TWI691378B - Sawing wire - Google Patents

Abstract

The saw wire 2 of the present invention includes a first waveform applying portion 4, a second waveform applying portion 6, a third waveform applying portion 8, and a straight portion 10. The first waveform imparting portion 4 has a wave shape that vibrates on a plane. The second waveform imparting section 6 has a waveform including a first wave component vibrating on a plane and a second wave component vibrating on a plane different from the plane of the first wave component. The third waveform imparting portion 6 has a wave shape that vibrates on a plane different from that of the first waveform imparting portion 4. The straight portion 10 does not have a wave shape. The vibration direction of the first wave component substantially coincides with the vibration direction of the wave in the first waveform imparting portion. The vibration direction of the second wave component substantially coincides with the vibration direction of the wave in the third waveform imparting portion.

Description

Sawing wire

The invention relates to a saw wire. In detail, the present invention relates to an improvement to the waveform of a saw wire.

Saw wire is used for cutting semiconductor ingots. Wafers are obtained by cutting. Use fixed abrasive grain saw wire and free abrasive grain saw wire. The saw wire with a fixed abrasive grain has excellent cutting efficiency. However, the dimensional accuracy of the cutting surface obtained with a fixed abrasive grain saw wire is inferior. From the standpoint of wafer performance, free abrasive grain saw wires are advantageous.

The free abrasive grain saw wire should be sprayed with slurry before cutting. The slurry contains abrasive particles. By the movement of the saw wire, the abrasive particles are introduced between the ingot and the saw wire. By moving the ingot to cut the ingot, the cutting is realized. The saw wire that can introduce more abrasive grains has excellent cutting efficiency. A saw wire that can introduce more abrasive particles can also help to improve the dimensional accuracy of the cutting surface.

Japanese Patent Laid-Open No. 2004-276207 discloses a saw wire that is given a waveform. The waveform has a wavy shape. Waves have mountains and valleys. The grits are added to the valley and travel inside the ingot. The saw wire can introduce more abrasive particles.

Japanese Patent Special Publication No. 2008-519698 discloses a saw wire with the same waveform. This saw wire has two kinds of waves. The vibration direction of one wave is different from the vibration direction of another wave. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2004-276207 [Patent Document 2] Japanese Patent Special Publication 2008-519698

[Problems to be solved by the invention]

Expect to improve the cutting efficiency of the saw wire. It is also expected to further improve the accuracy of the cutting surface. The purpose of the present invention is to provide a saw wire that can meet these requirements. [Technical means to solve the problem]

The saw wire of the present invention has a first waveform imparting portion and a second waveform imparting portion. The first waveform imparting portion has a wave shape that vibrates on a plane. The second waveform imparting section has a waveform including a first wave component that vibrates on a plane and a second wave component that vibrates on a plane different from the plane of the first wave component.

Preferably, the vibration direction of the second wave component is substantially perpendicular to the vibration direction of the first wave component.

In the first waveform imparting portion, mountains and valleys can be alternately arranged. It is preferable that the number of mountains in one first waveform imparting portion is 5 or more and 300 or less.

In the first wave component of the second waveform imparting portion, mountains and valleys can be arranged alternately. It is preferable that the number of mountains of the first wave component in one second waveform imparting section is 5 or more and 300 or less.

In the second wave component of the second waveform imparting portion, mountains and valleys can be alternately arranged. It is preferable that the number of mountains of the second wave component in one second waveform imparting section is 5 or more and 300 or less.

It is preferable that the saw wire further includes a third waveform imparting portion. The third waveform imparting portion has a wave shape that vibrates on a plane different from the plane of the first waveform imparting portion.

It is preferable that the vibration direction of the wave in the third waveform application portion is substantially perpendicular to the vibration direction of the wave in the first waveform application portion.

It is preferable that the vibration direction of the first wave component substantially coincides with the vibration direction of the wave in the first waveform imparting portion, and the vibration direction of the second wave component substantially coincides with the vibration direction of the wave in the third waveform imparting portion.

