CN107272267A - Light orientation complementing equipment and light orientation correction adjusting method - Google Patents
Light orientation complementing equipment and light orientation correction adjusting method Download PDFInfo
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- CN107272267A CN107272267A CN201710680845.3A CN201710680845A CN107272267A CN 107272267 A CN107272267 A CN 107272267A CN 201710680845 A CN201710680845 A CN 201710680845A CN 107272267 A CN107272267 A CN 107272267A
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- laser
- light source
- glass pedestal
- actuator
- source assembly
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a kind of smooth orientation complementing equipment, including movable working platform and moveable light source assembly, glass substrate is arranged at surface of the workbench towards light source assembly, light source assembly is located above workbench, workbench includes the glass pedestal towards the light source assembly, glass substrate is loaded in glass pedestal, the periphery of glass pedestal is equiped with laser-correlation inductor, the X of each laser-correlation inductor in glass pedestal, Y and Z-direction are equiped with laser generator, laser generator is advanced by predetermined trajectory, glass pedestal can facing light sources component movement, and then laser-correlation inductor sends the feedback time of laser to detect the movement position of glass pedestal according to reception from laser generator, and testing result is conveyed to drive division and the second actuator, drive division adjusts the position of glass pedestal according to the testing result received, second actuator adjusts position of the light source assembly with respect to glass pedestal according to the testing result received.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of smooth orientation complementing equipment and light orientation correction regulation side
Method.
Background technology
Liquid crystal display TFT-LCD (Thin Film Transistor-Liquid Crystal Display) technology is passed through
The development of nearest decades is crossed, technology and technique reach its maturity.It has been substituted cold cloudy diode CCFL (Cold Cathode
Fluorescent Lamp) display, the main product as display field.LCD's (Liquid Crystal Display)
In production process, in order that liquid crystal molecule can normally orientation, it is necessary to substrate surface apply last layer alignment films, realize to liquid
The orientation of brilliant molecule.
But during light alignment film orientation, because glass substrate and light source are all fixedly installed, in fact it could happen that
During light alignment film orientation, the former predeterminated position of position deviation of light orientation equipment, and what the position after offseting can not be monitored
Problem.
The content of the invention
The present invention provides a kind of smooth orientation complementing equipment and light orientation correction adjusting method, to solve light alignment film orientation
During, the problem of light orientation equipment occurs to deviate former predeterminated position and can not monitor.
In order to solve the above technical problems, the present invention provides a kind of smooth orientation complementing equipment, for light alignment film orientation
The monitoring of orientation equipment moving position in journey, including movable working platform and moveable light source assembly, the glass base
Plate is arranged at the workbench towards the surface of the light source assembly, and the light source assembly is located above the workbench,
The workbench includes the glass pedestal towards the light source assembly, and the glass substrate is loaded in the glass pedestal, institute
The periphery for stating glass pedestal is equiped with each laser-correlation inductor in laser-correlation inductor, the glass pedestal
X, Y and Z-direction are equiped with laser generator, and the laser generator is advanced by predetermined trajectory, and the glass pedestal can be relative
The light source assembly movement, and then time that the laser-correlation inductor sends laser from the laser generator according to receiving
The feedback time detects the movement position of the glass pedestal.
Wherein, the workbench is connected with drive division, and the drive division includes guide block, guide rail, pulley, the first actuator
The screw support body being connected is rotated with the first actuator, first actuator is located at the guide block with the screw support body
On, first actuator is slidably connected with the glass pedestal, and the screw support body supports first actuator, described
Pulley is slidably connected with the guide block and the guide rail respectively.On the one hand first actuator can drive the glass base
Seat is mobile, on the other hand the glass pedestal can be driven to reform, and then realizes the correction to orientation equipment.
Wherein, the light source assembly includes light source and the second actuator, and second actuator is used to drive the light source
Movement, change the position relationship between the glass substrate and the light source assembly, further realize the benefit to orientation equipment
Just.
Wherein, the light source assembly also includes being located at the support above the workbench and location division, and described second drives
Moving part and the location division are fixed on the support, and the location division is used for the position for positioning the light source assembly after movement
Put.
Wherein, the smooth orientation complementing equipment also includes control device, and the control device is used to control the drive division
And second actuator driving and laser generator and laser-correlation inductor startup and closing.
Wherein, the light of the light source transmitting is ultraviolet light.
Wherein, the glass pedestal peripheral position is provided with fixed seat, and laser generator and the laser-correlation inductor is set
In in the fixed seat.
