 is provided in the illuminating unit 12.

Further, the polarized light irradiation device 3 of the embodiment described below includes the irradiation portion 12 having the irradiation unit 13. The transport mechanism 16 has a first transport path 17a and a second transport path 17b. The first transport path 17a is provided between the start position P1 at which the stage 15 starts moving toward the irradiation area A and the illuminating unit 12. The second transport path 17b is provided between the stop position P2 where the stage 15 that has passed through the irradiation area A and the irradiation unit 12 are stopped. The photo sensor 18 is provided at a position along at least one of the first transport path 17a and the second transport path 17b.

Further, the photo sensor 18 included in the polarized light irradiation device 5 of the embodiment described below is provided on the stage 15.

Further, the photosensor 18 included in the polarized light irradiation device 5 of the embodiment described below is disposed such that at least one of the direction of the stage 15 orthogonal to the irradiation surface B and the direction parallel to the irradiation surface B The position of the direction is detected.

Further, the polarized light irradiation device 5 of the embodiment described below includes the irradiation portion 12 having the irradiation unit 13. The illuminating unit 12 has a reference surface 29a for detecting, by the photosensor 18, a position of the stage 15 in a direction orthogonal to the irradiation surface B and a direction parallel to the irradiation surface B.

Further, the irradiation unit 13 included in the polarized light irradiation device 5 of the embodiment described below includes a polarizing plate 13c as a polarizing element and a holding member 13d. The polarizing plate 13c emits polarized light. The holding member 13d holds the polarizing plate 13c. The holding member 13d is provided with a reference surface 29a for detecting the position of the stage 15 in the direction orthogonal to the irradiation surface B by the photo sensor 18.

Further, the polarized light irradiation device 6 of the embodiment described below includes the irradiation portion 12 having the irradiation unit 13. The transport mechanism 16 has a first transport path 17a and a second transport path 17b. The first transport path 17a is provided between the start position P1 at which the stage 15 starts moving toward the irradiation area A and the illuminating unit 12. The second transport path 17b is provided between the stop position P2 where the stage 15 that has passed through the irradiation area A and the irradiation unit 12 are stopped. A reference surface 29a for illuminating the stage 15 with the light sensor 18 is provided at a position along at least one of the first transport path 17a and the second transport path 17b. The direction in which the plane B is orthogonal and the position in the direction parallel to the irradiation surface B are detected.

(First embodiment)

Hereinafter, a polarized light irradiation device according to an embodiment will be described with reference to the drawings. The polarized light irradiation device of the present embodiment is configured to irradiate a substrate on which an alignment film as an object to be irradiated is irradiated with polarized light such as linearly polarized light, thereby performing optical alignment. The polarized light irradiation device of the present embodiment is used, for example, for the production of an alignment layer of an optical film such as an alignment film of a liquid crystal panel or a viewing angle compensation film.

(Configuration of polarized light irradiation device)

FIG. 1 is a perspective view showing a polarized light irradiation device according to a first embodiment. FIG. 2 is a plan view showing a polarized light irradiation device according to the first embodiment. 3 is a side view showing a polarized light irradiation device according to the first embodiment.

As shown in FIGS. 1 to 3, the polarized light irradiation device 1 of the first embodiment includes an irradiation unit 12 having an irradiation unit 13, a stage 15, a transfer mechanism 16, and a plurality of photosensors as position detecting members. 18. Further, the polarized light irradiation device 1 includes a control unit 19 as a control means.

As shown in FIGS. 2 and 3, the illuminating unit 12 has an illuminating unit 13 and a frame 14 that supports the illuminating unit 13. As shown in FIG. 3, the irradiation unit 13 faces the irradiation surface B having the irradiation region A irradiated with the polarized light toward the rectangular substrate 11 (hereinafter referred to simply as the substrate 11) on which the alignment film as the object to be irradiated is formed. The irradiation surface B is disposed in parallel with the X-Y plane shown in FIG. 2, and the area of the irradiation surface B corresponds to the irradiation area A.

Further, as shown in FIG. 3, the irradiation unit 13 has a tubular light source 13a that emits light including ultraviolet rays, and a reflection plate 13b that reflects light emitted from the light source 13a. Further, the irradiation unit 13 has a polarizing plate 13c as a polarizing element, and the light emitted from the light source 13a and the light reflected by the reflecting plate 13b are incident to emit polarized light, and the frame-shaped holding member 13d holds the polarizing plate 13c.

In addition, the "irradiation area A" as used herein refers to a range from the opening of the lowermost surface of the irradiation unit 13, that is, the opening from the irradiation unit 13 at the position closest to the object to be irradiated. The range to which the polarized light is irradiated. Further, the "irradiation surface B" refers to an emission surface on which polarized light is emitted in an optical element disposed on the lowermost surface of the irradiation unit 13. For example, when the polarizing plate 13c is disposed on the lowermost surface of the irradiation unit 13, the range from the polarized light on which the polarizing plate 13c is disposed is irradiated to the irradiation area A, and the emission surface of the polarizing plate 13c corresponds to the irradiation surface B. . Further, when a light shielding plate (not shown) is disposed on the side of the object to be irradiated from the polarizing plate 13c, the range irradiated from the polarized light in which the light shielding plate is disposed corresponds to the irradiation area A, and the emission surface of the light shielding plate It is equivalent to the irradiation surface B. Further, when a cover glass (not shown) is disposed on the light shielding plate, the range irradiated from the polarized light in which the protective glass is disposed corresponds to the irradiation region A, and the emission surface of the protective glass corresponds to the irradiation surface B.

