CN106553274A - Cutting ripple monofilament shaped steel wire - Google Patents
Cutting ripple monofilament shaped steel wire Download PDFInfo
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- CN106553274A CN106553274A CN201610140394.XA CN201610140394A CN106553274A CN 106553274 A CN106553274 A CN 106553274A CN 201610140394 A CN201610140394 A CN 201610140394A CN 106553274 A CN106553274 A CN 106553274A
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- ripple
- steel wire
- shaped steel
- cutting
- monofilament
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- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 129
- 239000010959 steel Substances 0.000 title claims abstract description 129
- 238000005520 cutting process Methods 0.000 title claims abstract description 117
- 238000000034 method Methods 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 230000000737 periodic effect Effects 0.000 claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 239000003795 chemical substances by application Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 10
- 229910001369 Brass Inorganic materials 0.000 claims description 7
- 239000010951 brass Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- NIFIFKQPDTWWGU-UHFFFAOYSA-N pyrite Chemical compound [Fe+2].[S-][S-] NIFIFKQPDTWWGU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052683 pyrite Inorganic materials 0.000 claims description 2
- 239000011028 pyrite Substances 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 238000009713 electroplating Methods 0.000 claims 2
- 229910000975 Carbon steel Inorganic materials 0.000 claims 1
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- 238000006243 chemical reaction Methods 0.000 description 2
- 239000002173 cutting fluid Substances 0.000 description 2
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- 238000010438 heat treatment Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- 239000004065 semiconductor Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- -1 quasiconductor Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention relates to a kind of cutting uses ripple monofilament shaped steel wire and its manufacture method, the cutting ripple monofilament shaped steel wire to include single metal wire.The metal wire is construed as including with predetermined period, and edge is formed in a longitudinal in the ripple of two or more planes.Wave height H is 3～12% divided by the H/P values that corrugated periodic P is obtained；And when the central shaft from ripple monofilament shaped steel wire is observed, each plane includes an axle, and these axles are mutually staggered with 45～135 ° of angle.
Description
Technical field
The present invention is generally related to a kind of cutting ripple monofilament shaped steel wire, more specifically
Say, the present invention relates to a kind of be used for cutting semiconductor crystal ingot (ingot), ceramics, glass or class
As hard material ripple monofilament shaped steel wire, its can improve cutting workpiece surface matter
Amount.
Background technology
By silicon (for solar cell substrate etc.), quartz (for including the various of automotive field
Industrial circle) or wafer made by GaAs (be used for high-frequency electronic product) etc. be by cylinder
What the crystal ingot of form was formed after being cut into thin dish type state.The cutting mechanism of the crystal ingot is configured to
Workpiece is cut with grinding agent using line (wire).In the case, brass coating monofilament shaped steel
Silk is used as the existing line for playing grinding agent carrier function, has been developed over by line
Surface be processed and boosted grinding agent bearer capabilities are to improve the product of cutting performance
Product.
General straight line is disadvantageous in that with one, due to the carrier property of grinding agent
It is poor, so the cutting speed of crystal ingot is relatively low, and as line is worn during processing
And the diameter of the line carrier property that is gradually reduced and causes grinding agent occur and cutting performance
The problem being all gradually lowered.
Korean Patent No. 888026 discloses a kind of sawline, and wherein sawline is a diameter of
0.08～0.30mm, its residual stress in a certain region in longitudinal direction is 400～1,000
MPa, wherein being 5～10 μm from the depth on sawline surface.Which disclose with specific
Linearity configuration is changed into little bellows-shaped by a kind of linear line of the residual stress of scope,
Purpose is for compensating the caused cutting due to the reduction of the diameter of line in cutting process
Performance is reduced.However, the residual stress due to being difficult precise control linear line, therefore should
Linear line has that the surface quality for cutting workpiece is reduced.