In the third waveform imparting portion, mountains and valleys may be alternately arranged. The number of mountains in one third waveform imparting section is 5 or more and 300 or less.

It is preferable that the saw wire further includes a straight portion. [Effect of invention]

Since the saw wire of the present invention has two or more types of waveform-imparting portions, the introduction performance of abrasive grains is excellent. With this saw wire, efficient cutting can be achieved. The sawing wire can obtain a cutting surface with better dimensional accuracy.

Hereinafter, the present invention will be described in detail based on preferred embodiments with appropriate reference to the drawings.

The saw wire 2 is shown in FIGS. 1(a) and (b) and FIG. 2. In FIG. 1(a), the vertical direction (Y direction) is the vertical direction, and the horizontal direction (X direction) is the horizontal direction. In FIG. 1(b), the up-down direction (Z direction) is the horizontal direction, and the left-right direction (X direction) is also the horizontal direction. The X direction is also the length direction of the saw wire 2. The saw wire 2 is mounted on the sawing machine, and moves toward the left in FIG. 1(a).

The saw wire 2 has a first waveform applying portion 4, a second waveform applying portion 6, a third waveform applying portion 8 and a straight portion 10. The second waveform imparting section 6 is located further downstream than the first waveform imparting section 4. The third waveform applying portion 8 is located further downstream than the second waveform applying portion 6. The linear portion 10 is located further downstream than the third waveform imparting portion 8. The first waveform imparting section 4, the second waveform imparting section 6, the third waveform imparting section 8, and the linear section 10 form one cycle. In this saw wire 2, a plurality of cycles are regularly arranged in the longitudinal direction. The plural first waveform imparting parts 4, the plural second waveform imparting parts 6, the plural third waveform imparting parts 8, and the plural straight line parts 10 may also be arranged irregularly.

FIG. 2 shows the first waveform applying unit 4. The first waveform imparting portion 4 has a wave shape. 1 (a) and (b) and FIG. 2 together, it can be seen that the wave of the first waveform imparting section 4 vibrates on the X-Y plane. This wave does not vibrate on other planes. This wave is a two-dimensional wave. This wave vibrates at a fixed wavelength. The vibration direction of this wave is the Y direction.

FIG. 3 is an enlarged front view showing a part of the first waveform imparting portion 4 of the saw wire 2 of FIG. 1(a). As described above, the shape of the first waveform imparting portion 4 is a wave that vibrates in the Y direction. The first waveform imparting unit 4 has mountains 12 and valleys 14. The mountains 12 and the valleys 14 are alternately arranged (see also FIG. 1( a )). The first waveform imparting portion 4 supplements abrasive grains in the mountains 12 or valleys 14 and introduces them toward the cutting surface. The number of mountains 12 in one first waveform imparting section 4 is preferably 5 or more and 300 or less, and preferably 10 or more and 200 or less. The number of valleys 14 is approximately the same as the number of mountains 12.

In FIG. 3, the arrow WL1 indicates the wavelength, and the arrow WH1 indicates the wave height. The wavelength WL1 is preferably 0.2 mm or more and 50 mm or less, and particularly preferably 0.3 mm or more and 40 mm or less. The wave height WH1 is preferably 0.10 mm or more and 0.25 mm or less, and particularly preferably 0.11 mm or more and 0.20 mm or less.

Preferably, the wavelength WL1 satisfies the following formula. 1.1*Di≦WL1≦50*Di In this equation, Di represents the wire diameter (see FIG. 2). In other words, the wavelength WL1 is 1.1 times or more and 50 times or less the wire diameter Di. Preferably, the wavelength WL1 is 3 times or more and 40 times or less the wire diameter Di.

The wave height WH1 preferably satisfies the following formula. 1.05*Di≦WH1≦5*Di In this equation, Di represents the wire diameter (see FIG. 2). In other words, the wave height WH1 is 1.05 times or more and 5 times or less the wire diameter Di. Preferably, the wave height WH1 is 1.10 times or more and 3 times or less the wire diameter Di.