The light source 13a is, for example, a high-pressure mercury lamp in which a rare gas such as mercury, argon or helium is sealed in a glass tube which is transparent to ultraviolet light, or a metal halide in which a metal halide such as iron or iodine is further enclosed in a high-pressure mercury lamp. A tubular discharge lamp such as a lamp has a linear light-emitting portion. In the light source 13a, the longitudinal direction of the light-emitting portion is orthogonal to the transport direction of the stage 15 with respect to the irradiation unit 13, and the length of the light-emitting portion is longer than the length of one side of the substrate 11. The light source 13a can emit, for example, light including ultraviolet rays having a wavelength of about 200 nm to about 400 nm from the linear light-emitting portion. The light emitted from the light source 13a is so-called unpolarized light having various polarization axis components.

The reflecting plate 13b has a reflecting surface that reflects the light emitted from the light source 13a on the surface facing the light source 13a, and the reflecting surface is formed in a shape of a part of a circle. Thereby, the reflecting plate 13b is configured as a so-called condensing type reflecting plate that collects light emitted from the light source 13a. The polarizing plate 13c can extract light of a polarization axis that vibrates only in the reference direction from the light of the various polarization axis components emitted from the light source 13a and including the same vibration in all directions. Further, generally, light of a polarization axis that vibrates only in the reference direction is referred to as linearly polarized light. Further, the polarization axis refers to the direction of vibration of the electric field and the magnetic field of light.

As shown in FIGS. 2 and 3, the frame 14 of the illuminating unit 12 is disposed across a guide rail 16a which will be described later of the conveying mechanism 16. Above the inside of the frame 14, an irradiation unit 13 is supported.

The stage 15 is formed in a rectangular plate shape, and the substrate 11 on which the alignment film is formed is mounted. As shown in FIGS. 2 and 3, the stage 15 is supported by the transport mechanism 16 so as to be movable in the Y-axis direction. Further, the outer shape of the stage 15 is preferably set to a size at which the respective detection lights of the plurality of photosensors 18 to be described later can be simultaneously irradiated, and can be appropriately set according to the configuration of one photosensor 18.

As shown in FIGS. 2 and 3, the transport mechanism 16 has a linear guide rail 16a and a drive unit 16b that moves along the guide rail 16a. The guide rail 16a is provided so that the stage 15 reciprocates between the start position P1 and the stop position P2, and the start position P1 is a position at which the stage 15 starts moving toward the irradiation area A of the irradiation unit 12, and the stop position P2 It is a position stopped by the stage 15 after the irradiation unit 12. The guide rail 16a constitutes a linear transport path 17 that transports the stage 15 in the Y-axis direction. Further, a stage 15 is fixed to the drive unit 16b. Further, the transport mechanism 16 moves the drive unit 16b along the guide rail 16a, and transports the stage 15 in parallel with the irradiation surface B so that the substrate 11 on the stage 15 passes through the irradiation area A.

The transport path 17 includes a first transport path 17a between the start position P1 and the illuminating unit 12, a second transport path 17b between the illuminating unit 12 and the stop position P2, and the first transport path 17a and the second transport path 17b. The third transport path 17c is disposed between the illuminating units 12.

The plurality of photo sensors 18 are arranged to detect the position of the stage 15 during the movement of the stage 15 transported by the transport mechanism 16 . Although not shown, the photo sensor 18 has a light-emitting portion that emits detection light and a light-receiving portion that receives detection light reflected by the stage 15 .

In the first embodiment, three photosensors 18 are disposed on the same surface (on the XY plane) as the irradiation surface B of the irradiation unit 13 in the inside of the irradiation unit 12 at a predetermined interval. The photosensor 18 is disposed in a direction facing the mounting surface of the stage 15 in the irradiation unit 12 in a direction in which the detection light is directed downward. The vibration of the stage 15 in the circumferential direction with respect to the X-axis is detected by the photosensors 18 arranged along the Y-axis direction among the three photosensors 18 disposed on the X-Y plane. Further, the vibrations of the stage 15 with respect to the Y-axis circumferential direction are detected by the respective photosensors 18 arranged at intervals in the X-axis direction among the three photo sensors 18 disposed on the XY plane. .

Further, the three photo sensors 18 are fixed to the holding member 13d of the irradiation unit 13 that holds the polarizing plate 13c. According to this configuration, it is possible to simplify the mounting structure without attaching the photo sensor 18 to the irradiation portion 12 via the support that supports the photosensor 18. Further, since the photosensor 18 can detect the position of the stage 15 using the irradiation surface B of the irradiation unit 13 as the reference surface, it is possible to easily ensure appropriate detection accuracy.