Japanese Unexamined Patent Application Publication the 2012-121101st discloses a kind of fixation
Abrasive particles line, wherein grinding agent are fixed on the surface of line.The grinding of the fixation
Agent granule line is wave-like line, wherein, the diameter based on line is along its longitudinal direction in each of which spacing
Set gradually multiple wavy sweeps.The fixed abrasive granule line feature of the disclosure exists
In wavy sweep has the three-dimensional ripple of spiral sigmoid.The grinding agent of the fixation
The problem that granule line is present is that the shape of holding ripple is difficult during cutting, and therefore
The efficiency of cutting technique is reduced, and as the uneven gauge for cutting workpiece causes cutting
The surface flatness of workpiece is reduced.
The content of the invention
At least one exemplary embodiment of the present invention provides a kind of cutting ripple list
Wire type steel wire, its grinding agent carrier property and required crystal ingot cutting needed for having
Can, so as to improve the surface quality of crystal ingot cutting speed and cutting workpiece.
In terms of a demonstration of the invention, there is provided a kind of to include single metal wire
Cutting ripple monofilament shaped steel wire, wherein, the metal wire be construed as including have it is pre-
Fixed cycle, and edge is formed in a longitudinal in the ripple of two or more planes；H/P values are
3～12%, obtained divided by corrugated periodic P by wave height H；And when observation ripple
During the central shaft of stricture of vagina monofilament shaped steel wire, each plane include an axle, and these axles with
45～135 ° of angle mutually staggers.
Ripple monofilament shaped steel wire is configured to, along in ripply three-dimensional (3D) seat of formation
Independent axle rotation in addition to the axle except forming ripply two dimension (2D) plane that mark is fastened
Turn, so as to give ripple than being actually formed in the more planes of ripply plane.
According to a further aspect in the invention, there is provided a kind of cutting ripple monofilament shaped steel wire
Manufacture method, including：Device is given by the first ripple to supply by feed unit
Monofilament shaped steel wire on give ripple, first ripple gives device includes a pair of gears,
This pair of gear is configured to have bellows-shaped depression in its surface and raised simultaneously along contrary
Direction rotates；By around the first ripple give device wind monofilament shaped steel wire 0.5～3 time from
And reverse clockwise or counterclockwise and give device imparting ripple by the first ripple
Monofilament shaped steel wire, then supplies monofilament shaped steel wire to the second ripple and gives device；Pass through
Second ripple gives device and is giving the monofilament-type that device imparts ripple by the first ripple
Ripple is given on steel wire ripple, second ripple gives device to assign relative to the first ripple
The angle of 45～135 ° of device is given to be kept；And twined by giving device around the second ripple
Around monofilament shaped steel wire 0.5～3 time so as to being reversed by second clockwise or counterclockwise
Ripple gives the monofilament shaped steel wire that device imparts ripple.
Description of the drawings
The above and other purpose of the present invention, feature and advantage combine accompanying drawing from following detailed
It is expressly understood in thin description, wherein：
Fig. 1 is the schematic perspective view of existing sawline；
Fig. 2 is the cutting ripple monofilament-type of an one exemplary embodiment of the invention
The schematic side elevation of steel wire；
Fig. 3 is an one exemplary embodiment of the invention, when from cutting ripple list
The schematic diagram of the ripple struction when central shaft of wire type steel wire is observed；And
Fig. 4 is an one exemplary embodiment of the invention, for manufacturing cutting ripple
The ripple of stricture of vagina monofilament shaped steel wire gives the schematic diagram of device；
Fig. 5 is an one exemplary embodiment of the invention, for manufacturing cutting ripple
The ripple of stricture of vagina monofilament shaped steel wire gives the schematic diagram of device.
Specific embodiment
Describe the one exemplary embodiment of the present invention below in conjunction with the accompanying drawings in detail.Illustrating this
Before bright, if it is considered to the related description of known features or function optionally may be obscured
The purport of the present invention, by description is omitted.