4 is an enlarged right side view showing a part of the second waveform imparting portion 6 of the saw wire 2 of FIG. 1. The second waveform imparting section 6 has a wavy waveform. This waveform has a shape obtained by compounding the first wave component 16 and the second wave component 18 schematically shown in FIG. 4. In other words, in the second waveform imparting portion 6, the vibration of the first wave component 16 and the vibration of the second wave component 18 travel simultaneously in the longitudinal direction of the saw wire 2. The waveform can also have a shape that combines more than three kinds of wave components.

The first wave component 16 is schematically shown in FIG. 5. 4 and 5 that the first wave component 16 vibrates on the X-Y plane. The first wave component 16 does not vibrate on other planes. The first wave component 16 is a two-dimensional wave. The first wave component 16 vibrates at a fixed wavelength. The vibration direction of the wave of the first wave component 16 is the Y direction. The vibration direction of the wave of the first wave component 16 coincides with the vibration direction of the wave of the first waveform imparting section 4. The vibration direction of the wave of the first wave component 16 may be different from the vibration direction of the wave of the first waveform imparting section 4.

As shown in FIG. 5, the first wave component 16 has multiple mountains 20 and multiple valleys 22. The mountains 20 and valleys 22 are alternately arranged in the X direction. The saw wire 2 supplements the abrasive grains in the mountains 20 or valleys 22 of the first wave component 16 and introduces them toward the cutting surface. The number of mountains 20 of the first wave component 16 in one second waveform imparting section 6 is preferably 5 or more and 300 or less, and preferably 10 or more and 200 or less. The number of valleys 22 is approximately the same as the number of mountains 20. In FIG. 5, the arrow WL21 indicates the wavelength of the first wave component 16 and the arrow WH21 indicates the wave height of the first wave component 16.

The wavelength WL21 of the first wave component 16 preferably satisfies the following formula. 1.1*Di≦WL21≦50*Di In this equation, Di represents the wire diameter (see FIG. 4). In other words, the wavelength WL21 of the first wave component 16 is 1.1 times or more and 50 times or less the wire diameter Di. Preferably, the wavelength WL21 is 3 times or more and 40 times or less the wire diameter Di.

Preferably, the wave height WH21 of the first wave component 16 satisfies the following formula. 1.05*Di≦WH21≦5*Di In this equation, Di represents the wire diameter (see FIG. 4). In other words, the wave height WH21 of the first wave component 16 is 1.05 times or more and 5 times or less the wire diameter Di. The wave height WH21 is preferably 1.10 times or more and 3 times or less the wire diameter Di.

FIG. 6 schematically shows the second wave component 18. 4 and 6 that the second wave component 18 vibrates on the XZ plane. The second wave component 18 does not vibrate on other planes. The second wave component 18 is a two-dimensional wave. The second wave component 18 vibrates at a fixed wavelength. The vibration direction of the wave of the second wave component 18 is the Z direction. The vibration direction of the second wave component 18 is different from the vibration direction of the first wave component 16. In this embodiment, the vibration direction of the first wave component 16 is substantially perpendicular to the vibration direction of the second wave component 18. In other words, the angle θ _21-22 of the vibration direction of the second wave component 18 relative to the vibration direction of the first wave component 16 is 90° (see FIG. 4 ). The angle θ _21-22 may be other than 90°. The angle θ _{21-22 is} preferably 20° or more and 160° or less, and particularly preferably 30° or more and 150° or less.

As shown in FIG. 6, the second wave component 18 has multiple mountains 24 and multiple valleys 26. The mountains 24 and valleys 26 are alternately arranged along the X direction. The saw wire 2 supplements the abrasive grains in the mountains 24 or valleys 26 of the second wave component 18 and introduces them toward the cutting surface. The number of mountains 24 of the second wave component 18 in one second waveform imparting section 6 is preferably 5 or more and 300 or less, and preferably 10 or more and 200 or less. The number of valleys 26 is approximately the same as the number of mountains 24. In FIG. 6, the arrow WL22 indicates the wavelength of the second wave component 18, and the arrow WH22 indicates the wave height of the second wave component 18.