Further, inside the illuminating unit 12, two photosensors 18 are disposed at a predetermined interval in the transport direction (Y-axis direction) of the stage 15 on the side surface (YZ plane). Two photo sensors 18 is fixed to the frame 14 via the support 21 and disposed on both sides of the irradiation area A with respect to the conveyance direction of the stage 15 . Further, the two photo sensors 18 are arranged in a direction in which the detection light is directed toward the side surface of the stage 15 so as to face the position through which the side surface of the stage 15 passes. The vibration of the stage 15 with respect to the Z-axis circumferential direction is detected by the respective photo sensors 18 arranged at intervals in the Y-Z plane with respect to the Y-axis direction.

Further, the three photosensors 18 disposed on the X-Y plane are not limited to being disposed above the stage 15, and may be disposed below the stage 15 as shown in FIG. In the case of this configuration, the three photosensors 18 are disposed at a position adjacent to the guide rail 16a at a predetermined interval, for example, in a direction in which the detection light is directed upward.

By using the plurality of photo sensors 18, the positions of the stages 15 related to the three axes of the X-axis, the Y-axis, and the Z-axis shown in FIG. 1 are detected during the movement of the stage 15, thereby The vibration of the stage 15 with respect to the three-axis circumferential direction is detected. In other words, by using the plurality of photo sensors 18, for the stage 15 that is moving with respect to the Y-axis direction, the vibration in the circumferential direction with respect to the X-axis circumferential direction, that is, the yaw axis, with respect to The Y-axis circumferential direction, that is, the circumferential vibration of the roll axis, is detected in the circumferential direction of the Z-axis, that is, the pitch axis. In the present embodiment, the directions of the X-axis and the Y-axis correspond to a direction parallel to the irradiation surface B of the irradiation unit 13, and are horizontal. Further, in the present embodiment, the Z axis corresponds to an axis orthogonal to the irradiation surface B and is a vertical direction.

Further, there is a tendency that the positional deviation or vibration of the stage 15 is generated with respect to the Z-axis circumferential direction orthogonal to the irradiation surface B of the irradiation unit 13 among the vibrations in the three-axis circumferential direction. It will have a big impact on the quality of the alignment film. Therefore, using the two photo sensors 18 arranged along the Y-axis direction on the YZ plane, the rotation angle of the stage 15 with respect to the Y-axis direction is performed at least in the vibration of the stage 15 with respect to the Z-axis circumferential direction. By the detection, it is possible to suppress a decrease in the manufacturing quality of the alignment film.

Further, in the first embodiment, five photosensors 18 are used, but the number of photosensors 18 is not limited. In the position detection using the photo sensor 18, by increasing the number of photosensors 18 that simultaneously detect the position of the moving stage 15, and increasing the simultaneous detection of the position of the stage 15, The interval between the photo sensors 18 can improve the detection accuracy. Therefore, the number or arrangement of the photo sensors 18 can be appropriately set in accordance with the direction of detecting the vibration of the stage 15 or the detection accuracy in the three-axis direction.

As shown in FIG. 1, the control unit 19 is electrically connected to the plurality of photosensors 18 and the operation unit 20, and controls the operation unit 20 based on the detection results detected by the plurality of photosensors 18. The operation unit 20 has a display panel 20a that displays various kinds of information including a warning.

The control unit 19 determines whether or not the vibration of the stage 15 detected by the plurality of photo sensors 18 is within a predetermined range. When the vibration of the stage 15 is larger than the predetermined range, the control unit 19 controls the operation unit 20 to cause the display panel 20a to display a warning. At this time, on the display panel 20a, for example, a warning including information such as a detection value related to the displacement amount of the stage 15 or a calculated value calculated using the detection value is displayed. Further, the control unit 19 may perform control for lighting the warning lamp or causing the alarm to sound a warning sound or the like as necessary, and issue another warning.

In addition, by setting the predetermined range for determining the vibration of the stage 15 to, for example, an upper limit value and a lower limit value of the amplitude of the quality of the alignment film of the substrate 11 can be appropriately obtained, and it is possible to produce a poor quality alignment. Before the membrane, perform maintenance work at the appropriate timing.

Further, in the present embodiment, the configuration in which the vibration of the stage 15 is detected using the plurality of photo sensors 18 is employed, but the vibration of the substrate 11 on the stage 15 may be detected. When the vibration of the substrate 11 is directly detected, the influence of the variation in the mounting position of the substrate 11 positioned on the stage 15 can be eliminated, and the position detection accuracy of the alignment film can be further improved.

(Operation when polarized light is irradiated)

As shown in FIG. 2 and FIG. 3, in the polarized light irradiation device 1, the substrate 11 is mounted on the stage 15 at the start position P1, and the stage 15 is placed at the start position P1 and the stop position P2 by the transfer mechanism 16. Reciprocating between. When the stage 15 reciprocates between the start position P1 and the stop position P2, the substrate 11 on the stage 15 is conveyed parallel to the irradiation surface B and passes through the irradiation area A, thereby aligning the substrate 11 The film performs the desired photoalignment.

In the movement of the stage 15 conveyed by the transport mechanism 16 in this way, the detection position of the stage 15 by the plurality of photo sensors 18 is detected, whereby the vibration of the stage 15 with respect to the three-axis circumferential direction is respectively Test. FIG. 4 is a flowchart for explaining processing based on the detection results of the plurality of photosensors 18 in the polarized light irradiation device 1 of the first embodiment.