The present invention also provides a kind of utilization light orientation complementing equipment as described above and light alignment film on glass substrate is entered
The method of row luminous intensity distribution correction, including:
A workbench and light source assembly are provided, the light of the light source assembly outgoing is ultraviolet light;
The glass substrate is placed on the surface of the glass pedestal of workbench;
Using light alignment film described in the ultraviolet light, orientation is carried out to the smooth alignment film, in light alignment film orientation
During, driving positioned at laser-correlation inductor X, Y and Z-direction laser generator by Laser emission to the laser pair
Inductor, the position of laser-correlation inductor glass pedestal according to the feedback time detecting of the laser are penetrated, and is incited somebody to action
Testing result is sent to the drive division and second actuator;
The drive division adjusts the position of the glass pedestal, second actuator according to the testing result received
The position of the relatively described glass pedestal of light source assembly is adjusted according to the testing result received.
Wherein, during light orientation, the laser-correlation inductor is sent out according to the generating laser positioned at X-direction
Go out the feedback time of laser to detect the movement position of glass pedestal, and testing result is sent to the drive division and described
Two actuators, the drive division adjusts the position of glass pedestal X-direction, the second actuator root according to the testing result
The position of the relatively described glass pedestal of light source assembly is adjusted according to the testing result.
Wherein, during light orientation, the laser-correlation inductor is sent out according to the generating laser positioned at Y direction
Go out the feedback time of laser to detect the deviation angle of glass pedestal, and testing result is sent to the drive division and described
Two actuators, the drive division adjusts the position of glass pedestal Y direction, the second actuator root according to the testing result
The position of the relatively described glass pedestal of light source assembly is adjusted according to the testing result.
Wherein, during orientation, the laser-correlation inductor sends sharp according to the laser generator positioned at Z-direction
The feedback time of light detects the traveling bounce position of glass pedestal, and testing result is sent to the drive division, the drive
Dynamic portion adjusts the glass pedestal in the position of Z-direction according to the testing result.
In summary, the glass pedestal periphery of light orientation complementing equipment of the invention is equiped with laser-correlation inductor, institute
X, the Y and Z-direction for stating each laser-correlation inductor in glass pedestal are equiped with laser generator, the laser hair
Raw device is advanced by predetermined trajectory, in the relatively described light source assembly moving process of the glass pedestal, the laser-correlation inductor
Send the feedback time of laser to detect the movement position of the glass pedestal from the laser generator according to reception, and then
Realize the prosecution to the glass pedestal position.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, below by using required in embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for ability
For the those of ordinary skill of domain, on the premise of not paying creative work, it can also be obtained according to these accompanying drawings other attached
Figure.
Fig. 1 represents a kind of structural representation of smooth orientation complementing equipment provided in an embodiment of the present invention;
Fig. 2 represents the schematic cross-section of workbench in Fig. 1;
Fig. 3 represents to carry out the schematic flow sheet of light orientation correction adjusting method by the equipment shown in Fig. 1;
Fig. 4 is another embodiment schematic diagram of light orientation complementing equipment of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in present embodiment, the technical scheme in embodiment of the present invention is carried out clear, complete
Whole description.
The present invention provides a kind of smooth orientation complementing equipment, to solve in light alignment film process of alignment, light orientation equipment hair
The problem of life deviates former predeterminated position and can not monitored.
Refer in Fig. 1-Fig. 2, one embodiment of the invention, the smooth orientation complementing equipment is used for glass substrate 10
Light alignment film process of alignment in orientation equipment moving position monitoring, including workbench 20 and light source assembly 30, the glass
Glass substrate 10 is arranged at the workbench 20 towards the surface of the light source assembly 30, and the light source assembly 30 is located at the work
Make the top of platform 20, the workbench 20 includes the glass pedestal 201 towards the light source assembly 30, the glass substrate 10
Loaded in the glass pedestal 201, the periphery of the glass pedestal 201 is equiped with laser-correlation inductor 202, the glass base
X, Y and Z-direction of each laser-correlation inductor 201 on seat 201 are equiped with laser generator 203, described to swash
Optical generator 203 is advanced by predetermined trajectory, and the glass pedestal 201 can be moved relative to the light source assembly 30, and then described sharp
Light from the laser generator 203 sends the feedback time of laser and detects the glass according to receiving to penetrating inductor 202
The movement position of pedestal 201.In the present embodiment, the predetermined trajectory is the rail of the correspondence normal place of glass pedestal 201
Mark, it is ensured that the laser generator can be come from according to receiving by being installed in the laser-correlation inductor 202 of the glass pedestal 201
The 203 feedback times for sending laser realized the accurate prosecution to the position of the glass pedestal 201.The glass pedestal 201
Peripheral position is provided with fixed seat, and the laser-correlation inductor 202 and the laser generator 203 are in the fixed seat.