A kind of cutting ripple monofilament shaped steel of an one exemplary embodiment of the invention
Silk includes single metal wire.In cutting with ripple monofilament shaped steel wire, metal wire is formed
It is to include the ripple with predetermined period, and edge is formed in a longitudinal in two or more planes,
H/P values are 3～12%, are obtained divided by corrugated periodic P by wave height H；And
When the central shaft of ripple monofilament shaped steel wire is observed, each plane includes an axle, and
These axles are mutually staggered with 45～135 ° of angle.
Fig. 2 is the cutting ripple monofilament-type of an one exemplary embodiment of the invention
The schematic side elevation of steel wire 10, and Fig. 3 is an exemplary reality of the invention
Example is applied, the ripple struction when being observed from cutting with the central shaft of ripple monofilament shaped steel wire 10
Schematic diagram.Referring to figs. 2 and 3 according to the cutting of this one exemplary embodiment ripple list
Wire type steel wire is configured to, and is formed at two or more ripples of different planes along footpath
To around central shaft distribution.In the exemplary embodiment, the shape of ripple is not limited to
Specific shape, but can have zigzag shape or sine wave shape as an example.
As ripple monofilament shaped steel wire is configured to, along in the ripply three-dimensional (3D) of formation
The independent axle rotation in addition to the axle except forming ripply two dimension (2D) plane in coordinate system
Turn, so as to realize giving ripple than being actually formed in the more planes of ripply plane
Effect.
According to the cutting ripple monofilament shaped steel wire of this one exemplary embodiment, H/P values are (i.e.,
The ratio of wave height H and corrugated periodic P, for the load of grinding agent during improving cutting
Body performance) for 3～12%, preferably 3～11%.In the case, when H/P values are less than 3%
When, the carrier property of grinding agent is insufficient, and therefore produces kerf.Conversely, working as H/P
When value is more than 12%, the carrier property of grinding agent is too high, and therefore produces in wafer thickness
It is raw different.
In addition, Fig. 5 is referred to, when the central shaft from ripple monofilament shaped steel wire is observed, each
Plane includes an axle, and these axles are mutually staggered with 45～135 ° of angle.It is formed at two
Angle between first ripple and the second ripple of individual or more Different Planes is
45～135 °.When the angle is less than 45 °, non-homogeneous residual stress remaines in monofilament shaped steel
Silk the material of itself in, and therefore the linearity reduce, so as to reduce cutting performance.Phase
Instead, when the angle is more than 135 °, after cutting, residual stress is reduced, and therefore ripple
The degree of stability of shape is reduced, so as to cause cutting performance over time to accelerate what is reduced to ask
Topic.
Hc/Hi ratios, (that is, according to the cutting of this one exemplary embodiment ripple monofilament-type
Height His of the height Hc with which before cutting after steel wire cutting) for 0.8～0.95%.When
When Hc/Hi values are less than lower limit, it is possible to create kerf.Conversely, when Hc/Hi values are more than upper
During limit value, total thickness variations (TTV) can be produced.
Typically had according to the cutting ripple monofilament shaped steel wire 10 of this one exemplary embodiment
Following structure：Wherein the surface of metal wire by including high-carbon steel, tungsten and copper steel be plated in by
On the coat of metal made by metal (such as copper or pyrite), to improve the adhesion of grinding agent
Property.
Monofilament shaped steel wire is 2.0～3.5% in the breakaway poing elongation percentage of 10～40N.Originally showing
In exemplary embodiment, when the breakaway poing elongation percentage of ripple monofilament shaped steel wire is less than 2.0%,
It cannot be guaranteed that minimum retractility of the cutting needed for ripple monofilament shaped steel wire, and therefore reduce
Working (machining) efficiency.Conversely, when the breakaway poing elongation percentage of ripple monofilament shaped steel wire is higher than 3.5%,
The carrier property of grinding agent will be insufficient, and therefore cut workpiece surface quality and
Working (machining) efficiency will be reduced.