As shown in FIG. 4, when the substrate 11 on the stage 15 enters the illuminating unit 12 and the substrate 11 passes through the irradiation area A, the plurality of photosensors 18 are circumferentially opposed to the X, Y, and Z axes. Each vibration is detected (step S1). The control unit 19 determines whether or not each of the vibrations of the stage 15 detected by the plurality of photosensors 18 in the circumferential direction of the X, Y, and Z axes is within a predetermined range. For example, it is determined whether or not the amplitude of the stage 15 is the amplitude. Within the range of the predetermined upper limit value and lower limit value (step S2). Further, when the light sensor 18 is used to detect the rotation angle of the stage 15 with respect to the Z-axis circumferential direction, the control unit 19 determines whether or not the rotation angle of the stage 15 on the XY plane with respect to the Y-axis direction is Within the prescribed range.

In step S2, when the amplitude of the stage 15 with respect to the X, Y, and Z axes in the circumferential direction or the rotation angle of the stage 15 deviates from the predetermined range (NO in step S2), the control unit 19 performs Control is issued to issue a warning using the display panel 20a of the operation unit 20 (step S3). In the case where the vibration of the stage 15 is within the predetermined range (YES in step S2), for example, when the amplitude of the stage 15 is within the predetermined range, the process returns to step S1 and the plurality of steps are used. The photo sensor 8 continues to detect the vibration of the stage 15.

When the control unit 19 issues a warning in step S3, after the substrate 11 on the moving stage 15 is irradiated with the polarized light, the user operates the operation unit 20 to stop the transport mechanism 16. Further, the control unit 19 may perform control to issue a warning, and after the substrate 11 on the moving stage 15 is irradiated with the polarized light, the transfer mechanism 16 is stopped. At this time, a maintenance operation relating to the conveyance state of the conveyance mechanism 16 or the fixed position of the stage 15 or the like is performed to adjust the amplitude of the moving stage 15 or the rotation angle to a predetermined range.

The polarized light irradiation device 1 of the first embodiment includes a photo sensor 18 that detects the position of the stage 15 during movement of the stage 15 and the control unit 19 and the display panel 20a that are detected based on the photo sensor 18 The test results to issue a warning. Thereby, the vibration generated by the movement of the stage 15 can be detected by the photo sensor 18, and the irradiation state of the polarized light to the alignment film of the substrate 11 can be appropriately controlled, and the deterioration of the manufacturing quality of the alignment film can be suppressed. As a result, the yield in the manufacturing process of the alignment film can be improved.

Further, the polarized light irradiation device 1 detects the rotation angle of the stage 15 with respect to the Z-axis circumferential direction orthogonal to the irradiation surface B by the photosensor 18, and can shift the positional deviation component based on the influence on the quality of the alignment film. To effectively manage the quality of the alignment film.

Hereinafter, a polarized light irradiation device according to a modification of the first embodiment, a second embodiment, and a modification of the second embodiment will be described with reference to the drawings. In the modification of the first embodiment, the second embodiment, and the modifications thereof, the same components as those in the first embodiment are denoted by the same reference numerals, and their description is omitted.

(Modification 1 of First Embodiment)

FIG. 5 is a side view showing a polarized light irradiation device according to a first modification of the first embodiment. In the first modification, the arrangement of the photo sensor 18 is different from that of the first embodiment.

As shown in FIG. 5, the plurality of photosensors 18 included in the polarized light irradiation device 2 of the first modification are disposed outside the irradiation unit 12. Each of the photosensors 18 for detecting the vibration of the stage 15 with respect to the X-axis and the Y-axis in the circumferential direction is disposed above the stage 15 and on the same plane as the irradiation surface B of the irradiation unit 13 (XY plane) The upper side is provided on the side surface of the frame 14 of the illuminating unit 12. Further, each of the photosensors 18 for detecting the vibration of the stage 15 with respect to the Z-axis is disposed to face the position through which the side surface of the stage 15 passes, and is along the YZ plane orthogonal to the irradiation surface B. The axial directions are spaced apart from each other and are provided on the side surface of the frame 14 via the support body 21.

In addition, the external dimensions of the stage 15 and the like are set such that the respective photosensors 18 arranged at intervals with respect to the transport direction of the stage 15 are irradiated while the irradiation light is irradiated onto the substrate 11 on the stage 15 The detection light can be simultaneously irradiated onto the stage 15. Further, a plurality of photo sensors 18 may be disposed at the position of the photosensor 18 shown in each drawing, so that the vibration of the stage 15 can be detected regardless of the size of the stage 15. Alternatively, by using the photo sensor 18 having a plurality of light emitting portions and light receiving portions, the vibration of the stage 15 can be individually detected by one photo sensor 18.

Further, in Modification 1, the plurality of photosensors 18 disposed on the X-Y plane may be disposed below the stage 15 . At this time, the photo sensor 18 is disposed in a direction in which the detection light is emitted upward.

In the first modification, the first embodiment can detect the vibration of the stage 15 in the circumferential direction of the three axes by the plurality of photo sensors 18, so that the alignment film can be appropriately managed. Quality, which suppresses the deterioration of the manufacturing quality of the alignment film.