Referring to Fig. 2, the workbench 20 is connected with drive division 40, the drive division 40 drives including guide rail 401, first
Moving part 402, screw support body 403, guide block 404 and the pulley 405 being connected with the rotation of the first actuator, the supporter 403
It is located at first actuator 402 on the guide block 404, first actuator 402 is slided with the glass pedestal 201 to be connected
Connect, the screw support body 403 supports first actuator 402, the pulley 405 respectively with the guide block 404 and institute
State guide rail 401 to be slidably connected, the one side of the first actuator 402 can drive the movement of the glass pedestal 201, the opposing party
Face can drive the glass pedestal 201 to reform, and then realize the correction to orientation equipment.
Referring to Fig. 2, further, the pulley 405 is installed in the left and right sides of guide block 404, the guide rail respectively
401 are set in parallel in the end that the guide block 404 is connected with the pulley 405, and bearing of trend is parallel with direct of travel, the cunning
Wheel 405 is slidably mounted on the guide rail 401 along the guide rail 401.
Referring to Fig. 2, the light source assembly 30 includes light source 301, location division, the second actuator 302 and positioned at described
Support 303 above workbench.Wherein, second actuator 302 and the location division are fixed on the support 303,
Second actuator 302 is connected with the light source 301, the movement for driving the light source 301, is further realized to described
The correction of orientation equipment.
Further, the light that the light source 301 is sent is uniform ultraviolet light, and the ultraviolet light is matched somebody with somebody for irradiating the light
To film, to carry out orientation to light alignment film.The light source 301 can be area source or line source, so that ensure can be with uniform in light emission.
The light source 301 is placed in the surface of the smooth alignment film, to realize the uniform orientation to the smooth alignment film, it is ensured that orientation matter
Amount.
Referring to Fig. 1, further, the smooth alignment film is located on the glass substrate 10, and the glass substrate 10 is wrapped
Orientation region 101 is included, the width of the wherein side of orientation region 101 1 is not more than ultraviolet light can be with the width of irradiation area, to protect
The size in card orientation region 101 is less than the size that light source 301 can irradiate, and makes ultraviolet light can be with uniform irradiation to orientation region
101.It should be noted that the uniform light of the ultraviolet light, just can guarantee that light alignment film orientation is uniform.
The smooth orientation complementing equipment also includes control device, and the control device is used to control the drive division 40 and the
Two actuators driving 302 and the startup and closing of laser generator 203 and laser-correlation inductor 202.Specifically, light orientation
When film starts orientation, the control device controls the actuator of drive division 40 and second driving 302 to start, while controlling laser
Generator 203 and laser-correlation inductor 202 are opened.After light alignment film orientation terminates, the control device 50 controls the drive
The dynamic actuator of portion 40 and second driving 302 is closed, while controlling laser generator 203 and laser-correlation inductor 202 to close.
In light alignment film process of alignment, because orientation equipment easily deviates former predeterminated position, therefore, orientation equipment
Need by prosecution.If orientation equipment occurs to deviate former predeterminated position, need to make corrections to orientation equipment.Specifically, described
The laser generator 203 that laser-correlation inductor 202 is installed in X-direction sends laser to the laser-correlation inductor 202,
The laser-correlation inductor 202 detected according to the feedback time of the laser glass pedestal 201 X-direction with it is pre-
If the offset of track, and testing result is sent to the drive division 40 and second actuator 302, the basis of drive division 40
The testing result adjusts the glass pedestal 301 in the position of X-direction, and second actuator 302 is according to the detection
As a result the position of the relatively described glass pedestal 201 of the light source assembly 30 is adjusted, and if then realizing that orientation equipment occurs to deviate former
Predeterminated position, the correction to orientation equipment.
Further, the laser generator 203 that the laser-correlation inductor 202 is installed in Y direction is to the laser
Laser is sent to penetrating inductor 202, the laser-correlation inductor 202 detects the glass according to the feedback time of the laser
Glass pedestal 201 is sent to the drive division 40 and described in Y direction and the deviation angle of predetermined trajectory, and by testing result
Two actuators 302, drive division 40 adjusts the glass pedestal 301 in the position of X-direction according to the testing result, and described the
Two actuators 302 adjust the position of the relatively described glass pedestal 201 of light source assembly 30, Jin Ershi according to the testing result
If existing orientation equipment occurs to deviate former predeterminated position, the correction to orientation equipment.