The wavelength WL22 of the second wave component 18 preferably satisfies the following formula. 1.1*Di≦WL22≦50*Di In this equation, Di represents the wire diameter (see FIG. 4). In other words, the wavelength WL22 of the second wave component 18 is 1.1 times or more and 50 times or less the wire diameter Di. Preferably, the wavelength WL22 is 3 times or more and 40 times or less the wire diameter Di.

Preferably, the wave height WH22 of the second wave component 18 satisfies the following formula. 1.05*Di≦WH22≦5*Di In this equation, Di represents the wire diameter (see FIG. 4). In other words, the wave height WH22 of the second wave component 18 is 1.05 times or more and 5 times or less the wire diameter Di. Preferably, the wave height WH22 is 1.10 times or more and 3 times or less the wire diameter Di.

The wavelength WL22 of the second wave component 18 may be the same as the wavelength WL21 of the first wave component 16. The wavelength WL22 may also be different from the wavelength WL21. The wave height WH22 of the second wave component 18 may be the same as the wave height WH21 of the first wave component 16. Wave height WH22 can also be different from wave height WH21.

As described above, the first wave component 16 and the second wave component 18 are two-dimensional waves. By combining the first wave component 16 and the second wave component 18, a three-dimensional wave is formed. The waveform of the second waveform imparting portion 6 of the saw wire 22 has a three-dimensional shape.

In FIG. 7, a third waveform applying unit 8 is shown. The third waveform imparting portion 8 has a wave shape. 1 (a) and (b) and FIG. 7 together, it can be seen that the wave of the third waveform imparting portion 8 vibrates on the XZ plane. This wave does not vibrate on other planes. This wave is a two-dimensional wave. This wave vibrates at a fixed wavelength. The vibration direction of this wave is the Z direction. This vibration direction is different from the vibration direction of the wave of the first waveform imparting section 4. This vibration direction is substantially perpendicular to the vibration direction of the wave of the first waveform imparting portion 4. In other words, the angle θ _1-3 formed by the vibration direction of the wave of the third waveform imparting portion 8 relative to the vibration direction of the wave of the first waveform imparting portion 4 is 90°. The angle θ _1-3 may be a value other than 90°. The angle θ _{1-3 is} preferably 20° or more and 160° or less, and particularly preferably 30° or more and 150° or less.

The vibration direction of the wave of the third waveform imparting portion 8 coincides with the vibration direction of the wave of the second wave component. The vibration direction of the wave of the third waveform imparting portion 8 may be different from the vibration direction of the wave of the second wave component.

FIG. 8 is an enlarged front view showing a part of the third waveform applying portion 8 of FIG. 7. As described above, the shape of the third waveform imparting portion 8 is a wave that vibrates in the Z direction. The third waveform imparting unit 8 has mountains 28 and valleys 30. A plurality of mountains 28 and a plurality of valleys 30 are alternately arranged (see also FIG. 1(b)). The third waveform imparting portion 8 supplements the abrasive grains in the mountains 28 or valleys 30 and introduces them toward the cutting surface. The number of mountains 28 in one third waveform imparting portion 8 is preferably 5 or more and 300 or less, and preferably 10 or more and 200 or less. The number of valleys 30 is approximately the same as the number of mountains 28.

In FIG. 8, the arrow WL3 indicates the wavelength, and the arrow WH3 indicates the wave height. The wavelength WL3 is preferably 0.2 mm or more and 50 mm or less, and particularly preferably 0.3 mm or more and 40 mm or less. The wave height WH3 is preferably 0.10 mm or more and 0.25 mm or less, and particularly preferably 0.11 mm or more and 0.20 mm or less.