In addition, according to the first modification, the conveyance direction of each photosensor 18 with respect to the stage 15 can be widened as compared with the first embodiment in which the photosensors 18 are disposed inside the irradiation unit 12 ( The interval in the Y-axis direction). Therefore, in the first modification, in particular, the detection accuracy of the vibration of the stage 15 with respect to the Z-axis in the circumferential direction can be improved.

(Modification 2 of the first embodiment)

FIG. 6 is a plan view showing a polarized light irradiation device according to a second modification of the first embodiment. FIG. 7 is a side view showing a polarized light irradiation device according to a second modification of the first embodiment. In the second modification, the arrangement of the photo sensor 18 is different from that of the first embodiment and the first modification.

As shown in FIGS. 6 and 7, the polarized light irradiation device 3 of Modification 2 has a set of sensor support portions 23 provided with a photo sensor 18. The set of sensor support portions 23 is disposed at a position along the first transport path 17a and the second transport path 17b of the transport mechanism 16 in the transport direction (Y-axis direction) of the stage 15 . In other words, each of the photosensors 18 in the second modification is disposed between the position of the first transport path 17a between the start position P1 and the irradiation unit 12 and the position between the irradiation unit 12 and the stop position P2. 2 The position of the transport path 17b.

A set of sensor supports 23 have a frame 23a that supports the respective photosensors 18. The frame 23a is disposed across the guide rail 16a of the transport path 17. In the upper portion of the frame 23a, a light sensation for detecting the vibration of the stage 15 with respect to the X and Y axes in the circumferential direction is disposed above the stage 15 that moves along the first transport path 17a and the second transport path 17b. Detector 18. In the side portion of the frame 23a, the vibration of the stage 15 in the circumferential direction of the Z-axis is detected so as to face the side surface of the stage 15 that moves along the first transport path 17a and the second transport path 17b. Light sensor 18. The photo sensor 18 is provided on the side of the frame 23a via the support body 21.

Although the photo sensor 18 is schematically shown in each drawing, for example, one photo sensor 18 may have a plurality of light-emitting portions and a light-receiving portion, so that the stage 15 can be individually detected with respect to X and Y. And the vibration of the Z axis in the circumferential direction.

In the second modification, which is configured as described above, similarly to the first embodiment, the vibration of the stage 15 with respect to the three-axis circumferential direction can be detected by the plurality of photo sensors 18, so that the alignment film can be appropriately managed. Quality, which suppresses the deterioration of the manufacturing quality of the alignment film.

(Modification 3 of First Embodiment)

FIG. 8 is a side view schematically showing a polarized light irradiation device according to a third modification of the first embodiment. This modification 3 is different from the first embodiment in that the position of the stage 15 is corrected based on the detection result of the photo sensor 18.

As shown in FIG. 8, the polarized light irradiation device 4 of the modification 3 includes a position correcting mechanism 25 that rotatably supports the stage 15 with respect to the X, Y, and Z axes in the circumferential direction, and a control unit 19 as a control means based on The position correction mechanism 25 is controlled by the detection result detected by each photosensor 18.

Each of the photosensors 18 in the third modification is arranged in the same manner as in the first embodiment, its modification 1 and the modification 2, for example. The position correcting mechanism 25 is electrically connected to the control unit 19. The control unit 19 controls the position correcting mechanism 25 based on the detection result of each photosensor 18, and the position correcting mechanism 25 corrects the position of the moving stage 15 to an appropriate position. The control unit 19 controls the position correcting mechanism 25 such that the amplitude of the stage 15 is within a predetermined range based on, for example, the vibration of the stage 15 detected by the photo sensor 18 during the movement of the stage 15.

Further, the timing at which the position correcting means 25 corrects the position of the stage 15 is not limited to the movement of the stage 15 transported by the transport mechanism 16, and may be controlled at other timings. For example, after the substrate 11 on the stage 15 is irradiated with the polarized light, and after the stage 15 returns to the start position P1, the control unit 19 detects the light from the light sensor 18 based on the previous movement of the stage 15. The detection result of the detection is performed to control the position correcting mechanism 25 to correct the position of the stage 15 during standby.

According to the third modification configured as described above, the position of the stage 15 is corrected by the position correcting mechanism 25 based on the detection result of the photo sensor 18, whereby the deterioration of the quality of the alignment film can be further suppressed. Therefore, in the third modification, as in the first embodiment, the quality of the alignment film can be appropriately controlled, and the deterioration of the manufacturing quality of the alignment film can be suppressed.

In the first embodiment and its modifications 1 to 3, the photo sensor 18 is used as the position detecting member. For example, another non-contact position sensor such as an ultrasonic position sensor may be used. Moreover, the position detecting member is not limited to the non-contact position sensor, and for example, a contact type displacement sensor having a contact member in contact with the stage 15 may be used. Further, the photo sensor 18 is not limited to the above-described reflective sensor, and a transmissive sensor may be used. At this time, for example, the position of the stage 15 can be detected by receiving the detection light of the light transmitting portion provided on the transmission overload stage 15.

In the case of using the contact type displacement sensor, for example, at a position along the transport path of the stage 15, a plurality of displacement sensors are arranged in contact with the moving stage 15. Further, when such a displacement sensor is used, the displacement sensor can be pressed to the stage 15 at a predetermined timing, thereby detecting the position of the stage 15.

