TW201540421A - Wavy-patterned monowire for cutting - Google Patents

Wavy-patterned monowire for cutting Download PDF

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TW201540421A
TW201540421A TW104113341A TW104113341A TW201540421A TW 201540421 A TW201540421 A TW 201540421A TW 104113341 A TW104113341 A TW 104113341A TW 104113341 A TW104113341 A TW 104113341A TW 201540421 A TW201540421 A TW 201540421A
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corrugated
wire
monofilament type
cutting
steel wire
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TW104113341A
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TWI531441B (en
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Yong-Je Choi
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Hyosung Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention relates to a wavy-patterned monowire for cutting hard material such as hard glass, semiconductors and superhard alloy. The wavy-patterned monowire for cutting can maintain the performance of an abraser and improve cutting workability and the quality of a cut surface.

Description

切割用波紋單絲型鋼絲 Corrugated monofilament wire for cutting

本發明涉及一種切割用波紋單絲型鋼絲,更具體地說,本發明涉及一種用來切割半導體晶錠、陶瓷、玻璃或與其相似的硬質材料的切割用波紋單絲型鋼絲。 BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a corrugated monofilament type steel wire for cutting, and more particularly to a corrugated monofilament type steel wire for cutting for cutting a semiconductor ingot, ceramic, glass or the like.

由矽(太陽電池基板等)、石英(應用於汽車之類的各種產業領域)、砷化鎵(高頻電子產品)等製成的晶元是將製成圓柱形態的晶錠(ingot)切成薄盤形態後形成的。該晶錠的切割機制是利用研磨劑與線(wire)切割被削對象。此時,發揮研磨劑載體作用的現有線使用的是鍍黃銅單絲型鋼絲,最近則開發出為了提高切割能而對線表面進行加工以提升研磨劑載體能力的產品。 A wafer made of 矽 (solar cell substrate, etc.), quartz (used in various industrial fields such as automobiles), gallium arsenide (high-frequency electronic product), etc. is an ingot cut into a cylindrical state. Formed after forming a thin disk. The cutting mechanism of the ingot is to cut the object to be cut by using an abrasive and a wire. At this time, a conventional wire which functions as an abrasive carrier is a brass-plated monofilament-type steel wire, and recently, a product for processing the wire surface to improve the cutting energy to improve the ability of the abrasive carrier has been developed.

作為一例,日本公開專利第2011-189444號揭示了將線表面以電解分解予以蝕刻而按照一定間隔形成槽並且將研磨劑導入槽而提升研磨劑載體能力的技術,但通過該方法製成的線卻在經過一定時間後由於表面磨耗而使得研磨劑效果無法長久保持而終至消失。 As an example, Japanese Laid-Open Patent Publication No. 2011-189444 discloses a technique in which a wire surface is etched by electrolytic decomposition to form a groove at a certain interval and an abrasive is introduced into a groove to elevate an abrasive carrier, but a wire produced by the method is used. However, after a certain period of time, the effect of the abrasive cannot be maintained for a long time due to surface abrasion and disappears.

日本公開專利第2012-139743號揭示了圖1所示鋸線(1),線徑為d時波紋的波高為0.20h/d0.35,波紋的間距(p)為10p/d14的頂點部分(2、3)所構成的波紋連續形成於單一平面上,賦予二維波紋形狀。 Japanese Laid-Open Patent Publication No. 2012-139743 discloses the saw wire (1) shown in Fig. 1, and the wave height of the ripple is 0.20 when the wire diameter is d. h/d 0.35, the pitch of the corrugations (p) is 10 p/d The corrugations formed by the apex portions (2, 3) of 14 are continuously formed on a single plane, giving a two-dimensional corrugated shape.

日本公開專利第2008-114318號揭示了圖2所示的用於線鋸的細徑高抗張力高碳鋼線鋸線(saw wire),該鋸線有下列特徵:1)截面形狀為角部具有圓角的長方形而且其縱橫比為2以上,2)短邊厚度為200m以下,3)長邊面在上下波高高度(H)為短邊厚度(D)的2倍以下的範圍連續進行波紋加工。 Japanese Laid-Open Patent Publication No. 2008-114318 discloses a small-diameter high-tensile high-carbon steel wire saw wire for a wire saw shown in Fig. 2, which has the following features: 1) a cross-sectional shape having a corner portion The rectangular shape of the rounded corner has an aspect ratio of 2 or more, 2) the thickness of the short side is 200 m or less, and 3) the long side surface is continuously corrugated in a range in which the upper and lower wave heights (H) are twice or less the thickness of the short side (D). .

該現有技術雖然稍微提升了研磨劑載體性能,但是改變切割用線的外面通常需要花費很多時間並降低製造工藝性、提高生產成本,研磨劑載體性能還會隨著使用過程而下降。 Although this prior art slightly improves the performance of the abrasive carrier, it usually takes a lot of time to reduce the manufacturing processability and increase the production cost, and the performance of the abrasive carrier decreases with the use process.

為了解決上述現有技術的問題,本發明的目的是提供一種改良型切割用波紋單絲型鋼絲,其研磨劑載體性能及晶錠切割性能優異而提高晶錠切割速度並且能夠提供穩定的被削物件表面品質。 In order to solve the above problems of the prior art, it is an object of the present invention to provide an improved corrugated monofilament type steel wire for cutting which has excellent abrasive carrier properties and ingot cutting performance to improve the ingot cutting speed and can provide a stable object to be cut. Surface quality.

本發明的另一個目的是提供一種切割用波 紋單絲型鋼絲,其切割性能優異並且切割時所需要的延伸率特性優異,能夠提升切割速度並提供優異的被削物件表面品質、儘量減少研磨劑載體性能的劣化程度。 Another object of the present invention is to provide a wave for cutting The monofilament type steel wire has excellent cutting performance and excellent elongation characteristics required for cutting, and can improve the cutting speed and provide excellent surface quality of the object to be cut, and minimize the deterioration of the performance of the abrasive carrier.