The wavelength WL3 preferably satisfies the following formula. 1.1*Di≦WL3≦50*Di In this equation, Di represents the wire diameter (see FIG. 7). In other words, the wavelength WL3 is 1.1 times or more and 50 times or less the wire diameter Di. Preferably, the wavelength WL3 is 3 times or more and 40 times or less the wire diameter Di.

The wave height WH3 preferably satisfies the following formula. 1.05*Di≦WH3≦5*Di In this equation, Di represents the wire diameter (see FIG. 7). In other words, the wave height WH3 is 1.05 times or more and 5 times or less the wire diameter Di. Preferably, the wave height WH3 is 1.10 times or more and 3 times or less the wire diameter Di.

The wavelength WL3 of the third waveform imparting portion 8 may be the same as the wavelength WL1 of the first waveform imparting portion 4. The wavelength WL3 may also be different from the wavelength WL1. The wave height WH3 of the third waveform imparting portion 8 may be the same as the wave height WH1 of the first waveform imparting portion 4. Wave height WH3 can also be different from wave height WH1. The saw wire 2 may not have the third waveform imparting portion 8. The saw wire 2 that does not have the third waveform applying portion 8 has two types of waveform applying portions, the first waveform applying portion 4 and the second waveform applying portion 6. The saw wire 2 may have four or more types of waveform imparting parts.

In this saw wire 2, abrasive grains are introduced into the various waveform imparting portions. Since these waveform imparting portions have mutually different waveforms, more abrasive particles are introduced. Furthermore, these abrasive particles can be introduced without bias. With the saw wire 2, excellent cutting efficiency can be achieved. The saw wire 2 can also help to improve the dimensional accuracy of the cutting surface.

The straight portion 10 does not have a wave shape. The shape of the saw wire 2 having the straight portion 10 varies widely as a whole. The straight portion 10 can also contribute to the introduction of abrasive particles. The saw wire 2 may not have the straight portion 10. In FIG. 1( b ), the arrow Lm indicates the length of the straight portion 10. The length is preferably 5 mm or more and 50 mm or less, and preferably 10 mm or more and 40 mm or less.

In the present embodiment, the linear portion 10 is sandwiched between the first waveform imparting portion 4 and the third waveform imparting portion 8. The linear portion 10 may be sandwiched between the first waveform application portion 4 and the second waveform application portion 6. The linear portion 10 may be sandwiched between the second waveform application portion 6 and the third waveform application portion 8. The linear portion 10 may be sandwiched between two first waveform imparting portions 4. The linear portion 10 may be sandwiched between two second waveform imparting portions 6. The linear portion 10 may be sandwiched between two third waveform imparting portions 8. The saw wire 2 may not have the straight portion 10.

The wire diameter Di of the saw wire 2 is preferably 0.05 mm or more and 1.00 mm or less, and particularly preferably 0.10 mm or more and 0.20 mm or less. The material of the saw wire 2 is metal. Typical metal carbon steel. It is preferable that the saw wire 2 is formed by plating brass on the surface of the main part made of carbon steel.

9 is a schematic diagram showing a part of the waveform imparting device 32 used in the saw wire 2 of FIG. FIG. 9 also shows the bus bar 34 for the saw wire 2. The bus bar 34 travels in the direction of arrow A in FIG. 9. The waveform imparting device has a first gear pair 36 and a second gear pair 38. The second gear pair 38 is located further downstream than the first gear pair 36. The axis direction of the second gear pair 38 is different from the axis direction of the first gear pair 36. The angle of the axis direction of the second gear pair 38 relative to the axis direction of the first gear pair 36 is preferably 20° or more and 160° or less, and particularly preferably 30° or more and 150° or less. In this embodiment, the angle is 90°.