(Second embodiment)

FIG. 9 is a perspective view showing a polarized light irradiation device according to a second embodiment. FIG. 10 is a plan view showing a polarized light irradiation device according to a second embodiment. FIG. 11 is a side view showing a polarized light irradiation device according to a second embodiment. The second embodiment is different from the first embodiment and its modification in that the photo sensor 18 is disposed on the stage 15 side.

As shown in FIG. 9 to FIG. 11 , the plurality of photosensors 18 included in the polarized light irradiation device 5 of the second embodiment are provided on the stage 15 . The polarized light irradiation device 5 has a photo sensor 18 as a position detecting member, and a reflection plate 29 having a reference surface 29a for detecting the position of the photo sensor 18. The photo sensor 18 receives the detection light reflected by the reference surface 29a during the movement of the stage 11, thereby detecting the vibration of the stage 11.

In FIG. 9 and later, only three photosensors 18 are schematically illustrated, and the vibration of the stage 15 can be individually detected by one photosensor 18. Further, in order to detect the vibration (amplitude) in the circumferential direction of each of the three axes, for example, five photo sensors 18 may be provided on the stage 15. The position or the number of the photosensors 18 provided on the stage 15 is not limited to the present embodiment, and can be appropriately set in accordance with the necessity of detecting the direction of vibration, the detection accuracy, and the like.

As shown in FIG. 10 and FIG. 11 , on the stage 15 , vibrations on the circumferential direction of the stage 15 with respect to the X and Y axes are provided on both sides of the front side surface when traveling from the start position P1 toward the irradiation unit 12 . Each photosensor 18 is tested. These photo sensors 18 are provided in a direction in which the detection light is emitted toward the lower side of the stage 15. Further, in the inside of the illuminating unit 12, the plurality of reflecting plates 29 are provided on the same surface (on the X-Y plane) as the reference surface 29a and the irradiation surface B of the irradiation unit 13 in correspondence with the photosensors 18.

Further, on the stage 15, a light sensor 18 that detects the vibration of the stage 15 in the circumferential direction of the Z-axis is provided on the side surface parallel to the conveyance direction. The photosensor 18 is provided in a direction in which the direction of the detection light is irradiated to the side surface in the irradiation unit 12 while the substrate 11 on the stage 15 is moving in the irradiation area A. Further, a reflecting plate 29 is provided inside the illuminating portion 12 corresponding to the photosensor 18 such that the reference surface 29a is located on the side surface (in the Y-Z plane). The reflecting plate 29 is disposed such that the reference surface 29a faces the position through which the photo sensor 18 passes while the substrate 11 on the stage 15 moves in the irradiation area A.

Further, each of the photosensors 18 that detects the vibration of the stage 15 with respect to the X and Y axes in the circumferential direction is provided in a direction in which the detection light is emitted toward the lower side of the stage 15, but it may be as shown in FIG. It is provided in a direction in which the detection light is emitted toward the upper side of the stage 15. When the photo sensor 18 is provided such that the detection light is emitted downward from the stage 15, the reflection plate 29 is disposed below the stage 15 so as to face the photo sensor 18. The reflector 29 is disposed below the inside of the illuminating unit 12 along the guide rail 16a, and is disposed such that the reference surface 29a facing the photosensor 18 is located on the X-Y plane parallel to the irradiation surface B.

Further, it is preferable that the number or arrangement of the photosensors 18, the number of the reference faces 29a, and the dimension of the reference surface 29a with respect to the transport direction of the stage 15 are set as follows, that is, on the stage 15. The vibration of the stage 15 can be detected by the photo sensor 18 and the reference surface 29a during the entire period in which the substrate 11 moves in the irradiation region A.

In the second embodiment configured as described above, similarly to the first embodiment and the modifications 1 to 3, the stage 15 can be opposed to the third by the plurality of photo sensors 18 and the reflection plate 29. Since the vibration in the circumferential direction of the shaft is detected, the quality of the alignment film can be appropriately controlled, and the manufacturing quality of the alignment film can be suppressed from deteriorating.

(Modification 1 of Second Embodiment)

FIG. 12 is a plan view showing a polarized light irradiation device according to a first modification of the second embodiment. FIG. 13 is a side view showing a polarized light irradiation device according to a first modification of the second embodiment. In the first modification of the second embodiment, the arrangement of the reference surface 29a used by the photo sensor 18 is different from that of the first embodiment.

As shown in FIG. 12 and FIG. 13 , the polarized light irradiation device 6 according to the first modification of the second embodiment includes a plurality of reflecting plate supporting portions 33 provided with a reflecting plate 29 . The set of the reflector support portions 33 is disposed at a position along the first transport path 17a and the second transport path 17b of the transport mechanism 16 in the transport direction (Y-axis direction) of the stage 15 . In other words, the reference surface 29a of each of the reflecting plates 29 in the first modification is disposed at a position along the first transport path 17a between the start position P1 and the illuminating unit 12, and along the illuminating unit 12 and the stop position P2. The position of the second transport path 17b.