為了達到上述目的,本發明的一實施例提供一種切割用波紋單絲型鋼絲,該單絲型鋼絲是由在碳鋼鍍了黃銅而直徑為d的單一金屬線構成並且在長度方向被賦予多個波紋的切割用波紋單絲型鋼絲,其特徵在於,上述波紋配置在一個或一個以上的多個平面,賦予了上述波紋的單絲型鋼絲的直徑(d)、伸率因子(ε)、波紋的高度(h)與波紋的週期(P)符合下式條件地構成:0.1(mm)ε x P(mm)15(mm) In order to achieve the above object, an embodiment of the present invention provides a corrugated monofilament type steel wire for cutting, which is composed of a single metal wire having a diameter of d plated with carbon steel and is imparted in the longitudinal direction. a corrugated monofilament type steel wire for cutting a plurality of corrugations, characterized in that the corrugations are arranged in one or more planes, and the diameter (d) and the elongation factor (ε) of the monofilament type steel wire to which the corrugations are applied The height (h) of the corrugation and the period (P) of the corrugation are in accordance with the following conditions: 0.1 (mm) ε x P(mm) 15 (mm)

0.15xh(mm)ε x d(mm)0.75xh(mm) 0.15xh(mm) ε xd(mm) 0.75xh(mm)

在上述式中,ε(伸率因子)表示在5~30N的延伸率/斷裂延伸率的比率。 In the above formula, ε (extension factor) represents a ratio of elongation to elongation at break of 5 to 30 N.

本發明的上述切割用單絲型鋼絲在形成有波紋的三維座標上朝形成有波紋的二維平面的軸以外的其餘一個軸方向旋轉而得以在比實際形成有波紋的平面更多的平面上賦予波紋。 The above-described cutting monofilament type steel wire of the present invention is rotated on the three-dimensional coordinates on which the corrugations are formed toward the other one of the axes other than the axis in which the corrugated two-dimensional plane is formed, so as to be on a plane more than the plane in which the corrugation is actually formed. Give ripples.

實現上述目的的本發明的另一個形態提供下列切割用波紋單絲型鋼絲,其包括具備一個或多個波紋的波紋區段與沒有賦予波紋的非波紋區段,上述波紋區段與非 波紋區段以9:1到1:9的長度比反復。 Another aspect of the present invention which achieves the above object provides the following corrugated monofilament type steel wire for cutting comprising a corrugated section having one or more corrugations and a non-corrugated section having no corrugation, the corrugated section The corrugated section is repeated with a length ratio of 9:1 to 1:9.

本發明的切割用波紋單絲型鋼絲形成了其伸率因子、單絲型鋼絲的直徑、波紋的高度及週期均處於本發明的範圍內的三維波紋,因此,不僅具備了足夠收容研磨劑的槽,還能維持切割用線所要求的延伸率特性並提升研磨劑載體性能而得以提高切割速度及切割工序的效率。 The corrugated monofilament type steel wire for cutting according to the present invention forms a three-dimensional corrugation in which the elongation factor, the diameter of the monofilament type steel wire, the height of the corrugation, and the period are within the range of the present invention, and therefore, not only is sufficient to contain the abrasive. The groove can also maintain the elongation characteristics required for the cutting line and improve the performance of the abrasive carrier to improve the cutting speed and the efficiency of the cutting process.

而且,由於研磨劑載體性能得到提升而減少波紋單絲型鋼絲的磨耗,使得本發明的切割用波紋單絲型鋼絲的壽命性能提高,由於波紋形成於多個平面或者形成旋轉的三維波紋,因此不僅能讓切割工序穩定,還能提升切割部分的表面品質。因此,本發明的波紋單絲型鋼絲適合切割半導體用晶錠、陶瓷及超硬合金之類的硬質材料,尤其是,能夠充分地適用於要求削物件表面品質優異、高精密的表面平坦度的硬質材料切割用途。 Moreover, since the performance of the abrasive carrier is improved to reduce the abrasion of the corrugated monofilament type steel wire, the life performance of the corrugated monofilament type steel wire for cutting of the present invention is improved, since the corrugation is formed in a plurality of planes or forms a rotating three-dimensional corrugation, Not only can the cutting process be stabilized, but also the surface quality of the cut portion can be improved. Therefore, the corrugated monofilament type steel wire of the present invention is suitable for cutting a hard material such as an ingot for a semiconductor, a ceramic, and a super hard alloy, and in particular, can be sufficiently applied to a surface having excellent surface quality and high precision. Hard material cutting applications.

1‧‧‧鋸線 1‧‧‧Saw line

2‧‧‧頂點部分 2‧‧‧Vertex

3‧‧‧頂點部分 3‧‧‧Vertex

10、10'‧‧‧波紋區段 10, 10'‧‧‧ ripple section

100‧‧‧切割用波紋單絲型鋼絲 100‧‧‧Corrugated monofilament wire for cutting

100a‧‧‧金屬材質線 100a‧‧‧Metal material line

10a、10a'‧‧‧波紋 10a, 10a'‧‧‧ ripple

20‧‧‧非波紋區段 20‧‧‧Non-corrugated section

圖1是現有切割用線的概略圖。 Fig. 1 is a schematic view of a conventional cutting wire.

圖2是現有技術的切割用線的縱剖視圖。 Fig. 2 is a longitudinal sectional view of a prior art cutting wire.

圖3是本發明的一實施例的切割用波紋單絲型鋼絲的側視概略圖。 Fig. 3 is a side elevational view showing a corrugated monofilament type wire for dicing according to an embodiment of the present invention.

圖4是本發明的另一實施例的切割用波紋單絲型鋼絲的概略斜視圖。 Fig. 4 is a schematic perspective view showing a corrugated monofilament type wire for cutting according to another embodiment of the present invention.

下面結合附圖詳細說明本發明的較佳實施例。在說明本發明之前,如果認為公知結構或功能的相關說明可能非必要地混淆本發明的主旨,將省略其詳細說明。 Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Prior to the description of the present invention, a detailed description of well-known structures or functions may be omitted if it is not necessary to obscure the gist of the present invention.