The first gear pair 36 is composed of an upper gear 40 and a lower gear 42. The upper gear 40 is composed of a tooth portion 44 and a blank portion 46. A plurality of teeth 48 are engraved on the tooth 44. The blank portion 46 does not have teeth 48. The lower gear 42 is also composed of a tooth portion 44 and a blank portion 46. A plurality of teeth 48 are engraved on the tooth 44. The blank portion 46 does not have teeth 48. The tooth portion 44 of the lower gear 42 is at a position corresponding to the tooth portion 44 of the upper gear 40. Therefore, the tooth portion 44 of the lower gear 42 meshes with the tooth portion 44 of the lower gear 42. The blank portion 46 of the lower gear 42 is at a position corresponding to the blank portion 46 of the upper gear 40. When the first gear pair 36 rotates, the tooth portion 44 and the blank portion 46 appear alternately in the nip portion of the upper gear 40 and the lower gear 42.

The second gear pair 38 is composed of a left gear 50 and a right gear. The right gear is not shown in FIG. 9. The right gear is blocked by the left gear 50. The left gear 50 is composed of a tooth portion 44 and a blank portion 46. A plurality of teeth 48 are engraved on the tooth 44. The blank portion 46 does not have teeth 48. Although not shown, the right gear is composed of the tooth portion 44 and the blank portion 46 similarly to the left gear 50. A plurality of teeth 48 are engraved on the tooth 44. The blank portion 46 does not have teeth 48. The tooth portion 44 of the right gear is at a position corresponding to the tooth portion 44 of the left gear 50. Therefore, the tooth portion 44 of the right gear meshes with the tooth portion 44 of the left gear 50. The blank portion 46 of the right gear is at a position corresponding to the blank portion 46 of the left gear 50. When the second gear pair 38 rotates, the tooth portion 44 and the blank portion 46 appear alternately in the nip portion of the left gear 50 and the right gear.

The bus bar 34 passes through the first gear pair 36. When the clamping portion is a tooth portion 44, the portion of the bus bar 34 passing through the first gear pair 36 undergoes plastic deformation. This plastic deformation gives the bus bar 34 a wave component that vibrates in the Y direction. When the clamping portion is a blank portion 46, the portion of the bus bar 34 that passes the first gear pair 36 does not undergo plastic deformation.

After passing through the first gear pair 36, the bus bar 34 passes through the second gear pair 38. When the clamping portion is a tooth portion 44, the portion of the bus bar 34 passing through the second gear pair 38 is plastically deformed. This plastic deformation gives the bus bar 34 a wave component that vibrates in the Z direction. When the clamping portion is the blank portion 46, the portion of the bus bar 34 that passes the second gear pair 38 is not plastically deformed.

In the generatrix 34, the portion plastically deformed by the first gear pair 36 and not plastically deformed by the second gear pair 38 has a wave shape that vibrates in the Y direction. This part is the first waveform imparting unit 4.

In the bus bar 34, the portion plastically deformed by the first gear pair 36 and also plastically deformed by the second gear pair 38 has a waveform including a wave component vibrating in the Y direction and a wave component vibrating in the Z direction. This part is the second waveform imparting section 6.

The portion of the bus bar 34 that is not plastically deformed by the first gear pair 36 but plastically deformed by the second gear pair 38 has a wave shape that vibrates in the Z direction. This part is the third waveform imparting section 8.

In the bus bar 34, the portion that is not plastically deformed by the first gear pair 36 and also not plastically deformed by the second gear pair 38 does not have a wave shape. This part is a linear part 10. [Example]

Hereinafter, although the effects of the present invention are shown by the examples, the present invention should not be limitedly interpreted based on the description of the examples.

[Example 1] Make the saw wire shown in Figure 1-8. The specifications of the saw wire are shown in Table 1 below. The saw wire is made of carbon steel plated with brass.

[Example 2] The saw wire of Example 2 was obtained in the same manner as Example 1 except that the straight portion was not provided.

[Example 3] A saw wire of Example 3 was obtained in the same manner as Example 1 except that the third waveform providing portion was not provided.

[Example 4] The saw line of Example 4 was obtained in the same manner as Example 1 except that the straight line portion and the third waveform providing portion were not provided.

[Comparative Example 1] The saw wire of Comparative Example 1 was obtained in the same manner as in Example 1 except that only the second waveform imparting portion was provided.