A set of reflector support portions 33 has a frame 33a that supports each of the reflectors 29. The frame 33a is disposed across the guide rail 16a of the transport path 17. In the upper portion of the frame 33a, the detection light of the photosensor 18 is reflected and reflected by the reference surface 29a above the stage 15 that moves along the first transport path 17a and the second transport path 17b. The plate 29 detects the vibration of the stage 15 in the circumferential direction with respect to the X and Y axes. Further, the side surface of the frame 33a faces the side surface of the stage 15 that moves along the first transport path 17a and the second transport path 17b, and the detection light of the photosensor 18 is performed by the reference surface 29a. A reflection plate 29 is disposed in a manner of reflection, and the photo sensor 18 detects vibration of the stage 15 with respect to the Z-axis circumferential direction.

In the first modification of the second embodiment configured as described above, the vibration of the stage 15 with respect to the three-axis circumferential direction can be performed by the photo sensor 18 and the reflection plate 29 as in the first embodiment and the like. Since the detection is performed, the quality of the alignment film can be appropriately controlled, and the deterioration of the manufacturing quality of the alignment film can be suppressed.

(Modification 2 of Second Embodiment)

As the position detecting means, instead of the use of the photo sensor 18 and the reflecting plate 29 having the reference surface 29a, a gyro sensor may be provided on the stage 15. Although not shown, the vibration of the stage 15 with respect to the three-axis circumferential direction can be detected by one gyro sensor, and the configuration of the position detecting member can be simplified.

Moreover, by inserting the gyro sensor into, for example, the inside of the stage 15, it is possible to prevent the gyro sensor from being exposed to the irradiation area A of the irradiation unit 13, thereby improving the durability or detection of the gyro sensor. The reliability of the action. Further, a configuration in which the gyro sensor transmits a detection signal to the control unit 19 by wireless communication can be employed, and the degree of freedom in the configuration for detecting the position of the stage 15 can be improved.

In the second modification of the second embodiment configured as described above, similarly to the first embodiment or the like, the vibration of the stage 15 with respect to the three-axis circumferential direction can be detected by the gyro sensor. The quality of the alignment film can be appropriately controlled, and the manufacturing quality of the alignment film can be suppressed from deteriorating.

Further, in the second embodiment, the modifications 1 and 2, instead of the photo sensor 18 and the reflection plate 29, other non-contact position sensors such as an ultrasonic position sensor may be used or Contact displacement sensor.

Further, in the second embodiment, the first modification, and the second modification, similarly to the third modification of the first embodiment, the light sensor 18 as the position detecting member and the light sensor 18 may be employed. The position of the stage 15 is corrected by the position correcting mechanism 25 by the detection result detected by the reflecting plate 29 or the gyro sensor.

In the above-described embodiment and the modified example, the transport mechanism 16 is configured to transport one of the stages 15 . However, a configuration in which the plurality of stages 15 are alternately transported to the irradiation area A of the irradiation unit 13 may be employed. In the case of this configuration, the same effects as those of the above-described embodiments and modifications can be obtained by detecting the position of each of the stages 15 during movement by the position detecting means.

Further, in the embodiment, the irradiation unit 13 is disposed such that the polarized light is irradiated vertically downward, but the irradiation direction of the polarized light is not limited. For example, the transport direction of the stage 15 may be inclined with respect to the horizontal direction, and the optical axis of the polarized light irradiated to the substrate 11 on the stage 15 may be inclined with respect to the vertical direction.

In each of the above-described embodiments, one irradiation unit 13 is provided, but the configuration is not limited thereto. For example, a plurality of irradiation units 13 may be provided at predetermined intervals. At this time, the irradiation area A is not only directly below the plurality of irradiation units 13 but also from one end of the opening of the lowermost surface of the irradiation unit 13 provided at one end to the lowermost surface of the irradiation unit 13 at the other end. The area between the other end of the opening.

The embodiments of the present invention have been described, but the embodiments are merely illustrative and are not intended to limit the scope of the invention. The embodiment can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the scope of the invention. The invention and its modifications are intended to be included within the scope and spirit of the invention, and are also included in the scope of the invention described in the claims.

1‧‧‧Light aligning device for polarized light
2, 3, 4, 5, 6‧‧‧ polarized light irradiation device
11‧‧‧Substrate
12‧‧‧ Department of Irradiation
13‧‧‧Irradiation unit
13a‧‧‧Light source
13b, 29‧‧ ‧ reflector
13c‧‧‧Polar plate
13d‧‧‧Retaining components
14, 23a, 33a‧‧‧ framework
15‧‧‧ stage
16‧‧‧Transportation agency
16a‧‧‧rail
16b‧‧‧Drive unit
17‧‧‧Transfer path
17a‧‧‧1st transport path
17b‧‧‧2nd transport path
17c‧‧‧3rd transport path
18‧‧‧Light sensor
19‧‧‧Control Department
20‧‧‧Operation Department
20a‧‧‧ display panel
21‧‧‧Support
23‧‧‧Sensor support
25‧‧‧Location Correction Agency
29a‧‧ ‧ datum
33‧‧‧reflector support
A‧‧‧Irradiated area
B‧‧‧ illuminated surface
P1‧‧‧ starting position
P2‧‧‧ stop position
X, Y, Z‧‧‧ axes
S1, S2, S3‧‧‧ steps