本發明的切割用波紋單絲型鋼絲是由在碳鋼鍍了黃銅而直徑為d的單一金屬線構成並且在長度方向被賦予多個波紋的切割用波紋單絲型鋼絲,上述波紋配置在一個或一個以上的多個平面,賦予了上述波紋的單絲型鋼絲的直徑(d)、伸率因子(ε)、波紋的高度(h)與波紋的週期(P)符合下式條件地構成:0.1(mm)ε x P(mm)15(mm) The corrugated monofilament type steel wire for dicing of the present invention is a corrugated monofilament type steel wire which is composed of a single metal wire having a diameter of d and is plated with carbon steel and having a plurality of corrugations in the longitudinal direction, and the corrugated wire is disposed at One or more planes, the diameter (d), the elongation factor (ε), the height (h) of the corrugation, and the period (P) of the corrugation imparted to the corrugated wire are in accordance with the following formula :0.1 (mm) ε x P(mm) 15 (mm)

0.15xh(mm)ε x d(mm)0.75xh(mm) 0.15xh(mm) ε xd(mm) 0.75xh(mm)

在上述式中,ε(伸率因子)表示在5~30N的延伸率/斷裂延伸率的比率。 In the above formula, ε (extension factor) represents a ratio of elongation to elongation at break of 5 to 30 N.

本發明的切割用波紋單絲型鋼絲和碳化矽粉末、鑽石粉末之類的研磨劑與油等潤滑劑混合的切削液一起以適當壓力接觸被切割對象地行走而將被切割對象切割。利用本發明的切割用波紋單絲型鋼絲將被削物件之類的硬質材料加以切割後形成晶元的方法如下。在具有多個槽的 多個滾輪按照預設間距捲曲一系列的切割用波紋單絲型鋼絲列後,讓該一系列的切割用波紋單絲型鋼絲列行走。在該一系列的切割用波紋單絲型鋼絲列上以預設的力量加壓需要切割的被削物件。與此同時,讓切削液在切割用波紋單絲型鋼絲列與被削物件之間流動而利用研磨用粒子的切削作用切割被削物件後製成晶元。 The cutting corrugated monofilament type steel wire of the present invention, an abrasive such as a tantalum carbide powder or a diamond powder, and a cutting fluid mixed with a lubricant such as oil are brought into contact with the object to be cut with an appropriate pressure to cut the object to be cut. A method of forming a wafer by cutting a hard material such as a workpiece with a corrugated monofilament type wire for cutting according to the present invention is as follows. In a multi-slot After the plurality of rollers crimp a series of corrugated monofilament-type steel wires for cutting at a preset pitch, the series of cutting corrugated monofilament-type steel wires are driven. The object to be cut that is to be cut is pressurized with a predetermined force on the series of corrugated monofilament-type steel wires for cutting. At the same time, the cutting fluid is allowed to flow between the corrugated monofilament-type wire row for cutting and the object to be cut, and the object to be cut is cut by the cutting action of the polishing particles to form a wafer.

圖3是本發明一實施例的切割用波紋單絲型鋼絲的側視概略圖。請參閱圖3,本發明的切割用波紋單絲型鋼絲(100)為了改善研磨劑粘附在高碳鋼、包含鎢或銅等元素的鋼鐵等金屬材質線(100a)表面的問題而具有鍍了銅或黃銅等金屬電鍍層(未圖示)的結構。本發明的切割用波紋單絲型鋼絲的碳含量為0.70%到1.05%左右,拉伸強度為300kg/mm2~600kg/mm2。上述單絲型鋼絲在10~40N的延伸率為0.8~2.1%,斷裂延伸率為1.8~3.0%。 Fig. 3 is a side elevational view showing a corrugated monofilament type wire for cutting according to an embodiment of the present invention. Referring to Fig. 3, the corrugated monofilament type wire (100) for cutting of the present invention has plating for improving the adhesion of the abrasive to the surface of a metal material wire (100a) such as steel of high carbon steel or an element containing tungsten or copper. A structure of a metal plating layer (not shown) such as copper or brass. The corrugated monofilament type steel wire for dicing of the present invention has a carbon content of about 0.70% to 1.05% and a tensile strength of 300 kg/mm 2 to 600 kg/mm 2 . The above-mentioned monofilament type steel wire has an elongation of 0.8 to 2.1% at 10 to 40 N and a tensile elongation at break of 1.8 to 3.0%.

另一方面,把本發明切割用波紋單絲型鋼絲的強度限定於300kg/mm2到600kg/mm2的理由是為了確保實現切割用波紋單絲型鋼絲的原先目的時所需要的切割力,其原先目的是實現半導體、陶瓷或超硬合金等硬質材料的切割及切片(slice)。而且,為了獲得作為切割極細物體的切割用波紋單絲型鋼絲的所需強度,不僅可以進行加工度達到90%以上的拉拔加工,還可以根據需要而在原材料上添加鉻或釩之類的合金元素提高強度。 On the other hand, the reason why the strength of the corrugated monofilament type steel wire for cutting according to the present invention is limited to 300 kg/mm 2 to 600 kg/mm 2 is to secure the cutting force required for the original purpose of the corrugated monofilament type wire for cutting. Its original purpose was to cut and slice hard materials such as semiconductors, ceramics or superhard alloys. Moreover, in order to obtain the required strength of the corrugated monofilament type steel wire for cutting as a very fine object, it is possible to perform not only drawing processing with a degree of processing of 90% or more, but also adding chromium or vanadium to the raw material as needed. Alloying elements increase strength.

上述黃銅鍍層中的銅含量以60~80%較佳,可以根據需要而在黃銅鍍層以0.1~6.0%的範圍添加Co、Fe、Ni之類的第三元素。該三元合金電鍍層能夠改善耐腐蝕性及強度。 The copper content in the brass plating layer is preferably 60 to 80%, and a third element such as Co, Fe, or Ni may be added to the brass plating layer in a range of 0.1 to 6.0% as needed. The ternary alloy plating layer can improve corrosion resistance and strength.

本發明的波紋單絲型鋼絲在波紋部分收容研磨劑而提高了研磨劑載體性能。在本發明中,單絲型鋼絲的波紋配置在一個或一個以上的多個平面,波紋單絲型鋼絲的伸率因子(ε)與波紋的週期(P)的乘積為0.1以上、15以下。 The corrugated monofilament type steel wire of the present invention contains an abrasive in the corrugated portion to improve the performance of the abrasive carrier. In the present invention, the corrugations of the monofilament type steel wire are disposed in one or more planes, and the product of the elongation factor (?) of the corrugated monofilament type steel wire and the period (P) of the corrugation is 0.1 or more and 15 or less.