Further, the laser generator 203 that the laser-correlation inductor 202 is installed in Z-direction is to the laser
Laser is sent to penetrating inductor 202, the laser-correlation inductor 202 detects the glass according to the feedback time of the laser
Testing result is sent to the drive division 40, the drive division 40 by glass pedestal 201 in the traveling bounce position of Z-direction
The glass pedestal 301 is adjusted in the position of Z-direction according to the testing result, and if then realizing that orientation equipment deviates
Former predeterminated position, the correction to orientation equipment.
In the present embodiment, the laser-correlation inductor 202 is 4, and the laser-correlation inductor 202 is in X, Y and Z
The laser generator 203 of direction of principal axis installing is 4.
Light on substrate is matched somebody with somebody referring to Fig. 3, the present invention also provides a kind of utilization light orientation complementing equipment as described above
The method that light orientation correction is carried out to film, including:
Step 1, driving positioned at the laser generator 203 of laser-correlation inductor 202X, Y and Z-direction by Laser emission
To laser-correlation inductor 202;
Step 2, the laser-correlation inductor 202 is detected in glass pedestal 201 according to the feedback time of the laser
The position of the glass substrate 10, and testing result is sent to the actuator 302 of drive division 40 and second;
Step 3, the drive division 40 adjusts the position of the glass pedestal 201, institute according to the testing result received
State the second actuator 302 and the relatively described glass pedestal 201 of light source assembly 30 is adjusted according to the testing result received
Position.
Specifically, in light alignment film process of alignment, driving is located at the laser-correlation inductor 202 and filled in X-direction
If laser generator 203 send laser to the laser-correlation inductor 202, the laser-correlation inductor 202 is according to institute
State the feedback time of laser to detect the offset of the glass pedestal 201 and predetermined trajectory, and testing result is sent to
The drive division 40 and second actuator 302, the drive division 40 adjust the glass pedestal according to the testing result
301 adjust the light source assembly 30 with respect to institute in the position of X-direction, second actuator 302 according to the testing result
State the position of glass pedestal 201.
Further, in light alignment film process of alignment, driving is located at the laser-correlation inductor 202 in Y direction
The laser generator 203 of installing sends laser, the basis of laser-correlation inductor 202 to the laser-correlation inductor 202
The feedback time of the laser detects the deviation angle of the glass pedestal 201 and predetermined trajectory, and testing result is passed
The drive division 40 and second actuator 302 are sent to, the drive division 40 adjusts the glass according to the testing result
Pedestal 301 adjusts the phase of light source assembly 30 in the position of Y direction, second actuator 302 according to the testing result
To the position of the glass pedestal 201.
Further, in light alignment film process of alignment, driving is located at the laser-correlation inductor 202 in Z-direction
The laser generator 203 of installing sends laser, the basis of laser-correlation inductor 202 to the laser-correlation inductor 202
The feedback time of the laser detects the glass pedestal 201 in the traveling bounce position of Z-direction, and testing result is passed
The drive division 40 is sent to, the drive division 40 adjusts the glass pedestal 301 in the position of Z-direction according to the testing result
Put.
Referring to Fig. 4, in another embodiment of the present invention, being with the difference of a upper embodiment, the laser-correlation
The quantity of inductor 202 and the laser generator 203 changes, the number of laser-correlation inductor 202 described in the present embodiment
Amount increase is 8, and the laser generator 203 is 6 in the quantity increase of X-axis, is 6 in the quantity increase of Y-axis, in Z axis
Quantity increase be 8.
During light alignment film orientation, the laser-correlation inductor 202 is according to 6 laser positioned at X-direction
The laser feedback time that transmitter 203 is sent sends testing result to described to detect the movement position of glass pedestal 201
Drive division 40 and second actuator 302, the drive division 40 adjust the glass pedestal 201 according to the testing result
Position, second actuator 302 adjusts the position of the relatively described glass pedestal 201 of light source assembly according to the testing result
Put, so detect that the result with adjusting will be more accurate.
Further, in the process of alignment of light alignment film, the laser-correlation inductor 202 is according to positioned at Y direction
Laser feedback time for sending of 6 laser generators 203 detect the deviation angle of the glass pedestal 201, and will detection
As a result send to the drive division 40 and second actuator 302, the drive division 40 adjusts glass according to the testing result
The position of glass pedestal 201, second actuator 302 adjusts the relatively described glass of light source assembly according to the testing result
The position of pedestal 201, so detects that the result with adjusting will be more accurate.
Further, during light alignment film orientation, the laser-correlation inductor 202 is according to positioned at Z-direction
Traveling of the laser feedback time that sends of 8 laser generators 203 to detect glass pedestal 201 beat position, and will detection
As a result send to the drive division 40, the drive division 40 adjusts the position of glass pedestal 201 according to the testing result, so
Detect that the result with adjusting will be more accurate.