[Comparative Example 2] Prepare the conventional saw wire. The saw wire does not have a wavy shape.

[Experiment 1] Install each saw wire on the sawing machine. A slurry containing abrasive particles is coated on the surface of the saw wire. The saw wire was moved at a speed of 0.6 mm/min to cut the glass plate. Observe the roughness and waviness of the obtained cutting surface to evaluate. The results are shown as indexes in Tables 1 and 2 below. The larger the value, the better the evaluation.

[Experiment 2] The roughness and waviness of the cutting surface were evaluated in the same manner as in Experiment 1 except that the running speed of the saw wire was set to 0.8 mm/min. The results are shown as indexes in Tables 1 and 2 below. The larger the value, the better the evaluation.

[Table 1]

[Table 2]

As shown in Tables 1 and 2, the saw wire of the example obtained a more excellent evaluation than the saw wire of the comparative example. The evaluation result can clearly show the advantages of the present invention. [Industry availability]

The saw wire of the invention can be used for cutting various articles.

2: sawing wire 4: The first waveform giving section 6: Second waveform giving section 8: The third waveform giving section 10: straight line 12, 20, 24, 28: Mountain 14, 22, 26, 30: Valley 16: The first wave of components 18: Second wave component 32: Waveform-imparting device 34: Busbar 36: First gear pair 38: Second gear pair 40: Upper gear 42: Lower gear 44: Teeth 46: blank section 48: tooth 50: left gear

FIG. 1(a) is a partial front view of a saw wire according to an embodiment of the present invention, and FIG. 1(b) is a plan view of the saw wire of FIG. 1(a). FIG. 2 is an enlarged right side view showing the first waveform imparting portion of the saw wire of FIG. 1. FIG. FIG. 3 is an enlarged front view showing a part of the first waveform imparting portion of FIG. 2. FIG. 4 is an enlarged right side view showing a part of the second waveform imparting portion of the saw wire of FIG. 1. FIG. 5 is a schematic diagram showing the first wave component of the second waveform imparting section of FIG. 4. 6 is a schematic diagram showing the second wave component of the second waveform imparting section of FIG. 4. 4 is an enlarged right side view showing the third waveform imparting portion of the saw wire of FIG. 1. FIG. 8 is an enlarged front view showing a part of the third waveform imparting portion of FIG. 7. FIG. 9 is a schematic diagram showing a part of the waveform imparting device used for the saw wire of FIG.

2: sawing wire

4: The first waveform giving section

6: Second waveform giving section

8: The third waveform giving section

10: straight line

Claims (8)

A saw wire comprising a first waveform imparting portion and a second waveform imparting portion, the first waveform imparting portion has a wave shape vibrating on a plane, and the second waveform imparting portion has a first wave component included in a plane vibration And the waveform of the second wave component that vibrates on a plane different from the plane of the first wave component. The saw wire according to claim 1, wherein the vibration direction of the second wave component is substantially perpendicular to the vibration direction of the first wave component. The saw wire according to claim 1 or 2, wherein mountains and valleys are alternately arranged in the first waveform imparting portion, and the number of mountains in one first waveform imparting portion is 5 or more and 300 or less. The saw wire according to claim 1, further comprising a third waveform applying portion having a wave shape that vibrates on a plane different from the plane of the first waveform applying portion. The saw wire according to claim 4, wherein the vibration direction of the wave in the third waveform imparting portion is substantially perpendicular to the vibration direction of the wave in the first waveform imparting portion. The saw wire according to claim 4 or 5, wherein the vibration direction of the first wave component substantially coincides with the vibration direction of the wave in the first waveform imparting portion, and the vibration direction of the second wave component substantially corresponds to The vibration directions of the waves in the third waveform imparting section coincide. The saw wire according to claim 4 or 5, wherein in the third waveform imparting portion, mountains and valleys are alternately arranged, and the number of mountains in one third waveform imparting portion is 5 or more and 300 or less. The saw wire according to claim 1 or 2, further including a straight portion.

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