在本發明中,波紋單絲型鋼絲的ε x P小於0.1時由於研磨劑載體性能不足而使得被切削物件的表面品質及生產性下降,波紋單絲型鋼絲的ε x P超過15時無法提供切割用單絲型鋼絲所要求的最低標準的柔軟性而使得生產性下降。 In the present invention, when the ε x P of the corrugated monofilament type steel wire is less than 0.1, the surface quality and productivity of the object to be cut are degraded due to insufficient performance of the abrasive carrier, and the ε x P of the corrugated monofilament type steel wire cannot exceed 15 The softness of the minimum standard required for cutting a monofilament type steel wire causes a decrease in productivity.

讓本發明的切割用波紋單絲型鋼絲的ε xP及ε xd介於上述範圍之間而使得切割用波紋單絲型鋼絲具備其尺寸足以容納研磨劑的槽,與此同時,還能維持切割用波紋單絲型鋼絲所需要的延伸率特性(elongation characteristics)。 The ε xP and ε xd of the corrugated monofilament type steel wire for cutting according to the present invention are between the above ranges, so that the corrugated monofilament type wire for cutting has a groove having a size sufficient to accommodate the abrasive, and at the same time, the cutting can be maintained. Elongation characteristics required for corrugated monofilament type steel wires.

波紋週期相比於單絲型鋼絲直徑太小時承載研磨劑的頂點部分之間的空間變窄而限制了研磨劑載體性能,與此相反地,波紋週期(P)相比於單絲型鋼絲直徑太大時把研磨劑加壓給對被削對象的波紋的頂點部分數量變小 而降低切削速度。 The corrugation period narrows the space between the apex portions of the abrasive carrying material when the diameter of the monofilament-type steel wire is too small to limit the performance of the abrasive carrier, and conversely, the corrugation period (P) is compared to the diameter of the monofilament-type steel wire. When the toner is too large, the amount of the apex portion of the corrugation of the object to be cut becomes small. And reduce the cutting speed.

本發明的切割用波紋單絲型鋼絲以單絲型鋼絲直徑(d)為0.03mm到0.5mm較佳。單絲型鋼絲的直徑(d)小於0.03mm時將無法得到作為切割用線所需要的強度,超過0.5mm時切損將增加。 The corrugated monofilament type steel wire for dicing of the present invention preferably has a monofilament type wire diameter (d) of 0.03 mm to 0.5 mm. When the diameter (d) of the monofilament type steel wire is less than 0.03 mm, the strength required for the cutting wire cannot be obtained, and when it exceeds 0.5 mm, the cut loss increases.

利用切割用線切割被切割物件時影響其良率的因素之一是切損(kerfloss),該切損(kerfloss)是切割用線切入矽晶錠之類的被切割物件時出現的切割槽的寬度,切損與良率成反比。為了儘量減少上述切損而需要讓切割用線的線徑變細而實現細線化或極細線化,為此需要具有高切割強度並呈現出高韌性的超高強度鋼線。本發明為了在切割時減少被削物件的損失並提高切割速度而提供直徑為0.5mm以下的細線徑切割用波紋線。 One of the factors affecting the yield of a cut object by cutting a wire is kerfloss, which is a cutting groove that occurs when a cutting wire is cut into a cut object such as a twin ingot. Width, cut loss is inversely proportional to yield. In order to minimize the above-described cut, it is necessary to make the wire diameter of the cutting wire thin to achieve thinning or extremely thinning, and for this purpose, an ultrahigh-strength steel wire having high cutting strength and exhibiting high toughness is required. The present invention provides a thin wire diameter cutting corrugation wire having a diameter of 0.5 mm or less in order to reduce the loss of the object to be cut and to increase the cutting speed at the time of cutting.

上述單絲型鋼絲的直徑(d)及波紋的高度(h)符合下式時,能夠輕易地調整直線性並改善研磨劑載體性能。 When the diameter (d) of the monofilament-type steel wire and the height (h) of the corrugation are in accordance with the following formula, the linearity can be easily adjusted and the performance of the abrasive carrier can be improved.

1.2xd(mm)h(mm)3.0 x d(mm) 1.2xd (mm) h(mm) 3.0 xd (mm)

本發明中波紋的高度(h)相比於單絲型鋼絲的直徑(d)太低時無法在削物件與研磨劑之間確保足夠的距離並且讓研磨劑載體性能下降,與此相反地,波紋的高度(h)相比於單絲型鋼絲的直徑(d)太高時所形成的波紋較難被單一的波紋賦予面收容而影響到加工面精密度。上述單絲型鋼絲的直徑(d)與波紋的高度(h)之間的關係以1.5xd(mm)<h(mm) 3.0 x d(mm)較佳。 In the present invention, the height (h) of the corrugation is too low to ensure a sufficient distance between the workpiece and the abrasive and the performance of the abrasive carrier is degraded compared to the diameter (d) of the monofilament type steel wire, and conversely, The corrugation height (h) is more difficult to be accommodated by a single corrugated surface than the diameter (d) of the monofilament type steel wire is too high to affect the precision of the machined surface. The relationship between the diameter (d) of the above monofilament type steel wire and the height (h) of the corrugation is 1.5 x d (mm) < h (mm) 3.0 xd (mm) is preferred.

上述波紋單絲型鋼絲在形成有波紋的三維座標上朝形成有波紋的二維平面的軸以外的其餘一個軸方向旋轉而得以發揮出在比實際形成有波紋的平面更多的平面上賦予波紋的效果。例如,請參閱圖3,波紋形成於X-Y平面時讓形成有波紋的單絲型鋼絲朝Z軸方向旋轉就能發揮出如同Y-Z平面方向也形成有波紋的效果。該實施例的切割用波紋單絲型鋼絲不使用兩套波紋賦予裝置也能形成三維波紋。 The corrugated monofilament type steel wire is rotated on the three-dimensional coordinates on which the corrugations are formed, and is rotated toward the other one of the axes other than the axis in which the corrugated two-dimensional plane is formed, thereby imparting ripple on a plane more than the plane in which the corrugation is actually formed. Effect. For example, referring to Fig. 3, when the corrugations are formed on the X-Y plane, the corrugated monofilament-shaped wires are rotated in the Z-axis direction to exert a corrugation effect in the Y-Z plane direction. The corrugated monofilament type wire for cutting of this embodiment can also form a three-dimensional corrugation without using two sets of corrugation imparting means.