According to the cutting ripple monofilament shaped steel wire of this one exemplary embodiment, the monofilament shaped steel
The diameter d of silk is preferably 0.03～0.5mm.When monofilament-type gauge of wire d is less than
During 0.03mm, it is impossible to obtain as the intensity needed for cutting line.Conversely, working as the monofilament
When the diameter d of shaped steel wire is more than 0.5mm, cutting damage (kerfloss) will increase.Using cutting
The factor that its yield is affected when cutting with wire cutting workpiece is to cut damage.It is that cutting is used to cut damage
The width of the groove for cutting occurred during the workpiece of line incision silicon ingot etc.Cut damage and yield
It is inversely proportional to.The above-mentioned diameter cut and damage and need reduction cutting line is reduced to try one's best, from
And need cutting line graph thinning or superfine wire.It is desirable for this purpose that cutting with height
Cut intensity and present the superhigh intensity monofilament section steel line of high tenacity.In this exemplary implementation
In example, provide straight in order to the loss of workpiece is reduced in cutting and cutting speed is improved
Fine line diameter cutting wave molding of the footpath for below 0.5mm.
In the cutting according to this one exemplary embodiment with ripple monofilament shaped steel wire, monofilament-type
Gauge of wire d, the height H of ripple, and the cycle P of ripple meet following conditions：
P=1～10mm, d=0.03～0.5mm, and
1.2×d≤H≤3.0×d
In this one exemplary embodiment, when the height H of ripple is too less than monofilament shaped steel wire
Diameter d when, it is impossible to fully ensure that the distance between workpiece to be cut and grinding agent, and
Therefore the carrier property of grinding agent will be reduced.Conversely, when the height H of ripple is excessively higher than
During monofilament-type gauge of wire d, it is difficult to and the single surface for being endowed ripple is given
Ripple, and therefore occur in that problem that the degree of accuracy of finished surface may be reduced.
According to the cutting of this one exemplary embodiment carbon content of ripple monofilament shaped steel wire 10
For 0.7～1.2wt%.The preferred copper content of brass coating is 60～80%.If it is necessary, zinc,
Stannum, nickel, cobalt, chromium or its alloy (i.e. third element) can be added to 0.1～6.0%
Brass coating.This alloy layer can improve decay resistance and intensity.
May be used also according to the coating of the cutting ripple monofilament shaped steel wire of this one exemplary embodiment
To include being selected by the group constituted from diamond, carborundum, tungsten carbide and its mixture
Abrasive particles made by a kind of material for going out.
According to the cutting of this one exemplary embodiment tensile strength of ripple monofilament shaped steel wire
For 300～600kg/mm2.By according to the cutting of this one exemplary embodiment ripple monofilament-type
The tensile strength of steel wire is defined to 300～600kg/mm2The reason for be, it is ensured that realization cut
Cut with the cutting force needed for intrinsic (intrinsic) purpose of ripple monofilament shaped steel wire, i.e. to hard
The cutting and section of material (such as quasiconductor, ceramics or hard metal).In addition, being
Intensity of the cutting needed for ultra-fine ripple monofilament shaped steel wire is obtained, can be using being equal to
Or the method that the high level of processing higher than 90% carries out drawing process, and when needed,
Increase intensity by alloying element (such as chromium or vanadium) is added in original material.
According to the cutting of this one exemplary embodiment with ripple monofilament shaped steel wire as follows
Cutting workpiece：Move when with suitable pressure with absorption surface, with grinding agent and profit
The cutting fluid that lubrication prescription (such as oil or the like) is mixed.It is exemplary using this
The cutting of embodiment cuts hard alloy (such as work to be cut with ripple monofilament shaped steel wire
Part) formed wafer method be described below.A series of multirow ripple monofilament-types
Steel wire is wound around multiple rollers, and the roller has multiple grooves with preset space length, then
A series of multirow ripple monofilament shaped steel wires are moved.With predetermined force by workpiece to be cut
It is pressed against on a series of multirow ripple monofilament shaped steel wires.Meanwhile, cutting fluid is led
Enter between the multirow ripple monofilament shaped steel wire and workpiece to be cut.Thus, by making
Wafer is formed with the shear action cutting workpiece of abrasive particles.