Described above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (10)
1. a kind of smooth orientation complementing equipment, for the monitoring to orientation equipment in the light alignment film process of alignment on glass substrate,
It is characterised in that it includes movable working platform and moveable light source assembly, the glass substrate are arranged at the work
Platform is located above the workbench towards the surface of the light source assembly, the light source assembly, and the workbench includes
Towards the glass pedestal of the light source assembly, the glass substrate is loaded in the glass pedestal, the periphery of the glass pedestal
It is equiped with X, Y of each laser-correlation inductor and Z-direction installing in laser-correlation inductor, the glass pedestal
There is laser generator, the laser generator is advanced by predetermined trajectory, and the glass pedestal can be moved relative to the light source assembly,
And then the laser-correlation inductor from the laser generator sends the feedback time of laser come described in detecting according to receiving
The movement position of glass pedestal.
2. smooth orientation complementing equipment according to claim 1, it is characterised in that the workbench is connected with drive division,
The drive division includes guide block, guide rail, pulley, the first actuator and rotates the supporter being connected with the first actuator, tells branch
Support body is located on the guide block with first actuator, and first actuator is slidably connected with the glass pedestal, described
First actuator described in support body supports, the pulley is slidably connected with the guide block and the guide rail respectively.
3. smooth orientation complementing equipment according to claim 1, it is characterised in that the light source assembly includes light source and second
Actuator, second actuator is used for the movement for driving the light source.
4. smooth orientation complementing equipment according to claim 1, it is characterised in that the light source assembly is also included positioned at described
Support and location division above workbench, second actuator and the location division are fixed on the support, described fixed
Position portion is used for the position for positioning the light source assembly after movement.
5. smooth orientation complementing equipment according to claim 1, it is characterised in that the smooth orientation complementing equipment also includes control
Device processed, the control device is used to control the drive division and the second actuator to drive and laser generator and laser-correlation
The startup and closing of inductor.
6. the light orientation complementing equipment according to claim any one of 1-5, it is characterised in that the light of the light source transmitting
For ultraviolet light.
7. the light orientation complementing equipment according to claim any one of 1-5, it is characterised in that the periphery of the glass pedestal
Position is provided with fixed seat, and laser generator and the laser-correlation inductor is in the fixed seat.
8. a kind of method of light alignment film orientation correction on glass substrate, it is characterised in that including:
Driving positioned at laser-correlation inductor X, Y and Z-direction laser generator by Laser emission to laser-correlation inductor;
The laser-correlation inductor detects the position of the glass substrate in glass pedestal according to the feedback time of the laser
Put, and testing result is sent to drive division and the second actuator;
The drive division adjusts the position of the glass pedestal according to the testing result that receives, second actuator according to
The testing result received adjusts the position of the relatively described glass pedestal of light source assembly.
9. the method for smooth alignment film orientation correction according to claim 8, it is characterised in that methods described includes:
Driving positioned at laser-correlation inductor X, Y and Z-direction laser generator by Laser emission to the laser-correlation
During the laser feedback that the step of inductor sends including the laser-correlation inductor according to the generating laser positioned at X-direction
Between detect the movement position of glass pedestal, and testing result is sent to the drive division and second actuator, it is described
Drive division adjusts the position of the glass pedestal X-direction according to the testing result, and second actuator is according to the inspection
Survey the position that result adjusts the relatively described glass pedestal of light source assembly.
10. the method that smooth alignment film according to claim 8 is maked corrections, it is characterised in that be located at laser pair in driving
Penetrating the step of laser generator of inductor X, Y and Z-direction is by Laser emission to the laser-correlation inductor includes, described
The laser feedback time that laser-correlation inductor is sent according to the generating laser positioned at Y direction detects the glass
The deviation angle of pedestal, and testing result is sent to the drive division and second actuator, the drive division is according to institute
The position that testing result adjusts the glass pedestal Y direction is stated, second actuator adjusts institute according to the testing result
State the position of the relatively described glass pedestal of light source assembly.
Priority Applications (1)
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CN201710680845.3A CN107272267A (en) | 2017-08-10 | 2017-08-10 | Light orientation complementing equipment and light orientation correction adjusting method |
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CN201710680845.3A CN107272267A (en) | 2017-08-10 | 2017-08-10 | Light orientation complementing equipment and light orientation correction adjusting method |
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CN113320732A (en) * | 2021-06-04 | 2021-08-31 | 东莞市华越自动化设备有限公司 | DFN micro device braid package system |
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