該切割用單絲型鋼絲在通過互相朝相反方向旋轉的一雙扭曲裝置讓各單絲型鋼絲本身受到扭曲卻不會讓2束互相糾纏地賦予微細扭曲的狀態下通過波紋賦予裝置賦予波紋後製成。一雙扭曲裝置的旋轉太大時會因為過度扭曲而使得2束單絲型鋼絲互相糾纏而頻繁地出現斷線,與此相反地,如果旋轉太小則鋼線材料本身內部會留下不均勻的殘留應力而影響到直線性。因此,適當調節扭曲裝置的旋轉量以便在通過波紋賦予裝置之前單絲型鋼絲本身雖然受到扭曲卻不會讓2束單絲型鋼絲不互相糾纏地賦予微細扭曲是非常重要的。單絲型鋼絲通過上述波紋賦予裝置時單絲型鋼絲與波紋賦予裝置之間的角度以0~90度較佳。本發明在多個平面形成波紋時,不要求形成於各平面的波紋的ε x P,ε x d及波紋的數量等必須相同。 The cutting monofilament type steel wire is corrugated by the corrugation imparting device in a state in which the individual filament-type steel wires themselves are twisted by a pair of twisting means rotating in opposite directions to each other without imparting fine distortion to the two bundles entangled with each other. production. When the rotation of a pair of twisting devices is too large, the two bundles of monofilament-shaped wires are entangled with each other due to excessive distortion, and frequent disconnection occurs. On the contrary, if the rotation is too small, the steel wire material itself may be unevenly distributed. The residual stress affects the linearity. Therefore, it is important to appropriately adjust the amount of rotation of the twisting means so that the monofilament type steel wire itself is twisted without passing the two bundles of the monofilament type steel wires to each other without imparting entanglement to each other before passing through the corrugated sheet imparting means. The angle between the monofilament type steel wire and the corrugation imparting means when the monofilament type steel wire passes through the above-mentioned corrugation imparting means is preferably 0 to 90 degrees. When the present invention forms a corrugation in a plurality of planes, it is not required that the ε x P, ε x d and the number of corrugations formed in the corrugations of the respective planes must be the same.

在本發明的再一個實施例中,切割用波紋單絲型鋼絲為了提高耐磨耗性及壽命性能而另外包含耐磨耗性多層塗層。上述塗層是由選自(Ti,Al,Si)N、(Ti,Si)N、(Ti,Al)N及(Al,Cr)N所組成的群組的1種以上材料所構成的1層以上的耐磨耗性塗層。作為該耐磨耗性塗層的一例,可以把包含(Ti,Al,Si)N+(Ti,Si)N、(Ti,Si)N+(Ti,Al)N、(Al,Cr)N+(Ti,Si)N或(Al,Ti,Si)N+(Al,Cr)N的多層塗層(coating)層疊於切割用波紋單絲型鋼絲。包含多層結構的塗層可以通過相異的PVD法沉積到基質或者交替地形成個別層。 In still another embodiment of the present invention, the corrugated monofilament type wire for cutting additionally includes an abrasion resistant multilayer coating for improving wear resistance and life performance. The coating layer is composed of one or more materials selected from the group consisting of (Ti, Al, Si) N, (Ti, Si) N, (Ti, Al) N, and (Al, Cr) N. A wear resistant coating above the layer. As an example of the wear resistant coating, it is possible to contain (Ti, Al, Si) N + (Ti, Si) N, (Ti, Si) N + (Ti, Al) N, (Al, Cr) N + (Ti A multilayer coating of Si)N or (Al,Ti,Si)N+(Al,Cr)N is laminated on the corrugated monofilament type steel wire for cutting. The coating comprising the multilayer structure may be deposited to the substrate by a different PVD process or alternately formed into individual layers.

圖4是示出本發明另一實施例的切割用波紋單絲型鋼絲的形態的概略斜視圖。如圖4所示,本發明的切割用波紋單絲型鋼絲(100)包括具備一個以上的波紋(10a或10a')的波紋區段(10)與沒有賦予波紋的非波紋區段(20)。 Fig. 4 is a schematic perspective view showing a form of a corrugated monofilament type wire for cutting according to another embodiment of the present invention. As shown in Fig. 4, the corrugated monofilament type wire (100) for cutting of the present invention comprises a corrugated section (10) having one or more corrugations (10a or 10a') and a non-corrugated section (20) not provided with corrugations. .

如前所述地,本發明另一實施例的包括波紋區段與非波紋區段的三維波紋形狀的單絲型鋼絲的斷裂延伸率及粘結力優異、幾乎沒有殘留旋轉應力、直線性優異,不僅提升切割性能,還能提升製造工藝性。 As described above, the three-dimensional corrugated monofilament type steel wire including the corrugated section and the non-corrugated section of the present invention has excellent elongation at break and adhesion, almost no residual rotational stress, and excellent linearity. , not only improve the cutting performance, but also improve the manufacturing process.

本發明的波紋區段只要符合上述條件即可,因此可以按照各種形態排列單位波紋區段(10)及單位非波紋區段(20)。例如,該實施例的切割用單絲型鋼絲的波紋區段與非波紋區段連續反復,把波紋區段稱為A、非波紋區段稱為B而且A區段與B區段的長度相同時,不必一定要像 ABABAB一樣讓波紋區段與非波紋區段按照一個區段一個區段地交替形成,也可以像AABAABAAB、AAABAAABAAAB一樣地在兩個以上的波紋區段之間插入數量較少的非波紋區段。 The corrugated section of the present invention is only required to satisfy the above conditions, and thus the unit corrugated section (10) and the unit non-corrugated section (20) can be arranged in various forms. For example, the corrugated section and the non-corrugated section of the cutting monofilament type steel wire of this embodiment are continuously repeated, the corrugated section is referred to as A, the non-corrugated section is referred to as B, and the A section is the same length as the B section. When you don’t have to be like Like ABABAB, the corrugated section and the non-corrugated section are alternately formed in one section, and a smaller number of non-corrugated sections can be inserted between two or more corrugated sections like AABAABAAB, AAABAAABAAAB.