Another aspect of the present invention is to provide a kind of manufacture of cutting ripple monofilament shaped steel wire
Method.In manufacture method of the cutting with ripple monofilament shaped steel wire, by the first ripple
Giving device and ripple being given on the monofilament shaped steel wire supplied by feed unit, this first
Ripple gives device includes a pair of gears, and this pair of gear is configured to be had in its surface
Bellows-shaped is recessed with projection and rotates in mutually opposite directions；By giving around the first ripple
Device winding monofilament shaped steel wire 0.5～3 time is so as to reversing logical clockwise or counterclockwise
Cross the first ripple and give the monofilament shaped steel wire that device gives ripple, then by monofilament shaped steel wire
Supply to the second ripple and give device；Device is given by first wave by the second ripple
Stricture of vagina imparting device to be imparted and give ripple on the monofilament shaped steel wire ripple of ripple, second ripple
The angle that stricture of vagina gives device so that 45～135 ° of device is given relative to the first ripple is kept；With
And by device being given around the second ripple wind monofilament shaped steel wire 0.5～3 time so as to along suitable
Hour hands counterclockwise reverse the monofilament that ripple is imparted by the second ripple imparting device
Shaped steel wire.
As shown in figure 4, the first ripple gives device and the second ripple gives device 20,30
Each may be constructed such that, it may for example comprise two gears and two gears are with pre-
Determining deviation is intermeshed.First ripple gives device 20 and the second ripple gives device 30
Tooth size and spacing can be uniform or arbitrary, but not limited to this.First wave
Stricture of vagina gives the spacing of the gear that device 20 and the second ripple give device 30 can mutually not
Together, and the first ripple give spacing that device 20 and the second ripple give device 30 can
To be configured to the twist torque less than steel wire.
Monofilament shaped steel wire 10 can be endowed the ripple with preset space length as follows：
Device is given by ripple by wire drawing straight monofilament shaped steel wire.That is, will be single
Wire type steel wire 10 is inserted into two ripples and gives in device 20,30, and is passing through two
Device 20,30 is given by two ripples when individual ripple gives device 20,30 to press, from
And obtain predetermined ripple.In the case, two ripples give the every of device 20,30
The gear of one can be configured so that and is intermeshed so as to monofilament shaped steel wire 10 with predetermined gap
Pressed by them while device 20,30 are given by two ripples.
Can pass through to adjust the anglec of rotation that the first and second ripples give device 20,30
And make the angle that the first ripple gives the corrugated surface of device be different from the second ripple and give dress
The angle of the corrugated surface put.
Had with ripple monofilament shaped steel wire according to the cutting of this one exemplary embodiment alleviate by
The monofilament in the reduction of grinding agent carrier property and when using cutting with ripple monofilament shaped steel wire
The reduction of shaped steel wire diameter and the effect of the difference in thickness of wafer that causes, so as to greatly
Improve the surface quality of the working (machining) efficiency and cutting workpiece of cutting process.Thus, according to
The cutting ripple monofilament shaped steel wire of this one exemplary embodiment can be used for cutting needs superelevation
The workpiece on degree of accuracy surface.
The present invention is described in detail with reference to embodiment, but following embodiments are intended merely to
Therefore the bright present invention, must not limit the present invention.