FIG. 1 is a perspective view showing a polarized light irradiation device for optical alignment according to the first embodiment. FIG. 2 is a plan view showing a polarized light irradiation device for optical alignment according to the first embodiment. 3 is a side view showing a polarized light irradiation device for optical alignment according to the first embodiment. FIG. 4 is a flowchart for explaining processing based on the detection result of the photosensor in the polarized light irradiation device for optical alignment according to the first embodiment. FIG. 5 is a side view showing a polarized light irradiation device for optical alignment according to a first modification of the first embodiment. FIG. 6 is a plan view showing a polarized light irradiation device for optical alignment according to a second modification of the first embodiment. FIG. 7 is a side view showing a polarized light irradiation device for optical alignment according to a second modification of the first embodiment. FIG. 8 is a side view schematically showing a polarized light irradiation device for optical alignment according to a third modification of the first embodiment. FIG. 9 is a perspective view showing a polarized light irradiation device for optical alignment according to a second embodiment. FIG. 10 is a plan view showing a polarized light irradiation device for optical alignment according to a second embodiment. FIG. 11 is a side view showing a polarized light irradiation device for optical alignment according to a second embodiment. FIG. 12 is a plan view showing a polarized light irradiation device for optical alignment according to a first modification of the second embodiment. FIG. 13 is a side view showing a polarized light irradiation device for optical alignment according to a first modification of the second embodiment.

1‧‧‧Light aligning device for polarized light

11‧‧‧Substrate

12‧‧‧ Department of Irradiation

13‧‧‧Irradiation unit

13a‧‧‧Light source

13c‧‧‧Polar plate

15‧‧‧ stage

16‧‧‧Transportation agency

16a‧‧‧rail

16b‧‧‧Drive unit

18‧‧‧Light sensor

19‧‧‧Control Department

20‧‧‧Operation Department

20a‧‧‧ display panel

X, Y, Z‧‧‧ axes

Claims (11)

A polarized light irradiation device for light alignment, comprising: an irradiation unit provided with an irradiation surface that irradiates the object to be irradiated with polarized light; a stage on which the object to be irradiated is mounted; and a conveying mechanism that transports the stage to make the object The irradiated object on the stage passes through an irradiation region of polarized light irradiated from the irradiation surface so as to be parallel to the irradiation surface; and the position detecting member is in the stage conveyed by the conveying mechanism During the movement, the distance to the stage or the object to be irradiated is measured, and the position of the stage or the object to be irradiated is detected; and a control unit is detected based on the position detecting unit The test results are issued to perform the prescribed control. The polarized light irradiation device for optical alignment according to claim 1, wherein the position detecting member is in a circumferential direction orthogonal to the irradiation surface, and the stage or the object to be irradiated The rotation angle with respect to the conveyance direction of the stage is detected. The polarized light irradiation device for optical alignment according to the first or second aspect of the invention, wherein the position detecting member is disposed on the stage in the irradiation region with respect to the irradiation region. At least one of one side and the other side in the transport direction. The polarized light irradiation device for optical alignment according to claim 3, wherein the position detecting member is disposed in a direction orthogonal to the irradiation surface and a direction parallel to the irradiation surface The position of the stage or the object to be irradiated is detected in at least one direction. The polarized light irradiation device for light distribution according to claim 3, comprising: an illuminating unit having the illuminating unit, wherein the position detecting unit is provided in the illuminating unit. The polarized light irradiation device for light distribution according to claim 3, comprising: an irradiation unit having the irradiation unit, wherein the conveying mechanism includes a first conveying path and a second conveying path, and the first conveying The path is provided between a start position where the stage starts moving toward the irradiation area and the irradiation unit, and the second conveyance path is provided at a stop position and stop where the stage after the irradiation area is stopped Between the irradiation units, the position detecting member is provided at a position along at least one of the first transport path and the second transport path. The polarized light irradiation device for optical alignment according to the first or second aspect of the invention, wherein the position detecting member is provided on the stage. The polarized light irradiation device for light distribution according to claim 7, wherein the position detecting member is disposed to face the stage with respect to the irradiation surface and the irradiation The position of at least one of the parallel directions is detected. The polarized light irradiation device for light distribution according to claim 7, comprising: an illuminating unit having the illuminating unit, wherein the illuminating unit has a reference surface for passing the position detecting unit The position of the stage relative to the direction orthogonal to the irradiation surface and the direction parallel to the irradiation surface is detected. The polarized light irradiation device for optical alignment according to claim 7, wherein the irradiation unit includes a polarizing element that emits polarized light, and a holding member that holds the polarizing element, and the holding member is provided with a reference surface for detecting, by the position detecting means, a position of the stage in a direction orthogonal to the irradiation surface. The polarized light irradiation device for optical alignment according to claim 8, comprising: an irradiation unit having the irradiation unit, wherein the conveying mechanism includes a first conveying path and a second conveying path, and the first conveying The path is provided between a start position where the stage starts moving toward the irradiation area and the irradiation unit, and the second conveyance path is provided at a stop position and stop where the stage after the irradiation area is stopped Between the irradiation units, a reference surface is provided at a position along at least one of the first transport path and the second transport path, and the reference surface is used by the position detecting means. The stage is detected with respect to a direction orthogonal to the irradiation surface and a position parallel to the irradiation surface.