作為另一例,波紋區段(10)及非波紋區段(20)可以交替排列並且各個波紋區段的波紋形成於互不相同的平面。作為一例,請參閱圖4,波紋10a對X-Y平面形成波紋而波紋10'則對X-Z平面形成波紋。因此,切割用波紋單絲型鋼絲在切割工序期間維持直線狀態而得以讓切割工序更穩定並且提升切割部分的表面品質。此時,上述互不相同的角度不是一定要互成直角,也可以成為低於90度的銳角。 As another example, the corrugated section (10) and the non-corrugated section (20) may be alternately arranged and the corrugations of the respective corrugated sections are formed in mutually different planes. As an example, referring to Fig. 4, the corrugations 10a form corrugations in the X-Y plane and the corrugations 10' form corrugations in the X-Z plane. Therefore, the corrugated monofilament type wire for cutting maintains a straight state during the cutting process to make the cutting process more stable and to improve the surface quality of the cut portion. At this time, the mutually different angles are not necessarily perpendicular to each other, and may be an acute angle of less than 90 degrees.

在本發明中,上述非波紋區段(20)可以是完全沒有賦予波紋的線性線,但波紋的高度可以在單絲型鋼絲直徑(d)的1.00~1.10倍範圍內。 In the present invention, the non-corrugated section (20) may be a linear line which is not provided with a corrugation at all, but the height of the corrugation may be in the range of 1.00 to 1.10 times the diameter (d) of the monofilament type steel wire.

在本發明的切割用波紋單絲型鋼絲中,上述單位波紋區段(10)與單位非波紋區段(20)在9:1到1:9的長度比內反復較佳,在8:2到2:8的長度比內反復更佳,在7:3到3:7的長度比內反復則最佳。 In the corrugated monofilament type wire for cutting of the present invention, the unit corrugated section (10) and the unit non-corrugated section (20) are preferably repeated in a length ratio of 9:1 to 1:9, at 8:2. The length to 2:8 is better than the inner iteration, and it is best to repeat it in the length ratio of 7:3 to 3:7.

而且,上述單位波紋區段(10)與單位非波紋區段(20)的長度為1mm到100mm較佳,而且,優選地,上述波紋(10a及10a')的週期(P)為1mm到10mm,上述波紋(10a)的高度(h)為1.2×dmm到3.0×dmm,1.5×dmm<h(mm)3.0×dmm更佳。 Moreover, it is preferable that the unit corrugated section (10) and the unit non-corrugated section (20) have a length of 1 mm to 100 mm, and preferably, the period (P) of the corrugations (10a and 10a') is 1 mm to 10 mm. The height (h) of the above corrugation (10a) is 1.2×dmm to 3.0×dmm, and 1.5×dmm<h(mm) 3.0 × dmm is better.

本發明雖然沒有對波紋的形狀給予特別限制,但作為一例,可以具有“之”字形狀或正弦波紋狀。優選地,本發明的切割用波紋單絲型鋼絲包括研磨粉漿之類的研磨劑塗層。 Although the shape of the corrugation is not particularly limited in the present invention, as an example, it may have a zigzag shape or a sinusoidal corrugation shape. Preferably, the corrugated monofilament type wire for cutting of the present invention comprises an abrasive coating such as an abrasive slurry.

下面結合實施例詳細說明本發明,但下述實施例只是為了說明本發明,不得因此限制本發明。 The invention is described in detail below with reference to the embodiments, but the following examples are intended to illustrate the invention and are not intended to limit the invention.

實施例Example

實施例1Example 1

針對碳含量為0.70~1.05%、直徑為5.5mm的線材(wire rod)實行拉拔過程2次後進行熱處理及鍍黃銅,最終拉拔到直徑0.100mm而備妥單絲型鋼絲。接著,使用波紋賦予裝置在最終拉拔而沒有賦予波紋的單絲型鋼絲的2個平面賦予波紋,並且讓ε x P成為0.1、ε x d成為0.15h地製成切割用波紋單絲型鋼絲。針對所得到的切割用波紋單絲型鋼絲的線徑、波紋週期、延伸率、斷裂延伸率進行評估後將其結果列示在下述表1。 For the wire rod with a carbon content of 0.70 to 1.05% and a diameter of 5.5 mm, the drawing process is performed twice, followed by heat treatment and brass plating, and finally drawn to a diameter of 0.100 mm to prepare a monofilament type steel wire. Then, a corrugated monofilament type wire for cutting is formed by applying a corrugation to the two planes of the monofilament type steel wire which is finally drawn without the corrugation, and the ε x P is 0.1 and ε x d is 0.15 h. The wire diameter, the corrugation period, the elongation, and the elongation at break of the obtained corrugated monofilament type steel wire for dicing were evaluated, and the results are shown in Table 1 below.

另一方面,使用由碳化矽(silicon carbide)構成的漿(slurry)切割直徑150mm的矽晶錠後,利用下列記載的方法評估晶元物性與生產性並且將其結果一起列示在下述表1。 On the other hand, after cutting a twin crystal ingot having a diameter of 150 mm using a slurry composed of silicon carbide, the physical properties and productivity of the crystal were evaluated by the methods described below and the results are shown together in Table 1 below. .

[物性評估方法] [Physical evaluation method]

*斷裂延伸率利用拉力試驗機測量了斷裂時的延伸率。 *Elongation at break The elongation at break was measured using a tensile tester.

*表面粗糙度則利用接觸式感測器方法對單絲型鋼絲測量了被切割物件的表面粗糙度(surface roughness)。 * Surface roughness The surface roughness of the object to be cut was measured on a monofilament type wire using a contact sensor method.

*切損(μm)則測量了矽晶錠的切割作業後的切割損失(kerf loss),以沒有賦予波紋形狀的0.13mm線的情形作為100後進行了相對比較。 * Cut loss (μm) measured the kerf loss after the cutting operation of the twin ingot, and the relative comparison was made after the case of the 0.13 mm line which was not given the corrugated shape as 100.

*切割速度指的是將直徑150mm的矽晶錠切割時的速度,以沒有賦予波紋形狀的0.13mm線的情形作為100後進行了相對比較。 * The cutting speed refers to the speed at which a twin ingot having a diameter of 150 mm is cut, and a relative comparison is made with a case where a 0.13 mm line having no corrugated shape is taken as 100.