Embodiment
Embodiment 1-5
It is wire rod (wire rod) implementation of 0.70～1.05%, a diameter of 5.5mm to carbon content
Heat treatment and brass plating are carried out after 2 wire-drawing process, final wire drawing to diameter 0.115mm,
So as to be prepared for monofilament shaped steel wire.Then, it is linear without the steel wire of ripple by wire drawing
Device is given by the first ripple, by giving dress around the first ripple by monofilament shaped steel wire
Put winding 0.5 time and reverse to the second ripple and give the entrance side of device, give ripple
Afterwards, by by monofilament shaped steel wire around the second ripple give device wind 0.5 time and reverse to
Second ripple gives the outlet side of device, so as to give ripple on two different planes.
Device is given by the first ripple, and by with relative to the first ripple imparting device
The second ripple that 100 ° of angle is kept gives device to give ripple.In the case,
The height H of the cycle P and ripple of ripple be it is different, as described in Table 1.Pass through
The method, has made cutting ripple monofilament shaped steel wire.Cutting ripple made by use
Monofilament shaped steel wire cuts silicon ingot (width 156mm x height 156 in MB264 equipment
Mm x length 800mm), cutting is evaluated with the performance of ripple monofilament shaped steel wire,
Evaluation result is shown in table 1 below.
Comparing embodiment 1 and 2
In addition to H/P values as described in Table 1 difference, according to same as Example 1
Mode has manufactured cutting ripple monofilament shaped steel wire.Its various performance is evaluated, is commented
Valency result is shown in table 1 below.
For defect-free surface ratio defective product, damage, indentation, color distortion to wafer,
Difference in thickness detected, and without damage, no indentation, no color distortion,
Without difference in thickness and the wafer with 18% or higher optical-electronic conversion efficiency is evaluated
For defect-free surface product.2,000 wafer is have detected altogether, by the hundred of no defective product
Divide than calculating defect-free surface ratio defective product.
Table 1
Embodiment 6-10
Cutting semiconductor chip ingot (the width 156mm x height in HCT-B5 equipment
156mm x length 1,900mm), and in the linear steel with 0.130mm steel wire diameters
On silk, corrugated periodic P and wave height H are different, as described in Table 2, to cutting
Cut performance to be evaluated, evaluation result is shown in table 2 below.
Comparing embodiment 3 and 4
In addition to corrugated periodic, wave height and H/P values as described in Table 2 difference,
Cutting ripple monofilament shaped steel wire is manufactured according to the same manner as in Example 1.It is each to which
Plant performance to be evaluated, evaluation result is shown in table 2 below.
Table 2
Embodiment 11-15
It is wire rod (wire rod) implementation of 0.70～1.05%, a diameter of 5.5mm to carbon content
Carry out heat treatment and brass plating twice after wire-drawing process, final wire drawing to diameter 0.115mm,
So as to be prepared for monofilament shaped steel wire.Then, it is being linearly without the steel of ripple by wire drawing
Silk gives device by the first ripple, by monofilament shaped steel wire is given around the first ripple
Device winds 0.5 time and is reversed to the second ripple along clockwise direction and give the entrance of device
Side, after ripple is given, is twined by giving device around the second ripple by monofilament shaped steel wire
Reversed around 0.5 time along clockwise direction to the second ripple and give the outlet side of device, so as to
Ripple is given on two different planes.In the case, form the axle of the plane of ripple
Between angle be it is different, as described in Table 3.With it, made cutting
Cut with ripple monofilament shaped steel wire.Cutting made by use is existed with ripple monofilament shaped steel wire
Silicon ingot (width 156mm x height 156mm x length is cut in MB264 equipment
800mm), cutting is evaluated with the performance of ripple monofilament shaped steel wire, evaluation result is shown
In Table 3 below.
Comparing embodiment 5 and 6
Except the angle between the axle of the plane for forming ripple is different as described in Table 3
, cutting ripple monofilament shaped steel wire is manufactured according to 11 identical mode of embodiment.It is right
Its various performance is evaluated, and evaluation result is shown in Table 3 below.
For defect-free surface ratio defective product, damage, indentation, color distortion to wafer,
Difference in thickness detected, and without damage, no indentation, no color distortion,
Without difference in thickness and the wafer with 18% or higher optical-electronic conversion efficiency is evaluated
For defect-free surface product.2,000 wafer is have detected altogether, by the hundred of no defective product
Divide than calculating defect-free surface ratio defective product.
Table 3
Can see from the result of table 1- tables 3, by cutting ripple of the invention
Monofilament shaped steel wire cutting wafer defect-free surface ratio defective product, hence it is evident that higher than those by than
Compared with the defect-free surface ratio defective product of the wafer cut with ripple monofilament shaped steel wire in embodiment.
In addition, the cutting speed in embodiments of the invention is higher than the cutting speed in comparing embodiment
Degree, and therefore the unit interval in working (machining) efficiency be improved, so as to contribute to reduce
Cost.
Cutting ripple monofilament shaped steel wire of the invention has depression fully to keep
Grinding agent, so as to providing required grinding agent carrier property and also improving cutting speed
The efficiency of degree and cutting technique.
In addition, with the enhancing of grinding agent carrier property, cutting ripple monofilament shaped steel wire
Abrasion reduce, carry so as to cutting ripple monofilament shaped steel wire of the invention shows
High life performance, so as to the ripple for being imparted to multiple planes radially divides around central shaft
Cloth, the improvement hence for the surface quality of cut-out portion are highly effective.Thus, according to this
The cutting ripple monofilament shaped steel wire of invention is suitable to cut hard material, such as partly leading
The crystal ingot of body, ceramics and hard alloy, also, especially, can be advantageously used in and cut
Cutting needs the hard material of pinpoint accuracy surface, because the surface matter of cutting workpiece
Amount is required.
Although the present invention is described in detail according to an exemplary embodiment of the invention,
Can there are various modifications in the case of without departing from spirit and the scope of the invention and repair
Change, this is very it will be evident that therefore these various changes to those skilled in the art
Shape and modification are regarded as being included in protection scope of the present invention.
Claims (10)
1. a kind of cutting ripple monofilament shaped steel wire, including single metal wire, its feature
It is,
The metal wire is construed as including with predetermined period, and edge is formed in a longitudinal in
The ripple of two or more planes；
Wave height H is 3～12% divided by the H/P values that corrugated periodic P is obtained；And
When the central shaft from ripple monofilament shaped steel wire is observed, each plane includes an axle,
These axles are mutually staggered with 45～135 ° of angle.
2. cutting according to claim 1 uses ripple monofilament shaped steel wire, its feature to exist
In,
Above-mentioned cutting ripple monofilament shaped steel wire is configured to form in two of Different Plane
Or more ripples are distributed radially around central shaft.
3. cutting according to claim 1 uses ripple monofilament shaped steel wire, its feature to exist
In the ripple monofilament shaped steel after the height Hi of the ripple monofilament shaped steel wire before cutting and cutting
Ratio Hc/Hi of the height Hc of silk is 0.80～0.95%.
4. cutting according to claim 1 uses ripple monofilament shaped steel wire, its feature to exist
In, above-mentioned cutting ripple monofilament shaped steel wire be configured to wave height H, corrugated periodic P,
And cutting ripple monofilament-type gauge of wire d meets following conditions：
P=1～10mm, d=0.03～0.5mm, and
1.2×d≤H≤3.0×d。
5. cutting according to claim 1 uses ripple monofilament shaped steel wire, its feature to exist
In the breakaway poing elongation percentage of above-mentioned cutting ripple monofilament shaped steel wire is 2.0～3.5%.
6. cutting according to claim 1 uses ripple monofilament shaped steel wire, its feature to exist
In, above-mentioned cutting ripple monofilament-type gauge of wire d is 0.110～0.130mm, and
H/P values are 3～11%.