實施例2Example 2

針對碳含量為0.70~1.05%、直徑為5.5mm的線材(wire rod)實行拉拔過程2次後進行熱處理及鍍黃銅,最終拉拔到0.115mm而備妥單絲型鋼絲,賦予波紋時,除了讓ε x P成為0.5、ε x d成為0.32h以外,其餘的則和實施例1相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表1。 For wire rods with a carbon content of 0.70 to 1.05% and a diameter of 5.5 mm, the drawing process is performed twice and then heat-treated and plated with brass. Finally, the wire is drawn to 0.115 mm and the monofilament-shaped steel wire is prepared. In the same manner as in Example 1, except that ε x P was 0.5 and ε xd was 0.32 h, the corrugated monofilament type wire for dicing was prepared and evaluated for physical properties, and the following Table 1 is shown.

實施例3Example 3

除了讓ε x P成為1.0、ε x d成為0.26h以外,其餘的則和實施例2相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表1。 Except that ε x P was 1.0 and ε x d was 0.26 h, the other was carried out in the same manner as in Example 2 to prepare a corrugated monofilament type wire for dicing, and various physical properties were evaluated and shown in Table 1 below.

實施例4Example 4

除了讓ε x P成為3.5、ε xd成為0.23h以外,其餘的則和實施例2相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表1。 Except that ε x P was set to 3.5 and ε xd was 0.23 h, the other was carried out in the same manner as in Example 2 to prepare a corrugated monofilament type wire for dicing, and various physical properties were evaluated and shown in Table 1 below.

實施例5Example 5

除了讓ε x P成為4.0、ε xd成為0.52h以外,其餘的則和實施例2相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表1。 Except that ε x P was 4.0 and ε xd was 0.52 h, the other was carried out in the same manner as in Example 2 to prepare a corrugated monofilament type wire for dicing, and various physical properties were evaluated and shown in Table 1 below.

實施例6Example 6

針對碳含量為0.70~1.05%、直徑為5.5mm的線材實行拉拔過程2次後進行熱處理及鍍黃銅,最終拉拔到0.130mm而備妥單絲型鋼絲,賦予波紋時,除了讓ε x P成為5.0、ε xd成為0.46h以外,其餘的則和實施例1相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表1。 For the wire with a carbon content of 0.70~1.05% and a diameter of 5.5mm, the drawing process is carried out twice and then heat treated and plated with brass. Finally, the wire is drawn to 0.130 mm and the monofilament type wire is prepared. When the corrugation is given, in addition to ε When x P was 5.0 and ε xd was 0.46 h, the other was carried out in the same manner as in Example 1 to prepare a corrugated monofilament type wire for dicing, and various physical properties were evaluated and shown in Table 1 below.

實施例7Example 7

針對碳含量為0.70~1.05%、直徑為5.5mm的線材實行拉拔過程2次後進行熱處理及鍍黃銅,最終拉拔到0.130mm而備妥單絲型鋼絲,賦予波紋時,除了讓ε x P成為12.5、ε xd成為0.75h以外,其餘的則和實施例1相同地實行而 製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表1。 For the wire with a carbon content of 0.70~1.05% and a diameter of 5.5mm, the drawing process is carried out twice and then heat treated and plated with brass. Finally, the wire is drawn to 0.130 mm and the monofilament type wire is prepared. When the corrugation is given, in addition to ε x P is 12.5 and ε xd is 0.75 h, and the rest is carried out in the same manner as in the first embodiment. The corrugated monofilament type steel wire for cutting was prepared and evaluated for various physical properties and listed together in Table 1 below.

比較例1Comparative example 1

最終拉拔後不使用波紋賦予裝置並且不對直徑0.130mm線的任何平面賦予波紋地製成切割用單絲型鋼絲,與實施例中製作的單絲型鋼絲進行物性比較評估後將其結果列示在下述表2。 After the final drawing, the corrugated sheeting device was not used, and the corrugated monofilament type steel wire was not corrugated to any plane of the 0.130 mm diameter wire, and the physical properties of the monofilament type steel wire produced in the example were compared and evaluated, and the results were listed. In Table 2 below.

比較例2Comparative example 2

除了讓ε x P成為1.7、ε x d成為0.80h以外,其餘的則和實施例2相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表2。 Except that ε x P was 1.7 and ε x d was 0.80 h, the other was carried out in the same manner as in Example 2 to prepare a corrugated monofilament type wire for dicing, and various physical properties were evaluated and shown in Table 2 below.

比較例3Comparative example 3

除了讓ε x P成為0.04、ε x d成為0.09h以外,其餘的則和實施例2相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表2。 Except that ε x P was 0.04 and ε x d was 0.09 h, the other was carried out in the same manner as in Example 2 to prepare a corrugated monofilament type wire for dicing, and various physical properties were evaluated and shown in Table 2 below.

比較例4Comparative example 4

除了讓ε x P成為16、ε x d成為0.48h以外,其餘的則和實施例2相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表2。 Except that ε x P was changed to 16 and ε x d was changed to 0.48 h, the other was carried out in the same manner as in Example 2 to obtain a corrugated monofilament-type steel wire for dicing, and various physical properties were evaluated and shown in Table 2 below.

比較例5Comparative Example 5

除了讓ε x P成為25.6、ε x d成為0.77h以外, 其餘的則和實施例2相同地實行而製成切割用波紋單絲型鋼絲並評估各項物性後一起列示在下述表2。 Except that ε x P is 25.6 and ε x d is 0.77h, The rest were carried out in the same manner as in Example 2 to prepare a corrugated monofilament type wire for dicing, and various physical properties were evaluated and shown together in Table 2 below.

根據上述表1,與沒有賦予波紋或者ε xP及ε xd的比率脫離了本發明範圍的比較例的單絲型鋼絲相比,使用本發明的波紋單絲型鋼絲切割的晶元的表面粗糙度比較有利並且改善了被切割物件的切損。而且,在本發明的實施例中切割直徑150mm的矽晶錠時切割速度也快於比較例而 得以提高單位時間的生產性,從而能夠降低生產成本。 According to the above Table 1, the surface roughness of the wafer cut using the corrugated monofilament type wire of the present invention is compared with the monofilament type steel wire of the comparative example in which the ratio of the present invention is not given the corrugation or the ratio of ε xP and ε xd It is advantageous and improves the cut of the object being cut. Moreover, in the embodiment of the present invention, the cutting speed of the 150 mm diameter twin ingot is also faster than that of the comparative example. It is possible to increase productivity per unit time and thus reduce production costs.