7. cutting according to claim 1 uses ripple monofilament shaped steel wire, its feature to exist
In above-mentioned cutting ripple monofilament shaped steel wire is to form pyrite electricity by brass electroplating carbon steel
Coating and the monofilament shaped steel wire that formed, the carbon content of above-mentioned monofilament shaped steel wire is 0.70%～1.2
Wt%, in brass electroplating layer, copper component is 60～80%.
8. cutting according to claim 1 uses ripple monofilament shaped steel wire, its feature to exist
In the surface of, above-mentioned monofilament shaped steel wire be coated with from by copper, zinc, stannum, nickel, cobalt, chromium and
One or more material selected in the group that its alloy is constituted.
9. cutting according to claim 8 uses ripple monofilament shaped steel wire, its feature to exist
In above-mentioned coating material also includes diamond, carborundum grinding agent and its mixture
In a kind of material.
10. it is a kind of to cut the manufacture method for using ripple monofilament shaped steel wire, including：
By the first ripple imparting device on the monofilament shaped steel wire supplied by feed unit
Ripple is given, first ripple gives device includes a pair of gears, and this pair of gear is constructed
To there is bellows-shaped depression and projection in its surface and rotating in mutually opposite directions；
By device being given around the first ripple wind monofilament shaped steel wire 0.5～3 time so as to edge
Reverse clockwise or counterclockwise the list that device imparts ripple is given by the first ripple
Wire type steel wire, then supplies monofilament shaped steel wire to the second ripple and gives device；
Device is given by the second ripple ripple is being imparted by the first ripple imparting device
Monofilament shaped steel wire ripple on give ripple, second ripple gives device with relative to the
One ripple gives the angle of 45～135 ° of device and is kept；And
By device being given around the second ripple wind monofilament shaped steel wire 0.5～3 time so as to edge
Reverse clockwise or counterclockwise the list that device imparts ripple is given by the second ripple
Wire type steel wire.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20160011691 | 2016-01-29 | ||
| KR10-2016-0011691 | 2016-01-29 | ||
| KR10-2016-0023580 | 2016-02-26 | ||
| KR1020160023580A KR101764529B1 (en) | 2016-01-29 | 2016-02-26 | Corrugated monowire for cutting |
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| Publication Number | Publication Date |
|---|---|
| CN106553274A true CN106553274A (en) | 2017-04-05 |
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| CN201610140394.XA Pending CN106553274A (en) | 2016-01-29 | 2016-03-11 | Cutting ripple monofilament shaped steel wire |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09188983A (en) * | 1996-01-10 | 1997-07-22 | Tokyo Seiko Co Ltd | Forming wavy habit to steel wire |
| CN101039771A (en) * | 2004-12-23 | 2007-09-19 | 贝唐堡阿赛勒股份公司 | Monofilament metal saw wire |
| CN102205563A (en) * | 2011-05-25 | 2011-10-05 | 镇江耐丝新型材料有限公司 | Spiral waveform cutting metal wire as well as manufacturing method and equipment thereof |
| CN102756053A (en) * | 2012-07-25 | 2012-10-31 | 镇江耐丝新型材料有限公司 | Manufacturing method and equipment for cut metal wire with spiral wavy rotating bending parts |
-
2016
- 2016-03-11 CN CN201610140394.XA patent/CN106553274A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09188983A (en) * | 1996-01-10 | 1997-07-22 | Tokyo Seiko Co Ltd | Forming wavy habit to steel wire |
| CN101039771A (en) * | 2004-12-23 | 2007-09-19 | 贝唐堡阿赛勒股份公司 | Monofilament metal saw wire |
| CN102205563A (en) * | 2011-05-25 | 2011-10-05 | 镇江耐丝新型材料有限公司 | Spiral waveform cutting metal wire as well as manufacturing method and equipment thereof |
| CN102756053A (en) * | 2012-07-25 | 2012-10-31 | 镇江耐丝新型材料有限公司 | Manufacturing method and equipment for cut metal wire with spiral wavy rotating bending parts |
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Application publication date: 20170405 |