前文根據本發明的較佳實現例詳細說明了本發明,但是在沒有脫離本發明的精神及範疇的情形下可以出現各種變形及修改,這對於本領域技術人員來說是非常明顯的,因此這些各種變形及修改例都應視為包含在本發明的保護範圍。 The present invention has been described in detail above with reference to a preferred embodiment of the present invention, but various modifications and changes may be made without departing from the spirit and scope of the invention. Various modifications and variations are considered to be included in the scope of the present invention.

100‧‧‧切割用波紋單絲型鋼絲 100‧‧‧Corrugated monofilament wire for cutting

Claims (10)

一種切割用波紋單絲型鋼絲,是由在碳鋼鍍了黃銅而直徑為d的單一金屬線構成並且在長度方向被賦予多個波紋的切割用波紋單絲型鋼絲,其特徵在於,該波紋配置在一個或一個以上的多個平面,賦予了該波紋的單絲型鋼絲的直徑(d)、伸率因子(ε)、波紋的高度(h)與波紋的週期(P)符合下式條件地構成:0.1(mm)ε x P(mm)15(mm) 0.15xh(mm)ε x d(mm)0.75xh(mm)在該式中,ε(伸率因子)表示在5~30N的延伸率/斷裂延伸率。 A corrugated monofilament type steel wire for cutting, which is a corrugated monofilament type wire for cutting which is composed of a single metal wire having a diameter of d and is plated with carbon steel and having a plurality of corrugations in the longitudinal direction, and is characterized in that The corrugations are arranged in one or more planes, and the diameter (d), the elongation factor (ε), the height (h) of the corrugations and the period (P) of the corrugations of the corrugated wire are in accordance with the following formula Conditional composition: 0.1 (mm) ε x P(mm) 15(mm) 0.15xh(mm) ε xd(mm) 0.75 x h (mm) In the formula, ε (extension factor) represents an elongation / elongation at break of 5 to 30 N. 根據請求項1所述的切割用波紋單絲型鋼絲,其特徵在於,該單絲型鋼絲在形成有波紋的三維座標上朝形成有波紋的二維平面的軸以外的其餘一個軸方向旋轉而在比實際形成有波紋的平面更多的平面上賦予波紋。 The corrugated monofilament type wire for cutting according to claim 1, wherein the monofilament type wire is rotated on the three-dimensional coordinate on which the corrugation is formed toward the other one of the axes other than the axis on which the corrugated two-dimensional plane is formed. The corrugations are imparted on more plane than the plane in which the corrugations are actually formed. 根據請求項1所述的切割用波紋單絲型鋼絲,其特徵在於,該單絲型鋼絲包括具備一個或多個波紋的波紋區段與非波紋區段,該波紋區段與非波紋區段以9:1到1:9的長度比反復。 A corrugated monofilament type wire for cutting according to claim 1, wherein the monofilament type wire comprises a corrugated section and a non-corrugated section having one or more corrugations, the corrugated section and the non-corrugated section It is repeated with a length ratio of 9:1 to 1:9. 根據請求項3所述的切割用波紋單絲型鋼絲,其特徵在於,該各個波紋區段的波紋形成於互不相同的平面。 The corrugated monofilament type wire for cutting according to claim 3, characterized in that the corrugations of the respective corrugated sections are formed on mutually different planes. 根據請求項3所述的切割用波紋單絲型鋼絲,其特徵在於,該非波紋區段的波紋高度介於單絲型鋼絲直徑(d)的1.00~1.10倍的範圍內。 The corrugated monofilament type wire for cutting according to claim 3, wherein the corrugation height of the non-corrugated section is in the range of 1.00 to 1.10 times the diameter (d) of the monofilament type wire. 根據請求項1所述的切割用波紋單絲型鋼絲,其特徵在於,該單絲型鋼絲在10~40N的延伸率為0.8~2.1%,斷裂延伸率為1.8~3.0%。 The corrugated monofilament type steel wire for cutting according to claim 1, wherein the monofilament type steel wire has an elongation at 10 to 40 N of 0.8 to 2.1% and an elongation at break of 1.8 to 3.0%. 根據請求項1所述的切割用波紋單絲型鋼絲,其特徵在於,該單絲型鋼絲的直徑(d)為0.03mm~0.5mm。 The corrugated monofilament type wire for cutting according to claim 1, wherein the monofilament type wire has a diameter (d) of 0.03 mm to 0.5 mm. 根據請求項1所述的切割用波紋單絲型鋼絲,其特徵在於,該單絲型鋼絲的碳含量為0.70%到1.05%,黃銅電鍍中銅成分為60~80%。 The corrugated monofilament type steel wire for cutting according to claim 1, wherein the monofilament type steel wire has a carbon content of 0.70% to 1.05%, and the copper component in the brass plating is 60 to 80%. 根據請求項1所述的切割用波紋單絲型鋼絲,其特徵在於,該單絲型鋼絲的拉伸強度為300kg/mm2到600kg/mm2The corrugated monofilament type steel wire for cutting according to claim 1, wherein the monofilament type steel wire has a tensile strength of 300 kg/mm 2 to 600 kg/mm 2 . 根據請求項1所述的切割用波紋單絲型鋼絲,其特徵 在於,該單絲型鋼絲的直徑(d)與波紋的高度(h)符合下式條件地構成:1.2xd(mm)h(mm)3.0xd(mm)根據請求項1所述的切割用波紋單絲型鋼絲,其特徵在於,該單絲型鋼絲還包括選自由(Ti,Al,Si)N、(Ti,Si)N、(Ti,Al)N及(Al,Cr)N所組成的群組的1種以上材料所構成的1層以上的耐磨耗性塗層。 The corrugated monofilament type wire for cutting according to claim 1, wherein the diameter (d) of the monofilament type wire and the height (h) of the corrugation are in accordance with the following condition: 1.2 x d (mm) h(mm) The corrugated monofilament type steel wire for cutting according to claim 1, wherein the monofilament type steel wire further comprises (Ti, Al, Si) N, (Ti, Si) N, ( One or more layers of an abrasion resistant coating layer composed of one or more materials of a group consisting of Ti, Al)N and (Al,Cr)N.
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